CN101444148B - 提高euv和/或软x射线灯的转换效率的方法及相应装置 - Google Patents

提高euv和/或软x射线灯的转换效率的方法及相应装置 Download PDF

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Publication number
CN101444148B
CN101444148B CN200780017732XA CN200780017732A CN101444148B CN 101444148 B CN101444148 B CN 101444148B CN 200780017732X A CN200780017732X A CN 200780017732XA CN 200780017732 A CN200780017732 A CN 200780017732A CN 101444148 B CN101444148 B CN 101444148B
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China
Prior art keywords
liquid material
discharge space
gas
euv
soft
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Expired - Fee Related
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CN200780017732XA
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English (en)
Chinese (zh)
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CN101444148A (zh
Inventor
J·琼克斯
D·M·沃德雷芬格
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Ushio Denki KK
Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/002—Supply of the plasma generating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/008—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation
    • H05G2/0082—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation the energy-carrying beam being a laser beam
    • H05G2/0088—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation the energy-carrying beam being a laser beam for preconditioning the plasma generating material

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Luminescent Compositions (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN200780017732XA 2006-05-16 2007-05-08 提高euv和/或软x射线灯的转换效率的方法及相应装置 Expired - Fee Related CN101444148B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP06113972 2006-05-16
EP06113972.1 2006-05-16
PCT/IB2007/051716 WO2007135587A2 (en) 2006-05-16 2007-05-08 A method of increasing the conversion efficiency of an euv and/or soft x-ray lamp and a corresponding apparatus

Publications (2)

Publication Number Publication Date
CN101444148A CN101444148A (zh) 2009-05-27
CN101444148B true CN101444148B (zh) 2013-03-27

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CN200780017732XA Expired - Fee Related CN101444148B (zh) 2006-05-16 2007-05-08 提高euv和/或软x射线灯的转换效率的方法及相应装置

Country Status (9)

Country Link
US (1) US8040030B2 (enExample)
EP (1) EP2020165B1 (enExample)
JP (1) JP5574705B2 (enExample)
KR (1) KR101396158B1 (enExample)
CN (1) CN101444148B (enExample)
AT (1) ATE489839T1 (enExample)
DE (1) DE602007010765D1 (enExample)
TW (1) TWI420976B (enExample)
WO (1) WO2007135587A2 (enExample)

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US20080239262A1 (en) * 2007-03-29 2008-10-02 Asml Netherlands B.V. Radiation source for generating electromagnetic radiation and method for generating electromagnetic radiation
JP5386799B2 (ja) * 2007-07-06 2014-01-15 株式会社ニコン Ｅｕｖ光源、ｅｕｖ露光装置、ｅｕｖ光放射方法、ｅｕｖ露光方法および電子デバイスの製造方法
DE102007060807B4 (de) * 2007-12-18 2009-11-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gasentladungsquelle, insbesondere für EUV-Strahlung
KR20100102682A (ko) * 2007-12-27 2010-09-24 에이에스엠엘 네델란즈 비.브이. 극자외 방사선 소스 및 극자외 방사선을 생성하는 방법
NL2002890A1 (nl) 2008-06-16 2009-12-17 Asml Netherlands Bv Lithographic apparatus.
EP2308272B1 (en) * 2008-07-28 2012-09-19 Philips Intellectual Property & Standards GmbH Method and device for generating euv radiation or soft x-rays
JP4623192B2 (ja) * 2008-09-29 2011-02-02 ウシオ電機株式会社 極端紫外光光源装置および極端紫外光発生方法
CN102257883B (zh) 2008-12-16 2014-06-25 皇家飞利浦电子股份有限公司 用于以提高的效率生成euv辐射或软x射线的方法和装置
JP5245857B2 (ja) * 2009-01-21 2013-07-24 ウシオ電機株式会社 極端紫外光光源装置
JP5504673B2 (ja) * 2009-03-30 2014-05-28 ウシオ電機株式会社 極端紫外光光源装置
CN103281855B (zh) * 2013-05-16 2015-10-14 中国科学院光电研究院 一种用于激光光源的液态金属靶产生装置
CN104394642B (zh) * 2014-12-07 2017-03-08 湖南科技大学 激光等离子体共振x光源
CN105376919B (zh) * 2015-11-06 2017-08-01 华中科技大学 一种激光诱导液滴靶放电产生等离子体的装置
RU2670273C2 (ru) * 2017-11-24 2018-10-22 Общество с ограниченной ответственностью "РнД-ИСАН" Устройство и способ для генерации излучения из лазерной плазмы
JP7156331B2 (ja) * 2020-05-15 2022-10-19 ウシオ電機株式会社 極端紫外光光源装置
KR20250109087A (ko) 2024-01-09 2025-07-16 한국표준과학연구원 레이저 생성 플라즈마를 사용하는 극자외선 발생 장치 및 방법

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CN1306673A (zh) * 1997-12-31 2001-08-01 中佛罗里达大学 放电灯光源装置和方法
CN1539254A (zh) * 2001-06-07 2004-10-20 �����ι�˾ 星形箍缩的x射线和远紫外线光子来源
CN1650676A (zh) * 2002-04-30 2005-08-03 皇家飞利浦电子股份有限公司 产生远紫外辐射的方法

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JPS63164199A (ja) * 1986-12-25 1988-07-07 Shimadzu Corp Ｘ線発生装置用タ−ゲツト装置
US5866871A (en) 1997-04-28 1999-02-02 Birx; Daniel Plasma gun and methods for the use thereof
US6972421B2 (en) * 2000-06-09 2005-12-06 Cymer, Inc. Extreme ultraviolet light source
JP2002214400A (ja) 2001-01-12 2002-07-31 Toyota Macs Inc レーザープラズマｅｕｖ光源装置及びそれに用いられるターゲット
TW589924B (en) * 2001-04-06 2004-06-01 Fraunhofer Ges Forschung Process and device for producing extreme ultraviolet ray/weak x-ray
CN101795527B (zh) * 2002-09-19 2013-02-20 Asml荷兰有限公司 辐射源、光刻装置和器件制造方法
EP1401248B1 (en) 2002-09-19 2012-07-25 ASML Netherlands B.V. Radiation source, lithographic apparatus, and device manufacturing method
SG129259A1 (en) * 2002-10-03 2007-02-26 Asml Netherlands Bv Radiation source lithographic apparatus, and device manufacturing method
US7002168B2 (en) * 2002-10-15 2006-02-21 Cymer, Inc. Dense plasma focus radiation source
US20050025280A1 (en) 2002-12-10 2005-02-03 Robert Schulte Volumetric 3D x-ray imaging system for baggage inspection including the detection of explosives
DE10310623B8 (de) * 2003-03-10 2005-12-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Erzeugen eines Plasmas durch elektrische Entladung in einem Entladungsraum
JP4052155B2 (ja) * 2003-03-17 2008-02-27 ウシオ電機株式会社 極端紫外光放射源及び半導体露光装置
EP1642482B1 (en) * 2003-06-27 2013-10-02 Bruker Advanced Supercon GmbH Method and device for producing extreme ultraviolet radiation or soft x-ray radiation
DE10342239B4 (de) 2003-09-11 2018-06-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Erzeugen von Extrem-Ultraviolettstrahlung oder weicher Röntgenstrahlung
FR2860385B1 (fr) 2003-09-26 2007-06-01 Cit Alcatel Source euv
JP2005141158A (ja) 2003-11-10 2005-06-02 Canon Inc 照明光学系及び露光装置
DE10359464A1 (de) 2003-12-17 2005-07-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Erzeugen von insbesondere EUV-Strahlung und/oder weicher Röntgenstrahlung
US7075096B2 (en) * 2004-02-13 2006-07-11 Plex Llc Injection pinch discharge extreme ultraviolet source

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1306673A (zh) * 1997-12-31 2001-08-01 中佛罗里达大学 放电灯光源装置和方法
CN1539254A (zh) * 2001-06-07 2004-10-20 �����ι�˾ 星形箍缩的x射线和远紫外线光子来源
CN1650676A (zh) * 2002-04-30 2005-08-03 皇家飞利浦电子股份有限公司 产生远紫外辐射的方法

Also Published As

Publication number Publication date
WO2007135587A3 (en) 2008-04-24
KR20090021168A (ko) 2009-02-27
US20090206268A1 (en) 2009-08-20
KR101396158B1 (ko) 2014-05-19
JP2009537943A (ja) 2009-10-29
TWI420976B (zh) 2013-12-21
WO2007135587A2 (en) 2007-11-29
DE602007010765D1 (de) 2011-01-05
CN101444148A (zh) 2009-05-27
TW200814858A (en) 2008-03-16
EP2020165A2 (en) 2009-02-04
US8040030B2 (en) 2011-10-18
ATE489839T1 (de) 2010-12-15
JP5574705B2 (ja) 2014-08-20
EP2020165B1 (en) 2010-11-24

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Address after: Holland Ian Deho Finn

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Granted publication date: 20130327