CN101382688B - 用于层压紫外线固化型波导材料的方法和装置 - Google Patents

用于层压紫外线固化型波导材料的方法和装置 Download PDF

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CN101382688B
CN101382688B CN2008102143682A CN200810214368A CN101382688B CN 101382688 B CN101382688 B CN 101382688B CN 2008102143682 A CN2008102143682 A CN 2008102143682A CN 200810214368 A CN200810214368 A CN 200810214368A CN 101382688 B CN101382688 B CN 101382688B
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optical wave
film
guide materials
substrate
materials
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CN101382688A (zh
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柳泽贤司
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Shinko Electric Industries Co Ltd
Shinko Electric Co Ltd
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Shinko Electric Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B32B37/1018—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure using only vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
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    • B29C65/1403—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the type of electromagnetic or particle radiation
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    • B29C66/81266—Optical properties, e.g. transparency, reflectivity
    • B29C66/81267—Transparent to electromagnetic radiation, e.g. to visible light
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
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    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/71—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the composition of the plastics material of the parts to be joined
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    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B32B2310/0831—Treatment by energy or chemical effects by wave energy or particle radiation using electromagnetic radiation using UV radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2551/00—Optical elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor

Abstract

本发明公开一种用于层压紫外线固化型波导材料的方法和装置。将基板(31)和紫外线固化型波导材料(32)置于一对膜(41、42)之间，对所述一对膜之间的部分减压或者将外部压力施加到所述膜上，从而将所述紫外线固化型波导材料层压到所述基板上，并且同时将紫外线通过所述膜照射到所述紫外线固化型波导材料上以固化所述波导材料。

Description

用于层压紫外线固化型波导材料的方法和装置
技术领域
本发明涉及用于层压紫外线固化型波导材料的方法和装置，更具体地，涉及可以同时执行层压处理和紫外线照射处理的用于层压紫外线固化型波导材料的方法和装置。
背景技术
传统上，在层压紫外线固化型波导材料的情况下，在执行层压处理之后执行紫外线照射处理。因此，需要执行包括层压处理和紫外线照射处理在内的两个单独处理。相应地，增加了制造时间和成本。此外，由于在层压处理之后树脂材料是未固化的，因此会担心可能产生变形或剥离。
作为层压紫外线固化型波导材料的传统方法的实例，下面将参考图1至图4描述制造光学波导的情况。
首先，在图1A中，将第一光学波导材料12层压至基板11上。基板11是薄板形的，并且例如使用诸如丙烯酸树脂板或聚碳酸酯板等树脂板或金属板。对于第一光学波导材料12，通常使用紫外线固化型环氧基树脂材料或其它紫外线固化型材料，例如丙烯基、含氟聚酰亚胺基或硅树脂基紫外线固化型材料。
图2A和图2B示出用于执行图1A的步骤的方法和装置，其中通过排气法将第一光学波导材料12层压至基板11上。将被层压的材料，即基板11固定到层压膜21(壳体21a)侧，将基板11和未固化的第一光学波导材料12置于两个层压膜21和22之间，使两个层压膜21和22之间减压并排气(箭头A)，然后使用空气从层压膜22外侧对第一光学波导材料12侧施加均匀的负载(箭头B)。如图1B所示，通过该层压步骤使第一光学波导材料12与层压基板11结合。
接下来，在图1C中，将紫外线照射到第一光学波导材料12(箭头C)上以使第一光学波导材料12固化。除了照射紫外线以使第一光学波导材料12固化的情况以外，在一些情况下还可以通过化学固化方法使第一光学波导材料12固化。
接下来，在图1D中，第一光学波导材料12层压至基板11上，并进一步将第二光学波导材料13层压至固化的第一光学波导材料12上。
图3A和图3B示出用于执行图1D所示步骤的方法和装置，其中通过排气法将第二光学波导材料13层压至第一光学波导材料12上。将由基板11和固化的第一光学波导材料12构成的层压制品以及未固化的第二光学波导材料13置于两个层压膜23和24之间，并且使两个层压膜23和24之间的部分减压和排气(箭头A)，然后使用空气从层压膜24外侧对第二光学波导材料13侧(箭头B)施加均匀的负载。通过该层压步骤，将由基板11和固化的第一光学波导材料12构成的层压制品以及未固化的第二光学波导材料13层压起来。在图1E中示出由基板11、第一光学波导材料12和第二光学波导材料13构成的层压制品。
接下来，在图1F中，通过使用掩模15的公知方法来曝光和图案化第二光学波导材料13。在图1G中示出经过如此曝光和图案化的层压制品。在图1H中，使第二光学波导材料13显影以完成图案化。
在图1I中，将第三光学波导材料14层压至第二光学波导材料13上。第三光学波导材料14的材料与第一光学波导材料12的材料相同。
图4A和图4B示出用于执行图1I所示步骤的方法和装置，其中通过排气法将第三光学波导材料14层压至第二光学波导材料13上。将由基板11、固化的第一光学波导材料12和未固化的第二光学波导材料13构成的层压制品以及第三光学波导材料14置于两个层压膜25和26之间，并且使两个层压膜25和26之间的部分减压和排气(箭头A)，然后使用空气从层压膜26外侧对第三光学波导材料14侧(箭头B)施加均匀的负载。
图1J示出通过该层压步骤制造的由基板11、第一光学波导材料12、第二光学波导材料13和第三光学波导材料14构成的层压制品。
随后，在图1K中，在第三光学波导材料14上照射紫外线以使第三光学波导材料14固化。除了照射紫外线以使第三光学波导材料14固化的情况以外，在一些情况下还可以通过化学固化法使第三光学波导材料14固化。
如上所述，根据层压紫外线固化型波导材料的传统方法，执行层压处理，然后再执行紫外线照射步骤。此外，层压处理使用如下方法：通过将层压材料(未固化)和被层压的材料(通常是固化的)置于层压膜之间并进行排气，然后使用空气进行均匀加压。对于在具有凹凸部分的材料上进行层压的情况，相应地，使用挤压的层压法具有会将气泡混合到层压表面中的问题。在使用真空加压的传统层压方法中，可以避免这个问题。
作为现有技术，特开平7-218921A(专利文献1)已经披露了一种制造液晶面板的方法，其中，在制造液晶面板的情况下，将在空气中结合的一对基片放置在真空中并且从放置在真空中的一对基片两侧施加压力。
特开平8-201747A(专利文献2)已经披露了一种制造液晶面板的方法，其中，当要将多个玻璃基片粘附到一个玻璃基片上时，通过包含间隙保持材料的紫外线固化树脂来分别覆盖所述一个玻璃基片和多个玻璃基片，通过较小玻璃基片的各个外围位置处的分隔物形成闭合室，对每个闭合室减压以对空气中的玻璃基片加压，然后用紫外线照射紫外线固化树脂以使紫外线固化树脂固化。
此外，在特开平11-293202A(专利文献3)中，其目的是实施层压以满足诸如在层压中对准两个基片、紫外线照射或均匀加压以及结合基片等所需功能。通过切换排气装置和加压供气装置来对两个基片均匀地加压并使其结合，此外，紫外线透射通过紫外线透射板和上基片并由此照射在上基片和下基片之间的密封部件上，从而使得密封部件中的紫外线固化树脂固化。
根据参考图1至图4描述的层压紫外线固化型波导材料的传统方法，在执行层压基片的步骤之后执行照射紫外线的步骤。因此，需要执行包括基片层压处理和紫外线照射处理在内的两个单独处理。相应地，增加了制造时间和成本。此外，由于在层压处理后树脂材料是未固化的，因此存在可能引起变形和剥离的顾虑。
在专利文献1所披露的液晶面板制造方法中，提出将对一对基片排气以及使用空气均匀加压相结合的基片层压方法。然而，该基片层压方法适用于制造液晶面板的处理，而不适用于层压紫外线固化型波导材料的情况。此外，未披露紫外线照射处理。
在专利文献2所披露的液晶面板制造方法中，在层压一个玻璃基片和多个玻璃基片以使紫外线固化树脂固化的情况下，与现有技术一样，需要在执行基片层压步骤之后执行紫外线照射步骤。因此，需要执行包括基片层压处理和紫外线照射处理在内的两个单独处理。相应地，增加了制造时间和成本。
此外，在专利文献3所披露的液晶面板制造方法中，在层压多个基片的情况下，通过使用包括排气和利用空气加压在内的两种方法来均匀地加压和结合多个基片，并且执行紫外线固化作为随后的步骤。因此，与现有技术一样，需要在执行基片层压步骤之后执行紫外线照射步骤。因此，需要执行包括基片层压处理和紫外线照射处理在内的两个单独处理。相应地，增加了制造时间和成本。
发明内容
因此，本发明的目的是提供一种用于层压紫外线固化型波导材料的方法和装置，在将至少两个紫外线固化型光学波导材料相互层压并且将紫外线照射到两个紫外线固化型波导材料的至少一个上以进行固化的情况下，该方法和装置可以相应地较少制造时间和成本，而不需要执行包括材料层压处理和紫外线照射处理在内的两个单独处理，并且通过在同一处理中执行层压和通过紫外线照射进行固化的操作，可以防止层压后树脂导致材料发生变形和剥离。
为了达到该目的，根据本发明的第一方面，提供一种层压紫外线固化型树脂材料的方法，包括以下步骤：
将基板和紫外线固化型树脂材料置于一对膜之间；以及
通过对所述一对膜之间的部分减压或者通过对所述膜施加外部压力而将所述树脂材料层压到所述基板上，同时使紫外线通过所述膜照射在所述树脂材料上以固化所述树脂材料。
此外，根据本发明的第二方面，提供一种层压紫外线固化型波导材料的方法，包括以下步骤：
通过加压将第一光学波导材料层压到基板上，同时使紫外线照射在所述第一光学波导材料上以固化所述第一光学波导材料；
通过加压将第二光学波导材料层压到所述第一光学波导材料上，同时使紫外线通过掩模照射在所述第二光学波导材料上以执行图案化；以及
通过加压将第三光学波导材料层压到所述第二光学波导材料上，同时使紫外线照射在所述第三光学波导材料上以固化所述第三光学波导材料。
根据本发明的第三方面，在本发明的第二方面中，优选的是，所述第一光学波导材料、所述第二光学波导材料和所述第三光学波导材料都是紫外线固化型树脂材料；
所述第二光学波导材料至少具有与所述第一光学波导材料和所述第三光学波导材料中的每一个都不相同的折射率组成。
此外，根据本发明的第四方面，提供一种用于层压紫外线固化型树脂材料的装置，包括：
层压装置，其用于在将基板和所述紫外线固化型树脂材料置于一对膜之间后，通过对所述一对膜之间的部分减压或者通过将外部压力施加到所述膜上而将所述紫外线固化型树脂材料层压到所述基板上；以及
照射装置，其用于使紫外线通过所述膜照射到所述树脂材料上，其中，
所述层压装置设置有开口部分，并且，
在所述开口部分上设置有能够透射紫外线的耐压玻璃，以便在由所述层压装置执行层压步骤的同时由所述照射装置利用紫外线进行照射。
根据本发明的第五方面，在本发明的第四方面中，优选的是，所述紫外线固化型树脂材料是由紫外线固化型树脂制成的波导材料。
根据本发明的第六方面，在本发明的第二方面中，优选的是，所述第二光学波导材料的折射率组成大于所述第一光学波导材料和所述第三光学波导材料中每一个的折射率组成。
根据本发明，可以在一个步骤的处理中执行包括材料层压处理和紫外线照射处理在内的两个单独处理。因此，可以相应地减少制造时间和成本。此外，通过在同一处理中执行层压和使用紫外线照射进行固化的操作，可以防止层压后树脂导致材料发生变形和剥离。
附图说明
图1A至图1K是示出用于层压紫外线固化型波导材料的传统工序的视图。
图2A和图2B是示出在图1的传统实例中通过排气法在基板上层压第一光学波导材料的方法和装置的视图。
图3A和图3B是示出在图1的传统实例中通过排气法在第一光学波导材料上层压第二光学波导材料的方法和装置的视图。
图4A和图4B是示出在图1的传统实例中通过排气法在第二光学波导材料上层压第三光学波导材料的方法和装置的视图。
图5A至图5G是示出根据本发明实施例的层压紫外线固化型波导材料的工序的视图。
图6A和图6B是示出在图5的实施例中用于在基板上层压第一光学波导材料并照射紫外线的方法和装置的视图。
图7A和图7B是示出在图5的实施例中用于在由基板和第一光学波导材料构成的层压制品上层压第二光学波导材料并执行图案化的方法和装置的视图。
图8A和图8B是示出在图5的实施例中用于层压第三光学波导材料并照射紫外线的方法和装置的视图。
图9A至图9I是示出根据本发明另一个实施例的层压紫外线固化型波导材料的工序的视图。
图10A和图10B是示出在图9的实施例中用于在基板上层压第一光学波导材料并照射紫外线的方法和装置的视图。
图11A和图11B是示出在图9的实施例中用于层压第三光学波导材料并照射紫外线的方法和装置的视图。
具体实施方式
下面参考附图详细描述根据本发明的实施例。
图5A至图5G和图6至图8示出根据本发明的用于层压紫外线固化型波导材料的方法和装置的第一实施例。
首先，在图5A中，将第一光学波导材料32层压到紫外线透射型基板31(要被层压的材料)的一个表面(下表面)上，同时使紫外线通过基板31照射到第一光学波导材料32上以固化第一光学波导材料32。基板31是薄板型的，并且与传统技术一样，可以使用诸如丙烯酸树脂板或聚碳酸酯板等树脂板或金属板。对于第一光学波导材料32，与传统技术一样，通常可以使用紫外线固化型环氧基树脂材料或其它丙烯基、含氟聚酰亚胺基或硅树脂基紫外线固化型材料。
图6A和图6B示出图5A的方法和装置，根据本发明第一实施例，该方法和装置用于同时执行在基板31上层压第一光学波导材料32的步骤和使紫外线通过基板31照射到第一光学波导材料32上以使第一光学波导材料32固化的步骤。将要被层压的材料，即基板31固定到上层压膜41(上壳体41a)侧，将基板31和未固化的第一光学波导材料32置于两个层压膜41和42之间，并且使两个层压膜41和42之间的部分减压并排气(箭头A)，然后通过下壳体42a的加压口42c将加压空气施加到壳体中，并使用空气从层压膜42的外侧(下侧)对第一光学波导材料32侧施加均匀的负载(箭头B)。在沿着箭头A方向进行排气时，下壳体42a的加压口42c闭合并且上壳体41a的吸气口41c打开。另一方面，在沿着箭头B的方向施加加压空气时，下壳体42a的加压口42c打开并且上壳体41a的吸气口41c闭合。
在这些情况下，在根据本发明的实施例中，假定两个层压膜41和42都是紫外线透射型。此外，上壳体41a具有由可以透射紫外线的耐压玻璃形成的窗口部分41b。窗口部分41b的面积稍大于基板31或第一光学波导材料32的面积，并且从上方通过窗口部分41b照射的紫外线还通过上层压膜41照射到第一光学波导材料32上。通过该层压步骤，将第一光学波导材料32层压到基板31上，并且在图5B中示出在紫外线照射步骤中固化的第一光学波导材料32。
接下来，如箭头D所示，将由基板31和第一光学波导材料32构成的层压制品上下翻转。
随后，在图5C中，将第二光学波导材料33层压在由基板31和第一光学波导材料32构成的层压制品上，并且同时通过使用掩模35将紫外线照射在第二光学波导材料33上(箭头C)以使第二光学波导材料33固化。如图5D所示，相应地，透射通过掩模35的开口部分35a的紫外线在第二光学波导材料33中产生曝光部分33a和未曝光部分33b。
图7A和图7B示出图5C的方法和装置，根据本发明的第一实施例，该方法和装置用于同时执行在由基板31和第一光学波导材料32构成的层压制品上层压第二光学波导材料33的步骤和在第二光学波导材料33上照射紫外线以使第二光学波导材料33固化的步骤。将要被层压的材料，即由基板31和第一光学波导材料32构成的层压制品固定到下层压膜42侧，将层压制品和未固化的第二光学波导材料33置于两个层压膜41和42之间，对两个层压膜41和42之间的部分减压和排气(箭头A)，然后通过下壳体42a的加压口42c将加压空气施加到壳体中并且使用空气从层压膜42的外侧(下侧)对第一光学波导材料32侧施加均匀负载(箭头B)。与图6的情况一样，在沿着箭头A方向排气时，下壳体42a的加压口42c闭合并且上壳体41a的吸气口41c打开。另一方面，在沿着箭头B的方向施加加压空气时，下壳体42a的加压口42c打开并且上壳体41a的吸气口41c闭合。
此外，与图6A和6B的情况一样，假定两个层压膜41和42都是紫外线透射型。此外，在上壳体41a中，掩模35设置在由可以透射紫外线的耐压玻璃形成的窗口部分41b上。窗口部分41b的面积稍大于基板31或第一光学波导材料32的面积，并且从上方通过窗口部分41b照射的紫外线还通过上层压膜41照射在第二光学波导材料33上。通过该层压步骤，将第二光学波导材料33层压到第一光学波导材料32上，并且在图5D中示出在紫外线照射步骤中固化的第二光学波导材料33。
接下来，在图5E中，执行显影以完成对如下部分的图案化：即，使用掩模35通过在第二光学波导材料33上照射紫外线而固化的部分。相应地，留下第二光学波导材料33中固化的曝光部分33a，并移除未曝光部分33b。
随后，将由基板31、第一光学波导材料32和第二光学波导材料33(曝光和固化部分)构成的层压制品上下(箭头D)翻转。
然后，在图5F中，将第三光学波导材料34层压到由基板31、第一光学波导材料32和第二光学波导材料33(曝光和固化部分)构成的层压制品的第二光学波导材料33上。第三光学波导材料34的材料与第一光学波导材料32的材料相同。
图8A和图8B示出图5F中的方法和装置，根据本发明的第一实施例，该方法和装置用于同时执行在由基板31、第一光学波导材料32和第二光学波导材料33构成的层压制品的第二光学波导材料33上层压第三光学波导材料34的步骤和在第三光学波导材料34上照射紫外线以使第三光学波导材料34固化的步骤。
将要被层压的材料，即由基板31、第一光学波导材料32和第二光学波导材料33构成的层压制品固定到上层压膜41侧，将层压制品和未固化的第三光学波导材料34置于两个层压膜41和42之间，对两个层压膜41和42之间的部分减压和排气(箭头A)，然后通过下壳体42a的加压口42c将加压空气施加到壳体中并且使用空气从层压膜42的外侧(下侧)对第三光学波导材料34侧施加均匀负载(箭头B)。
此外，下壳体42a具有由可以透射紫外线的耐压玻璃形成的窗口部分41b。窗口部分41b的面积稍大于基板31或第一光学波导材料32的面积，并且从上方通过窗口部分41b照射的紫外线还通过上层压膜41照射到第三光学波导材料34上。图5G示出在层压步骤和紫外线照射步骤中固化的层压制品。
图9A至图9I以及图10和图11示出根据本发明的用于层压紫外线固化型波导材料的方法和装置的第二实施例。
首先，在图9A中，将第一光学波导材料32层压到作为要被层压的材料的基板31上，同时将紫外线照射到第一光学波导材料32上以使第一光学波导材料32固化。基板31是薄板状的，并且与传统技术一样，可以使用诸如丙烯酸树脂板或聚碳酸酯板等树脂板或金属板。对于第一光学波导材料32，与传统技术一样，通常可以使用紫外线固化型环氧基树脂材料或其他丙烯基、含氟聚酰亚胺基或硅树脂基紫外线固化型材料。
图10A和图10B示出图9A的方法和装置，该方法和装置用于同时执行在基板31上层压第一光学波导材料32的步骤和使紫外线通过层压膜41照射在第一光学波导材料32上以使第一光学波导材料32固化的步骤。将要被层压的材料，即基板31固定到下层压膜42上，并且将基板31和未固化的第一光学波导材料32置于两个层压膜41和42之间，对两个层压膜41和42之间的部分减压和排气(箭头A)，然后通过下壳体42a的加压口42c将加压空气施加到壳体中，并且使用空气从层压膜42的外侧(下侧)对基板31侧施加均匀的负载(箭头B)。在沿着箭头A的方向排气时，下壳体42a的加压口42c闭合并且上壳体41a的吸气口41c打开。另一方面，在沿着箭头B的方向施加加压空气时，下壳体42a的加压口42c打开并且上壳体41a的吸气口41c闭合。
在这些情况下，在根据本发明的该实施例中，假定两个层压膜41和42都是紫外线透射型的。此外，上壳体41a具有由可以透射紫外线的耐压玻璃形成的窗口部分41b。窗口部分41b的面积稍大于基板31或第一光学波导材料32的面积，并且从上方通过窗口部分41b照射的紫外线还通过上层压膜41照射到第一光学波导材料32上。通过该层压步骤，将第一光学波导材料32层压到基板31上，并且在图9B中示出在紫外线照射步骤中固化的第一光学波导材料32。
接下来，如箭头D所示，将由基板31和第一光学波导材料32构成的层压制品上下翻转。
随后，在图9C中，将第二光学波导材料33层压在由基板31和第一光学波导材料32构成的层压制品上，以便获得如图9D所示的层压制品。接下来，如图9E所示，通过使用掩模35将紫外线照射在第二光学波导材料33上(箭头C)以使第二光学波导材料33固化。如图9F所示，相应地，透射通过掩模35的开口部分35a的紫外线在第二光学波导材料33中产生曝光部分33a和未曝光部分33b。
接下来，在图9G中，执行显影以完成对如下部分的图案化：即，使用掩模35通过在第二光学波导材料33上照射紫外线而固化的部分。相应地，留下第二光学波导材料33中固化的曝光部分33a，并移除未曝光部分33b。
此外，将层压板上下翻转(箭头D)。
图11A和图11B示出图9H中的方法和装置，该方法和装置用于同时执行在由基板31、第一光学波导材料32和第二光学波导材料33构成的层压制品的第二光学波导材料33上层压第三光学波导材料34的步骤和在第三光学波导材料34上照射紫外线以使第三光学波导材料34固化的步骤。
将要层压的材料，即由基板31、第一光学波导材料32和第二光学波导材料33构成的层压制品固定到下层压膜42侧，并且将该层压制品和未固化的第三光学波导材料34置于两个层压膜41和42之间，对两个层压膜41和42之间的部分减压和排气(箭头A)，然后通过下壳体42a的加压口42c将加压空气施加到壳体中，并且使用空气从层压膜42的外侧(下侧)对第三光学波导材料34侧施加均匀的负载(箭头B)。
此外，上壳体41a具有由可以透射紫外线的耐压玻璃形成的窗口部分41b。窗口部分41b的面积稍大于基板31或第一光学波导材料32的面积，并且从上方通过窗口部分41b照射的紫外线还通过上层压膜41照射到第三光学波导材料34上。图9I示出在层压步骤和紫外线照射步骤中固化的层压制品。
虽然已经参考附图描述了根据本发明的实施例，但是本发明不限于这些实施例，而是可以在不脱离本发明精神或范围的情况下采用各种形式、修改和变型。
如上所述，根据本发明，不需要执行包括材料层压处理和紫外线照射处理在内的两个单独处理，在将至少两个紫外线固化型光学波导材料相互层压并且将紫外线照射到两个紫外线固化型波导材料的至少一个上以进行固化的情况下，可以相应地减少制造时间和成本。此外，通过在同一处理中执行层压和通过紫外线照射进行固化的操作，可以防止层压后树脂导致材料剥离。

Claims (6)

1.一种层压紫外线固化型树脂材料的方法，包括以下步骤：
将均为柔性膜的第一膜和第二膜相对放置；
将基板和紫外线固化型树脂材料置于所述第一膜和所述第二膜之间；
对所述第一膜和所述第二膜之间的空间进行减压，从而所述第二膜跟随所述紫外线固化型树脂材料的表面以及所述基板和所述紫外线固化型树脂材料的侧表面；以及
在对所述第一膜和所述第二膜之间的空间减压之后，在利用外部空气对所述第二膜施加外部压力而将所述树脂材料层压到所述基板上的同时，使紫外线从所述第一膜的外面照射在所述树脂材料上以固化所述树脂材料。
2.一种层压紫外线固化型波导材料的方法，包括以下步骤：
将均为柔性膜的第一膜和第二膜相对放置；
将基板和第一光学波导材料置于所述第一膜和所述第二膜之间；
对所述第一膜和所述第二膜之间的空间进行减压，从而所述第二膜跟随所述第一光学波导材料的表面以及所述基板和所述第一光学波导材料的侧表面；
在对所述第一膜和所述第二膜之间的空间减压之后，在利用外部空气对所述第二膜施加外部压力而将所述第一光学波导材料层压到所述基板上的同时，使紫外线从所述第一膜的外面照射在所述第一光学波导材料上以固化所述第一光学波导材料，从而形成由所述基板和所述第一光学波导材料构成的第一层压制品；
将第二光学波导材料放置在所述第一层压制品的所述第一光学波导材料的上面，并将所述第二光学波导材料和所述第一层压制品置于所述第一膜和所述第二膜之间；
对所述第一膜和所述第二膜之间的空间进行减压，从而所述第二膜跟随所述基板的表面以及所述基板、所述第一光学波导材料和所述第二光学波导材料的侧表面；
在对所述第一膜和所述第二膜之间的空间减压之后，在利用外部空气对所述第二膜施加外部压力而将所述第二光学波导材料层压到所述第一光学波导材料上的同时，使紫外线从所述第一膜的外面通过掩模照射在所述第二光学波导材料上以执行图案化，从而形成由所述基板、所述第一光学波导材料和所述第二光学波导材料构成的第二层压制品；以及
将第三光学波导材料放置在所述第二层压制品的所述第二光学波导材料的上面，并将所述第三光学波导材料和所述第二层压制品置于所述第一膜和所述第二膜之间；
对所述第一膜和所述第二膜之间的空间进行减压，从而所述第二膜跟随所述第三光学波导材料的表面以及所述基板、所述第一光学波导材料和所述第三光学波导材料的侧表面；
在对所述第一膜和所述第二膜之间的空间减压之后，在利用外部空气对所述第二膜施加外部压力而将所述第三光学波导材料层压到所述第二光学波导材料上的同时，使紫外线从所述第一膜的外面照射在所述第三光学波导材料上以固化所述第三光学波导材料。
3.根据权利要求2所述的层压紫外线固化型波导材料的方法，其中，
所述第一光学波导材料、所述第二光学波导材料和所述第三光学波导材料都是紫外线固化型树脂材料；
所述第二光学波导材料至少具有与所述第一光学波导材料和所述第三光学波导材料中的每一个都不相同的折射率组成。
4.一种用于层压紫外线固化型树脂材料的装置，包括：
层压装置，所述层压装置包括上壳体和下壳体，所述上壳体设置有吸气口和由能够透射紫外线的耐压玻璃形成的窗口部分，所述下壳体设置有加压口，
所述层压装置用于在将基板和紫外线固化型树脂材料置于相对放置的均为柔性膜的第一膜和第二膜之间后执行如下步骤：
对所述第一膜和所述第二膜之间的空间进行减压，从而所述第二膜跟随所述紫外线固化型树脂材料的表面以及所述基板和所述紫外线固化型树脂材料的侧表面；以及
在对所述第一膜和所述第二膜之间的空间减压之后，利用外部空气对所述第二膜施加外部压力而将所述树脂材料层压到所述基板上；以及
照射装置，其用于在所述层压装置执行层压步骤的同时使紫外线从所述第一膜的外面照射到所述树脂材料上。
5.根据权利要求4所述的层压装置，其中，
所述紫外线固化型树脂材料是由紫外线固化型树脂制成的波导材料。
6.根据权利要求2所述的层压紫外线固化型波导材料的方法，其中，
所述第一光学波导材料、所述第二光学波导材料和所述第三光学波导材料都是紫外线固化型树脂材料；
所述第二光学波导材料的折射率组成大于所述第一光学波导材料和所述第三光学波导材料的折射率组成。
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