CN101354514B - 液晶显示装置及具有该液晶显示装置的电子设备 - Google Patents

液晶显示装置及具有该液晶显示装置的电子设备 Download PDF

Info

Publication number
CN101354514B
CN101354514B CN2008101301299A CN200810130129A CN101354514B CN 101354514 B CN101354514 B CN 101354514B CN 2008101301299 A CN2008101301299 A CN 2008101301299A CN 200810130129 A CN200810130129 A CN 200810130129A CN 101354514 B CN101354514 B CN 101354514B
Authority
CN
China
Prior art keywords
semiconductor layer
conductive
island
liquid crystal
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008101301299A
Other languages
English (en)
Chinese (zh)
Other versions
CN101354514A (zh
Inventor
宫口厚
冈本知广
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Publication of CN101354514A publication Critical patent/CN101354514A/zh
Application granted granted Critical
Publication of CN101354514B publication Critical patent/CN101354514B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/13624Active matrix addressed cells having more than one switching element per pixel
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • G02F1/134318Electrodes characterised by their geometrical arrangement having a patterned common electrode
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • G02F1/134363Electrodes characterised by their geometrical arrangement for applying an electric field parallel to the substrate, i.e. in-plane switching [IPS]
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/1368Active matrix addressed cells in which the switching element is a three-electrode device
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0312Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes
    • H10D30/0316Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes of lateral bottom-gate TFTs comprising only a single gate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0321Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6729Thin-film transistors [TFT] characterised by the electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6729Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/6737Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/40Crystalline structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441Interconnections, e.g. scanning lines
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Geometry (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Electrodes Of Semiconductors (AREA)
CN2008101301299A 2007-07-26 2008-07-25 液晶显示装置及具有该液晶显示装置的电子设备 Expired - Fee Related CN101354514B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007194844 2007-07-26
JP2007-194844 2007-07-26
JP2007194844 2007-07-26

Publications (2)

Publication Number Publication Date
CN101354514A CN101354514A (zh) 2009-01-28
CN101354514B true CN101354514B (zh) 2012-04-25

Family

ID=40294454

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008101301299A Expired - Fee Related CN101354514B (zh) 2007-07-26 2008-07-25 液晶显示装置及具有该液晶显示装置的电子设备

Country Status (5)

Country Link
US (2) US7633089B2 (enExample)
JP (2) JP5443711B2 (enExample)
KR (1) KR101506465B1 (enExample)
CN (1) CN101354514B (enExample)
TW (1) TWI437339B (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7633089B2 (en) * 2007-07-26 2009-12-15 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and electronic device provided with the same
US8101444B2 (en) * 2007-08-17 2012-01-24 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP2009071289A (ja) * 2007-08-17 2009-04-02 Semiconductor Energy Lab Co Ltd 半導体装置およびその作製方法
US20090090915A1 (en) 2007-10-05 2009-04-09 Semiconductor Energy Laboratory Co., Ltd. Thin film transistor, display device having thin film transistor, and method for manufacturing the same
JP2009267399A (ja) * 2008-04-04 2009-11-12 Fujifilm Corp 半導体装置,半導体装置の製造方法,表示装置及び表示装置の製造方法
US20110274234A1 (en) * 2008-11-20 2011-11-10 Sharp Kabushiki Kaisha Shift register
EP2455931A4 (en) * 2009-07-15 2013-05-15 Sharp Kk SCREEN SIGNAL PLANT DRIVE SWITCHING AND DISPLAY DEVICE THEREFOR
JP5399163B2 (ja) * 2009-08-07 2014-01-29 グローバル・オーエルイーディー・テクノロジー・リミテッド・ライアビリティ・カンパニー 表示装置
KR101969253B1 (ko) * 2009-10-08 2019-04-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR101759504B1 (ko) 2009-10-09 2017-07-19 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 표시 장치 및 이를 포함한 전자 기기
US9093539B2 (en) 2011-05-13 2015-07-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
CN103278990B (zh) * 2013-05-28 2017-08-25 京东方科技集团股份有限公司 像素结构及液晶面板
KR102144432B1 (ko) * 2013-11-06 2020-08-13 엘지디스플레이 주식회사 플렉서블 표시 장치 및 커브드 표시 장치
TWI595296B (zh) * 2014-09-23 2017-08-11 元太科技工業股份有限公司 顯示器
CN104317089B (zh) * 2014-10-27 2017-02-01 合肥鑫晟光电科技有限公司 一种阵列基板及其制备方法、显示面板、显示装置
KR102526110B1 (ko) 2016-04-12 2023-04-27 삼성디스플레이 주식회사 표시 장치 및 표시 장치의 제조 방법
CN107728352B (zh) * 2017-11-22 2020-05-05 深圳市华星光电半导体显示技术有限公司 一种像素驱动电路及液晶显示面板
WO2019135147A1 (ja) * 2018-01-05 2019-07-11 株式会社半導体エネルギー研究所 表示装置、表示モジュール、及び電子機器
CN110642829A (zh) * 2019-10-14 2020-01-03 中材江苏太阳能新材料有限公司 一种含噻吩环的光电材料及其制备方法
CN110727151A (zh) * 2019-10-25 2020-01-24 京东方科技集团股份有限公司 阵列基板、显示面板、显示装置及驱动方法
JP7508336B2 (ja) * 2020-10-26 2024-07-01 株式会社ジャパンディスプレイ 半導体基板及び表示装置
US12062725B2 (en) * 2021-02-26 2024-08-13 Boe Technology Group Co., Ltd. Thin film transistor, display panel and display device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5591987A (en) * 1980-03-03 1997-01-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor MIS field effect transistor with semi-amorphous semiconductor material
JP2005049832A (ja) * 2003-07-14 2005-02-24 Semiconductor Energy Lab Co Ltd 液晶表示装置
US7075110B2 (en) * 2003-06-30 2006-07-11 Lg. Philips Lcd Co., Ltd. Method of fabricating array substrate having color filter on thin film transistor structure

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56122123A (en) * 1980-03-03 1981-09-25 Shunpei Yamazaki Semiamorphous semiconductor
JPS62247569A (ja) * 1986-04-18 1987-10-28 Matsushita Electric Ind Co Ltd 半導体装置
JPH0451570A (ja) * 1990-06-20 1992-02-20 Casio Comput Co Ltd 薄膜トランジスタ
JP2791422B2 (ja) 1990-12-25 1998-08-27 株式会社 半導体エネルギー研究所 電気光学装置およびその作製方法
US5849601A (en) * 1990-12-25 1998-12-15 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and method for manufacturing the same
US7115902B1 (en) * 1990-11-20 2006-10-03 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and method for manufacturing the same
US7576360B2 (en) * 1990-12-25 2009-08-18 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device which comprises thin film transistors and method for manufacturing the same
US7098479B1 (en) * 1990-12-25 2006-08-29 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and method for manufacturing the same
JPH07326767A (ja) * 1994-05-31 1995-12-12 Sony Corp 薄膜トランジスタおよびそれを用いた液晶表示装置
JP2762968B2 (ja) * 1995-09-28 1998-06-11 日本電気株式会社 電界効果型薄膜トランジスタの製造方法
KR100257158B1 (ko) 1997-06-30 2000-05-15 김영환 박막 트랜지스터 및 그의 제조 방법
JP3942701B2 (ja) * 1997-09-03 2007-07-11 株式会社半導体エネルギー研究所 表示装置の作製方法
JP4236716B2 (ja) * 1997-09-29 2009-03-11 株式会社半導体エネルギー研究所 半導体装置
JP4215905B2 (ja) * 1999-02-15 2009-01-28 シャープ株式会社 液晶表示装置
JP2003015119A (ja) * 2001-04-23 2003-01-15 Toray Ind Inc カラーフィルタおよび液晶表示装置
JP3938680B2 (ja) * 2001-11-19 2007-06-27 シャープ株式会社 液晶表示装置用基板及びその製造方法及びそれを備えた液晶表示装置
JP2003287773A (ja) * 2002-01-23 2003-10-10 Seiko Epson Corp 反射型電気光学装置、および電子機器
KR100915231B1 (ko) * 2002-05-17 2009-09-02 삼성전자주식회사 저유전율 절연막의 증착방법, 이를 이용한 박막트랜지스터및 그 제조방법
TW577176B (en) * 2003-03-31 2004-02-21 Ind Tech Res Inst Structure of thin-film transistor, and the manufacturing method thereof
TWI368774B (en) * 2003-07-14 2012-07-21 Semiconductor Energy Lab Light-emitting device
JP2005167051A (ja) 2003-12-04 2005-06-23 Sony Corp 薄膜トランジスタおよび薄膜トランジスタの製造方法
JP4578826B2 (ja) * 2004-02-26 2010-11-10 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4134106B2 (ja) * 2004-06-11 2008-08-13 シャープ株式会社 カラーフィルタ基板およびその製造方法ならびにそれを備えた表示装置
US7648861B2 (en) 2004-08-03 2010-01-19 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating a semiconductor device including separately forming a second semiconductor film containing an impurity element over the first semiconductor region
JP2004356646A (ja) * 2004-08-06 2004-12-16 Casio Comput Co Ltd 薄膜トランジスタ
JP2007025005A (ja) * 2005-07-12 2007-02-01 Fujifilm Holdings Corp セル内構造の製造方法及びセル内構造並びに表示装置
EP3614442A3 (en) 2005-09-29 2020-03-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having oxide semiconductor layer and manufactoring method thereof
CN101667544B (zh) 2005-11-15 2012-09-05 株式会社半导体能源研究所 半导体器件及其制造方法
US7633089B2 (en) * 2007-07-26 2009-12-15 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and electronic device provided with the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5591987A (en) * 1980-03-03 1997-01-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor MIS field effect transistor with semi-amorphous semiconductor material
US7075110B2 (en) * 2003-06-30 2006-07-11 Lg. Philips Lcd Co., Ltd. Method of fabricating array substrate having color filter on thin film transistor structure
JP2005049832A (ja) * 2003-07-14 2005-02-24 Semiconductor Energy Lab Co Ltd 液晶表示装置

Also Published As

Publication number Publication date
US20100044713A1 (en) 2010-02-25
US20090026452A1 (en) 2009-01-29
JP2009049393A (ja) 2009-03-05
TW200916931A (en) 2009-04-16
CN101354514A (zh) 2009-01-28
KR101506465B1 (ko) 2015-03-27
US8044407B2 (en) 2011-10-25
JP5443711B2 (ja) 2014-03-19
US7633089B2 (en) 2009-12-15
TWI437339B (zh) 2014-05-11
JP2014102509A (ja) 2014-06-05
KR20090012120A (ko) 2009-02-02

Similar Documents

Publication Publication Date Title
CN101354514B (zh) 液晶显示装置及具有该液晶显示装置的电子设备
JP7603765B2 (ja) 表示装置
JP6117884B2 (ja) 液晶表示装置
JP5815796B2 (ja) 液晶表示装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120425

Termination date: 20200725

CF01 Termination of patent right due to non-payment of annual fee