JP5443711B2 - 表示装置 - Google Patents
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- Publication number
- JP5443711B2 JP5443711B2 JP2008188379A JP2008188379A JP5443711B2 JP 5443711 B2 JP5443711 B2 JP 5443711B2 JP 2008188379 A JP2008188379 A JP 2008188379A JP 2008188379 A JP2008188379 A JP 2008188379A JP 5443711 B2 JP5443711 B2 JP 5443711B2
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- JP
- Japan
- Prior art keywords
- semiconductor film
- film
- liquid crystal
- region
- semiconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Images
Classifications
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/13624—Active matrix addressed cells having more than one switching element per pixel
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- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134318—Electrodes characterised by their geometrical arrangement having a patterned common electrode
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41733—Source or drain electrodes for field effect devices for thin film transistors with insulated gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
- H01L29/456—Ohmic electrodes on silicon
- H01L29/458—Ohmic electrodes on silicon for thin film silicon, e.g. source or drain electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134363—Electrodes characterised by their geometrical arrangement for applying an electric field parallel to the substrate, i.e. in-plane switching [IPS]
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Description
本実施の形態では、液晶表示装置に用いられるマルチチャネル型の薄膜トランジスタ(以下、マルチチャネルTFTという)の作製工程について、以下図面を用いて説明していく。図1乃至図4は、マルチチャネルTFTの作製工程を示す断面図であり、図5乃至図9は、一画素におけるマルチチャネルTFT及び画素電極の接続領域の上面図である。なお、本明細書でいうマルチチャネル型とは、トランジスタのソース領域とドレイン領域との間に複数のチャネル領域が直列に電気的に接続されている構造のことをいい、マルチチャネル型のトランジスタをマルチチャネル型薄膜トランジスタともいう。
本実施の形態では、上記実施の形態1で説明したマルチチャネルTFTの上面図及び断面図を対応させた図面について、図6(A)及び図6(B)に示した構成とは別の上面図について示し、詳述する。
本実施の形態では、上記実施の形態1及び実施の形態2で説明したマルチチャネルTFTの上面図及び断面図を対応させた図面について、図6(A)及び図6(B)並びに図7(A)及び図7(B)に示した構成とは別の上面図について示し、詳述する。
本実施の形態では、実施の形態1で示すマルチチャネルTFTを有する液晶表示装置について、以下に示す。
次に、本発明の液晶表示装置の一形態である表示パネルの構成について、以下に示す。
本発明により得られる液晶表示装置によって、アクティブマトリクス型液晶モジュールに用いることができる。即ち、それらを表示部に組み込んだ電子機器全てに本発明を実施できる。
101 ゲート電極
102 ゲート絶縁膜
103 微結晶半導体膜
103 微結晶半導体膜
104 バッファ層
106 導電性半導体膜
107 導電膜
109 マルチチャネルTFT
110 絶縁膜
111 コンタクトホール
112 画素電極
151 レジスト
152 レジスト
501 画素部
502 走査線駆動回路
503 信号線駆動回路
504 シフトレジスタ
505 アナログスイッチ
506 シフトレジスタ
507 バッファ
601 走査線
602 信号線
603 島状半導体膜
604 島状電極
605 島状半導体膜
606 島状電極
607 画素電極
701 走査線
702 信号線
703 島状半導体膜
704 島状電極
705 島状半導体膜
706 島状電極
707 画素電極
801 走査線
802 信号線
803 島状半導体膜
804 島状電極
805 島状半導体膜
806 島状電極
807 画素電極
900 表示パネル
921 画素部
922 信号線駆動回路
923 走査線駆動回路
924 チューナ
925 映像信号増幅回路
926 映像信号処理回路
927 コントロール回路
928 信号分割回路
929 音声信号増幅回路
930 音声信号処理回路
931 制御回路
932 入力部
933 スピーカ
105a 島状半導体膜
105b 島状半導体膜
108a 領域
108b 領域
108c 領域
1100 基板
1101 対向基板
1102 ゲート配線
1103 ゲート配線
1104 容量配線
1105 容量配線
1106 ゲート絶縁膜
1107 画素電極
1109 共通電位線
1010 ロード室
1110 ソース領域
1011 反応室(1)
1012 反応室(2)
1013 反応室(3)
1015 アンロード室
1115 容量電極
1116 配線
1117 容量配線
1118 配線
1119 配線
1020 共通室
1120 絶縁膜
1021 搬送手段
1022 ゲートバルブ
1122 絶縁膜
1023 ゲートバルブ
1123 コンタクトホール
1024 ゲートバルブ
1124 画素電極
1025 ゲートバルブ
1125 スリット
1026 ゲートバルブ
1126 画素電極
1127 コンタクトホール
1028 カセット
1128 マルチチャネルTFT
1029 カセット
1129 マルチチャネルTFT
1130 保持容量部
1131 保持容量部
1132 遮光膜
1133 コンタクトホール
1134 着色膜
1136 着色膜
1137 平坦化膜
1138 着色膜
1140 対向電極
1141 スリット
1142 スペーサ
1144 突起
1146 配向膜
1148 配向膜
1150 液晶層
1151 液層素子
1152 液晶素子
1200 共通室
2001 筐体
2002 表示用パネル
2003 主画面
2004 モデム
2005 受信機
2006 リモコン操作機
2007 表示部
2008 サブ画面
2009 スピーカー部
2301 携帯電話機
2302 表示部
2303 操作部
2401 本体
2402 表示部
6011 基板
6012 画素部
6013 信号線駆動回路
6014 走査線駆動回路
6015 FPC
6021 基板
6022 画素部
6023 信号線駆動回路
6024 走査線駆動回路
6025 FPC
6031 基板
6032 画素部
6034 走査線駆動回路
6035 FPC
6033a アナログスイッチ
6033b シフトレジスタ
Claims (4)
- 第1の導電層を有し、
前記第1の導電層の上方に絶縁層を有し、
前記絶縁層の上方に第1の半導体層を有し、
前記絶縁層の上方に第2の半導体層を有し、
前記第1の半導体層の上方に、リンを有する第3の半導体層を有し、
前記第2の半導体層の上方に、リンを有する第4の半導体層を有し、
前記第1の半導体層の上方と前記第2の半導体層の上方とに、リンを有する第5の半導体層を有し、
前記第3の半導体層の上方に第2の導電層を有し、
前記第4の半導体層の上方に第3の導電層を有し、
前記第5の半導体層の上方に第4の導電層を有し、
前記第1の導電層は、前記第1の半導体層と重なる第1の領域を有し、
前記第1の導電層は、前記第2の半導体層と重なる第2の領域を有し、
前記第1の導電層は、前記第1の半導体層及び前記第2の半導体層と重ならない第3の領域を有し、
前記第5の半導体層は、前記第1の領域と重なる第4の領域を有し、
前記第5の半導体層は、前記第2の領域と重なる第5の領域を有し、
前記第5の半導体層は、前記第3の領域と重なる第6の領域を有し、
前記第3の領域は、前記第1の領域と前記第2の領域の間に位置し、
前記第6の領域は、前記第4の領域と前記第5の領域の間に位置することを特徴とする表示装置。 - 第1の導電層を有し、
前記第1の導電層の上方に絶縁層を有し、
前記絶縁層の上方に第1の半導体層を有し、
前記絶縁層の上方に第2の半導体層を有し、
前記第1の半導体層の上方に、ボロンを有する第3の半導体層を有し、
前記第2の半導体層の上方に、ボロンを有する第4の半導体層を有し、
前記第1の半導体層の上方と前記第2の半導体層の上方とに、ボロンを有する第5の半導体層を有し、
前記第3の半導体層の上方に第2の導電層を有し、
前記第4の半導体層の上方に第3の導電層を有し、
前記第5の半導体層の上方に第4の導電層を有し、
前記第1の導電層は、前記第1の半導体層と重なる第1の領域を有し、
前記第1の導電層は、前記第2の半導体層と重なる第2の領域を有し、
前記第1の導電層は、前記第1の半導体層及び前記第2の半導体層と重ならない第3の領域を有し、
前記第5の半導体層は、前記第1の領域と重なる第4の領域を有し、
前記第5の半導体層は、前記第2の領域と重なる第5の領域を有し、
前記第5の半導体層は、前記第3の領域と重なる第6の領域を有し、
前記第3の領域は、前記第1の領域と前記第2の領域の間に位置し、
前記第6の領域は、前記第4の領域と前記第5の領域の間に位置することを特徴とする表示装置。 - 請求項1又は請求項2において
前記第5の半導体層は、概略X字状の形状を有し、
前記第4の導電層は、概略X字状の形状を有することを特徴とする表示装置。 - 請求項1乃至請求項3のいずれか一項において、
前記第1の半導体層は、第1の微結晶半導体層を有し、
前記第1の半導体層は、前記第1の微結晶半導体層の上方に第1の非晶質半導体層を有し、
前記第2の半導体層は、第2の微結晶半導体層を有し、
前記第2の半導体層は、前記第2の微結晶半導体層の上方に第2の非晶質半導体層を有することを特徴とする表示装置。
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JP2008188379A JP5443711B2 (ja) | 2007-07-26 | 2008-07-22 | 表示装置 |
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US7648861B2 (en) * | 2004-08-03 | 2010-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating a semiconductor device including separately forming a second semiconductor film containing an impurity element over the first semiconductor region |
JP2004356646A (ja) * | 2004-08-06 | 2004-12-16 | Casio Comput Co Ltd | 薄膜トランジスタ |
JP2007025005A (ja) * | 2005-07-12 | 2007-02-01 | Fujifilm Holdings Corp | セル内構造の製造方法及びセル内構造並びに表示装置 |
EP1770788A3 (en) * | 2005-09-29 | 2011-09-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having oxide semiconductor layer and manufacturing method thereof |
CN101577293B (zh) * | 2005-11-15 | 2012-09-19 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
US7633089B2 (en) * | 2007-07-26 | 2009-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device provided with the same |
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2008
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- 2008-07-22 JP JP2008188379A patent/JP5443711B2/ja not_active Expired - Fee Related
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- 2008-07-24 KR KR1020080072170A patent/KR101506465B1/ko active IP Right Grant
- 2008-07-25 CN CN2008101301299A patent/CN101354514B/zh not_active Expired - Fee Related
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Publication number | Publication date |
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JP2009049393A (ja) | 2009-03-05 |
US8044407B2 (en) | 2011-10-25 |
CN101354514B (zh) | 2012-04-25 |
TWI437339B (zh) | 2014-05-11 |
US20100044713A1 (en) | 2010-02-25 |
KR20090012120A (ko) | 2009-02-02 |
KR101506465B1 (ko) | 2015-03-27 |
JP2014102509A (ja) | 2014-06-05 |
TW200916931A (en) | 2009-04-16 |
US20090026452A1 (en) | 2009-01-29 |
CN101354514A (zh) | 2009-01-28 |
US7633089B2 (en) | 2009-12-15 |
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