CN101203677A - 旋转式真空泵 - Google Patents

旋转式真空泵 Download PDF

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CN101203677A
CN101203677A CNA2006800224665A CN200680022466A CN101203677A CN 101203677 A CN101203677 A CN 101203677A CN A2006800224665 A CNA2006800224665 A CN A2006800224665A CN 200680022466 A CN200680022466 A CN 200680022466A CN 101203677 A CN101203677 A CN 101203677A
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vacuum pump
rotary vacuum
suction chamber
compensation channel
discharge passage
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CN101203677B (zh
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埃里克·菲戈尼
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Leybold GmbH
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Oerlikon Leybold Vacuum GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/028—Means for improving or restricting lubricant flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F04C18/3442—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F04C29/128—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type of the elastic type, e.g. reed valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

本发明涉及一种旋转式真空泵，其具有位于壳体(10)内的吸入室(12)。转子(14)偏心地安装在吸入室(12)内。滑片(18)连接到转子(14)。排放通道(30)也连接到吸入室(12)并且连接到油室(32)。为了防止介质从油室(32)回流进吸入室(12)，在排放通道(30)和油室(32)之间配置阀装置(38)。根据本发明，提供至少一个补偿通道(50)，补偿通道(50)连接到排放通道(30)并且连接到油室(32)。

Description

旋转式真空泵
技术领域
本发明涉及一种旋转式真空泵。
背景技术
旋转式真空泵包括设置在壳体内的吸入室。在壳体内，转子偏心地设置。通常，转子具有两个或多个连接到转子的滑片，所述滑片设置在滑片槽内。在旋转期间，滑片在离心力影响下将抵压吸入室的内壁。为了产生真空，旋转式真空泵的吸入口连接到要在其内产生真空的空间。由于转子的偏心和形成于滑片之间的室的变化尺寸，介质将通过排放通道输送。为了润滑目的，并且还为了保证滑片在吸入室内壁上的良好密封，在吸入室内总是存在特定量的用于产生油膜的油。因为为此原因所排放的介质与油混合，所以排放通道通常从吸入室延伸到油室内。
在例如由于撞击的原因而使旋转式真空泵突然停止的情况下，这将导致通过供给润滑油而使吸入室充满油的后果。这将引起在下次启动泵时转动力矩增加、以及噪声增大。由于转动力矩增加，所以滑片可能遭到破坏。另外还存在油能够进入要形成真空的室内、并且因此引起其内被破坏的风险。因此，需要在停止后使旋转式真空泵的吸入室达到大气压，从而避免润滑油流入。为了获得这种效果，公知是提供配备有封闭装置并且连接到吸入室的孔。这是一种相当复杂的措施，包括提供一种必须满足高密封性要求的、能分开控制的封闭装置。另外，在断电的情况下，就不再能保证对封闭装置进行正确控制。
发明内容
本发明的目的是提供一种旋转式真空泵，其中通过结构方面的简单措施防止了充填吸入室。
根据本发明，由权利要求1中指出的措施实现上述目的。
在根据本发明的旋转式真空泵中，吸入室经由排放通道连接到油室，其中在油室和排放通道之间设置有阀装置。阀装置有效地防止介质——通常即油和空气的混合物——从油室到吸入室内的回流。根据本发明，还提供了补偿通道，其将排放通道连接到基本为大气压的区域。优选地，补偿通道连接到油室的空气区，油室的空气区为位于油池上方、并且视情况基本上包含有空气或富含油的空气的油室区域。
通过提供这种与位于油室和排放通道之间的阀装置相结合的补偿通道，实现了在操作中将介质从吸入室压出并进入排放通道中，并且介质——通常为油和空气的混合物——通过阀装置进入油室。存在于介质中的油的一部分被压进补偿通道，从而密封补偿通道。因此在操作期间，保证了没有新鲜空气经由补偿通道吸入，并且相应地没有具有大气压的空气进入补偿通道。在旋转式真空泵故障或故意停止旋转式真空泵的情况下，由于存在于吸入室内的低压，所以空气通过补偿通道被吸入。这将在吸入室内实现快速压力补偿，使得吸入室快速达到大气压。因此，吸入室将不会填充经由供给润滑油而供给的油。因此，消除了在下次起动时转动力矩增加以及因此可能损坏滑片的缺点。并且因此避免了油或润滑油泄漏进待产生真空的空间内。
用于补偿吸入室内的压力所需的时间非常短。
旋转式真空泵的另一问题在于当转子以极限范围内的转速运转时可观察到产生的噪声增大。为了减小噪声，壳体在其受压区域内形成有允许空气流入的小开口。因此产生了可实现减小噪声的油乳化液。因为空气供应非常不精确，并且因此使油的乳化程度也不精确，所以只能在很小程度上减小噪声。
通过提供补偿通道，实现了对油的可控和可限制的乳化。如上所述，当介质从两个相邻滑片之间的吸入室区输送进排放通道内时，补偿通道将至少部分地充有油。其后，当后一滑片经过连接到排放通道的排放通道的开口时，存储在补偿通道内的供油将输送进此空间内。在此过程中，少量的空气沿补偿通道一起被吸入，使得油被乳化。特别地，通过补偿通道的适当数量和形状，并且依据所使用的润滑油，能够保证对润滑油进行良好的乳化。因此，提供至少一个补偿通道的该发明性提供，进一步实现了在旋转式真空泵的转数的极限范围内减小噪声的产生。
由于所述至少一个补偿通道的小横截面积，所以保证了将仅有少量的空气进入泵内。特别地，通过适当地选定所述至少一个补偿通道的数量、横截面积和形状，使得可以确定暂时存储在补偿通道内的油量和吸入的空气量。
根据特别优选的实施方式，补偿通道形成为壳体内的槽，所述槽被部分地覆盖。其优点在于能够以简单的方式形成补偿通道。优选地，槽设置在壳体的凸缘面内，该面朝向油室设置，同时油室紧固到凸缘，槽优选地设置在油室内部。在这点上，如果槽被阀装置的阀舌覆盖，使得单个或多个槽由连接到油室的空气区的小型入口覆盖，则是特别优选的。
优选地，借助于如果需要也覆盖槽的阀舌，排放通道被打开和关闭。为此目的，阀舌由弹性、能复原的材料形成。如果阀舌的密封排放通道的区域设置在油池内，则能够获得阀舌的特别好的密封，因此产生附加的抵压压力。由于加强了密封效果，所以能够执行更大范围和更有效的排空。
附图说明
下面将参照附图更详细地解释本发明。
图中示出了如下内容：
图1示出旋转式真空泵的示意性截面图，以及
图2示出沿图1中的线II-II所剖得的示意性截面图。
具体实施方式
旋转式真空泵包括壳体10。在壳体10内部，转子14设置在吸入室12内。在所示实施方式中，转子14包括三个滑片槽16，相应的滑片18设置在每个滑片槽16中。由于转子14的旋转，滑片18因离心力的作用而抵压吸入室的内壁20。
经由连接到要被排空的空间的吸入口22，介质从要被排空的空间被吸入到吸入室12的第一区域24内。吸入室12的此区域24由两个相邻的滑片18界定。沿旋转方向26设置在所述区域24之前的吸入室12的区域28的大小将因转子14的旋转而减小，使得置于其内的介质将被压缩。经由排放通道30，介质从区域28沿油室32的方向输出吸入室12。
油室32紧固在旋转式真空泵的壳体10的凸缘34上。油室32包括油空间或油池34，提供油空间或油池以特别地收集经由排放通道30供应的油以及来自要被排空的空间的空气。
排放通道30的排放口36设置有阀装置38。在本文示出的特别优选的实施方式中，所述阀装置是例如借助于螺栓或螺母40附连到壳体10的凸缘34的弹性阀舌。特别优选地，在排放口36的区域中将阀舌设置在油池42内。为此目的，在油室32内借助于隔离壁44形成分离的油空间，其中，在所述油空间已充满的情况下，油将沿箭头46所标示的方向流动。通过提供油池42，压力施加在阀舌的后侧上，即阀舌朝向油池42的那个侧面。因此，提高了阀装置38的密封性。
朝向油室32的凸缘面48优选地具有多个设置于其内的补偿通道50。所述补偿通道50由设置在凸缘面48内并且由位于此区域内的阀舌38所覆盖的槽形成。在此构型中，不是整个槽由阀舌覆盖，使得形成连接到油室32的空气区54的入口52。优选地，如图2中所示，提供多个补偿通道50，其优选地设置成从入口52开始的扇形构型。
因此，通过转子14的旋转，富含油的介质将从区域28沿箭头56的方向输送进排放通道30内。在压力影响下，阀舌被向后压，使介质在沿箭头58的方向流动时进入油池42并相应地进入油室32。在此过程中，一部分油被压入补偿通道50，并且因此产生密封效果。
一将所述区域28基本排空，存在于通道50内的供油将和经由开口52从油室32的空气区54所吸入的少量空气一起被吸入排放通道30内。在携带的空气的影响下，使得油乳化并且减小了噪声。
在泵例如由于故障的原因而停止的情况下，空气将经由开口52和补偿通道50从空气区54被吸入吸入室12，从而产生压力补偿，并且吸入室12基本上达到大气压。以此方式，保证了没有润滑油——或者在最坏的情况下仅微量润滑油——能够进入吸入室。因此防止吸入室12充满润滑油。
由于阀装置38——特别是阀舌——区域中的油流动或油循环，有效地防止了在此区域内形成沉淀。特别地，避免了污染阀装置38。因此，防止了阻塞阀装置。进一步地，还保证了良好的密封效果，并且防止了密封程度可能受泵的性能的影响。

Claims (8)

1.一种旋转式真空泵，包括
壳体(10)，其包括吸入室(12)，
转子(14)，其偏心地安装在所述吸入室(12)内，
滑片(18)，其连接到所述转子(14)以在所述转子(14)内移动，
排放通道(30)，其连接到所述吸入室(12)并连接到油室(32)，
阀装置(38)，其设置在所述油室(32)和所述排放通道(30)之间以防止介质从所述油室(32)回流进所述吸入室(12)内，以及
至少一个补偿通道(50)，其连接到所述排放通道(30)并且基本处于大气压下。
2.如权利要求1所述的旋转式真空泵，其特征在于，所述补偿通道(50)连接到所述油室(32)的空气区(54)。
3.如权利要求1或2所述的旋转式真空泵，其特征在于，所述补偿通道(50)在所述阀装置(38)的区域中连接到所述排放通道(30)。
4.如权利要求1至3中任一项所述的旋转式真空泵，其特征在于，所述补偿通道具体在所述壳体(10)的凸缘(34)内形成为被部分地覆盖的槽。
5.如权利要求1至4中任一项所述的旋转式真空泵，其特征在于，所述阀装置包括能够弹性变形的阀舌(38)，所述阀舌(38)优选地还覆盖所述用于形成所述补偿通道(50)的槽。
6.如权利要求1至5中任一项所述的旋转式真空泵，其特征在于，所述补偿通道(50)设置成使得在完成介质从所述吸入室(12)的排放之后所述补偿通道(50)将包括用于随后将介质压入所述吸入室(12)内的供油。
7.如权利要求1至6中任一项所述的旋转式真空泵，其特征在于，包括优选地在连接到大气的通道入口(52)处彼此连接的多个补偿通道(50)。
8.如权利要求1至7中任一项所述的旋转式真空泵，其特征在于，在所述排放通道(30)的区域中，封闭所述排放通道(30)的所述阀装置(38)设置在油池(42)中。
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CN102356239B (zh) * 2009-03-17 2014-06-11 Vhit公司 具有用于脱开驱动马达的装置的转动真空泵
CN103061820A (zh) * 2012-12-27 2013-04-24 潍坊天瑞重工凿岩机械有限公司 具有内置式供油器的气动滑片式钻机
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CN105526171A (zh) * 2016-02-05 2016-04-27 无锡明治泵业有限公司 一种汽车真空泵降低泵腔内积油量的结构
CN105526174A (zh) * 2016-02-05 2016-04-27 无锡明治泵业有限公司 一种用于降低真空泵泵腔内积油量的机构
CN114810594A (zh) * 2021-01-27 2022-07-29 株式会社爱发科 真空泵及真空泵的复压方法

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US8469684B2 (en) 2013-06-25
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US9017051B2 (en) 2015-04-28
CN101203677B (zh) 2011-04-06
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JP4996601B2 (ja) 2012-08-08
DE102005031718A1 (de) 2007-01-18

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