CN101078641B - 具有热电偶的流量传感器 - Google Patents

具有热电偶的流量传感器 Download PDF

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Publication number
CN101078641B
CN101078641B CN2007101292365A CN200710129236A CN101078641B CN 101078641 B CN101078641 B CN 101078641B CN 2007101292365 A CN2007101292365 A CN 2007101292365A CN 200710129236 A CN200710129236 A CN 200710129236A CN 101078641 B CN101078641 B CN 101078641B
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China
Prior art keywords
well heater
thermopair
connecting portion
thermoelectric pile
signal
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CN2007101292365A
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Chinese (zh)
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CN101078641A (zh
Inventor
马克·冯瓦尔德基希
马克·霍尔农
费利克斯·迈尔
莫里茨·莱希纳
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Sheng Yuan Holdings Co
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Sensirion AG
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Publication of CN101078641A publication Critical patent/CN101078641A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/6888—Thermoelectric elements, e.g. thermocouples, thermopiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
CN2007101292365A 2006-03-31 2007-03-30 具有热电偶的流量传感器 Active CN101078641B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP06006933.3 2006-03-31
EP06006933A EP1840535B1 (en) 2006-03-31 2006-03-31 Flow sensor with thermocouples

Publications (2)

Publication Number Publication Date
CN101078641A CN101078641A (zh) 2007-11-28
CN101078641B true CN101078641B (zh) 2011-06-29

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Family Applications (1)

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CN2007101292365A Active CN101078641B (zh) 2006-03-31 2007-03-30 具有热电偶的流量传感器

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US (1) US8011240B2 (enExample)
EP (1) EP1840535B1 (enExample)
JP (1) JP5112728B2 (enExample)
CN (1) CN101078641B (enExample)
DE (1) DE602006019548D1 (enExample)

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EP3032227B1 (en) * 2014-12-08 2020-10-21 Sensirion AG Flow sensor package
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EP3118711B1 (en) 2015-07-17 2021-01-13 Sensirion AG Inlet pressure perturbation insensitive mass flow controller
SG11201810307VA (en) * 2016-05-27 2018-12-28 Carrier Corp Method for determining reduced airflow in transport refrigeration system
EP3301441B1 (de) 2016-09-30 2018-11-07 Siemens Aktiengesellschaft Wärmeleitfähigkeitsdetektor für gasgemische mit mindestens drei komponenten
FR3065281B1 (fr) * 2017-04-18 2019-06-14 Centre National De La Recherche Scientifique Dispositif de mesure de vitesse ou de debit de gaz
EP3392621A1 (en) 2017-04-19 2018-10-24 Sensirion AG Membrane-based thermal flow sensor device
EP3404373B1 (en) 2017-05-17 2020-03-04 Sensirion AG Flow sensor with thermocouples
EP3421947B1 (en) 2017-06-30 2019-08-07 Sensirion AG Operation method for flow sensor device
EP3502687B1 (en) 2017-12-20 2022-06-29 Sensirion AG Determination of gas parameters
AU2019205603B2 (en) 2018-01-05 2021-01-21 GS Elektromedizinische Geräte G. Stemple GmbH Gas sensor, and method for operating the gas sensor
CN112055811B (zh) * 2018-01-05 2023-12-26 汉席克卡德应用研究协会 用于热学气体传感器的评估装置、方法和计算机可读介质
US10775217B1 (en) 2019-04-19 2020-09-15 Honeywell International Inc. Thermophile-based flow sensing device
JP7112373B2 (ja) * 2019-05-24 2022-08-03 Ｍｍｉセミコンダクター株式会社 フローセンサチップ
JP7258800B2 (ja) 2020-03-02 2023-04-17 Ｍｍｉセミコンダクター株式会社 サーモパイル型センサ
US12044561B2 (en) * 2020-11-06 2024-07-23 Honeywell International Inc. Flow sensing device
EP4521102A1 (en) 2021-12-17 2025-03-12 Sensirion AG Thermal sensor device and method for determining concentration of a target gas in a gas sample
DE102022127043B4 (de) * 2022-10-15 2024-05-23 Sensirion Ag Driftkompensation für einen Sensor zur Messung der Konzentration eines Stoffes in einem Fluid

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EP1094306A1 (en) * 1999-04-27 2001-04-25 Yazaki Corporation Thermal flow sensor, method and apparatus for identifying fluid, flow sensor, and method and apparatus for flow measurement
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Also Published As

Publication number Publication date
EP1840535B1 (en) 2011-01-12
US20070241093A1 (en) 2007-10-18
DE602006019548D1 (de) 2011-02-24
EP1840535A1 (en) 2007-10-03
JP5112728B2 (ja) 2013-01-09
CN101078641A (zh) 2007-11-28
JP2007279036A (ja) 2007-10-25
US8011240B2 (en) 2011-09-06

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