AU6719100A - Method and device for precision mass flow measurement - Google Patents

Method and device for precision mass flow measurement

Info

Publication number
AU6719100A
AU6719100A AU67191/00A AU6719100A AU6719100A AU 6719100 A AU6719100 A AU 6719100A AU 67191/00 A AU67191/00 A AU 67191/00A AU 6719100 A AU6719100 A AU 6719100A AU 6719100 A AU6719100 A AU 6719100A
Authority
AU
Australia
Prior art keywords
mass flow
flow measurement
precision mass
precision
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU67191/00A
Inventor
Moritz Lechner
Felix Mayer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sensirion AG
Original Assignee
Sensirion AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensirion AG filed Critical Sensirion AG
Publication of AU6719100A publication Critical patent/AU6719100A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Electrochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
AU67191/00A 1999-09-09 2000-09-08 Method and device for precision mass flow measurement Abandoned AU6719100A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH165799 1999-09-09
CH1657/99 1999-09-09
PCT/IB2000/001262 WO2001018500A1 (en) 1999-09-09 2000-09-08 Method and device for precision mass flow measurement

Publications (1)

Publication Number Publication Date
AU6719100A true AU6719100A (en) 2001-04-10

Family

ID=4215588

Family Applications (1)

Application Number Title Priority Date Filing Date
AU67191/00A Abandoned AU6719100A (en) 1999-09-09 2000-09-08 Method and device for precision mass flow measurement

Country Status (3)

Country Link
AU (1) AU6719100A (en)
DE (1) DE10082701D2 (en)
WO (1) WO2001018500A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10942139B2 (en) 2017-06-30 2021-03-09 Sensirion Ag Operation method for flow sensor device
US11226300B2 (en) 2015-03-05 2022-01-18 Sensirion Ag Determination of fluid parameters

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10124964B4 (en) 2001-05-21 2004-02-05 Forschungszentrum Karlsruhe Gmbh Sensor for measuring flow velocities and method for its operation
ATE352770T1 (en) * 2002-08-22 2007-02-15 Ems Patent Ag THERMAL GAS FLOW METER WITH GAS QUALITY INDICATOR
DE10243013B4 (en) * 2002-09-17 2013-08-22 Robert Bosch Gmbh Sensor and method
EP1426740B1 (en) 2002-11-27 2014-11-19 Sensirion Holding AG Device for measuring the flow and at least one material parameter of a fluid
JP2006513424A (en) 2003-01-23 2006-04-20 エー ビー ビー リサーチ リミテッド High precision gas energy meter
DE502005008363D1 (en) * 2004-06-03 2009-12-03 Ust Umweltsensortechnik Gmbh Method for detecting combustible gases, in particular for detecting hydrogen
EP1840535B1 (en) 2006-03-31 2011-01-12 Sensirion Holding AG Flow sensor with thermocouples
DE202007003027U1 (en) 2007-03-01 2007-06-21 Sensirion Ag Device for handling fluids with a channelled substrate has measuring substrate with integrated heater and temperature sensor both in thermal contact with channel and connected electrically to superposed system
DE102007033144B4 (en) 2007-07-13 2020-09-24 Vitesco Technologies GmbH Sensor for measuring the hydrocarbon content in a gas flow in a purge line
DE102007057027B4 (en) 2007-11-27 2017-12-21 Drägerwerk AG & Co. KGaA Apparatus and method for measuring the flow rate of a fluid
DE102008046514B4 (en) 2008-09-10 2017-12-28 Continental Automotive Gmbh Method, apparatus and system for operating an internal combustion engine
EP2175246B1 (en) 2008-10-09 2017-07-19 Sensirion AG A method for measuring a fluid composition parameter by means of a flow sensor
EP2204555B1 (en) 2009-01-02 2011-08-03 Sensirion AG Ammonia storage system
EP2392898B1 (en) 2010-06-04 2017-12-13 Sensirion AG Sensor system
JP5652315B2 (en) * 2011-04-28 2015-01-14 オムロン株式会社 Flow measuring device
DE102011081923B4 (en) 2011-08-31 2017-02-09 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Sensor chip for determining a flow parameter of a gas and method for determining the same
DE102011081922B4 (en) 2011-08-31 2021-12-23 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Flow sensor for determining a flow parameter
DE102012001573B4 (en) * 2012-01-18 2018-10-11 Diehl Metering Gmbh Method for measuring a flow rate of a flowing gas and flow meter
DE102013105992A1 (en) * 2012-12-14 2014-07-03 Endress + Hauser Flowtec Ag Thermal flow measuring device and method for determining and / or monitoring a flow of a medium
FR3000677A1 (en) * 2013-01-04 2014-07-11 Air Liquide Medical Systems THERMOSENSITIVE CELL DEVICE FOR MONITORING THE OBSERVANCE OF MEDICAL TREATMENT
EP3029429B1 (en) 2014-12-04 2020-10-07 Sensirion AG Determination of fluid composition in a mass flow controller
US10159815B2 (en) 2014-12-12 2018-12-25 Dynasthetics, Llc System and method for detection of oxygen delivery failure
US10143820B2 (en) 2014-12-12 2018-12-04 Dynasthetics, Llc System and method for delivery of variable oxygen flow
DE102015107584A1 (en) * 2015-05-13 2016-11-17 Innovative Sensor Technology Ist Ag Method for determining a product of heat capacity and density
EP3153854B1 (en) * 2015-10-05 2021-03-31 Sensirion AG Determination of volumetric flow rate of a gas in a gas flow
DE102016117215A1 (en) * 2016-09-13 2018-03-15 Bundesrepublik Deutschland, Vertreten Durch Das Bundesministerium Für Wirtschaft Und Energie, Dieses Vertreten Durch Den Präsidenten Der Physikalisch-Technischen Bundesanstalt A method of determining a composition of a gaseous fluid and gas composition sensor
EP3457092A1 (en) * 2017-09-13 2019-03-20 First Sensor AG Thermal gas property sensor
DE102018108723A1 (en) 2018-04-12 2019-10-17 Tdk Corporation Sensor device, method for operating a sensor device and electronic assembly, comprising a sensor device
EP3367087A3 (en) 2018-04-30 2018-12-26 Sensirion AG Sensor for determining thermal capacity of fluids
BE1027620B1 (en) 2019-10-04 2021-05-03 Ygilis Bvba Container and method for monitoring hydration
EP3933352A1 (en) * 2020-07-01 2022-01-05 Sick Ag Thermal flow measurement
US11986592B2 (en) 2021-05-14 2024-05-21 Dynasthetics, Llc Electronic firebreak systems and methods for use with oxygen delivery device
DE102022209906A1 (en) * 2022-09-20 2024-03-21 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Sensor arrangement

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4909078A (en) * 1987-10-14 1990-03-20 Rosemount Inc. Fluid flow detector
GB8903744D0 (en) * 1989-02-18 1989-04-05 Endress & Hauser Ltd Flowmeter
EP0484645B1 (en) * 1990-11-09 1995-04-26 Hewlett-Packard Company Methods and systems for fluid identification and flow rate determination

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11226300B2 (en) 2015-03-05 2022-01-18 Sensirion Ag Determination of fluid parameters
US10942139B2 (en) 2017-06-30 2021-03-09 Sensirion Ag Operation method for flow sensor device

Also Published As

Publication number Publication date
WO2001018500A1 (en) 2001-03-15
DE10082701D2 (en) 2002-08-14

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase