CN101038388A - 用于制造液晶显示板的系统以及使用该系统的液晶显示板 - Google Patents

用于制造液晶显示板的系统以及使用该系统的液晶显示板 Download PDF

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CN101038388A
CN101038388A CNA2006101629849A CN200610162984A CN101038388A CN 101038388 A CN101038388 A CN 101038388A CN A2006101629849 A CNA2006101629849 A CN A2006101629849A CN 200610162984 A CN200610162984 A CN 200610162984A CN 101038388 A CN101038388 A CN 101038388A
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substrate
loading bin
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lcd panel
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曺英吉
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LG Display Co Ltd
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Abstract

本发明提供了一种用于制造液晶显示板的系统，以及使用该系统的液晶显示板。所述系统包括：第一装载器，第二装载器，第一处理单元，第二处理单元以及传送线。所述第一装载器包括两个端口，并且从通过每个端口装载的一组盒中同时地输入和输出基板。所述第二装载器包括两个端口，并且从通过每个端口装载的另外一组盒中同时地输入和输出基板。所述第一处理单元对通过所述第一装载器输入的基板执行制造处理，并将完成处理的基板传送到所述第一装载器。所述第二处理单元对通过所述第二装载器输入的基板执行制造处理，并将完成处理的基板传送到所述第二装载器。所述传送线传送所述基板。

Description

用于制造液晶显示板的系统以及使用该系统的液晶显示板
技术领域
本发明涉及液晶显示器，更具体地涉及一种用于制造液晶显示板的系统，以及使用该系统的液晶显示板，该系统中进行了改进，使得在制造液晶显示器时，处理变得更有效和更经济。
背景技术
近年来，液晶显示器作为一种显示装置引起了关注。
液晶显示器利用注入到板内的液晶的电光特性来执行显示功能。液晶显示器由于其小型、轻便以及低功耗的优点而正广泛应用于各种领域，诸如计算机显示器或移动通信终端。
液晶显示器通过多个处理来制造。因此，液晶显示需要多种分别用来执行该多个处理的设备，以及许多用于操作所述多种设备的操作人员。
这样，液晶显示器的制造就需要巨大的成本以及设备和操作所需的足够的空间。
因此，制造液晶显示器的过程中制造处理的效率以及安装面积的减小对于提高成品率和降低成本是重要的。
例如，在用于刻蚀薄膜晶体管基板的刻蚀设备中，包括用于一个接一个地进行涂覆和曝光的多个处理室的单线已发展为包括用于两个接两个地进行涂覆和曝光的多个处理室的双线。单线为一个基板花费约80秒的处理时间。然而，双线花费约45秒的处理时间，并且执行了可以比得上单线的有效的制造处理。另外，由于安装面积可以减小，因此成品率可以提高并且成本可以降低。
下面将描述现有技术中的用于制造液晶显示板的系统。
图1a是例示现有技术中的用于制造液晶显示板的系统的示意图。图1b是例示用于操作图1a所示的用于制造液晶显示板的系统的方法的图。
参照图1a，用于制造液晶显示板的系统包括双线，在该双线中，将用于在执行每个制造处理之前装载基板的处理线与用于在执行制造处理之后卸载基板的处理线彼此分开。
换言之，现有技术中的用于制造液晶板的系统包括：装载器110、清洁机120、涂覆机130-1和130-2、曝光单元150-1和150-2、显影机160、测试机170以及卸载器180。
下面将描述用于制造液晶显示板的以上构造的系统的操作。
如果通过包括两个端口的装载器110来提供基板，则在清洁机120、涂覆机130-1和130-2、曝光单元150-1和150-2、显影机160以及测试机170中自动地处理各基板。将完成处理的基板通过卸载器180再次装载到一盒中，并将其输出。
在现有技术中的用于制造液晶显示板的系统中，如图1b的(A)中所示，当装载器110装载装满了要处理的基板的盒(已装满的盒)时，将基板输入到后面的处理室中。在输入完成时，将空盒输出并以在其中装载有基板的另一个盒(已装满的盒)来替换该空盒。
类似的是，如图1b的(B)中所示，卸载器180将完成处理的基板装载到空盒中。如果空盒完全装满了基板，则将装载了基板的盒(已装满的盒)输出并以空盒来替换，以在其中装载完成处理的基板。
然而，现有技术中的用于制造液晶显示板的系统存在以下不便之处：两个涂覆机130-1和130-2或两个曝光单元150-1和150-2应分别执行相同的处理。
在完成处理的基板存在缺陷的情况下，没有基于每个基板或每个盒来进行以下判断：针对有缺陷的基板执行的处理是在两个涂覆机130-1和130-2中的任何一个中执行的还是在两个曝光单元150-1和150-2中的任何一个中执行的。
另外，存在以下缺点：难以掌握制造处理的历程。
图2a是例示现有技术中的用于制造液晶显示板的另一种系统的构造的示意图。图2b是例示用于操作图2a所示的用于制造液晶显示板的系统的方法的图。
用于制造液晶显示板的该系统是双线系统，与装载和卸载基板的工艺在其中是分开的系统不同的是，在该双线系统中装载和卸载基板的处理是一体的。
参照图2a，用于制造液晶显示板的该系统包括：各自包括三个端口的第一装载器210和第二装载器215、清洁机220、第一涂覆机230、第二涂覆机235、第一曝光单元250、第二曝光单元255、显影机260、测试机270以及传送线280和285。
换言之，用于制造液晶显示板的该系统属于如下结构：图2a的第一装载器210和第二装载器215联合地执行基板的装载和卸载，并且通过两个装载器210和215送来两种盒的产品是可能的。考虑到基板的装载和卸载以及盒的替换和非替换，装载器210和215中的每一个至少需要三个端口。
在用于制造液晶显示板的该系统中，通过装载器输入的基板仅通过第一涂覆机230和第二涂覆机235中的一个指定的涂覆机以及第一曝光单元250和第二曝光单元255中的一个指定的曝光单元来处理。
因此，涂覆机230和235以及曝光单元250和255可以分别执行彼此不同的处理。这样，就具备以下优点：可以更有效地执行处理，并且由于易于掌握每个基板的处理历程而可以分析导致有缺陷的基板的原因。
然而，如图2b所示，用于制造液晶显示板的该系统需要用于平稳地从盒中装载/卸载基板的单独的端口以及替换端口。因此，装载器210和215中的每一个应至少包括三个端口。
并且，需要将各自的端口与处理室连接的传送线280和285。这过度地增加了整个设备的安装面积，从而降低了空间的效率。
发明内容
因此，本发明要提供一种用于制造液晶显示板的系统，以及使用该系统的液晶显示板，在该系统中，将用于在制造液晶显示器的过程中装载和卸载基板的多个端口整合为一个端口，从而降低了整个设备的安装面积，使得更有效的操作成为可能。
并且，本发明要提供一种用于制造液晶显示板的系统，以及使用该系统的液晶显示板，在该系统中，按照预定处理顺序来执行制造处理，而不区分要处理的基板的型号，从而使得可以在出现产品失败时分析导致产品失败的原因。
一方面，本发明提供了一种用于制造液晶显示板的系统。所述系统包括：第一装载器，第二装载器，第一处理单元，第二处理单元以及传送线。所述第一装载器包括两个端口，从通过每个端口装载的一组盒中同时地输入和输出基板。所述第二装载器包括两个端口，从通过每个端口装载的另外一组盒中同时地输入和输出基板。所述第一处理单元对通过所述第一装载器输入的基板执行制造处理，并将完成处理的基板传送到所述第一装载器。第二处理单元对通过所述第二装载器输入的基板执行制造处理，并将完成处理的基板传送到所述第二装载器。所述传送线传送所述基板。
应理解，前面的一般描述和下面的具体描述都是示例性和解释性的，旨在提供如权利要求所限定的本发明的进一步解释。
附图说明
下面参照以下附图对本发明进行详细描述，在附图中相似的标号表示相似的元件。在附图中：
图1a是例示现有技术中的用于制造液晶显示板的系统的示意图；
图1b是例示用于操作图1a所示的用于制造液晶显示板的系统的方法的图；
图2a是例示现有技术中的另一种用于制造液晶显示板的系统的构造的示意图；
图2b是例示用于操作图2a所示的用于制造液晶显示板的系统的方法的图；
图3是例示根据本发明示例性实施例的用于制造液晶显示板的系统的构造的图；
图4是例示用于管理根据本发明示例性实施例的用于制造液晶显示板的系统中的端口的方法的概念图；
图5是例示根据本发明示例性实施例的用于制造液晶显示板的系统的用于输入和输出装载器中的基板的操作的图；以及
图6是例示根据本发明示例性实施例的用于制造液晶显示板的系统中的整个处理的图。
具体实施方式
下面参照附图以更详尽的方式描述本发明的优选实施例。
图3是例示根据本发明示例性实施例的用于制造液晶显示板的系统的构造的图。图4是例示用于管理根据本发明示例性实施例的用于制造液晶显示板的系统中的端口的方法的概念图。图5是例示根据本发明示例性实施例的用于制造液晶显示板的系统的用于输入和输出装载器中的基板的操作的图。
参照图3，用于制造液晶显示板的系统包括：第一装载器310、第二装载器315、清洁机320、第一涂覆机330、第二涂覆机335、第一缓冲器340、第二缓冲器345、第一曝光单元350、第二曝光单元355、显影机360、测试机370以及传送线380和385。
第一装载器310和第二装载器315分别包括两个端口(a、b)。
用于从盒中装载基板和卸载基板的处理都可以在每个端口(a、b)处执行。具体地说，可以同时地执行用于从同一盒中装载和卸载基板的处理。
详细地参照图4，在本发明中，将装载端口410和卸载端口420整合成一个端口400，使得可以从同一盒中同时地输入和输出基板，这与现有技术不同，在现有技术中，装载端口410和卸载端口420单独地操作，以将基板通过装载端口410输入到后处理室中，并将完成了制造处理的基板通过卸载端口420输出。
这可以减少装载和卸载基板所需要的端口的最小数量，从而与传统系统相比，减小了整个设备的安装面积。
如果在盒中装载的基板是通过每个端口(a、b)输入的，从而产生如图5所示的用于将基板装载到盒中的空间，则第一装载器310和第二装载器315可以将完成处理的基板输出并装载到盒的所述空间中，即使该盒正在被装载中。
如果装载有基板的盒(已装满的盒)是通过第一装载器310和第二装载器315的每个端口(a、b)提供的，则将所装载的基板输入并进行处理，将完成处理的基板再次装载到该盒的空间中，从而输出在其中装载有完成处理的基板的盒。
换言之，第一装载器310和第二装载器315可以同时从一个盒中输入和输出基板，而不单独操作用于输入和输出这些基板的盒。因此，当从第一装载器310和第二装载器315中装载和卸载盒时，盒处于一直装载有基板的状态。
从预定的盒中输入的基板可以不必再次输出到同一盒。在连续地执行顺序处理的情况下，输入到该盒的基板和从该盒中输出的基板不可避免地彼此不同。
然而，即使在这种情况下，第一装载器310和第二装载器315也可以仅装载/卸载通过指定的处理室(例如，第一涂覆机330和第一曝光单元350)处理过的基板，从而使得可以同时执行两个不同的处理，并掌握完成处理的基板的处理历程。
清洁机320对通过第一装载器310和第二装载器315输入的基板进行清洁，从而从基板表面去除有机物质和外物。
第一涂覆机330和第二涂覆机335是指用于在基板上涂覆光刻胶的处理室。涂覆方法可以分为陕缝(slit)法、旋涂法以及喷印法。
第一曝光单元350和第二曝光单元355在涂覆有光刻胶的基板上形成掩模图案。
第一缓冲器340和第二缓冲器345是指用于等待直到基板被输入到第一曝光单元350和第二曝光单元355的备用线。
显影机360去除基板的经第一曝光单元350或第二曝光单元355曝光的曝光部分。
测试机测试经过了先前的处理室的基板，并检测诸如瑕疵的缺陷。
根据本发明示例性实施例的用于制造液晶显示板的系统是如下操作的。
图6是例示根据本发明示例性实施例的用于制造液晶显示板的系统中的整个处理的图。
参照图6，通过第一装载器310和第二装载器315输入的基板由清洁机320进行清洁，接着分别进入第一涂覆机330和第二涂覆机335。如果从第一装载器310提供的基板被提供到第一涂覆机330，则从第二装载器315提供的基板应被提供到第二涂覆机335。如果从第一装载器310提供的基板被提供到第二涂覆机335，则从第二装载器315提供的基板应被提供到第一涂覆机330。这同样适用于第一曝光单元350和第二曝光单元355。连续的和强制的应用是理想的，直到系统管理者进行单独的设置为止。
在第一缓冲器340和第二缓冲器345中，基板分别等待第一曝光单元350和第二曝光单元355的曝光处理。
接下来，通过显影机360和测试机370将使用第一曝光单元350和第二曝光单元355对其完成曝光处理的基板再次传送到最初未装载的第一装载器310或第二装载器315，并将其装载并输出到处于备用状态的盒中。
第一传送线380可以在第二装载器315与清洁机320之间，以及测试机370与第一装载器310之间传送基板。第二传送线385可以在第一涂覆机330或第二涂覆机335与第二缓冲器345之间，以及第一曝光单元350与显影机360之间传送基板。
下面简要描述通过以上处理制造出的液晶显示板的构造和功能。
液晶显示板，尽管未说明，包括下基板、上基板以及在上述两个基板之间提供的液晶。
下基板包括选通线、数据线、薄膜晶体管以及像素电极。上基板位于下基板上并与下基板面对，上基板包括滤色器、黑底(black matrix)以及公共电极。
下基板包括按m×n矩阵排列的多条选通线和数据线。在多条选通线和多条数据线的交叉处形成有薄膜晶体管(即开关元件)。
薄膜晶体管包括栅极、源极、漏极、有源层以及欧姆接触层。漏极与像素电极连接，并形成单位像素。换言之，薄膜晶体管以如下方式进行操作：当选通信号通过选通线施加到栅极时，与选通信号同步地施加到数据线的数据信号可以通过欧姆接触层和有源层从源极传输到漏极。
具体地说，当数据信号施加到源极时，电压施加到与漏极连接的像素电极，从而产生像素电极与公共电极之间的电压差。像素电极与公共电极之间的电压差导致介于像素电极与公共电极之间的液晶的分子排列的变化。分子排列的变化导致像素中的透光量的变化，并取决于在每个像素的基础上所施加的数据信号之间的差异而在像素之间产生色差。该色差可以用于控制液晶显示器的图像。
使用诸如选通驱动器和数据驱动器的驱动电路来生成施加到选通线的选通信号和施加到数据线的数据信号。带载封装(TCP)可以将驱动电路与液晶显示板连接。
如上所述，可以将滤色器和公共电极设置在上基板上，但是其位置可以取决于液晶显示器的驱动方法而变化。具体地说，在面内切换(IPS)模式液晶显示器中，将公共电极形成在下基板上。在阵列上滤色器(COA)模式液晶显示器中，将滤色器形成在下基板上。
如上所述，在用于制造液晶显示板的该系统以及使用该系统的液晶显示板中，可以使用二端口装载器来执行与三端口装载器相同的处理。
因此，具备以下优点：大大提高了处理相对面积的效率，从而提高了成品率并降低了成本。
尽管这样描述了本发明，但明显的是，本发明可以许多方式变化。这种变化不应被看作是脱离本发明的精神和范围，并且所有这样的修改，如同对于本领域的技术人员是明显的一样，旨在包含于以下权力要求的范围之内。

Claims (9)

1、一种用于制造液晶显示板的系统，该系统包括：
第一装载器，其包括两个端口，并且从通过每个端口装载的一组盒中同时地输入和输出基板；
第二装载器，其包括两个端口，并且从通过每个端口装载的另外一组盒中同时地输入和输出基板；
第一处理单元，其用于对通过所述第一装载器输入的基板执行制造处理，并将完成处理的基板传送到所述第一装载器；
第二处理单元，其用于对通过所述第二装载器输入的基板执行制造处理，并将完成处理的基板传送到所述第二装载器；以及
传送线，其用于传送所述基板。
2、根据权利要求1所述的系统，该系统还包括用于对从所述第一输入装载器和所述第二输入装载器输入的基板公共地执行制造处理的公共处理单元。
3、根据权利要求1所述的系统，其中，所述第一装载器和所述第二装载器从同一盒中同时地输入和输出基板。
4、根据权利要求3所述的系统，其中，从所述同一盒中输入和输出的基板彼此不同。
5、根据权利要求3所述的系统，其中，从所述同一盒中输入和输出的基板彼此相同。
6、根据权利要求1所述的系统，其中，所述第一处理单元和所述第二处理单元分别都包括涂覆机和曝光单元。
7、根据权利要求2所述的系统，其中，所述公共处理单元包括清洁机和测试机。
8、根据权利要求1所述的系统，其中，所述第一处理单元和所述第二处理单元分别同时执行彼此不同的制造处理。
9、一种使用根据权利要求1所述的用于制造液晶显示板的系统而制造出的液晶显示板。
CNB2006101629849A 2006-03-17 2006-11-30 用于制造液晶显示板的系统以及使用该系统的液晶显示板 Expired - Fee Related CN100510880C (zh)

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