CN101021490A - Automatic detecting system and method for planar substrate - Google Patents
Automatic detecting system and method for planar substrate Download PDFInfo
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- CN101021490A CN101021490A CNA2007100876561A CN200710087656A CN101021490A CN 101021490 A CN101021490 A CN 101021490A CN A2007100876561 A CNA2007100876561 A CN A2007100876561A CN 200710087656 A CN200710087656 A CN 200710087656A CN 101021490 A CN101021490 A CN 101021490A
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Classifications
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
- G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N21/5907—Densitometers
- G01N2021/5957—Densitometers using an image detector type detector, e.g. CCD
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8812—Diffuse illumination, e.g. "sky"
- G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
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- Physics & Mathematics (AREA)
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (45)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007100876561A CN101021490B (en) | 2007-03-12 | 2007-03-12 | Automatic detecting system and method for planar substrate |
KR1020097020292A KR101174081B1 (en) | 2007-03-12 | 2008-03-05 | Plane substrate auto-test system and the method thereof |
PCT/CN2008/000439 WO2008110061A1 (en) | 2007-03-12 | 2008-03-05 | Plane substrate auto-test system and the method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007100876561A CN101021490B (en) | 2007-03-12 | 2007-03-12 | Automatic detecting system and method for planar substrate |
Publications (2)
Publication Number | Publication Date |
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CN101021490A true CN101021490A (en) | 2007-08-22 |
CN101021490B CN101021490B (en) | 2012-11-14 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN2007100876561A Active CN101021490B (en) | 2007-03-12 | 2007-03-12 | Automatic detecting system and method for planar substrate |
Country Status (3)
Country | Link |
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KR (1) | KR101174081B1 (en) |
CN (1) | CN101021490B (en) |
WO (1) | WO2008110061A1 (en) |
Cited By (49)
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WO2008110061A1 (en) * | 2007-03-12 | 2008-09-18 | 3I Systems Corp | Plane substrate auto-test system and the method thereof |
CN101887030A (en) * | 2009-05-15 | 2010-11-17 | 圣戈本玻璃法国公司 | Method and system for detecting defects of surface and/or interior of transparent substrate |
CN102348965A (en) * | 2009-03-10 | 2012-02-08 | 皇家飞利浦电子股份有限公司 | Time domain multiplexing for imaging using time delay and integration sensors |
CN102016554B (en) * | 2008-04-04 | 2013-01-30 | 南达技术公司 | Optical inspection system and method |
CN103514449A (en) * | 2012-06-28 | 2014-01-15 | 联想(北京)有限公司 | Image collecting device and method |
CN103676234A (en) * | 2013-11-29 | 2014-03-26 | 合肥京东方光电科技有限公司 | Detection device, array substrate detection system and array substrate detection method |
CN103728318A (en) * | 2013-12-31 | 2014-04-16 | 深圳市金立通信设备有限公司 | Method, device and terminal for detecting cleanliness of screen |
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CN105044117A (en) * | 2015-08-14 | 2015-11-11 | 华侨大学 | Detection method and detection system used for surface quality of flat plate |
CN105043982A (en) * | 2015-07-02 | 2015-11-11 | 武汉中导光电设备有限公司 | Automatic optical detection system |
CN105081560A (en) * | 2014-05-16 | 2015-11-25 | 灿美工程股份有限公司 | Defect observation device and laser processing equipment containing defect observation device |
CN105486690A (en) * | 2015-12-23 | 2016-04-13 | 苏州精濑光电有限公司 | Optical detection device |
CN105665919A (en) * | 2014-11-19 | 2016-06-15 | 昆山国显光电有限公司 | On-line automatic substrate defect repairing system and method |
CN105783761A (en) * | 2016-05-03 | 2016-07-20 | 北京航空航天大学 | High-precision ultrahigh temperature video extensometer and measurement method thereof |
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CN101021490B (en) * | 2007-03-12 | 2012-11-14 | 3i系统公司 | Automatic detecting system and method for planar substrate |
-
2007
- 2007-03-12 CN CN2007100876561A patent/CN101021490B/en active Active
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2008
- 2008-03-05 WO PCT/CN2008/000439 patent/WO2008110061A1/en active Application Filing
- 2008-03-05 KR KR1020097020292A patent/KR101174081B1/en active IP Right Grant
Cited By (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008110061A1 (en) * | 2007-03-12 | 2008-09-18 | 3I Systems Corp | Plane substrate auto-test system and the method thereof |
CN102016554B (en) * | 2008-04-04 | 2013-01-30 | 南达技术公司 | Optical inspection system and method |
CN102348965A (en) * | 2009-03-10 | 2012-02-08 | 皇家飞利浦电子股份有限公司 | Time domain multiplexing for imaging using time delay and integration sensors |
CN102348965B (en) * | 2009-03-10 | 2014-06-04 | 皇家飞利浦电子股份有限公司 | Time domain multiplexing for imaging using time delay and integration sensors |
CN101887030A (en) * | 2009-05-15 | 2010-11-17 | 圣戈本玻璃法国公司 | Method and system for detecting defects of surface and/or interior of transparent substrate |
CN103514449B (en) * | 2012-06-28 | 2017-08-29 | 联想(北京)有限公司 | A kind of image collecting device and method |
CN103514449A (en) * | 2012-06-28 | 2014-01-15 | 联想(北京)有限公司 | Image collecting device and method |
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CN101021490B (en) | 2012-11-14 |
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