CN109782152B - Substrate detection device and method for detecting substrate - Google Patents
Substrate detection device and method for detecting substrate Download PDFInfo
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- CN109782152B CN109782152B CN201711125164.7A CN201711125164A CN109782152B CN 109782152 B CN109782152 B CN 109782152B CN 201711125164 A CN201711125164 A CN 201711125164A CN 109782152 B CN109782152 B CN 109782152B
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- 239000000758 substrate Substances 0.000 title claims abstract description 121
- 238000001514 detection method Methods 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000007689 inspection Methods 0.000 claims description 10
- 230000005674 electromagnetic induction Effects 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 5
- 230000007547 defect Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Abstract
The invention provides a substrate detection device and a method for detecting a substrate, wherein the substrate detection device comprises: a support assembly and an air bearing plate; the support assembly is connected with the air floatation plate through an elastic connecting piece, and at least two distance sensors are arranged on the support assembly; the at least two distance sensors are used for detecting the distance between two opposite edges of the air bearing plate and the supporting component; the air floatation plate is provided with an air outlet on one surface facing the detected substrate; the air outlet is connected with an air supply device. In the above embodiment, when the air bearing plate passes through the protrusion or the foreign matter on the surface of the substrate, the air pressure between the air bearing plate and the substrate will change, so as to cause the change of the distance between the two, and further determine the presence of the protrusion or the foreign matter on the surface of the substrate.
Description
Technical Field
The invention relates to the technical field of substrate detection, in particular to a substrate detection device and a substrate detection method thereof.
Background
In the prior art, destructive inspection of the extracted sample is generally performed. This way of inspection not only causes waste, but also causes rejects to flow into the next flow because all substrates cannot be inspected. Therefore, there is an urgent need for a substrate nondestructive inspection technology, that is, a non-contact substrate inspection technology. In order to realize non-contact detection and ensure working efficiency, the detection element of the detection device needs to be as close to the detected substrate as possible; meanwhile, in order to avoid scratching the substrate or damaging the detection element, it is necessary to ensure that the detection element and the detected substrate do not contact; therefore, the realization of the non-contact substrate detection technology has very high requirements on the accuracy of controlling the distance between the detection element and the detected substrate; particularly, when there are protrusions or foreign matters on the surface of the substrate to be inspected, the substrate inspection apparatus is required to be able to find out in time.
Disclosure of Invention
In order to solve the above problems, the present invention provides a substrate inspection device and a substrate inspection method for substrate, particularly a substrate with a circuit board, for realizing non-contact inspection of the substrate.
The present invention provides a substrate detection apparatus, comprising: a support assembly and an air bearing plate; wherein,
the support component is connected with the air floating plate through an elastic connecting piece, and at least two distance sensors are arranged on the support component; at least two distance sensors are used for detecting the distance between two opposite edges of the air floatation plate and the supporting component;
one surface of the air floating plate, which faces the detected substrate, is provided with an air outlet; the air outlet is connected with an air supply device.
In the above embodiment, the elastic connection member acts on the elastic force of the air floating plate, the self weight of the air floating plate and the pressure of the air flow at the air outlet acts on the air floating plate to make the air floating plate keep a distance from the detected substrate; the initial position of the air floating plate and the size of the air flow of the air outlet are adjusted, so that the distance between the air floating plate and the detected substrate can be controlled; when the air floating plate passes through the bulge or the foreign matter on the surface of the substrate, the air pressure between the air floating plate and the substrate can be changed, so that the distance between the air floating plate and the substrate is changed, and the existence of the bulge or the foreign matter on the surface of the substrate can be judged.
In a specific embodiment, the air outlet is located at the center of the air bearing plate.
In a specific embodiment, the number of the air outlets is not less than two, and the air outlets are symmetrically distributed around the center of the air bearing plate.
In a specific embodiment, the number of the distance sensors is three, the three distance sensors are arranged in a triangle, and the distance sensors correspond to the edges of the air bearing plate.
In a specific embodiment, an electromagnetic sensor is disposed within the air bearing plate to detect electrical circuitry on the substrate.
In a specific embodiment, the support assembly comprises: the first bracket, the second bracket assembled on the first bracket and capable of sliding along a first horizontal direction, the third bracket assembled on the second bracket and capable of sliding along a second horizontal direction, wherein the first horizontal direction is vertical to the second horizontal direction, and the elastic connecting piece is connected with the third bracket; further comprises:
the first driving device is used for driving the second bracket to slide;
and the second driving device is used for driving the third bracket to slide. So that an arbitrary movement in the horizontal direction can be achieved.
In a specific embodiment, the third support is a telescopic support that is distance adjustable in a direction perpendicular to the substrate. The adjustment in the vertical direction is achieved.
In a specific embodiment, the third support is provided with a mechanical mechanism for adjusting the parallelism of the air bearing plate and the base plate.
The invention also provides a method for detecting the substrate by using the substrate detection device, which comprises the following steps:
the distance from the air bearing plate to the detected surface on the base plate is adjusted through the supporting component;
the air supply device is used for ventilating the air outlet on the air floating plate, and the distance between the air floating plate and the base plate is adjusted by adjusting the air flow of the air outlet and then adjusting the air pressure between the air floating plate and the base plate;
and moving the air floating plate, receiving the distance values between the air floating plate and the supporting component detected by at least two distance sensors, and alarming or stopping when the difference value between the measured value variation quantities of the distance sensors is larger than a set value.
In a specific embodiment, when an electromagnetic sensor for detecting the circuit on the substrate is disposed in the air bearing plate, the method further comprises the following steps:
the substrate detection devices are used in sets, each set comprises two substrate detection devices, voltage is applied to the electromagnetic sensor in one set of substrate detection devices, and electromagnetic induction is carried out on the circuit in the substrate;
and the electromagnetic induction value of the circuit is measured by the electromagnetic sensor in the other set of substrate detection device, so that whether the circuit has a broken circuit or a short circuit defect is judged.
Drawings
Fig. 1 is a schematic structural diagram of a substrate detection apparatus according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a relative position between a distance sensor and an air bearing plate of a substrate detection device according to an embodiment of the present invention;
FIG. 3 is a schematic diagram showing a relative position between a distance sensor and an air bearing plate of a substrate detection apparatus according to an embodiment of the present invention;
fig. 4 is a reference diagram of a usage state of the substrate detection apparatus according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1 and fig. 2 together, fig. 1 shows a schematic structural diagram of a substrate detection apparatus according to an embodiment of the present invention; fig. 2 shows a schematic diagram of the relative positions of the distance sensor 2 and the air bearing plate 3.
As can be seen from fig. 1 and 2, in order to solve the problems existing in the prior art, an embodiment of the present invention provides a substrate detection apparatus, which includes two components, respectively: a support assembly 1 and an air bearing plate 3; the support assembly 1 is used for supporting the air floating plate 3, and when the support assembly is specifically arranged, the support assembly 1 is connected with the air floating plate 3 through an elastic connecting piece, and at least two distance sensors 2 are arranged on the support assembly 1; at least two distance sensors 2 are used for detecting the distance between two opposite edges of the air bearing plate 3 and the support component 1; when specifically set up, this at least two distance sensor 2 sets up the position that corresponds with two opposite edges of air supporting plate 3 on supporting component 1 to can better detect the relative distance between two opposite edges of air supporting plate 3 and supporting component 1.
The air floating plate 3 is provided with an air outlet 14 on one surface facing the detected substrate 4; the air outlet 14 is connected to an air supply.
When in use, the elastic connecting piece 6 acts on the elastic force of the air floating plate 3, the self weight of the air floating plate 3 and the pressure of the air flow of the air outlet 14 acting on the air floating plate 3 interact with each other, so that the air floating plate 3 keeps a distance from the detected substrate 4; the initial position of the air floating plate 3 and the air flow size of the air outlet 14 are adjusted, so that the distance between the air floating plate 3 and the detected substrate 4 can be controlled; when the air bearing plate 3 passes through the surface bulge or the foreign matter of the substrate 4, the air pressure between the air bearing plate 3 and the substrate 4 changes, so that the distance between the air bearing plate 3 and the substrate 4 changes, and the existence of the surface bulge or the foreign matter of the substrate 4 can be judged.
In order to facilitate understanding of the substrate detection apparatus provided in this embodiment, the following describes the substrate detection apparatus in detail with reference to specific embodiments and drawings.
Referring to fig. 1 and 4 together, fig. 1 shows a specific structure of a substrate detection apparatus according to an embodiment of the present application, and fig. 4 shows another structure. However, in both structures, the substrate detection apparatus includes the support assembly 1 and the air bearing plate 3, wherein the support assembly 1 may adopt different structures. In one embodiment, as shown in fig. 4, the support assembly 1 may be a single support, and the support assembly 1 in fig. 4 is a single support structure. The support is for supporting the air bearing plate 3. As shown in fig. 1, in another embodiment, the support assembly 1 is an assembly, the support assembly 1 comprising: a first bracket 11, a second bracket 12 assembled on the first bracket 11 and slidable in a first horizontal direction, a third bracket 13 assembled on the second bracket 12 and slidable in a second horizontal direction, wherein the first horizontal direction is perpendicular to the second horizontal direction, and the elastic connection member 6 is connected with the third bracket 13; further comprises: first driving means for driving the second bracket 12 to slide; and a second driving device for driving the third bracket 13 to slide. So that an arbitrary movement in the horizontal direction can be achieved. Namely, the support assembly 1 comprises three supports capable of relatively moving, wherein the first support 11 can be fixedly connected with the detection equipment, and the substrate detection device is fixed on the detection equipment, and the second support 12 and the third support 13 can move on the horizontal plane, so that the adjustment of the air bearing plate 3 on the horizontal plane is realized, and during detection, the air bearing plate 3 is driven to sweep the substrate 4 through the movement of the second support 12 and the third support 13 so as to realize the detection of the substrate 4. In addition, during the movement, the second support 12 and the third support 13 are driven by the first driving device and the second driving device, respectively, and in a specific scheme, the first support 11 and the second support 12 are respectively provided with a guide rail, the second support 12 is slidably connected with the first support 11 through the guide rail, and the third support 13 is slidably connected with the second support 12 through the guide rail. In addition, for the driving device, the first driving device and the second driving device may be an air cylinder, a hydraulic cylinder, a linear motor, or a screw driving device. The screw driving device is a combined mechanism which adopts a motor to drive a screw.
In order to achieve a movement in the vertical direction, the third support 13 is a telescopic support which is telescopic in the vertical direction. Thereby, the adjustment of the air bearing plate 3 in the vertical direction can be realized. Alternatively, the adjustment of the height of the whole support assembly 1 can be achieved by connecting a telescopic device to the first bracket 11. In addition, in order to ensure accuracy in detection, the third bracket 13 is provided with a mechanical mechanism for adjusting parallelism of the air bearing plate 3 and the base plate 4. The mechanical structure can be a common mechanical structure in the prior art, for example, the mechanical structure comprises a spherical connecting seat and a ball head which is arranged in the spherical connecting seat and can rotate relative to the spherical connecting seat, and the spherical connecting seat is also provided with a locking screw for locking the ball head; the spherical connecting seat is connected with the third bracket 13, the ball head is connected with the second bracket 12, when the leveling is needed, the locking screw is unlocked, the distance between the air floating plate 3 and the standard plate is detected through the set sensors, and when the distances detected by the sensors are the same, the locking screw is locked, so that the leveling is completed.
When the air-floating plate 3 is specifically arranged, the number of the air outlets on the air-floating plate 3 can be different, one air outlet can be adopted, a plurality of air outlets can be adopted, and when one air outlet is adopted, the air outlets 14 are positioned at the center of the air-floating plate 3. When a plurality of air outlets 14 are adopted, the number of the air outlets 14 is not less than 2, and the air outlets 14 are symmetrically distributed around the central position of the air floating plate 3.
In a specific embodiment, the elastic connection 6 is a compression spring. To provide a good elastic effect.
In a specific arrangement, the number of the distance sensors 2 can be different, and at least two of the distance sensors can be satisfied, as shown in fig. 2, the number of the distance sensors 2 is two, and the two distance sensors 2 are diagonally arranged and are used for detecting the distance between two opposite diagonal angles of the substrate 4 and the support component 1; to determine whether or not there is a bump or foreign matter on the surface of the substrate 4 to be inspected by calculating whether or not the difference between the measured value variation amounts of the respective distance sensors 2 is larger than a set value. Or as shown in fig. 3, the number of the distance sensors 2 is three, the three distance sensors 2 are arranged in a triangle, and the distance sensors 2 correspond to the edges of the air floating plate 3. As shown in fig. 3, a plane can be determined according to the distances detected by the three distance sensors 2, so that whether the air floating plate 3 is inclined or not can be more accurately judged, and when the air floating plate is specifically arranged, the three distance sensors 2 are arranged in a right triangle manner as shown in fig. 3. It should be understood that fig. 2 and 3 only exemplify a few specific arrangements of the sensors 2, and the number and arrangement of the distance sensors 2 may be other, so long as it is only required to be able to detect whether the air floating plate 3 is inclined.
In addition, in order to improve the efficiency in detection, an electromagnetic sensor for detecting the circuit on the substrate 4 is disposed in the air bearing plate 3 of the detection device provided by the embodiment of the invention. The electromagnetic sensor is used for detecting whether a circuit in the substrate 4 is broken or shorted, and whether the circuit on the substrate 4 is qualified or not can be detected by the electromagnetic sensor in the moving process of the air bearing plate 3. Thereby detecting the presence or absence of the bumps or foreign matter on the substrate 4 and simultaneously detecting the circuit on the substrate 4.
The invention also provides a method for detecting the substrate by using the substrate detection device, which comprises the following steps:
the distance from the air bearing plate to the detected surface on the base plate is adjusted through the supporting component;
the air supply device is used for ventilating the air outlet on the air floating plate, and the distance between the air floating plate and the base plate is adjusted by adjusting the air flow of the air outlet and then adjusting the air pressure between the air floating plate and the base plate;
and moving the air floating plate, receiving the distance values between the air floating plate and the supporting component detected by at least two distance sensors, and alarming or stopping when the difference value between the measured value variation quantities of the distance sensors is larger than a set value.
In a specific embodiment, when an electromagnetic sensor for detecting the circuit on the substrate is disposed in the air bearing plate, the method further comprises the following steps:
the substrate detection devices are used in sets, each set comprises two substrate detection devices, voltage is applied to the electromagnetic sensor in one set of substrate detection devices, and electromagnetic induction is carried out on the circuit in the substrate;
and the electromagnetic induction value of the circuit is measured by the electromagnetic sensor in the other set of substrate detection device, so that whether the circuit has a broken circuit or a short circuit defect is judged.
In the specific measurement, the method comprises the following steps:
before measurement, the air floating plate and the base plate are kept parallel by adjusting a three-degree-of-freedom adjusting mechanism consisting of a first bracket, a second bracket and a third bracket in a supporting assembly;
when the air floatation device works, an external power supply applies voltage to an electromagnetic sensor integrated in the air floatation plate;
the air supply device supplies air to the air floating plate, air flow is guided into the vent holes arranged on the air floating plate from the upper part, and air flow flows out from the lower part of the vent holes, so that air pressure acts on the lower surface of the air floating plate and the upper surface of the substrate; when the distance between the air floating plate and the substrate is increased, the air pressure between the air floating plate and the substrate is reduced, the spring component is stretched, and the air floating plate automatically approaches to the substrate, so that the distance between the air floating plate and the substrate is reduced; when the distance between the air floating plate and the base plate is reduced, the air pressure between the air floating plate and the base plate is increased, the spring assembly is compressed, the air floating plate is automatically away from the base plate, and the distance between the air floating plate and the base plate is further increased; in this way, the air bearing plate and the base plate can be kept at a certain distance;
the support component drives the air bearing plate to keep a required distance with the substrate and move along the surface of the substrate; if the substrate is provided with the bulge or the foreign matter, the bulge or the foreign matter can touch and jack up the air floating plate, and the air floating plate at the position is lifted upwards, so that the measured value of the distance sensor arranged above the air floating plate is triggered to change; the distance sensor transmits the value to the detection device, and a control system in the detection device performs treatment such as alarm according to a preset rule according to the measured value received by the distance sensor.
Referring to fig. 4 together, fig. 4 shows a schematic view of a substrate detection apparatus in use, and in use, the apparatus can realize that the distance between the bottom of the air-floating plate 3 and the upper surface of the substrate 4 is constant through the air-floating plate 3 and the elastic member 6, specifically, the air-floating plate 3 continuously blows air towards the substrate 4 through the air supply device, so as to maintain the relative distance between the air-floating plate 3 and the substrate 4. The device can measure the distance between the head of the distance sensor 2 and the top of the air floating plate 3, namely the relative distance between the supporting component 1 and the air floating plate 3 in real time through two high-precision distance sensors 2 which are diagonally arranged, and the detection equipment connected with the substrate detection device can judge whether the surface of the substrate 4 has bulges or foreign matters through the data measured by the distance sensor 2 and a numerical analysis method. In specific use, as shown in fig. 4, if there is a protrusion or a foreign matter on the upper surface of the substrate 4, or if there is a foreign matter between the substrate 4 and the substrate carrying device 5, which causes the upper surface of the substrate 4 to protrude upward, the distance between the distance sensor 2 and the air bearing plate 3 will change, which will cause the display value of the distance sensor 2 to change. Calculating the deviation amount from the previous value at each sampling period of the distance sensor 2, and then calculating the difference between the deviation amounts corresponding to the different sensors; when the absolute value of the difference is equal to or larger than a set threshold value, judging that bulges or foreign matters exist, so as to guide the detection equipment to stop or continue detection; when the absolute value of the difference is smaller than the set threshold, it is determined that there is no protrusion or foreign matter.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and the equivalents thereof, the present invention should be construed as including such modifications and variations.
Claims (9)
1. A substrate inspection apparatus, comprising: a support assembly and an air bearing plate; wherein,
the support component is connected with the air floating plate through an elastic connecting piece, and at least two distance sensors are arranged on the support component; at least two distance sensors are used for detecting the distance between two opposite edges of the air floatation plate and the supporting component;
one surface of the air floating plate, which faces the detected substrate, is provided with an air outlet; the air outlet is connected with an air supply device;
the method for detecting the substrate by the substrate detection device comprises the following steps:
the distance from the air bearing plate to the detected surface on the base plate is adjusted through the supporting component;
the air supply device is used for ventilating the air outlet on the air floating plate, and the distance between the air floating plate and the base plate is adjusted by adjusting the air flow of the air outlet and then adjusting the air pressure between the air floating plate and the base plate;
and moving the air floating plate, receiving the distance values between the air floating plate and the supporting component detected by at least two distance sensors, and alarming or stopping when the difference value between the measured value variation quantities of the distance sensors is larger than a set value.
2. The substrate detection apparatus according to claim 1, wherein the air outlet is located at a central position of the air bearing plate.
3. The substrate detection apparatus according to claim 1, wherein the number of the air outlets is not less than 2, and the air outlets are symmetrically distributed around the center position of the air bearing plate.
4. The substrate detection apparatus according to claim 1, wherein the number of the distance sensors is three, the three distance sensors are arranged in a triangle, and the distance sensors each correspond to an edge of the air bearing plate.
5. The substrate detection apparatus according to claim 1, wherein an electromagnetic sensor for detecting a circuit on the substrate is provided in the air bearing plate.
6. The substrate detection apparatus according to any one of claims 1 to 5, wherein the support assembly includes: the first bracket, the second bracket assembled on the first bracket and capable of sliding along a first horizontal direction, the third bracket assembled on the second bracket and capable of sliding along a second horizontal direction, wherein the first horizontal direction is vertical to the second horizontal direction, and the elastic connecting piece is connected with the third bracket; further comprises:
the first driving device is used for driving the second bracket to slide;
and the second driving device is used for driving the third bracket to slide.
7. The substrate detection apparatus according to claim 6, wherein the third support is a telescopic support that is distance-adjustable in a direction perpendicular to the substrate.
8. The substrate detection apparatus according to claim 7, wherein the third support is provided with a mechanical mechanism for adjusting parallelism of the air bearing plate and the substrate.
9. A method of inspecting a substrate using the substrate inspection apparatus according to claim 1, comprising the steps of:
the distance from the air bearing plate to the detected surface on the base plate is adjusted through the supporting component;
the air supply device is used for ventilating the air outlet on the air floating plate, and the distance between the air floating plate and the base plate is adjusted by adjusting the air flow of the air outlet and then adjusting the air pressure between the air floating plate and the base plate;
moving the air floating plate, receiving the distance values between the air floating plate and the supporting component detected by at least two distance sensors, and alarming or stopping when the difference value between the measured value variation of each distance sensor is larger than a set value;
wherein, when being provided with the electromagnetic sensor that detects circuit on the base plate in the air supporting inboard, still include the following step:
the substrate detection devices are used in sets, each set comprises two substrate detection devices, voltage is applied to the electromagnetic sensor in one set of substrate detection devices, and electromagnetic induction is carried out on the circuit in the substrate;
and the electromagnetic induction value of the circuit is measured by the electromagnetic sensor in the other set of substrate detection device, so that whether the circuit has a broken circuit or a short circuit defect is judged.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711125164.7A CN109782152B (en) | 2017-11-14 | 2017-11-14 | Substrate detection device and method for detecting substrate |
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| CN201711125164.7A CN109782152B (en) | 2017-11-14 | 2017-11-14 | Substrate detection device and method for detecting substrate |
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| CN109782152B true CN109782152B (en) | 2024-03-12 |
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| CN112478782A (en) * | 2020-12-03 | 2021-03-12 | 深圳市华星光电半导体显示技术有限公司 | Glass panel caching device and glass panel caching method |
| CN115318666B (en) * | 2022-08-17 | 2023-05-26 | 安徽家瑞轴承有限公司 | High-precision intelligent sorting and collecting device based on bearing surface defects |
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