CN103698630B - A kind of electrical array detection equipment - Google Patents
A kind of electrical array detection equipment Download PDFInfo
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- CN103698630B CN103698630B CN201310688061.7A CN201310688061A CN103698630B CN 103698630 B CN103698630 B CN 103698630B CN 201310688061 A CN201310688061 A CN 201310688061A CN 103698630 B CN103698630 B CN 103698630B
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- fixed station
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- detection equipment
- prober frame
- frame
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Abstract
The invention discloses a kind of electrical array detection equipment, comprising: board, board comprises: the liftable platform and the fixed station that support substrate to be measured, and fixed station is positioned at the top of liftable platform, and lifting table can drive substrate to be measured to move a certain distance to fixed station; To be positioned at above board, for the erecting frame of stationary probe framework, erecting frame and board are oppositely arranged and erecting frame can move along the lifting direction of the liftable platform of board; At least one is arranged between the fixed station of board and prober frame, for supporting probe framework and the telescoping mechanism of spacing regulating fixed station and prober frame.Electrical array detection equipment provided by the invention, by arranging telescoping mechanism between fixed station and prober frame, after making to change prober frame at every turn, the robotization that gap between adjustment prober frame and fixed station becomes is a little, decrease the time of adjustment, improve the work efficiency of electrical array detection equipment.
Description
Technical field
The present invention relates to display technique field, particularly a kind of electrical array detection equipment.
Background technology
In the process that array base palte is produced, need to be detected by electrical array detection equipment array substrate, during test, as shown in Figure 1, Fig. 1 is the structural representation of electrical array detection equipment in prior art, substrate to be measured is placed on the liftable platform 012 of the board 01 in electrical array detection equipment, the liftable platform 012 of board 01 is driven to rise by cylinder nitrogen blowing, and with the probes touch in prober frame 02, test philosophy is that the signal in prober frame 02 is imported substrate to be measured by probe.
The array base palte testing often kind of size has corresponding prober frame 02, the replacing carrying out prober frame 02 is needed before test, need after replacing to adjust the gap between prober frame 02 and the fixed station 011 of board 01, if because the gap between the fixed station 011 of prober frame 02 and 01 is too large, the liftable platform 012 of board 01 can be caused to rise fixed range after, array base palte cannot with the probes touch in prober frame 02, and signal just can not normally add; If after the too little meeting in gap causes the liftable platform 012 of board 01 to rise, the probe in array base palte and prober frame 02 extrudes, and causes the generation at the broken angle of array base palte.Adjustment method of the prior art is the iron plate pad 03 increasing or reduce on the fixed station 011 of board, to adjust the gap between the fixed station 011 of board 01 and prober frame 02.
But, this adjustment method of the prior art is more difficult, need again and again by the size in ruler measurement gap during debugging, then constantly go to regulate gap length till suitable, and the degree of accuracy of gap length with the naked eye cannot go range estimation, debug very time-consuming, cause the pumpdown time seriously to lengthen, the accuracy of impact test.
Summary of the invention
The invention provides an electrical array detection equipment, automatically can adjust the gap between prober frame and the fixed station of board, there is higher work efficiency.
For achieving the above object, the invention provides following technical scheme:
A kind of electrical array detection equipment, comprising:
Board, described board comprises: the liftable platform and the fixed station that support substrate to be measured, and described fixed station is positioned at the top of described liftable platform, and described lifting table can drive described substrate to be measured to move a certain distance to described fixed station;
To be positioned at above described board, for the erecting frame of stationary probe framework, described erecting frame and described board are oppositely arranged and described erecting frame can move along the lifting direction of the liftable platform of described board;
At least one is arranged between the fixed station of described board and described prober frame, for supporting described prober frame and regulating the telescoping mechanism of spacing of described fixed station and described prober frame.
Electrical array detection equipment provided by the invention, by arranging telescoping mechanism between fixed station and prober frame, after making to change prober frame at every turn, the robotization that gap between adjustment prober frame and fixed station becomes is a little, decrease the time of adjustment, improve the work efficiency of electrical array detection equipment.
In some optional embodiments, described telescoping mechanism is four, described in each, telescoping mechanism comprises: be fixed on the drive unit of described fixed station, with the relatively-stationary cylinder barrel of described drive unit, first piston bar and the second piston rod, described second piston rod and described drive unit are in transmission connection, and the end of the external part of described first piston bar and described prober frame offset towards the one side of described fixed station.When distance between prober frame and fixed station is less, driving second piston rod moves upward by drive unit, because the hydraulic oil between first piston bar and the second piston rod is in sealing state, therefore when the second piston rod moves upward, by squeezed fluid force feed, and then promotion first piston bar moves upward by hydraulic oil, promotion prober frame moves upward by first piston bar, and then the distance increased between prober frame and fixed station reaches the distance of needs, otherwise, when distance between prober frame and fixed station is larger, driving second piston rod moves downward by drive unit, hydraulic oil will move downward, and then first piston bar will move downward under gravity, prober frame also can move down along with the motion of first piston bar, and then the distance reduced between prober frame and fixed station reaches the distance of needs.
In some optional embodiments, described cylinder barrel has the first sliding cavity with the piston slipper seal of described first piston bar, and the second sliding cavity of piston slipper seal with described second piston rod, the diameter of described first sliding cavity is greater than the diameter of described second sliding cavity.Because the first sliding cavity is different with the diameter of the second sliding cavity, the stroke of such first piston bar and the second piston rod is also different, namely the distance of first piston bar movement is less than the displacement of the second piston rod, can increase the Adjustment precision between prober frame and fixed station like this.
In some optional embodiments, described drive unit is oil motor.
In some optional embodiments, the external part of described first piston bar is provided with displacement transducer, and institute's displacement sensors is for detecting and showing the distance between the end of described first piston bar and described fixed station.
In some optional embodiments, described telescoping mechanism is four and drives oil cylinder, the piston rod of described driving oil cylinder stretches out from one end of its cylinder barrel, and the end of the external part of described piston rod and described prober frame offset towards the one side of described fixed station, the other end of the cylinder barrel of described driving oil cylinder is fixedly connected with described fixed station.The hydraulic jack of this structure, can stretching out and retracting by the turnover control piston bar of hydraulic oil.
In some optional embodiments, the external part of described piston rod is provided with displacement transducer, and institute's displacement sensors is for detecting and showing the distance between the end of described piston rod and described fixed station.
In some optional embodiments, described liftable platform is provided with four angle pressure transducers one to one with described substrate to be measured towards the one side of described prober frame, when described pressure transducer senses pressure, the pilot lamp of described pressure transducer is luminous; When described pressure transducer does not sense pressure, the pilot lamp of described pressure transducer extinguishes.The pressure transducer arranged can sense that whether four angles of substrate to be measured are complete, if certain angle in substrate to be measured is imperfect, the pressure transducer corresponding with this angle will be responded to less than this angle, can remind operating personnel that this substrate to be measured is incomplete, realize the Real-Time Monitoring to the whether broken angle of substrate to be measured.
Accompanying drawing explanation
Fig. 1 is the structural representation of electrical array detection equipment in prior art;
The electrical array detection equipment schematic diagram that Fig. 2 provides for the embodiment of the present invention;
A kind of structural representation of telescoping mechanism in the electrical array detection equipment that Fig. 3 provides for the embodiment of the present invention;
The another kind of structural representation of telescoping mechanism in the electrical array detection equipment that Fig. 4 provides for the embodiment of the present invention;
The part-structure schematic diagram of the lifting table of the electrical array detection equipment that Fig. 5 provides for the embodiment of the present invention.
Reference numeral:
01-board 011-fixed station 012-lifting table 02-prober frame 03-iron plate pad 1-board 11-fixed station 12-lifting table 2-prober frame 3-telescoping mechanism 31-drive unit 32-first piston bar 33-second piston rod 341-first sliding cavity 342-second sliding cavity 34-cylinder barrel 35-displacement transducer 36-piston rod 37-cylinder barrel 4-pressure transducer
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
As shown in Figure 2, the electrical array detection equipment schematic diagram that Fig. 2 provides for the embodiment of the present invention, the electrical array detection equipment that the embodiment of the present invention provides, comprising:
Board 1, board 1 comprises: the liftable platform 12 and the fixed station 11 that support substrate to be measured, and fixed station 11 is positioned at the top of liftable platform 12, and lifting table 12 can drive substrate to be measured to move a certain distance to fixed station 11;
To be positioned at above board 1, for the erecting frame (not shown) of stationary probe framework 2, erecting frame and board 1 are oppositely arranged and erecting frame can move (direction of arrow as shown in Figure 2) along the lifting direction of the liftable platform 12 of board 1;
At least one is arranged between the fixed station 11 of board 1 and prober frame 2, for supporting probe framework 2 and the telescoping mechanism 3 regulating fixed station 11 and the spacing of prober frame 2.
Electrical array detection equipment provided by the invention, by arranging telescoping mechanism 3 between fixed station 11 and prober frame 2, after making to change prober frame 2 at every turn, the robotization that gap between adjustment prober frame 2 and fixed station 11 becomes is a little, decrease the time of adjustment, improve the work efficiency of electrical array detection equipment.
The concrete structure of above-mentioned telescoping mechanism can have multiple:
In a kind of concrete embodiment, telescoping mechanism 3 is four, as shown in Figure 3, a kind of structural representation of telescoping mechanism in the electrical array detection equipment that Fig. 3 provides for the embodiment of the present invention, each telescoping mechanism 3 comprises: be fixed on the drive unit 31 of fixed station 11, with the relatively-stationary cylinder barrel 34 of drive unit 31, first piston bar 32 and the second piston rod 33, second piston rod 33 and drive unit 31 are in transmission connection, and the end of the external part of first piston bar 32 and prober frame 2 offset towards the one side of fixed station 11.When distance between prober frame 2 and fixed station 11 is less, driving second piston rod 33 moves upward by drive unit 31, because the hydraulic oil between first piston bar 32 and the second piston rod 33 is in sealing state, therefore when the second piston rod 33 moves upward, by squeezed fluid force feed, and then promotion first piston bar 32 moves upward by hydraulic oil, promotion prober frame 2 moves upward by first piston bar 32, and then the distance increased between prober frame 2 and fixed station 11 reaches the distance of needs, otherwise, when distance between prober frame 2 and fixed station 11 is larger, driving second piston rod 33 moves downward by drive unit 21, hydraulic oil will move downward, and then first piston bar 32 will move downward under gravity, prober frame 2 also can move down along with the motion of first piston bar 32, and then the distance reduced between prober frame 2 and fixed station 11 reaches the distance of needs.
Above-mentioned cylinder barrel 34 is relative with drive unit 31 fixing, and optionally, cylinder barrel 34 is also fixed on fixed station 11, or is fixed on the housing of electrical array detection equipment.
Preferably in embodiment, a corner of four retractor device difference supporting probe frameworks 2.
Preferably, please continue to refer to Fig. 3, above-mentioned cylinder barrel 34 has the first sliding cavity 341 with the piston slipper seal of first piston bar 32, and is greater than the diameter of the second sliding cavity 342 with the diameter of the second sliding cavity 342, first sliding cavity 341 of the piston slipper seal of the second piston rod 33.Because the first sliding cavity 341 is different with the diameter of the second sliding cavity 342, the stroke of such first piston bar 32 and the second piston rod 33 is also different, namely the distance of first piston bar 32 movement is less than the displacement of the second piston rod 33, can increase the Adjustment precision between prober frame 2 and fixed station 11 like this.
Alternatively, above-mentioned drive unit 31 is oil motor.The output shaft of the second piston rod and oil motor can realize being in transmission connection by threaded engagement, certainly, also can realize being in transmission connection by other coupling arrangement between the second piston rod and oil motor, just repeats no longer one by one here.
Preferably, the external part of first piston bar 32 is provided with displacement transducer 35, and displacement transducer 35 is for detecting and showing the distance between the end of first piston bar 32 and fixed station 11.For the ease of debugging, operating personnel rule of thumb can set a reference value in the gap between prober frame 2 and fixed station 11, during original state, can according to the distance value of displacement transducer display, gap between prober frame 2 and fixed station 11 is adjusted to this reference value, like this, each change prober frame 2 after, adjustment smaller.Also can preset the distance of displacement transducer 35 in addition, control the distance of first piston bar 32 movement.
In another kind of embodiment, as shown in Figure 4, the another kind of structural representation of telescoping mechanism in the electrical array detection equipment that Fig. 4 provides for the embodiment of the present invention, telescoping mechanism is four and drives oil cylinder, the piston rod 36 of oil cylinder is driven to stretch out from one end of its cylinder barrel 37, and the end of the external part of piston rod 36 and prober frame 2 offset towards the one side of fixed station 11, drive the other end of the cylinder barrel 37 of oil cylinder to be fixedly connected with fixed station 11.The hydraulic jack of this structure, can stretching out and retracting by the turnover control piston bar 36 of hydraulic oil.
Preferably in embodiment, each drives a corner of oil cylinder difference supporting probe framework 2.
Preferably, the external part of piston rod 36 is provided with displacement transducer 35, and displacement transducer 35 is for detecting and showing the distance between the end of piston rod 36 and fixed station 11.For the ease of debugging, operating personnel rule of thumb can set a reference value in the gap between prober frame 2 and fixed station 11, during original state, the distance value that can show according to displacement transducer 35, gap between prober frame 2 and fixed station 11 is adjusted to this reference value, like this, each change prober frame 2 after, adjustment smaller.Also the distance of displacement transducer 35 can be preset in addition, the distance of control piston bar 36 movement.
In order to know whether four angles of substrate to be measured have breakage in time, preferably, as shown in Figure 5, the part-structure schematic diagram of the lifting table of the electrical array detection equipment that Fig. 5 provides for the embodiment of the present invention, liftable platform 12 is provided with and four of substrate to be measured angle pressure transducers 4 one to one towards the one side of prober frame 2, when pressure transducer 4 senses pressure, the pilot lamp of 4 is luminous; When pressure transducer 4 does not sense pressure, the pilot lamp of pressure transducer 4 extinguishes.The pressure transducer 4 arranged can sense that whether four angles of substrate to be measured are complete, if certain angle in substrate to be measured is imperfect, the pressure transducer 35 corresponding with this angle will be responded to less than this angle, can remind operating personnel that this substrate to be measured is incomplete, realize the Real-Time Monitoring to the whether broken angle of substrate to be measured.The mode realizing reminding can be shown by bright light, also can be reminded by alarm.About the scope at the broken angle of substrate to be measured is generally 5mm rice, therefore according to actual needs, the induction radius of pressure transducer can be set to about 5mm.
Obviously, those skilled in the art can carry out various change and modification to the embodiment of the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (8)
1. an electrical array detection equipment, is characterized in that, comprising:
Board, described board comprises: the liftable platform and the fixed station that support substrate to be measured, and described fixed station is positioned at the top of described liftable platform, and described liftable platform can drive described substrate to be measured to move a certain distance to described fixed station;
To be positioned at above described board, for the erecting frame of stationary probe framework, described erecting frame and described board are oppositely arranged and described erecting frame can move along the lifting direction of the liftable platform of described board;
To be arranged between the fixed station of described board and described prober frame, for supporting described prober frame and regulating four telescoping mechanisms of spacing of described fixed station and described prober frame, described in each, telescoping mechanism comprises: be fixed on the drive unit of described fixed station, with the relatively-stationary cylinder barrel of described drive unit, first piston bar and the second piston rod, described second piston rod and described drive unit are in transmission connection, and the end of the external part of described first piston bar and described prober frame offset towards the one side of described fixed station.
2. electrical array detection equipment according to claim 1, it is characterized in that, described cylinder barrel has the second sliding cavity with the first sliding cavity of the piston slipper seal of described first piston bar and the piston slipper seal with described second piston rod, and the diameter of described first sliding cavity is greater than the diameter of described second sliding cavity.
3. electrical array detection equipment according to claim 2, is characterized in that, described drive unit is oil motor.
4. electrical array detection equipment according to claim 2, is characterized in that, the external part of described first piston bar is provided with displacement transducer, and institute's displacement sensors is for detecting and showing the distance between the end of described first piston bar and described fixed station.
5. the electrical array detection equipment according to any one of Claims 1 to 4, it is characterized in that, described liftable platform is provided with four angle pressure transducers one to one with described substrate to be measured towards the one side of described prober frame, when described pressure transducer senses pressure, the pilot lamp of described pressure transducer is luminous; When described pressure transducer does not sense pressure, the pilot lamp of described pressure transducer extinguishes.
6. an electrical array detection equipment, is characterized in that, comprising:
Board, described board comprises: the liftable platform and the fixed station that support substrate to be measured, and described fixed station is positioned at the top of described liftable platform, and described liftable platform can drive described substrate to be measured to move a certain distance to described fixed station;
To be positioned at above described board, for the erecting frame of stationary probe framework, described erecting frame and described board are oppositely arranged and described erecting frame can move along the lifting direction of the liftable platform of described board;
To be arranged between the fixed station of described board and described prober frame, for supporting described prober frame and regulating the telescoping mechanism of spacing of described fixed station and described prober frame, described telescoping mechanism is four and drives oil cylinder, the piston rod of described driving oil cylinder stretches out from one end of its cylinder barrel, and the end of the external part of described piston rod and described prober frame offset towards the one side of described fixed station, the other end of the cylinder barrel of described driving oil cylinder is fixedly connected with described fixed station.
7. electrical array detection equipment according to claim 6, is characterized in that, the external part of described piston rod is provided with displacement transducer, and institute's displacement sensors is for detecting and showing the distance between the end of described piston rod and described fixed station.
8. the electrical array detection equipment according to claim 6 or 7, it is characterized in that, described liftable platform is provided with four angle pressure transducers one to one with described substrate to be measured towards the one side of described prober frame, when described pressure transducer senses pressure, the pilot lamp of described pressure transducer is luminous; When described pressure transducer does not sense pressure, the pilot lamp of described pressure transducer extinguishes.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310688061.7A CN103698630B (en) | 2013-12-12 | 2013-12-12 | A kind of electrical array detection equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310688061.7A CN103698630B (en) | 2013-12-12 | 2013-12-12 | A kind of electrical array detection equipment |
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| Publication Number | Publication Date |
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| CN103698630A CN103698630A (en) | 2014-04-02 |
| CN103698630B true CN103698630B (en) | 2016-04-06 |
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| CN201310688061.7A Expired - Fee Related CN103698630B (en) | 2013-12-12 | 2013-12-12 | A kind of electrical array detection equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106383411A (en) * | 2016-10-31 | 2017-02-08 | 深圳市华星光电技术有限公司 | Time monitoring device |
| CN109521231B (en) * | 2018-11-19 | 2021-07-16 | 贵州中航聚电科技有限公司 | Chip tantalum electrolytic capacitor test fixture |
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| CN101165546A (en) * | 2006-10-19 | 2008-04-23 | 株式会社岛津制作所 | Substrate detecting device |
| CN101769878A (en) * | 2008-12-30 | 2010-07-07 | 塔工程有限公司 | Array tester, method for measuring a point of substrate of the same and method for measuring a position coordinate photographed by a camera assembly |
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| CN102117588A (en) * | 2009-12-31 | 2011-07-06 | 塔工程有限公司 | Array test device |
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| CN102928685A (en) * | 2011-08-11 | 2013-02-13 | 富士施乐株式会社 | Substrate detecting device and substrate detecting method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010256092A (en) * | 2009-04-22 | 2010-11-11 | Shimadzu Corp | Device for inspecting tft array and method for aligning tft substrate |
| KR101140257B1 (en) * | 2010-12-21 | 2012-04-26 | 주식회사 탑 엔지니어링 | Apparatus for testing array |
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Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101165546A (en) * | 2006-10-19 | 2008-04-23 | 株式会社岛津制作所 | Substrate detecting device |
| CN101769878A (en) * | 2008-12-30 | 2010-07-07 | 塔工程有限公司 | Array tester, method for measuring a point of substrate of the same and method for measuring a position coordinate photographed by a camera assembly |
| CN102117589A (en) * | 2009-12-31 | 2011-07-06 | 塔工程有限公司 | Array test device |
| CN102117588A (en) * | 2009-12-31 | 2011-07-06 | 塔工程有限公司 | Array test device |
| CN102314004A (en) * | 2010-07-09 | 2012-01-11 | 塔工程有限公司 | Array test device |
| CN102928685A (en) * | 2011-08-11 | 2013-02-13 | 富士施乐株式会社 | Substrate detecting device and substrate detecting method |
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Granted publication date: 20160406 Termination date: 20211212 |