CN103698630A - Electrical array detection equipment - Google Patents
Electrical array detection equipment Download PDFInfo
- Publication number
- CN103698630A CN103698630A CN201310688061.7A CN201310688061A CN103698630A CN 103698630 A CN103698630 A CN 103698630A CN 201310688061 A CN201310688061 A CN 201310688061A CN 103698630 A CN103698630 A CN 103698630A
- Authority
- CN
- China
- Prior art keywords
- fixed station
- detection equipment
- array detection
- piston rod
- prober frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses electrical array detection equipment, which comprises a machine stand, a mounting rack and at least one telescoping mechanism, wherein the machine stand comprises a lifting platform and a fixed platform which are used for supporting a to-be-detected substrate; the fixed platform is located above the lifting platform; the lifting platform can be used for driving the to-be-detected substrate to move towards the fixed platform for a certain distance; the mounting rack is located above the machine stand and used for fixing a probe framework; the mounting rack and the machine stand are oppositely arranged, and the mounting rack can move along the vertical direction of the lifting platform of the machine stand; the at least one telescoping mechanism is arranged between the fixed platform of the machine stand and the probe framework and used for supporting the probe framework and adjusting the distance between the fixed platform and the probe framework. According to the electrical array detection equipment disclosed by the invention, by arranging the at least one telescoping mechanism between the fixed platform and the probe framework, after the probe framework is replaced each time, the gap adjustment between the probe framework and the fixed platform becomes more automatic, the adjustment time is shortened, and the work efficiency of the electrical array detection equipment is improved.
Description
Technical field
The present invention relates to display technique field, particularly a kind of electricity array detection equipment.
Background technology
In the process of producing at array base palte, need to detect by electricity array detection equipment pair array substrate, during test, as shown in Figure 1, Fig. 1 is the structural representation of electricity array detection equipment in prior art, substrate to be measured is placed on the liftable platform 012 of the board 01 in electricity array detection equipment, by cylinder nitrogen blowing, drive the liftable platform 012 of board 01 to rise, and contact with the probe in prober frame 02, test philosophy is that the signal in prober frame 02 is imported to substrate to be measured by probe.
The array base palte of testing every kind of size has corresponding prober frame 02, before test, need to carry out the replacing of prober frame 02, after replacing, need the gap between prober frame 02 and the fixed station 011 of board 01 to adjust, because if the gap between the fixed station 011 of prober frame 02 and 01 is too large, can cause the liftable platform 012 of board 01 to rise after fixed range, array base palte cannot contact with the probe in prober frame 02, and signal just can not normally add; If after the too little meeting in gap causes the liftable platform 012 of board 01 to rise, the probe in array base palte and prober frame 02 pushes, and causes the generation at the broken angle of array base palte.Adjustment method of the prior art is for the iron plate pad 03 on the fixed station 011 of increase or minimizing board, to adjust the fixed station 011 of board 01 and the gap between prober frame 02.
But, this adjustment method of the prior art is more difficult, during debugging, need again and again by the size in ruler measurement gap, then constantly go to regulate gap length until suitable, and the degree of accuracy of gap length cannot with the naked eye be gone range estimation, debug very time-consumingly, cause the pumpdown time seriously to lengthen, the accuracy of impact test.
Summary of the invention
The invention provides an electricity array detection equipment, can automatically adjust the gap between prober frame and the fixed station of board, there is higher work efficiency.
For achieving the above object, the invention provides following technical scheme:
An electricity array detection equipment, comprising:
Board, described board comprises: support liftable platform and the fixed station of substrate to be measured, described fixed station is positioned at the top of described liftable platform, described lifting table can drive described substrate to be measured to move a certain distance to described fixed station;
Be positioned at described board top, for the erecting frame of stationary probe framework, described erecting frame and described board are oppositely arranged and described erecting frame can move along the lifting direction of the liftable platform of described board;
At least one is arranged between the fixed station and described prober frame of described board, for support described prober frame and regulate described fixed station and described prober frame between the telescoping mechanism of distance.
Electricity array detection equipment provided by the invention, by telescoping mechanism being set between fixed station and prober frame, make to change after prober frame at every turn, the robotization of adjusting the gap change between prober frame and fixed station is a little, reduce the time of adjusting, improved the work efficiency of electricity array detection equipment.
In some optional embodiments, described telescoping mechanism is four, described in each, telescoping mechanism comprises: be fixed on described fixed station drive unit, with the relatively-stationary cylinder barrel of described drive unit, first piston bar and the second piston rod, described the second piston rod and described drive unit are in transmission connection, and the end of the external part of described first piston bar and described prober frame offset towards the one side of described fixed station.Distance between prober frame and fixed station hour, drive unit moves upward driving the second piston rod, because the hydraulic oil between first piston bar and the second piston rod is in sealing state, therefore when the second piston rod moves upward, by squeezed fluid force feed, and then hydraulic oil moves upward promotion first piston bar, first piston bar moves upward promotion prober frame, and then the distance increasing between prober frame and fixed station reaches the distance needing, otherwise, when the distance between prober frame and fixed station is larger, drive unit moves downward driving the second piston rod, hydraulic oil will move downward, and then first piston bar will move downward under the effect of gravity, prober frame also can move down along with the motion of first piston bar, and then the distance reducing between prober frame and fixed station reaches the distance needing.
In some optional embodiments, described cylinder barrel has the first sliding cavity with the piston slipper seal of described first piston bar, with the second sliding cavity of piston slipper seal with described the second piston rod, the diameter of described the first sliding cavity is greater than the diameter of described the second sliding cavity.Because the first sliding cavity is different with the diameter of the second sliding cavity, the stroke of first piston bar and the second piston rod is also different like this, be the displacement that distance that first piston bar moves is less than the second piston rod, can increase like this adjustment precision between prober frame and fixed station.
In some optional embodiments, described drive unit is oil motor.
In some optional embodiments, the external part of described first piston bar is provided with displacement transducer, described displacement transducer for detection of and show the end of described first piston bar and the distance between described fixed station.
In some optional embodiments, described telescoping mechanism is four and drives oil cylinder, the piston rod of described driving oil cylinder stretches out from one end of its cylinder barrel, and the end of the external part of described piston rod and described prober frame offset towards the one side of described fixed station, the other end of the cylinder barrel of described driving oil cylinder is fixedly connected with described fixed station.The hydraulic jack of this structure, the stretching out and retract of turnover control piston bar that can be by hydraulic oil.
In some optional embodiments, the external part of described piston rod is provided with displacement transducer, described displacement transducer for detection of and show the end of described piston rod and the distance between described fixed station.
In some optional embodiments, described liftable platform is provided with and four angles of described substrate to be measured pressure transducer one to one towards the one side of described prober frame, when described pressure transducer senses pressure, the pilot lamp of described pressure transducer is luminous; When described pressure transducer does not sense pressure, the pilot lamp of described pressure transducer extinguishes.The pressure transducer arranging can sense that whether four angles of substrate to be measured are complete, if certain angle in substrate to be measured is imperfect, the pressure transducer corresponding with this angle will be responded to less than this angle, can remind operating personnel that this substrate to be measured is incomplete, realize the substrate to be measured Real-Time Monitoring at broken angle whether.
Accompanying drawing explanation
Fig. 1 is the structural representation of electricity array detection equipment in prior art;
The electricity array detection equipment schematic diagram that Fig. 2 provides for the embodiment of the present invention;
A kind of structural representation of telescoping mechanism in the electricity array detection equipment that Fig. 3 provides for the embodiment of the present invention;
The another kind of structural representation of telescoping mechanism in the electricity array detection equipment that Fig. 4 provides for the embodiment of the present invention;
The part-structure schematic diagram of the lifting table of the electricity array detection equipment that Fig. 5 provides for the embodiment of the present invention.
Reference numeral:
01-board 011-fixed station 012-lifting table 02-prober frame 03-iron plate pad 1-board 11-fixed station 12-lifting table 2-prober frame 3-telescoping mechanism 31-drive unit 32-first piston bar 33-second piston rod 341-first sliding cavity 342-the second sliding cavity 34-cylinder barrel 35-displacement transducer 36-piston rod 37-cylinder barrel 4-pressure transducer
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Embodiment based in the present invention, those of ordinary skills, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
As shown in Figure 2, the electricity array detection equipment schematic diagram that Fig. 2 provides for the embodiment of the present invention, the electricity array detection equipment that the embodiment of the present invention provides, comprising:
Board 1, board 1 comprises: support liftable platform 12 and the fixed station 11 of substrate to be measured, fixed station 11 is positioned at the top of liftable platform 12, and lifting table 12 can drive substrate to be measured to move a certain distance to fixed station 11;
Be positioned at board 1 top, for the erecting frame (not shown) of stationary probe framework 2, erecting frame and board 1 are oppositely arranged and erecting frame can move (direction of arrow as shown in Figure 2) along the lifting direction of the liftable platform 12 of board 1;
At least one is arranged between the fixed station 11 and prober frame 2 of board 1, for supporting probe framework 2 with regulate the telescoping mechanism 3 of distance between fixed station 11 and prober frame 2.
Electricity array detection equipment provided by the invention, by telescoping mechanism 3 being set between fixed station 11 and prober frame 2, make to change after prober frame 2 at every turn, the robotization of adjusting the gap change between prober frame 2 and fixed station 11 is a little, reduce the time of adjusting, improved the work efficiency of electricity array detection equipment.
The concrete structure of above-mentioned telescoping mechanism can have multiple:
In a kind of concrete embodiment, telescoping mechanism 3 is four, as shown in Figure 3, a kind of structural representation of telescoping mechanism in the electricity array detection equipment that Fig. 3 provides for the embodiment of the present invention, each telescoping mechanism 3 comprises: be fixed on fixed station 11 drive unit 31, with the relatively-stationary cylinder barrel 34 of drive unit 31, first piston bar 32 and the second piston rod 33, the second piston rod 33 is in transmission connection with drive unit 31, and the end of the external part of first piston bar 32 and prober frame 2 offset towards the one side of fixed station 11.Distance between prober frame 2 and fixed station 11 hour, drive unit 31 moves upward driving the second piston rod 33, because the hydraulic oil between first piston bar 32 and the second piston rod 33 is in sealing state, therefore when the second piston rod 33 moves upward, by squeezed fluid force feed, and then hydraulic oil moves upward promotion first piston bar 32, first piston bar 32 moves upward promotion prober frame 2, and then the distance increasing between prober frame 2 and fixed station 11 reaches the distance needing, otherwise, when the distance between prober frame 2 and fixed station 11 is larger, drive unit 21 moves downward driving the second piston rod 33, hydraulic oil will move downward, and then first piston bar 32 will move downward under the effect of gravity, prober frame 2 also can move down along with the motion of first piston bar 32, and then the distance reducing between prober frame 2 and fixed station 11 reaches the distance needing.
Above-mentioned cylinder barrel 34 is relative with drive unit 31 fixing, and optional, cylinder barrel 34 is also fixed on fixed station 11, or is fixed on the housing of electricity array detection equipment.
Preferably, in embodiment, four retractor devices are distinguished a corner of supporting probe frameworks 2.
Preferably, please continue to refer to Fig. 3, above-mentioned cylinder barrel 34 has the first sliding cavity 341 with the piston slipper seal of first piston bar 32, and is greater than the diameter of the second sliding cavity 342 with the diameter of the second sliding cavity 342, the first sliding cavities 341 of the piston slipper seal of the second piston rod 33.Because the first sliding cavity 341 is different with the diameter of the second sliding cavity 342, the stroke of first piston bar 32 and the second piston rod 33 is also different like this, be the displacement that distance that first piston bar 32 moves is less than the second piston rod 33, can increase like this adjustment precision between prober frame 2 and fixed station 11.
Alternatively, above-mentioned drive unit 31 is oil motor.The output shaft of the second piston rod and oil motor can be realized and being in transmission connection by threaded engagement, certainly, between the second piston rod and oil motor, also can be realized and being in transmission connection by other coupling arrangement, just repeats no longer one by one here.
Preferably, the external part of first piston bar 32 is provided with displacement transducer 35, displacement transducer 35 for detection of and show the end of first piston bar 32 and the distance between fixed station 11.For the ease of debugging, operating personnel can rule of thumb set a reference value in the gap between prober frame 2 and fixed station 11, during original state, the distance value that can show according to displacement transducer, gap between prober frame 2 and fixed station 11 is adjusted into this reference value, like this, each, change after prober frame 2 adjustment smaller.Also can preset in addition the distance of displacement transducer 35, control the distance that first piston bar 32 moves.
In another kind of embodiment, as shown in Figure 4, the another kind of structural representation of telescoping mechanism in the electricity array detection equipment that Fig. 4 provides for the embodiment of the present invention, telescoping mechanism is four and drives oil cylinder, drive the piston rod 36 of oil cylinder to stretch out from one end of its cylinder barrel 37, and the end of the external part of piston rod 36 and prober frame 2 offset towards the one side of fixed station 11, drive the other end of the cylinder barrel 37 of oil cylinder to be fixedly connected with fixed station 11.The hydraulic jack of this structure, the stretching out and retract of turnover control piston bar 36 that can be by hydraulic oil.
Preferably, in embodiment, each drives an oil cylinder corner of supporting probe framework 2 respectively.
Preferably, the external part of piston rod 36 is provided with displacement transducer 35, displacement transducer 35 for detection of and show the end of piston rod 36 and the distance between fixed station 11.For the ease of debugging, operating personnel can rule of thumb set a reference value in the gap between prober frame 2 and fixed station 11, during original state, the distance value that can show according to displacement transducer 35, gap between prober frame 2 and fixed station 11 is adjusted into this reference value, like this, each, change after prober frame 2 adjustment smaller.Also can preset in addition the distance of displacement transducer 35, the distance that control piston bar 36 moves.
In order to know in time whether four angles of substrate to be measured have breakage, preferably, as shown in Figure 5, the part-structure schematic diagram of the lifting table of the electricity array detection equipment that Fig. 5 provides for the embodiment of the present invention, liftable platform 12 is provided with and four angles of substrate to be measured pressure transducer 4 one to one towards the one side of prober frame 2, when pressure transducer 4 senses pressure, 4 pilot lamp is luminous; When pressure transducer 4 does not sense pressure, the pilot lamp of pressure transducer 4 extinguishes.The pressure transducer 4 arranging can sense that whether four angles of substrate to be measured are complete, if certain angle in substrate to be measured is imperfect, the pressure transducer 35 corresponding with this angle will be responded to less than this angle, can remind operating personnel that this substrate to be measured is incomplete, realize the substrate to be measured Real-Time Monitoring at broken angle whether.Realizing the mode of reminding can show by bright light, also can remind by alarm.The scope at the broken angle of substrate to be measured is generally 5mm rice left and right, therefore can be according to actual needs, and the induction radius of pressure transducer is set to 5mm left and right.
Obviously, those skilled in the art can carry out various changes and modification and not depart from the spirit and scope of the present invention the embodiment of the present invention.Like this, if within of the present invention these are revised and modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention is also intended to comprise these changes and modification interior.
Claims (8)
1. an electricity array detection equipment, is characterized in that, comprising:
Board, described board comprises: support liftable platform and the fixed station of substrate to be measured, described fixed station is positioned at the top of described liftable platform, described lifting table can drive described substrate to be measured to move a certain distance to described fixed station;
Be positioned at described board top, for the erecting frame of stationary probe framework, described erecting frame and described board are oppositely arranged and described erecting frame can move along the lifting direction of the liftable platform of described board;
At least one is arranged between the fixed station and described prober frame of described board, for support described prober frame and regulate described fixed station and described prober frame between the telescoping mechanism of distance.
2. electricity array detection equipment according to claim 1, it is characterized in that, described telescoping mechanism is four, described in each, telescoping mechanism comprises: be fixed on described fixed station drive unit, with the relatively-stationary cylinder barrel of described drive unit, first piston bar and the second piston rod, described the second piston rod and described drive unit are in transmission connection, and the end of the external part of described first piston bar and described prober frame offset towards the one side of described fixed station.
3. electricity array detection equipment according to claim 2, it is characterized in that, described cylinder barrel have with the first sliding cavity of the piston slipper seal of described first piston bar and with the second sliding cavity of the piston slipper seal of described the second piston rod, the diameter of described the first sliding cavity is greater than the diameter of described the second sliding cavity.
4. electricity array detection equipment according to claim 3, is characterized in that, described drive unit is oil motor.
5. electricity array detection equipment according to claim 3, is characterized in that, the external part of described first piston bar is provided with displacement transducer, described displacement transducer for detection of and show the end of described first piston bar and the distance between described fixed station.
6. electricity array detection equipment according to claim 1, it is characterized in that, described telescoping mechanism is four and drives oil cylinder, the piston rod of described driving oil cylinder stretches out from one end of its cylinder barrel, and the end of the external part of described piston rod and described prober frame offset towards the one side of described fixed station, the other end of the cylinder barrel of described driving oil cylinder is fixedly connected with described fixed station.
7. electricity array detection equipment according to claim 6, is characterized in that, the external part of described piston rod is provided with displacement transducer, described displacement transducer for detection of and show the end of described piston rod and the distance between described fixed station.
8. according to the electricity array detection equipment described in claim 1～7 any one, it is characterized in that, described liftable platform is provided with and four angles of described substrate to be measured pressure transducer one to one towards the one side of described prober frame, when described pressure transducer senses pressure, the pilot lamp of described pressure transducer is luminous; When described pressure transducer does not sense pressure, the pilot lamp of described pressure transducer extinguishes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310688061.7A CN103698630B (en) | 2013-12-12 | 2013-12-12 | A kind of electrical array detection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310688061.7A CN103698630B (en) | 2013-12-12 | 2013-12-12 | A kind of electrical array detection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103698630A true CN103698630A (en) | 2014-04-02 |
| CN103698630B CN103698630B (en) | 2016-04-06 |
Family
ID=50360226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310688061.7A Expired - Fee Related CN103698630B (en) | 2013-12-12 | 2013-12-12 | A kind of electrical array detection equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103698630B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106383411A (en) * | 2016-10-31 | 2017-02-08 | 深圳市华星光电技术有限公司 | Time monitoring device |
| CN109521231A (en) * | 2018-11-19 | 2019-03-26 | 贵州中航聚电科技有限公司 | A kind of sheet type tantalum electrolyte capacitor test fixture |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101165546A (en) * | 2006-10-19 | 2008-04-23 | 株式会社岛津制作所 | Substrate detecting device |
| CN101769878A (en) * | 2008-12-30 | 2010-07-07 | 塔工程有限公司 | Array tester, method for measuring a point of substrate of the same and method for measuring a position coordinate photographed by a camera assembly |
| JP2010256092A (en) * | 2009-04-22 | 2010-11-11 | Shimadzu Corp | Device for inspecting tft array and method for aligning tft substrate |
| CN102117588A (en) * | 2009-12-31 | 2011-07-06 | 塔工程有限公司 | Array test device |
| CN102117589A (en) * | 2009-12-31 | 2011-07-06 | 塔工程有限公司 | Array test device |
| CN102314004A (en) * | 2010-07-09 | 2012-01-11 | 塔工程有限公司 | Array test device |
| KR101140257B1 (en) * | 2010-12-21 | 2012-04-26 | 주식회사 탑 엔지니어링 | Apparatus for testing array |
| CN102651329A (en) * | 2011-09-21 | 2012-08-29 | 北京京东方光电科技有限公司 | Detection method for detecting substrate damage in placing box and placing box |
| CN102928685A (en) * | 2011-08-11 | 2013-02-13 | 富士施乐株式会社 | Substrate detecting device and substrate detecting method |
-
2013
- 2013-12-12 CN CN201310688061.7A patent/CN103698630B/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101165546A (en) * | 2006-10-19 | 2008-04-23 | 株式会社岛津制作所 | Substrate detecting device |
| CN101769878A (en) * | 2008-12-30 | 2010-07-07 | 塔工程有限公司 | Array tester, method for measuring a point of substrate of the same and method for measuring a position coordinate photographed by a camera assembly |
| JP2010256092A (en) * | 2009-04-22 | 2010-11-11 | Shimadzu Corp | Device for inspecting tft array and method for aligning tft substrate |
| CN102117588A (en) * | 2009-12-31 | 2011-07-06 | 塔工程有限公司 | Array test device |
| CN102117589A (en) * | 2009-12-31 | 2011-07-06 | 塔工程有限公司 | Array test device |
| CN102314004A (en) * | 2010-07-09 | 2012-01-11 | 塔工程有限公司 | Array test device |
| KR101140257B1 (en) * | 2010-12-21 | 2012-04-26 | 주식회사 탑 엔지니어링 | Apparatus for testing array |
| CN102928685A (en) * | 2011-08-11 | 2013-02-13 | 富士施乐株式会社 | Substrate detecting device and substrate detecting method |
| CN102651329A (en) * | 2011-09-21 | 2012-08-29 | 北京京东方光电科技有限公司 | Detection method for detecting substrate damage in placing box and placing box |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106383411A (en) * | 2016-10-31 | 2017-02-08 | 深圳市华星光电技术有限公司 | Time monitoring device |
| CN109521231A (en) * | 2018-11-19 | 2019-03-26 | 贵州中航聚电科技有限公司 | A kind of sheet type tantalum electrolyte capacitor test fixture |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103698630B (en) | 2016-04-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103900515B (en) | A kind of testing agency of testing product height | |
| CN103017716B (en) | Vehicle lamp dimming motor shell overall gap determination and leakage detection fixture | |
| CN203337456U (en) | Extensometer type displacement detecting device | |
| CN203737511U (en) | Fully-automatic COG intelligent lifting type glue dispensing machine | |
| CN104076217A (en) | Automatic pressure connecting testing device for liquid crystal display panels | |
| CN105136356A (en) | Testing machine of interface pressure of cable accessory | |
| CN110231723A (en) | Test device is lighted in liquid crystal display jacking | |
| CN103698630B (en) | A kind of electrical array detection equipment | |
| CN204882239U (en) | Detection mechanism | |
| CN104990796A (en) | Detection mechanism | |
| CN106124917A (en) | A kind of probe test LCD short-circuiting means | |
| CN205049468U (en) | Label viscosity detection device | |
| CN206845363U (en) | A kind of device for the detection of high pressure oil rail axiality | |
| CN202149732U (en) | On-line rapid size detection device | |
| CN204718550U (en) | A kind of hinge rod member automatic detection device | |
| CN103499275A (en) | Automatic detection system for concentricity | |
| CN203310371U (en) | Connector detection system based on machine vision | |
| CN106125015A (en) | A kind of movably lamp bar test machine | |
| CN105244297A (en) | Testing machine of bridge pile semi-finished products of and detection method thereof | |
| CN203785635U (en) | Product height single slit detection device | |
| CN205608338U (en) | LCM module testing arrangement | |
| CN210572663U (en) | Automatic lighting function testing device | |
| CN202583595U (en) | Laser range finding integrated electronic periscope | |
| CN204604229U (en) | A kind of for the pressing machine of casing depth measurement with lining | |
| CN202956102U (en) | Fixture for confirming integral gap of shell of dimming motor of car lamp and detecting leak-packing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160406 Termination date: 20211212 |