CN109782152A - Substrate detection device and method for detecting substrate - Google Patents
Substrate detection device and method for detecting substrate Download PDFInfo
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- CN109782152A CN109782152A CN201711125164.7A CN201711125164A CN109782152A CN 109782152 A CN109782152 A CN 109782152A CN 201711125164 A CN201711125164 A CN 201711125164A CN 109782152 A CN109782152 A CN 109782152A
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- 239000000758 substrate Substances 0.000 title claims abstract description 138
- 238000001514 detection method Methods 0.000 title claims abstract description 48
- 238000000034 method Methods 0.000 title claims abstract description 18
- 230000005674 electromagnetic induction Effects 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 5
- 230000007547 defect Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 abstract description 6
- 238000007689 inspection Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 230000001066 destructive effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005188 flotation Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
The invention provides a substrate detection device and a method for detecting a substrate, wherein the substrate detection device comprises: a support assembly and an air bearing plate; the supporting assembly is connected with the air floating plate through an elastic connecting piece, and at least two distance sensors are arranged on the supporting assembly; the at least two distance sensors are used for detecting the distance between two opposite edges of the air floating plate and the supporting component; one side of the air floatation plate facing the detected substrate is provided with an air outlet; the air outlet is connected with an air supply device. In the above embodiment, when the air floating plate passes through the protrusion or the foreign object on the surface of the substrate, the air pressure between the air floating plate and the substrate may change, so as to cause the change of the distance between the air floating plate and the substrate, and further determine the existence of the protrusion or the foreign object on the surface of the substrate.
Description
Technical Field
The present invention relates to the field of substrate inspection technologies, and in particular, to a substrate inspection apparatus and a substrate inspection method thereof.
Background
In the conventional substrate inspection techniques, destructive inspection of a sample taken out is generally performed. This kind of detection method not only causes waste, but also causes unqualified products to flow into the next process because all substrates cannot be detected. Therefore, there is a need for a non-destructive inspection technique for a substrate, i.e., a non-contact substrate inspection technique. In order to realize non-contact detection and ensure the working efficiency, a detection element of the detection equipment needs to be close to a detected substrate as much as possible; meanwhile, in order to avoid scratching the substrate or damaging the detection element, the detection element is required to be ensured not to be contacted with the detected substrate; therefore, the realization of the non-contact substrate detection technology puts a very high requirement on the distance control precision between the detection element and the detected substrate; particularly, when there is a protrusion or a foreign object on the surface of the substrate to be detected, the substrate detection apparatus is required to be able to detect the protrusion or the foreign object in time.
Disclosure of Invention
In order to solve the above problems, the present invention provides a substrate inspection apparatus suitable for a substrate, particularly a substrate including a circuit substrate, and a method for inspecting the substrate, so as to realize non-contact inspection of the substrate.
The present invention provides a substrate detection apparatus, including: a support assembly and an air bearing plate; wherein,
the supporting component is connected with the air floating plate through an elastic connecting piece, and at least two distance sensors are arranged on the supporting component; the at least two distance sensors are used for detecting the distance between two opposite edges of the air floating plate and the supporting component;
one surface of the air floatation plate facing the detected substrate is provided with an air outlet; the air outlet is connected with an air supply device.
In the above embodiment, the elastic force of the elastic connecting piece acting on the air floating plate, the self weight of the air floating plate and the pressure of the air flow of the air outlet acting on the air floating plate interact with each other, so that the air floating plate keeps a distance from the detected substrate; the initial position of the air floating plate and the size of the air flow at the air outlet are adjusted, and the distance between the air floating plate and the detected substrate can be controlled; when the air floating plate passes through the bulge or the foreign matter on the surface of the substrate, the air pressure between the air floating plate and the substrate can change, so that the distance between the air floating plate and the substrate is changed, and the existence of the bulge or the foreign matter on the surface of the substrate can be judged.
In a particular embodiment, the air outlet is located in a central position of the air flotation plate.
In a specific embodiment, the number of the air outlets is not less than two, and the air outlets are symmetrically distributed around the central position of the air floating plate.
In a specific embodiment, the number of the distance sensors is three, three distance sensors are arranged in a triangle, and the distance sensors all correspond to the edge of the air floating plate.
In a specific embodiment, an electromagnetic sensor for detecting the circuit on the substrate is arranged in the air floating plate.
In a particular embodiment, the support assembly comprises: the first bracket, the second bracket assembled on said first bracket and can be slipped along the first horizontal direction, the third bracket assembled on said second bracket and can be slipped along the second horizontal direction, wherein, said first horizontal direction is perpendicular to said second horizontal direction, said elastic connecting piece is connected with said third bracket; further comprising:
the first driving device drives the second bracket to slide;
and the second driving device drives the third bracket to slide. So that an arbitrary movement in the horizontal direction can be achieved.
In a specific embodiment, the third support is a telescopic support which is adjustable in distance in a direction perpendicular to the substrate. Adjustment in the vertical direction is achieved.
In a particular embodiment, the third support is provided with a mechanical mechanism for adjusting the parallelism of the gas floating plate and the substrate.
The invention also provides a method for detecting the substrate by using the substrate detection device, which comprises the following steps:
adjusting the distance from the air floating plate to the detected surface of the substrate through the supporting assembly;
ventilating an air outlet on the air floating plate through an air supply device, and adjusting the distance between the air floating plate and the substrate by adjusting the size of air flow of the air outlet and further adjusting the air pressure between the air floating plate and the substrate;
and moving the air floating plate, receiving the distance values between the air floating plate and the supporting component detected by the at least two distance sensors, and alarming or stopping when the difference value between the measured value variable quantities of the distance sensors is greater than a set value.
In a specific embodiment, when an electromagnetic sensor for detecting the circuit on the substrate is arranged in the air floating plate, the method further comprises the following steps:
the substrate detection devices are used in sets, each set comprises two substrate detection devices, voltage is applied to the electromagnetic sensor in one set of the substrate detection devices, and electromagnetic induction is carried out on a circuit in the substrate;
and the electromagnetic sensor in the other set of substrate detection device is used for measuring the electromagnetic induction value of the circuit, thereby judging whether the circuit has open circuit or short circuit defects.
Drawings
Fig. 1 is a schematic structural diagram of a substrate detection apparatus according to an embodiment of the present invention;
fig. 2 is a schematic diagram illustrating relative positions of a distance sensor and an air floating plate of the substrate detection apparatus according to the embodiment of the present invention;
FIG. 3 is a schematic diagram illustrating a relative position between a distance sensor and an air floating plate of the substrate detecting apparatus according to the embodiment of the present invention;
fig. 4 is a reference diagram of a usage status of the substrate detection apparatus according to the embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the present invention will be described in further detail with reference to the accompanying drawings, and it is apparent that the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 and 2 together, fig. 1 is a schematic structural diagram of a substrate detection apparatus according to an embodiment of the present invention; fig. 2 shows a schematic diagram of the relative position of the distance sensor 2 and the air bearing plate 3.
As can be seen from fig. 1 and 2, in order to solve the problems existing in the prior art, an embodiment of the present invention provides a substrate detection apparatus, which includes two components, respectively: a support assembly 1 and an air bearing plate 3; the supporting assembly 1 is used for supporting the air floating plate 3, when the supporting assembly 1 is specifically arranged, the supporting assembly 1 is connected with the air floating plate 3 through an elastic connecting piece, and at least two distance sensors 2 are arranged on the supporting assembly 1; the at least two distance sensors 2 are used for detecting the distance between two opposite edges of the air floating plate 3 and the support assembly 1; when specifically setting up, these at least two distance sensor 2 set up the position that corresponds with two relative borders of air supporting plate 3 on supporting component 1 to can better detect the relative distance between two relative borders of air supporting plate 3 and supporting component 1.
The air floating plate 3 is provided with an air outlet 14 on one side facing the detected substrate 4; the air outlet 14 is connected to an air supply.
When the device is used, the elastic force of the elastic connecting piece 6 acting on the air floating plate 3, the self weight of the air floating plate 3 and the pressure of the air flow of the air outlet 14 acting on the air floating plate 3 interact with each other, so that the air floating plate 3 keeps a distance with the detected substrate 4; the distance between the air floating plate 3 and the detected substrate 4 can be controlled by adjusting the initial position of the air floating plate 3 and the size of the air flow at the air outlet 14; when the air floating plate 3 protrudes or is contaminated on the surface of the substrate 4, the air pressure between the air floating plate 3 and the substrate 4 changes, so that the distance between the air floating plate 3 and the substrate 4 changes, and the existence of the protrusion or the foreign matter on the surface of the substrate 4 can be judged.
For the convenience of understanding the substrate detection apparatus provided in the present embodiment, the following detailed description will be made with reference to specific embodiments and accompanying drawings.
Referring to fig. 1 and 4 together, fig. 1 shows a specific structure of a substrate detection apparatus according to an embodiment of the present disclosure, and fig. 4 shows another structure. However, in both configurations, the substrate detection apparatus includes the support assembly 1 and the air bearing plate 3, wherein the support assembly 1 may have a different configuration. As shown in fig. 4, in one embodiment, the support assembly 1 may be a single support member, and the support assembly 1 in fig. 4 is a single support structure. The support member is used to support the air bearing plate 3. In another embodiment, as shown in fig. 1, the support member 1 is an assembly, the support member 1 comprising: the device comprises a first bracket 11, a second bracket 12 which is assembled on the first bracket 11 and can slide along a first horizontal direction, and a third bracket 13 which is assembled on the second bracket 12 in a sliding way and can slide along a second horizontal direction, wherein the first horizontal direction is vertical to the second horizontal direction, and an elastic connecting piece 6 is connected with the third bracket 13; further comprising: a first driving device for driving the second bracket 12 to slide; and a second driving device for driving the third bracket 13 to slide. So that an arbitrary movement in the horizontal direction can be achieved. That is, the supporting assembly 1 includes three supports capable of moving relatively, wherein the first support 11 may be fixedly connected to the detecting apparatus, and fix the substrate detecting device on the detecting apparatus, and the second support 12 and the third support 13 may move on the horizontal plane, so as to adjust the air floating plate 3 on the horizontal plane, and during detection, the air floating plate 3 is driven to sweep over the substrate 4 to detect the substrate 4 through the movement of the second support 12 and the third support 13. In addition, during the movement, the second support 12 and the third support 13 are driven by the first driving device and the second driving device, respectively, in a specific scheme, guide rails are respectively arranged on the first support 11 and the second support 12, the second support 12 is slidably connected with the first support 11 through the guide rails, and the third support 13 is slidably connected with the second support 12 through the guide rails. In addition, the first and second driving devices may be air cylinders, hydraulic cylinders, linear motors, or screw driving devices. The screw driving device is a combined mechanism which adopts a motor to drive a screw.
To achieve a movement in the vertical direction, the third support 13 is a telescopic support which is telescopic in the vertical direction. Thereby realizing the adjustment of the air floating plate 3 in the vertical direction. Alternatively, the height adjustment of the entire support assembly 1 can be driven by connecting a telescopic device to the first support 11. In addition, in order to ensure accuracy in the inspection, the third support 13 is provided with a mechanical mechanism for adjusting parallelism of the air bearing plate 3 and the substrate 4. The mechanical structure can be a common mechanical structure in the prior art, for example, the mechanical structure comprises a spherical connecting seat and a ball head which is arranged in the spherical connecting seat and can rotate relative to the spherical connecting seat, and a locking screw for locking the ball head is also arranged on the spherical connecting seat; the spherical connecting seat is connected with the third support 13, the ball head is connected with the second support 12, when leveling is needed, the locking screw is unlocked, the distance from the air floating plate 3 to the standard plate is detected through the arranged sensors, and when the distances detected by the sensors are the same, the locking screw is locked, so that leveling is completed.
In the specific arrangement, the number of the air outlets on the air floating plate 3 may be different, and may be one or multiple, and when one air outlet is adopted, the air outlet 14 is located at the center of the air floating plate 3. When a plurality of air outlets are adopted, the number of the air outlets 14 is not less than 2, and the air outlets 14 are symmetrically distributed around the central position of the air floating plate 3.
In a particular embodiment, the elastic connection 6 is a compression spring. To provide a good spring effect.
In the specific setting, the number of the distance sensors 2 may be different, and only two distance sensors are needed, as shown in fig. 2, the number of the distance sensors 2 is two, and the two distance sensors 2 are arranged diagonally and used for detecting the distance between two opposite diagonal angles of the substrate 4 and the support assembly 1; to determine whether there is a protrusion or foreign matter on the surface of the detected substrate 4 by calculating whether the difference between the amounts of change in the measured values of the respective distance sensors 2 is larger than a set value. Or as shown in fig. 3, the number of the distance sensors 2 is three, the three distance sensors 2 are arranged in a triangle, and the distance sensors 2 correspond to the edge of the air floating plate 3. As shown in fig. 3, a plane can be determined according to the distances detected by the three distance sensors 2, so that whether the air floating plate 3 is inclined can be more accurately determined, and when the air floating plate is specifically arranged, as shown in fig. 3, the three distance sensors 2 are arranged in a right triangle. It should be understood that fig. 2 and 3 only exemplify several specific installation manners of the sensors 2, and the number and installation manners of the distance sensors 2 may be other manners, only enough to detect whether the air floating plate 3 is inclined.
In addition, in order to improve the efficiency of detection, an electromagnetic sensor for detecting the circuit on the substrate 4 is arranged in the air floating plate 3 of the detection device provided by the embodiment of the invention. The electromagnetic sensor is used for detecting whether a circuit in the substrate 4 is broken or short-circuited, and in the moving process of the air floating plate 3, whether the circuit on the substrate 4 is qualified can be detected through the electromagnetic sensor. Thereby detecting the presence of a bump or foreign matter on the substrate 4 and simultaneously detecting the circuit on the substrate 4.
The invention also provides a method for detecting the substrate by using the substrate detection device, which comprises the following steps:
adjusting the distance from the air floating plate to the detected surface of the substrate through the supporting assembly;
ventilating an air outlet on the air floating plate through an air supply device, and adjusting the distance between the air floating plate and the substrate by adjusting the size of air flow of the air outlet and further adjusting the air pressure between the air floating plate and the substrate;
and moving the air floating plate, receiving the distance values between the air floating plate and the supporting component detected by the at least two distance sensors, and alarming or stopping when the difference value between the measured value variable quantities of the distance sensors is greater than a set value.
In a specific embodiment, when an electromagnetic sensor for detecting the circuit on the substrate is arranged in the air floating plate, the method further comprises the following steps:
the substrate detection devices are used in sets, each set comprises two substrate detection devices, voltage is applied to the electromagnetic sensor in one set of the substrate detection devices, and electromagnetic induction is carried out on a circuit in the substrate;
and the electromagnetic sensor in the other set of substrate detection device is used for measuring the electromagnetic induction value of the circuit, thereby judging whether the circuit has open circuit or short circuit defects.
In the specific measurement, the method comprises the following steps:
before measurement, the air bearing plate is kept parallel to the substrate by adjusting a three-degree-of-freedom adjusting mechanism consisting of a first bracket, a second bracket and a third bracket in a supporting assembly;
when the air floatation plate works, an external power supply applies voltage to the electromagnetic sensor integrated in the air floatation plate;
the air supply device supplies air to the air floating plate, airflow is guided into the vent holes formed in the air floating plate from the upper part, and flows out from the lower part of the vent holes to apply air pressure on the lower surface of the air floating plate and the upper surface of the substrate; when the distance between the air floating plate and the substrate is increased, the air pressure between the air floating plate and the substrate is reduced, the spring assembly extends, and the air floating plate automatically approaches the substrate, so that the distance between the air floating plate and the substrate is reduced; when the distance between the air floating plate and the substrate is reduced, the air pressure between the air floating plate and the substrate is increased, the spring assembly is compressed, and the air floating plate automatically moves away from the substrate so as to increase the distance between the air floating plate and the substrate; by the method, the air floating plate and the substrate can keep a certain distance;
the supporting component drives the air floating plate to keep a required distance with the substrate and move along the surface of the substrate; if the substrate is provided with the bulge or the foreign matter, the bulge or the foreign matter can touch and jack the air floating plate, and the air floating plate is lifted upwards, so that the measured value of the distance sensor arranged above the air floating plate is changed; the distance sensor transmits the value to the detection equipment, and a control system in the detection equipment gives an alarm and the like according to a preset rule according to the measured value received by the distance sensor.
Referring to fig. 4 together, fig. 4 is a schematic diagram illustrating a state of the substrate detection apparatus in use, the apparatus can achieve a constant distance between the bottom of the air floating plate 3 and the upper surface of the substrate 4 through the air floating plate 3 and the elastic member 6, specifically, the air floating plate 3 continuously blows air towards the substrate 4 through the air supply device, so as to maintain a relative distance between the air floating plate 3 and the substrate 4. The device can measure the distance between the head of the distance sensor 2 and the top of the air floating plate 3 in real time through the two high-precision distance sensors 2 which are arranged diagonally, namely the relative distance between the support component 1 and the air floating plate 3, and the detection equipment connected with the substrate detection device can judge whether bulges or foreign matters exist on the surface of the substrate 4 through data measured by the distance sensors 2 and a numerical analysis method. In specific use, as shown in fig. 4, if there is a protrusion or a foreign object on the upper surface of the substrate 4, or there is a foreign object between the substrate 4 and the substrate supporting device 5, which causes the upper surface of the substrate 4 to protrude upward, the distance between the distance sensor 2 and the air floating plate 3 will change, which will cause the display value of the distance sensor 2 to change. Calculating a deviation amount from a previous value at each sampling period of the distance sensor 2, and then calculating a difference between deviation amounts corresponding to different sensors; when the absolute value of the difference is equal to or greater than a set threshold, judging that a bulge or foreign matter exists, and guiding the detection equipment whether to stop or continue to detect; when the absolute value of the difference is smaller than a set threshold, it is determined that no protrusion or foreign matter is present.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, the present invention should be construed as including such modifications and variations provided they come within the scope of the appended claims and their equivalents.
Claims (10)
1. A substrate detection apparatus, comprising: a support assembly and an air bearing plate; wherein,
the supporting component is connected with the air floating plate through an elastic connecting piece, and at least two distance sensors are arranged on the supporting component; the at least two distance sensors are used for detecting the distance between two opposite edges of the air floating plate and the supporting component;
one surface of the air floatation plate facing the detected substrate is provided with an air outlet; the air outlet is connected with an air supply device.
2. The substrate detecting apparatus according to claim 1, wherein the air outlet is located at a center of the air floating plate.
3. The apparatus of claim 1, wherein the number of the gas outlets is not less than 2, and the gas outlets are symmetrically distributed around the center of the gas floating plate.
4. The substrate detecting apparatus according to claim 1, wherein the number of the distance sensors is three, three of the distance sensors are arranged in a triangle, and the distance sensors each correspond to an edge of the air bearing plate.
5. The substrate detecting apparatus according to claim 1, wherein an electromagnetic sensor for detecting a circuit on the substrate is provided in the air bearing plate.
6. The substrate detection apparatus of any of claims 1 to 5, wherein the support assembly comprises: the first bracket, the second bracket assembled on said first bracket and can be slipped along the first horizontal direction, the third bracket assembled on said second bracket and can be slipped along the second horizontal direction, wherein, said first horizontal direction is perpendicular to said second horizontal direction, said elastic connecting piece is connected with said third bracket; further comprising:
the first driving device drives the second bracket to slide;
and the second driving device drives the third bracket to slide.
7. The apparatus according to claim 6, wherein the third support is a retractable support that is adjustable in distance in a direction perpendicular to the substrate.
8. The substrate detection apparatus according to claim 7, wherein the third support is provided with a mechanical mechanism for adjusting parallelism of the air bearing plate and the substrate.
9. A method of inspecting a substrate using the substrate inspecting apparatus according to claim 1, comprising the steps of:
adjusting the distance from the air floating plate to the detected surface of the substrate through the supporting assembly;
ventilating an air outlet on the air floating plate through an air supply device, and adjusting the distance between the air floating plate and the substrate by adjusting the size of air flow of the air outlet and further adjusting the air pressure between the air floating plate and the substrate;
and moving the air floating plate, receiving the distance values between the air floating plate and the supporting component detected by the at least two distance sensors, and alarming or stopping when the difference value between the measured value variable quantities of the distance sensors is greater than a set value.
10. The method of inspecting a substrate according to claim 9, wherein when an electromagnetic sensor for inspecting a circuit on the substrate is provided in the air bearing plate, further comprising the steps of:
the substrate detection devices are used in sets, each set comprises two substrate detection devices, voltage is applied to the electromagnetic sensor in one set of the substrate detection devices, and electromagnetic induction is carried out on a circuit in the substrate;
and the electromagnetic sensor in the other set of substrate detection device is used for measuring the electromagnetic induction value of the circuit, thereby judging whether the circuit has open circuit or short circuit defects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201711125164.7A CN109782152B (en) | 2017-11-14 | 2017-11-14 | Substrate detection device and method for detecting substrate |
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| CN201711125164.7A CN109782152B (en) | 2017-11-14 | 2017-11-14 | Substrate detection device and method for detecting substrate |
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| CN109782152A true CN109782152A (en) | 2019-05-21 |
| CN109782152B CN109782152B (en) | 2024-03-12 |
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| CN112478782A (en) * | 2020-12-03 | 2021-03-12 | 深圳市华星光电半导体显示技术有限公司 | Glass panel caching device and glass panel caching method |
| CN115318666A (en) * | 2022-08-17 | 2022-11-11 | 安徽家瑞轴承有限公司 | High-precision intelligent sorting and collecting device based on bearing surface defects |
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| CN109782152B (en) | 2024-03-12 |
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