CN109782152A - Substrate detection device and method for detecting substrate - Google Patents
Substrate detection device and method for detecting substrate Download PDFInfo
- Publication number
- CN109782152A CN109782152A CN201711125164.7A CN201711125164A CN109782152A CN 109782152 A CN109782152 A CN 109782152A CN 201711125164 A CN201711125164 A CN 201711125164A CN 109782152 A CN109782152 A CN 109782152A
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- air bearing
- bearing plate
- detection apparatus
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- 239000000758 substrate Substances 0.000 title claims abstract description 124
- 238000001514 detection method Methods 0.000 title claims abstract description 69
- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000005259 measurement Methods 0.000 claims description 7
- 230000005674 electromagnetic induction Effects 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 6
- 230000007547 defect Effects 0.000 claims description 3
- 238000009423 ventilation Methods 0.000 claims description 3
- 230000008859 change Effects 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Abstract
The invention provides a substrate detection device and a method for detecting a substrate, wherein the substrate detection device comprises: a support assembly and an air bearing plate; the supporting assembly is connected with the air floating plate through an elastic connecting piece, and at least two distance sensors are arranged on the supporting assembly; the at least two distance sensors are used for detecting the distance between two opposite edges of the air floating plate and the supporting component; one side of the air floatation plate facing the detected substrate is provided with an air outlet; the air outlet is connected with an air supply device. In the above embodiment, when the air floating plate passes through the protrusion or the foreign object on the surface of the substrate, the air pressure between the air floating plate and the substrate may change, so as to cause the change of the distance between the air floating plate and the substrate, and further determine the existence of the protrusion or the foreign object on the surface of the substrate.
Description
Technical field
The present invention relates to substrate detection technique field more particularly to a kind of substrate detection apparatus and its detect substrate
Method.
Background technique
It is general to be carried out by the way of to the destructive detection of extraction sample progress in substrate detection technique before.It is this
Detection mode not only results in waste, causes rejected product to flow into lower road process also as can not whole substrates be carried out with detection.
Therefore, people propose urgent need to substrate non-destructive testing technology, that is, non-contact substrate detection technique.In order to realize
Non-contact detecting simultaneously guarantees working efficiency, needs the detecting element of detection device as far as possible close to detected substrate；Meanwhile being
It prevents plowing from substrate or breaks detecting element, and need to guarantee that detecting element is not generated with detected substrate and contact；Therefore, non-
The realization of contact substrate detection technique controls precision to the distance between detecting element and detected substrate, proposes very
High requirement；Especially when detected substrate surface has protrusion or foreign matter, more require substrate detection apparatus timely
It was found that.
Summary of the invention
To solve the above problems, the present invention provides one kind to be suitable for substrate, the substrate inspection of circuit substrate is especially included
The method surveyed device and its detect substrate, to realize the non-contact detection to substrate.
The present invention provides a kind of substrate detection apparatus, which includes: support component and air bearing plate；Its
In,
It is connected between the support component and the air bearing plate by flexible connector, and is provided in the support component
At least two range sensors；At least two range sensors be used to detect two opposite edges of the air bearing plate with
The distance of the support component；
The one side of the air bearing plate towards detected substrate has gas outlet；The gas outlet is connect with feeder.
In the above-described embodiments, flexible connector acts on the elastic force of air bearing plate, the own wt of air bearing plate and gas outlet
Airflow function makes air bearing plate keep at a distance with detected substrate in the pressure interaction on air bearing plate；It is initial to adjust air bearing plate
The size of position and gas outlet air-flow can control the distance between air bearing plate and detected substrate；When air bearing plate passes through
When substrate surface protrusion or foreign matter, the air pressure between air bearing plate and substrate can change, so as to cause distance between the two
Variation, and then can judge the presence of substrate surface protrusion or foreign matter.
In a specific embodiment, the gas outlet is located at the center of the air bearing plate.
In a specific embodiment, the gas outlet quantity is no less than two, and the gas outlet is symmetrical
Around air bearing plate center.
In a specific embodiment, the number of the range sensor is three, three range sensors
It is arranged in triangle, and the range sensor both corresponds to air bearing edges of boards edge.
In a specific embodiment, the electromagnetic sensor for detecting the base on-board circuitry is provided in air bearing plate.
In a specific embodiment, the support component includes: first support, is assemblied in the first support
And the second support that can be slided along first level direction, it is assemblied in the second support and can be along the sliding of the second horizontal direction
Third bracket, wherein the first level direction is vertical with second horizontal direction, the flexible connector and the third
Bracket connection；Further include:
Drive the first driving device of the second support sliding；
Drive the second driving device of the third bracket slide.So as to realize any movement in the horizontal direction.
In a specific embodiment, the third bracket is that can carry out along perpendicular to the orientation substrate apart from tune
Whole telescoping shoring column.Realize adjustment in the vertical direction.
In a specific embodiment, the third bracket is provided with for adjusting air bearing plate and substrate-parallel degree
Mechanical mechanism.
The present invention also provides a kind of methods of detection substrate using aforesaid substrate detection device, and this method includes following
Step:
The distance that face is detected on air bearing plate to substrate is adjusted by support component；
By feeder on the air bearing plate gas outlet ventilation, and by adjusting the air-flow size of gas outlet, into
And the air pressure size between air bearing plate and substrate is adjusted, to adjust air bearing plate the distance between to substrate；
Movable air-float plate, and the distance between air bearing plate and support component for receiving the detection of at least two range sensors number
Value, and when the difference between each range sensor measurement variation amount is greater than the set value, it is alarmed or is shut down.
In a specific embodiment, the electromagnetism biography for detecting the base on-board circuitry is provided in the air bearing plate
It is further comprising the steps of when sensor:
The substrate detection apparatus is complete to carry out using every set includes two substrate detection apparatus, to a set of base therein
The electromagnetic sensor in board checking device applies voltage, and carries out electromagnetic induction to the circuit in the substrate；
And the electromagnetic induction numerical value of the circuit is measured by the electromagnetic sensor in another set of substrate detection apparatus, from
And judge the circuit with the presence or absence of open circuit or circuit defect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of substrate detection apparatus provided in an embodiment of the present invention；
Fig. 2 is that the range sensor of substrate detection apparatus provided in an embodiment of the present invention and the relative position of air bearing plate are illustrated
Figure；
Fig. 3 is that the range sensor of substrate detection apparatus provided in an embodiment of the present invention and the relative position of air bearing plate are illustrated
Figure；
Fig. 4 is the use state of substrate detection apparatus provided in an embodiment of the present invention with reference to figure.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing to the present invention make into
It is described in detail to one step, it is clear that described embodiments are only a part of the embodiments of the present invention, rather than whole implementation
Example.Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
All other embodiment, shall fall within the protection scope of the present invention.
Together referring to Figure 1 and Figure 2, Fig. 1 shows the structural schematic diagram of substrate detection apparatus provided in an embodiment of the present invention；
Fig. 2 shows the relative position schematic diagrames of range sensor 2 and air bearing plate 3.
It can be seen from Fig. 1 and Fig. 2 in order to solve the problems in the existing technology, the embodiment of the invention provides one
Kind substrate detection apparatus, the substrate detection apparatus include two components, are respectively as follows: support component 1 and air bearing plate 3；Wherein, it props up
Support component 1 is used to support air bearing plate 3, in specific setting, is connected between support component 1 and air bearing plate 3 by flexible connector,
Also, at least two range sensors 2 are provided in support component 1；At least two range sensors 2 are for detecting air bearing plate
3 two opposite edges are at a distance from support component 1；In specific setting, at least two range sensor 2 setting is being propped up
Position corresponding with two opposite edges of air bearing plate 3 on support component 1, so as to more preferably detect two phases of air bearing plate 3
Pair edge and support component 1 between relative distance.
The one side of the air bearing plate 3 towards detected substrate 4 has gas outlet 14；Gas outlet 14 is connect with feeder.
When in use, flexible connector 6 acts on 14 gas of the elastic force of air bearing plate 3, the own wt of air bearing plate 3 and gas outlet
Stream acts on the interaction of the pressure on air bearing plate 3, and air bearing plate 3 is made to keep at a distance with detected substrate 4；At the beginning of adjusting air bearing plate 3
The size of beginning position and 14 air-flow of gas outlet can control the distance between air bearing plate 3 and detected substrate 4；Work as air bearing
When plate 3 is by 4 surface bulge of substrate or foreign matter, the air pressure between air bearing plate 3 and substrate 4 can change, so as to cause the two
Between distance variation, and then can judge the presence of 4 surface bulge of substrate or foreign matter.
In order to facilitate understanding aforesaid substrate detection device provided in this embodiment, below with reference to specific embodiment and attached
It is described in detail in figure.
Fig. 1 and Fig. 4 is referred to together, and one kind that Fig. 1 shows substrate detection apparatus provided by the embodiments of the present application is specific
Structure, Fig. 4 show another structure.But in two kinds of structures, the substrate detection apparatus include support component 1 and
Air bearing plate 3, wherein support component 1 can use different structures.As shown in figure 4, in one embodiment, support component 1
It can be an individual supporting element, the support component 1 in Fig. 4 is an individual support construction.The supporting element is for branch
Support air bearing plate 3.As shown in Figure 1, support component 1 is a sub-assembly, the support component 1 in an other embodiment
Include: first support 11, is assemblied in the second support 12 that can be slided in first support 11 and along first level direction, slidable fit
It and can be along the third bracket 13 of the second horizontal direction sliding in second support 12, wherein first level direction is horizontal with second
Direction is vertical, and flexible connector 6 is connect with third bracket 13；Further include: the first driving device that driving second support 12 is slided；
The second driving device for driving third bracket 13 to slide.So as to realize any movement in the horizontal direction.That is the support group
Part 1 include three can be with the bracket of relative motion, wherein first support 11 can be fixedly connected with detection device, and by substrate
Detection device is fixed on detection device, and second support 12 and third bracket 13 can move in the horizontal plane, to realize
In the horizontal plane to the adjustment of air bearing plate 3, when detecting, by the movement of second support 12 and third bracket 13, air bearing is driven
The inswept substrate 4 of plate 3 is to realize the detection to substrate 4.In addition, during exercise, being driven respectively by first driving device and second
Dynamic device driving second support 12 and third bracket 13, in a specific scheme, the first support 11 and second support 12
On be respectively provided with guide rail, second support 12 is slidably connected by the guide rail with first support 11, and third bracket 13 passes through guide rail
It is slidably connected with second support 12.In addition, being directed to driving device, the first driving device and the second driving device can be gas
Cylinder, hydraulic cylinder perhaps linear motor or screw rod driving device.The lead-screw driving device is the combination that lead screw is driven using motor
Mechanism.
In order to realize movement in the vertical direction, which is the telescope support that can be stretched along the vertical direction.
So as to realize the adjustment to air bearing plate 3 in the vertical direction.Or it can also be using the connection one in first support 11
Telescopic device, which is realized, drives the adjustment of entire support component 1 in height.In addition, in order to guarantee accuracy when detecting, it should
The third bracket 13 is provided with the mechanical mechanism for adjusting 4 depth of parallelism of air bearing plate 3 and substrate.The mechanical structure can be existing
Have mechanical structure common in technology, as the mechanical mechanism include a ball shaped joints seat, and be arranged in ball shaped joints seat
And can the rotation of relatively spherical attachment base bulb, be also provided with the lock-screw for locking the bulb in the ball shaped joints seat；Wherein,
Ball shaped joints seat is connect with third bracket 13, and bulb is connect with second support 12, when needing to level, is unlocked lock-screw, is led to
The sensor detection air bearing plate 3 for crossing setting arrives the distance between on-gauge plate, when the distance of several sensors detection is identical, locking
Lock-screw, to complete to level.
In specific setting, the number of the gas outlet on air bearing plate 3 can be different, can both use one, can also adopt
With multiple, when using one, which is located at 3 center of air bearing plate.When using multiple, the number of gas outlet 14
Amount no less than 2, and the gas outlet 14 is symmetrically distributed in around 3 center of air bearing plate.
In a specific embodiment, flexible connector 6 is compressed spring.To provide good elastic effect.
In specific setting, the number of range sensor 2 can be different number, only need to meet at least two i.e.
Can, as shown in Fig. 2, the number of range sensor 2 is two, and two range sensors 2 are diagonally positioned, for detecting substrate
At a distance from the opposite diagonal and support component 1 of two of 4；By calculating between each 2 measurement variation amount of range sensor
Whether difference is greater than the set value, and determines the surface for being detected substrate 4 with the presence or absence of protrusion or foreign matter.Or as shown in figure 3, distance
The number of sensor 2 is three, and three range sensors 2 are arranged in triangle, and range sensor 2 both corresponds to the air bearing
3 edge of plate.As shown in figure 3, a plane can be determined according to the distance that three range sensors 2 detect, so as to more quasi-
It is true judge air bearing plate 3 whether run-off the straight, in specific setting, as shown in figure 3, three rectangular triangles of range sensor 2
The mode of shape arranges.It should be understood that Fig. 2 and Fig. 3 are only enumerated the set-up mode of several specific sensors 2, it should
The number and set-up mode of range sensor 2 can also have other modes, it is only necessary to meet whether be capable of detecting when air bearing plate 3
Run-off the straight.
In addition, being provided in the air bearing plate 3 of detection device provided in an embodiment of the present invention to improve efficiency when detection
Detect the electromagnetic sensor of circuit on the substrate 4.The electromagnetic sensor is used to detect the circuit in substrate 4 with the presence or absence of open circuit
Or the whether qualified of the circuit on substrate 4 can be detected in 3 moving process of air bearing plate by electromagnetic sensor for short circuit.To
While on detecting substrate 4 with the presence or absence of protrusion or foreign matter, the circuit on substrate 4 is detected.
The present invention also provides a kind of methods of detection substrate using aforesaid substrate detection device, and this method includes following
Step:
The distance that face is detected on air bearing plate to substrate is adjusted by support component；
By feeder on the air bearing plate gas outlet ventilation, and by adjusting the air-flow size of gas outlet, into
And the air pressure size between air bearing plate and substrate is adjusted, to adjust air bearing plate the distance between to substrate；
Movable air-float plate, and the distance between air bearing plate and support component for receiving the detection of at least two range sensors number
Value, and when the difference between each range sensor measurement variation amount is greater than the set value, it is alarmed or is shut down.
In a specific embodiment, the electromagnetism biography for detecting the base on-board circuitry is provided in the air bearing plate
It is further comprising the steps of when sensor:
The substrate detection apparatus is complete to carry out using every set includes two substrate detection apparatus, to a set of base therein
The electromagnetic sensor in board checking device applies voltage, and carries out electromagnetic induction to the circuit in the substrate；
And the electromagnetic induction numerical value of the circuit is measured by the electromagnetic sensor in another set of substrate detection apparatus, from
And judge the circuit with the presence or absence of open circuit or circuit defect.
In specific measurement, comprising the following steps:
Before measuring, by adjusting " support component " " first support, second support and third bracket composition three from
By degree regulating mechanism ", make air bearing plate and substrate keeping parallelism；
At work, external power supply carries out application voltage to the electromagnetic sensor integrated in air bearing plate；
Give air bearing plate gas supply by feeder, air-flow is imported on air bearing plate in the venthole that is arranged by top, air-flow by
Outflow below venthole, by gas pressure in air bearing plate lower surface and upper surface of base plate；When distance increases between air bearing plate and substrate
When big, air pressure between the two can reduce, and spring assembly elongation, air bearing plate can be close from trend substrate, and then reduces the two
Between distance；When the distance between air bearing plate and substrate reduce, air pressure between the two be will increase, and spring assembly is compressed, gas
Kickboard can be automatically far from substrate, and then increases distance between the two；By this way, air bearing plate and substrate can be made to keep certain
Distance；
Support component drives air bearing plate to keep required distance with substrate and is moved along substrate surface；If substrate
On have protrusion or when foreign matter, the protrusion or foreign matter can touch and jack up that air bearing plate, air bearing plate is lifted up at this, and then initiation gas
The measured value for the range sensor being arranged above kickboard changes；The numerical value is passed to detection device by range sensor, inspection
Control system in measurement equipment carries out the disposition such as alarm according to preset rules according to by the received measured value of range sensor.
Fig. 4 is referred to together, and Fig. 4 shows the status diagram of substrate detection apparatus when in use, when in use, the device
3 bottom of air bearing plate and 4 upper surface constant distance of substrate may be implemented by air bearing plate 3 and elastic component 6, specifically, the air bearing plate 3
It is constantly blown by feeder towards substrate 4, to keep the relative distance between air bearing plate 3 and substrate 4.And the dress
Setting can 2 head of the real time measure range sensor and the top of air bearing plate 3 in the high-precision range sensor 2 diagonally installed by two
Relative distance between portion's distance, i.e. support component 1 and air bearing plate 3, and the detection device of substrate detection apparatus connection passes through
The data of the measurement of range sensor 2 simultaneously can determine that 4 surface of substrate with the presence or absence of protrusion or foreign matter by numerical analysis method.Having
If body is in use, as shown in figure 4,4 upper surface of substrate exists among protrusion or foreign matter or substrate 4 and substrate bearing device 5
When causing 4 upper surface of substrate to raise upward there are foreign matter, the distance between range sensor 2 and air bearing plate 3 can change,
This will lead to range sensor 2 and shows that numerical value changes.In each sampling period of range sensor 2, operation with before
Numerical value departure, then calculate difference between the corresponding departure of different sensors；When the absolute value of the difference is equal to
Or when being greater than given threshold, determine there is protrusion or foreign matter, to instruct whether detection device needs to shut down or continue
Detection；When the absolute value of the difference is less than setting threshold values, it is determined as that there is no protrusion or foreign matters.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention also should be regarded as including these modifications and variations.
Claims (10)
1. a kind of substrate detection apparatus characterized by comprising support component and air bearing plate；Wherein,
It is connected between the support component and the air bearing plate by flexible connector, and is provided at least in the support component
Two range sensors；At least two range sensors be used to detect two opposite edges of the air bearing plate with it is described
The distance of support component；
The one side of the air bearing plate towards detected substrate has gas outlet；The gas outlet is connect with feeder.
2. substrate detection apparatus as described in claim 1, which is characterized in that the gas outlet is located at the air bearing plate centre bit
It sets.
3. substrate detection apparatus as described in claim 1, which is characterized in that the gas outlet quantity is no less than 2, and described
Gas outlet is symmetrically distributed in around air bearing plate center.
4. substrate detection apparatus as described in claim 1, which is characterized in that the number of the range sensor be three, three
A range sensor is arranged in triangle, and the range sensor both corresponds to air bearing edges of boards edge.
5. substrate detection apparatus as described in claim 1, which is characterized in that be provided with the detection substrate in the air bearing plate
The electromagnetic sensor of upper circuit.
6. substrate detection apparatus as claimed in any one of claims 1 to 5, which is characterized in that the support component includes: first
Bracket is assemblied in the second support that can be slided in the first support and along first level direction, is assemblied in the second support
Third bracket that is upper and being slided along the second horizontal direction, wherein the first level direction and second horizontal direction are hung down
Directly, the flexible connector is connect with the third bracket；Further include:
Drive the first driving device of the second support sliding；
Drive the second driving device of the third bracket slide.
7. substrate detection apparatus as claimed in claim 6, which is characterized in that the third bracket is can be along perpendicular to the base
Plate direction carries out the telescoping shoring column apart from adjustment.
8. substrate detection apparatus as claimed in claim 7, which is characterized in that the third bracket is provided with for adjusting air bearing
The mechanical mechanism of plate and substrate-parallel degree.
9. it is a kind of using substrate detection apparatus as described in claim 1 detection substrate method, which is characterized in that including with
Lower step:
The distance that face is detected on air bearing plate to substrate is adjusted by support component；
By gas outlet ventilation of the feeder on the air bearing plate, and by adjusting the air-flow size of gas outlet and then adjust
Air pressure size between whole air bearing plate and substrate, to adjust air bearing plate the distance between to substrate；
Movable air-float plate, and the distance between air bearing plate and support component for receiving the detection of at least two range sensors numerical value,
And the difference between each range sensor measurement variation amount is alarmed or is shut down when being greater than the set value.
10. the method for detection substrate as claimed in claim 9, which is characterized in that be provided with detection institute in the air bearing plate
It is further comprising the steps of when stating the electromagnetic sensor of base on-board circuitry:
The substrate detection apparatus is complete to carry out using every set includes two substrate detection apparatus, is examined to a set of substrate therein
The electromagnetic sensor surveyed in device applies voltage, and carries out electromagnetic induction to the circuit in the substrate；
And the electromagnetic induction numerical value of the circuit is measured by the electromagnetic sensor in another set of substrate detection apparatus, to sentence
The circuit break with the presence or absence of open circuit or circuit defect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711125164.7A CN109782152B (en) | 2017-11-14 | 2017-11-14 | Substrate detection device and method for detecting substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711125164.7A CN109782152B (en) | 2017-11-14 | 2017-11-14 | Substrate detection device and method for detecting substrate |
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| Publication Number | Publication Date |
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| CN109782152A true CN109782152A (en) | 2019-05-21 |
| CN109782152B CN109782152B (en) | 2024-03-12 |
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| CN201711125164.7A Active CN109782152B (en) | 2017-11-14 | 2017-11-14 | Substrate detection device and method for detecting substrate |
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Cited By (2)
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| CN112478782A (en) * | 2020-12-03 | 2021-03-12 | 深圳市华星光电半导体显示技术有限公司 | Glass panel caching device and glass panel caching method |
| CN115318666A (en) * | 2022-08-17 | 2022-11-11 | 安徽家瑞轴承有限公司 | High-precision intelligent sorting and collecting device based on bearing surface defects |
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| CN115318666A (en) * | 2022-08-17 | 2022-11-11 | 安徽家瑞轴承有限公司 | High-precision intelligent sorting and collecting device based on bearing surface defects |
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| Publication number | Publication date |
|---|---|
| CN109782152B (en) | 2024-03-12 |
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