CN207066420U - A kind of level detection device for detecting board surface - Google Patents
A kind of level detection device for detecting board surface Download PDFInfo
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- CN207066420U CN207066420U CN201720533822.5U CN201720533822U CN207066420U CN 207066420 U CN207066420 U CN 207066420U CN 201720533822 U CN201720533822 U CN 201720533822U CN 207066420 U CN207066420 U CN 207066420U
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- board surface
- detection device
- pole
- level detection
- probe
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Abstract
Whether the utility model provides a kind of level detection device on board surface, horizontal applied to detection board surface, wherein, including：Pedestal, it is arranged on detection board surface, adjustable horizontal and can be moved along detection board surface；Pole, vertical is arranged on pedestal；Coil, it is arranged at the inside of pole；Magnet, it is sheathed on pole, and can be moved up and down along the setting direction of pole；Probe, probe one end are connected by a rigid structure with magnet, and the other end contacts with board surface, and probe is vertical with board surface；Current sensing means, connect the both ends of coil.Its technical scheme beneficial effect is that level detection device operates simpler convenience in detection process, can sensitively detect the flatness on main engine bed surface, and accuracy of detection is higher.
Description
Technical field
It the utility model is related to board detection field, more particularly to a kind of level detection device for detecting board surface.
Background technology
During equipment tune machine, it is a bit especially crucial to make board horizontally disposed, for example, in photoetching department, if held
The pallet for carrying wafer is not horizontal, it will causes the uneven of the thickness of photoresistance, if in the circumstances of knockdown and being in pallet
Run at high speed down, wafer film flying may be caused or touch board others position, cause wafer damage to be scrapped, on the other hand
During wafer is driven, if the mechanical arm of transmission wafer is not horizontal, scratch or the fragment of wafer may be caused.
Existing horizon detector generally use is air-bubble level, and it is often detected not when whether measurement board surface is horizontal
It is enough sensitive, and very inconvenience is operated in detection process.
The content of the invention
It is a kind of with detection spirit in above mentioned problem existing for board Surface testing, now offer for level meter in the prior art
Sensitivity is higher, and can precisely reflect the level detection device on the whether horizontal board surface in board surface.
Concrete technical scheme is as follows：
A kind of level detection device on board surface, it is whether horizontal applied to detection board surface, wherein, including：
Pedestal, it is arranged on the detection board surface, adjustable horizontal and can be moved along the detection board surface；
Pole, vertical is arranged on the pedestal；
Coil, it is arranged at the inside of the pole；
Magnet, it is sheathed on the pole, and can be moved up and down along the setting direction of the pole；
Probe, described probe one end are connected by a rigid structure with the magnet, and the other end connects with the board surface
Touch, and the probe is vertical with the board surface；
Current sensing means, connect the both ends of the coil.
Preferably, it is provided with level meter in the pedestal.
Preferably, multiple through holes are provided with the top of the pedestal, multiple through holes are located at around the level meter；
Contacted by the screw of setting through the through hole with the board surface.
Preferably, the level meter is air-bubble level.
Preferably, in addition to an elastomeric element, it is arranged on the pole；
One end of the elastomeric element is connected with the bottom of the magnet, and the other end is connected with the top of the pedestal, institute
Elastomeric element is stated to support the magnet to be in initial position.
Preferably, the rigid structure includes a cross bar, and a telescopic mounting being connected with the cross bar, described to stretch
Compression apparatus is adjusting the probe in the extension elongation of horizontal direction；
The retractor device includes：
Body, the bottom of the body are connected with the cross bar；
Expansion link, the telescopic inside for being arranged at the body, the expansion link in backwards to the body one end
It is connected with the probe；
Chute, in the stretching direction setting on the body along the expansion link；
Fixed component, the expansion link is arranged in one end of the close pole, and stretch out the chute, it is described solid
Part is determined to control the length that the expansion link stretches out.
Preferably, the expansion link is provided with a size in stretching direction of the one side towards chute along the expansion link
Scale.
Preferably, the probe is provided with a tip with one end that the board surface contacts and protruded.
Preferably, the current sensing means is sensitive galvanometer.
Preferably, the pole is made up of isolation material.
Above-mentioned technical proposal has the following advantages that or beneficial effect：Level detection device operates simpler in detection process
Folk prescription just, can sensitively detect the flatness on main engine bed surface, and accuracy of detection is higher.
Brief description of the drawings
Fig. 1 is a kind of overall structure diagram of the embodiment of the level detection device on board surface of the utility model.
Fig. 2 is in a kind of embodiment of the level detection device on board surface of the utility model, on bowing at the top of pedestal
View.
Reference represents：
1st, board surface；2nd, pedestal；3rd, pole；4th, magnet；5th, rigid structure；6th, probe；7th, tip is prominent；8th, elastic portion
Part；9th, current sensing means；21st, level meter；22nd, through hole；23rd, screw.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the premise of creative work
Lower obtained every other embodiment, belong to the scope of the utility model protection.
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the utility model can
To be mutually combined.
The utility model is described in further detail with specific embodiment below in conjunction with the accompanying drawings, but not as of the present utility model
Limit.
As shown in figure 1, a kind of embodiment of the level detection device on board surface, applied to detection board surface 1 whether
It is horizontal, it is characterised in that including：
Pedestal 2, it is arranged on detection board surface 1, adjustable horizontal and can be moved along detection board surface 1；
Pole 3, vertical is arranged on pedestal 2；
Coil, it is arranged at the inside of pole 3；
Magnet 4, it is sheathed on pole 3, and can be moved up and down along the setting direction of pole 3；
Probe 6, the one end of probe 6 are connected by a rigid structure 5 with magnet 4, and the other end contacts with board surface 1, and are visited
Pin 6 is vertical with board surface 1；
Current sensing means 9, connect the both ends of coil.
In above-mentioned technical proposal, sensitivity present on the level of board surface 1 is detected for level meter of the prior art
With accuracy present on problem, above-mentioned technical proposal is moved to different positions in the surface of board by probe 6 and examined
Survey, when board surface be in it is non-horizontal when, such as in the presence of it is raised when, can be drawn when probe 6 is moved in projection magnet 4 to
Upper movement, coil cutting magnetic induction line of the magnet 4 in it can make pole 3 during moving up now, and then make in coil
Electric current is produced, detects that electric current can determine whether that current board surface 1 is non-standard state by current sensing means 9, enters one
Step, the degree of projection is can determine whether according to the size of current detected.
Depression such as be present, then Cleaning Principle is same as described above, the difference is that magnet 4 is to move downward.
In a kind of preferably embodiment, level meter 21 is provided with pedestal 2.
In a kind of preferably embodiment, as shown in Fig. 2 the top of pedestal 2 is provided with multiple through holes 22, multiple through holes
22 around level meter 21；
Contacted by the screw 23 of setting through through hole 22 with board surface 1, above-mentioned through hole 22 and level meter 21 are preferably 3
It is individual.
In above-mentioned technical proposal, in order that the result of detection is more accurate, it is necessary first to which guarantee is positioned over board surface 1
On pedestal 2 be in horizontality, the keep level that pedestal 2 is adjusted in the utility model passes through through hole particular by screw 23
22 contact with board surface 1, represent that current pedestal 2 is in level if the display level of level meter 21 being arranged in pedestal 2
Position, continue to adjust the height of the stretching through hole 22 of screw 23 if unhorizontal until the keep level of pedestal 2.
In a kind of preferably embodiment, level meter 21 is air-bubble level.
In a kind of preferably embodiment, in addition to an elastomeric element 8, it is arranged on pole 3；
One end of elastomeric element 8 is connected with the bottom of magnet 4, and the other end is connected with the top of pedestal 2, and elastomeric element 8 is used
To support magnet 4 to be in an initial position.
In above-mentioned technical proposal, it can be spring that elastomeric element 8, which may be selected, in order to ensure that magnet 4 is upwardly or downwardly moving
It can recover to initial position in dynamic, the spring by setting is to elastically keep initial position by spring；
Illustrate, when probe 6 runs into projection on the surface of board, probe 6 can draw magnet 4 and move up, when from
Open raised position to recover to now probe 6 moves down during horizontal level, magnet 4 also moves down therewith, eventually through the bullet of spring
The gravity of dynamic balance magnet 4 makes magnet 4 be maintained at initial position；Probe 6 makes line running into projection, the athletic meeting of magnet 4
Induced-current is produced in circle, electric current is detected by current sensing means 9.
In a kind of preferably embodiment, rigid structure 5 includes a cross bar (not shown in figure), and one and horizontal stroke
The telescopic mounting (not shown in figure) of bar (not shown in figure) connection, retractor device is adjusting probe 6 in level
The extension elongation in direction；
Retractor device includes：
Body, the bottom of body are connected with cross bar；
Expansion link, the telescopic inside for being arranged at body, expansion link are connected in one end backwards to body with probe 6；
Chute, in the stretching direction setting on body along expansion link；
Fixed component, expansion link being arranged in close to one end of pole 3, and stretches out chute, fixed component is controlling
The length that expansion link stretches out.
In a kind of preferably embodiment, expansion link is set in stretching direction of the one side towards chute along expansion link
There is a size scale.
In above-mentioned technical proposal, the size scale person of being easy to use is accurately controlled the extension elongation of expansion link, convenient to adjust
Section.
In a kind of preferably embodiment, pole 3 is made up of isolation material.
In a kind of preferably embodiment, current sensing means 9 is sensitive galvanometer.
In a kind of preferably embodiment, probe 6 is provided with a tip prominent 7 with one end that board surface 1 contacts.
In above-mentioned technical proposal, by the more tiny depression in the prominent 7 detectable board surfaces 1 of tip by probe 6 or
Salient position, it can more accurately detect the flatness on board surface 1.
The foregoing is only the utility model preferred embodiment, not thereby limit embodiment of the present utility model and
Protection domain, to those skilled in the art, it should can appreciate that all with the utility model specification and diagram
Hold the scheme obtained by made equivalent substitution and obvious change, should be included in protection model of the present utility model
In enclosing.
Claims (10)
1. whether a kind of level detection device on board surface, horizontal applied to detection board surface, it is characterised in that including：
Pedestal, it is arranged on the detection board surface, adjustable horizontal and can be moved along the detection board surface；
Pole, vertical is arranged on the pedestal；
Coil, it is arranged at the inside of the pole；
Magnet, it is sheathed on the pole, and can be moved up and down along the setting direction of the pole；
Probe, described probe one end are connected by a rigid structure with the magnet, and the other end contacts with the board surface, and
The probe is vertical with the board surface；
Current sensing means, connect the both ends of the coil.
2. level detection device according to claim 1, it is characterised in that be provided with level meter in the pedestal.
3. level detection device according to claim 2, it is characterised in that multiple through holes are provided with the top of the pedestal
Multiple through holes are located at around the level meter；
Contacted by the screw of setting through the through hole with the board surface.
4. level detection device according to claim 3, it is characterised in that the level meter is air-bubble level.
5. level detection device according to claim 1, it is characterised in that also including an elastomeric element, be arranged at described
On pole；
One end of the elastomeric element is connected with the bottom of the magnet, and the other end is connected with the top of the pedestal, the bullet
Property part is supporting the magnet to be in initial position.
6. level detection device according to claim 1, it is characterised in that the rigid structure includes a cross bar, and
One telescopic mounting being connected with the cross bar, the retractor device are grown to adjust the probe in the stretching of horizontal direction
Degree；
The retractor device includes：
Body, the bottom of the body are connected with the cross bar；
Expansion link, the telescopic inside for being arranged at the body, the expansion link in backwards to the body one end and institute
State probe connection；
Chute, in the stretching direction setting on the body along the expansion link；
Fixed component, the expansion link is arranged in one end of the close pole, and stretch out the chute, the fixed part
Part is controlling the length that the expansion link stretches out.
7. level detection device according to claim 6, it is characterised in that the expansion link is in the one side edge towards chute
The stretching direction for the expansion link is provided with a size scale.
8. level detection device according to claim 1, it is characterised in that the probe contacts with the board surface
It is prominent that one end is provided with a tip.
9. level detection device according to claim 1, it is characterised in that the current sensing means is sensitive electric current
Meter.
10. level detection device according to claim 1, it is characterised in that the pole is made up of isolation material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720533822.5U CN207066420U (en) | 2017-05-15 | 2017-05-15 | A kind of level detection device for detecting board surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720533822.5U CN207066420U (en) | 2017-05-15 | 2017-05-15 | A kind of level detection device for detecting board surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207066420U true CN207066420U (en) | 2018-03-02 |
Family
ID=61504651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720533822.5U Active CN207066420U (en) | 2017-05-15 | 2017-05-15 | A kind of level detection device for detecting board surface |
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| Country | Link |
|---|---|
| CN (1) | CN207066420U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110907799A (en) * | 2019-11-05 | 2020-03-24 | 长江存储科技有限责任公司 | Probe card, wafer testing device and wafer testing method |
-
2017
- 2017-05-15 CN CN201720533822.5U patent/CN207066420U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110907799A (en) * | 2019-11-05 | 2020-03-24 | 长江存储科技有限责任公司 | Probe card, wafer testing device and wafer testing method |
| CN110907799B (en) * | 2019-11-05 | 2022-02-01 | 长江存储科技有限责任公司 | Probe card, wafer testing device and wafer testing method |
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