CN207649539U - A kind of horizontal linear degree measuring device - Google Patents

A kind of horizontal linear degree measuring device Download PDF

Info

Publication number
CN207649539U
CN207649539U CN201720085717.XU CN201720085717U CN207649539U CN 207649539 U CN207649539 U CN 207649539U CN 201720085717 U CN201720085717 U CN 201720085717U CN 207649539 U CN207649539 U CN 207649539U
Authority
CN
China
Prior art keywords
fixation kit
link block
plane
block
potentiometric sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201720085717.XU
Other languages
Chinese (zh)
Inventor
张霞峰
刘强
刘浩
姚建华
喻里程
卢诗毅
林剑
胡锦辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong University of Technology
Original Assignee
Guangdong University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong University of Technology filed Critical Guangdong University of Technology
Priority to CN201720085717.XU priority Critical patent/CN207649539U/en
Application granted granted Critical
Publication of CN207649539U publication Critical patent/CN207649539U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The utility model discloses a kind of horizontal linear degree measuring devices, including bearing, guide rail, air supporting upper slide unit, fixation kit, plane-parallel crystal, the first potentiometric sensor, the second potentiometric sensor, regulating device and probe, the air supporting upper slide unit is slidably mounted on guide rail, and the guide rail is fixedly installed on bearing;The plane-parallel crystal is fixedly installed on the fixation kit, and the working face of the plane-parallel crystal is parallel with the side of fixation kit;The fixation kit is set in the air supporting upper slide unit, and the first potentiometric sensor and the second potentiometric sensor are right against the initial and end end setting of fixation kit side respectively;When distance is unequal between the first potentiometric sensor and the second potentiometric sensor respectively at the initial and end end of the fixation kit side, fixation kit described in the regulating device top pressure slides and adjusts the head end or tail end of fixation kit side;The probe is in contact with the working face of the plane-parallel crystal, have measure easily and fast with advantageous effect with high accuracy.

Description

A kind of horizontal linear degree measuring device
Technical field
The utility model belongs to Technology of Precision Measurement field, is related to a kind of measuring device, refers in particular to a kind of horizontal linear Spend measuring device.
Background technology
With the needs of nanotechnolgy equipment development, needed in many Ultraprecision Equipments real using high-precision air-float guide rail The movement of existing high straightness, the ultraprecise air-float guide rail just such as used on litho machine.Due to air-float guide rail straightness it is very big Whether ground affects the measure of precision of equipment, because after processing is completed, need to be reached to the straightness of air-float guide rail by air-float guide rail It is measured to processing request.
Laser interferometer is the most common equipment of existing measurement straightness, but laser interferometer is easy in measurement process It is interfered by external environment, such as arbitrarily the walking about of personnel, equipment noise and illumination etc..In addition laser interferometer measurement straightness It first has to adjust light path, for the personnel of rigid contact laser interferometry equipment, optical path adjusting difficulty is big and takes very It is long, seriously affect measurement result and working efficiency.
And autocollimator is to be measured according to optical autocollimating image-forming principle, but measurement result is angle value, such as angle Second, when obtaining straightness, needs angle value, converses straightness, such calculating has the case where by Enlarging-Errors.
Utility model content
The purpose of this utility model is that in view of the above-mentioned problems, provide it is a kind of measurement easily and fast with level with high accuracy Linearity measurer.
Following technical scheme can be used to reach in the purpose of this utility model:
A kind of horizontal linear degree measuring device, including bearing, guide rail, air supporting upper slide unit, fixation kit, plane-parallel crystal, One potentiometric sensor, the second potentiometric sensor, regulating device and probe, the air supporting upper slide unit are slidably mounted at the guide rail On, the guide rail is fixedly installed on the bearing;The plane-parallel crystal is fixedly installed on the fixation kit, the plane The working face of optical flat is parallel with the side of fixation kit;The fixation kit is set in the air supporting upper slide unit, first electricity Level sensor and the second potentiometric sensor are right against the initial and end end setting of the fixation kit side respectively;At described fixed group When distance is unequal between the first potentiometric sensor and the second potentiometric sensor respectively at the initial and end end of part side, the adjusting Fixation kit described in device top pressure slides and adjusts the head end or tail end of fixation kit side;The probe and the plane-parallel crystal Working face be in contact.
Further, the fixation kit includes the first link block, the second link block and cushion block, and first link block is logical It crosses cushion block to be detachably connected with second link block, the top of first link block and the second link block is equipped with for installing The groove of the plane-parallel crystal;The cushion block is configured with multiple, and is adapted with plane-parallel crystal thickness, first link block is logical Corresponding cushion block is crossed to connect with second link block and be adapted groove and plane-parallel crystal.
As a preferred solution, first link block and the second link block be equipped with for by the first link block and The magnetic attracting device that second link block separates or is attached together.
Further, the regulating device includes first motor, the second motor, the first jacking block and the second jacking block, and described The output shaft of one motor and the second motor passes through the initial and end end of the first jacking block and the second jacking block top pressure fixation kit side respectively; First potentiometric sensor and the second potentiometric sensor are fixedly installed in respectively on first jacking block and the second jacking block.
As a preferred solution, holder is detachably installed, the probe is fixedly installed in described on the bearing On holder.
As a preferred solution, the holder is removably mounted to by magnetic support on the bearing.
As a preferred solution, the first motor and the second motor are voice coil motor.
The probe is that micrometer is popped one's head in.
Implement the utility model, has the advantages that:
1, the utility model measures it by the first potentiometric sensor and the second potentiometric sensor and respectively arrives fixed group respectively The distance at the initial and end end of part side, and by the head end or tail end of regulating device promotion fixation kit, make the side of fixation kit Parallel with the end face of the first potentiometric sensor and the second potentiometric sensor, whole process is adjusted without human hand, you can completes to fix The contraposition of component and benchmark are adjusted, and are considerably reduced the time for measuring and adjusting benchmark manually, are substantially increased the work of measurement Efficiency.After automatic adjustment keeps the side of fixation kit parallel with the end face of the first potentiometric sensor and the second potentiometric sensor, Air supporting upper slide unit starts to slide and plane-parallel crystal is driven to move, and measures the displacement data of plane-parallel crystal by probe, then from Maximum value and minimum value are found out in the displacement data measured, carry out plus and minus calculation and is taken absolute value, you can obtain the straight line of guide rail Angle value.Whole process automatic aligning adjust, detection and calculate, go to complete without manpower, measure easily and fast with precision height.
2, the utility model can realize magnetic coupling by magnetic attracting device or repel each other.When coupling, can by the first link block, Cushion block and the second link block are secured together to, and are installed simply and quickly.When needing replacing cushion block, magnetic attracting device only needs reality Now repel each other, then the first link block and the second link block can be disassembled.By replacing the cushion block of different-thickness, groove is adjusted Size, so that groove is adapted to the installation needs of the plane-parallel crystal of different-thickness specification, versatility is high, simple in structure and user Just, the efficiency of measurement is greatly improved.
Description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor Under, other drawings may also be obtained based on these drawings.
Fig. 1 is the structural schematic diagram of the utility model horizontal linear degree measuring device;
Fig. 2 is the side view of Fig. 1.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts The every other embodiment obtained, shall fall within the protection scope of the present invention.
Embodiment
Referring to Figures 1 and 2, the present embodiment is related to horizontal linear degree measuring device, can to the straightness of granite guide rail into Row measures, and is also applied for measuring the straightness of guide rail made of steel material, the present apparatus includes bearing 1, guide rail 2, gas Floating upper slide unit 3, fixation kit 4, plane-parallel crystal 5, the first electric displacement sensor 6, the second electric displacement sensor 7, regulating device and Probe 9, the air supporting upper slide unit 3 is slidably mounted on the guide rail 2, and the guide rail 2 is fixedly installed on the bearing 1; The plane-parallel crystal 5 is fixedly installed on the fixation kit 4, the side of the working face and fixation kit 4 of the plane-parallel crystal 5 It is parallel;The fixation kit 4 is set in the air supporting upper slide unit 3, first electric displacement sensor, 6 and second dielectric displacement sensing Device 7 is right against the initial and end end setting of 4 side of the fixation kit respectively;Distinguish at the initial and end end of 4 side of the fixation kit It is solid described in the regulating device top pressure when distance is unequal between the first electric displacement sensor 6 and the second electric displacement sensor 7 Determine the sliding of component 4 and adjusts the head end or tail end of 4 side of fixation kit;The working face phase of the probe 9 and the plane-parallel crystal 5 Contact.The probe 9 is micrometer probe 9.
The device measures it by the first electric displacement sensor 6 and the second electric displacement sensor 7 and respectively arrives fixed group respectively The distance at the initial and end end of 4 side of part, and by the head end or tail end of regulating device promotion fixation kit 4, make fixation kit 4 Side is parallel with the end face of the first electric displacement sensor 6 and the second electric displacement sensor 7, and whole process is adjusted without human hand, i.e., The contraposition and benchmark that can complete fixation kit 4 are adjusted, and are considerably reduced the time for measuring and adjusting benchmark manually, are substantially increased The working efficiency of measurement.The side of fixation kit 4 is set to be sensed with the first electric displacement sensor 6 and the second dielectric displacement in automatic adjustment After the end face of device 7 is parallel, air supporting upper slide unit 3 starts to slide and plane-parallel crystal 5 is driven to move, and it is flat by probe 9 to measure plane Then the displacement data of crystalline substance 5 finds out maximum value and minimum value from the displacement data measured, carry out plus and minus calculation and take absolutely Value, you can obtain the straight line angle value of guide rail 2.Whole process automatic aligning is adjusted, detects and is calculated, and goes to complete without manpower, is surveyed Amount easily and fast with precision height.
The fixation kit 4 includes the first link block 41, the second link block 42 and cushion block 43, and first link block 41 is logical It crosses cushion block 43 to be detachably connected with second link block 42, first link block 41 and the top of the second link block 42 are set It is useful for that the groove of the plane-parallel crystal 5 is installed;The cushion block 43 is configured with multiple and adaptable with 5 thickness of plane-parallel crystal, institute The first link block 41 is stated to fit groove and 5 phase of plane-parallel crystal by corresponding cushion block 43 is connect with second link block 42 It answers.First link block, 41 and second link block 42 is equipped with for separating the first link block 41 and the second link block 42 Or the magnetic attracting device being attached together.
The structure can realize magnetic coupling by magnetic attracting device or repel each other.It, can be by the first link block 41, pad when coupling Block 43 and the second link block 42 are secured together to, and are installed simply and quickly.When needing replacing cushion block 43, magnetic attracting device is only It need to realize and repel each other, then the first link block 41 and the second link block 42 can be disassembled.By replacing the cushion block 43 of different-thickness, The size of adjustable groove makes groove adapt to the installation needs of the plane-parallel crystal 5 of different-thickness specification, versatility height, structure It is simple and easy to use, greatly improve the efficiency of measurement.
The regulating device includes first motor 81, the second motor 82, the first jacking block 83 and the second jacking block 84, and described first The output shaft of motor 81 and the second motor 82 respectively by the head of 4 side of the first jacking block 83 and the second jacking block top pressure fixation kit, Tail end;First electric displacement sensor, 6 and second electric displacement sensor 7 is fixedly installed in 83 He of the first jacking block respectively On second jacking block.First electric displacement sensor 6 and the second electric displacement sensor 7 are respectively to the head end and tail end of fixation kit 4 Distance be detected after, if S1Less than S2, then the head end Hua Hang ∣ S of 83 top pressure fixation kit 4 of the first jacking block are controlled2-S1∣/2 Distance, then detect S again by the first electric displacement sensor 6 and the second electric displacement sensor 71And S2Value, then control 4 Hua Hang ∣ S of first jacking block 83 or the second top pressure top pressure fixation kit2-S1The distance of ∣/2, until S1=S2, then fixation kit at this time 4 side is parallel with the end face of the first electric displacement sensor 6 and the second electric displacement sensor 7, ensure that measurement ground precision and standard True property.Whole process is detected, aligns and adjusts automatically, using simple and conveniently.
Holder 11 is detachably installed, the probe 9 is fixedly installed on the holder 11 on the bearing 1.The branch Frame 11 is removably mounted to by magnetic support 12 on the bearing 1.The holder 11 can neatly be installed on bearing 1 by magnetic support 12 Different location on, greatly facilitate to probe 9 and the selection of 5 contact point of plane-parallel crystal, be adaptable to the flat of different size The needs of face optical flat 5, versatility is high, using operated quickly and conveniently.
The first motor 81 and the second motor 82 are voice coil motor.Voice coil motor has high frequency sound and high-precision spy Property, it is ensured that the precision and accuracy for the distance that top pressure fixation kit 4 slides are conducive to the effect for improving contraposition and benchmark is adjusted Rate.
The present embodiment also provides a kind of horizontal linear degree measurement method and includes the following steps as depicted in figs. 1 and 2:
1) controller measures it by the first electric displacement sensor 6 and the second electric displacement sensor 7 and respectively arrives fixation respectively The distance at the initial and end end of 4 side of component;
2) using the half of two distance differences as foundation, the jacking block pressure of the smaller potentiometric sensor of controller command range The head end or tail end of fixation kit 4.
3) step 1) and 2) is repeated, until two apart from equal;
4) controller control air supporting upper slide unit 3 travels unidirectionally, and measures corresponding displacement data by probe 9, then can be obtained Straight line angle value.
Cooperation and straightness two-point wensor principle of this method based on plane-parallel crystal 5 and micrometer, pass through the first dielectric displacement Sensor 6 and the second electric displacement sensor 7 measure it and respectively arrive the distance at the initial and end end of 4 side of fixation kit respectively, and pass through Regulating device pushes the head end or tail end of fixation kit 4, makes side and the first electric displacement sensor 6 and second of fixation kit 4 The end face of electric displacement sensor 7 is parallel, and whole process is adjusted without human hand, you can completes contraposition and the benchmark tune of fixation kit 4 Section considerably reduces the time for measuring and adjusting benchmark manually, substantially increases the working efficiency of measurement.Make in automatic adjustment solid Determine component 4 side it is parallel with the end face of the first electric displacement sensor 6 and the second electric displacement sensor 7 after, air supporting upper slide unit 3 is opened Begin to slide and plane-parallel crystal 5 is driven to move, and measure the displacement data of plane-parallel crystal 5 by probe 9, can be obtained and lead after calculating The straight line angle value of rail 2.Whole process automatic aligning adjust, detection and calculate, go to complete without manpower, measure easily and fast and Precision is high.
The particular content of the step 4) is:
Controller control air supporting upper slide unit 3 travels unidirectionally 100mm, stops 3s at interval of 10mm, the retention period waits for that probe 9 is surveyed After the stable reading obtained, the displacement data of acquisition is transferred to controller;Maximum value and most is found out from the displacement data measured Small value carries out plus and minus calculation and takes absolute value.
More preferably, to reach the requirement of higher precision, the displacement data measured can also be carried out by least square method It calculates, the numerical value of the straightness of 2 horizontal direction of more accurate air-float guide rail can be obtained.
The operation principle of the utility model:
At work, the first electric displacement sensor 6 first and the second electric displacement sensor 7 measure its respectively end face are arrived respectively The distance of 4 end face of fixation kit, will be in the distance data transmission to controller that measured.After controller compares two range data, It controls the first briquetting (the second briquetting) held at a distance not move, the second briquetting of short distance end (the first briquetting) pushes fixation kit 4 slidings, the distance that fixation kit 4 slides are that distal end distance subtracts half of the proximal end apart from resulting value.
Since error is in the presence of that can exist, first motor 81 and the second motor 82 push away there are distance and mostly and not shift two kinds of position onto Situation.When not shifting onto, that is, repeat above-mentioned step.If distance pushes away mostly, using former distal side as proximal end, continue weight Multiple above-mentioned step, until the numerical value of two distances is equal, then 6 He of the end face of fixation kit 4 and the first electric displacement sensor at this time The end face ideal parallelism of second electric displacement sensor 7.
Then, then manually magnetic support 12 is adsorbed onto on the corresponding position of bearing 1, so that micrometer probe 9 is touched plane flat At the maximum horizontal diameter of crystalline substance 5, the registration of micrometer is 0 μm or so (being no more than 2 μm), you can starts to control air supporting upper slide unit 3 Sliding measures the straightness of guide rail 2.
Above disclosed is only a kind of the utility model preferred embodiment, cannot limit this practicality with this certainly Novel interest field, therefore equivalent variations made according to the claim of the utility model still belong to what the utility model was covered Range.

Claims (8)

1. a kind of horizontal linear degree measuring device, which is characterized in that including bearing, guide rail, air supporting upper slide unit, fixation kit, put down Face optical flat, the first potentiometric sensor, the second potentiometric sensor, regulating device and probe, the air supporting upper slide unit are slidably mounted In on the guide rail, the guide rail is fixedly installed on the bearing;The plane-parallel crystal is fixedly installed in the fixation kit On, the working face of the plane-parallel crystal is parallel with the side of fixation kit;The fixation kit is set in the air supporting upper slide unit, First potentiometric sensor and the second potentiometric sensor are right against the initial and end end setting of the fixation kit side respectively; Distance is unequal between the first potentiometric sensor and the second potentiometric sensor respectively at the initial and end end of the fixation kit side When, fixation kit sliding described in the regulating device top pressure and the head end or tail end for adjusting fixation kit side;It is described probe with The working face of the plane-parallel crystal is in contact.
2. a kind of horizontal linear degree measuring device according to claim 1, which is characterized in that the fixation kit includes the One link block, the second link block and cushion block, first link block are detachably connected by cushion block and second link block, institute The top of the first link block and the second link block is stated equipped with the groove for installing the plane-parallel crystal;The cushion block is configured with more It is a, and be adapted with plane-parallel crystal thickness, first link block is by corresponding cushion block is connect with second link block Groove and plane-parallel crystal are adapted.
3. a kind of horizontal linear degree measuring device according to claim 2, which is characterized in that first link block and Two link blocks are equipped with the magnetic attracting device for separating or being attached together the first link block and the second link block.
4. a kind of horizontal linear degree measuring device according to claim 1, which is characterized in that the regulating device includes the The output shaft of one motor, the second motor, the first jacking block and the second jacking block, the first motor and the second motor passes through first respectively The initial and end end of jacking block and the second jacking block top pressure fixation kit side;First potentiometric sensor and the second potentiometric sensor point It is not fixedly installed on first jacking block and the second jacking block.
5. a kind of horizontal linear degree measuring device according to any one of claims 1 to 4, which is characterized in that on the bearing Holder detachably is installed, the probe is fixedly installed on the holder.
6. a kind of horizontal linear degree measuring device according to claim 5, which is characterized in that the holder can by magnetic support Dismounting is installed on the bearing.
7. a kind of horizontal linear degree measuring device according to claim 4, which is characterized in that the first motor and second Motor is voice coil motor.
8. a kind of horizontal linear degree measuring device according to any one of claims 1 to 4, which is characterized in that the probe is Micrometer is popped one's head in.
CN201720085717.XU 2017-01-20 2017-01-20 A kind of horizontal linear degree measuring device Expired - Fee Related CN207649539U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720085717.XU CN207649539U (en) 2017-01-20 2017-01-20 A kind of horizontal linear degree measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720085717.XU CN207649539U (en) 2017-01-20 2017-01-20 A kind of horizontal linear degree measuring device

Publications (1)

Publication Number Publication Date
CN207649539U true CN207649539U (en) 2018-07-24

Family

ID=62884822

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720085717.XU Expired - Fee Related CN207649539U (en) 2017-01-20 2017-01-20 A kind of horizontal linear degree measuring device

Country Status (1)

Country Link
CN (1) CN207649539U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107063078A (en) * 2017-01-20 2017-08-18 广东工业大学 A kind of horizontal linear degree measurement apparatus and its method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107063078A (en) * 2017-01-20 2017-08-18 广东工业大学 A kind of horizontal linear degree measurement apparatus and its method

Similar Documents

Publication Publication Date Title
CN202994097U (en) A grating ruler precision detector
CN104359391B (en) Detecting device for reinforced concrete protective layer measurer and floor thickness measurer
CN105865714A (en) Rotor imbalance measurement device based on grating scale feedback signal
CN104457564A (en) High-precision target material measurement system and method
CN207649539U (en) A kind of horizontal linear degree measuring device
CN107063078A (en) A kind of horizontal linear degree measurement apparatus and its method
CN102607503A (en) Tilt sensor based straightness measuring instrument and method
CN106225738B (en) A kind of linear guide accuracy detecting device and method
CN207439384U (en) Major diameter sealing ring internal-and external diameter precision measuring instrument
CN106052599B (en) A kind of contactless measurement measuring linear guide precision
CN209043253U (en) A kind of small-sized orifice aperture measurement device of Industrial Engineering
CN110220467A (en) A kind of axle measuring machine
CN204405004U (en) Valve spring physical dimension measures testing machine
CN108344358A (en) A kind of rapid measurement device and measurement method of machine tool guideway mounting surface straightness
CN206019607U (en) A kind of line slideway accuracy detecting device
CN206459630U (en) A kind of cylinder jacket critical size self-operated measuring unit
CN106483049B (en) A kind of non-contact self-checking device and method of the Hegman grind gage error of indication
CN101694384A (en) Height measuring apparatus
CN208833184U (en) A kind of thickness measurement with laser jig
CN203337459U (en) Metal wire length deformation measurement device
CN110044272A (en) A kind of laser width finding centering device and application method
CN205940484U (en) Measure device of linear guide precision
CN109025311A (en) A kind of mattess screeder and construction method
CN109405718A (en) A kind of cable bend displacement measurement device
CN204462123U (en) building surface crack detecting device

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180724

Termination date: 20190120

CF01 Termination of patent right due to non-payment of annual fee