CN207649539U - A kind of horizontal linear degree measuring device - Google Patents
A kind of horizontal linear degree measuring device Download PDFInfo
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- CN207649539U CN207649539U CN201720085717.XU CN201720085717U CN207649539U CN 207649539 U CN207649539 U CN 207649539U CN 201720085717 U CN201720085717 U CN 201720085717U CN 207649539 U CN207649539 U CN 207649539U
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- 239000013078 crystal Substances 0.000 claims abstract description 32
- 239000000523 sample Substances 0.000 claims abstract description 22
- 230000001105 regulatory effect Effects 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000005259 measurement Methods 0.000 abstract description 14
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 41
- 238000000034 method Methods 0.000 description 10
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000010438 granite Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000004556 laser interferometry Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
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Abstract
本实用新型公开了一种水平直线度测量装置，包括支座、导轨、气浮上滑台、固定组件、平面平晶、第一电位传感器、第二电位传感器、调节装置和探头，所述气浮上滑台可滑动安装于导轨上，所述导轨固定安装于支座上；所述平面平晶固定安装于所述固定组件上，所述平面平晶的工作面与固定组件的侧面平行；所述固定组件设于所述气浮上滑台上，第一电位传感器和第二电位传感器分别正对于固定组件侧面的首、尾端设置；在所述固定组件侧面的首、尾端分别与第一电位传感器和第二电位传感器之间距离不相等时，所述调节装置顶压所述固定组件滑动而调节固定组件侧面的首端或尾端；所述探头与所述平面平晶的工作面相接触，具有测量方便、快速和精度高的有益效果。
The utility model discloses a horizontal straightness measuring device, which comprises a support, a guide rail, an air float upper slide, a fixed assembly, a plane flat crystal, a first potential sensor, a second potential sensor, an adjustment device and a probe. The slide table can be slidably installed on the guide rail, and the guide rail is fixedly installed on the support; the flat flat crystal is fixedly installed on the fixed assembly, and the working surface of the flat flat crystal is parallel to the side of the fixed assembly; The fixed component is arranged on the upper sliding platform of the air bearing, and the first potential sensor and the second potential sensor are respectively arranged facing the head and tail of the side of the fixed component; When the distance between the sensor and the second potential sensor is not equal, the adjusting device presses the fixed component to slide to adjust the head end or tail end of the side of the fixed component; the probe is in contact with the working surface of the plane flat crystal, The invention has the beneficial effects of convenient, rapid and high-precision measurement.
Description
Technical field
The utility model belongs to Technology of Precision Measurement field, is related to a kind of measuring device, refers in particular to a kind of horizontal linear
Spend measuring device.
Background technology
With the needs of nanotechnolgy equipment development, needed in many Ultraprecision Equipments real using high-precision air-float guide rail
The movement of existing high straightness, the ultraprecise air-float guide rail just such as used on litho machine.Due to air-float guide rail straightness it is very big
Whether ground affects the measure of precision of equipment, because after processing is completed, need to be reached to the straightness of air-float guide rail by air-float guide rail
It is measured to processing request.
Laser interferometer is the most common equipment of existing measurement straightness, but laser interferometer is easy in measurement process
It is interfered by external environment, such as arbitrarily the walking about of personnel, equipment noise and illumination etc..In addition laser interferometer measurement straightness
It first has to adjust light path, for the personnel of rigid contact laser interferometry equipment, optical path adjusting difficulty is big and takes very
It is long, seriously affect measurement result and working efficiency.
And autocollimator is to be measured according to optical autocollimating image-forming principle, but measurement result is angle value, such as angle
Second, when obtaining straightness, needs angle value, converses straightness, such calculating has the case where by Enlarging-Errors.
Utility model content
The purpose of this utility model is that in view of the above-mentioned problems, provide it is a kind of measurement easily and fast with level with high accuracy
Linearity measurer.
Following technical scheme can be used to reach in the purpose of this utility model：
A kind of horizontal linear degree measuring device, including bearing, guide rail, air supporting upper slide unit, fixation kit, plane-parallel crystal,
One potentiometric sensor, the second potentiometric sensor, regulating device and probe, the air supporting upper slide unit are slidably mounted at the guide rail
On, the guide rail is fixedly installed on the bearing；The plane-parallel crystal is fixedly installed on the fixation kit, the plane
The working face of optical flat is parallel with the side of fixation kit；The fixation kit is set in the air supporting upper slide unit, first electricity
Level sensor and the second potentiometric sensor are right against the initial and end end setting of the fixation kit side respectively；At described fixed group
When distance is unequal between the first potentiometric sensor and the second potentiometric sensor respectively at the initial and end end of part side, the adjusting
Fixation kit described in device top pressure slides and adjusts the head end or tail end of fixation kit side；The probe and the plane-parallel crystal
Working face be in contact.
Further, the fixation kit includes the first link block, the second link block and cushion block, and first link block is logical
It crosses cushion block to be detachably connected with second link block, the top of first link block and the second link block is equipped with for installing
The groove of the plane-parallel crystal；The cushion block is configured with multiple, and is adapted with plane-parallel crystal thickness, first link block is logical
Corresponding cushion block is crossed to connect with second link block and be adapted groove and plane-parallel crystal.
As a preferred solution, first link block and the second link block be equipped with for by the first link block and
The magnetic attracting device that second link block separates or is attached together.
Further, the regulating device includes first motor, the second motor, the first jacking block and the second jacking block, and described
The output shaft of one motor and the second motor passes through the initial and end end of the first jacking block and the second jacking block top pressure fixation kit side respectively；
First potentiometric sensor and the second potentiometric sensor are fixedly installed in respectively on first jacking block and the second jacking block.
As a preferred solution, holder is detachably installed, the probe is fixedly installed in described on the bearing
On holder.
As a preferred solution, the holder is removably mounted to by magnetic support on the bearing.
As a preferred solution, the first motor and the second motor are voice coil motor.
The probe is that micrometer is popped one's head in.
Implement the utility model, has the advantages that：
1, the utility model measures it by the first potentiometric sensor and the second potentiometric sensor and respectively arrives fixed group respectively
The distance at the initial and end end of part side, and by the head end or tail end of regulating device promotion fixation kit, make the side of fixation kit
Parallel with the end face of the first potentiometric sensor and the second potentiometric sensor, whole process is adjusted without human hand, you can completes to fix
The contraposition of component and benchmark are adjusted, and are considerably reduced the time for measuring and adjusting benchmark manually, are substantially increased the work of measurement
Efficiency.After automatic adjustment keeps the side of fixation kit parallel with the end face of the first potentiometric sensor and the second potentiometric sensor,
Air supporting upper slide unit starts to slide and plane-parallel crystal is driven to move, and measures the displacement data of plane-parallel crystal by probe, then from
Maximum value and minimum value are found out in the displacement data measured, carry out plus and minus calculation and is taken absolute value, you can obtain the straight line of guide rail
Angle value.Whole process automatic aligning adjust, detection and calculate, go to complete without manpower, measure easily and fast with precision height.
2, the utility model can realize magnetic coupling by magnetic attracting device or repel each other.When coupling, can by the first link block,
Cushion block and the second link block are secured together to, and are installed simply and quickly.When needing replacing cushion block, magnetic attracting device only needs reality
Now repel each other, then the first link block and the second link block can be disassembled.By replacing the cushion block of different-thickness, groove is adjusted
Size, so that groove is adapted to the installation needs of the plane-parallel crystal of different-thickness specification, versatility is high, simple in structure and user
Just, the efficiency of measurement is greatly improved.
Description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, other drawings may also be obtained based on these drawings.
Fig. 1 is the structural schematic diagram of the utility model horizontal linear degree measuring device；
Fig. 2 is the side view of Fig. 1.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts
The every other embodiment obtained, shall fall within the protection scope of the present invention.
Embodiment
Referring to Figures 1 and 2, the present embodiment is related to horizontal linear degree measuring device, can to the straightness of granite guide rail into
Row measures, and is also applied for measuring the straightness of guide rail made of steel material, the present apparatus includes bearing 1, guide rail 2, gas
Floating upper slide unit 3, fixation kit 4, plane-parallel crystal 5, the first electric displacement sensor 6, the second electric displacement sensor 7, regulating device and
Probe 9, the air supporting upper slide unit 3 is slidably mounted on the guide rail 2, and the guide rail 2 is fixedly installed on the bearing 1；
The plane-parallel crystal 5 is fixedly installed on the fixation kit 4, the side of the working face and fixation kit 4 of the plane-parallel crystal 5
It is parallel；The fixation kit 4 is set in the air supporting upper slide unit 3, first electric displacement sensor, 6 and second dielectric displacement sensing
Device 7 is right against the initial and end end setting of 4 side of the fixation kit respectively；Distinguish at the initial and end end of 4 side of the fixation kit
It is solid described in the regulating device top pressure when distance is unequal between the first electric displacement sensor 6 and the second electric displacement sensor 7
Determine the sliding of component 4 and adjusts the head end or tail end of 4 side of fixation kit；The working face phase of the probe 9 and the plane-parallel crystal 5
Contact.The probe 9 is micrometer probe 9.
The device measures it by the first electric displacement sensor 6 and the second electric displacement sensor 7 and respectively arrives fixed group respectively
The distance at the initial and end end of 4 side of part, and by the head end or tail end of regulating device promotion fixation kit 4, make fixation kit 4
Side is parallel with the end face of the first electric displacement sensor 6 and the second electric displacement sensor 7, and whole process is adjusted without human hand, i.e.,
The contraposition and benchmark that can complete fixation kit 4 are adjusted, and are considerably reduced the time for measuring and adjusting benchmark manually, are substantially increased
The working efficiency of measurement.The side of fixation kit 4 is set to be sensed with the first electric displacement sensor 6 and the second dielectric displacement in automatic adjustment
After the end face of device 7 is parallel, air supporting upper slide unit 3 starts to slide and plane-parallel crystal 5 is driven to move, and it is flat by probe 9 to measure plane
Then the displacement data of crystalline substance 5 finds out maximum value and minimum value from the displacement data measured, carry out plus and minus calculation and take absolutely
Value, you can obtain the straight line angle value of guide rail 2.Whole process automatic aligning is adjusted, detects and is calculated, and goes to complete without manpower, is surveyed
Amount easily and fast with precision height.
The fixation kit 4 includes the first link block 41, the second link block 42 and cushion block 43, and first link block 41 is logical
It crosses cushion block 43 to be detachably connected with second link block 42, first link block 41 and the top of the second link block 42 are set
It is useful for that the groove of the plane-parallel crystal 5 is installed；The cushion block 43 is configured with multiple and adaptable with 5 thickness of plane-parallel crystal, institute
The first link block 41 is stated to fit groove and 5 phase of plane-parallel crystal by corresponding cushion block 43 is connect with second link block 42
It answers.First link block, 41 and second link block 42 is equipped with for separating the first link block 41 and the second link block 42
Or the magnetic attracting device being attached together.
The structure can realize magnetic coupling by magnetic attracting device or repel each other.It, can be by the first link block 41, pad when coupling
Block 43 and the second link block 42 are secured together to, and are installed simply and quickly.When needing replacing cushion block 43, magnetic attracting device is only
It need to realize and repel each other, then the first link block 41 and the second link block 42 can be disassembled.By replacing the cushion block 43 of different-thickness,
The size of adjustable groove makes groove adapt to the installation needs of the plane-parallel crystal 5 of different-thickness specification, versatility height, structure
It is simple and easy to use, greatly improve the efficiency of measurement.
The regulating device includes first motor 81, the second motor 82, the first jacking block 83 and the second jacking block 84, and described first
The output shaft of motor 81 and the second motor 82 respectively by the head of 4 side of the first jacking block 83 and the second jacking block top pressure fixation kit,
Tail end；First electric displacement sensor, 6 and second electric displacement sensor 7 is fixedly installed in 83 He of the first jacking block respectively
On second jacking block.First electric displacement sensor 6 and the second electric displacement sensor 7 are respectively to the head end and tail end of fixation kit 4
Distance be detected after, if S1Less than S2, then the head end Hua Hang ∣ S of 83 top pressure fixation kit 4 of the first jacking block are controlled2-S1∣/2
Distance, then detect S again by the first electric displacement sensor 6 and the second electric displacement sensor 71And S2Value, then control
4 Hua Hang ∣ S of first jacking block 83 or the second top pressure top pressure fixation kit2-S1The distance of ∣/2, until S1=S2, then fixation kit at this time
4 side is parallel with the end face of the first electric displacement sensor 6 and the second electric displacement sensor 7, ensure that measurement ground precision and standard
True property.Whole process is detected, aligns and adjusts automatically, using simple and conveniently.
Holder 11 is detachably installed, the probe 9 is fixedly installed on the holder 11 on the bearing 1.The branch
Frame 11 is removably mounted to by magnetic support 12 on the bearing 1.The holder 11 can neatly be installed on bearing 1 by magnetic support 12
Different location on, greatly facilitate to probe 9 and the selection of 5 contact point of plane-parallel crystal, be adaptable to the flat of different size
The needs of face optical flat 5, versatility is high, using operated quickly and conveniently.
The first motor 81 and the second motor 82 are voice coil motor.Voice coil motor has high frequency sound and high-precision spy
Property, it is ensured that the precision and accuracy for the distance that top pressure fixation kit 4 slides are conducive to the effect for improving contraposition and benchmark is adjusted
Rate.
The present embodiment also provides a kind of horizontal linear degree measurement method and includes the following steps as depicted in figs. 1 and 2：
1) controller measures it by the first electric displacement sensor 6 and the second electric displacement sensor 7 and respectively arrives fixation respectively
The distance at the initial and end end of 4 side of component；
2) using the half of two distance differences as foundation, the jacking block pressure of the smaller potentiometric sensor of controller command range
The head end or tail end of fixation kit 4.
3) step 1) and 2) is repeated, until two apart from equal；
4) controller control air supporting upper slide unit 3 travels unidirectionally, and measures corresponding displacement data by probe 9, then can be obtained
Straight line angle value.
Cooperation and straightness two-point wensor principle of this method based on plane-parallel crystal 5 and micrometer, pass through the first dielectric displacement
Sensor 6 and the second electric displacement sensor 7 measure it and respectively arrive the distance at the initial and end end of 4 side of fixation kit respectively, and pass through
Regulating device pushes the head end or tail end of fixation kit 4, makes side and the first electric displacement sensor 6 and second of fixation kit 4
The end face of electric displacement sensor 7 is parallel, and whole process is adjusted without human hand, you can completes contraposition and the benchmark tune of fixation kit 4
Section considerably reduces the time for measuring and adjusting benchmark manually, substantially increases the working efficiency of measurement.Make in automatic adjustment solid
Determine component 4 side it is parallel with the end face of the first electric displacement sensor 6 and the second electric displacement sensor 7 after, air supporting upper slide unit 3 is opened
Begin to slide and plane-parallel crystal 5 is driven to move, and measure the displacement data of plane-parallel crystal 5 by probe 9, can be obtained and lead after calculating
The straight line angle value of rail 2.Whole process automatic aligning adjust, detection and calculate, go to complete without manpower, measure easily and fast and
Precision is high.
The particular content of the step 4) is：
Controller control air supporting upper slide unit 3 travels unidirectionally 100mm, stops 3s at interval of 10mm, the retention period waits for that probe 9 is surveyed
After the stable reading obtained, the displacement data of acquisition is transferred to controller；Maximum value and most is found out from the displacement data measured
Small value carries out plus and minus calculation and takes absolute value.
More preferably, to reach the requirement of higher precision, the displacement data measured can also be carried out by least square method
It calculates, the numerical value of the straightness of 2 horizontal direction of more accurate air-float guide rail can be obtained.
The operation principle of the utility model：
At work, the first electric displacement sensor 6 first and the second electric displacement sensor 7 measure its respectively end face are arrived respectively
The distance of 4 end face of fixation kit, will be in the distance data transmission to controller that measured.After controller compares two range data,
It controls the first briquetting (the second briquetting) held at a distance not move, the second briquetting of short distance end (the first briquetting) pushes fixation kit
4 slidings, the distance that fixation kit 4 slides are that distal end distance subtracts half of the proximal end apart from resulting value.
Since error is in the presence of that can exist, first motor 81 and the second motor 82 push away there are distance and mostly and not shift two kinds of position onto
Situation.When not shifting onto, that is, repeat above-mentioned step.If distance pushes away mostly, using former distal side as proximal end, continue weight
Multiple above-mentioned step, until the numerical value of two distances is equal, then 6 He of the end face of fixation kit 4 and the first electric displacement sensor at this time
The end face ideal parallelism of second electric displacement sensor 7.
Then, then manually magnetic support 12 is adsorbed onto on the corresponding position of bearing 1, so that micrometer probe 9 is touched plane flat
At the maximum horizontal diameter of crystalline substance 5, the registration of micrometer is 0 μm or so (being no more than 2 μm), you can starts to control air supporting upper slide unit 3
Sliding measures the straightness of guide rail 2.
Above disclosed is only a kind of the utility model preferred embodiment, cannot limit this practicality with this certainly
Novel interest field, therefore equivalent variations made according to the claim of the utility model still belong to what the utility model was covered
Range.
Claims (8)
1. a kind of horizontal linear degree measuring device, which is characterized in that including bearing, guide rail, air supporting upper slide unit, fixation kit, put down
Face optical flat, the first potentiometric sensor, the second potentiometric sensor, regulating device and probe, the air supporting upper slide unit are slidably mounted
In on the guide rail, the guide rail is fixedly installed on the bearing；The plane-parallel crystal is fixedly installed in the fixation kit
On, the working face of the plane-parallel crystal is parallel with the side of fixation kit；The fixation kit is set in the air supporting upper slide unit,
First potentiometric sensor and the second potentiometric sensor are right against the initial and end end setting of the fixation kit side respectively；
Distance is unequal between the first potentiometric sensor and the second potentiometric sensor respectively at the initial and end end of the fixation kit side
When, fixation kit sliding described in the regulating device top pressure and the head end or tail end for adjusting fixation kit side；It is described probe with
The working face of the plane-parallel crystal is in contact.
2. a kind of horizontal linear degree measuring device according to claim 1, which is characterized in that the fixation kit includes the
One link block, the second link block and cushion block, first link block are detachably connected by cushion block and second link block, institute
The top of the first link block and the second link block is stated equipped with the groove for installing the plane-parallel crystal；The cushion block is configured with more
It is a, and be adapted with plane-parallel crystal thickness, first link block is by corresponding cushion block is connect with second link block
Groove and plane-parallel crystal are adapted.
3. a kind of horizontal linear degree measuring device according to claim 2, which is characterized in that first link block and
Two link blocks are equipped with the magnetic attracting device for separating or being attached together the first link block and the second link block.
4. a kind of horizontal linear degree measuring device according to claim 1, which is characterized in that the regulating device includes the
The output shaft of one motor, the second motor, the first jacking block and the second jacking block, the first motor and the second motor passes through first respectively
The initial and end end of jacking block and the second jacking block top pressure fixation kit side；First potentiometric sensor and the second potentiometric sensor point
It is not fixedly installed on first jacking block and the second jacking block.
5. a kind of horizontal linear degree measuring device according to any one of claims 1 to 4, which is characterized in that on the bearing
Holder detachably is installed, the probe is fixedly installed on the holder.
6. a kind of horizontal linear degree measuring device according to claim 5, which is characterized in that the holder can by magnetic support
Dismounting is installed on the bearing.
7. a kind of horizontal linear degree measuring device according to claim 4, which is characterized in that the first motor and second
Motor is voice coil motor.
8. a kind of horizontal linear degree measuring device according to any one of claims 1 to 4, which is characterized in that the probe is
Micrometer is popped one's head in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720085717.XU CN207649539U (en) | 2017-01-20 | 2017-01-20 | A kind of horizontal linear degree measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720085717.XU CN207649539U (en) | 2017-01-20 | 2017-01-20 | A kind of horizontal linear degree measuring device |
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| Publication Number | Publication Date |
|---|---|
| CN207649539U true CN207649539U (en) | 2018-07-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720085717.XU Expired - Fee Related CN207649539U (en) | 2017-01-20 | 2017-01-20 | A kind of horizontal linear degree measuring device |
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| Country | Link |
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| CN (1) | CN207649539U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107063078A (en) * | 2017-01-20 | 2017-08-18 | 广东工业大学 | A kind of horizontal linear degree measurement apparatus and its method |
| CN116989835A (en) * | 2023-09-25 | 2023-11-03 | 深圳市中图仪器股份有限公司 | Guide rail system capable of being adaptively adjusted |
-
2017
- 2017-01-20 CN CN201720085717.XU patent/CN207649539U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107063078A (en) * | 2017-01-20 | 2017-08-18 | 广东工业大学 | A kind of horizontal linear degree measurement apparatus and its method |
| CN116989835A (en) * | 2023-09-25 | 2023-11-03 | 深圳市中图仪器股份有限公司 | Guide rail system capable of being adaptively adjusted |
| CN116989835B (en) * | 2023-09-25 | 2023-12-15 | 深圳市中图仪器股份有限公司 | Guide rail system capable of being adaptively adjusted |
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Granted publication date: 20180724 Termination date: 20190120 |