CN116989835B

CN116989835B - Guide rail system capable of being adaptively adjusted

Info

Publication number: CN116989835B
Application number: CN202311241756.0A
Authority: CN
Inventors: 刘龙孝; 肖田; 崔建国; 杨政; 张鹏
Original assignee: Chotest Technology Inc
Current assignee: Chotest Technology Inc
Priority date: 2023-09-25
Filing date: 2023-09-25
Publication date: 2023-12-15
Anticipated expiration: 2043-09-25
Also published as: CN117824734A; CN117824733A; CN116989835A

Abstract

The invention describes a guide rail system capable of being adaptively adjusted, which comprises a moving assembly, a guide rail assembly, a transmission assembly and an adjusting assembly, wherein the adjusting assembly comprises a first adjusting part and a second adjusting part which can rotate relatively, the moving assembly is fixedly connected with the first adjusting part, the transmission assembly is fixedly connected with the second adjusting part, the moving assembly is connected with the transmission assembly through the adjusting assembly and moves along a first direction limited by the guide rail assembly under the driving of the transmission assembly, the axial direction of the relative rotation of the first adjusting part and the second adjusting part is a second direction, and the first direction is different from the second direction. The guide rail system has certain flexibility, and can adaptively adjust the straightness deviation of the moving shaft system, so that the accuracy of the measuring equipment can be improved.

Description

Guide rail system capable of being adaptively adjusted

Technical Field

The invention relates to the field of intelligent manufacturing, in particular to a guide rail system capable of being adjusted in a self-adaptive mode.

Background

The rail system generally includes a moving portion, a rail portion, and a power portion, the moving portion being movable in a movement direction limited by the rail portion under the drive of the power portion. In smart manufacturing, a rail system may be used to move a particular item along the trajectory of a rail to facilitate the particular item performing a particular function, such as transportation, tapping, grasping, and measuring.

In particular, in a measuring device, the measuring device generally utilizes a guide rail system to drive a measuring component to measure an object to be measured, and the stability of the guide rail system is closely related to the measuring precision of the measuring device. In the prior art, a guide rail system used in a measuring apparatus generally reduces an apparatus error (or instrument error) of the measuring apparatus by improving surface accuracy of a moving part and a guide rail part and a degree of tightness of mutual cooperation or improving control accuracy of a power part so as to finally improve measurement accuracy of the measuring apparatus.

These solutions of the prior art, although making it possible to manufacture various components, such as moving parts, rail parts, power parts or measuring parts, etc., which achieve a precision in the order of micrometers, by means of well-established machining processes. However, under the requirement of higher measurement precision (for example, nanometer level), random errors may still exist in the matching of various components, for example, when unstable factors such as temperature, humidity, air pressure and the like change to cause slight deviation of the moving part relative to the guide rail part (that is, straightness deviation of the moving shaft system), that is, random errors occur, and the rigid connection easily causes the problem that the components are not smooth to operate, and the problem may further cause problems such as vibration and abrasion. In microscopic cases, for example on the micrometer or nanometer scale, such vibrations and wear due to random errors are easily translated into larger measurement errors.

Disclosure of Invention

The present invention has been made in view of the above-described conventional circumstances, and an object thereof is to provide a guide rail system capable of being adaptively adjusted, which has a certain flexibility and is capable of adaptively adjusting a deviation in straightness of a moving axis, thereby improving accuracy of a measuring apparatus.

The invention provides a guide rail system capable of being adaptively adjusted, which comprises a moving assembly, a guide rail assembly, a transmission assembly and an adjusting assembly, wherein the adjusting assembly comprises a first adjusting part and a second adjusting part which can rotate relatively, the moving assembly is fixedly connected with the first adjusting part, the transmission assembly is fixedly connected with the second adjusting part, the moving assembly is connected with the transmission assembly through the adjusting assembly and moves along a first direction limited by the guide rail assembly under the driving of the transmission assembly, the axial direction of the relative rotation of the first adjusting part and the second adjusting part is a second direction, and the first direction is different from the second direction.

In the invention, the motion assembly is connected with the transmission assembly through the adjusting assembly comprising the first adjusting part and the second adjusting part which can rotate relatively, and moves along the first direction limited by the guide rail assembly under the driving of the transmission assembly, the motion assembly is fixedly connected with the first adjusting part, the transmission assembly is fixedly connected with the second adjusting part, and the first adjusting part and the second adjusting part can rotate relatively. In this case, the motion assembly and the transmission assembly can be flexibly matched, that is, the motion assembly and the transmission assembly are movably connected (such as rotated) through the adjustment assembly, instead of being directly and fixedly connected (i.e., rigidly connected), when the transmission direction is deviated or offset (i.e., in the motion shafting, the deviation of straightness between the motion assembly and the guide rail assembly is caused by the fact that the transmission direction is inconsistent with the first direction), the first adjustment portion and the second adjustment portion can convert the torque for deviating the transmission assembly into the rotation torque of the adjustment assembly through a rotating manner, that is, the influence of the deviation or offset of the transmission assembly on the motion of the motion assembly can be reduced, that is, the deviation of straightness between the motion assembly and the guide rail assembly can be reduced, that is, the deviation of straightness of the motion shafting can be adaptively adjusted, and therefore the precision and the stability of the measurement device can be improved.

Further, according to the rail system according to the present invention, optionally, the rail assembly includes a first rail and a second rail disposed along the first direction and engaged with the first rail. In this case, by the second rail provided in the first direction and the first rail being engaged, for example, engaged to form parallel rails, a track that restricts movement of the moving assembly in the first direction can be formed, whereby the moving assembly can be moved and kept stable under the guidance of the track.

Further, according to the rail system according to the present invention, optionally, the moving assembly includes a moving body having a first side provided with the elastic member, a second side opposite to the first side, and an elastic member slidably abutted against the first rail, and slidably abutted against the second rail. In this case, the track formed by the first rail and the second rail is an open track, i.e., the movement direction and the movement accuracy of the moving body are directly affected by the second rail, but not affected by the first rail, while the elastic member can play a role in maintaining the close connection of the moving body and the second rail, whereby the degree of parallelism of the first rail and the second rail can be eliminated when the first rail and the second rail form a track in which the movement direction can be restricted to the first direction, whereby the difficulty of the process of manufacturing the track can be reduced, and the movement accuracy of the moving body can be maintained by the elastic member. In addition, the open type track also has certain flexibility, so that the problem of insufficient stability caused by overlarge rigidity of the track can be solved, and the smoothness of the movement of the moving body can be improved.

In addition, according to the rail system related to the present invention, optionally, the rail assembly further includes a third rail having a reference plane, the roughness of the reference plane is not greater than a preset value, and the moving body further has a third side intersecting the second direction, the third side slidably abutting the reference plane. In this case, the moving body can move under the guide of the third rail by sliding against the reference plane, whereby the movement accuracy of the moving body can be improved by reducing the roughness of the reference plane of the third rail.

In addition, according to the guide rail system related to the present invention, optionally, the first adjusting portion includes at least one bearing and a first fixing base fixedly connecting the bearing with the motion assembly, and the second adjusting portion includes a rotating shaft relatively rotatable with the bearing and a second fixing base fixedly connecting the rotating shaft with the transmission assembly. Under the condition, the motion assembly and the transmission assembly can rotate in a manner of being matched with the rotating shaft through the bearing, and when the transmission assembly is deviated or deviated, the straightness deviation of the motion shaft system can be adaptively adjusted, so that the accuracy and the stability of the measuring equipment can be improved.

In addition, according to the guide rail system of the present invention, optionally, the second adjusting part further includes a locking member configured to limit the movement of the rotating shaft in the second direction, and at least one clamping member fixedly connecting the transmission assembly and the second fixing base. In this case, the rotation shaft can be restrained by the lock member, for example, to reduce the shake in the second direction, and the straightness of the moving assembly in the first direction can be improved, whereby the stability of the moving assembly in the second direction can be improved. In addition, the transmission assembly and the second fixing seat are fixedly connected through the clamping piece, so that the transmission assembly can be conveniently detached and replaced, and the accuracy of the transmission assembly can be conveniently adjusted according to requirements (for example, the accuracy of the transmission assembly can be conveniently adjusted by adjusting the tightening force of the transmission belt).

Further, according to the rail system according to the present invention, the rail assembly may optionally include a first rail and a second rail disposed along the first direction. In this case, the first guide rail and the second guide rail are parallel, a rail that restricts movement of the moving assembly in the first direction can be formed, whereby it can be facilitated to select at least one of the first guide rail and the second guide rail to constitute an open rail or a rigid rail to guide movement of the moving assembly.

In addition, according to the guide rail system related to the present invention, optionally, the second adjusting portion includes at least one clamping member that fixedly connects the transmission assembly and the second adjusting portion, the transmission assembly includes a transmission wheel, and a transmission belt having a transmission direction identical to or opposite to the first direction, the transmission belt is fixed to the second adjusting portion by the clamping member, and the transmission belt includes a smooth inner side surface and a toothed outer side surface, and the inner side surface is in contact with the transmission wheel. In this case, the conveyor belt and the second adjusting portion of the transmission assembly are fixedly connected by the clamping member, and the conveyor belt can be easily detached and replaced, thereby being capable of facilitating adjustment of the transmission accuracy as required. In addition, the smooth inner side surface of the conveyor belt is contacted with the driving wheel, so that the stability of the conveyor belt can be maintained when the driving wheel drives at high speed; meanwhile, the toothed outer side surface can reduce driving noise, namely auxiliary shock absorption, so that the stability of the second adjusting part of the conveyor belt driving can be further improved.

In addition, according to the guide rail system related to the invention, optionally, the guide rail system further comprises an auxiliary assembly, wherein the auxiliary assembly comprises a measuring set and a limiting set, the measuring set comprises a grating measuring device arranged on the moving body and a grating ruler arranged on the second guide rail, and the limiting set comprises a sensing piece arranged on the moving body and a plurality of sensing devices arranged on the third guide rail. In this case, the displacement of the moving body with respect to the second guide rail can be measured by the grating scale and the grating measuring device; in addition, through the cooperation of the sensing piece and a plurality of sensing devices, the motion travel of the motion main body can be tracked and restrained, so that the occurrence of unexpected situations such as inaccurate motion and the like caused by overrun of the motion main body is reduced.

In addition, according to the rail system of the present invention, optionally, the straight line in the first direction and the straight line in the second direction are spatially perpendicular to each other. In this case, the guide rail system can obtain the right angle movement axis of the movement assembly by restricting the movement of the movement assembly in the first direction and the second direction perpendicular to each other, and thus can facilitate judgment of the straightness of the movement assembly by the right angle movement axis.

According to the invention, the guide rail system capable of being adjusted in a self-adaptive manner can be provided, has certain flexibility, and can be used for adjusting straightness deviation of a moving shaft system in a self-adaptive manner, so that the accuracy of measuring equipment can be improved.

Drawings

The invention will now be explained in further detail by way of example only with reference to the accompanying drawings.

Fig. 1 is a schematic view showing a scenario in which a rail system according to an example of the present invention is applied to a measuring apparatus 100.

Fig. 2 is a block diagram showing a structure of a rail system according to an example of the present invention.

Fig. 3 is a schematic diagram showing the structure of a rail system according to an example of the present invention.

Fig. 4 is an enlarged structural diagram showing the region a according to the example of fig. 3 of the present invention.

Fig. 5 is a schematic diagram showing a first perspective view of a three-dimensional structure of a rail system according to an example of the present invention.

Fig. 6 is a schematic diagram showing a second perspective view of a three-dimensional structure of a rail system according to an example of the present invention.

Fig. 7 is a schematic diagram illustrating the stress of the adjustment assembly in the case where the rail system according to the example of the present invention is not shifted in transmission.

Fig. 8 is a schematic diagram illustrating the stress of the adjustment assembly in the presence of an offset in the transmission of the rail system according to an example of the invention.

Fig. 9 is a block diagram showing a structure of a rail system according to another example of the present invention.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

It should be noted that the terms "first," "second," "third," and "fourth," etc. in the description and claims of the present invention and in the above figures are used for distinguishing between different objects and not for describing a particular sequential order. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed or inherent to such process, method, article, or apparatus but may optionally include other steps or elements not listed. In the following description, the same members are denoted by the same reference numerals, and overlapping description thereof is omitted. In addition, the drawings are schematic, and the ratio of the sizes of the components to each other, the shapes of the components, and the like may be different from actual ones.

The invention provides a guide rail system capable of being adjusted in a self-adaptive manner, which has certain flexibility and can be used for adjusting straightness deviation of a moving shaft system in a self-adaptive manner, so that the accuracy of measuring equipment can be improved.

In some examples, the adaptively adjustable rail system according to the present invention may also be referred to as "a rail system having an adaptively adjusting deviation function", "an adaptively adjustable moving system", "a moving system having an adaptively adjusting deviation function", "an adaptively adjustable rail structure", or "a rail structure having an adaptively adjusting deviation function", etc., and hereinafter, for convenience of description, the adaptively adjustable rail system is sometimes simply referred to as "a rail system".

Fig. 1 is a schematic view showing a scene in which a rail system 1 according to an example of the present invention is applied to a measuring apparatus 100.

In some examples, the adaptively adjustable guide rail system 1 according to the present invention may be used in various devices having a motion axis, in particular, a measuring device 100 having a high requirement on the accuracy of the motion axis, such as a measuring device having a precision or straightness requirement on the micro-nanometer scale, including, but not limited to, a laser measuring device 100, an interferometry measuring device 100, a three-coordinate measuring device 100, an optical microscopy measuring device 100, a surface profile or roughness measuring device 100 (profilometer, step meter, etc.), and the like. The invention takes a step instrument as an example, the guide rail system 1 capable of being adaptively adjusted can be used in the step instrument, the principle of the step instrument is similar to that of a profile instrument, the surface profile or roughness of a measured object is obtained by moving a contact probe on the surface of the measured object, the precision level is higher than that of the profile instrument, the profile instrument is in a micron level generally, and the step instrument is in a nanometer level.

Specifically, in the present invention, as shown in fig. 1, the motion axes of the step ladder may include an X axis, a Y axis, an R axis (rotation axis), and a Z axis, and the motion axes of the step ladder may be rectangular coordinates. Because the profiler and the step meter are both used for measuring the surface profile or roughness of the object in a contact manner, namely, the height difference of the surface of the object is obtained by scanning the object on the X axis or the Y axis and is reflected in the Z direction (Z axis direction), the accuracy of the Z direction is directly related to the straightness of the X axis or the Y axis. In some examples, the adaptively adjustable guide rail system 1 may be used in an X-axis or a Y-axis of a step ladder to drive the stage 2 of the step ladder to move in the X-axis direction or the Y-axis direction, thereby enabling to improve the measurement accuracy of the stage 2 in the Z-direction (i.e., the Z-axis direction) by improving the straightness of the stage 2 in the X-axis or the Y-axis.

Fig. 2 is a block diagram showing the structure of the rail system 1 according to the example of the present invention. Fig. 3 is a schematic diagram showing the structure of the rail system 1 according to the example of the present invention. Fig. 4 is an enlarged structural diagram showing the region a according to the example of fig. 3 of the present invention.

As shown in fig. 2, the adaptively adjustable guide rail system 1 according to the present invention may include a moving assembly 12, a guide rail assembly 11, a transmission assembly 14, and an adjustment assembly 13. Continuing with the step gauge example, in some examples, the motion assembly 12 may be used to move the stage 2 of the step gauge, thereby enabling the measurement of surface profile or roughness of the article under test to be facilitated.

In some examples, the guide rail assembly 11 may be used to guide or limit movement of the movement assembly 12, for example, as shown in fig. 3, the guide rail assembly 11 may be used to guide movement of the movement assembly 12 in a first direction (e.g., an X-axis direction), thereby enabling movement of the movement assembly 12 along a predetermined axis of movement and obtaining a corresponding displacement value to facilitate measurement by the step gauge.

In some examples, transmission assembly 14 may be used to provide driving force to motion assembly 12. That is, the transmission assembly 14 may drive the movement assembly 12 in a predetermined direction. Specifically, the transmission assembly 14 may drive the movement assembly 12 to move in a first direction, i.e., the preset direction may be the first direction.

In some examples, the adjusting component 13 may be configured to automatically adjust the transmission kinetic energy of the transmission component 14 and the motion component 12, for example, by rotationally converting the kinetic energy of the transmission component 14 in the offset direction into the rotational kinetic energy of the adjusting component 13, so as to reduce the influence of the kinetic energy of the transmission component 14 in the offset direction on the motion of the motion component 12 in the first direction, thereby improving the measurement accuracy and stability of the step ladder.

Specifically, as shown in fig. 3 and 4, in some examples, the adjustment assembly 13 may include a first adjustment portion 131 and a second adjustment portion 132. In some examples, the first adjusting portion 131 and the second adjusting portion 132 may be disposed in circular symmetry when they are matched with each other, for example, the first adjusting portion 131 may be a cylinder, and the second adjusting portion 132 may be a ring. In some examples, the first adjustment portion 131 and the second adjustment portion 132 may be relatively rotatable. In some examples, the first adjusting part 131 and the second adjusting part 132 may be relatively rotatable, which may mean that in the first adjusting part 131 and the second adjusting part 132, a central axis of either adjusting part is set as a rotation center, and the other adjusting part is rotated with respect to the rotation center, for example, a movement relationship of a shaft and a bearing.

In some examples, the motion assembly 12 may be fixedly coupled to the first adjustment portion 131 and the transmission assembly 14 may be fixedly coupled to the second adjustment portion 132. In this case, the movement assembly 12 is indirectly connected to the transmission assembly 14 via the first and second adjustment portions 131, 132 of the adjustment assembly 13, and since the first and second adjustment portions 131, 132 are relatively rotatable, this connection of the movement assembly 12 to the transmission assembly 14 can be somewhat "flexible", i.e. the movement assembly 12 and the transmission assembly 14 are movably connected (i.e. rotated) via the adjustment assembly 13, rather than being directly fixedly connected (i.e. rigidly connected).

In some examples, motion assembly 12 may be coupled with a transmission assembly 14. In some examples, the movement assembly 12 may be coupled to the transmission assembly 14 via the adjustment assembly 13 and may be driven by the transmission assembly 14 to move in a first direction limited by the rail assembly 11. In this case, when the transmission direction is deviated or deviated (i.e., in the motion axis, deviation of straightness between the motion assembly 12 and the rail assembly 11 is caused by deviation of the transmission direction from the first direction), the first and second adjusting parts 131 and 132 can convert the moment for deviating the transmission assembly 14 into the rotation torque of the adjusting assembly 13 by rotating, i.e., the influence of the deviation or deviation of the transmission assembly 14 on the motion of the motion assembly 12 can be reduced, so that the stability between the motion assembly 12 and the rail assembly 11 can be improved, and thus the accuracy and stability of the measuring apparatus can be improved.

In some examples, the axial direction of the relative rotation of the first and second adjustment parts 131 and 132 may be made a second direction. In some examples, the first direction may be different from the second direction. In this case, the movement direction (i.e., the first direction) of the transmission assembly 14 driving the movement assembly 12 is different from the axial direction (i.e., the second direction) of the adjustment assembly 13, and the offset or deviation (e.g., the torsion pendulum) generated when the transmission assembly 14 driving the movement assembly 12 is moved can be converted into the rotational movement of the second adjustment portion 132 of the adjustment assembly 13 with respect to the first adjustment portion 131, whereby the influence of the offset or deviation on the movement assembly 12 can be reduced.

Preferably, in some examples, the first direction may be spatially perpendicular to the second direction, in particular, the straight line in the first direction may be spatially perpendicular to the straight line in the second direction. In this case, the guide rail system 1 can obtain the right angle motion axis of the motion assembly 12 by restricting the motion of the motion assembly 12 in the first direction and the second direction perpendicular to each other, and thus can facilitate judgment of the straightness of the motion assembly 12 by the right angle motion axis.

In some examples, the first direction to which the present invention relates may refer to an X-axis or Y-axis direction, also referred to as an X-direction or Y-direction, in the axis of motion of the apparatus (e.g., a step gauge). In some examples, the second direction to which the present invention relates may refer to a Z-axis direction, also referred to as Z-direction, in a motion axis of a device (e.g., a step gauge).

The guide rail assembly 11, the movement assembly 12, the adjustment assembly 13, the transmission assembly 14, etc. of the guide rail system 1 according to the present invention will be described in detail with reference to the accompanying drawings.

Fig. 5 is a schematic diagram showing a first view angle of a three-dimensional structure of the rail system 1 according to the example of the present invention.

As described above, the rail system 1 according to the present invention may include the rail assembly 11. Specifically, as shown in fig. 5, in some examples, the rail assembly 11 may include a first rail 111 and a second rail 112. In some examples, the second rail 112 may be disposed along a first direction (i.e., the X-direction).

In some examples, second rail 112 may be disposed along a first direction and may cooperate with first rail 111, i.e., second rail 112 and first rail 111 may cooperate to guide or limit movement of movement assembly 12, e.g., may guide movement of movement assembly 12 in the first direction. In this case, by the second guide rail 112 provided in the first direction and the first guide rail 111 being mated, for example, mated to form parallel guide rails, it is possible to form a track that restricts the movement of the movement assembly 12 in the first direction, and it is also possible to facilitate the subsequent addition of an elastic structure to be combined to form an open track, whereby the movement assembly 12 can be moved under the guidance of the track and kept stable.

In some examples, the rail assembly 11 may include a first rail 111 and a second rail 112 disposed along a first direction, i.e., the first rail 111 and the second rail 112 may be parallel. In this case, the first guide rail 111 and the second guide rail 112 are parallel, a track that restricts movement of the moving assembly 12 in the first direction can be formed, and thus it can be convenient to select at least one of the first guide rail 111 and the second guide rail 112 to constitute an open track or a rigid track to guide movement of the moving assembly 12.

In some examples, the first rail 111 may be elongated. In some examples, the first rail 111 may have at least one surface having a roughness not greater than a preset value.

In some examples, the second rail 112 may be elongated. In some examples, the second rail 112 may have at least one surface with a roughness not greater than a preset value. In some examples, the preset value may be 1 micrometer (μm). In some examples, the preset value may also be freely set according to the requirements and the reality, for example the preset value may also be 1.5 micrometers (mum), 2 micrometers (mum), 2.5 micrometers (mum), 3 micrometers (mum) or more.

In some examples, one surface of the first rail 111 having a roughness not greater than a preset value may be disposed opposite to one surface of the second rail 112 having a roughness not greater than a preset value. In this case, a rail restricting the movement of the movement assembly 12 can be formed by the cooperation of the first rail 111 and the second rail 112, and the rail can improve accuracy by reducing the roughness of the first rail 111 and the roughness of the second rail 112, thereby enabling precise guidance for the movement of the movement assembly 12.

In some examples, as shown in fig. 5, rail assembly 11 may further include a third rail 113. In some examples, the third rail 113 may have a reference plane.

In some examples, the reference plane may be a plane where roughness and flatness errors of the surface are minimal. In some examples, the roughness of the reference plane is not greater than a preset value. In some examples, the reference plane may be one surface of the flat crystal 1131, i.e., the third rail 113 may include the flat crystal 1131 (i.e., an instrument that measures high finish surface flatness errors).

In other examples, the reference plane may be any other surface capable of being made of a material having a surface roughness not greater than a predetermined value, including, but not limited to, glass, quartz, ceramic, composite, metal or alloy, and the like.

In some examples, the roughness of the reference plane being not greater than the preset value may particularly mean that the roughness of the reference plane is not greater than 0.05 micrometer, i.e. for the reference plane the preset value may be 0.05 micrometer. In this case, the movement assembly 12 can be moved in the reference plane within an allowable error range (described later). For example, the step gauge may measure the object by carrying the table 2 with the motion assembly 12 moving in the reference plane to obtain a profile or roughness on the order of micrometers within an allowable error range.

In some examples, as shown in fig. 5, the third rail 113 may include a base 1132. In some examples, the base 1132 may be used to mount and secure the first rail 111, the second rail 112, and the flat crystal 1131. Specifically, the first rail 111 and the second rail 112 may be relatively mounted to the base 1132, the flat crystal 1131 may be mounted to the base 1132 in such a manner as to be located between the first rail 111 and the second rail 112, and a reference plane of the flat crystal 1131 may be abutted against the moving assembly 12 away from the base 1132. In this case, the first rail 111, the second rail 112, and the third rail 113 can be facilitated to constitute an open track.

In some examples, the base 1132 may also be used to mount other sub-components.

Fig. 6 is a schematic diagram showing a second perspective view of the three-dimensional structure of the rail system 1 according to the example of the present invention.

As described above, the rail system 1 according to the present invention may include the moving assembly 12. Specifically, as shown in fig. 6, in some examples, the motion assembly 12 may include a motion body 121 and a resilient element 122. In some examples, the moving body 121 may include a first side provided with the elastic element 122 and a second side that may be opposite to the first side.

In some examples, the moving body 121 may be used to stably and precisely carry or transport important parts of the apparatus, for example, in the case of a step meter, the moving body 121 may be used to carry the table 2, in the case of a profile meter, the moving body 121 may be used to carry a gauge head, thereby enabling precise measurement by the step meter or the profile meter to be facilitated.

In some examples, the shape of the moving body 121 may not be limited, e.g., the moving body 121 may be provided as a square, a disk, or other shape as desired.

Referring to fig. 3 and 5, in some examples, the moving body 121 may be fixed to the first adjusting portion 131 of the adjusting assembly 13 by means of screws, snap fit, or adhesion, or the like.

In some examples, the moving body 121 may form a through hole 1211 in the center. In some examples, the through hole 1211 may be used to engage with the first adjustment portion 131 and be secured by a screw. In this case, the first adjustment portion 131 is provided at the center of the moving body 121, so that the movement of the moving body 121 can be made smoother.

In some examples, as shown in fig. 6, the resilient element 122 may slidably abut the first rail 111. In some examples, the second side of the moving body 121 may slidably abut the second rail 112. In this case, the track formed by the first rail 111 and the second rail 112 is an open track for the moving body 121, i.e., the moving direction and the moving accuracy of the moving body 121 are directly affected by the second rail 112 without being affected by the first rail 111, while the elastic member 122 plays a role of maintaining the close connection of the moving body 121 and the second rail 112, whereby it is possible to reduce the difficulty of the process of manufacturing the track without considering the parallelism of the first rail 111 and the second rail 112 when the first rail 111 and the second rail 112 form a track that can restrict the moving direction to the first direction, while maintaining the moving accuracy of the moving body 121 by the elastic member 122. In addition, the open rail has a certain degree of "flexibility", so that the problem of insufficient stability due to excessive rigidity of the rail can be reduced, and the smoothness of the movement of the moving body 121 can be improved.

In some examples, the resilient element 122 may slidably abut the first rail 111 may mean that the resilient element 122 may slide relative to the first rail 111 and remain in abutting relationship with each other during sliding.

In some examples, the second side of the moving body 121 may slidably abut against the second rail 112 may mean that the moving body 121 may slide relative to the second rail 112 through the second side and maintain an abutting relationship with each other during the sliding.

In some examples, the resilient element 122 may include, but is not limited to, a spring, a dome, or a resilient leg, or the like. In some examples, the elastic element 122 may move with the moving body 121, i.e., the elastic element 122 may be fixedly connected with the moving body 121.

In some examples, the moving body 121 may also have a third side. In some examples, the third side may intersect the second direction (i.e., the Z-direction). In some examples, the third side may slidably abut against the reference plane, i.e., the moving body 121 may have one side abutting against the flat crystal 1131. In this case, the moving body 121 can move under the guide of the third rail 113 by sliding against the reference plane, specifically, the moving body 121 can move under the guide of the flat crystal 1131 by sliding against the flat crystal 1131, whereby the moving accuracy of the moving body 121 can be improved by reducing the roughness of the reference plane of the third rail 113, i.e., the roughness of the reference plane of the flat crystal 1131.

In some examples, the third side may slidably abut against the reference plane may mean that the third side may slide relative to the reference plane of the flat crystal 1131 and remain in abutting relationship with each other during the sliding.

In some examples, the roughness or flatness of the third side of the moving body 121 may be the same as the roughness or flatness of the reference plane of the flat crystal 1131. In this case, the shake error of the moving body 121 at the time of movement can be reduced. Specifically, taking the step gauge as an example, the third side surface of the moving body 121 may be perpendicular to the Z direction (i.e., the second direction) of the moving axis, that is, the reference plane may also be perpendicular to the Z direction, where the roughness or flatness of the third side surface of the moving body 121 may be the same as the reference plane of the flat crystal 1131, for example, the roughness of the third side surface and the reference plane may be 50 nm, in this case, the Z-direction shake error of the moving body 121 during the movement may be reduced, and thus the measurement accuracy of the step gauge may be improved.

In other examples, the roughness or flatness of the third side of the moving body 121 may be different from the reference plane of the third rail 113, e.g., the roughness or flatness of the third side of the moving body 121 may be greater than the roughness or flatness of the reference plane of the third rail 113. In this case, the process requirement for manufacturing the moving body 121 can be reduced, whereby the manufacturing cost can be reduced.

Fig. 7 is a schematic diagram showing the force applied by the adjustment assembly 13 in the case where the rail system 1 according to the example of the invention is not shifted in transmission. Fig. 8 is a schematic diagram showing the force applied to the adjustment assembly 13 in the case where there is an offset in the transmission of the rail system 1 according to the example of the present invention. It should be noted that fig. 7 and 8 are only for illustrating the operation principle of the adjusting assembly 13, wherein the connection of the adjusting assembly 13 with other components, such as the transmission assembly 14 or the movement assembly 12, has been omitted and a part of the contents has been simplified in terms of structure. In fig. 7 and 8, a and b show upper fixing points of the first adjusting portion 131 and the second adjusting portion 132, respectively.

As described above, the rail system 1 according to the present invention may include the adjustment assembly 13, and referring to fig. 4, the adjustment assembly 13 may include the first adjustment portion 131 and the second adjustment portion 132. In some examples, the first adjustment portion 131 and the second adjustment portion 132 may be opposite.

Specifically, as shown in fig. 7, when the transmission assembly 14 transmits the motion assembly 12, in the case that no offset or deviation occurs in the transmission assembly 14, the resultant force F applied by the first adjusting portion 131 and the second adjusting portion 132 is identical to the motion direction of the motion assembly 12, that is, the resultant force F is identical to the first direction (X direction), and at this time, the first adjusting portion 131 and the second adjusting portion 132 do not rotate relatively, that is, the state indicated by the fixed point a and the fixed point b in fig. 7. In some examples, the resultant force F may be a force acting on the adjustment assembly 13 as the transmission assembly 14 drives the movement assembly 12.

In addition, as shown in fig. 8, when the transmission assembly 14 transmits the motion assembly 12, in the case that the transmission assembly 14 deflects or deviates, the resultant force F3 received by the first adjusting portion 131 and the second adjusting portion 132 does not coincide with the motion direction of the motion assembly 12, and at this time, the force F1 caused by the deflection or deviation may cause the adjusting assembly 13 to perform a rotational motion, that is, the relative rotation of the first adjusting portion 131 and the second adjusting portion 132, due to the force F1, and in the motion direction, that is, the first direction (X direction), the component force F2 that may drive the motion assembly still remains, and at this time, the rotational motion may be in a state as illustrated by the fixed point a and the fixed point b in fig. 8.

In some examples, as shown in fig. 4, the first adjustment portion 131 may include a bearing 1312. In some examples, the first adjustment portion 131 may include a bearing 1312 and a first mount 1311. In some examples, the bearings 1312 may be one or more, i.e., the number of bearings 1312 is at least one.

In some examples, as shown in fig. 4, the second adjustment portion 132 may include a rotation shaft 1321. In some examples, the second adjustment portion 132 may include a rotation shaft 1321 and a second fixing seat 1322.

In some examples, the shaft 1321 may be rotatable relative to the bearing 1312. In some examples, first anchor 1311 may fixedly connect bearing 1312 with motion assembly 12. In some examples, the second mount 1322 may fixedly connect the shaft 1321 with the drive assembly 14. In this case, the motion assembly 12 and the transmission assembly 14 can rotate by being engaged with the rotation shaft 1321 through the bearing 1312, and when the transmission assembly 14 is offset or deviated, the deviation of the straightness of the motion axis can be adaptively adjusted, thereby improving the accuracy and stability of the measuring apparatus.

Specifically, the first fixing seat 1311 may fixedly connect the bearing 1312 with the moving body 121, and the second fixing seat 1322 may fixedly connect the rotation shaft 1321 with the conveyor belt 142 (described later). In this case, the motion assembly 12 and the transmission assembly 14 can rotate in a manner of being matched with the rotation shaft 1321 through the bearing 1312, when the transmission assembly 14 is offset or deviated, the offset or deviated moment can be converted into the rotation of the bearing 1312 and the rotation shaft 1321, that is, the influence of the offset or deviated moment on the motion assembly 12 can be reduced, and further, the straightness deviation of the motion assembly 12 and the guide rail assembly 11 can be adaptively adjusted, so that the accuracy and the stability of the measuring device can be improved.

In some examples, as shown in fig. 4, second adjustment portion 132 may also include a retaining member 1323. In some examples, retaining member 1323 may be configured to limit movement of shaft 1321 in the second direction, e.g., retaining member 1323 may lock shaft 1321 to reduce wobble of shaft 1321 in the Z direction (i.e., the second direction). In this case, the rotation shaft 1321 can be restrained by the locking member 1323, the occurrence of the up-and-down shake in the second direction can be reduced, and the straightness of the moving assembly 12 in the first direction can be improved, thereby improving the stability of the moving assembly 12 in the second direction.

In some examples, retaining member 1323 may be a screw, pin, or other snap-in locking mechanism.

In some examples, as shown in fig. 4, the second adjustment portion 132 may also include a clamping member 1324. In some examples, the clamping member 1324 may fixedly connect the transmission assembly 14 and the second mount 1322. Specifically, the clamping member 1324 may fixedly connect the conveyor belt 142 (described later) of the transmission assembly 14 and the second fixing seat 1322. In this case, the transmission assembly 14 and the second fixing seat 1322 are fixedly connected through the clamping member 1324, so that the transmission assembly 14 can be conveniently disassembled and assembled, for example, the transmission belt 142 can be clamped through the clamping member 1324 to assemble the transmission belt 142 to the driving wheel 141 (described later), and the tightness (i.e., tightening force) of the transmission belt 142 can be adjusted, thereby being capable of conveniently adjusting the accuracy of the transmission assembly 14 according to the requirement.

In some examples, the clamping member 1324 may be one or more, i.e., the number of clamping members 1324 is at least one.

As described above, the rail system 1 according to the present invention may include the transmission assembly 14. In particular, referring to fig. 3 or 5 above, the drive assembly 14 may include a drive wheel 141, a conveyor belt 142.

In some examples, as shown in fig. 5 or 6, the driving wheel 141 may be connected to the driving device 143 and may be rotated by the driving device 143. In some examples, the driving wheel 141 may be provided in a plurality, as shown in fig. 3, and the driving wheel 141a and the driving wheel 141b may be provided side by side, wherein the driving wheel 141a may be connected to an output shaft of the driving device 143 and driven by the driving device 143 to rotate, and thus, the driving wheel 141a may also be referred to as a driving wheel, and the driving wheel 141b may be referred to as a driven wheel. In this case, it can be convenient to drive the conveyor belt 142 by the drive wheel 141, whereby the moving body 121 can be driven.

In some examples, the drive direction of the conveyor belt 142 may be the same or opposite to the first direction. Specifically, if the driving direction of the conveyor belt 142 is the same as the first direction, the moving body 121 moves in the first direction; if the driving direction of the conveyor belt 142 is opposite to the first direction, the moving body 121 moves in the opposite direction to the first direction.

In some examples, the conveyor belt 142 may be secured to the second adjustment portion 132 by a clamp 1324. In this case, the conveyor belt 142 of the transmission assembly 14 and the second adjusting portion 132 are fixedly connected by the clamping member 1324, and the disassembly and replacement of the conveyor belt 142 can be facilitated, whereby the transmission accuracy can be conveniently adjusted as required.

In some examples, the conveyor belt 142 may include a smooth inner side and a toothed outer side. In some examples, the inner side of the conveyor belt 142 may be in contact with the drive wheel 141. In this case, the smooth inner surface of the belt 142 contacts the driving wheel 141, and can be maintained stable during high-speed driving; meanwhile, the toothed outer side surface can reduce driving noise, namely can assist in shock absorption (referring to the shock absorption principle of the synchronous belt, and can provide a certain buffering effect during driving, so that a certain shock absorption effect is achieved), so that the stability of the second adjusting part 132 driven by the conveying belt 142 can be further improved.

In some examples, the conveyor belt 142 may be a timing belt (also known as a toothed belt, a synchronous toothed belt, or a timing belt), in particular, the timing belt may have a smooth inner side and a toothed outer side.

In other examples, the conveyor belt 142 may be a flat belt or V-belt having rigidity comparable to that of a synchronous belt.

In some examples, the torsional force or force in the direction of deflection generated when the conveyor belt 142 is twisted or deflected may be less than the elastic force of the elastic element 122. In this case, when the conveyor belt 142 is twisted or deviated, the elastic member 122 still maintains the second side surface of the moving body 121 in contact with the second rail 112, and thus the situation that the moving body 121 is separated from the second rail 112 can be reduced, that is, the stability of the moving body 121 and the second rail 112 can be maintained.

Fig. 9 is a block diagram showing a structure of a rail system 1 according to another example of the present invention.

In addition, as shown in fig. 9, the rail system 1 according to the present invention may further include an auxiliary assembly 15.

Referring to fig. 5 above, in some examples, the auxiliary assembly 15 can include a measurement suite 151. In some examples, the auxiliary assembly 15 may include a stop kit 152. In some examples, the auxiliary assembly 15 may include a measurement set 151 and a limit set 152. In some examples, the measurement suite 151 may include a grating measurement device 1512 disposed on the moving body 121 and a grating scale 1511 disposed on the second rail 112. In this case, the displacement of the moving body 121 with respect to the second rail 112 can be measured by the grating ruler 1511 and the grating measuring device 1512.

In some examples, the limit kit 152 may include a sensing tab 1521 disposed on the moving body 121 and a plurality of sensing devices 1522 disposed on the third rail 113. In this case, the motion stroke of the moving body 121 can be tracked and restrained by the cooperation of the sensing piece 1521 and the sensing device 1522, so that the occurrence of an unexpected situation such as inaccurate motion caused by overrun of the movement of the moving body 121 can be reduced.

According to the present invention, it is possible to provide a guide rail system 1 capable of being adaptively adjusted, the guide rail system 1 having a certain flexibility, and the straightness deviation of a moving axis system being adaptively adjusted, thereby improving the accuracy of a measuring apparatus.

While the invention has been described in detail in connection with the drawings and examples thereof, it should be understood that the foregoing description is not intended to limit the invention in any way. Modifications and variations of the invention may be made as desired by those skilled in the art without departing from the true spirit and scope of the invention, and such modifications and variations fall within the scope of the invention.

Claims

1. The self-adaptive adjustable guide rail system is characterized by comprising a moving assembly, a guide rail assembly, a transmission assembly and an adjusting assembly, wherein the adjusting assembly comprises a first adjusting part and a second adjusting part which can rotate relatively, the moving assembly is connected with the transmission assembly through the adjusting assembly and moves along a first direction limited by the guide rail assembly under the driving of the transmission assembly, the axial direction of the relative rotation of the first adjusting part and the second adjusting part is a second direction, the first direction is different from the second direction, the first adjusting part comprises at least one bearing and a first fixing seat which fixedly connects the bearing with the moving assembly, the second adjusting part comprises a rotating shaft which can rotate relative to the bearing, a second fixing seat which is used for fixedly connecting the rotating shaft with the transmission assembly, a locking piece which is used for limiting the rotating shaft to move in the second direction, and at least one clamping piece which is used for fixedly connecting the transmission assembly with the second fixing seat, wherein the movement assembly is fixedly connected with the first adjusting part, the transmission assembly is fixedly connected with the second adjusting part, the transmission assembly comprises a transmission wheel and a transmission belt with the same or opposite transmission direction as the first direction, the transmission belt is fixed on the second adjusting part through the clamping piece, and the transmission belt comprises a smooth inner side surface and a toothed outer side surface, and the inner side surface is in contact with the transmission wheel.

2. The track system of claim 1, wherein the track assembly includes a first track and a second track disposed along the first direction and mated with the first track.

3. The track system of claim 2, wherein the motion assembly comprises a motion body having a first side provided with the resilient element, a second side opposite the first side, and a resilient element slidably abutting the first track, the second side slidably abutting the second track.

4. The track system of claim 3, wherein the track assembly further comprises a third track having a reference plane, the reference plane having a roughness no greater than a preset value, the moving body further having a third side intersecting the second direction, the third side slidably abutting the reference plane.

5. The track system of claim 1, wherein the track assembly includes a first track and a second track disposed along the first direction.

6. The track system of claim 4, further comprising an auxiliary assembly comprising a measurement kit and a limit kit, the measurement kit comprising a grating measurement device disposed on the moving body and a grating ruler disposed on the second track, the limit kit comprising a sensing tab disposed on the moving body and a plurality of sensing devices disposed on the third track.

7. The track system of claim 1, wherein the line in the first direction and the line in the second direction are spatially perpendicular to each other.