CN104457564A - High-precision target material measurement system and method - Google Patents

High-precision target material measurement system and method Download PDF

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Publication number
CN104457564A
CN104457564A CN201310747805.8A CN201310747805A CN104457564A CN 104457564 A CN104457564 A CN 104457564A CN 201310747805 A CN201310747805 A CN 201310747805A CN 104457564 A CN104457564 A CN 104457564A
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target
axis
detection platform
locating
unit
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CN104457564B (en
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马栋梁
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SUZHOU MATRIX OPTICAL Co Ltd
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SUZHOU MATRIX OPTICAL Co Ltd
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Abstract

The invention provides a high-precision target material measurement system and method. The system comprises a detection platform, an optical detection unit, a data collecting and processing unit and a control unit, wherein a hollow cavity is formed in the middle of the detection platform and provided with a detachable movable plate, the hollow cavity can be totally covered with the movable plate, at least one limiting assembly is arranged in the hollow cavity, the limiting assembly is used for fixing target materials and can drive the target materials to rotate, and the limiting assembly is connected with a driving device and is driven by the driving device; the optical detection unit comprises a lens and a raster projection device, and because the detection platform and the optical detection unit are movable, by controlling the movement direction and the movement distance of the detection platform and the optical detection unit, high-precision three-dimensional detection on any position of the target materials in different specifications and shapes can be achieved; besides, the limiting assembly can drive the target materials to rotate, and therefore the target materials do not need to be turned over in the detection process, and detection efficiency is improved.

Description

A kind of high precision target measuring system and method
Technical field
The present invention relates to a kind of radiographic measurement instrument, specifically a kind of high precision target measuring system and method.
Background technology
Field, solar film battery production field and semiconductor devices production field is manufactured at panel, all need to use metal coating equipment, due to the starting material target that it is important, price is high, practical efficiency is low, becomes the important research point that production cost reduces all the time.Change target shape, improve Distribution of Magnetic Field environment, the proposition of optimized device design etc. technology, improves the problem of the utilization factor of target to a certain extent.But learn the information such as the actual service condition of target and utilization rate how accurately, efficiently, never method more easily.
In actual industrial production, along with the increase of time, target material surface can be etched deep mixed groove, and present situation is different.Because the thickness of target is certain, its life-span is also defined, and for guaranteeing production safety, needing the irregular depth of groove to target material surface and form to measure and analyze, having reached the maximization of target utilization.To the degree of depth of its groove and show that form is measured by artificial mode mostly, part adopts mechanical system to measure, its measuring error is larger, workload is large, and measure and be generally sampled measurements, not there is typicalness and representativeness, and it is large or cannot measure to measure difficulty for the target of special requirement and shape.
Some image measurers are had in prior art, as Chinese patent CN102620651A, name is called in " image measurer " announces a kind of image measurer, it comprises board computing machine, connect the control device of computing machine, be installed in the supporting part of the carrying workpiece of board, first travel mechanism, to be installed in this first travel mechanism and camera lens can be measured along first of the XYZ three-dimensional coordinate planar movement of board, second travel mechanism, to be installed in this second travel mechanism and camera lens can be measured along second of board coordinate plane movement, 3rd travel mechanism and be installed in the 3rd travel mechanism and can along the movement of board coordinate plane the 3rd measure camera lens, in measuring process, by this control device of computer regulating, to manipulate a surface of this first measurement alignment lens workpiece for measurement, control the second measurement camera lens and the 3rd measure lens moving and the surface of workpiece for measurement two different azimuth can be aimed at respectively.
In this patent, supporting part is rotatable is installed on this platform, rotary sample can be driven, reach the object that minimizing repeatedly overturns sample, but this patent is when measuring target, as cylindrical target, when target length is long, it vertically cannot be placed, can only by its traverse on the platform, time placement is carried out detecting so like this, no matter also cannot measure when leveling off platform and how rotating with the surface of contact of platform below cylindrical target, or must carry out overturning and from new settings one-shot measurement, the time of measuring will longer and waste of manpower, and the detection employing of this patent is two-dimentional detection technique, the feature of some of sample plane can only be obtained, the three-dimensional data of sample cannot be obtained, can not meet the needs detected now.
Summary of the invention
For this reason, the present invention will solve prior art must carry out the survey of upset benefit in testing process, and the problem of 2-D data can only be gathered, thus propose a kind of be applicable to target use detection field can realize target place after one-shot measurement complete, without the need to upset, and realize high precision target measuring system and the method for 3D measurement.
For solving the problems of the technologies described above, the present invention adopts following scheme:
A kind of high precision target measuring system, comprising:
Detection platform, for placing target;
Optical detection unit, is arranged on above described detection platform, can at three-dimensional range of motion, for gathering the target image that described detection platform is placed;
Data collection process unit, is connected respectively with described optical detection unit, detection platform, collected specimens detected parameters, and calculates accordingly it, processes and send;
Control module, is connected with data collection process unit respectively respectively with optical detection unit, detection platform, receives the information after described data collection process cell processing and controls other unit;
A cavity is provided with in the middle of described detection platform, described cavity is provided with dismountable portable plate, described cavity can cover by described portable plate completely, described cavity inside arranges at least one group of limit assembly, described limit assembly is fixed target and described target can be driven to rotate, and described limit assembly connects drive rotating device and driven by it;
Described optical detection unit comprises camera lens and optical grating projection device, and described optical grating projection device carries out projection scanning to target, and described camera lens gathers the optical grating projection information of described optical grating projection device projection, and sends to described data collection process unit.
Limit assembly described in one group comprises the first locating part and the second locating part, described first locating part and described drive rotating device link, described drive rotating device arranges at least one, and described drive rotating device is connected with rotating shaft, and described rotating shaft stretches into the downside of described first locating part through described detection platform; Described rotating shaft and described first locating part are respectively arranged with gear, and the gear on the gear in described rotating shaft and described first locating part is mutually meshing, and described drive rotating device is linked by described rotating shaft and described first locating part.
Limit assembly described in one group comprises the first locating part and the second locating part, described first locating part and described drive rotating device link, described drive unit arranges one, described drive rotating device is connected with rotating shaft, described rotating shaft stretches into the horizontal side of described first locating part through described detection platform, described rotating shaft and described first locating part are respectively arranged with gear, and described rotating shaft is linked by driving-belt and multiple described first locating part.
Described first locating part and the second locating part comprise two gag lever posts be arranged in parallel respectively, described gag lever post is provided with the packing ring increasing friction, the spacing of two described gag lever posts of described first locating part is less than target width, and the spacing of two described gag lever posts of described second locating part is less than target width.
The bottom of described detection platform is provided with base, and described detection platform and described base are dismountable connection;
Y-axis guide rail is respectively arranged with in the both sides of described base, two described Y-axis guide rails are connected with two bottoms of a portal frame respectively, described portal frame can move along Y-axis on described Y-axis guide rail, and the crossbeam of described portal frame is also provided with X axis guide rail.
Described optical detection unit is connected with X-axis travel mechanism, and described X-axis travel mechanism is connected with X axis guide rail, can move along X-axis; The side of described X-axis travel mechanism is also provided with Z-axis direction guide rail.
Described camera lens is arranged on rotatable parts, and described rotatable parts at least arrange two, and described rotatable parts one end and described installing component are rotationally connected, and described camera lens is arranged on the other end of described rotatable parts;
Connect described optical grating projection device in the middle of on the downside of described installing component, be connected with teeter member in the middle of on the upside of described installing component, the side of described teeter member is connected by couple axle with the side of Z axis travel mechanism, and described teeter member can wave along axle;
Described Z axis travel mechanism is arranged on Z-axis direction guide rail, and miscellaneous part can be driven to move along Z axis.
Described Z axis travel mechanism is moved along Z axis by driven screw, described driven screw stretches into Z axis travel mechanism from upper end, internal thread in external thread on described driven screw and described Z axis travel mechanism coincide, described driven screw upper end is by gear with initiatively screw rod is meshing, and described active screw rod is connected with the screw drive be arranged in X-axis travel mechanism.
Described installing component is connected by vertical rotation axis with described teeter member, described vertical rotation axis is also connected with the first drive unit, described rotatable parts are connected with installing component by turning axle, and described turning axle is connected with the second drive unit, and described couple axle is connected with the 3rd drive unit.
Be provided with multiple conflict mechanism below described detection platform, described conflict mechanism comprises cylinder, solenoid valve and sensor, and described conflict mechanism is for keeping the level of detection platform.
Described X axis guide rail and described Y-axis guide rail are magnetic track, and described Z-axis direction guide rail is double trapezoid slide rail.
Described optical detection unit and described portal frame are provided with grating scale, and described X, Y, Z axis direction guiding rail two ends are all provided with limit sensors.
Adopt a measuring method for described measuring system, comprise the following steps:
(1) column target is placed in described detection platform, described portable plate is pulled down, column target is placed on described limit assembly;
(2) the selected scope needing scanning in described control module, order is sent to detection platform and optical detection unit by described control module, drive rotating device in described detection platform drives target to rotate by described limit assembly, described optical detection unit adjusting position in three dimensions, target is sampled, then sampling data transmitting is given described data collection process unit;
(3) described data collection process unit obtains the three-dimensional model of target after processing the image gathered, and is contrasted, calculate the volume of consumption, draw the use amount of target by the three-dimensional model set up the three-dimensional data of original target.
Described step (1) also comprises: described control module according to actual needs, controls the solenoid valve of multiple described conflict mechanism, described detection platform risen to desired location, ensures the levelness of described detection platform.
The step that optical detection unit described in described step (2) adjusts to correct position in three dimensions is specially: described control module is according to the sweep limit of setting, control described portal frame, X-axis travel mechanism and Z axis travel mechanism to move along X, Y, Z axis direction, in moving process, carry out dynamic adjustments according to the data of grating scale and limit sensors feedback.
Described control module can also control described first drive unit, the second drive unit and the 3rd drive unit, and described installing component, rotatable parts and teeter member are turned to needs position, makes the camera lens be arranged on rotatable parts carry out multi-faceted collection.
Described step (3) is specially: the calculating composition point detected in the three-dimensional model of the target obtained being carried out to point data, contrasts with the point data of former target three-dimensional model, draw the volume that target consumes.
Technique scheme of the present invention has the following advantages compared to existing technology,
(1) a kind of high precision target measuring system of the present invention, comprising: detection platform, for placing target; Optical detection unit, is arranged on above described detection platform, can at three-dimensional range of motion, for gathering the target image that described detection platform is placed; Data collection process unit, is connected respectively with described optical detection unit, detection platform, collected specimens detected parameters, and calculates accordingly it and process, and sends; Control module, is connected with data collection process unit respectively respectively with optical detection unit, detection platform, controls other unit according to the information after described data collection process cell processing; A cavity is provided with in the middle of described detection platform, described cavity is provided with dismountable portable plate, described cavity can cover by described portable plate completely, described cavity inside arranges at least one group of limit assembly, described limit assembly is fixed target and described target can be driven to rotate, and described limit assembly connects drive rotating device and driven by it; Described optical detection unit comprises camera lens and optical grating projection device, and described optical grating projection device carries out projection scanning to target, and described camera lens gathers the optical grating projection of described optical grating projection device projection, and sends to described data collection process unit; The present invention is provided with cavity detection platform is upper, when running into special nature target, with described limit assembly target held and drive it to rotate, make not need in measuring process target is carried out manual overturning and resets sample command, and achieve 3D sampling by arranging described optical grating projection device and camera lens, comprehensively collect the three-dimensional data of target, improve the degree of accuracy of measurement.
(2) a kind of high precision target measuring system of the present invention, described gag lever post is provided with the packing ring increasing friction, and the packing ring that arranging increases friction can make the process that gag lever post is driving sample to rotate more stable, avoids the situation occurring skidding.
(3) a kind of high precision target measuring system of the present invention, the bottom of described detection platform is provided with base, and described detection platform and described base are dismountable connection, Y-axis guide rail is respectively arranged with in the both sides of described base, two described Y-axis guide rails are connected with two bottoms of a portal frame respectively, described portal frame can move along Y-axis on described Y-axis guide rail, the crossbeam of described portal frame is also provided with X axis guide rail, the side of described X-axis travel mechanism is also provided with Z-axis direction guide rail, described Y-axis guide rail, X axis guide rail and Z-axis direction guide rail provide at X to described optical detection unit, Y, the movement of Z axis three-dimensional provides concrete implementation method, and according to its expansion of the large young pathbreaker of material and can reduce, set according to practical application.
(4) a kind of high precision target measuring system of the present invention, described camera lens is arranged on rotatable parts, and described rotatable parts at least arrange two, described rotatable parts and installing component hinged, described rotatable parts can rotate along turning axle; Connect described optical grating projection device in the middle of on the downside of described installing component, be connected with teeter member in the middle of on the upside of described installing component, the side of described teeter member is connected by couple axle with the side of Z axis travel mechanism, and described teeter member can wave along axle; Described Z axis travel mechanism is arranged on Z-axis direction guide rail, miscellaneous part can be driven to move along Z axis, regulate the spacing of optical detection unit and target, the rotation of described tilting member, rotatable parts and installing component can make camera adjusting arrive more angle, makes native system can collect the more more fully view data of target.
(5) a kind of high precision target measuring system of the present invention, described optical detection unit and described portal frame are provided with grating scale, described X, Y, Z axis direction guiding rail two ends are all provided with limit sensors, it is more accurate that the grating scale arranged and limit sensors make described optical detection unit and portal frame control in moving process, improves the stability of system.
(6) a high precision target measuring method, comprises the following steps: be placed on by column target in described detection platform, pulled down by described portable plate, and column target is placed on described limit assembly, the selected scope needing scanning in described control module, order is sent to detection platform and optical detection unit by described control module, drive rotating device in described detection platform drives target to rotate by described limit assembly, described optical detection unit adjusting position in three dimensions, target is sampled, then sampling data transmitting is given described data collection process unit, described data collection process unit obtains the three-dimensional model of target after processing the image gathered, contrasted by the three-dimensional model set up the three-dimensional data of original target, calculate the volume of consumption, draw the use amount of target, this method realizes one-shot measurement by rotating target, and adopt grating 3 Dimension Image Technique, gather the three-dimensional data of target, and obtain accurate data model by data processing, through calculating the accurate consumption of target, whole testing process can realize automatic control, raise the efficiency and save manpower, avoid in prior art and measured by artificial or mechanical system, its measuring error is large, the problem that workload is large.
(7) a kind of high precision target measuring method, described control module according to actual needs, control the solenoid valve of multiple described conflict mechanism, described detection platform is risen to desired location, ensure the levelness of described detection platform, detection platform in this method can by the real-time control realization mobile equilibrium of described control module, and compared to detection platform in prior art for being fixedly connected with, this method can meet more industrial requirement.
Accompanying drawing explanation
In order to make content of the present invention be more likely to be clearly understood, below according to a particular embodiment of the invention and by reference to the accompanying drawings, the present invention is further detailed explanation, wherein
Fig. 1 is the structural representation of a kind of high precision target measuring system of the present invention;
Fig. 2 is the structural representation of an embodiment of a kind of high precision target measuring system of the present invention;
Fig. 3 is the front view of detection platform of the present invention;
Fig. 4 is the front view of optical detection unit of the present invention;
Fig. 5 is the side view of optical detection unit of the present invention.
In figure, Reference numeral is expressed as: 1-detection platform, 2-optical detection unit, 3-portal frame, 4-Y axial guidance, 5-base, 11-conflict mechanism, 12-portable plate, 13-cavity, 14-first locating part, 15-second locating part, 16-rotating shaft, 17-drive rotating device, 20-first drive unit, 21-optical grating projection device, 22-camera lens, 23-installing component, 24-rotatable parts, 25-Z axle travel mechanism, 26-teeter member, 27-the 3rd drive unit, 28-couple axle, 29-vertical rotation axis, 211-X axle travel mechanism, 212-driven screw, 213-is screw rod initiatively, 214-screw drive, 215-Z axial guidance, 31-X axial guidance, 32-grating scale.
Embodiment
The embodiment of a kind of high precision target measuring system of the present invention and method is provided below.
embodiment 1
A kind of high precision target measuring system described in the present embodiment, its structured flowchart, as inscribed shown in 1, comprising: detection platform 1, and for placing target, described detection platform 1 can be arranged in more existing detection platform 1 as required; Optical detection unit 2, is arranged on above described detection platform 1, can at three-dimensional range of motion, the movement that described optical detection unit 2 adopts controllable travel mechanism to carry out in three dimensions, for gathering the target image that described detection platform 1 is placed; Data collection process unit, adopts the mechanism of Data Collection and process, is connected respectively, collected specimens detected parameters, and calculates accordingly it and process with described optical detection unit 2, detection platform 1, sends; Control module, can adopt the automatic control devices such as PLC, is connected respectively respectively with optical detection unit 2, detection platform 1 with data collection process unit, controls other unit according to the information after described data collection process cell processing.
A cavity 13 is provided with in the middle of described detection platform 1, described cavity 13 large I follow-up actual needs adjusts, described cavity 13 is provided with dismountable portable plate 12, described cavity 13 can cover by described portable plate 12 completely, when portable plate 12 covers on described cavity 13, the present invention can detect as other detection platform 1, after portable plate 12 is pulled down, can for special shape, as column target detects, described cavity 13 inside arranges at least one group of limit assembly, the demand of detection limit can not be met as arranged one group of limit assembly, then can arrange simultaneously and organize limit assembly more, realize the detection of batch, efficiency is provided, described limit assembly is fixed target and described target can be driven to rotate, described limit assembly connects drive rotating device 17 and is driven by it, described drive rotating device 17 drives limit assembly to rotate, described limit assembly drives the target be placed on it to rotate, realize automatic turning, avoid manually overturning detection time of bringing of long problem.
Described optical detection unit 2 comprises camera lens 22 and optical grating projection device 21, described optical grating projection device 21 pairs of targets carry out projection scanning, described camera lens 22 gathers the optical grating projection information of described optical grating projection device 21 projection, and send to described data collection process unit, optical grating projection 3 d objects reconstruction is utilized by optical grating projection device 21, raster pattern to be projected on sample surface exactly, the raster pattern that body surface is out of shape photographed by described camera lens 22, then to raster pattern that the body surface that absorbs is out of shape mate and calculate and determine depth information, thus the surface of three-dimensional body is reconstructed by depth information.
In the present invention, because detection platform 1 and optical detection unit 2 are all movable, by controlling it, just can control direction and the distance of its motion, can realize detecting the high-precision three-dimensional of the optional position of different size and shape target.
embodiment 2
On the basis of a kind of high precision target measuring system described in embodiment 1, limit assembly described in one group preferably comprises the first locating part 14 and the second locating part 15, described first locating part 14 preferably two gag lever posts be arranged in parallel, the spacing of two described gag lever posts is less than target width, for target is held, as shown in Figure 3; Described gag lever post is preferably provided with the packing ring increasing friction, described packing ring is preferably rubber ring, and described second locating part 15 comprises two gag lever posts be arranged in parallel, and the spacing of two described gag lever posts is less than target width; Second locating part 15 is independent rotatable, and it is fixed on its support column for roller mode.When right cylinder target is placed on it portion, the first locating part 14 driven rotary, the now passive rotation of the second locating part 15.
First locating part 14 and the second locating part 15 are separately positioned on the inner relative two ends of described cavity 13, one of them locating part and described drive rotating device 17 link or these two locating parts link with described drive rotating device 17 respectively, and the weight etc. according to actual needs as target is configured.
Described drive rotating device 17 arranges at least one, described drive rotating device 17 is connected with rotating shaft 16, and described rotating shaft 16 penetrates described detection platform 1, stretches in cavity 13, be placed on described limit assembly to not affect target, described rotating shaft 16 is positioned at the downside of described first locating part 14; Described rotating shaft 16 and described first locating part 14 are preferably respectively arranged with gear, gear on gear in described rotating shaft 16 and described first locating part 14 is mutually meshing, as shown in Figure 3, described drive rotating device 17 drives described rotating shaft 16 to rotate, described rotating shaft 16 is rotated by the first locating part 14 described in gear driven, and then described first locating part 14 drives the target rotation be placed on it, target need not manually be overturn in testing process again, once complete detection, described drive rotating device 17 arranges to meet and slowly rotates.
As the embodiment that other can convert, described gag lever post other can also increase the packing ring rubbed, friction can also be increased by arranging screw thread, described rotating shaft 16 can arrange other kinds of drive that the first locating part 14 can be driven to rotate, as as described in rotating shaft 16 stretch in the cavity 13 and horizontal side of the first locating part 14 as described in being positioned at, described rotating shaft 16 and described first locating part 14 are respectively arranged with power wheel, described rotating shaft 16 is linked by driving-belt and multiple described first locating part 14, described drive rotating device 17 drives travelling belt by described rotating shaft 16, described driving-belt can drive one or more first locating part 14, described first locating part 14 drives sample to rotate.
embodiment 3
On the basis of a kind of high precision target measuring system described in above embodiment, as shown in Figure 2, the bottom of described detection platform 1 is provided with base 5, described detection platform 1 is connected for dismountable with described base 5, described base 5 provides a stable working environment for detection platform 1, and provides the effect of buffering.
Y-axis guide rail 4 is respectively arranged with in the both sides of described base 5, two described Y-axis guide rails 4 are connected with two bottoms of a portal frame 3 respectively, described portal frame 3 can move along Y-axis on described Y-axis guide rail 4, and the crossbeam of described portal frame 3 is also provided with X axis guide rail 31; Described X axis guide rail 31 and Y-axis guide rail 4 preferably adopt magnetic track, described magnetic orbit runs accurately, and ensure that the accuracy of measurement, described optical detection unit 2 is connected with X-axis travel mechanism 211, described X-axis travel mechanism 211 is connected with X axis guide rail 31, can move along X-axis; The side of described X-axis travel mechanism 211 is also provided with Z-axis direction guide rail 215, and described Z-axis direction guide rail 215 preferably adopts double trapezoid slide rail.
Described camera lens 22 is arranged on the front end, downside of rotatable parts 24, as shown in Figure 4, described rotatable parts 24 preferably planar shaped, and at least arrange two, described rotatable parts 24 one end and described installing component 23 are rotationally connected, described camera lens 22 is arranged on the other end of described rotatable parts 24, described installing component 23 preferably plane, its limit number can convert according to the quantity of rotatable parts 24, two rotatable parts 24 are set and can meet normal testing requirement, have special requirement can increase setting again.
Described optical grating projection device 21 is connected in the middle of on the downside of described installing component 23, teeter member 26 is connected with in the middle of on the upside of described installing component 23, the side of described teeter member 26 is connected by couple axle 28 with the side of Z axis travel mechanism 25, described installing component 23 is connected by vertical rotation axis 29 with described teeter member 26, described vertical rotation axis 29 is also connected with the first drive unit 20, described rotatable parts 24 are connected with installing component 23 by turning axle, described turning axle is connected with the second drive unit, described couple axle 28 is connected with the 3rd drive unit 27, described first drive unit 20, second drive unit and the 3rd drive unit 27 preferably adopt motor, described control module and described first drive unit 20, second drive unit is connected with the 3rd drive unit 27, the rotation of these drive units is controlled according to the order of input, thus drive teeter member 26, the rotation of installing component 23 and rotatable parts 24, realize Multi-orientation multi-angle adjustable lens 22 angle.
Described Z axis travel mechanism 25 is arranged on Z-axis direction guide rail 215, as shown in Figure 5, miscellaneous part can be driven to move along Z axis, described Z axis travel mechanism 25 is moved along Z axis by driven screw 212, described driven screw 212 stretches into Z axis travel mechanism 25 from upper end, internal thread in external thread on described driven screw 212 and described Z axis travel mechanism coincide, described driven screw 212 upper end is meshing with active screw rod 213 by gear, described active screw rod 213 is connected with the screw drive 214 be arranged in X-axis travel mechanism 211, described screw drive 214 preferably adopts motor, it drives initiatively screw rod 213 to rotate, described active screw rod 213 is rotated by meshing gear driven driven screw 212, and driven screw 212 rotates rear drive Z axis travel mechanism 25 moves in Z-direction, drive the miscellaneous part be connected with described Z axis travel mechanism 25, distance between adjustable lens 22 and target on Z axis.
Multiple conflict mechanism 11 is preferably provided with below described detection platform 1, described conflict mechanism 11 comprises cylinder, solenoid valve and sensor, described conflict mechanism 11 is for keeping the level of detection platform 1, described solenoid valve is connected with described control module with sensor, when after control module input command, control module exports order control described solenoid valve and detection platform 1 is risen, and keeps the level of platform by the Real-time Feedback of sensor.
Described optical detection unit 2 and described portal frame 3 are preferably provided with grating scale 32, described grating scale 32 can optical detection unit 2 and the position residing for described portal frame 3 described in accurate feedback, so that described control module controls, described X, Y, Z axis direction guiding rail two ends are all preferably provided with limit sensors, it is more accurate that the grating scale 32 arranged and limit sensors make described optical detection unit 2 and portal frame 3 control in moving process, improves the stability of system.
embodiment 4
Adopt a measuring method for the high precision target measuring system described in above embodiment, comprise the following steps:
(1) column target is placed in described detection platform 1, described portable plate 12 is pulled down, column target is placed on described limit assembly, when detecting common target as planar targets, do not need portable plate 12 to take off, directly planar targets is placed in described detection platform 1;
(2) the selected scope needing scanning in described control module, this scope should slightly larger than the scope of detected target, described control module can automatically identify that nearest point of distance HOME point, and start scanning work thus, order is sent to detection platform 1 and optical detection unit 2 by described control module, drive rotating device 17 in described detection platform 1 drives target to rotate by described limit assembly, described optical detection unit 2 adjusting position in three dimensions, target is sampled, optical grating projection device 21 can project several structured lights with coded message on testing sample, simultaneously, described camera lens 22 synchronous acquisition image information, decoding computing is carried out to gathered image, and utilize matching technique that the unique point in two of correspondence images that camera lens collects is carried out correspondence, matching algorithm and triangulation principle is utilized to calculate the three dimensional point cloud of the public field of vision pixel of collection, and these data are stored.(matching technique refers to that camera lens is in scanning process in kind, when needing relevant information in kind to become electronic data by converted machine, and the matching technique between virtual coordinate system and world coordinate system.When triangulation principle refers to measurement, because sample is fixed to camera lens and the distance between camera lens and optical grating projection device, so different owing to measuring height of specimen, thus institute project on grating fringe also can change, foundation similar triangle theory can try to achieve its height difference.) for larger tested target, after the scanning completing side, described optical detection unit 2 automatically returns to the next area starting point detected that needs to start to continue scanning, until complete the scanning work to target, then sampling data transmitting is given described data collection process unit;
(3) described data collection process unit obtains the three-dimensional model of target after processing the image gathered, in the process of optical detecting head scanning, constantly the point data detected is transported to data collection process unit, by it, the process such as denoising, binaryzation, refinement and correction are carried out to the data collected, after the end of scan, data collection process unit completes the work for the treatment of to all data collected, now by these data in three dimensions assembly get up, finally present the three-dimensional stereo effect figure of target to be detected.The pattern feature that target material surface is very trickle can be known fast by the figure of 3 D stereo, contrasted by the three-dimensional model set up the three-dimensional data of original target, the composition point detected in the three-dimensional model of the target obtained is carried out to the calculating of point data, contrast with the point data of former target three-dimensional model, draw and draw the use amount of target by the volume that target consumes.
embodiment 5
On the basis of the measuring method described in embodiment 4, described step (1) also comprises: described control module according to actual needs, control the solenoid valve of multiple described conflict mechanism 11, described detection platform 1 is risen to desired location, ensure the levelness of described detection platform 1.
The step that optical detection unit 2 described in described step (2) adjusts to correct position in three dimensions is specially: described control module is according to the sweep limit of setting, control described portal frame 3, X-axis travel mechanism 211 and Z axis travel mechanism 25 to move along X, Y, Z axis direction, dynamic adjustments is carried out according to the data of grating scale 32 and limit sensors feedback in moving process, X, Y magnetic orbit is moved along Y direction by HOME point under the driving of electric current, the movement length of magnetic orbit is controlled by grating scale 32, and its step-length precision can reach 1/100mm.
Described control module can also control described first drive unit 20, second drive unit and the 3rd drive unit 27, described installing component 23, rotatable parts 24 and teeter member 26 are turned to and needs position, make the camera lens 22 be arranged on rotatable parts 24 carry out multi-faceted collection.
Obviously, above-described embodiment is only for clearly example being described, and the restriction not to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all embodiments.And thus the apparent change of extending out or variation be still among the protection domain of the invention.

Claims (10)

1. a high precision target measuring system, comprising:
Detection platform, for placing target;
Optical detection unit, is arranged on above described detection platform, can at three-dimensional range of motion, for gathering the target image that described detection platform is placed;
Data collection process unit, is connected respectively with described optical detection unit, detection platform, collected specimens detected parameters, and calculates accordingly it, processes and send;
Control module, is connected with data collection process unit respectively respectively with optical detection unit, detection platform, receives the information after described data collection process cell processing and controls other unit;
It is characterized in that:
A cavity is provided with in the middle of described detection platform, described cavity is provided with dismountable portable plate, described cavity can cover by described portable plate completely, described cavity inside arranges at least one group of limit assembly, described limit assembly is fixed target and described target can be driven to rotate, and described limit assembly connects drive rotating device and driven by it;
Described optical detection unit comprises camera lens and optical grating projection device, and described optical grating projection device carries out projection scanning to target, and described camera lens gathers the optical grating projection information of described optical grating projection device projection, and sends to described data collection process unit.
2. according to detection platform according to claim 1, it is characterized in that, limit assembly described in one group comprises the first locating part and the second locating part, described first locating part and described drive rotating device link, described drive rotating device arranges at least one, described drive rotating device is connected with rotating shaft, and described rotating shaft stretches into the downside of described first locating part through described detection platform; Described rotating shaft and described first locating part are respectively arranged with gear, and the gear on the gear in described rotating shaft and described first locating part is mutually meshing, and described drive rotating device is linked by described rotating shaft and described first locating part.
3. detection platform according to claim 1 and 2, it is characterized in that, limit assembly described in one group comprises the first locating part and the second locating part, described first locating part and described drive rotating device link, described drive unit arranges one, described drive rotating device is connected with rotating shaft, described rotating shaft stretches into the horizontal side of described first locating part through described detection platform, described rotating shaft and described first locating part are respectively arranged with gear, and described rotating shaft is linked by driving-belt and multiple described first locating part; Detection platform according to any one of claim 1-3, it is characterized in that, described first locating part and the second locating part comprise two gag lever posts be arranged in parallel respectively, described gag lever post is provided with the packing ring increasing friction, the spacing of two described gag lever posts of described first locating part is less than target width, and the spacing of two described gag lever posts of described second locating part is less than target width.
4. the measuring system according to any one of claim 1-4, is characterized in that, the bottom of described detection platform is provided with base, and described detection platform and described base are dismountable connection; Y-axis guide rail is respectively arranged with in the both sides of described base, two described Y-axis guide rails are connected with two bottoms of a portal frame respectively, described portal frame can move along Y-axis on described Y-axis guide rail, and the crossbeam of described portal frame is also provided with X axis guide rail; Measuring system according to any one of claim 1-5, is characterized in that, described optical detection unit is connected with X-axis travel mechanism, and described X-axis travel mechanism is connected with X axis guide rail, can move along X-axis; The side of described X-axis travel mechanism is also provided with Z-axis direction guide rail.
5. the measuring system according to any one of claim 1-6, is characterized in that,
Described camera lens is arranged on rotatable parts, and described rotatable parts at least arrange two, and described rotatable parts one end and described installing component are rotationally connected, and described camera lens is arranged on the other end of described rotatable parts;
Connect described optical grating projection device in the middle of on the downside of described installing component, be connected with teeter member in the middle of on the upside of described installing component, the side of described teeter member is connected by couple axle with the side of Z axis travel mechanism, and described teeter member can wave along axle; Described Z axis travel mechanism is arranged on Z-axis direction guide rail, and miscellaneous part can be driven to move along Z axis; Measuring system according to any one of claim 1-7, it is characterized in that, described Z axis travel mechanism is moved along Z axis by driven screw, described driven screw stretches into Z axis travel mechanism from upper end, internal thread in external thread on described driven screw and described Z axis travel mechanism coincide, described driven screw upper end is by gear with initiatively screw rod is meshing, and described active screw rod is connected with the screw drive be arranged in X-axis travel mechanism; Measuring system according to any one of claim 1-8, it is characterized in that, described installing component is connected by vertical rotation axis with described teeter member, described vertical rotation axis is also connected with the first drive unit, described rotatable parts are connected with installing component by turning axle, described turning axle is connected with the second drive unit, and described couple axle is connected with the 3rd drive unit.
6. the measuring system according to any one of claim 1-9, is characterized in that, is provided with multiple conflict mechanism below described detection platform, and described conflict mechanism comprises cylinder, solenoid valve and sensor, and described conflict mechanism is for keeping the level of detection platform; Measuring system according to any one of claim 1-10, is characterized in that, described X axis guide rail and described Y-axis guide rail are magnetic track, and described Z-axis direction guide rail is double trapezoid slide rail; Measuring system according to any one of claim 1-11, is characterized in that, described optical detection unit and described portal frame are provided with grating scale, and described X, Y, Z axis direction guiding rail two ends are all provided with limit sensors.
7. adopt a measuring method for the measuring system described in claim 1-12, it is characterized in that, comprise the following steps:
(1) column target is placed in described detection platform, described portable plate is pulled down, column target is placed on described limit assembly;
(2) the selected scope needing scanning in described control module, order is sent to detection platform and optical detection unit by described control module, drive rotating device in described detection platform drives target to rotate by described limit assembly, described optical detection unit adjusting position in three dimensions, target is sampled, then sampling data transmitting is given described data collection process unit;
(3) described data collection process unit obtains the three-dimensional model of target after processing the image gathered, and is contrasted, calculate the volume of consumption, draw the use amount of target by the three-dimensional model set up the three-dimensional data of original target.
8. measuring method according to claim 13, it is characterized in that, described step (1) also comprises: described control module according to actual needs, controls the solenoid valve of multiple described conflict mechanism, described detection platform is risen to desired location, ensures the levelness of described detection platform.
9. the measuring method according to claim 13 or 14, it is characterized in that, the step that optical detection unit described in described step (2) adjusts to correct position in three dimensions is specially: described control module is according to the sweep limit of setting, control described portal frame, X-axis travel mechanism and Z axis travel mechanism to move along X, Y, Z axis direction, in moving process, carry out dynamic adjustments according to the data of grating scale and limit sensors feedback; Measuring method according to any one of claim 13-15, it is characterized in that, described control module can also control described first drive unit, the second drive unit and the 3rd drive unit, described installing component, rotatable parts and teeter member are turned to and needs position, make the camera lens be arranged on rotatable parts carry out multi-faceted collection.
10. the measuring method according to any one of claim 13-16, it is characterized in that, described step (3) is specially: the calculating composition point detected in the three-dimensional model of the target obtained being carried out to point data, contrasts with the point data of former target three-dimensional model, draw the volume that target consumes.
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