CN102565190A - Detection mechanism for sputtering target - Google Patents
Detection mechanism for sputtering target Download PDFInfo
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- CN102565190A CN102565190A CN2011104420465A CN201110442046A CN102565190A CN 102565190 A CN102565190 A CN 102565190A CN 2011104420465 A CN2011104420465 A CN 2011104420465A CN 201110442046 A CN201110442046 A CN 201110442046A CN 102565190 A CN102565190 A CN 102565190A
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Abstract
The invention relates to a detection mechanism for a sputtering target. A moving device which can move in a three-dimensional space is mainly assembled on a liquid storage tank for driving an ultrasonic detection component to displace, a plurality of parallel rollers are additionally and pivotally arranged in the liquid storage tank, the rollers are driven by a roller driving component to rotate in the same direction, the rollers are utilized for carrying the sputtering target to be detected in the liquid storage tank so as to detect the ultrasonic detection component, and the rollers are further utilized for driving the sputtering target to rotate, so that the detection method for the sputtering target is suitable for detection operation of planar, cylindrical or special-shaped and other various different types of the sputtering targets.
Description
Technical field
The present invention relates to a kind of sputtered target material testing agency, relate to a kind of sputtered target material testing agency design that cylindrical shape target, planar targets or special-shaped target carry out testings such as target inherent vice, seam defective that is common to especially.
Background technology
In the processing procedure of semiconductor product; In order on base material, to form the rete of predetermined material; Often utilize Ionized gas (electricity slurry) to impact sputtered target material and discharge predetermined particle, make particle be attached to substrate surface and form this desired rete through sputtering unit.
For fear of making processing procedure because of the defective effect sputter in the sputtered target material, said sputtered target material carries out target Inner Defect Testing, seam defects detection etc. through sputtered target material testing agency usually, and then therefrom filters out bad sputtered target material.In existing sputtered target material testing agency, the ultrasonic detection mode is that sputtered target material carries out a kind of in the nondestructive known technology.Because sputtered target material includes multiple patterns such as plane target, cylinder type target or special-shaped target, based on the shape difference of each pattern target, the mechanism of each design special of sputtered target material testing agency is to be suitable for all types of targets.
Disclose " the ultrasonic failure detector " that No. 201033607 application for a patent for invention case discloses a kind of being exclusively used in " cylindric sputtered target material " like the TaiWan, China patent on September 16th, 2010, but it mainly is in the liquid tank of loaded with liquid, cylindrical shape sputtered target material group to be established wherein, and soaks and place in the liquid; Axle two ends at this sputtered target material respectively are provided with gear, and with gearing mesh on the tooth bar of liquid tank bottom, drive the sputtered target material rotation through power transmitting mechanism; In addition; Installing detector travel mechanism above liquid tank moves in order to drive detector directions X and Y direction, so; Surveying under travel mechanism's drive; After utilizing detector that cylindrical shape sputtered target material apical margin is carried out the ultrasonic detection, then drive the sputter material and rotate to an angle, by detector another angle section of sputtered target material is carried out ultrasonic again and detect by power transmitting mechanism; So carry out, detect operation until the comprehensive completion of this cylindrical shape sputtered target material.
But; Though the ultrasonic failure detector can provide a kind of sputtered target material testing agency, yet the design of this ultrasonic failure detector only is again to be applicable to the cylinder type sputtered target material; Be not suitable for the planar shaped sputtered target material; Therefore, existing sputtered target material testing agency all has the problem that can't be common to all types of (plane, cylindrical shape, abnormal shape etc.) sputtered target material, so that the dealer is for can carry out the detection operation of various sputtered target material; Just must purchase the dissimilar sputtered target material of multi-section testing agency, and cause the high problem of equipment cost.
This shows that above-mentioned existing ultrasonic failure detector obviously still has inconvenience and defective, and demands urgently further improving in the use.In order to solve the problem that the ultrasonic failure detector exists; Relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly; But do not see always that for a long time suitable design is developed completion; And common product does not have appropriate structure to address the above problem, and this obviously is the problem that the anxious desire of relevant dealer solves.
Because the defective that above-mentioned existing ultrasonic failure detector exists; The inventor is based on being engaged in this type of product design manufacturing abundant for many years practical experience and professional knowledge; And cooperate the utilization of studying the science, actively study innovation, in the hope of founding a kind of sputtered target material testing agency of new structure; Can improve general existing ultrasonic failure detector, make it have more practicality.Through constantly research, design, and after studying sample and improvement repeatedly, found out the present invention of true tool practical value finally.
Summary of the invention
Fundamental purpose of the present invention is; Overcome the defective that existing ultrasonic failure detector exists; And provide a kind of sputtered target material testing agency of new structure, technical matters to be solved to make it not be only applicable to cylindric sputtered target material to detect operation, and be common to the detection of all types of sputtered target materials; Thereby be suitable for practicality more, and have the value on the industry.
The object of the invention and solve its technical matters and adopt following technical scheme to realize.According to a kind of sputtered target material testing agency that the present invention proposes, it comprises:
Liquid storage groove;
Portable ultrasonic detects unit, and it comprises mobile device and ultrasonic detection components, and said mobile device is on liquid storage groove, and the said ultrasonic detection components of winding, does the three dimensions displacement in order to drive the ultrasonic detection components;
The target mobile device is to comprise a plurality of roller bearings and a roller bearing driven unit, and these a plurality of roller bearings are hubbed in the liquid storage groove side by side, and the roller bearing driven unit connects these a plurality of roller bearings, rotates in the same way in order to drive these a plurality of roller bearings; And
Controller, it is electrically connected mobile device and roller bearing driven unit, in order to the work of control mobile device and roller bearing driven unit.
Aforesaid sputtered target material testing agency, wherein, said mobile device comprises that X axis moving assembly, Y move axially assembly, Z moves axially assembly and mobile member;
Said X axis moving assembly is located on the cell wall of said liquid storage groove, and said X axis moving assembly comprises first mobile member, and in order to drive the X axis driver that said first mobile member moves along X axis;
Said Y moves axially assembly and is located on first mobile member of said X axis moving assembly; And can be the drive of X axis moving assembly moves along X axis; Said Y moves axially assembly and has second mobile member, and in order to drive said second mobile member along the axial driver of the axially movable Y of Y;
Said Z moves axially assembly and is located on said second mobile member, and said Z moves axially assembly and comprises the axial driver of Z, and the axial driver of said Z is connected with said mobile member;
Said X axis driver, the axial driver of Y are connected controller with the axial actuator electrical of Z;
Said ultrasonic detection components comprises at least one ultrasonic detecting unit, and said ultrasonic detecting unit is located on the said mobile member.
Aforesaid sputtered target material testing agency, wherein, said roller bearing driven unit comprises CD-ROM drive motor and train transmission group, and said CD-ROM drive motor is electrically connected controller, and the rotation of CD-ROM drive motor is done the moved end and is combined the train transmission group to connect these a plurality of roller bearings.
Aforesaid sputtered target material testing agency, wherein, said roller bearing driven unit comprises CD-ROM drive motor and train transmission group, and said CD-ROM drive motor is electrically connected controller, and the rotation of said CD-ROM drive motor is done the moved end and is combined the train transmission group to connect these a plurality of roller bearings.
Aforesaid sputtered target material testing agency, wherein, this target mobile device comprises initiatively roller bearing and driven roller bearing; Said train transmission group is a belt pulley set; It comprises driving wheel, engaged wheel and annular belt, and said CD-ROM drive motor is done the moved end with rotation and connected the initiatively end of roller bearing, and said driving wheel is located on the said active roller bearing; Said engaged wheel is located on the driven roller bearing, and said annular belt is surrounded on said driving wheel and the said engaged wheel.
Aforesaid sputtered target material testing agency, wherein, said target mobile device comprises an adjustment assembly, and said adjustment assembly is connected with driven roller bearing, and said adjustment assembly is in order to adjust the relative position between said active roller bearing and said driven roller bearing.
Aforesaid sputtered target material testing agency, wherein, said roller bearing is the combined type roller bearing, and it includes axostylus axostyle and a plurality of outer sleeve, and these a plurality of outer sleeves are sheathed on this axostylus axostyle.
Aforesaid sputtered target material testing agency, wherein, said roller bearing is the combined type roller bearing, and it includes axostylus axostyle and a plurality of outer sleeve, and these a plurality of outer sleeves are sheathed on this axostylus axostyle.
Aforesaid sputtered target material testing agency, wherein, said sputtered target material testing agency further comprises two carriers, it is inner that these two carriers are installed in this liquid storage groove, and divide the periphery that is positioned at these a plurality of roller bearings.
Aforesaid sputtered target material testing agency, wherein, said sputtered target material testing agency further comprises two carriers, these two carriers are that to be installed in this liquid storage groove inner, and divide the periphery that is positioned at these a plurality of roller bearings.
By technique scheme, sputtered target material of the present invention testing agency has advantage at least:
Design through sputtered target material testing agency; It mainly is to utilize the mobile device that but installing three dimensions moves on the liquid storage groove; With the displacement of drive ultrasonic detection components, a plurality of roller bearings arranged side by side that are pivoted in the liquid storage groove in addition, these a plurality of roller bearings can carry sputtered target material to be checked; The ultrasonic detection components is detected on its sputtered target material to be checked; These a plurality of roller bearings are driven by the roller bearing driven unit and rotation in the same way in addition, make cylinder type or special-shaped sputtered target material can be the roller bearing driven rotary, carry out the detection of another angle position of sputtered target material for the ultrasonic detection components; So, make this sputtered target material testing agency be applicable to that the sputtered target material of number of different types such as plane, cylindrical shape or abnormal shape detects operation by a machine.
In sum, the sputtered target material testing agency of special construction of the present invention is not only applicable to cylindric sputtered target material and detects operation, and is common to the detection of all types of sputtered target materials.It has above-mentioned many advantages and practical value, and in like product, does not see have similar structural design to publish or use and really belong to innovation, no matter it structurally or bigger improvement all arranged on the function; Have large improvement technically; And produced handy and practical effect, and more existing ultrasonic failure detector has the multinomial effect of enhancement, thus be suitable for practicality more; And have the extensive value of industry, really be a novelty, progress, practical new design.
Above-mentioned explanation only is the general introduction of technical scheme of the present invention, understands technological means of the present invention in order can more to know, and can implement according to the content of instructions, below with preferred embodiment of the present invention and conjunction with figs. specify as after.
Embodiment of the present invention is provided by following examples and accompanying drawing thereof in detail.
Description of drawings
Fig. 1 is the schematic perspective view of a preferred embodiment of sputtered target material of the present invention testing agency.
Fig. 2 is another watching angle schematic perspective view of sputtered target material shown in Figure 1 testing agency preferred embodiment.
Fig. 3 moves axially the sectional perspective synoptic diagram of assembly for the Y of the mobile device in the preferred embodiment of sputtered target material shown in Figure 1 testing agency.
Fig. 4 moves axially the sectional perspective synoptic diagram of assembly and mobile member for the Z of the mobile device in the preferred embodiment of sputtered target material shown in Figure 1 testing agency.
Fig. 5 is the schematic top plan view of sputtered target material shown in Figure 1 testing agency preferred embodiment.
Fig. 6 is the side-looking floor map of sputtered target material shown in Figure 1 testing agency preferred embodiment.
Fig. 7 has the preferred embodiment of two roller bearings and the schematic perspective view of sputtered target material for the target mobile device in the preferred embodiment of sputtered target material of the present invention testing agency.
Fig. 8 looks schematic perspective view for another sight that the target mobile device in the preferred embodiment of sputtered target material of the present invention testing agency has two roller bearing preferred embodiments and sputtered target material.
Fig. 9 has the schematic perspective view of three roller bearing preferred embodiments and sputtered target material for the target mobile device in the preferred embodiment of sputtered target material of the present invention testing agency.
Figure 10 is the schematic perspective view of another preferred embodiment sputtered target material of roller bearing in the sputtered target material of the present invention testing agency.
Description of reference numerals:
1, liquid storage groove; 2, portable ultrasonic detects unit; 3, mobile device; 4, ultrasonic detection components; 5, target mobile device; 6, controller; 7, carrier; 8, sputtered target material; 30, X axis moving assembly; 31, Y moves axially assembly; 32, Z moves axially assembly; 33, mobile member; 40, ultrasonic detecting unit; 50, roller bearing; 51, roller bearing; 53, CD-ROM drive motor; 54, train transmission group; 301, first mobile member; 302, X axis driver; 311, second mobile member; 312, the axial driver of Y; 321, the axial driver of Z; 511, axostylus axostyle; 512, outer sleeve; 541, driving wheel; 542, engaged wheel; 543, annular belt.
Embodiment
Reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the present invention; Below in conjunction with accompanying drawing and preferred embodiment; To its embodiment of sputtered target material testing agency, structure, characteristic and the effect thereof that proposes according to the present invention, specify as after.
Like Fig. 1 and shown in Figure 2, it shows a preferred embodiment of sputtered target material of the present invention testing agency, and this system of sputtered target material testing agency comprises that liquid storage groove 1, portable ultrasonic detect unit 2, target mobile device 5 and a controller 6, wherein:
Said liquid storage groove 1 injects wherein in order to liquid to be provided, and sputtered target material to be checked put wherein to soak places in the liquid, and said liquid is selected suitable liquid for use according to the material of sputtered target material to be checked.
Like Fig. 1 and shown in Figure 2, it is to comprise a mobile device 3 and a ultrasonic detection components 4 that said portable ultrasonic detects unit 2, and wherein, but said mobile device 3 is one group of mechanism that three dimensions moves, and is installed on the liquid storage groove 1; Said ultrasonic detection components 4 is one group and possesses the assembly that controlled output Supersonic involves the functions such as ultrasonic that receive reflection; Said ultrasonic detection components 4 is located in the mobile device 3; And it is mobile to be made three dimensions by driving, in order to the sputtered target material to be checked in the liquid storage groove 1 is detected.
Extremely shown in Figure 6 like Fig. 1; In this preferred embodiment; Said mobile device 3 is to comprise that an X axis moving assembly 30, a Y move axially assembly 31, a Z moves axially an assembly 32 and a mobile member 33; Said X axis moving assembly 30 is located on the cell wall of liquid storage groove 1, and X axis moving assembly 30 has one first mobile member 301 and in order to drive the X axis driver 302 that first mobile member 301 moves along X axis, and said Y moves axially assembly 31 and is located on first mobile member 301 of X axis moving assembly 30; And can be the drive of X axis moving assembly moves along X axis; Said Y moves axially assembly 31 and has one second mobile member 311 and in order to drive second mobile member 311 along the axial driver 312 of the axially movable Y of Y, and Z moves axially assembly 32 and is located on said second mobile member 311, and said Z moves axially assembly 32 and has the axial driver 321 of a Z; And connect described mobile member 33; Thus, move axially assembly 31 in conjunction with X axis moving assembly 30, Y and move axially assembly 32, make X axis, Y and axially reach the axial three dimensions of Z and move in order to drive mobile member 33 with Z; Said X axis driver, the axial driver of Y are connected controller with the axial actuator electrical of Z, and by controller 6 its starts of decision and the opportunity that stops.
Said ultrasonic detection components 4 is to be located on the mobile member 33 of said mobile device 3; And can be mobile device 3 and drive and make X axis, Y and axially reach the axial three dimensions of Z and move; Said ultrasonic detection components 4 includes at least one ultrasonic detecting unit 40; And be electrically connected controller 6; When ultrasonic detection components 4 comprised a plurality of ultrasonic detecting units 40, these a plurality of ultrasonic detecting units 40 were spaced on mobile member 33, carried out the ultrasonic detection simultaneously in order to larger area sputtered target material to be checked is distinguished several sections; Said ultrasonic detecting unit 40 is to comprise the generator that can produce supersonic detecting head, the detecting head energy is provided, signal capturing device and one group of transmission line in order to the transmission energy of fechtable echo signal, and transmission line is electrically connected signal capturing device, generator and controller 6.
Like Fig. 7, Fig. 8 and shown in Figure 9; Said target mobile device 5 is to comprise a plurality of roller bearings 50,51 and roller bearing driven unit 52; These a plurality of roller bearings 50,51 are to be parallel to X axis and to be hubbed at side by side in the liquid storage groove 1, and said roller bearing 50,51 outer peripheral faces can sheathed rubber cladding, and the friction contact surface of sputtered target material to be checked is provided; The apical margin of these a plurality of roller bearing 50,51 outer peripheral faces can be positioned at same level height in addition; In order to horizontal support plane sputtered target material to be checked, the passing outside the liquid storage groove 1 of an end seal leakproof of said a plurality of roller bearings 50,51, said roller bearing driven unit 52 is these a plurality of roller bearings 50,51 of connection; Rotate in the same way in order to drive these a plurality of roller bearings 50,51; Said roller bearing driven unit 52 comprises CD-ROM drive motor 53 and train transmission group 54, and said CD-ROM drive motor 53 is electrically connected controller, and said train transmission group 54 can be gear set or belt pulley set etc.; And the rotation of CD-ROM drive motor 53 is done the moved end and is combined train transmission group 54 to connect the end outside these a plurality of roller bearing 50,51 flashed liquid storage tanks 1, makes CD-ROM drive motor 53 be able to combine train transmission group 54 to drive these a plurality of roller bearings 50,51 and rotates in the same way.
In a preferred embodiment shown in the present invention, like Fig. 7 and shown in Figure 8, this target mobile device 5 has two roller bearings 50,51; Wherein a roller bearing 50 is defined as initiatively roller bearing; Another roller bearing 51 is defined as driven roller bearing, and said active roller bearing 50 adjustable points are hubbed in the liquid storage groove 1, and 51 of driven roller bearings can be located in the liquid storage groove 1 through the adjustment component groups; In order to adjust the relative position of 51 of active roller bearing 50 and driven roller bearings; Said train transmission group 54 is a belt pulley set, and comprising driving wheel 541, engaged wheel 542 and annular belt 543 are arranged, this CD-ROM drive motor 53 is done moved end (being axle) with rotation and connected the initiatively end of roller bearing 50; Driving wheel 541 is located on the active roller bearing 50; Engaged wheel 542 is located on the driven roller bearing 51, and annular belt 543 is surrounded on driving wheel 541 and the engaged wheel 542, and roller bearings 50 rotate with driven roller bearing 51 in the same way to make CD-ROM drive motor 53 combine belt pulley set to drive initiatively.
Like Fig. 7 and shown in Figure 9; Target mobile device 5 still can further comprise at least one roller bearing auxiliary support frame 55; Said roller bearing auxiliary support frame 55 is located in the liquid storage groove 1 and is supported roller bearing 50,51, and in this preferred embodiment, said roller bearing auxiliary support frame 55 has support body and is hubbed at the roller on the support body; And rollably contact roller bearing 50,51 with roller, in order to prevent roller bearing 50,51 bendings.
Said roller bearing 50,51 can be the roller bearing that solid memder constitutes; Or can be patterns such as combined type roller bearing, when roller bearing 50,51 is the combined type roller bearing, shown in figure 10; It includes an axostylus axostyle 501,511 and a plurality of outer sleeves 502,512; These a plurality of outer sleeves 502,512 are sheathed on this axostylus axostyle 501,511, make it on axostylus axostyle 501,511, make corresponding permutations and to form corresponding roller bearing by these a plurality of outer sleeves 502,512 in response to the not equal thickness of sputtered target material (like special-shaped target), and said outer sleeve 502,512 can be the made ring of rubber material; As the rubber cladding, the friction contact surface of sputtered target material to be checked is provided.
Sputtered target material of the present invention testing agency still can further comprise two carriers 7; These two carriers 7 are to be installed in this liquid storage groove 1 inside; And divide the periphery that is positioned at these a plurality of roller bearings 50,51; In order to collocation roller bearing 50,51 supplemental support sputtered target material to be checked, the apical margin of carrier 7 can be high together with roller bearing 50,51 outer peripheral face apical margins, and said carrier 7 can be the staggered winding of a plurality of hack levers and forms.
Sputtered target material inspection of the present invention is spattered mechanism in use; When sputtered target material was plane, this plane sputtered target material 8 placed liquid storage groove 1 and soaks and places liquid, and this plane sputtered target material 8 is flat on a plurality of roller bearings 50,51 of this target mobile device 5; Or further carrier 7 supplemental support through these a plurality of roller bearings 50,51 both sides; Secondly, make mobile device 3 drive the 4 three dimensions displacements of ultrasonic detection components, send Supersonic on the 40 pairs of plane sputtered target materials of ultrasonic detecting unit by ultrasonic detection components 4 and involve the ultrasonic that receives reflection by controller 6; And signal is sent to controller 6; Said controller 6 can comprise display, in the picture of display, presents the result of detection, when aforementioned midplane type sputtered target material is large tracts of land; Can distinguish several zones through a plurality of ultrasonic detecting units 40 and carry out the ultrasonic detection simultaneously, to shorten the activity duration.
When sputtered target material is cylinder type; This cylinder type sputtered target material 8 places liquid storage groove 1 and soaks and places liquid; And this cylinder type sputtered target material 8 is flat on 5 more than roller bearings 50,51 of this target mobile device; Secondly, make mobile device drive ultrasonic detection components 4, send Supersonic on the 40 pairs of cylinder type sputtered target materials 8 of ultrasonic detecting unit by ultrasonic detection components 4 and involve the ultrasonic that receives reflection with respect to 8 axial displacements of cylinder type sputtered target material by controller 6; Signal is sent to controller 6; And the display picture that sees through controller 6 presents the result of detection, and the roller bearing driven unit 52 by target mobile device 5 of continuing drives a plurality of roller bearings 50,51 and rotate in the same way, and stops after making cylinder type sputtered target material 8 on the roller bearing 50,51 rotate a predetermined angular; The ultrasonic detection components 4 that is driven by mobile device 3 again continues and carries out another angle position of cylinder type sputtered target material and carry out ultrasonic and detect, and accomplishes ultrasonic until this cylinder type sputter material comprehensively and detects.
When sputtered target material is abnormal shape; Change these a plurality of roller bearing 50,51 shapes according to this abnormal shape sputtered target material adjustment earlier; These a plurality of roller bearing 50,51 profiles are conformed to this abnormal shape sputtered target material; Order should the abnormal shape sputtered target material places liquid storage groove 1 and soaks and places liquid again, and should be flat on 5 more than roller bearings 50,51 of this target mobile device by the abnormal shape sputtered target material.Secondly; Make mobile device 3 drive ultrasonic detection components 4 by controller 6 with respect to special-shaped sputtered target material 8 axial displacements; Send Supersonic on 40 pairs of special-shaped sputtered target materials 8 of ultrasonic detecting unit by ultrasonic detection components 4 and involve the ultrasonic that receives reflection; And signal is sent to controller 6; The display picture that sees through controller 6 presents the result of detection, and the roller bearing driven unit 52 by target mobile device 5 of continuing drives a plurality of roller bearings 50,51 and rotate in the same way, and stops after making special-shaped sputtered target material 8 on the roller bearing 50,51 rotate a predetermined angular; The ultrasonic detection components 4 that is driven by mobile device 3 again continues and carries out another angle position of special-shaped sputtered target material and carry out ultrasonic and detect, till this abnormal shape sputter material is accomplished ultrasonic comprehensively and detected.
The technological innovation of the sputtered target material of the present invention testing agency that above-mentioned structure like this constitutes all has many saving graces for technician of the same trade now, and the progressive that possesses skills really.
The above only is preferred embodiment of the present invention, is not the present invention is done any pro forma restriction; Though the present invention discloses as above with preferred embodiment; Yet be not in order to limiting the present invention, anyly be familiar with the professional and technical personnel, in not breaking away from technical scheme scope of the present invention; When the technology contents of above-mentioned announcement capable of using is made a little change or is modified to the equivalent embodiment of equivalent variations; In every case be the content that does not break away from technical scheme of the present invention, to any simple modification, equivalent variations and modification that above embodiment did, all still belong in the scope of technical scheme of the present invention according to technical spirit of the present invention.
Claims (10)
1. sputtered target material testing agency is characterized in that it comprises:
Liquid storage groove;
Portable ultrasonic detects unit, and it comprises mobile device and ultrasonic detection components, and said mobile device is on liquid storage groove, and the said ultrasonic detection components of winding, does the three dimensions displacement in order to drive the ultrasonic detection components;
The target mobile device is to comprise a plurality of roller bearings and a roller bearing driven unit, and these a plurality of roller bearings are hubbed in the liquid storage groove side by side, and the roller bearing driven unit connects these a plurality of roller bearings, rotates in the same way in order to drive these a plurality of roller bearings;
Controller, said controller is electrically connected mobile device and roller bearing driven unit, in order to control the work of said mobile device and roller bearing driven unit.
2. sputtered target material according to claim 1 testing agency is characterized in that,
Said mobile device comprises that X axis moving assembly, Y move axially assembly, Z moves axially assembly and mobile member;
Said X axis moving assembly is located on the cell wall of said liquid storage groove, and said X axis moving assembly comprises first mobile member, and in order to drive the X axis driver that said first mobile member moves along X axis;
Said Y moves axially assembly and is located on first mobile member of said X axis moving assembly; And can be the drive of X axis moving assembly moves along X axis; Said Y moves axially assembly and has second mobile member, and in order to drive said second mobile member along the axial driver of the axially movable Y of Y;
Said Z moves axially assembly and is located on said second mobile member, and said Z moves axially assembly and comprises the axial driver of Z, and the axial driver of said Z is connected with said mobile member;
Said X axis driver, the axial driver of Y are connected controller with the axial actuator electrical of Z;
Said ultrasonic detection components comprises at least one ultrasonic detecting unit, and said ultrasonic detecting unit is located on the said mobile member.
3. sputtered target material according to claim 1 testing agency; It is characterized in that; Said roller bearing driven unit comprises CD-ROM drive motor and train transmission group, and said CD-ROM drive motor is electrically connected controller, and the rotation of CD-ROM drive motor is done the moved end and combined the train transmission group to connect these a plurality of roller bearings.
4. sputtered target material according to claim 2 testing agency; It is characterized in that; Said roller bearing driven unit comprises CD-ROM drive motor and train transmission group, and said CD-ROM drive motor is electrically connected controller, and the rotation of said CD-ROM drive motor is done the moved end and combined the train transmission group to connect these a plurality of roller bearings.
5. according to each described sputtered target material testing agency in the claim 1 to 4, it is characterized in that this target mobile device comprises initiatively roller bearing and driven roller bearing; Said train transmission group is a belt pulley set; It comprises driving wheel, engaged wheel and annular belt, and said CD-ROM drive motor is done the moved end with rotation and connected the initiatively end of roller bearing, and said driving wheel is located on the said active roller bearing; Said engaged wheel is located on the driven roller bearing, and said annular belt is surrounded on said driving wheel and the said engaged wheel.
6. sputtered target material according to claim 5 testing agency; It is characterized in that; Said target mobile device comprises an adjustment assembly, and said adjustment assembly is connected with driven roller bearing, and said adjustment assembly is in order to adjust the relative position between said active roller bearing and said driven roller bearing.
7. according to each described sputtered target material testing agency in the claim 1 to 4, it is characterized in that said roller bearing is the combined type roller bearing, it includes axostylus axostyle and a plurality of outer sleeve, and these a plurality of outer sleeves are sheathed on this axostylus axostyle.
8. sputtered target material according to claim 6 testing agency is characterized in that said roller bearing is the combined type roller bearing, and it includes axostylus axostyle and a plurality of outer sleeve, and these a plurality of outer sleeves are sheathed on this axostylus axostyle.
9. according to each described sputtered target material testing agency in the claim 1 to 4; It is characterized in that; Said sputtered target material testing agency further comprises two carriers, and it is inner that these two carriers are installed in this liquid storage groove, and divides the periphery that is positioned at these a plurality of roller bearings.
10. sputtered target material according to claim 8 testing agency is characterized in that, said sputtered target material testing agency further comprises two carriers, and these two carriers are that to be installed in this liquid storage groove inner, and divide the periphery that is positioned at these a plurality of roller bearings.
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Application publication date: 20120711 |