CN205940484U - Measure device of linear guide precision - Google Patents
Measure device of linear guide precision Download PDFInfo
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- CN205940484U CN205940484U CN201620866503.1U CN201620866503U CN205940484U CN 205940484 U CN205940484 U CN 205940484U CN 201620866503 U CN201620866503 U CN 201620866503U CN 205940484 U CN205940484 U CN 205940484U
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Abstract
The utility model discloses a measure device of linear guide precision, the device is including measuring the support body, setting up measuring transducer and high accuracy leveling ruler on measuring the support body, high accuracy leveling ruler and quilt are surveyed the guide rail and are all passed the measurement support body, measuring transducer's quantity is seven, wherein a measuring transducer and the 2nd measuring transducer aim at the top surface and the side of high accuracy leveling ruler respectively, the 3rd measuring transducer aims at the benchmark side of being surveyed the guide rail, fourth measuring transducer aims at the benchmark bottom surface of being surveyed the guide rail, the 5th measuring transducer aims at the non - benchmark side of being surveyed the guide rail, the 6th measuring transducer and the 7th measuring transducer aim at the top surface of being surveyed the guide rail simultaneously, the central plane symmetry of these two measuring transducer about being surveyed the guide rail. The utility model discloses an absolute counting combines together with the relative measurement to use non -contact measuring transducer to obtain the measured value of high accuracy, it is good to have the commonality, characteristics such as efficient.
Description
Technical field
The utility model belongs to line slideway fields of measurement, particularly a kind of device of measurement line slideway precision.
Background technology
At present, line slideway precision measure is measured using hand dipping or touch sensor mostly, hand dipping
During the guide rail raceway depth of parallelism, by guide rail clamping on the fixture of measurement flat board, by gauge stand and rail-sides datum level and guide rails assembling
Planar registration, and gauge outfit is aligned on guide rail roller surface, then move gauge stand and measure, the difference of the maximum and minimum value of measurement
It is worth and is guide rail raceway parallelism error, the method needs loaded down with trivial details clamping work, and measurement knot high to laboratory technician's competency profiling
Fruit poor repeatability；Chinese utility model publication number CN103438839A, entitled：A kind of line slideway precision self-operated measuring unit
And its measuring method, the patent describe and measure guide precision using Pneumatic contact type sensor, this sensor is in contact
Install Pneumatic component additional on sensor so as to not contact testee during inoperative, during measurement, install this kind of sensor additional
Standard slider be spaced movement at a certain distance, realize the measurement to tested guide rail height and the depth of parallelism, but the method surveyed
Need to make corresponding standard rail and standard slider during amount different model guide rail, increase financial cost and maintenance cost.
In sum, the measure the item that the various guide precision measuring instruments using at this stage cover is few, in particular for
The measurement of raceway phase closing precision is less, and measurement efficiency is all had much room for improvement with certainty of measurement, repeatability.
Utility model content
The purpose of this utility model is to provide a kind of device of measurement rolling linear guide precision.
The technical solution realizing the utility model purpose is：A kind of device of measurement line slideway precision, including survey
Amount support body, the measurement sensor being arranged on measurement support body and high accuracy leveling ruler, described high accuracy leveling ruler and tested guide rail are all worn
Cross measurement support body, the quantity of measurement sensor is seven, and the wherein first measurement sensor and the second measurement sensor are respectively aligned to
The top surface of high accuracy leveling ruler and side, the 3rd measurement sensor is directed at the reference side of tested guide rail, the 4th measurement sensor pair
The benchmark bottom surface of quasi- tested guide rail, the 5th measurement sensor be aligned tested guide rail non-referenced side, the 6th measurement sensor and
7th measurement sensor is directed at the top surface of tested guide rail simultaneously, and this two measurement sensors are with regard to the median plane pair of tested guide rail
Claim.
A kind of contactless measurement based on said apparatus, comprises the following steps：
Step 1, structure coordinate system, specially：It is X-axis along tested guide rail length direction, be Y along tested guide rail width
Axle, edge and tested guide rail bottom surface reference vehicular direction are Z axis；
Step 2, measuring table move relative to tested guide rail, measurement sensor Real-time Collection tested guide rail in motion process
Data.
Step 3, the data that measurement sensor is collected carry out separating treatment, split data into along X-axis move when survey
Amount data and along Z axis move when measurement data；
Step 4, the measurement data to measurement sensor carry out motion compensation；
Step 5, to the 3rd measurement sensor and the 5th measurement sensor along Z axis move when measurement data process,
Obtain the radius of raceway circular arc and the center of circle on guide rail section；
Step 6, calculating tested guide rail trueness error, specifically include raceway radius, the raceway depth of parallelism, raceway linearity, side
Face reference line degree, bottom surface reference line degree, contour, wide and distortion.
Compared with prior art, its remarkable advantage is the utility model：1) when device of the present utility model measures, no
Need to be fixed with multiple bolts, directly place automatically fixing using cam, test efficiency is high, easy for installation, in a way
Reduce installation cost；2) measurement apparatus of the present utility model using multiple sensor measurement data and can be located in motion process
Reason analysis, is dynamic accuracy measurement, more meets actual measurement situation；3) the utility model is simple to operate when being tested, effect
Rate is high, and repeatability is strong, and economic and practical is strong, and is beneficial to promote；4) pass through the timely measurement of laser displacement sensor, react quilt
Survey guide rail comprehensively and again accurately sized data, test data is continuously reliable；5) metering system of the present utility model and the world connect
Rail, more advanced reliability.
Brief description
Fig. 1 is the sensor placement figure of the device of measurement rolling linear guide precision.
Specific embodiment
In conjunction with Fig. 1, a kind of device of measurement line slideway precision, including measurement support body 1, it is arranged on the survey measuring on support body
Quantity sensor and high accuracy leveling ruler 3, described high accuracy leveling ruler 3 and tested guide rail 4 both pass through measurement support body 1, measurement sensor
Quantity is seven, and the wherein first measurement sensor 2-1 and the second measurement sensor 2-2 are respectively aligned to the top surface of high accuracy leveling ruler 3
And side, the reference side of the 3rd measurement sensor 2-3 be aligned tested guide rail 4, the 4th measurement sensor 2-4 be aligned tested guide rail
4 benchmark bottom surface, the 5th measurement sensor 2-5 is directed at the non-referenced side of tested guide rail 4, the 6th measurement sensor 2-6 and the
Seven measurement sensors 2-7 are directed at the top surface of tested guide rail 4 simultaneously, and this two measurement sensors are with regard to the median plane of tested guide rail 4
Symmetrically.
Described seven measurement sensors are in the same plane.
Described tested guide rail 4 and high accuracy leveling ruler 3 are parallel to each other.
Position X during described measurement support body 4 motiontObtained by position sensor, wherein t is time variable.
A kind of contactless measurement based on said apparatus, comprises the following steps：
Step 1, structure coordinate system, specially：It is X-axis along tested guide rail length direction, be Y along tested guide rail width
Axle, edge and tested guide rail bottom surface reference vehicular direction are Z axis；
Step 2, measuring table move relative to tested guide rail 4, and in motion process, measurement sensor Real-time Collection is tested leads
The data of rail 4.
When measuring table moves relative to tested guide rail 4, including the linear motion along X-axis and the linear motion along Z axis, above-mentioned
Two axle movement is separate, whenever moving to setpoint distance S along X-axisiDuring=i L, stop the motion of the direction, start along Z axis
Back and forth movement, stroke be 2h, so move to arrival set stroke till；Wherein L is tested leading for the mobile interval of unit, h
Rail height, (i=1,2...m-1), m is space-number；Wherein first measurement sensor 2-1, the second measurement sensor 2-2, the 3rd
Measurement sensor 2-3, the 4th measurement sensor 2-4, the 5th measurement sensor 2-5, the 6th measurement sensor 2-6 and the 7th measurement
The measurement point of sensor 2-7 be aligned is respectively P1、P2、P3、P4、P5、P6、P7；7 measurement sensor real time record measurement distances,
It is respectively S1{s1(xt,zt)}、S2{s2(xt,zt)}、S3{s3(xt,zt)}、S4{s4(xt,zt)}、S5{s5(xt,zt)}、S6{s6(xt,
zt)}、S7{s7(xt,zt)}.
Step 3, the data that measurement sensor is collected carry out separating treatment, split data into along X-axis move when survey
Amount data and along Z axis move when measurement data.
When the data that measurement sensor is collected carries out separating treatment, using formulaIsolate measurement point P3、P4、P5、P6、P7The middle coordinate set along X-axis motion parts
PX3, PX4、PX5、PX6、PX7, wherein n is measurement points；
Afterwards byIsolate measurement point P3、P5In xtThe corresponding guide rail of=i L cuts
Along the point set PY of Z axis motion parts during facei 3、PYi 5(i=1,2...m), wherein, t is time variable, α, β be one given on the occasion of.
For example, when certain measures, xtUnit be millimeter, ztUnit also be millimeter, then α value be 1, β value be 1.
Step 4, the measurement data to measurement sensor carry out motion compensation.It is specially：
If high accuracy leveling ruler pedestal base coordinate system is XwYwZwO, measuring table coordinate system platform are XtYtZtO, then
Coordinate under base coordinate system for the measurement point can be obtained by Coordinate Conversion：
The coordinate of the measurement point pointed by the 3rd measurement sensor 2-3 is P3=(XT,(S3-S2)T,S1 T),
The coordinate of the measurement point pointed by the 4th measurement sensor 2-4 is P4=(XT,S2 T,(S1+S4)T),
The coordinate of the measurement point pointed by the 5th measurement sensor 2-5 is P5=(XT,(S5+S2)T,S1 T),
The coordinate of the measurement point pointed by the 6th measurement sensor 2-6 is P6=(XT,S2 T,(S6-S1)T),
The coordinate of the measurement point pointed by the 7th measurement sensor 2-7 is P7=(XT,S2 T,(S7-S1)T).
Step 5, to the 3rd measurement sensor 2-3 and the 5th measurement sensor 2-5 along Z axis move when measurement data carry out
Process, obtain the radius of raceway circular arc, the center of circle on guide rail section.It is specially：
Show PY using tool imagei 3、PYi 5The cross section profile image of (i=1,2...m), selects upper and lower raceway wheel afterwards
Wide intervalFinally with least square fitting circle algorithm, data in raceway profile interval is processed,
Obtain upper and lower raceway arc radiusCentral coordinate of circle
Step 6, calculated using related algorithm and evaluate tested guide rail trueness error, including raceway radius, the raceway depth of parallelism,
Raceway linearity, side reference line degree, bottom surface reference line degree, contour, wide, distortion.It is specially:
Guide rail radius is by formula R=average [R1,R2,........,Rn-1,Rn] try to achieve；
Guide rail side benchmark and bottom surface reference line degree error are by the straight line providing in national standard GB/T 11336-2004
Degree ERROR ALGORITHM is to coordinate set PX3And PX4Calculate；
Guide rail raceway linearity is by the Spatial Straightness Error algorithm providing in national standard GB/T 11336-2004 to seat
Mark collection Qi(ai,bi,ci) calculate；
Guide rail raceway is calculated by following methods with respect to the parallelism error of guide rail itself side and bottom surface benchmark：
TakeOrder
T=Q-E-F, guide rail raceway with respect to guide rail itself side and bottom surface benchmark parallelism error by national standard GB/T 11336-
The Spatial Straightness Error algorithm providing in 2004 calculates to coordinate set T；
Between guide rail raceway, parallelism error is calculated by following methods：Take Guide rail side upper and lower raceway parallelism error is carried by national standard GB/T 11336-2004
For Spatial Straightness Error algorithm to coordinate systemCalculate, raceway or the lower raceway depth of parallelism are marked by country on guide rail
The Spatial Straightness Error algorithm providing in quasi- GBT 11336-2004 is to coordinate systemCalculate；
Guide rail contour calculate byDraw；
Guide rail is wide to be calculated by matrix W=PX3+PX5In secondary series, maximum draws；
Guide rail distortion is by formulaDraw, wherein LwFor the 6th measurement sensor 2-6 and the 7th survey
Quantity sensor 2-7 is along the distance of tested guide rail 4 width.
From the foregoing, it will be observed that a kind of device of measurement line slideway precision of the present utility model and contactless measurement, should
Method can measure to X-type or O-shaped line slideway precision, by 5 non-contact measurement sensors, the mobile cunning of XZ two axle
Platform, XZ shaft position sensor and other necessary devices composition coordinate measuring system, and use 2 non-contact measurement sensors
The long narrow high accuracy marble leveling ruler in be aligned two sides is used for the motion compensation of Mobile Slide, high additionally by laser interferometer measurement
Precision marble leveling ruler linearity can obtain more preferable compensation effect.Described measuring table can measure tested guide rail surface measuring point
With respect to the absolute coordinate of measuring table, the motion of described measuring table include along tested guide rail direction feed motion and
Feed motion vertically, carries out data processing with relative measurement principle to the coordinate point set obtaining with absolute measurement,
Obtain tested guide rail accuracy value, including raceway radius, the raceway depth of parallelism, raceway linearity, side reference line degree, bottom surface benchmark
Linearity, contour, wide, distortion.The utility model is combined with relative measurement using absolute measurement, and uses contactless survey
Quantity sensor obtains high-precision measured value, and it is good to have a versatility, the features such as efficiency high.
Claims (4)
1. a kind of device of measurement line slideway precision is it is characterised in that including measurement support body [1], being arranged on measurement support body
Measurement sensor and high accuracy leveling ruler [3], described high accuracy leveling ruler [3] and tested guide rail [4] both pass through measurement support body [1],
The quantity of measurement sensor is seven, and the wherein first measurement sensor [2-1] and the second measurement sensor [2-2] are respectively aligned to height
The top surface of precision leveling ruler [3] and side, the 3rd measurement sensor [2-3] is directed at the reference side of tested guide rail [4], the 4th measurement
Sensor [2-4] is directed at the benchmark bottom surface of tested guide rail [4], and the 5th measurement sensor [2-5] is directed at the non-base of tested guide rail [4]
Quasi- side, the 6th measurement sensor [2-6] and the 7th measurement sensor [2-7] are directed at the top surface of tested guide rail [4] simultaneously, and this two
Individual measurement sensor is symmetrical with regard to the median plane of tested guide rail [4].
2. the device of measurement line slideway precision according to claim 1 is it is characterised in that described seven measurement sensors
In the same plane.
3. according to claim 1 measurement line slideway precision device it is characterised in that tested guide rail [4] with high-precision
Degree leveling ruler [3] is parallel to each other.
4. according to claim 1 measurement line slideway precision device it is characterised in that measurement support body [4] motion when
Position XtObtained by position sensor, wherein t is time variable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620866503.1U CN205940484U (en) | 2016-08-10 | 2016-08-10 | Measure device of linear guide precision |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620866503.1U CN205940484U (en) | 2016-08-10 | 2016-08-10 | Measure device of linear guide precision |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205940484U true CN205940484U (en) | 2017-02-08 |
Family
ID=57919733
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620866503.1U Withdrawn - After Issue CN205940484U (en) | 2016-08-10 | 2016-08-10 | Measure device of linear guide precision |
Country Status (1)
| Country | Link |
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| CN (1) | CN205940484U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106052599A (en) * | 2016-08-10 | 2016-10-26 | 南京理工大学 | Apparatus of measuring linear guide rail precision and non-contact measurement method |
| CN113251960A (en) * | 2020-02-13 | 2021-08-13 | 大银微系统股份有限公司 | Fast measuring module |
| US11969845B2 (en) | 2020-02-18 | 2024-04-30 | Hiwin Mikrosystem Corp. | Quick measurement module |
-
2016
- 2016-08-10 CN CN201620866503.1U patent/CN205940484U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106052599A (en) * | 2016-08-10 | 2016-10-26 | 南京理工大学 | Apparatus of measuring linear guide rail precision and non-contact measurement method |
| CN106052599B (en) * | 2016-08-10 | 2019-03-29 | 南京理工大学 | A kind of contactless measurement measuring linear guide precision |
| CN113251960A (en) * | 2020-02-13 | 2021-08-13 | 大银微系统股份有限公司 | Fast measuring module |
| US11969845B2 (en) | 2020-02-18 | 2024-04-30 | Hiwin Mikrosystem Corp. | Quick measurement module |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170208 Effective date of abandoning: 20181102 |
|
| AV01 | Patent right actively abandoned |