CN105665919B - The system and method for on-line automatic repairing substrate defect - Google Patents
The system and method for on-line automatic repairing substrate defect Download PDFInfo
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- CN105665919B CN105665919B CN201410663574.7A CN201410663574A CN105665919B CN 105665919 B CN105665919 B CN 105665919B CN 201410663574 A CN201410663574 A CN 201410663574A CN 105665919 B CN105665919 B CN 105665919B
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Abstract
The present invention provides a kind of system and methods of on-line automatic repairing substrate defect, and the system comprises laser cell, optical unit, monitoring device and feedback devices；By the use of laser cell, optical unit and monitoring device, it can realize high-precision with the defect of accurate scan substrate and scan；Simultaneously, feedback device is set, feedback device receives the scanning information of the base board defect of monitoring device transmission, scanning result is fed back into laser cell by analyzing, it is on-line automatic that defect is removed or repaired so as to adjust the wavelength and energy of laser, save repair time, the waste of human resources caused by repairing manually is avoided, defect repair cost is reduced, improves remediation efficiency.
Description
Technical field
The present invention relates to flat display fields, and in particular to a kind of system of on-line automatic repairing substrate defect and its side
Method.
Background technique
Flat-panel screens technology has tended to mature, but the constituent element of display panel, such as array substrate, in the fabrication process
Some defects can inevitably be generated.For example, scan line and data line in array substrate are easy to happen broken string because its length is very long
Situation.When scan line and data line break, the pixel that will lead to a part can not act (line defect), therefore must try to
Repair break lines；In addition, if rely on improve technology come realize zero-fault rate be it is very difficult, therefore, the defect of substrate is repaired
Recovering technology just becomes quite important.
In the prior art, the defect repair of substrate generallys use laser welding (laser welding) and laser cutting
Modes such as (laser cutting) carry out.First using automatic optics inspection (Automatic Optic Inspection,
AOI) substrate is detected for equipment, finds out the Position Approximate of base on-board circuitry defect, then matching camera and capture screen
It uses, by manually looking for the defective locations of pre- reparation, judging the type of defect and being repaired.However, AOI detection can only be examined
The Position Approximate of defect is measured, exact defect coordinate can not be accurately found out, staff is needed to find manually, with one
For the route of 1000mm long, at least need just complete for 5 minutes or more using human eye detection (be with 5 μm of pixel resolutions
Example), the slow labor intensive again of speed, and easily cause the glasses fatigue and the decline of eyesight of testing staff.Also, manually find defect
And carry out repairing the waste that will also result in human resources, improve the cost of reparation.
Therefore, it is urgent to provide a kind of scanning of high-precision, the methods of on-line Full repairing substrate defect.
Summary of the invention
The purpose of the present invention is to provide a kind of system and method for on-line automatic repairing substrate defect, and height may be implemented
Precision scanning, determines the specific location of defect, and realize on-line automatic reparation.
To achieve the above object, the present invention provides a kind of system of on-line automatic repairing substrate defect: including laser cell,
Optical unit, monitoring device and feedback device；The laser cell is for emitting laser；The optical unit is for reflecting institute
Laser is stated to substrate, to scan the defect information of the substrate；The monitoring device is for receiving from substrate reflection simultaneously
The feedback device is transmitted to by the scanning information of the optical unit, and by the scanning information；The feedback device is used
Scanning result is obtained in the analysis scanning information and scanning result is fed back into the laser cell；And the laser cell
For according to the different output different-energies of scanning result and the laser of wavelength and reflexing to the base by the optical unit
Plate, the defect is removed or be repaired.
Optionally, the laser cell includes: laser source, the first attenuator and frequency division module；The laser source is used for
Emit laser, first attenuator for changing laser energy.
Optionally, the laser cell further includes frequency division module, and the frequency division module includes frequency divider and the second attenuator,
The frequency divider is used to control the wavelength of laser, and second attenuator is used to control the energy for changing the laser after wavelength；
The frequency division module can rotate integrally.
Optionally, the optical unit includes half-reflecting half mirror and protective unit, and it is anti-that the protective unit is located at described half
In optical path between pellicle mirror and the monitoring device.
Optionally, the monitoring device includes lens and imaging sensor, and the lens are for amplification or/and filter scan
Information, described image sensor carry out signal conversion to scanning information, the scanning information are converted to electric signal by optical signal.
Correspondingly, the system that the present invention also provides a kind of using above-mentioned on-line automatic repairing substrate defect carry out it is on-line automatic
The method of repairing substrate defect, comprising:
Laser cell emits laser；
Optical unit reflects the defect information that the laser scans the substrate to substrate；
Monitoring device receives the scanning information that the optical unit is reflected and passed through from the substrate, and the scanning is believed
Breath is transmitted to feedback device；
Feedback device analyzes the scanning information and obtains scanning result and scanning result is fed back to the laser cell；With
And
Laser cell is according to the different output different-energies of scanning result and the laser of wavelength and passes through the optical unit
The substrate is reflexed to, the defect is removed or be repaired.
Optionally, when the defect information of substrate described in the laser scanning, the frequency division module is rotated to closed state, institute
It states laser and directly passes through the frequency division module；When the laser is removed or repaired to the defect, the frequency dividing mould is rotated
Block to open state, the frequency division module changes the wavelength and energy of laser.
Optionally, when the laser of the laser cell output is transmitted to the optical unit, the protective unit is closed, institute
It states laser and is reflected onto the substrate；When the scanning information of the substrate reflection is transmitted to the optical unit, the protection is single
Member is opened, and the scanning information passes through the optical unit；Before the laser reflexes to the substrate by the optical unit,
By a rotating lens, to adjust the hot spot of laser.
Optionally, thus the feedback device judges according to the scanning information analyzing defect position, type and size
The wavelength and energy of the laser needed, and this analysis result is fed back into the laser cell；The type of the defect includes different
Object residual and/or route missing.
Optionally, before on-line automatic repairing substrate defect, manual setting laser cell is in scanning defect and repairs scarce
The wavelength and energy of laser when falling into.
Compared with prior art, the method for on-line automatic repairing substrate defect provided by the invention, passes through laser cell, light
The use of unit and monitoring device is learned, high-precision can be realized with the defect of accurate scan substrate and scan；Meanwhile setting is anti-
Device is presented, and feedback device receives the scanning information of the base board defect of monitoring device transmission, scanning result fed back to by analyzing
Laser cell, so that the wavelength and energy of laser are adjusted, it is on-line automatic that defect is removed or repaired, repair time is saved,
The waste of human resources caused by repairing manually is avoided, defect repair cost is reduced, improves remediation efficiency.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the system of on-line automatic repairing substrate defect provided by the present invention.
Fig. 2 is the flow chart of the method for on-line automatic repairing substrate defect provided by the present invention.
Specific embodiment
To keep the contents of the present invention more clear and easy to understand, below in conjunction with Figure of description, the contents of the present invention are done into one
Walk explanation.Certainly the invention is not limited to the specific embodiment, and general replacement well known to those skilled in the art is also contained
Lid is within the scope of the present invention.
Secondly, the present invention has carried out detailed statement using schematic diagram, in detail that example of the present invention, for the ease of saying
Bright, schematic diagram is not partially enlarged in proportion to the general scale, should not be to this as restriction of the invention.
Core of the invention thought is: the scanning information of the base board defect of monitoring device transmission is received by feedback device,
Scan Architecture is fed back into laser cell by analyzing, so that the wavelength and energy of laser are controlled, it is on-line automatic that defect is carried out
It removes or repairs.
Referring to FIG. 1, its structure for the system of on-line automatic repairing substrate defect provided by one embodiment of the invention
Schematic diagram.As shown in Figure 1, the system of the on-line automatic repairing substrate defect, including laser cell 10, optical unit 20, prison
Control device 30 and feedback device 40；The laser cell 10 is for emitting laser；The optical unit 20 is described for reflecting
Laser is to substrate 50, to scan the defect of the substrate 50；The monitoring device 30 is for receiving the optical unit 20
Scanning information, and the scanning information is transmitted to the feedback device 40；The feedback device 40 is for analyzing the scanning
Information show that scanning result is fed back to the laser cell 10 by scanning result；The laser cell 10 is used for according to scanning result
Different output different-energies and wavelength laser and the substrate 50 is reflexed to by the optical unit 20, to the defect
It is removed or is repaired.
In the present embodiment, the laser cell 10 includes laser source 11, the first attenuator 12 and frequency division module 13；It is described
Laser source 11 is for emitting laser；First attenuator 12 is used to control the energy size of laser；The frequency division module 13 wraps
Frequency divider 131 and the second attenuator 132 are included, the frequency divider 131 is used to control the wavelength of laser, second attenuator 132
For controlling the energy of the laser after changing wavelength, the frequency division module can be rotated integrally, and determine the frequency dividing by rotation
The closed state and open state of module 13.When laser be used for scanning substrate 50 defect when, rotate the frequency division module 13 to
Closed state, the laser exported from the laser source 11 are described by directly passing through after first attenuator 12 adjusting energy
Frequency division module 13, the frequency division module 13 will not have any impact to laser；When laser is used to repair defect, described in rotation
Frequency division module 13 is to open state, according to the difference of defect, it is desirable to provide the laser of different wave length and energy, the at this time frequency dividing
Module 13 repairs different defects for changing the wavelength and energy of laser with suitable.
The optical unit 20 includes half-reflecting half mirror 21 and protective unit 22, it will be seen from figure 1 that the protective unit
In 22 optical path between the half-reflecting half mirror 21 and the monitoring device 30.And the protective unit 22 and described half is instead
Pellicle mirror 21 is connected；When the laser that the laser cell 10 exports is transmitted to the optical unit 20, the protective unit 22
It closes, laser reflexes to the substrate 50 by half-reflecting half mirror 21, and the scanning information that the substrate 50 reflects is transmitted to the light
When learning unit 20, the protective unit 22 is opened, and scanning information directly passes through half-reflecting half mirror 21 and is transmitted to the monitoring device
30。
Before the laser of the laser cell 10 output reflexes to the substrate 50 by optical unit 20, by a rotation
Camera lens 60 is additionally provided with rotating lens 60 in the optical path between the optical unit 20 and the substrate 50, for adjusting
The hot spot of laser.
The monitoring device 30 includes lens 31 and imaging sensor 32, and the lens 31 are swept for amplifying or/and filtering
Information is retouched, described image sensor 32 carries out signal conversion to the scanning information, the scanning information is converted by optical signal
For electric signal, and it is transmitted to the feedback device 40；The feedback device 40 according to the position of the scanning information analyzing defect,
Thus type and size judge the wavelength and energy of the laser needed, and this analysis result are fed back to the laser cell.This
In embodiment, the type of the defect includes foreign matter residual or/and route missing, as shown in Figure 1, the defect is on substrate
Foreign matter residual, it should be noted that in other embodiments, other for being also possible to be easy to produce on the art substrate lack
It falls into, is repaired suitable for laser.
It is understood that can also be lacked with manual setting laser cell in scanning before on-line automatic repairing substrate defect
The wavelength and energy of laser when falling into and repairing defect, avoid the need for laser repairing defect using fixed wavelength and energy without
Method setting, such as: the wavelength and energy size of different time sections laser are set by program (recipe), and first time period swashs
Light is used for scanning substrate, and the laser of second time period is for repairing defect, the wavelength and energy of the laser of the second time period
Size needs are determined according to a large amount of test data.
In the present embodiment, the substrate is glass substrate, forms the defect formed during route on the glass substrate
(foreign matter residual, route missing etc.), can be carried out scarce using the method for on-line automatic repairing substrate defect of the present invention
Sunken reparation；In other embodiments, the substrate is also possible to the substrate of other materials used by those skilled in the art,
As long as the defect of the substrate is suitable for laser repairing, the side of on-line automatic repairing substrate defect of the present invention can be used
Method is operated.
Correspondingly, the present invention also provides a kind of method of on-line automatic repairing substrate defect, on-line automatic repaired using above-mentioned
The system of complex radical board defect.As shown in Fig. 2, its side for on-line automatic repairing substrate defect provided by one embodiment of the invention
The flow chart of method.Fig. 1 and Fig. 2 are please referred to, specific step is as follows for the method for on-line automatic repairing substrate defect:
Step S01: laser cell 10 emits laser；Frequency division module 13 is in close state；
Step S02: optical unit 20 reflects the defect information that the laser scans the substrate to substrate 50；Protection is single
Member 22 is closed, and the rotating lens 60 being arranged between optical unit 20 and substrate adjusts the hot spot of laser；
Step S03: monitoring device 30 receives the scanning information for reflecting and passing through the optical unit 20 from the substrate 50,
And the scanning information is transmitted to feedback device 40；Protective unit 22 is opened, and scanning information directly passes through optical unit 20；
Step S04: the feedback device 40 analyzes the scanning information and obtains scanning result and feed back to scanning result
The laser cell 10；
Step S05: the laser cell 10 is according to the different output different-energies of scanning result and the laser of wavelength and leads to
It crosses the optical unit 20 and reflexes to the substrate 50, the defect is removed or repaired；Frequency division module 13 is opened at this time,
Suitable optical maser wavelength and energy are adjusted by the result that feedback device 40 is fed back.
In conclusion passing through laser cell, optics list in the method for on-line automatic repairing substrate defect provided by the invention
The use of member and monitoring device can be realized high-precision and be scanned with the defect of accurate scan substrate；Meanwhile feedback dress is set
It sets, feedback device receives the scanning information of the base board defect of monitoring device transmission, and scanning result is fed back to laser by analyzing
Unit, so that the wavelength and energy of laser are adjusted, it is on-line automatic that defect is removed or repaired, repair time is saved, is avoided
The waste of human resources caused by manual reparation reduces defect repair cost, improves remediation efficiency.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair
Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims
Range.
Claims (10)
1. a kind of system of on-line automatic repairing substrate defect characterized by comprising laser cell, optical unit, monitoring dress
It sets and feedback device；The laser cell is for emitting laser；The optical unit for reflecting the laser to substrate, from
And scan the defect information of the substrate；The monitoring device reflects from the substrate for receiving and passes through the optical unit
Scanning information, and the scanning information is transmitted to the feedback device；The feedback device is for analyzing the scanning letter
Breath obtains scanning result and scanning result is fed back to the laser cell；And the laser cell is used for according to scanning result
Different output different-energies and wavelength laser and the substrate is reflexed to by the optical unit, with to the defect into
Row removes or repairing.
2. the system of on-line automatic repairing substrate defect as described in claim 1, which is characterized in that the laser cell packet
It includes: laser source and the first attenuator；The laser source for emitting laser, first attenuator for changing laser energy
Amount.
3. the system of on-line automatic repairing substrate defect as claimed in claim 2, which is characterized in that the laser cell also wraps
Frequency division module is included, the frequency division module includes frequency divider and the second attenuator, and the frequency divider is used to control the wavelength of laser, institute
The second attenuator is stated for controlling the energy of the laser after changing wavelength；The frequency division module can rotate integrally.
4. the system of on-line automatic repairing substrate defect as described in claim 1, which is characterized in that the optical unit includes
Half-reflecting half mirror and protective unit, optical path of the protective unit between the half-reflecting half mirror and the monitoring device
On.
5. the system of on-line automatic repairing substrate defect as described in claim 1, which is characterized in that the monitoring device includes
Lens and imaging sensor, the lens for amplify or/and filter scan information, described image sensor to scanning information into
The conversion of row signal, is converted to electric signal by optical signal for the scanning information.
6. a kind of system using the described in any item on-line automatic repairing substrate defects of Claims 1 to 55 carries out on-line automatic
The method of repairing substrate defect characterized by comprising
Laser cell emits laser；
Optical unit reflects the defect information that the laser scans the substrate to substrate；
Monitoring device receives the scanning information that the optical unit is reflected and passed through from the substrate, and the scanning information is passed
Transport to feedback device；
Feedback device analyzes the scanning information and obtains scanning result and scanning result is fed back to the laser cell；And
Laser cell is reflected according to the different output different-energies of scanning result and the laser of wavelength and by the optical unit
To the substrate, the defect is removed or be repaired.
7. the method for on-line automatic repairing substrate defect as claimed in claim 6, which is characterized in that described in the laser scanning
When the defect information of substrate, frequency division module is rotated to closed state, the laser directly passes through the frequency division module；The laser
When the defect is removed or repaired, the frequency division module is rotated to open state, the frequency division module changes laser
Wavelength and energy.
8. the method for on-line automatic repairing substrate defect as claimed in claim 6, which is characterized in that the laser cell output
Laser when being transmitted to the optical unit, protective unit is closed, and the laser is reflected onto the substrate；The substrate reflection
Scanning information when being transmitted to the optical unit, the protective unit is opened, and the scanning information passes through the optical unit；
Before the laser reflexes to the substrate by the optical unit, by a rotating lens, to adjust the hot spot of laser.
9. the method for on-line automatic repairing substrate defect as claimed in claim 6, which is characterized in that the feedback device according to
Thus position, type and the size of the scanning information analyzing defect judge the wavelength and energy of the laser needed, and by this point
Analysis result feeds back to the laser cell；The type of the defect includes foreign matter residual and/or route missing.
10. the method for on-line automatic repairing substrate defect as claimed in claim 6, which is characterized in that on-line automatic reparation base
Before board defect, the wavelength and energy of manual setting laser cell laser when scanning defect and repairing defect.
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| CN106782247B (en) * | 2017-01-05 | 2021-01-15 | 京东方科技集团股份有限公司 | Device and method for repairing bad display panel |
| CN107367516B (en) * | 2017-07-19 | 2020-08-04 | 武汉华星光电半导体显示技术有限公司 | Coating detection and repair device and method thereof |
| CN110010514A (en) * | 2019-03-20 | 2019-07-12 | 上海华虹宏力半导体制造有限公司 | Online bug repairing apparatus and method in wafer manufacturing process |
| CN114012350A (en) * | 2021-11-11 | 2022-02-08 | 云谷（固安）科技有限公司 | Evaporation mask plate maintenance device, system and method |
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