CN203197459U - Optical element laser preprocessing and repairing device with on-line detection function - Google Patents
Optical element laser preprocessing and repairing device with on-line detection function Download PDFInfo
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- CN203197459U CN203197459U CN 201320109986 CN201320109986U CN203197459U CN 203197459 U CN203197459 U CN 203197459U CN 201320109986 CN201320109986 CN 201320109986 CN 201320109986 U CN201320109986 U CN 201320109986U CN 203197459 U CN203197459 U CN 203197459U
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Abstract
The utility model discloses an optical element laser preprocessing and repairing device with an on-line detection function. The optical element laser preprocessing and repairing device with the on-line detection function comprises a laser preprocessing and repairing system and an on-line detection system. The laser preprocessing and repairing system comprises a preprocessing light source or a repairing light source arranged relative to the surface of an optical element, a first optical switch arranged at the rear end of the preprocessing light source or the rear end of the repairing light source and located at the front end of the surface of the optical element and a light energy adjustment device, wherein the first optical switch and the light energy adjustment device are arranged at the rear end of the preprocessing light source or the rear end of the repairing light source and are located at the front end of the surface of the optical element. The on-line detection system comprises a pump light source, a second optical switch, a light adjustment device, a fluorescence imaging detection system or an infrared imaging detection system, wherein the second optical switch and the light adjustment device are arranged at the rear end of the pump light source and are located between the surface, generating fluorescence, of the optical element and the surface, generating infrared radiation, of the optical element. Being introduced to the laser preprocessing and repairing system and used for conducting on-line detection on a laser processing region or a laser repairing region of the optical element, a non-contact on-line detection system ensures desired effect of processing and repairing, and greatly simplifies the processing and manufacturing process of a large-diameter optical element.
Description
Technical field
The utility model relates to optical element laser treatment and reparation field, specifically is a kind of optical element laser pre-treated with online detection and the device of reparation.
Background technology
High power or high-octane strong laser system manufactures and designs and application process in, the damage from laser of optical element usually is the key factor of restriction related system operation level.The laser damage threshold of these optical elements is usually far below the material intrinsic damage threshold that is used for making this element.Be example with the heavy caliber element of fused silica that is used for laser inertial confinement nuclear fusion system, it is one of key factor of the design of restriction related system and research and development in the damage threshold of the 355 nanometer Ultra-Violet Laser wave bands intrinsic threshold value far below the pure quartz material that is used for making this element.
The main cause that this phenomenon takes place is in the optical element process, as cutting, grinding, polishing etc., inevitably can introduce various defectives and pollution, particularly element the surface and inferior surf zone, cause the optical quality on its surface and inferior surface often to get much than the intrinsic property difference of associated materials, thereby make the surface of related elements and inferior surface in light laser is used, become the limiting element bottleneck of performance, become the weak link of the easiest generation damage from laser.
The method that improves optical element laser damage threshold has a lot, comprise new material development, new technology exploitation and to the improvement of traditional optical processing technology etc.Facts have proved, a kind of method of very effective raising optical element laser damage threshold is laser treatment, namely in the optical element completion of processing, under the subthreshold value condition, element is carried out 100% laser irradiation that covers before coming into operation, cause defective and the pollution of damage from laser easily to remove element surface.If this method is used proper all very effective to optical thin film, vitreous silica and KDP crystal.
A kind of method similar but different with laser treatment is laser repairing process.The main purpose of laser treatment is under the subdamage threshold condition " not having wound " or " Wicresoft " cleaning to be carried out in element surface pollution and microdefect, in order to improve the laser " initial damage threshold value " of element, that is element produces the threshold value of damage from laser first in laser system is used; And laser repairing process is to being carried out repair process by the breakdown point of damage from laser so that the breakdown point performance can settle out, thereby in follow-up laser irradiation process can slow down growth rate even no longer take place further to increase of related damages point.
Existing laser treatment and laser repairing process mainly all are to formulate concrete technology at a series of experiment basis, handle by technology then, and the differentiation of technology success or not is directly tested to carry out in the back that disposes by damage from laser.Do to solve some problems like this, but be difficult to obtain optimal effectiveness.Optical elements of large caliber manufacturing cost costliness in addition reaches suitable effect and does not just directly carry out injury experiment or drop into actual the use if handle and repair the result, is easy to generate the destruction of element and scraps, and causes unnecessary heavy losses.Therefore, if in carrying out laser treatment and laser repair process, can carry out online detection to processing and repairing effect, just particularly necessary with processing and the repairing effect that reaches optimum according to the corresponding technology of testing result real-time optimization adjustment.
The utility model content
The technical problems to be solved in the utility model provides a kind of optical element laser pre-treated with online detection and the device of reparation, in laser treatment and laser repair system, introduce contactless on-line detecting system, be used for online detection is carried out in laser treatment zone or the laser repairing zone of optical element, guarantee that processing and reparation produce a desired effect, need not to verify by follow-up breaking test again and handle and repairing effect, simplify the processing and making process of optical elements of large caliber greatly, also saved cost greatly.
The technical solution of the utility model is:
Have the optical element laser pre-treated of online detection and the device of reparation, include laser pre-treated and repair system, described laser pre-treated and repair system include preliminary treatment light source or the reparation light source that relative optical element surface arranges, and on-line detecting system; Described laser pre-treated and repair system also include first photoswitch and the light energy adjusting device that is arranged at preliminary treatment light source or reparation light source rear end and is positioned at the optical element surface front end, and described on-line detecting system includes be used to the pump light source that excites optical element surface fluorescence and infra-red radiation, be arranged at pump light source rear end and second photoswitch and optic modulating device between the surface of optical element generation fluorescence and infra-red radiation, the infrared imaging detection system that is used for obtaining the fluorescence imaging detection system of fluorescence imaging image or is used for obtaining the infrared imaging image.
Described fluorescence imaging detection system includes the fluorescence imaging device that relative optical element produces the surface setting of fluorescence and infra-red radiation, is arranged at fluorescence filtering apparatus and the fluorescence detection device of fluorescence imaging device rear end in turn; Described infrared imaging detection system includes the infreared imaging device that relative optical element produces the surface setting of fluorescence and infra-red radiation, is arranged at infrared filtering device and the infrared detection device of infreared imaging device rear end in turn.
The first light energy sniffer after described laser pre-treated and repair system also include the first light splitting wedge that is arranged at first photoswitch and light energy adjusting device rear end and be arranged at the first light splitting wedge, one output, another output of the relative first light splitting wedge of described optical element surface arranges; The second light energy sniffer after described on-line detecting system also includes the second light splitting wedge that is arranged at second photoswitch and optic modulating device rear end and is arranged at the second light splitting wedge, one output, another output of the surperficial relative second light splitting wedge that described optical element produces fluorescence and infra-red radiation arranges.
Described laser pre-treated and repair system also include the first beam shaping treating apparatus and first beam condenser that is arranged at preliminary treatment light source or reparation light source rear end and is positioned at the optical element surface front end; Described on-line detecting system also includes and is arranged at the pump light source rear end and is positioned at the second beam shaping treating apparatus and second beam condenser that optical element produces the surperficial front end of fluorescence and infra-red radiation.
Described optical element laser pre-treated and the prosthetic device that has online detection also comprises pump light source incident angle adjusting device
Described fluorescence detection device is the fluorescent probe array, selects the CCD camera for use; Described infrared detection device is infrared detector array, selects infrared camera for use.
Advantage of the present utility model:
The utility model is when carrying out laser treatment or repairing, introduce on-line detecting system, can obtain the realtime graphic of optical element surface and inferior surf zone defective, namely the real-time online detection is carried out in preliminary treatment and repairing effect, can suitably adjust the technical process of preliminary treatment and reparation according to testing result, guarantee that preliminary treatment and reparation produce a desired effect, need not to verify preliminary treatment and repairing effect by follow-up breaking test again, simplify the processing and making process of optical elements of large caliber greatly, also saved cost greatly.In addition, when carrying out laser repairing, be introduced in the line defect detection system, can accurately locate the position of defective, fix a point to repair, can improve the efficient of repair process greatly.
The utility model can be used for fields such as the laser pre-treated, the reparation of damage from laser point of vitreous silica, KDP crystal, BK7 glass and all kinds of other laser materials and film, be specially adapted to optical elements of large caliber surface in the ultra-large type laser system and the laser pre-treated of subsurface defect point, and the laser repairing of surface and inferior surface laser impaired loci.
Description of drawings
Fig. 1 is the structural representation with the device of the optical element laser pre-treated of online detection and reparation that is applied to the transmissive optical element in the utility model specific embodiment.
Fig. 2 is the structural representation with the device of the optical element laser pre-treated of online detection and reparation that is applied to reflective optical components in the utility model specific embodiment.
The specific embodiment
Embodiment 1
See Fig. 1, a kind of be applied to the transmissive optical element with the optical element laser pre-treated of online detection and the device of reparation, include laser pre-treated and repair system and on-line detecting system; Laser pre-treated and repair system include preliminary treatment light source or the reparation light source 1 that relative optical element 8 one surfaces (front surface or rear surface) arrange, be arranged at the preliminary treatment light source in turn or repair light source 1 rear end and be positioned at first photoswitch 2 of optical element 8 one surfaces (front surface or rear surface) front end, light energy adjusting device 3 and the first light splitting wedge 4, be arranged at the first light energy sniffer 5 behind the first light splitting wedge, 4 one outputs, be arranged at behind the first light splitting wedge, 4 another outputs and be positioned at the first beam shaping treating apparatus 6 and first beam condenser 7 of optical element 8 one surfaces (front surface or rear surface) front end; On-line detecting system includes be used to the pump light source 9 that excites optical element one surface (front surface or rear surface) fluorescence and infra-red radiation, be arranged at pump light source 9 rear ends in turn and be positioned at second photoswitch 10 between optical element 8 another surfaces (rear surface or front surface), optic modulating device 11, the second beam shaping treating apparatus 12, second beam condenser 13 and the second light splitting wedge 14, be arranged at the second light energy sniffer 15 behind the second light splitting wedge, 14 1 outputs, the fluorescence imaging device 16 that relative optical element 8 one surfaces (front surface or rear surface) arrange, be arranged at fluorescence filtering apparatus 17 and the fluorescence detection device 18 of fluorescence imaging device 16 rear ends in turn, the relative infreared imaging device 19 that arranges of optical element 8 one surfaces (front surface or rear surface) is arranged at infrared filtering device 20 and the infrared detection device 21 of infreared imaging device 19 rear ends in turn; Wherein, fluorescence detection device 18 is the fluorescent probe array, selects the CCD camera for use; Infrared detection device 21 is infrared detector array, selects infrared camera for use.
A kind of be applied to the transmissive optical element with the optical element laser pre-treated of online detection and the method for reparation, may further comprise the steps:
(1), by the preliminary treatment light source or repair laser beam that light source 1 sends successively through behind first photoswitch 2, light energy adjusting device 3, the first light splitting wedge 4, the sub-fraction light energy is by the reflection of the first wedge plate, 4 incidence surfaces, by 5 detections of the first light energy sniffer, most of light energy of handling is carried out preliminary treatment or reparation to a surface (front surface or rear surface) of optical elements of large caliber 8 samples to optical element 8 through the first beam shaping treating apparatus 6 and first beam condenser, 7 post-concentrations again through behind the first wedge plate 4;
(2), in the process of carrying out preliminary treatment and reparation, utilize on-line detecting system that the effect of laser pre-treated or reparation is carried out online real-time detection, specific implementation process is as follows: the pump beam that is sent by pump light source 9 is successively through second photoswitch 10, optic modulating device 11, the second beam shaping treating apparatus 12, second beam condenser 13 and the second light splitting wedge 14, the sub-fraction light energy is reflected by the second light splitting wedge, 14 incidence surfaces, surveyed by the second light energy sniffer 15, most of light energy sees through the second light splitting wedge, 14 post-concentrations to another surface (rear surface or front surface) of optical elements of large caliber 8 samples, excite simultaneously and produce fluorescence and infra-red radiation, fluorescence signal process fluorescence imaging device 16 by optical element 8 samples one surfaces (front surface or rear surface) outgoing, behind the fluorescence filtering apparatus 17, surveyed by fluorescence detection device 18, obtain the image of fluorescence imaging; From the infrared radiation signal of optical element 8 samples one surfaces (front surface or rear surface) outgoing through infreared imaging device 19, infrared absorption filter wave apparatus 20 after, surveyed by infrared detection device 21, obtain the image of infrared imaging.
In optical element 8 sample pretreatments and the repair process, optical element 8 samples are positioned on the clamping scanning means.When carrying out laser pre-treated, select suitable laser parameter, come optical element 8 samples are scanned by the clamping scanning means, with the radiation treatment that realizes optical element 8 sample surfaces 100% are covered.When carrying out laser repairing, repair light source and can select with different defect types according to different optical element sample.At coated optical element sample surfaces defective not, can utilize wave band under mid-infrared laser, to repair; And for the coated optical element sample, the defective on the rete can be utilized ultrafast laser reparation.
Allow preliminary treatment or reparation light beam and pump beam replace illumination optical element 8 by first photoswitch 2 and second photoswitch 10, realize the limit preliminary treatment or repair limit imaging detection.
See Fig. 2, a kind of be applied to reflective optical components with the optical element laser pre-treated of online detection and the device of reparation, include laser pre-treated and repair system and on-line detecting system; Laser pre-treated and repair system include preliminary treatment light source or the reparation light source 1 that relative optical element 9 one surfaces (front surface or rear surface) arrange, be arranged at the preliminary treatment light source in turn or repair light source 1 rear end and be positioned at first photoswitch 2 of optical element 9 one surfaces (front surface or rear surface) front end, light energy adjusting device 3 and the first light splitting wedge 4, be arranged at the first light energy sniffer 5 behind the first light splitting wedge, 4 one outputs, be arranged at behind the first light splitting wedge, 4 another outputs and be positioned at the first beam shaping treating apparatus 6 of optical element 9 one surfaces (front surface or rear surface) front end, first beam condenser 7 and dichroic mirror 8; On-line detecting system includes be used to the pump light source 10 that excites optical element one surface (front surface or rear surface) fluorescence and infra-red radiation, be arranged at pump light source 10 rear ends in turn and be positioned at and preliminary treatment light source or repair second photoswitch 11 between the optical element 9 same surfaces (front surface or rear surface) of light source 1 irradiation, optic modulating device 12 and the second light splitting wedge 13, be arranged at the second light energy sniffer 14 behind the second light splitting wedge, 13 1 outputs, be arranged at behind the second light splitting wedge, 13 another outputs and be positioned at the second beam shaping treating apparatus 15 of optical element 9 one surfaces (front surface or rear surface) front end, second beam condenser 16 and high reflective mirror 17, the fluorescence imaging device 18 that relative optical element 9 same surfaces (front surface or rear surface) arrange, be arranged at fluorescence filtering apparatus 19 and the fluorescence detection device 20 of fluorescence imaging device 18 rear ends in turn, the relative infreared imaging device 21 that arranges of optical element 9 same surfaces (front surface or rear surface) is arranged at infrared filtering device 22 and the infrared detection device 23 of infreared imaging device 21 rear ends in turn; Wherein, fluorescence detection device 20 is the fluorescent probe array, selects the CCD camera for use; Infrared detection device 23 is infrared detector array, selects infrared camera for use.
A kind of be applied to reflective optical components with the optical element laser pre-treated of online detection and the method for reparation, may further comprise the steps:
(1), by the preliminary treatment light source or repair laser beam that light source 1 sends successively through behind first photoswitch 2, light energy adjusting device 3, the first light splitting wedge 4, the sub-fraction light energy is by the reflection of the first wedge plate, 4 incidence surfaces, by 5 detections of the first light energy sniffer, most of light energy of handling is also carried out preliminary treatment or reparation to a surface (front surface or rear surface) of optical elements of large caliber 9 to optical element 8 through dichroic mirror 8 post-concentrations through the first beam shaping treating apparatus 6 and first beam condenser 7 again through behind the first wedge plate 4;
(2), in the process of carrying out preliminary treatment and reparation, utilize on-line detecting system that the effect of laser pre-treated or reparation is carried out online real-time detection, specific implementation process is as follows: the pump beam that is sent by pump light source 10 is successively through second photoswitch 11, optic modulating device 12 and the second light splitting wedge 13, the sub-fraction light energy is reflected by the second wedge plate, 13 incidence surfaces, surveyed by the second light energy sniffer 14, most of light energy of handling is through behind the second wedge plate 13, again through the second beam shaping treating apparatus 15 and and first beam condenser 16, finally by high reflective mirror 17 reflections, dichroic mirror 8 reflection post-concentrations are to a surface (front surface or rear surface) of optical elements of large caliber 9, fluorescence signal process fluorescence imaging device 18 by optical element 8 samples one surfaces (front surface or rear surface) outgoing, behind the fluorescence filtering apparatus 19, surveyed by fluorescence detection device 20, obtain the image of fluorescence imaging; From the infrared radiation signal of optical element 9 samples one surfaces (front surface or rear surface) outgoing through infreared imaging device 21, infrared absorption filter wave apparatus 22 after, surveyed by infrared detection device 23, obtain the image of infrared imaging.
Allow preliminary treatment or reparation light beam and pump beam replace illumination optical element 9 by first photoswitch 2 and second photoswitch 11, realize the limit preliminary treatment or repair limit imaging detection; Dichroic mirror 8 and high reflective mirror 17 are pump light source incident angle adjusting device, are used for adjusting the incident angle of the relative optical element 9 of pump light source.
Claims (6)
1. have the optical element laser pre-treated of online detection and the device of reparation, include laser pre-treated and repair system, described laser pre-treated and repair system include preliminary treatment light source or the reparation light source that relative optical element surface arranges, and it is characterized in that: described optical element laser pre-treated and the prosthetic device that has online detection also includes on-line detecting system; Described laser pre-treated and repair system also include first photoswitch and the light energy adjusting device that is arranged at preliminary treatment light source or reparation light source rear end and is positioned at the optical element surface front end, and described on-line detecting system includes be used to the pump light source that excites optical element surface fluorescence and infra-red radiation, be arranged at pump light source rear end and second photoswitch and optic modulating device between the surface of optical element generation fluorescence and infra-red radiation, the infrared imaging detection system that is used for obtaining the fluorescence imaging detection system of fluorescence imaging image or is used for obtaining the infrared imaging image.
2. the optical element laser pre-treated of online detection and the device of reparation of having according to claim 1, it is characterized in that: described fluorescence imaging detection system includes the fluorescence imaging device that relative optical element produces the surface setting of fluorescence and infra-red radiation, is arranged at fluorescence filtering apparatus and the fluorescence detection device of fluorescence imaging device rear end in turn; Described infrared imaging detection system includes the infreared imaging device that relative optical element produces the surface setting of fluorescence and infra-red radiation, is arranged at infrared filtering device and the infrared detection device of infreared imaging device rear end in turn.
3. the optical element laser pre-treated of online detection and the device of reparation of having according to claim 1, it is characterized in that: the first light energy sniffer after described laser pre-treated and repair system also include the first light splitting wedge that is arranged at first photoswitch and light energy adjusting device rear end and be arranged at the first light splitting wedge, one output, another output of the relative first light splitting wedge of described optical element surface arranges; The second light energy sniffer after described on-line detecting system also includes the second light splitting wedge that is arranged at second photoswitch and optic modulating device rear end and is arranged at the second light splitting wedge, one output, another output of the surperficial relative second light splitting wedge that described optical element produces fluorescence and infra-red radiation arranges.
4. the optical element laser pre-treated of online detection and the device of reparation of having according to claim 1 is characterized in that: described laser pre-treated and repair system also include and are arranged at the preliminary treatment light source or repair the light source rear end and be positioned at the first beam shaping treating apparatus and first beam condenser of optical element surface front end; Described on-line detecting system also includes and is arranged at the pump light source rear end and is positioned at the second beam shaping treating apparatus and second beam condenser that optical element produces the surperficial front end of fluorescence and infra-red radiation.
5. the optical element laser pre-treated of online detection and the device of reparation of having according to claim 1, it is characterized in that: described optical element laser pre-treated and the prosthetic device that has online detection also comprises pump light source incident angle adjusting device.
6. the optical element laser pre-treated of online detection and the device of reparation of having according to claim 2, it is characterized in that: described fluorescence detection device is the fluorescent probe array, selects the CCD camera for use; Described infrared detection device is infrared detector array, selects infrared camera for use.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320109986 CN203197459U (en) | 2013-03-12 | 2013-03-12 | Optical element laser preprocessing and repairing device with on-line detection function |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320109986 CN203197459U (en) | 2013-03-12 | 2013-03-12 | Optical element laser preprocessing and repairing device with on-line detection function |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103100792A (en) * | 2013-03-12 | 2013-05-15 | 合肥知常光电科技有限公司 | Laser preprocessing and restoring method and device having on-line detection function and used for optical elements |
| CN105665919A (en) * | 2014-11-19 | 2016-06-15 | 昆山国显光电有限公司 | On-line automatic substrate defect repairing system and method |
| CN106271125A (en) * | 2016-08-23 | 2017-01-04 | 江苏彤明车灯有限公司 | A kind of method based on double CCD Computer Vision Recognition mould repair states |
-
2013
- 2013-03-12 CN CN 201320109986 patent/CN203197459U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103100792A (en) * | 2013-03-12 | 2013-05-15 | 合肥知常光电科技有限公司 | Laser preprocessing and restoring method and device having on-line detection function and used for optical elements |
| CN103100792B (en) * | 2013-03-12 | 2015-04-22 | 合肥知常光电科技有限公司 | Laser preprocessing and restoring method and device having on-line detection function and used for optical elements |
| CN105665919A (en) * | 2014-11-19 | 2016-06-15 | 昆山国显光电有限公司 | On-line automatic substrate defect repairing system and method |
| CN105665919B (en) * | 2014-11-19 | 2018-12-11 | 昆山国显光电有限公司 | The system and method for on-line automatic repairing substrate defect |
| CN106271125A (en) * | 2016-08-23 | 2017-01-04 | 江苏彤明车灯有限公司 | A kind of method based on double CCD Computer Vision Recognition mould repair states |
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Granted publication date: 20130918 |