CN107783242B - Automatic focusing device and block LIBS online detection device adopting same - Google Patents
Automatic focusing device and block LIBS online detection device adopting same Download PDFInfo
- Publication number
- CN107783242B CN107783242B CN201710996840.1A CN201710996840A CN107783242B CN 107783242 B CN107783242 B CN 107783242B CN 201710996840 A CN201710996840 A CN 201710996840A CN 107783242 B CN107783242 B CN 107783242B
- Authority
- CN
- China
- Prior art keywords
- lens
- laser
- reflector
- area array
- array ccd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
- G02B7/09—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted for automatic focusing or varying magnification
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
Abstract
The invention relates to a laser-induced breakdown spectroscopy technology, in particular to an automatic focusing device and a block LIBS online detection device adopting the same. An automatic focusing device comprises a lens group, a fluorescent reflector with a hole at the center, an area array CCD and a computer; the lens group comprises a first lens, a second lens and a third lens which are positioned on the same main optical axis; the second lens is a concave lens and is positioned between the first lens and the third lens; the first lens and the third lens are convex lenses and are fixed in position; the second lens is arranged on a driving device and can move between the first lens and the third lens along the main optical axis; the fluorescent reflector is positioned on one side of the first lens, which is not adjacent to the second lens; the area array CCD is positioned on the reflection light path of the fluorescence reflector. The invention does not need a distance measuring device and can automatically focus according to the height of the material on the conveying belt. The defects that the common zoom lens has limited analyzable wave band, can not analyze ultraviolet spectrum, has complex structure and is easy to be polluted by dust are overcome.
Description
Technical Field
The invention relates to a laser-induced breakdown spectroscopy technology, in particular to an automatic focusing device and a block LIBS online detection device adopting the same.
Background
Laser Induced Breakdown Spectroscopy (LIBS) is a substance composition detection technique based on laser emission spectroscopy. High-energy pulse laser is focused on the surface of the sample through a lens, atoms near the surface of the sample are excited and ionized to form plasma, and the composition and the content of elements in the sample can be obtained by measuring the wavelength and the intensity of a spontaneous emission spectral line of the plasma. Compared with the traditional detection method, the LIBS technology has the advantages of high measurement speed, no need of sample pretreatment, simultaneous multi-element analysis, no radiation and the like, and is very suitable for real-time and on-line detection of material components. The method has wide application potential in industrial and agricultural production process control such as electric power, coal mine, metallurgy, cement, crop detection and the like.
The LIBS technology is used for analyzing, laser needs to be focused on the surface of a sample, so that the distance from the surface of the sample to a focusing lens needs to be constant, and the on-line analysis is difficult for the blocky objects on the conveying belt due to unequal sizes, uneven distribution, large void ratio and uneven surface. The applicant discloses an online detection technology, which utilizes a zoom lens with a driving motor to automatically adjust the focal length of the lens according to the height of a material to realize automatic focusing of the material on a conveyor belt. The common zoom lens is made of glass, and the transmittance of the glass to light radiation in an ultraviolet band is very low, and particularly, the transmittance of the glass to a band with the wavelength of below 300nm is very low. The LIBS system converges the plasma spectrum through the lens, so the spectrum of the ultraviolet band cannot be analyzed by using the zoom lens. If a quartz lens is adopted, the transmissivity to ultraviolet rays is high, but the number of lenses of the zoom lens is large, the structure is complex, if the lens is polished by quartz again, the procedure is complex, the process is complex, and the later modification cost is high.
Therefore, it is necessary to provide an automatic zoom apparatus with a small number of lenses and a simple structure for an LIBS online analysis system using a quartz lens.
Disclosure of Invention
The invention provides an automatic focusing device and a block LIBS online detection device adopting the same, aiming at solving the technical problems that the spectral analysis range is limited and the zoom lens structure is complex and difficult to adjust when the existing LIBS system is used for analyzing the material components.
The automatic focusing device is realized by adopting the following technical scheme: an automatic focusing device comprises a lens group, a fluorescent reflector with a hole at the center, an area array CCD and a computer; the lens group comprises a first lens, a second lens and a third lens which are positioned on the same main optical axis; the second lens is a concave lens and is positioned between the first lens and the third lens; the first lens and the third lens are convex lenses and are fixed in position; the second lens is arranged on a driving device and can move between the first lens and the third lens along the main optical axis; the fluorescent reflector is positioned on one side of the first lens, which is not adjacent to the second lens; the area array CCD is positioned on a reflection light path of the fluorescence reflector; the signal output end of the area array CCD is connected with the signal input end of the computer; the signal output end of the computer is connected with the signal input end of the driving device.
The automatic focusing device can conveniently and quickly complete automatic focusing operation. When focusing is carried out, an image formed by the material to be measured through the lens group is reflected to the area array CCD by the fluorescent reflector, the area array CCD converts the collected light intensity signal into a corresponding electric signal and then inputs the electric signal into the computer, and the computer judges the signal by adopting a set judgment rule. The focusing determination rule is as follows: according to the imaging rule of the lens, when the material is just positioned at the focal point of the lens group, light rays emitted from the material position are approximately parallel light after being converged by the lens group, and at the moment, the light intensity at each pixel point on the area array CCD is approximately the same, namely, the standard deviation of the light intensity of each pixel point on the CCD is the minimum. Therefore, the second lens is moved up and down to change the focal length of the lens group, and the computer processes the light intensity data of each pixel point on the CCD at the same time, so that focusing is just finished when the standard deviation of the light intensity is minimum.
Furthermore, the driving device comprises a stepping motor, a screw rod arranged at the output end of the stepping motor and a nut arranged on the screw rod; the nut is provided with a mirror bracket which is vertical to the screw rod; the mirror bracket is provided with a mounting hole and a second lens; the pair of sliding rods is parallel to the direction of the screw rod; the mirror bracket is sleeved on the sliding rod in a sliding manner; the signal output end of the computer is connected with the signal input end of the stepping motor.
The second lens is arranged on the mirror bracket, one end of the screw rod is connected with the stepping motor, the other end of the screw rod is sleeved in the nut, and the nut and the mirror bracket are fixed together. When the stepping motor rotates, the screw rod is driven to rotate, the driving nut and the mirror bracket are used as a sliding block to move up and down along the sliding rod, and the moving distance can be accurately controlled by the rotating angle of the stepping motor, so that the second lens is accurately moved.
The block LIBS online detection device is realized by adopting the following technical scheme: a block LIBS online detection device comprises a laser, a spectrometer, a laser mirror, an optical fiber and a fourth lens; the automatic focusing device is also included; the main optical axis of the lens group is arranged in a vertical state, and the third lens is positioned at the lowest part; the laser reflector is positioned on the emergent light path of the laser; the fluorescent reflector and the lens group are sequentially positioned on a reflecting light path of the laser reflector; the fourth lens is positioned behind the area array CCD; the area array CCD is driven by a micro motor to rotate so that the reflected light of the fluorescent reflector is incident to the fourth lens; one end of the optical fiber is used as a receiving end to receive the fluorescence converged by the fourth lens; the other end of the optical fiber is connected with the input end of the spectrometer; the synchronous output end of the laser is connected with the control end of the spectrometer; the signal output end of the computer is connected with the voltage control port of the laser and the control end of the micro motor.
The method comprises the steps that an image formed by a material to be measured through a lens group is reflected by a fluorescent reflector and then is collected by an area array CCD, a computer controls a driving device to move up and down under the support of corresponding software, meanwhile, light intensity signals collected by the area array CCD are analyzed, when the standard deviation of the light intensity of each pixel point on the area array CCD is minimum, focusing is considered to be completed, at the moment, the computer controls a laser to emit pulse laser, a motor drives the area array CCD to rotate for a certain angle, the laser emitted by the laser is converged to the material to be measured through a laser reflector, a central hole of the fluorescent reflector and the lens group, and the material to be measured is excited by the laser to generate plasma fluorescence; the plasma fluorescence is converged by the lens group and reflected by the fluorescence reflector, then is received by the optical fiber and is transmitted to the spectrometer, and the spectrometer analyzes the received fluorescence signal and obtains the composition information of the material to be measured at the moment.
The second lens (concave lens) is driven by the stepping motor to slide up and down along the slide bar, so that the equivalent focal length of the lens group is changed within a certain range, light rays emitted by materials below the lens group are converged by the lens group and then are reflected to the area array CCD by the fluorescent reflector, and the computer detects the light intensity detected by the area array CCD to judge whether the lens is focused or not. When the position of the second lens moves to a position where the focus of the lens group is just positioned at the height of the material below, the computer sends a control signal to the stepping motor driver to stop the second lens from moving, and sends a control signal to enable the area array CCD to turn upwards to leave the light path (through a corresponding micro motor); triggering a laser, reflecting pulse laser by a laser reflector, passing through a lens group, converging by the lens group, and focusing on the surface of a sample to excite the sample to produce plasma; and when the plasma is cooled, a spectral signal is emitted, converged by the lens group, reflected by the fluorescent reflector, converged by the focusing fourth lens, received by the optical fiber and transmitted to the spectrometer for spectral analysis. The corresponding software is easily written by those skilled in the art.
Further, the focal lengths of the first lens and the third lens are respectively 100mm and 500 mm; the focal length of the second lens is-50 mm; the first and third lenses are spaced apart by 150 mm.
The laser device emits pulse laser with wavelength of 1064nm and beam radius of 3 mm; when the distance from the second lens to the third lens is varied from 95mm to 100mm, the distance from the focal position of the lens group to the third lens is varied from 207mm to 498 mm.
Theoretical calculation and experimental tests show that when the second lens moves up and down for a small distance, the focal position of laser passing through the three-lens system can be greatly changed. When a pulsed laser with a 1064nm wavelength and a 3mm beam radius was tested, the distance from the focal point to the third lens varied from 207mm to 498mm when the distance from the second lens to the third lens was varied from 95mm to 100mm, as shown in fig. 2 and 3. The relationship between the second lens position and the focal position of the lens group was measured with the position of the third lens as a reference point (set as position coordinate 0) as shown in fig. 4.
The preferable parameters of the lens group are that in practical industrial control, the speed of the conveyor belt is generally 1-2 m/s, and as mentioned above, the time required for the second lens to complete the maximum stroke (5 mm back and forth) is less than 5ms, that is, the distance moved by the conveyor belt in the focusing process is less than 1cm, and the depth of field of 0.5mm of the lens group is within the range of +/-3 cm, so that the error caused by the movement of the conveyor belt in the focusing process can be ignored.
The invention discloses an automatic focusing device and a block LIBS online detection device adopting the same, which do not need a distance measuring device and can automatically focus according to the height of a conveying belt material. The defects that the common zoom lens has limited analyzable wave band, can not analyze ultraviolet spectrum, has complex structure and is easy to be polluted by dust are overcome. The three-lens device is adopted, only three quartz lenses form a lens group, only one of the lenses needs to be moved, the equivalent focal length adjustment of the lens group can be realized, and the focal length change of nearly 300mm can be obtained only by the lens moving stroke of 5 mm; meanwhile, a distance sensor is not needed, focusing judgment is carried out according to the imaging rule of the lens, and the complexity of the system is further reduced. The system has simple structure, easy cleaning and low failure rate, and is very suitable for automatic focusing of LIBS online detection.
Drawings
FIG. 1 is a schematic structural diagram of a block LIBS online detection device provided with an automatic focusing device according to the present invention.
FIG. 2 is a schematic diagram illustrating a variation of the focal length of the auto-focusing device according to the present invention.
FIG. 3 is a second schematic diagram illustrating the variation of the focal length of the auto-focusing apparatus according to the present invention.
FIG. 4 is a diagram illustrating the relationship between the second lens position and the focal position of the lens group.
Fig. 5 is a schematic structural view of the driving device.
1-a first lens, 2-a second lens, 3-a third lens, 4-a fourth lens, 5-a fluorescent reflector, 6-an area array CCD, 7-a computer, 8-a driving device, 9-a laser reflector, 10-a laser, 11-a spectrometer, 12-an optical fiber, 13-a shell, 14-a blowing device, 15-an air inlet, 16-an air outlet and 17-a conveying belt running direction;
81-step motor, 82-screw rod, 83-nut, 84-mirror bracket and 85-sliding rod.
Detailed Description
An automatic focusing device comprises a lens group, a fluorescent reflector 5 with a hole at the center, an area array CCD6 and a computer 7; the lens group comprises a first lens 1, a second lens 2 and a third lens 3 which are positioned on the same main optical axis; the second lens 2 is a concave lens and is positioned between the first lens 1 and the third lens 3; the first lens 1 and the third lens 3 are convex lenses and are fixed in position; the second lens 2 is arranged on a driving device 8 and can move between the first lens 1 and the third lens 3 along the main optical axis; the fluorescent reflector 5 is positioned on one side of the first lens 1, which is not adjacent to the second lens 2; the area array CCD6 is positioned on the reflection light path of the fluorescence reflector 5; the signal output end of the area array CCD6 is connected with the signal input end of the computer 7; a signal output of the computer 7 is connected to a signal input of the drive device 8.
The driving device 8 comprises a stepping motor 81, a screw rod 82 arranged at the output end of the stepping motor 81 and a nut 83 arranged on the screw rod 82; a lens frame 84 vertical to the screw rod 82 is arranged on the nut 83; the mirror bracket 84 is provided with a mounting hole and a second lens 2; a pair of sliding rods 85 parallel to the direction of the screw rod 82; the mirror bracket 84 is sleeved on the sliding rod 85 in a sliding manner; the signal output of the computer 7 is connected to the signal input of the stepper motor 81.
A block LIBS online detection device comprises a laser 10, a spectrometer 11, a laser mirror 9, an optical fiber 12 and a fourth lens 4; the automatic focusing device is also included; the main optical axis of the lens group is arranged in a vertical state, and the third lens 3 is positioned at the lowest part; the laser reflector 9 is positioned on an emergent light path of the laser 10; the fluorescent reflector 5 and the lens group are sequentially positioned on a reflection light path of the laser reflector 9; the fourth lens 4 is positioned behind the area array CCD 6; the area array CCD6 is driven by a micro motor to rotate so that the reflected light of the fluorescent reflector 5 is incident to the fourth lens 4; one end of the optical fiber 12 is used as a receiving end to receive the fluorescence converged by the fourth lens 4; the other end of the optical fiber 12 is connected with the input end of the spectrometer 11; the synchronous output end of the laser 10 is connected with the control end of the spectrometer 11; the signal output end of the computer 7 is connected with the voltage control port of the laser 10 and the control end of the micro motor.
The image formed by the material to be measured through the lens group is collected by the area array CCD6 after being reflected by the fluorescent reflector 5, the computer 7 controls the driving device 8 to move up and down under the support of corresponding software, and simultaneously analyzes the light intensity signal collected by the area array CCD6, when the standard deviation of the light intensity of each pixel point on the area array CCD6 is minimum, the computer 7 considers that the focusing is completed, the computer 7 controls the laser 10 to emit pulse laser, and controls the micro motor to drive the area array CCD6 to rotate for a certain angle, the laser emitted by the laser 10 is converged to the material to be measured through the laser reflector 9, the central hole of the fluorescent reflector 5 and the lens group, and the material to be measured is excited by the laser to generate plasma fluorescence; the plasma fluorescence is converged by the lens group and reflected by the fluorescence reflector 5, then is received by the optical fiber 12 and is transmitted to the spectrometer 11, and the spectrometer 11 analyzes the received fluorescence signal and obtains the composition information of the material to be measured at the moment.
The focal lengths of the first lens 1 and the third lens 3 are respectively 100mm and 500 mm; the focal length of the second lens 2 is-50 mm; the distance between the first and the third lenses 1 and 3 is 150 mm.
The laser 10 emits pulse laser with wavelength of 1064nm and beam radius of 3 mm; when the distance from the second lens 2 to the third lens 3 is changed from 95mm to 100mm, the distance from the lens group focal position to the third lens 3 is changed from 207mm to 498 mm.
Also includes a housing 13; the lens group, the driving device 8, the fluorescent reflector 5, the fourth lens 4, the area array CCD6 and the micro motor thereof, and the laser reflector 9 are all arranged in the shell 13; the bottom of the shell 13 is provided with a light outlet, and the third lens 3 is fixed at the light outlet; the driving device 8 is arranged on the inner side wall of the shell 13; the first lens 1, the fluorescent reflector 5, the laser reflector 9 and the micro motor are all arranged in the shell 13 through a bracket; an opening is formed in the side wall of the middle of the shell 13, and the receiving end of the optical fiber 12 is arranged at the opening; the upper part of the side wall of the shell 13 is provided with a laser inlet, and the emergent laser of the laser 10 enters the shell 13 through the laser inlet.
A purge device 14 is installed at the bottom of the housing 13 at a position near the light outlet.
The side wall close to the top of the shell 13 is provided with an air inlet 15, and the side wall close to the bottom of the shell 13 is provided with an air outlet 16; the laser inlet is provided with sealing glass, and the light outlet, the opening corresponding to the optical fiber and the position where each line enters the shell are all connected in a sealing way.
Considering the field working condition environment, in order to prevent the pollution of dust to the lens, the whole optical system is sealed, and the air inlet and the air outlet are arranged to form a positive pressure dust removal device, so that a micro positive pressure is kept in the sealed shell. The lower surface of the third lens 3 is exposed out of the sealed shell, and a purging device is arranged below the third lens, so that dust pollution is further weakened.
Claims (6)
1. A block LIBS online detection device comprises a laser (10), a spectrometer (11), a laser mirror (9), an optical fiber (12) and a fourth lens (4); it is characterized by also comprising an automatic focusing device; the automatic focusing device comprises a lens group, a fluorescent reflector (5) with a hole at the center, an area array CCD (6) and a computer (7); the lens group comprises a first lens (1), a second lens (2) and a third lens (3) which are positioned on the same main optical axis; wherein the second lens (2) is a concave lens and is positioned between the first lens (1) and the third lens (3); the first lens (1) and the third lens (3) are convex lenses and are fixed in position; the second lens (2) is arranged on a driving device (8) and can move between the first lens (1) and the third lens (3) along the main optical axis; the fluorescent reflector (5) is positioned on one side of the first lens (1) which is not adjacent to the second lens (2); the area array CCD (6) is positioned on a reflection light path of the fluorescence reflector (5); the signal output end of the area array CCD (6) is connected with the signal input end of the computer (7); the signal output end of the computer (7) is connected with the signal input end of the driving device (8); the driving device (8) comprises a stepping motor (81), a screw rod (82) arranged at the output end of the stepping motor (81) and a nut (83) arranged on the screw rod (82); a lens frame (84) which is vertical to the screw rod (82) is arranged on the nut (83); the mirror bracket (84) is provided with a mounting hole and a second lens (2); the device also comprises a pair of sliding rods (85) parallel to the direction of the screw rod (82); the mirror bracket (84) is sleeved on the sliding rod (85) in a sliding manner; the signal output end of the computer (7) is connected with the signal input end of the stepping motor (81);
the main optical axis of the lens group is arranged in a vertical state, and the third lens (3) is positioned at the lowest part; the laser reflector (9) is positioned on an emergent light path of the laser (10); the fluorescent reflector (5) and the lens group are sequentially positioned on a reflection light path of the laser reflector (9); the fourth lens (4) is positioned behind the area array CCD (6); the area array CCD (6) is driven by a micro motor to rotate so that the reflected light of the fluorescent reflector (5) is incident to the fourth lens (4); one end of the optical fiber (12) is used as a receiving end to receive the fluorescence converged by the fourth lens (4); the other end of the optical fiber (12) is connected with the input end of the spectrometer (11); the synchronous output end of the laser (10) is connected with the control end of the spectrometer (11); the signal output end of the computer (7) is connected with the voltage control port of the laser (10) and the control end of the micro motor;
the image formed by the material to be measured through the lens group is collected by the area array CCD (6) after being reflected by the fluorescent reflector (5), the computer (7) controls the driving device (8) to move up and down under the support of corresponding software, meanwhile, the light intensity signal collected by the area array CCD (6) is analyzed, when the standard deviation of the light intensity of each pixel point on the area array CCD (6) is minimum, focusing is considered to be completed, the computer (7) controls the laser (10) to emit pulse laser, and simultaneously controls the micro motor to drive the area array CCD (6) to rotate for a certain angle, the laser emitted by the laser (10) is converged to the material to be measured through the laser reflector (9), the central hole of the fluorescent reflector (5) and the lens group, and the material to be measured is excited by the laser to generate plasma fluorescence; the plasma fluorescence is converged by the lens group and reflected by the fluorescence reflector (5), then is received by the optical fiber (12) and is transmitted to the spectrometer (11), and the spectrometer (11) analyzes the received fluorescence signal and obtains the composition information of the material to be measured at the moment.
2. The mass LIBS online detection device according to claim 1, wherein the focal lengths of the first and third lenses (1, 3) are 100mm and 500mm, respectively; the focal length of the second lens (2) is-50 mm; the distance between the first lens and the third lens (1 and 3) is 150 mm.
3. The mass LIBS online detection device according to claim 2, wherein the laser (10) emits a pulsed laser wavelength of 1064nm with a beam radius of 3 mm; when the distance from the second lens (2) to the third lens (3) is changed from 95mm to 100mm, the distance from the focal position of the lens group to the third lens (3) is changed from 207mm to 498 mm.
4. The mass LIBS in-line detection device according to claim 1, further comprising a housing (13); the lens group, the driving device (8), the fluorescent reflector (5), the fourth lens (4), the area array CCD (6) and the micro motor thereof, and the laser reflector (9) are all arranged in the shell (13); a light outlet is formed in the bottom of the shell (13), and the third lens (3) is fixed at the light outlet; the driving device (8) is arranged on the inner side wall of the shell (13); the first lens (1), the fluorescent reflector (5), the laser reflector (9) and the micro motor are all arranged in the shell (13) through a support; an opening is formed in the side wall of the middle of the shell (13), and a receiving end of the optical fiber (12) is installed at the opening; the upper part of the side wall of the shell (13) is provided with a laser inlet, and the emergent laser of the laser (10) enters the shell (13) through the laser inlet.
5. The block LIBS online detection device as claimed in claim 4, wherein the bottom of the housing (13) is provided with a purging device (14) at a position close to the light outlet.
6. The mass LIBS on-line detection device as claimed in claim 4, wherein the side wall near the top of the housing (13) is provided with an air inlet (15), and the side wall near the bottom of the housing (13) is provided with an air outlet (16); the laser inlet is provided with sealing glass, and the light outlet, the opening corresponding to the optical fiber and the position where each line enters the shell are all connected in a sealing way.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710996840.1A CN107783242B (en) | 2017-10-24 | 2017-10-24 | Automatic focusing device and block LIBS online detection device adopting same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710996840.1A CN107783242B (en) | 2017-10-24 | 2017-10-24 | Automatic focusing device and block LIBS online detection device adopting same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107783242A CN107783242A (en) | 2018-03-09 |
| CN107783242B true CN107783242B (en) | 2020-02-11 |
Family
ID=61435141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710996840.1A Active CN107783242B (en) | 2017-10-24 | 2017-10-24 | Automatic focusing device and block LIBS online detection device adopting same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107783242B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108544109A (en) * | 2018-04-11 | 2018-09-18 | 合肥泰沃达智能装备有限公司 | A kind of laser processing light guide plate protrusion site method |
| CN108459013A (en) * | 2018-06-15 | 2018-08-28 | 北京协同创新研究院 | Sample detection means based on laser induced breakdown spectroscopy |
| CN109297940A (en) * | 2018-09-06 | 2019-02-01 | 中国科学院沈阳自动化研究所 | One kind laser defocusing amount self-checking device and its adjusting method under micro-meter scale |
| PL3973275T3 (en) | 2019-05-23 | 2024-02-26 | Foss Analytical A/S | Auto-focussing libs system |
| CN112545453B (en) * | 2019-09-26 | 2022-11-11 | 上海科技大学 | Probe of handheld photoacoustic imaging device |
| DE102022112766A1 (en) | 2022-05-20 | 2023-11-23 | QuantoLux Innovation GmbH | Spectrometer system for laser-induced plasma spectral analysis |
| DE102022112765B4 (en) | 2022-05-20 | 2023-12-28 | QuantoLux GmbH | Detection unit for the spectral analysis of a laser-induced plasma and laser-induced plasma spectrometer |
| CN115468948A (en) * | 2022-11-15 | 2022-12-13 | 中国科学院沈阳自动化研究所 | Laser-induced breakdown spectroscopy on-line detection device and method for material with fluctuating motion |
| CN115839943B (en) * | 2023-02-13 | 2023-07-11 | 合肥金星智控科技股份有限公司 | Laser-induced spectrum system, spectrum calibration method and electronic equipment |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2338760Y (en) * | 1998-06-25 | 1999-09-15 | 中国科学院光电技术研究所 | Linkage varifocus objective |
| CN1395145A (en) * | 2001-07-06 | 2003-02-05 | 雅客设计有限公司 | Control system of zoom lens of digital camera |
| CN1536386A (en) * | 2003-04-03 | 2004-10-13 | 上海德博实业有限公司 | Photoelectric amplification device for ultra-high-power microscope system |
| CN102661936A (en) * | 2012-05-16 | 2012-09-12 | 江西农业大学 | Portable heavy metal detector |
| DE102013019347A1 (en) * | 2013-08-15 | 2015-02-19 | Carl Zeiss Microscopy Gmbh | High-resolution scanning microscopy |
| US9366634B2 (en) * | 2014-10-22 | 2016-06-14 | Bwt Property, Inc. | Substrate enhanced laser-induced breakdown spectroscopy (LIBS) apparatus |
-
2017
- 2017-10-24 CN CN201710996840.1A patent/CN107783242B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN107783242A (en) | 2018-03-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107783242B (en) | Automatic focusing device and block LIBS online detection device adopting same | |
| US10823679B2 (en) | Scanning type laser induced spectrum analysis and detection system | |
| CN110308119B (en) | Current-carrying type laser-induced breakdown spectroscopy online component analyzer | |
| US20190310463A1 (en) | Deflector | |
| CN102652257A (en) | Means for detecting luminescent and/or light-scattering particles in flowing liquids | |
| TW201447288A (en) | Image synchronization of scanning wafer inspection system | |
| CN211652548U (en) | High-sensitivity Raman spectrometer based on photomultiplier | |
| EP3321731B1 (en) | Terahertz wave generator | |
| CN104931474A (en) | Cement raw material quality online laser detection device and method | |
| CN104390943A (en) | Microscopic imaging system capable of simultaneously obtaining appearance image and element distribution image | |
| CN110987900A (en) | High-sensitivity Raman spectrometer based on photomultiplier | |
| CN209992396U (en) | Microscopic imaging full-spectrum high-voltage module time-resolved fluorescence measurement system | |
| CN106092997B (en) | Flame detecting device and method based on PLIF technology | |
| CN105665919B (en) | The system and method for on-line automatic repairing substrate defect | |
| CN109596601A (en) | A kind of device and method of rapid Optimum laser induced breakdown spectroscopy lens distance | |
| KR20130089581A (en) | Extending the lifetime of a deep uv laser in a wafer inspection tool | |
| JP2022527633A (en) | Equipment for operating quality control on industrial production lines, corresponding methods and computer program products | |
| CN215493172U (en) | Microscopic circular polarization fluorescence spectrum detection system based on single photon counting method | |
| JP2015087158A (en) | Terahertz wave measuring device | |
| CN110966928B (en) | Laser processing morphological performance time-resolved differential confocal spectrum measuring method and device | |
| TWI470299B (en) | Method and apparatus for auto-focusing | |
| CN210090311U (en) | Aerosol detection aiming device for laser-induced breakdown spectroscopy technology | |
| US10120264B2 (en) | Terahertz wave generator | |
| KR101881752B1 (en) | defect sensing module based on line-beam and defect sensing device using its arrays for detection of the defects on surface | |
| KR20220022325A (en) | Inspecting system for micro led |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |