WO2009131270A1

WO2009131270A1 - Substrate quality tester

Info

Publication number: WO2009131270A1
Application number: PCT/KR2008/002871
Authority: WO
Inventors: Soon-Jong Lee; Bong-Joo Woo
Original assignee: Semisysco Co., Ltd.
Priority date: 2008-04-25
Filing date: 2008-05-22
Publication date: 2009-10-29
Also published as: KR20090113082A; CN102017114B; TWI391650B; KR100953203B1; CN102017114A; TW200951427A

Abstract

Provided is a substrate quality tester. The substrate quality tester includes an inspection unit integrally provided to an end of a robot support frame installed at a robot to convey a substrate. Therefore, it is possible to solve conveyance instability of the substrate due to increase in weight caused by variation in size of the substrate, stably perform quality inspection of the substrate surface, and stably supply the substrate to process equipment.

Description

Description SUBSTRATE QUALITY TESTER

Technical Field

[1] The present invention relates to a substrate quality tester, and more particularly, to a substrate quality tester for inspecting edge defects, discoloration, and variation in color of a substrate, as well as stains and scratches on the surface of the substrate, existence of foreign substances, generation of swell, and so on, during formation of a thin film transistor (TFT) and a color filter of a thin film transistor liquid crystal display (TFT-LCD), to thereby stably conveying the substrate, regardless of its size. Background Art

[2] As is well known, a TFT-LCD includes a lower substrate on which a TFT is formed, an upper substrate on which a color filter is formed, and liquid crystal injected between the lower substrate and the upper substrate.

[3] In the case of the substrate for forming a TFT and a color filter, when scratches or particles exist on the surface thereof, a film may be irregularly deposited or etched to generate problems of the LCD and damage to a process chamber, and so on. In addition, when the substrate is input into a process chamber in a state that an edge of the substrate is cracked or broken but it is not detected, the substrate may be broken and the broken pieces may be blown to contaminate the interior of the process chamber.

[4] Therefore, before a conventional process of inserting a substrate and performing etching, sputtering, and so on, using plasma, the entire quality inspection of the substrate should be performed.

[5] However, a conventional tester is separately provided from apparatuses used in a process of manufacturing a TFT-LCD. When various processes are repeatedly performed to complete the TFT-LCD, various quality inspections of the substrate should be separately performed to the respective processes. Therefore, the conventional quality inspection of the substrate takes much time to cause economical problems.

[6] In addition, in the conventional stain, scratch, discoloration, and swell inspections of the surface of the substrate, observation results may be different from each other depending on observers subjects to make it difficult to perform accurate observation.

[7] Therefore, in order to solver the problems, the applicant has filed Korean Patent Application No. 2006-30315 (hereinafter, referred to as Prior Patent), and the present invention is improved from Prior Patent. Disclosure of Invention Technical Problem

[8] In order to solve the foregoing and/or other problems, it is an object of the present invention to provide a substrate quality tester capable of solving conveyance instability of a substrate due to increase in weight caused by variation in size of the substrate, stably performing quality inspection of the substrate surface, and stably supplying the substrate to process equipment by integrally providing the tester to an end of a robot support frame installed at a substrate conveyance robot. Technical Solution

[9] The foregoing and/or other aspects of the present invention can be achieved by providing a substrate quality tester including: a robot support frame rotated by a drive part; and a robot part reciprocally coupled to the robot support frame, extracting a substrate mounted on a tray upon rotation of the robot support frame, and supplying the substrate into process equipment, wherein an inspection unit is integrally provided to an end of the robot support frame to check quality of the surface and edge of the substrate in real time when the substrate passes therethrough by reciprocal movement of the robot part, and the inspection unit is controlled by a control unit for synthetically determining whether the substrate is damaged.

[10] The inspection unit may include an inspection frame having a passage through which the substrate passes, and coupled to an end or an end tip of the robot support frame to project to the exterior; an illuminator for irradiating light to the substrate when the substrate passes through the passage; and an image processor for photographing the surface of the substrate to transmit the photographed image to the control unit when the light is irradiated from the illuminator.

[11] In addition, the inspection frame may further include a sensor for detecting a passage state of the substrate when the substrate passes through the passage.

[12] Further, the illuminator may be installed at the inspection frame disposed on the passage through which the substrate passes, or a hole may be formed in the robot support frame under the inspection frame, through which the substrate passes, and the illuminator may be installed under the hole.

[13] Furthermore, the illuminator may be installed under the inspection frame projecting from an end of the robot support frame to the exterior of the robot support frame.

[14] In addition, the image processor may include center cameras for inspecting edge defects of both ends of the substrate passing through the inspection frame, and at least a pair of side cameras symmetrically disposed at both sides of the center cameras to inspect edge defects of both end surfaces connecting the both ends of the substrate.

[15] Further, the center cameras and the side cameras may be line scan charge coupled device (CCD) cameras. Advantageous Effects

[16] A substrate conveyance robot and a tester integrally provided to a robot support frame can improve conveyance instability of a substrate due to increase in weight caused by variation in size of the substrate, stably perform quality inspection of the substrate surface, and stably supply the substrate to process equipment. Brief Description of the Drawings

[17] The above and other aspects and advantages of the present invention will become apparent and more readily appreciated from the following description of exemplary embodiments, taken in conjunction with the accompanying drawings of which:

[18] FIG. 1 is a schematic plan view of a substrate quality tester in accordance with an exemplary embodiment of the present invention;

[19] FIG. 2 is a schematic side view of the substrate quality tester in accordance with an exemplary embodiment of the present invention;

[20] FIG. 3 is a schematic front view of the substrate quality tester in accordance with an exemplary embodiment of the present invention;

[21] FIG. 4 is a block diagram for explaining an operation state of the substrate quality tester in accordance with an exemplary embodiment of the present invention;

[22] FIG. 5 is a schematic plan view of a robot part in accordance with an exemplary embodiment of the present invention, which is advanced;

[23] FIG. 6 is a schematic side view of the robot part in accordance with an exemplary embodiment of the present invention, which is advanced;

[24] FIG. 7 is a schematic plan view of the robot part in accordance with an exemplary embodiment of the present invention, which extracts a substrate;

[25] FIG. 8 is a schematic plan view showing a substrate supply state to process equipment in accordance with an exemplary embodiment of the present invention;

[26] FIG. 9 is a view for explaining an installation position of an illuminator in accordance with an exemplary embodiment of the present invention;

[27] FIG. 10 is a view for explaining another installation position of the illuminator in accordance with an exemplary embodiment of the present invention; and

[28] FIG. 11 is a view showing of an inspection unit in accordance with another exemplary embodiment of the present invention. Mode for the Invention

[29] Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings.

[30] FIG. 1 is a schematic plan view of a substrate quality tester in accordance with an exemplary embodiment of the present invention, FIG. 2 is a schematic side view of the substrate quality tester in accordance with an exemplary embodiment of the present invention, FIG. 3 is a schematic front view of the substrate quality tester in accordance with an exemplary embodiment of the present invention, and FIG. 4 is a block diagram for explaining an operation state of the substrate quality tester in accordance with an exemplary embodiment of the present invention.

[31] FIG. 5 is a schematic plan view of a robot part in accordance with an exemplary embodiment of the present invention, which is advanced, FIG. 6 is a schematic side view of the robot part in accordance with an exemplary embodiment of the present invention, which is advanced, FIG. 7 is a schematic plan view of the robot part in accordance with an exemplary embodiment of the present invention, which extracts a substrate, and FIG. 8 is a schematic plan view showing a substrate supply state to process equipment in accordance with an exemplary embodiment of the present invention.

[32] FIG. 9 is a view for explaining an installation position of an illuminator in accordance with an exemplary embodiment of the present invention, and FIG. 10 is a view for explaining another installation position of the illuminator in accordance with an exemplary embodiment of the present invention.

[33] Referring to FIGS. 1 to 10, a substrate quality tester in accordance with an exemplary embodiment of the present invention includes a robot support frame 10, a robot part 20, an inspection unit 30, and a control unit 40.

[34] The robot support frame 10 has a rotary shaft (not shaft), and is configured to rotate in a certain direction by a drive force of a drive part Ml under the control of the control unit 40.

[35] At this time, while not shown, a rail part, to which the robot part 20 is coupled, is installed at a flat surface of the robot support frame 10.

[36] The robot part 20 includes an extraction rod 21 for extracting a substrate 100 mounted on a tray 200 when the robot support frame 10 is rotated, and supplying the substrate to process equipment 300. The extraction rod 21 is coupled to the flat surface of the robot support frame 10 to reciprocally move along the rail part under the control of a separate robot controller (not shown).

[37] The inspection unit 30 checks quality of the surface and edge of the substrate 100 in real time when the substrate 100 passes therethrough depending on reciprocal movement of the robot part 20. The inspection unit 30 is integrally provided to one end of the robot support frame 10, and includes an inspection frame 31, an illuminator 32, and an image processor 33.

[38] The inspection frame 31 is installed to project from one end or an end tip of the robot support frame 10 to form a passage through which the substrate 100 passes.

[39] The illuminator 32 irradiates light to the substrate 100 under the control of the control unit 40 when the substrate 100 passes through the passage provided in the in- spection frame 31. The illuminator 32 may be installed at the inspection frame 31 disposed on the passage through which the substrate 100 passes, but not limited thereto, as shown in FIGS. 9 and 10, may be installed under the robot support frame 10 under the passage of the inspection frame 31 through which the substrate 100 passes.

[40] That is, as shown in FIG. 9, when the inspection frame 31 is coupled to the end of the robot support frame 10, after forming a hole 11 in the end of the robot support frame 10, the illuminator 32 is installed under the hole 11, or as shown in FIG. 10, after projecting the inspection frame 31 from the end of the robot support frame 10, the illuminator 32 may be installed under the inspection frame 31 projecting to the exterior.

[41] The image processor 33 photographs the surface of the substrate 100 upon irradiation of light from the illuminator 32. The image processor 33 includes center cameras cl for inspecting edge defects of both ends, stains, scratches, foreign substances, and discoloration of the substrate 100 passing through the passage of the inspection frame, and at least a pair of side cameras c2 for inspecting edge defects of both ends, stains, scratches, foreign substances and discoloration of the substrate 100, which cannot be recognized by the center cameras cl. The center cameras cl and the side cameras c2 are line scan CCD camera.

[42] At this time, the center cameras cl and the side cameras c2 included in the image processor 33 are installed at the robot support frame 10 under the passage of the inspection frame 31 when the illuminator 32 is installed at an upper side of the inspection frame 31, or installed at an upper side of the inspection frame 21 when the illuminator 32 is installed under the robot support frame 10 or the inspection frame 31.

[43] The sensor 34 installed at the inspection frame 31 detects passage of the substrate

100 and transmits the detection signal to the control unit 40 when the substrate 100 passes through the passage provided in the inspection frame 31.

[44] The control unit 40 outputs a control signal depending on the signal detected by the sensor 35 and synthetically determines damage to the substrate 100. The control unit 40 is configured to determine ON/OFF operation of the illuminator 32 and the image processor 33 included in the inspection unit 30 depending on the control signal. Meanwhile, the control unit 40 analyzes image information photographed by the center cameras cl and the side cameras c2 included in the image processor 33, and determines quality of the surface of the substrate 100, i.e., generation of edge defects, stains, scratches, foreign substances, discoloration, variation in color, and swell of the substrate 100.

[45] Operation of the embodiment in accordance with an exemplary embodiment of the present invention will be described with reference to FIGS. 1 to 10.

[46] First, when the drive part Ml is driven according to the control signal output from the robot controller (not shown) in a state in which the substrate 100 is deposited on the tray 200 to perform a process, the robot support frame 10 is rotated in a direction of the tray 200 about the rotary shaft depending on a drive force of the drive part Ml.

[47] Next, when the robot controller (not shown) outputs another control signal to the robot part 20 coupled onto the robot support arm 10, the robot part 20 moves toward the tray 200 along the rail part provided on the flat surface of the robot support frame 10. At this time, the extraction rod 21 formed at the robot part 20 extracts the substrate 100 from the tray 200, regardless of the size thereof.

[48] Then, when the robot controller outputs another control signal to operate the drive part Ml in a reverse direction, the robot support frame 10 is rotated about the rotary shaft by a reverse drive force of the drive part Ml to return to its original position, i.e., rotated toward the process equipment 300.

[49] Next, when the robot controller outputs another control signal to the robot part 20, the robot part 20 moves backward along the rail part provided on the flat surface of the robot support frame 10 to stably input the substrate 100 into the process equipment 300.

[50] When the robot part 20 moves backward, the substrate 100 passes through the passage provided in the inspection frame 21 of the inspection unit 30 installed at one end of the robot support frame 10. In addition, in a state in which the robot part 20 was moved backward, when the substrate 100 moves toward the process equipment 300 to pass through the passage provided in the inspection frame 31 under the control of the control unit 40, the inspection unit 30 checks quality of the substrate 100 under the control of the control unit 40.

[51] That is, when the substrate 100 passes through the passage provided in the inspection frame 31, the sensor 34 detects passage of the substrate 100 to send it to the control unit 40.

[52] The control unit 40 controls emission of the illuminator 32 included in the inspection unit 30, and thus, the illuminator 32 irradiates a certain amount of light to the substrate 100.

[53] Next, the center cameras cl and the side cameras c2 of the image processor 33 included in the inspection unit 30 photograph a surface state of the substrate 100 to send it to the control unit 40. Then, the control unit 40 synthetically inspects generation of edge defects, stains, scratches, discoloration, variation in color, and swell of the substrate 100 from information of the photographed image.

[54] That is, the center cameras cl photograph both ends of the substrate 100 passing through the passage of the inspection frame 31, and the at least a pair of side cameras c2 symmetrically installed with respect to the center cameras cl photograph end surfaces of the substrate 100, which cannot be recognized by the center cameras cl, connecting both ends of the substrate 100, which are recognized by the center cameras cl.

[55] Then, the control unit 40 digitally encodes the image information and computes the code to determine whether the substrate 100 is good or bad.

[56] Here, when the mathematical comparative value exceeds an allowable range designated by a user, the control unit 40 determines that edge defects, stains, scratches, foreign substances, or discoloration of the substrate 100 is bad.

[57] Meanwhile, as shown in FIG. 11, the inspection unit of the present invention has a passage through which the substrate 100 passes, and may include a laser generator 51 and a laser detector 52 installed at the inspection frame 31 projecting from one end or an end tip of the robot support frame 10. Therefore, it is possible to perform crack inspection of side surfaces of the substrate 100 and abnormality of the substrate 100 in the minor axis direction thereof using the laser generator 51 and the laser detector 52.

[58] That is, in FIG. 11, the laser generator 51 is installed on the passage in the inspection frame 31 with a predetermined angle, through which the substrate 100 passes, to irradiate a laser beam to the substrate 100. The laser detector 52 is installed on the inspection frame 31 with a predetermined angle, through which the substrate 100 passes, to oppose to the laser generator 51, such that the laser irradiated from the laser generator 51 to the substrate 100 is reflected from the side surfaces and in the minor axis direction and the reflected laser is collected.

[59] Therefore, it is possible to determine whether defects in the minor axis of the substrate exist as well as cracks (in particular, side surfaces) of the substrate 100 through variation in interval of the laser reflected from the substrate 100.

[60] Hereinafter, the same reference numerals as FIGS. 1 to 10 designate the same elements, and description thereof will not be repeated.

[61] The foregoing description concerns an exemplary embodiment of the invention, is intended to be illustrative, and should not be construed as limiting the invention. Many alternatives, modifications, and variations within the scope and spirit of the present invention will be apparent to those skilled in the art.

Claims

[1] A substrate quality tester comprising: a robot support frame rotated by a drive part; and a robot part reciprocally coupled to the robot support frame, extracting a substrate mounted on a tray upon rotation of the robot support frame, and supplying the substrate to process equipment, wherein an inspection unit is integrally provided to an end of the robot support frame to check quality of the surface and edge of the substrate in real time when the substrate passes therethrough by reciprocal movement of the robot part, and the inspection unit is controlled by a control unit for synthetically determining whether the substrate is damaged.

[2] The substrate quality tester according to claim 1, wherein the inspection unit comprises: an inspection frame having a passage through which the substrate passes, and coupled to an end or an end tip of the robot support frame to project to the exterior; an illuminator for irradiating light to the substrate when the substrate passes through the passage; and an image processor for photographing the surface of the substrate to transmit the photographed image to the control unit when the light is irradiated from the illuminator.

[3] The substrate quality tester according to claim 1, wherein the inspection unit comprises an inspection frame having a passage through which the substrate passes and coupled to an end or an end tip of the robot support frame to project to the exterior, and the inspection frame comprises a laser generator and a laser detector installed therein.

[4] The substrate quality tester according to claim 2 or 3, wherein the inspection frame further comprises a sensor for detecting a passage state of the substrate when the substrate passes through the passage.

[5] The substrate quality tester according to claim 2, wherein the illuminator is installed at the inspection frame disposed on the passage through which the substrate passes.

[6] The substrate quality tester according to claim 2, wherein a hole is formed in an end of the robot support frame and the illuminator is installed under the hole.

[7] The substrate quality tester according to claim 2, wherein the illuminator is installed under the inspection frame projecting from an end of the robot support frame to the exterior of the robot support frame.

[8] The substrate quality tester according to claim 2, wherein the image processor comprises center cameras for inspecting edge defects of both ends of the substrate passing through the inspection frame, and at least a pair of side cameras symmetrically disposed at both sides of the center cameras to inspect edge defects of both end surfaces connecting the both ends of the substrate.

[9] The substrate quality tester according to claim 8, wherein the center cameras and the side cameras are line scan charge coupled device (CCD) cameras.