KR20070099216A - Quality tester of glass board - Google Patents

Abstract

A quality tester of a glass board is provided to perform processes using plasma such as deposition, etching, and sputtering quickly by reducing the time required for testing the quality of a glass board. A quality tester of a glass board(S1,S2) is selectively installed in the front of an inlet side gate valve(701) or/and in the rear of an outlet side gate valve of each process apparatus(700) using plasma in deposition, etching, and sputtering processes for manufacturing a thin film transistor liquid crystal display. The quality tester includes a laminating unit(100), an extracting unit(200), a testing unit(400), a control unit(500), and a test frame(600). The extracting unit extracts the glass board, and supplies the glass board to a process apparatus. The testing unit checks the quality of the glass board in real time when supplying the extracted glass board to the process apparatus. The control unit controls the testing unit. The test frame through which the glass board passes is installed at the front or rear end of the process apparatus.

Description

Quality tester of glass board {Quality tester of glass board}

1 is an overall configuration diagram of an apparatus for inspecting the quality of a glass substrate when the glass substrate is directly transferred to a process facility in a first embodiment of the present invention.

2 is a structural diagram of a lamination unit in a first embodiment of the present invention.

Figure 3 is a structural diagram of the extraction unit in a first embodiment of the present invention.

Figure 4 is an operating state of the extraction unit in a first embodiment of the present invention.

5 is a front schematic view showing an operating state of the first inspection unit according to the transmission method in the first embodiment of the present invention.

Figure 6 is a front schematic view showing the operating state of the second inspection unit by the transmission method in the first embodiment of the present invention.

7 is a side schematic view showing an operating state of the third inspection unit according to the first embodiment of the present invention;

8 is a block diagram of a control unit in accordance with a first embodiment of the present invention;

9 is a side schematic view showing an operating state of a first inspection unit by a reflection illumination method according to a second embodiment of the present invention;

10 is a side schematic view showing an operating state of a second inspection unit by a reflection illumination method according to a third embodiment of the present invention;

11 is an overall configuration diagram of a device for inspecting the quality of the glass substrate when the glass substrate is transferred to the process equipment through the transfer unit in a fourth embodiment of the present invention.

12 is a schematic side view of a transfer unit for transferring a glass substrate in a roller manner in a fourth embodiment of the present invention.

Fig. 13 is a plan schematic view of Fig. 12 as a fourth embodiment of the present invention.

14 is a structural diagram of a transfer unit of the air flotation method using a blower as a fifth embodiment of the present invention.

15 is a structural diagram of a transfer unit of an air flotation method using an air compressor as a sixth embodiment of the present invention.

16 is a state in which the inspection unit is applied to the multi-chamber process equipment as a seventh embodiment of the present invention.

FIG. 17 is a partially enlarged sectional view of FIG. 16 according to a seventh embodiment of the present invention; FIG.

18 is an eighth embodiment of the present invention for a third inspection unit.

19 is a ninth embodiment of the present invention with respect to the third inspection unit.

20 is a view showing whether or not the generation of the conventional glass substrate.

* Description of the symbols for the main parts of the drawings *

21; Lighting unit 22; camera

31; Condenser lens 32,909; spectroscope

41,908; A laser generator 42; Laser detector

51; A code conversion unit 52; Calculator

53; Warning unit 100; Stacking Unit

200; Extraction unit 300; Transfer unit

400; Inspection units 401, 402, 403; 1, 2, 3 inspection unit

500; Control unit 600; Inspection frame

801; Load lock 802; Transfer chamber

803; Gate valve 804; Process chamber

901; Light source sections 902,903; 1st and 2nd lens

904; Screen 905; Phase detector

906; Substrate detection sensors 907a and 907b; 1st and 2nd reflection mirror

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quality inspection apparatus for a glass substrate, and more particularly, to edge defects of a glass substrate for forming a thin film transistor (TFT) and a color filter in a thin film transistor liquid crystal display (TFT-LCD). The present invention relates to a quality inspection apparatus for glass substrates that comprehensively inspects discolors, color changes, as well as stains and scratches on the surface of the glass substrate, presence of foreign substances, and occurrence of cracks.

As is well known, a thin film transistor liquid crystal display device is largely composed of a lower glass substrate on which a thin film transistor is formed, an upper glass substrate on which a color filter is formed, and a liquid crystal injected between the lower glass substrate and the upper glass substrate.

In the case of the glass substrate for forming the thin film transistor and the color filter, stains, scratches, and foreign substances on the surface thereof, color change, and a phenomenon in which the thickness is not formed uniformly occur. Damage to the electrode or blown broken glass substrate debris contaminates the inside of the chamber, and film deposition or etching on the glass substrate is not carried out uniformly, resulting in abnormal colors in the liquid crystal of the thin film transistor liquid crystal display. It was inevitable that a product defect that occurred, that is, discolored, would result.

Thus, conventionally, the glass substrate is placed in a process chamber before the process of using plasma, such as deposition, etching, or sputtering, to perform an overall quality inspection on the glass substrate.

However, the conventional inspection apparatus is provided separately from the apparatus used in the manufacturing process of the thin film transistor liquid crystal display device. When the thin film transistor liquid crystal display device is repeatedly completed, the process for the glass substrate is performed for each process. Various quality inspections were to be performed individually, and accordingly, inevitably, an uneconomical problem that requires much time for quality inspection of glass substrates was caused.

In addition, in the past, in the case of stains, scratches, discolors, and swells on the surface of the glass substrate, the observation result was changed by the observer's subject.

That is, as an example, a technique for inspecting whether or not a curl is generated on a conventional glass substrate, as shown in FIG. 20, causes a light source to be incident on the glass substrate while the glass substrate is placed vertically. Is a phenomenon that occurs when the glass substrate is not completely flat.

At this time, if the glass substrate is tilted slightly in parallel with the light source, the shadow of the glass substrate is generated on the screen opposite to the glass substrate.

Then, a portion where waveness is generated from the shadow projected on the screen and a portion having no transmittance (or a phase difference of light) are generated in the portion where the wave is not generated, and thus a white or blacker curved portion is seen. Is to determine whether the naked eye occurs.

However, the above-mentioned shoulder test is impossible due to the in-situ test, and thus, the whole test cannot be performed. In addition, the test of the shoulder has to be confirmed by the naked eye of the worker, which requires a lot of processing time, and greatly reduces the reliability of the test. There is this.

Accordingly, the present invention has been made to solve the above-mentioned conventional problems, the edge defects, discoloration, color change of the glass substrate between the respective successive processing apparatus for manufacturing the thin film transistor liquid crystal display device, By placing a device that comprehensively inspects the surface of the glass substrate for stains and scratches, the presence of foreign substances, and the occurrence of cracks, the quality of the glass substrate flowing into the process equipment can be continuously and continuously inspected. This aims to provide a glass substrate quality inspection device that can improve the quality satisfaction of the product.

The quality inspection apparatus of the glass substrate for achieving the above object comprises a inspection unit for checking the quality of the glass substrate supplied to the process equipment in real time; And a control unit controlling the inspection unit. Characterized in that comprises a configuration.

According to another aspect, the glass substrate is characterized in that the stacking by a stacking unit in which a plurality of spaces are arranged vertically.

According to another aspect, the glass substrate is characterized in that it is extracted by the extraction unit and supplied to the process equipment.

According to yet another aspect, the extraction unit comprises a first rotating body; A multi-stage arm coupled to the first rotating body; A second rotating body coupled to one end of the arm; And an extraction rod connected to the second rotating body to extract a glass substrate from the stacking unit. Characterized in that comprises a configuration.

According to another aspect, the extraction rod is characterized in that the adsorption material is configured to prevent the separation when the extraction of the glass substrate on one side.

According to another aspect, it characterized in that the configuration further comprises a transfer unit between the extraction unit and the process equipment.

According to yet another aspect, the transfer unit is characterized in that the structure for transferring the glass substrate to the process equipment by the rotation method of the roller.

According to yet another aspect, the transfer unit is characterized in that the structure for transferring the glass substrate to the process facility by the air flotation method.

According to yet another aspect, the air-fed transfer unit is a transport frame that is accommodated in the glass substrate; A plurality of air nozzles arranged in the transfer frame to discharge air for supporting the glass substrate; An air storage unit supplying air to the plurality of air nozzles; An air generator configured to store air in the air storage unit; Characterized in that comprises a configuration.

According to another aspect, the air storage is characterized in that divided into first and second storage.

According to another aspect of the present invention, the first storage unit is configured to be connected to an odd number of air nozzles through a plurality of air hoses.

According to another aspect, the second storage unit is configured to be connected to the even number of air nozzles through a plurality of air hoses.

According to yet another aspect, the first and second reservoirs are characterized in that the connection with the air generating unit through a separate supply hose.

According to another aspect, the air generating unit is composed of a case having a plurality of outlet ports to supply air simultaneously or selectively through the supply hose to the first and second reservoirs, and one side of the case is a blower for intake of outside air It is characterized by the configuration.

According to yet another aspect, the outlet port is characterized in that the opening and closing of the valve is configured to automatically or selectively control the opening and closing.

According to another aspect, the case comprises one inlet port and a plurality of outlet ports, the inlet port is configured to connect the air compressor, the plurality of outlet ports through the supply hose, respectively, the first and second storage unit Characterized in a connection configuration.

According to another aspect, the inspection unit is characterized in that configured in the inspection frame through which the glass substrate passes.

According to yet another aspect, the inspection frame is characterized by configuring a sensor for detecting the passing state of the glass substrate.

According to another aspect, the inspection frame is characterized in that configured at any one of the front end or the rear end of the process equipment.

According to yet another aspect, the inspection frame is characterized in that installed in the transfer unit.

According to another aspect, the inspection unit, the first inspection unit for inspecting the edge defects and stains and scratches, and foreign matter and discoloration on the glass substrate; A second inspection unit for inspecting the discolor and color of the glass substrate; And, the third inspection unit for inspecting whether the occurrence of the dolol by measuring the thickness of the surface of the glass substrate; Characterized in that comprises a configuration.

According to another aspect, the first, second and third inspection units are characterized in that the inspection operation is performed at the same time under the control of the control unit.

According to another aspect, the first, second and third inspection units are characterized in that the inspection operation is sequentially performed under the control of the control unit.

According to another aspect, the first, second and third inspection unit is characterized in that only one of the inspection operation is selected under the control of the control unit.

According to yet another aspect, the first, second and third inspection unit is characterized in that any one is selected and applied to the inspection frame.

According to another aspect, the first and third inspection units may be simultaneously applied to the inspection frame.

According to another aspect, the second and third inspection unit is characterized in that it is applied to the inspection frame at the same time.

According to another aspect, the third inspection unit is characterized in that configured at the tip of the first inspection unit.

According to another aspect, the first and second inspection units are characterized in that for checking the quality of the glass substrate using a transmission illumination method.

According to another aspect, the glass substrate is characterized in that the transparent glass substrate to enable its quality check by the transmission illumination method.

According to another aspect, the first and second inspection units are characterized in that for checking the quality of the glass substrate using a reflective illumination method.

According to another aspect, the glass substrate is characterized in that the glass substrate is opaque so that the quality can be checked by the reflective illumination method.

According to another aspect, the opaque glass substrate is characterized in that the metal film is formed.

According to another aspect, the first inspection unit is characterized in that it comprises a lighting unit and a camera.

According to yet another aspect, the lighting unit is characterized in that installed on the lower side of the inspection frame through which the glass substrate passes.

According to another aspect, the lighting unit is characterized in that it is installed at a predetermined inclination angle on the upper side of the inspection frame through which the glass substrate passes.

According to another aspect, the lighting unit is characterized in that the light emitting diode (LED).

According to yet another aspect, the lighting unit is characterized in that the high-frequency fluorescent lamp.

According to another aspect, the camera comprises a plurality of central camera for inspecting the edge defects at both ends of the glass substrate passing through the inspection frame; And at least one pair of side cameras for inspecting edge defects at both end portions connecting both ends of the glass substrate to both sides of the central cameras with an symmetry axis. Characterized in that it comprises a.

According to another aspect, the central camera is perpendicular to the glass substrate on the upper side of the inspection frame through which the glass substrate passes to photograph the surface of the glass substrate in either a dark field image or a bright field image. It is characterized by being installed.

According to another aspect, the central camera is characterized in that it is installed at a predetermined inclination angle corresponding to the lighting unit on the upper side of the inspection frame through which the glass substrate passes.

According to another aspect, the side camera is characterized in that parallel to the central camera.

According to another aspect, the side camera is characterized in that the inclination of the predetermined angle with respect to the central camera.

According to another aspect, the side camera is characterized in that the line scan CCD camera.

According to another aspect, the second inspection unit is characterized in that it comprises an illumination unit, a condenser lens, an optical fiber, and a spectrometer.

According to yet another aspect, the condensing lens is installed on the lower side of the inspection frame through which the glass substrate passes.

According to yet another aspect, the condensing lens is installed on the upper side of the inspection frame through which the glass substrate passes.

According to another aspect, the condensing lens is characterized in that connected to the spectroscope and the optical fiber.

According to yet another aspect, the spectrometer is configured in a control unit.

According to another aspect, the third inspection unit comprises a laser generation unit for irradiating a laser to the glass substrate and a laser detection unit for measuring the relative thickness change of the glass substrate from the laser reflected from the surface and bottom of the glass substrate It is characterized by.

According to another aspect, the laser generation unit and the laser detection unit is characterized in that the configuration facing each other at an inclination angle corresponding to the upper side of the inspection frame.

According to yet another aspect, the control unit is characterized in that it comprises a screen display for visualizing the information simultaneously or selectively inspected by the first, second, third inspection unit.

According to another aspect, the control unit includes a code conversion unit for converting the information to be examined by the inspection unit into a digital code; An operation unit which mathematically compares the digital code with normal data; And a warning unit for outputting a warning message when the mathematical comparison operation value exceeds a user specified tolerance range. Characterized in that comprises a configuration.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

1 is an overall configuration diagram of an apparatus for inspecting the quality of a glass substrate when the glass substrate is directly transferred to a process facility in a first embodiment of the present invention, and FIG. 2 is a structural diagram of a lamination unit in a first embodiment of the present invention. 3 is a structural diagram of an extraction unit in the first embodiment of the present invention, and FIG. 4 is an operation state diagram of the extraction unit in the first embodiment of the present invention.

FIG. 5 is a front schematic view showing an operating state of the first inspection unit according to the first embodiment of the present invention, and FIG. 6 is an operating state of the second inspection unit according to the first embodiment of the present invention. It is the front schematic shown.

7 is a side schematic view showing an operating state of the third inspection unit according to the first embodiment of the present invention, and FIG. 8 is a block diagram of a control unit according to the first embodiment of the present invention.

1 to 8, an organic substrate quality inspecting apparatus according to an exemplary embodiment of the present invention includes inflow of each of the process equipment 700 using plasma such as deposition, etching, and sputtering processes for manufacturing a thin film transistor liquid crystal display. The side gate valve 701 is selectively installed in front of and / or behind the discharge side gate valve.

The quality of the transparent glass substrate S1 of FIG. 2 or the opaque glass substrate S2 on which the metal film M is formed may be determined by various process facilities such as deposition, etching, and sputtering processes for manufacturing a thin film transistor liquid crystal display device. To check the quality of the glass substrate S1 or S2, which is inspected before entering into the process chamber 702 of 700, or to be discharged after the individual process is completed, and to determine the transfer to the next process continuously. The stacking unit 100 includes a stacking unit 100, an extraction unit 200, an inspection unit 400, a control unit 500, and an inspection frame 600.

The stacking unit 100 has a structure in which a space in which a plurality of glass substrates S1 or S2 are stacked is vertically arranged.

The extraction unit 200 is provided on one side of the stacking unit 100 and controlled by a separate control means (not shown), the glass substrate accommodated in the stacking space according to the control signal of the control means ( S1 or S2 are sequentially extracted one by one and then driven to supply them to the processing apparatus 700, and the first rotating body 1, the arm 2, the second rotating body 3, and the extraction rod 4 are driven. Include.

The first and second rotating bodies (1) and (3) are capable of 360 ° rotation, respectively, and the arms (2) are configured in multiple stages, and both ends thereof are connected to the first and second rotating bodies (1) and (3). The extraction rod 4 is connected to the second rotating body 3 to extract the glass substrate S1 or S2 from the stacking unit 100, and the glass rod S1 or S2 is separated on one surface thereof. The adsorption material 4a which prevents this is comprised.

Here, although it is preferable to use rubber | gum as the said adsorption material 4a, it is not necessarily limited to this.

The inspection unit 400 is the quality of the glass substrate (S1 or S2), that is, the glass substrate (S1) when the supply of the glass substrate (S1 or S2) to the process facility 700 by the extraction unit 200 Or S2) is installed in the inspection frame 600 through which the glass substrate S1 or S2 passes to check whether edge defects, stains, scratches, foreign matters, discolors, colors, and cracks are generated. The first, second, and third inspection units 401, 402, and 403 are divided.

The first inspection unit 401 is for inspecting edge defects, stains, scratches, foreign matters, and discolors on the glass substrate S1 or S2, which includes an illumination unit 21 and a camera 22. The lighting unit 21 is installed on the lower side of the inspection frame 600 according to the transmission lighting method.

That is, the lighting unit 21 is installed on the lower side of the inspection frame 600 through which the glass substrate S1 passes when the quality of the transparent glass substrate S1 is checked by the transmission lighting method, which is an LED lamp or a high frequency wave. It consists of any one of fluorescent lamps.

 In addition, as shown in Figure 9 when the metal film (M) is deposited on the glass substrate (S2) using the illumination method of the upper projection when the light is blocked by the glass substrate (S2) when using the illumination of the transmission method. The surface of the glass substrate (S2) was photographed so that the quality inspection of the glass substrate (S2) was performed.

The camera 22 is a dark field image or bright field image when illumination light is irradiated from the lighting unit 21 installed below the inspection frame 600 through which the glass substrate S1 or S2 passes. By taking a picture of the surface of the glass substrate (S1 or S2) by any one of the field image, and the quality inspection for the glass substrate (S1 or S2) is to be carried out, the inspection frame for passing the glass substrate (S1 or S2) The upper side of the 600 is installed perpendicular to the glass substrate (S1 or S2), and includes a high-resolution CCD (Charge-Coupled Device) central camera 22a and side camera 22b, which is a glass substrate (S1) Alternatively, even a damaged part of 5 mm or less at the edge of S2) can be inspected.

That is, even the smallest portion adjacent to the edge can be inspected.

The center camera 22a is for inspecting spots, scratches, foreign matters, and discolors, as well as edge defects at both ends of the glass substrate S1 or S2 passing through the inspection frame 600 first and last.

At least one pair of the side cameras 22b is installed symmetrically about the center camera 22a, which is a side end of the glass substrate S1 or S2 that the center camera 22a does not recognize. Optionally in parallel with the central camera 22a to inspect edge defects, smudges, scratches, foreign matter, and discoloration at the side ends connecting the two ends of the glass substrate S1 or S2 as recognizable by 22a). The upper side of the inspection frame 600 is inclined at a predetermined angle with respect to the central camera 22a.

Here, the side camera 22b is rotatably hinged to the upper side of the inspection frame 600, it may be inclined at a predetermined angle with respect to the center camera (22a).

That is, the side camera 22b is inclined at a predetermined angle with respect to the center camera 22a because the side camera 22b in parallel is in accordance with the size of the glass substrate S1 or S2. If it is difficult to inspect edge defects, stains, scratches, foreign matters, and discolor, the side camera 22b is rotated by an angle so that not only the edge defects of the glass substrate S1 or S2, but also stains, scratches, foreign matters, and discolors. To check.

The second inspection unit 402 is for inspecting the discolor and color of the glass substrate S1 or S2. The condenser lens 31 and the spectrometer 32 are provided on the illumination unit 21 of the first inspection unit 401. It is configured to include more.

The condenser lens 31 is installed in a vertical state on the upper side of the inspection frame 600 through which the glass substrate S1 or S2 passes to condense the light emitted from the illumination unit 21.

The spectrometer 32 receives the light condensed by the condenser lens 31, analyzes the wavelength of the light, and transmits the analysis result to the control unit 500 to display the glass substrate S1 or S2. The condenser lens 31 and an optical fiber (not shown) are connected to each other so as to inspect color and color, and are configured in the control unit 500. In this case, a plurality of condenser lenses 31 may be coupled to one spectrometer 32, and the spectrometer 32 may be separately connected to each condenser lens 31.

The third inspecting unit 403 inspects whether or not the occurrence of swell is generated by measuring a relative thickness of the surface of the glass substrate S1 or S2, which is configured at the front end of the first inspecting unit 401, and generates a laser. 41 and a laser detection section 42 are included.

The laser generating unit 41 is installed at a predetermined inclination angle on the upper side of the inspection frame 600 through which the glass substrate S1 or S2 passes and is configured to irradiate a laser to the glass substrate S1 or S2.

The laser detection unit 42 reflects the reflected laser when the laser irradiated onto the glass substrate S1 or S2 by the laser generation unit 41 is reflected on the surface and the bottom of the glass substrate S1 or S2. The glass substrate (S1 or S2) is passed through the glass frame (S1 or S2) to pass through the installation at a predetermined inclination angle facing the laser generator 41, the glass substrate (S1 or S2) of the It is configured to measure the relative thickness uniformity of the glass substrate (S1 or S2) through the change in the distance (D = D2-D1) of the laser reflected on the surface and bottom as shown in FIG.

The control unit 500 controls the operation state of the inspection unit 400 according to the detection information of the sensor 601 provided in the inspection frame 600 to be described later, whether the damage to the glass substrate (S1 or S2) To be comprehensively determined, which includes a code conversion unit 51, a calculation unit 52, a warning unit 53, and a screen display unit 54.

The code conversion unit 51 converts the quality inspection information into a digital code by the glass substrate S1 or S2 inspected by the first, second and third inspection units 401, 402, and 403, and then converts the quality inspection information into digital codes. And the calculation unit 52 compares the digital code with normal data and mathematically determines whether there is a defect with the glass substrate S1 or S2, and the warning unit 53 performs the mathematical operation. When the comparison operation value exceeds the user-specified allowable range, a warning message for the quality defect of the glass substrate S1 or S2 is output.

Here, the normal data refers to quality assurance data of a normal glass substrate S1 or S2 input in advance, and the user-specified range is an accelerating value based on the normal data (where α is an arbitrary value). ).

The inspection frame 600 is provided with a sensor 601 that detects a time point at which the glass substrate S1 or S2 enters, and the control unit 500 checks the inspection unit 400 according to the information detected by the sensor 601. ) Will be activated or stopped.

Referring to Figures 1 to 8 attached to the embodiment of the present invention configured as described above is as follows.

First, when the extraction unit 200 is driven in accordance with a signal output from a separate control means in a state of stacking the glass substrate (S1 or S2) for the process progress on the stacking unit 100, the extraction unit 200 The extraction rod 4 included in the extract one glass substrate (S1 or S2) and then transfer it to the process facility 700.

That is, the extraction unit 200 includes the first and second rotating bodies (1) and (3), the multi-stage arm (2) and the extraction rod (4), the first and second rotating bodies (1) (3). In addition to rotating the multi-stage arm (2), the extraction rod (4) is positioned in the stacking unit (100) as shown in Fig. 2, and then one glass substrate (S1 or S2) is extracted.

Thereafter, the extraction rod 4 is rotated in the direction of the processing equipment 700 through the rotation of the first and second rotating bodies 1 and 3 and the bending of the multi-stage arm 2. The glass substrate S1 or S2 placed on (4) is placed on the process equipment 700.

In this case, an inspection frame 600 having a sensor 601 is positioned between the extraction unit 200 and the process facility 700, and the inspection frame 600 includes an inspection unit 400. The unit 400 is connected to the control unit 500,

The sensor 601 of the inspection frame 600 detects a state in which the glass substrate S1 or S2 enters and transmits the detection information to the control unit 500.

Then, the control unit 500 simultaneously or selectively operates the first to third inspection units 401, 402 and 403 of the inspection unit 400 provided in the inspection frame 600, thereby allowing the glass substrate S1 to be operated. Alternatively, the quality of S2), that is, the edge defects, stains, scratches, foreign matters, discolors, colors, and cracks on the glass substrate S1 or S2 are comprehensively inspected.

In more detail, first, when the transparent glass substrate S1 enters the inspection frame 600 as shown in FIG. 5, the sensor 601 provided at the front end of the inspection frame 600 is formed of the organic substrate S1. After detecting the inflow state it is transmitted to the control unit (500).

In this case, when the edge defects, stains, scratches, foreign matters, and discolors of the glass substrate S1 are to be inspected, the control unit 500 selects the operation of the first inspection unit 401 from the inspection unit 400. Accordingly, the lighting unit 21 provided below the inspection frame 600 irradiates a predetermined light to the glass substrate S1 passing through the inspection frame 600.

Then, the camera 22 positioned above the inspection frame 600 photographs the surface of the glass substrate S1 according to the light irradiated onto the glass substrate S1 and then displays the image information of the control unit ( 500).

That is, the camera 22 is composed of a center camera 22a and a side camera 22b, and the center camera 22a photographs both ends of the glass substrate S1 initially passing through the inspection frame 600. At least one pair of side cameras 22b installed symmetrically with respect to the center camera 22a may be recognized by the side end of the glass substrate S1 that is not recognized by the center camera 22a, that is, the center camera 22a. The side end portion connecting both ends of the glass substrate (S1) is taken.

Then, the code conversion unit 51 in the control unit 500 converts the image information into a digital code and then transfers it to the operation unit 52, so that the operation unit 52 transfers the digital code to normal data and mathematically. The comparison operation is performed to determine whether the glass substrate S1 is defective or not, and the result is displayed on the screen display unit 54.

In this case, when the mathematical comparison operation value exceeds the allowable range specified by the user, that is, when edge defects, stains, scratches, or foreign matter on the glass substrate S1 exist or the discolor is defective, the control. The warning unit 53 in the unit 500 is to output a warning message so that an operator can recognize the poor quality of the glass substrate (S1).

In addition, as shown in FIG. 7, an opaque glass substrate S1 or S2 having a transparent or metal film M is introduced into the inspection frame 600 to inspect whether the glass substrate S1 or S2 is generated. 3 When the inspection unit 403 is selected, the laser generating unit 41 installed at a predetermined inclination angle at the upper end of the inspection frame 600 may operate the laser while the glass substrate S1 or S2 passes through the inspection frame 600. Irradiate the surface of the glass substrate (S1 or S2).

Then, the laser is reflected on the surface and the bottom surface of the glass substrate (S1 or S2), at this time, the laser detector 42 is installed at an angle corresponding to the laser generator 41 on the upper side of the inspection frame 600 Is to focus the laser reflected from the glass substrate (S1 or S2).

At this time, the laser information collected by the laser detector 42 is transmitted to the control unit 500,

The code conversion unit 51 in the control unit 500 reflects the reflected information of the laser, that is, the reflected information of the laser reflected from the entire surface of the glass substrate S1 or S2, and the entire glass substrate S1 or S2. The reflection information of the laser reflected from the bottom surface is converted into a digital code and then transferred to the calculation unit 52.

Then, the calculation unit 52 calculates the reflection information on the surface of the glass substrate (S1 or S2) and the distance (D) of the reflection information on the bottom surface, and then the surface of the glass substrate (S1 or S2) and The thicknesses D1 and D2 relative to the bottom are determined.

At this time, when the result of the determination that the relative thickness (D1, D2) to the surface and bottom surface of the glass substrate (S1 or S2) exceeds the allowable range specified by the user, the warning unit in the control unit 500 ( 53) outputs a warning message so that the operator can recognize the poor quality of the glass substrate (S1).

As described above, the present invention is a quality of the glass substrate (S1 or S2) to be selectively installed in front of the inlet gate valve 701 of the deposition or etching process equipment 700 and / or behind the discharge side gate valve to enter the deposition or etching process. Inspect the state in advance to prevent the defective product from entering the interior of the process chamber 702, or to inspect the quality of the glass substrate (S1 or S2) discharged after the process is completed to prevent it from being provided to the process of the next step. It can be.

If quality defects are found in the glass substrates S1 or S2 discharged after the deposition or etching process is completed, defects in the process equipment using plasma such as deposition, etching, or sputtering may be recognized in real time.

That is, if the glass substrate before the deposition, etching, sputtering process was not defective, but the defect is found in the discharged glass substrate after the completion of the process is that the process equipment is defective.

In addition, according to the present invention, the transparent glass substrate S1 enters the inspection frame 600, and the color and color of the glass substrate S1 may be inspected through the second inspection unit 402.

That is, when the operation of the second inspection unit 402 is selected by the control unit 500, the lighting unit 21 provided below the inspection frame 600 passes a predetermined light through the inspection frame 600. Irradiate with glass substrate (S1).

At this time, the condenser lens 31 installed at the upper end of the inspection frame 600 collects the light irradiated onto the glass substrate S1 and transfers the light to the spectrometer 32 provided in the control unit 500.

Here, the spectrometer 32 can observe the wavelength of 180 ~ 1100 nanometer (nanometer), the resolution is 0.1 to 10 nano bar,

Although the spectrometer 32 is unevenly deposited or uniformly deposited, if the glass substrate S1 is processed in a non-uniform state in a subsequent process, the wavelength of light collected through the glass substrate S1 is analyzed. As a result, the intensity level and the spectral spectrum are different depending on the wavelength of the focused light.

Therefore, when the result of the contrast level and the spectral spectrum appear as described above to the control unit 500, the code conversion unit 51 in the control unit 500 converts the intensity level and the spectral spectrum into a digital code and then Transfer to operation unit 52.

Then, the calculation unit 52 compares the information of the intensity level or spectrum changed by the digital code with the quality assurance data of the specific glass substrate input at the normal level, and calculates the difference, and then the difference is the allowable range specified by the user. It is determined whether the deviation is over a certain level.

At this time, the warning unit 53 in the control unit 500, if out of the allowable range, outputs a warning message so that the operator can recognize the poor quality of the glass substrate (S1), that is, the discolor or color defects. Will be done.

Herein, in the above operation, the present invention has been described separately for the operation of the first, second, third inspection unit 401, 402, 403 in the inspection unit 400, the first, second, third The inspection unit 401, 402, 403 may be performed at the same time or selectively performed under the control of the control unit 500.

Meanwhile, FIG. 9 is a second embodiment of the present invention, which is an edge defect and stain on the glass substrate S2 when the opaque glass substrate S2 having the metal film M formed thereon passes through the inspection frame 600. , The scratch, the foreign matter, and the discolor is shown the operation state of inspecting through the first inspection unit 401.

That is, according to the second embodiment of the present invention, the lighting unit 21 and the camera 22 are installed to face each other at a predetermined inclination angle on the upper side of the inspection frame 600. When the light is irradiated to the glass substrate (S2) passing through the inspection frame 600, the camera 22 located at the upper end of the inspection frame 600 according to the light reflected from the glass substrate (S2), After photographing the surface of the glass substrate (S2) and transmits the image information to the control unit 500.

That is, the camera 22 is composed of a central camera 22a and a side camera 22b, and the central camera 22a photographs both ends of the glass substrate S2 initially passing through the inspection frame 600. At least one pair of side cameras 22b installed symmetrically with respect to the center camera 22a may be recognized by the side end of the glass substrate S2 that is not recognized by the center camera 22a, that is, the center camera 22a. The side end portion connecting both ends of the glass substrate (S2) is taken.

Then, the code conversion unit 51 in the control unit 500 converts the image information into a digital code and then transfers it to the operation unit 52, so that the operation unit 52 transfers the digital code to normal data and mathematically. The comparison operation is performed to determine whether the glass substrate S2 is defective or not, and the result is displayed on the screen display unit 54.

In this case, when the mathematical comparison operation value exceeds the allowable range specified by the user, that is, when edge defects, stains, scratches, or foreign matter on the glass substrate S2 exist or the decolor is defective, the control. The warning unit 53 in the unit 500 outputs a warning message so that an operator can recognize a poor quality of the glass substrate S2, and the same part as in the first embodiment of the present invention will be described below. It is indicated by a code and the overlapping description is omitted.

On the other hand, Figure 10 is a third embodiment of the present invention, which is the discolor and color for the glass substrate (S2) when the opaque glass substrate (S2) formed with the metal film (M) in the inspection frame 600 passes through The operation state of inspecting the through the second inspection unit 402 is shown.

That is, according to the third embodiment of the present invention, when the opaque glass substrate S2 on which the metal film M is formed enters the inspection frame 600, the illumination unit 21 provided on the inspection frame 600 is provided. The predetermined light is irradiated onto the glass substrate S2 passing through the inspection frame 600.

At this time, the condenser lens 31 installed at the upper end of the inspection frame 600 collects the light reflected from the glass substrate S2 and transfers the light to the spectrometer 32 provided in the control unit 500.

Then, the spectrometer 32 analyzes the wavelength of the light collected through the unevenly deposited glass substrate S2, which is represented by the intensity level according to the wavelength of the focused light.

When the brightness level shown as described above is transmitted to the control unit 500, the code conversion unit 51 in the control unit 500 converts the brightness level into a digital code and transfers it to the calculation unit 52.

Then, the calculation unit 52 compares the brightness level changed by the digital code with the quality assurance data of the specific glass substrate input at the normal level, calculates the difference, and the difference is greater than the allowable range and the predetermined level specified by the user. Determine if it is out.

At this time, if outside the allowable range, the warning unit 53 in the control unit 500 is to output a warning message so that the operator can recognize the poor quality of the glass substrate (S1), the present invention The same parts as in the first embodiment of the present invention will be denoted by the same reference numerals and redundant description thereof will be omitted.

On the other hand, Figures 11 to 13 is a fourth embodiment of the present invention, which is a glass substrate (S1 or S2) extracted by the extraction unit 200 is a process through the transfer unit 300 is installed inspection frame 600 The state supplied to the installation 700 is shown.

That is, in the fourth embodiment of the present invention, the transfer unit 300 is configured to carry the glass substrate S1 or S2 for manufacturing the thin film transistor liquid crystal display device to the process facility 700. It includes a roller 11, a shaft portion 12, and a support frame 13 to be driven through a separate control means (not shown).

The roller 11 is supported by the rotation of the shaft portion 12, the shaft portion 12 is fixed to both ends of the support frame 13, the roller 11 to the support frame 13 In order to inspect the glass substrate (S1 or S2) to be transported by the installation of the inspection frame 600, the inspection unit 400 is installed.

At this time, the transfer unit 300 may also be configured in an air flotation method, which is the transfer frame 61, the air nozzle 62, the air storage unit 63 as in the fifth embodiment of FIG. And it is configured to include an air generating unit (63).

That is, the transfer frame 61 is to accommodate the glass substrate (S1 or S2) when the glass substrate (S1 or S2) is extracted by the extraction unit 200, a plurality of air nozzles on the plane It is installed in the state which 62 is exposed.

The air nozzle 62 is arranged on the plane of the transfer frame 61, the transfer to the inspection unit 400 in a state of supporting the glass substrate (S1 or S2) accommodated in the transfer frame 61. Injecting the air to make it, it is configured to be connected through the air storage unit 63 and the air hose (65).

The air storage unit 63 is configured to supply air to the air nozzle 62 through the air hose 65, which is connected to the air generating unit 64 through the supply hose 66.

In this case, the air storage unit 63 is divided into first and second storage units 63a and 63b, and the first storage unit 63a has an odd number of air nozzles through a plurality of air hoses 65. 62, the second storage portion 63b is connected to an even number of air nozzles 62 through a plurality of air hoses 65, while the air generating unit 64 through the supply hose 66 Are connected separately).

The air generating unit 64 is provided with a plurality of outlet ports Out1 and Out2 to simultaneously or selectively supply air to the first and second storage units 63a and 63b through a supply hose 66. 64a and the blower 64b for intake of outside air is coupled to one surface of the case 64a.

Here, each of the outlet ports Out1 and Out2 constitutes an on / off valve 64c in which opening and closing are simultaneously or selectively controlled by the control unit 500.

At this time, as in the sixth embodiment of the present invention illustrated in FIG. 15, the air generator 64 has one inlet port In and a plurality of outlet ports Out1 and Out2 in the case 64a. Although provided, the inlet port (In) is connected to the air compressor 70 which is driven and controlled by the control unit 500, and the plurality of outlet ports (Out1) (Out2) through the supply hose 66 The first and second storage units 63a and 63b may be connected to each other, and the air compressor 70 may be directly connected to the first and second storage units 63a and 63b through a plurality of supply hoses 66, respectively. You can also make a connection.

Thus, the fourth to sixth embodiments of the present invention, when the glass substrate (S1 or S2) is supplied to the processing equipment 700 through the transfer unit 300, the inspection unit ( The inspection frame 600 is configured to 400, the quality of the glass substrate (S1 or S2) through the first, second, third inspection unit 401, 402, 403 of the inspection unit 400, That is, the defects, stains, scratches, foreign matters, discolors, colors, and cracks on the glass substrate S1 or S2 may be selectively inspected. Hereinafter, the first, second and third inspection units 401 may be used. Since the inspection method of 402, 403 is the same as in the first to third embodiments of the present invention, the overlapping description thereof will be omitted.

Meanwhile, FIGS. 16 and 17 show a seventh embodiment of the present invention, which is divided into alignment and cooling and process through the gate valve 803 to one transfer chamber 802 connected to the load lock 801. The inspection chamber 400 and the control unit 500 are applied to the multi-chamber process equipment 700 detachably coupled to the process chamber 804.

That is, according to the seventh exemplary embodiment of the present invention, the first, second, and third inspection units 401, 402, and 403 are connected to the gate valve 803 that connects the transfer chamber 802 and the plurality of process chambers 804, or the surrounding thereof. ) Is provided with an inspection unit 400, and the quality state of the glass substrate (S1 or S2) selectively enters the process chamber 804 divided into alignment or cooling or process in the transfer chamber 802 through this. It is to be able to check in advance.

In the same case, if there is no space to install the inspection unit 400 including the first, second, and third inspection units 401, 402, 403 in the transfer chamber 802, the gate valve 803 may be installed. .

To this end, although not shown, the gate valve 803 has a sensor for detecting a passage state of the glass substrate S1 or S2.

In addition, the first, second and third inspection units are configured to perform the inspection operation at the same time, to be performed sequentially, or to select only one under the control of the control unit.

In addition, the first, second and third inspection units may be independently installed on the gate valve connected to the alignment chamber, the gate valve connected to the cooling chamber, or the gate valve connected to the process chamber, or the first, The second inspection unit, the first and third inspection units, or the second and third inspection units may be provided, and the same description as in the first, second and third embodiments of the present invention will be omitted.

On the other hand, Figure 18 is an eighth embodiment of the present invention, which shows another embodiment of the third inspection unit 403 for inspecting whether or not there is a load on the glass substrate (S1 or S2).

That is, the eighth embodiment of the present invention prevents the light source unit 901 for inclining the light source into the glass substrate S1 or S2 and the light source incident from the light source unit 901 to the glass substrate S1 or S2. The contrast of the image is clearly transmitted through the first lens 902, the second lens 903, and the second lens 903, which sharpen the image contrast between the reflected light reflected from the glass substrate S1 or S2. And a screen detector 905 for projecting the reflected light to be reflected, and an image detector 905 for extracting the image processed image from the reflected light projected by the screen 904.

Here, the light source unit 901, the first and second lenses 902 and 903, the screen 904, and the image detector 905 are preferably configured in the inspection frame 600, but are not necessarily limited thereto.

In this case, the light source unit 901 is configured to operate according to the control operation of the control unit 500 when the inflow of the glass substrate S1 or S2 is detected by the sensor 601 installed at the tip of the inspection frame 600. If the third inspection unit 403 is not installed in the inspection frame 600, a separate substrate detection sensor 906 is provided in the light source unit 901 to operate the Xe-lamp and halogen lamp. , Any one of a laser, a line laser, an LED, and an illuminator of a light guide, and the image detector 905 includes an image pickup device.

Accordingly, when the inverted image detection is performed such that the white is black and the black is white, as shown by the image inverted by the image detector 905, that is, the shadow reflected on the screen 904, the third inspection unit 403 is connected with the third inspection unit 403. The connected control unit 500 is able to more effectively determine whether the occurrence of the shoulder in the IN-SITU method from the phase of the detected inversion.

On the other hand, Figure 19 is a ninth embodiment of the present invention, which shows another embodiment of the third inspection unit 403 for inspecting whether the occurrence of the fall on the glass substrate (S1 or S2).

That is, according to the ninth embodiment of the present invention, the first and second reflection mirrors facing each other at predetermined distances are disposed on the upper and lower surfaces of the glass substrates S1 and S2 when the glass substrates S1 or S2 are transferred. 907a and 907b are arranged, and a laser generator 908 for irradiating a laser is provided on one side of the first reflective mirror 907a on the upper surface, and a laser generator on the other side of the first reflective mirror 907a on the upper surface. When the laser beam irradiated from 908 is reflected through the first and second reflection mirrors 907a and 907b while passing through the glass substrate S1 or S2, it is necessary to measure whether the glass substrate S1 or S2 is generated. It is configured to include a spectrometer 909 for measuring the transmittance according to the wavelength of the reflected laser.

Here, the first and second reflection mirrors 907a and 907b, the laser generator 908, and the spectrometer 909 are preferably configured in the inspection frame 600, but are not necessarily limited thereto.

In this case, the laser generator 908 operates according to the control operation of the control unit 500 when the inflow of the glass substrate S1 or S2 is detected by the sensor 601 installed at the tip of the inspection frame 600. Although configured, if the third inspection unit 403 is not installed in the inspection frame 600, a separate substrate detection sensor (not shown) is placed in the laser generation unit 908 to perform the operation.

Therefore, when the wavelength analysis of the laser reflected by the spectroscope 909 is performed, the control unit 500 connected to the third inspection unit 403 is configured to the glass substrate S1 or S2 from the wavelength of the analyzed laser. By calculating the transmittance of the laser it is possible to more effectively determine whether the occurrence of the fall.

As described above, the present invention provides edge defects, discoloration, and color variation of glass substrates, as well as stains and scratches on the surface of glass substrates, between the respective successive processing apparatuses for manufacturing a thin film transistor liquid crystal display. It is equipped with a device that comprehensively inspects the presence of foreign substances and occurrence of cracks. Through this, the quality status of the glass substrate is continuously inspected in real time to improve the quality satisfaction of the product, as well as to inspect the quality of the glass substrate. Through time savings, the plasma-based processes such as continuous deposition, etching and sputtering can be achieved quickly.

The present invention is not limited to the above-described specific preferred embodiments, and various modifications can be made by any person having ordinary skill in the art without departing from the gist of the present invention claimed in the claims. Of course, such changes will fall within the scope of the claims.

Claims (86)

An extraction unit for extracting and supplying a glass substrate for manufacturing a thin film transistor liquid crystal display device to a process facility; An inspection unit which checks in real time the quality of the glass substrate when the glass substrate extracted by the extraction unit is supplied to a process facility; And, A control unit for controlling the inspection unit; Quality inspection apparatus of the glass substrate, characterized in that comprising a. The quality inspection apparatus of claim 1, wherein an inspection frame through which a glass substrate passes is installed at a front end or a rear end of the process equipment, and an inspection unit is installed on the inspection frame. The apparatus of claim 2, wherein the inspection frame comprises a sensor for sensing a passage state of the glass substrate. The apparatus of claim 1, wherein the inspection unit comprises a first inspection unit which inspects edge defects, stains and scratches, and foreign substances and discolors of the glass substrate. 2. The apparatus of claim 1, wherein the inspection unit includes a second inspection unit for inspecting the discolor and color of the glass substrate. The apparatus of claim 1, wherein the inspection unit comprises a third inspection unit for inspecting whether a surface of the glass substrate is generated with a bow. 2. The glass substrate of claim 1, wherein the inspection unit includes all of the first, second, and third inspection units, and the inspection operations are simultaneously performed under the control of the control unit. Quality inspection equipment. 8. The quality inspection apparatus of claim 7, wherein the first, second and third inspection units sequentially perform the inspection operation under the control of the control unit. 8. The quality inspection apparatus of claim 7, wherein the first, second and third inspection units are selected only by the inspection operation under the control of the control unit. The apparatus of claim 2, wherein the inspection unit includes first, second and third inspection units, wherein the first, second and third inspection units are selected and installed in the inspection frame. . 3. The apparatus of claim 2, wherein the inspection unit includes first and second inspection units, wherein the first and second inspection units are installed in an inspection frame at the same time. 3. The apparatus of claim 2, wherein the inspection unit includes first and third inspection units, wherein the first and third inspection units are installed in an inspection frame at the same time. 3. The apparatus of claim 2, wherein the inspection unit includes second and third inspection units, and the second and third inspection units are installed at the same time as the inspection frame. 12. The apparatus of claim 11, wherein the first and second inspection units check the quality of the glass substrate using a transmission illumination method. 15. The apparatus of claim 14, wherein the glass substrate is a transparent glass substrate so that the quality thereof can be checked by a transmission illumination method. 12. The apparatus of claim 11, wherein the first and second inspection units check the quality of the glass substrate by using a reflective illumination method. 17. The apparatus of claim 16, wherein the glass substrate is an opaque glass substrate so that the quality of the glass substrate can be checked by a reflective illumination method. 18. The apparatus of claim 17, wherein a metal film is formed on the opaque glass substrate. 5. The apparatus of claim 4, wherein the first inspection unit comprises a lighting unit and a camera. 6. 20. The apparatus of claim 19, wherein the lighting unit is installed under the inspection frame through which the glass substrate passes. 20. The apparatus of claim 19, wherein the lighting unit is installed at a predetermined inclination angle on an upper side of the inspection frame through which the glass substrate passes. 20. The glass substrate of claim 19, wherein the illumination unit is any one of an illuminator such as an Xe-lamp, a halogen lamp, a laser, a line laser, an LED, a light guide, and a high frequency fluorescent lamp. Quality inspection equipment. The method of claim 19, wherein the camera, A plurality of central cameras for inspecting edge defects at both ends of the glass substrate passing through the inspection frame; And, At least one pair of side cameras for inspecting edge defects at both end portions connecting both ends of the glass substrate to both sides of the central cameras with a symmetry axis; Quality inspection apparatus of the glass substrate, characterized in that comprising a. 24. The quality of the glass substrate according to claim 23, wherein the central camera is installed perpendicularly to the glass substrate at an upper side of the inspection frame through which the glass substrate passes so as to photograph the surface of the glass substrate as either a dark field image or a bright field image. Inspection device. 24. The apparatus of claim 23, wherein the center camera is installed at a predetermined inclination angle corresponding to the lighting unit at an upper side of the inspection frame through which the glass substrate passes. 24. The apparatus of claim 23, wherein the side camera is parallel to the center camera. 24. The apparatus of claim 23, wherein the side camera is inclined at a predetermined angle with respect to the center camera. 24. The apparatus of claim 23, wherein the side camera is a line scan CCD camera. The method of claim 5, wherein the second inspection unit is an illumination unit, a condenser lens, an optical fiber, And a spectroscope comprising a glass substrate quality inspection apparatus. 30. The apparatus of claim 29, wherein the condenser lens is selectively installed on either the upper side or the lower side of the inspection frame through which the glass substrate passes. 30. The apparatus of claim 29, wherein the condenser lens is connected to a spectroscope and an optical fiber. 30. The apparatus of claim 29, wherein the spectrometer is configured in a control unit. The method of claim 6, wherein the third inspection unit, A laser generator for irradiating a laser onto the glass substrate; And, A laser detector for measuring a relative thickness change of the glass substrate from the laser reflected from the surface and the bottom of the glass substrate; Quality inspection apparatus of the glass substrate, characterized in that comprising a. 34. The apparatus of claim 33, wherein the laser generating unit and the laser detecting unit face each other at an inclination angle corresponding to each other on an upper side of the inspection frame. The method of claim 6, wherein the third inspection unit, A light source unit for inclining the light source to the glass substrate; A screen projecting the reflected light of the glass substrate; And, An image detector for extracting an image processed image such as a shadow from the reflected light projected by the screen to measure whether or not the occurrence of a swell on the glass substrate; Quality inspection apparatus of the glass substrate, characterized in that comprising a. 36. The apparatus of claim 35, further comprising a first lens between the light source unit and the glass substrate to prevent the light source incident on the glass substrate from the light source unit from spreading. 36. The apparatus of claim 35, further comprising a second lens between the screen and the glass substrate to sharpen the contrast of the image with respect to the reflected light reflected from the glass substrate. 36. The apparatus of claim 35, wherein the light source unit comprises a substrate sensor so as to prevent shortening of its lifespan. 36. The apparatus of claim 35, wherein the light source unit is any one of an Xe-lamp, a halogen lamp, a laser, a line laser, an LED, and an illuminator of a light guard. 36. The apparatus of claim 35, wherein the image detector is an image pickup device that inverts white to black and white to black. The method of claim 6, wherein the third inspection unit, First and second reflective mirrors arranged to face each other at a predetermined distance from the upper and lower surfaces of the glass substrate when the glass substrate is transferred; A laser generator configured to irradiate a laser on one side of the first reflective mirror of the upper surface; And, The wavelength of the laser reflected on the other side of the first reflecting mirror of the upper surface and reflected to measure whether the glass substrate is generated when the laser irradiated from the laser generating unit is reflected through the first and second reflecting mirrors while passing through the glass substrate. A spectrometer for measuring transmittance according to the present invention; Quality inspection apparatus of the glass substrate, characterized in that comprising a. 42. The apparatus of claim 41, wherein the laser generating unit comprises a substrate detecting sensor so as to prevent shortening of its lifespan. The method of claim 1, wherein the control unit, A code conversion unit converting the information checked by the inspection unit into a digital code; An operation unit which mathematically compares the digital code with normal data; And, A warning unit for outputting a warning message when the mathematical comparison operation value exceeds a user specified tolerance range; Quality inspection apparatus of the glass substrate, characterized in that comprising a. The apparatus of claim 1, wherein the control unit controls an operation state of the inspection unit when a detection operation of a sensor for detecting a state where the glass substrate passes through the inspection frame is performed. The method of claim 1, wherein the extraction unit, A first rotating body; A multi-stage arm coupled to the first rotating body; A second rotating body coupled to one end of the arm; And, An extraction rod connected to the second rotating body to extract a glass substrate; Quality inspection apparatus of the glass substrate, characterized in that comprising a. 46. The apparatus of claim 45, wherein the extraction rod comprises an adsorbent on one surface thereof to prevent the separation of the glass substrate when the extraction rod is extracted. According to claim 1, wherein between the extraction unit and the process equipment comprises a test frame including a test unit to inspect the quality of the glass substrate when the glass substrate passes, the test frame guides the transfer of the glass substrate Quality inspection apparatus of the glass substrate, characterized in that the installation configuration in the transfer unit. 48. The apparatus of claim 47, wherein the transfer unit has a structure for transferring the glass substrate to the inspection unit by a roller rotating method. 49. The apparatus of claim 48, wherein the roller is supported by the shaft by the shaft, and both ends of the roller are coupled to and fixed to the support frame. 48. The apparatus of claim 47, wherein the transfer unit is configured to transfer the glass substrate to the inspection unit by an air flotation method. 51. The method of claim 50, wherein the air flotation transfer unit, A transport frame accommodating a glass substrate; A plurality of air nozzles arranged in the transfer frame to discharge air for supporting the glass substrate; An air storage unit supplying air to the plurality of air nozzles; And, An air generator configured to store air in the air storage unit; Quality inspection apparatus of the glass substrate, characterized in that comprising a. 53. The apparatus of claim 51, wherein the air storage unit is divided into first and second storage units. 53. The apparatus of claim 52, wherein the first storage unit is configured to be connected to an odd number of air nozzles through a plurality of air hoses. 53. The apparatus of claim 52, wherein the second storage unit is configured to be connected to an even number of air nozzles through a plurality of air hoses. 53. The apparatus of claim 52, wherein the first and second storage parts are connected to the air generator through individual supply hoses. The air generating unit of claim 51, wherein the air generating unit comprises a case having a plurality of outlet ports configured to simultaneously or selectively supply air to the first and second storage units through the supply hoses, and one side of the case includes a blower for suctioning outside air. Quality inspection device of the glass substrate, characterized in that the configuration. 59. The apparatus for inspecting quality of a glass substrate according to claim 56, wherein the outlet port constitutes an opening / closing valve whose opening and closing are simultaneously or selectively controlled by a control unit. 59. The apparatus of claim 56, wherein the case comprises one inlet port and a plurality of outlet ports, and the inlet port is connected to an air compressor driven and controlled by a control unit, and a plurality of outlet hoses are respectively provided. Quality inspection apparatus of the glass substrate, characterized in that through the first and second storage unit connection configuration. An extraction unit for sequentially extracting the glass substrates one by one; A transport unit for transporting the glass substrate extracted by the extraction unit; An inspection unit for checking the quality of the glass substrate supplied by the transfer unit; And, A control unit for controlling the inspection unit; Quality inspection apparatus of the glass substrate, characterized in that comprising a. In the multi-chamber type process equipment that detachably combines a plurality of process chambers divided into alignment and cooling and process through a gate valve to a transfer chamber connected to the load lock, The gate valve is installed and configured to inspect in advance the quality of the glass substrate selectively enters the process chamber divided into alignment or cooling or process in the transfer chamber, The inspection unit is a quality inspection apparatus of the glass substrate, characterized in that configured to be controlled by the control unit. 61. The apparatus of claim 60, wherein the gate valve comprises a sensor for sensing a passage state of the glass substrate. 61. The method of claim 60, wherein the inspection unit A first inspection unit for inspecting edge defects, stains, scratches, foreign matter and discoloration on the glass substrate; A second inspection unit for inspecting the discolor and color of the glass substrate; And, And a third inspecting unit inspecting whether or not the surface of the glass substrate is generated. 63. The apparatus for inspecting quality of a glass substrate according to claim 62, wherein the first, second and third inspection units simultaneously perform the inspection operation under the control of the control unit. 63. The apparatus for inspecting quality of glass substrates according to claim 62, wherein the first, second and third inspection units perform the inspection operation sequentially under the control of the control unit. 63. The apparatus of claim 62, wherein only one inspection operation is selected according to the control of the control unit. 63. The glass substrate of claim 62, wherein the first, second and third inspection units are independently installed on the gate valve to which the alignment chamber is connected, the gate valve to which the cooling chamber is connected, and the gate valve to which the process chamber is connected. Quality inspection device. 63. The apparatus of claim 62, wherein the first and second inspection units are installed at one gate valve at the same time. 63. The apparatus of claim 62, wherein the first and third inspection units are installed at one gate valve at the same time. 63. The apparatus of claim 62, wherein the second and third inspection units are installed at one gate valve at the same time. 68. The apparatus of claim 67, wherein the first and second inspection units check the quality of the glass substrate using a transmission illumination method. 68. The apparatus of claim 67, wherein the first and second inspection units check the quality of the glass substrate by using a reflective illumination method. 63. The apparatus of claim 62, wherein the first inspection unit comprises a lighting unit and a camera. The quality of the glass substrate of claim 72, wherein the illumination unit is any one of an illuminator such as an Xe-lamp, a halogen lamp, a laser, a line laser, an LED, a light guide, and a high frequency fluorescent lamp. Inspection device. The method of claim 72, wherein the camera, A plurality of central cameras for inspecting edge defects at both ends of the glass substrate passing through the inspection frame; And, At least one pair of side cameras for inspecting edge defects at both end portions connecting both ends of the glass substrate to both sides of the central cameras with a symmetry axis; Quality inspection apparatus of the glass substrate, characterized in that comprising a. 63. The apparatus of claim 62, wherein the second inspection unit comprises an illumination unit, a condenser lens, an optical fiber, and a spectrometer. 76. The apparatus of claim 75, wherein the condenser lens is connected to a spectroscope and an optical fiber. 76. The apparatus of claim 75, wherein the spectrometer is configured in a control unit. The method of claim 62, wherein the third inspection unit, A laser generator for irradiating a laser onto the glass substrate; And,  A laser detector for measuring a relative thickness change of the glass substrate from the laser reflected from the surface and the bottom of the glass substrate; Quality inspection apparatus of the glass substrate, characterized in that comprising a. The method of claim 62, wherein the third inspection unit, A light source unit for inclining the light source to the glass substrate; A screen projecting the reflected light of the glass substrate; And, An image detector for extracting an inverted image, such as a shadow, from the reflected light projected by the screen to measure whether or not the occurrence of a swell on the glass substrate; Quality inspection apparatus of the glass substrate, characterized in that comprising a. 80. The apparatus of claim 79, further comprising a first lens between the light source unit and the glass substrate to prevent the light source incident on the glass substrate from the light source unit from spreading. 80. The apparatus of claim 79, further comprising a second lens between the screen and the glass substrate to sharpen the contrast of the image with respect to the reflected light reflected from the glass substrate. 80. The apparatus of claim 79, wherein the light source unit comprises a substrate sensor so as to prevent shortening of its lifespan. 80. The apparatus of claim 79, wherein the light source unit is any one of an Xe-lamp, a halogen lamp, a laser, a line laser, an LED, and an illuminator of a light guard. 80. The apparatus of claim 79, wherein the image detector is an image pickup device that inverts white to black and white to black. The method of claim 62, wherein the third inspection unit, First and second reflective mirrors arranged to face each other at a predetermined distance from the upper and lower surfaces of the glass substrate when the glass substrate is transferred; A laser generator configured to irradiate a laser on one side of the first reflective mirror of the upper surface; And, The wavelength of the laser reflected on the other side of the first reflection mirror of the upper surface and reflected to measure whether the glass substrate is generated when the laser irradiated from the laser generator is reflected through the first and second reflection mirrors while passing through the glass substrate. A spectrometer for measuring transmittance according to the method; Quality inspection apparatus of the glass substrate, characterized in that comprising a. 86. The apparatus of claim 85, wherein the laser generation unit comprises a substrate detection sensor to prevent shortening of the life thereof.

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