CN107367516B - Coating detection and repair device and method thereof - Google Patents
Coating detection and repair device and method thereof Download PDFInfo
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- CN107367516B CN107367516B CN201710595274.3A CN201710595274A CN107367516B CN 107367516 B CN107367516 B CN 107367516B CN 201710595274 A CN201710595274 A CN 201710595274A CN 107367516 B CN107367516 B CN 107367516B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
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Abstract
A coating detection and repair device and a corresponding method thereof are provided, wherein a detection unit and a repair unit are integrated on a coating machine and used as a coating-detection-repair integrated machine. After the coating work of the coating machine is finished, the detection unit detects the bearing substrate and the flexible substrate which are arranged on the coating machine by means of micro-area light transmittance, and identifies and positions the existence of bubbles or particle foreign matters in the flexible substrate; the repairing unit adopts microwave to locally heat the bubbles detected and positioned, so that the bubbles expand and move to the surface of the flexible substrate to overflow, and marks and positions the defects needing to be subsequently repaired or avoided.
Description
Technical Field
The invention belongs to the field of flexible display device preparation, and particularly relates to preparation of an AMO L ED screen.
Background
As a carrier substrate, it is required to have good flatness, bending resistance, high temperature resistance, corrosion resistance, and good water and oxygen barrier properties.
In the preparation process generally adopted by the flexible substrate, the bubbles generated in the coating process are often the most, for example, bubbles existing in the stock solution but not completely removed in the process, bubbles caused by foreign matters on the substrate in the coating process and the like, bubbles with larger diameters are the same as foreign matter particles existing in the stock solution or introduced in the coating process of the flexible substrate, and in the subsequent processes of high-temperature film formation, annealing or excimer laser crystallization for alpha-Si crystallization, the bubbles are difficult to remove by means of substrate cleaning and the like, and are also difficult to be completely covered by an inorganic film layer or other coated organic film layers deposited in the subsequent gas phase, so that the bubbles are easy to be taken as 'singular points' of energy concentration to cause serious breakage or ablation, so that the substrate cannot play a water and oxygen barrier role, and simultaneously a pollution source is introduced to the subsequent support machine, increasing the risk of the manufacturing process and even affecting the safety of the equipment.
Therefore, the presence of particle contamination and bubbles during the coating of flexible substrates requires close monitoring. The conventional inspection method is to use an Automatic Optical Inspection (AOI) and a CCD scanning technique to inspect the so-called defects. However, the detection method has low efficiency and is easy to make mistakes; on the other hand, the automatic optical detection machine has a complex structure, needs to independently operate, needs to be provided with a transfer process after the flexible substrate is coated, and is easy to be subjected to secondary pollution in the transfer process.
Disclosure of Invention
The invention aims to provide a coating detection and repair device and a method for detecting and repairing a flexible substrate.
The invention is realized in such a way that a coating detection and repair device integrates a detection unit on a coating machine, the detection unit adopts a micro-area light transmittance method for detection, a detection object is a product to be detected on the coating machine, the product to be detected comprises a bearing substrate and a flexible substrate attached to the surface of the bearing substrate, the detection unit comprises a light source, an optical module, an integrating sphere and a spectrometer, the optical module vertically irradiates light emitted by the light source to the surface of the flexible substrate, the light is collected by the integrating sphere after penetrating through the flexible substrate and the bearing substrate, and then the light is transmitted to the spectrometer by the integrating sphere to analyze the light quantity so as to judge whether a defect exists between the bearing substrate and the flexible substrate.
Wherein, the light source is a high-brightness xenon lamp or a high-pressure mercury lamp.
Wherein the optical module is a collimating or focusing module.
Wherein the spectrometer is a wide spectrometer.
The coating detection and repair device further comprises a repair unit arranged on the coating machine, and the repair unit repairs the detected defects by emitting the microwaves.
The repairing unit further comprises a microwave generator, a power modulation unit, a microwave beam splitting device and a microwave transmitting antenna, wherein the power modulation unit maintains microwave energy generated by the microwave generator at a certain time sequence, and the microwave transmitting antenna transmits microwaves to the flexible defects after the microwave energy is modulated by the microwave beam splitting device.
Wherein the microwave beam splitting device comprises at least one of an isolator or an attenuator and is used for extracting the microwave signal.
The repairing unit further comprises a feedback unit, a data processing unit and a marking unit, wherein the feedback unit receives the microwave signals, the data processing unit controls a repairing time sequence, the microwave signals received by the feedback unit are analyzed, whether the repaired product has residual defects or not is judged, defect positions and physical characteristics are calculated, and the marking unit marks the physical positions of the residual defects.
The detection and repair method using the detection and repair device of the invention comprises the following steps:
placing a product to be detected on a coating machine, wherein the product to be detected comprises a bearing substrate and a flexible substrate attached to the surface of the bearing substrate;
light emitted by the detection unit is vertically incident to the surface of the flexible substrate;
the integrating sphere collects light rays penetrating through the flexible substrate and the bearing substrate;
the spectrometer is used for comparing and detecting the light quantity and judging whether the defects exist or not so as to trigger the repairing unit to repair the defects.
Further, if the repair mechanism is triggered, the repair steps are as follows:
the repairing unit emits microwave energy to the defect and heats and expands the bubbles until the bubbles overflow;
the repairing unit receives the microwave signal and carries out comparison judgment so as to trigger the marking unit;
and marking the defects remained after the repair.
By introducing a micro-area light transmittance detection method, scanning and distinguishing air bubbles or foreign particles on the coated flexible substrate by using different transmission spectra obtained by testing different positions, positioning accurate physical positions of the air bubbles or foreign particles, and further heating the positioned air bubbles by using the microwave beam, so that the air bubbles in the flexible substrate overflow before the whole flexible substrate is cured, and the risk of the substrate brought by the air bubbles is avoided. Meanwhile, the detected and positioned foreign particles can be buried by means of covering and the like in the subsequent manufacturing process, and larger foreign particles which cannot be buried are marked as failure display units in the subsequent manufacturing process, namely, as 'dark spots' in the display program, so that the risk of the pollution to the flexible substrate is reduced.
Drawings
In order to more clearly illustrate the technical solution of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of a coating detection and repair apparatus of the present invention;
FIG. 2 is a schematic view of the flexible substrate;
FIG. 3 is a detailed structural diagram of the detecting unit;
FIG. 4 is a transmission spectrum obtained by the detection unit;
FIG. 5 is a detailed structural diagram of the repair unit;
FIG. 6 is a repaired completed flexible display panel;
FIG. 7 is a flow chart of a method of using the present assay repair device.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
As shown in fig. 1, in the coating detection and repair device provided in an embodiment of the present invention, the detection unit 300 is integrated on the coating machine 10, the coating machine 10 includes a machine table 200, a driving unit 201, a gantry 203, a spray head 204, and the monitoring and processing system 202, the detection unit 300 is disposed on the spray head, and a micro-area light transmission sensor is used to detect the product to be detected placed on the coating machine 10, where the product to be detected includes a carrier substrate 100 and a flexible substrate 101 attached to the surface of the carrier substrate 100, and the carrier substrate 100 is fixed on the machine table 200. The monitoring processing system 202 sends an instruction to the driving unit 201, and the driving unit 201 drives the gantry 203 and the spraying head 204, so that the detection unit 300 moves in a three-dimensional direction relative to the product to be detected, and the monitoring processing system 202 collects and processes the detection signal provided by the detection unit 300.
Fig. 2 is a schematic view of the flexible substrate, and the carrier substrate 100 is a glass plate in this embodiment; the flexible substrate 101 in this embodiment is a polyimide film layer coated and cured on a glass plate; in the final flexible display screen, the polyimide film layer is the support layer of the flexible display screen and the water and oxygen barrier layer below the support layer. In this embodiment, the polyimide film is divided into two regions on the glass substrate for coating, A-A 'and B-B' are the coating directions of the coater, 102 is the bubble with a diameter of more than 500 μm, which is not marked in FIG. 2.
When the device works, the monitoring processing system 202 sends an instruction to the driving unit 201, the driving unit 201 drives the coating machine 10 to coat according to the A-A 'or B-B' direction, then the detecting unit 300 with the micro-area light transmission sensor and the product to be detected are driven to move relatively, the detection of the optical transmittance in the small substrate area is completed one by one, and the transmission spectrum is sent to the monitoring processing system 202 for data processing and signal discrimination, so that the detection function of the device is realized.
Compared with CCD scanning detection, the micro-area light transmittance technology adopted by the flexible display screen can obtain higher error rate and improve the detection efficiency. The detection unit 300 is integrated on the coating machine 10, so that the process of single inspection is reduced, the time is saved, and the condition that the flexible substrate 101 is subjected to secondary pollution in the circulation process is avoided, thereby improving the yield of the flexible display screen preparation.
Fig. 3 is a detailed structure of the detection unit 300, the light source 301 and the optical module 302 are located below the product to be detected, and move synchronously with the integrating sphere 303 and the spectrometer 304 which are spaced above the product to be detected, the light source 301 emits a group of detection light beams, after the action of the optical module 302, the light beams converge into light spots with a certain shape and size and vertically enter the surface of the flexible substrate 101, and the integrating sphere 303 collects the light beams transmitted through the flexible substrate 101 and transmits the light transmission amounts under different wavelengths to the spectrometer 304 for detection.
Compared with an automatic optical inspection machine (AOI), the inspection unit 300 has a smaller volume and a simpler structure, and is easier to integrate on the coater 10 and also easier to maintain and maintain at a later stage.
Preferably, the light source 301 is a high-intensity xenon lamp or a high-pressure mercury lamp.
Preferably, the optical module 302 has a collimating or focusing function to further ensure that the light beam is perpendicularly incident to the flexible substrate 101.
Preferably, the spectrometer 304 is a wide spectrometer to expand the detectable range and avoid missing the transmitted light beam.
Fig. 4 is a transmission spectrum obtained by the detection unit 300 in this embodiment, which includes a transmission spectrum 306 of the flexible substrate 101 with no defect, a transmission spectrum 305 of bubbles, and a transmission spectrum 307 of particles. If particulate foreign matter or bubbles exist in the flexible substrate 101, the transmitted spectrum is completely different from the spectrum of the entire flexible substrate 101. It was confirmed that, when the flexible substrate 101 contains large foreign particles, the transmittance value in a broad spectral range is lower than that of the flexible substrate 101 having no defects intact; in contrast, when the flexible substrate 101 contains large bubbles, the transmittance value in a wide spectral range is higher than that of the flexible substrate 101 having no defects intact.
Obviously, the spectra of different micro areas are collected one by one and are processed and determined in a centralized manner, so that the defect condition of the flexible substrate 101 can be detected comprehensively, and information support is provided for the next processing.
The repair unit 400 is disposed on the spray head 204, and the driving unit 201 drives the repair unit 400 to move in a three-dimensional direction relative to the product to be tested.
As shown in fig. 5, when the repair operation is performed, the flexible substrate 101 needs to be in an uncured state, the microwave generator 401 generates microwave energy with a certain power for the position 103 corresponding to the bubble in the wet film of the flexible substrate, the power modulation unit 402 maintains the energy at a stable microwave output power within a certain time sequence (i.e., a repair time period), and after the microwave is modulated by the microwave beam splitting device 403, the microwave transmitting antenna 404 emits microwave to the position 103 corresponding to the bubble in the flexible substrate to perform local heating, so that the bubble expands and moves to the surface of the flexible substrate 101 and overflows.
Compared with the prior art that the bubbles are ablated by using the pulse laser beam, or the diameters of the bubbles exceed 500 mu m, which can directly cause the flexible substrate 101 to be discarded, scrapped and other repair treatment means, the microwave repair technology can greatly improve the adverse effect caused by the bubbles generated in the coating process and improve the preparation yield.
Preferably, the microwave beam splitting device 403 may include at least one of an isolator or an attenuator unit, and is configured to extract the current microwave signal and provide a basis for subsequent analysis and determination.
Preferably, the microwave transmitting antenna 404 may further receive a feedback microwave signal, send the feedback microwave signal to the feedback unit 405, and the data processing unit 406 compares and determines the positive (negative) direction microwave with the test spectrum acquired by the detecting unit 300 or the microwave signal extracted by the microwave beam splitting device 403, calculates and stores the position and physical characteristics of the defect, modulates the frequency, power, attenuation speed and other parameters of the microwave, and controls a series of software functions such as a repaired timing signal. The marking unit 407 adopts laser marking to position the physical position of the current defect, which may be optical marking, and only losslessly marks the current defect coordinates and transmits them to the microwave unit for repair processing; or a physical mark, and a special mark is ablated at the current defect coordinate position, so that the subsequent operations of slice analysis and the like are facilitated.
As shown in fig. 6, the original bubbles are repaired, and slight defects or spots may remain on the surface, but such defects may be covered by the subsequent films, such as other inorganic deposition layers 104, and thus no cracks occur during the process of excimer laser crystallization of a-Si. And finishing the preparation of a subsequent display unit device on the repaired flexible substrate 101 to obtain a complete flexible display panel 105.
The detection and repair method adopting the device is shown in figure 7, firstly, whether the defect needing to be repaired exists is judged through detection, and a product to be detected is placed on a coating machine and comprises a bearing substrate and a flexible substrate attached to the surface of the bearing substrate; starting the detection unit to enable the detection unit to emit light and vertically incident to the surface of the flexible substrate; collecting light rays penetrating through the flexible substrate and the bearing substrate through the integrating sphere; comparing and detecting the light quantity through the spectrometer, and judging whether a defect exists or not so as to determine whether a repair unit is triggered to repair the defect or not;
if the defect needing to be repaired exists, the repairing unit emits microwave energy to the defect, and bubbles are heated and expanded to overflow; the repairing unit is also responsible for receiving the microwave signal and performing comparison and judgment to trigger the marking unit; and the marking unit marks the repaired residual defects.
Scanning and distinguishing bubbles or foreign particles on the coated flexible substrate 101 by using different transmission spectra obtained by testing different positions, positioning the accurate physical positions of the bubbles or foreign particles, and further heating the positioned bubbles by using a microwave beam, so that the bubbles overflow before the whole flexible substrate 101 is cured, and the risk brought to the flexible substrate 101 by the bubbles is avoided. Meanwhile, the detected and positioned foreign particles can be buried by means of covering and the like in the subsequent process, and larger foreign particles which cannot be buried are marked as failure display units in the subsequent process, namely, as 'dark spots' in the display program, so that the risk of the pollution to the flexible substrate 101 is reduced.
In order to obtain a better repairing effect, the flexible substrate 101 needs to be ensured not to be cured when the method is used for repairing, and the repairing process is preferably performed within 30 minutes after the coating is completed.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention.
Claims (8)
1. The coating detection and repair device is characterized in that a detection unit is integrated on a coating machine, the coating machine comprises a machine table, a driving unit, a portal frame, a spraying head and a monitoring and processing system, the detection unit is arranged on the spraying head, the spraying head is arranged on the portal frame, the portal frame is arranged above the machine table, the driving unit drives the portal frame and the spraying head, a micro-area light transmittance method is adopted to detect a product to be detected placed on the coating machine, the product to be detected comprises a bearing substrate and a flexible substrate attached to the surface of the bearing substrate, and the bearing substrate is fixed on the machine table; the coating detection and repair device comprises a coating machine, a detection unit and a repair unit, wherein the detection unit comprises a light source, an optical module, an integrating sphere and a spectrometer, the light source and the optical module are positioned below a product to be detected and synchronously move with the integrating sphere and the spectrometer which are spaced above the product to be detected, the optical module vertically irradiates light emitted by the light source onto the surface of a flexible substrate, the light is collected by the integrating sphere after penetrating through the flexible substrate and a bearing substrate and is then transmitted to the spectrometer by the integrating sphere to analyze the light quantity so as to judge whether a defect exists between the bearing substrate and the flexible substrate, the coating detection and repair device further comprises the repair unit integrated on the coating machine, the repair unit is arranged on the coating head, when the repair work is carried out, the flexible substrate needs to be in an uncured state, the repair unit is used for emitting microwaves to repair bubble defects in the detected defects by the microwaves, the repairing unit further comprises a microwave generator, a microwave beam splitting device, a microwave transmitting antenna, a feedback unit and a data processing unit, wherein microwaves generated by the microwave generator are modulated by the microwave beam splitting device and then are transmitted to the bubble defects of the flexible substrate through the microwave transmitting antenna, the microwave beam splitting device is used for modulating and extracting microwave signals, the feedback unit receives feedback microwave signals received by the microwave transmitting antenna, the data processing unit controls repairing time sequence, compares, discriminates and analyzes the feedback microwave signals received by the microwave transmitting antenna and received by the feedback unit with the test spectrum acquired by the detection unit or the microwave signals extracted by the microwave beam splitting device, judges whether residual defects exist in repaired products, and calculates defect positions and physical characteristics.
2. The coating detection and repair device of claim 1, wherein the light source is a high-intensity xenon lamp or a high-pressure mercury lamp.
3. The coating detection repair set of claim 1, wherein the optical module is a collimating or focusing module.
4. The coating detection repair device of claim 1, wherein the spectrometer is a wide spectrometer.
5. The coating detection and repair device of claim 1, wherein the repair unit further comprises a power modulation unit, the power modulation unit maintains microwave energy generated by the microwave generator for a certain time sequence, and the microwaves emitted in the time sequence are modulated by the microwave beam splitting device and then emitted to the bubble defects of the flexible substrate by the microwave emitting antenna.
6. The coating detection and repair device of claim 5, wherein the microwave beam splitting device comprises an isolator and/or an attenuator, and the isolator and/or the attenuator are used for extracting the current microwave signal and providing a basis for subsequent analysis and judgment.
7. The coating inspection repair device of claim 5, wherein the repair unit further comprises a marking unit for marking a physical location of the remaining defects.
8. A method for inspecting and repairing a flexible substrate using the coating inspecting and repairing apparatus according to any one of claims 1 to 7, comprising the steps of:
placing a product to be detected on a coating machine, wherein the product to be detected comprises a bearing substrate and a flexible substrate attached to the surface of the bearing substrate;
starting the detection unit to enable the detection unit to emit light and vertically incident to the surface of the flexible substrate;
collecting light rays penetrating through the flexible substrate and the bearing substrate through the integrating sphere;
comparing and detecting the light quantity through the spectrometer, judging whether a bubble defect exists or not, triggering a repairing unit to emit microwave energy to the defect, and heating and expanding the bubble defect until the bubble defect overflows;
the repairing unit receives the feedback microwave signal received by the microwave transmitting antenna, compares the feedback microwave signal with the test spectrum acquired by the detection unit or the microwave signal extracted by the microwave beam splitting device, judges whether the repaired product has residual defects or not, and calculates the positions and physical characteristics of the defects to trigger the marking unit;
and the marking unit marks the repaired residual defects.
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| US10553506B2 (en) | 2017-12-28 | 2020-02-04 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Repair method and apparatus for flexible display panel and the flexible display panel thereof |
| CN108198822B (en) * | 2017-12-28 | 2020-08-04 | 武汉华星光电半导体显示技术有限公司 | Flexible display panel repairing method and device and flexible display panel |
| CN110491993B (en) * | 2019-07-24 | 2022-06-10 | 武汉华星光电半导体显示技术有限公司 | Preparation method of PI substrate and display device thereof |
| CN113019778B (en) * | 2021-03-03 | 2022-04-12 | 湖南昕逸辰科技有限公司 | AF film coating method and device |
| CN113601984B (en) * | 2021-08-11 | 2022-09-20 | 四川轻化工大学 | High-precision printing type coating machine and control method thereof |
| CN114383810B (en) * | 2022-01-10 | 2023-09-12 | 中国建筑材料科学研究总院有限公司 | Device and method for pre-judging and discriminating leakage points of optical fiber image transmission element or material |
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