CN104808586A - Coating machine - Google Patents
Coating machine Download PDFInfo
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- CN104808586A CN104808586A CN201510187495.8A CN201510187495A CN104808586A CN 104808586 A CN104808586 A CN 104808586A CN 201510187495 A CN201510187495 A CN 201510187495A CN 104808586 A CN104808586 A CN 104808586A
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- Prior art keywords
- coating
- frame
- reflection ray
- coating machine
- dispense tip
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/406—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by monitoring or safety
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
Abstract
The invention provides a coating machine. The coating machine comprises a first frame and a coating head arranged on the first frame and further comprises a second frame provided with an optical detection system for detecting the surface of a base plate, and a drive mechanism connected to the second frame for driving the second frame to simultaneously move behind the first frame in a first direction when the coating head moves in the first direction for coating. The optical detection system is used for detecting a film layer on the surface of the base plate coated by the coating head. According to the coating machine, the second frame provided with the optical detection system and the first frame provided with the coating head move simultaneously, and the optical detection system is used for detecting the film layer on the surface of the coated base plate during coating to achieve real-time monitoring of the coating effect of the coating head to further find out defective conditions timely and avoid the production of a batch of defective base plates.
Description
Technical field
The present invention relates to display manufacture technology field, refer in particular to a kind of coating machine.
Background technology
Along with the development of display technique, large scale, high-quality, low cost become the trend of display technology development.Colored filter, as the main composition of Thin Film Transistor-LCD TFT-LCD, largely affects the cost of product.In the processing procedure of large scale colored filter, slit Slit coating method is requisite making technology, the production process of each rete is coated on glass substrate by various photoresist and is formed through exposure technology, and therefore the thickness of each rete determines the cost of colored filter.
Along with the demand of low cost and the development of photoresist manufacturing technology, during colored filter makes, the thickness of each rete just constantly reduces; On the other hand, for improving production capacity, during each operation makes, coating machine needs high-speed coating correspondence (>200mm/sec).Normally, thickness is thicker, and high-speed coating is more easily corresponding; Otherwise when thickness reduces, low speed coating is more easily corresponding.
For Slit coating method, in high-speed coating, when dispense tip (Nozzle) blocking, Nozzle external contamination, or coating speed and Thickness Matching bad time, very easily there is the situation of wire bad (vertical line nurse draws Mura) and rupture of membranes, once occur to occur by batch aborning.
Produce in line structure in current large scale, the image detection device usually arranged independent of coating machine detects the coating condition of coating machine.But, because coating process completes in different seat in the plane from testing process, coated substrates need can enter image detection device after drying under reduced pressure, has therefore had the substrate of about 10 to occur exception when Mura finds that coating is bad, can bring no small loss not in time thus owing to detecting.
Summary of the invention
The object of technical solution of the present invention is to provide a kind of coating machine, and for solving in the painting process of prior art display making, coating process detects and causes the bad substrate of coating to occur, to the damnous problem of the making of display not in time.
The invention provides a kind of coating machine, the dispense tip comprising the first frame and be arranged in the first frame, wherein said coating machine also comprises:
Arrange the second frame of Systems for optical inspection, described Systems for optical inspection is for detecting substrate surface situation;
Driving mechanism, be connected with described second frame, for to move in the process carrying out being coated with along first direction at described dispense tip, drive described second frame simultaneously along first direction action after described first frame, described Systems for optical inspection to described dispense tip be coated with after substrate surface thin layer detect.
Preferably, coating machine described above, wherein said first frame is integrated with described second frame and is connected, and described first frame is identical along the speed of described first direction movement with described second frame.
Preferably, coating machine described above, wherein said Systems for optical inspection, by detecting the light intensity of the reflected light of light after the reflection of substrate surface thin layer being emitted to substrate surface thin layer, judges substrate surface thin layer situation.
Preferably, coating machine described above, wherein said dispense tip has a coating width along in the second direction perpendicular to described first direction, and described Systems for optical inspection comprises:
Illuminating source, range of exposures is in this second direction corresponding with described dispense tip coating width in this second direction, and described illuminating source is used for towards coating metacoxal plate surface film layer emission of light;
Optical signal receiver, for receiving the reflection ray after the reflection of substrate surface thin layer;
Signal analysis device, for the reflection ray received according to described optical signal receiver, judges whether coating metacoxal plate surface film layer exists bad.
Preferably, coating machine described above, wherein said dispense tip has a coating width along in the second direction perpendicular to described first direction, and described Systems for optical inspection comprises:
Illuminating source, for emission of light;
Reflective prism, for receiving the light emitted line of illuminating source, and by emission of light towards the reflection of coating metacoxal plate surface film layer, obtain the first reflection ray, wherein said first reflection ray range of exposures is in this second direction corresponding with described dispense tip coating width in this second direction; Described reflective prism also for receiving after described first reflection ray arrives coating metacoxal plate surface film layer, through the second reflection ray of substrate surface thin layer reflection, and by the second reflection ray secondary reflection again, obtains the 3rd reflection ray;
Optical signal receiver, for receiving described 3rd reflection ray;
Signal analysis device, for described 3rd reflection ray received according to described optical signal receiver, judges whether coating metacoxal plate surface film layer exists bad.
Preferably, coating machine described above, wherein said dispense tip, described illuminating source and described reflective prism are parallel to each other, and have development length respectively along described second direction.
Preferably, coating machine described above, wherein said optical signal receiver and described dispense tip be arranged in parallel, and width is in a second direction corresponding with described dispense tip coating width in a second direction.
Preferably, coating machine described above, wherein said optical signal receiver is formed as along the integrative-structure that described second direction is arranged or comprises multiple light signal receiving element, is spaced successively along described second direction.
Preferably, coating machine described above, wherein said signal analysis device comprises:
Coordinate setting device, for calculate described optical signal receiver receive the position coordinates of reflection ray relative to coated substrates;
Light intensity comparator device, for the reflection ray of reflection ray corresponding for position coordinates place to be detected and other position coordinates places is compared, when judging that the reflection ray at position coordinates place to be detected is different from the reflection ray at other position coordinates places, then determine that position coordinates place to be detected substrate surface exists bad.
Preferably, coating machine described above, wherein said driving mechanism also carries out coating process for driving described first frame to drive described dispense tip to move along first direction.
Preferably, coating machine described above, wherein said illuminating source send light wavelength coverage be 577 to 597 nanometers.
At least one in specific embodiment of the invention technique scheme has following beneficial effect:
Described coating machine will arrange the second frame action together with the first frame arranging dispense tip of Systems for optical inspection, in coating process, utilize Systems for optical inspection to carry out quality testing to the substrate surface thin layer after coating like this, realize the real-time monitoring to dispense tip Painting effect, with Timeliness coverage unfavorable condition, prevent the substrate that batch is bad, thus solve in the painting process of prior art display making, coating process detects and causes the bad substrate of coating to occur, to the damnous problem of the making of display not in time.
Accompanying drawing explanation
Fig. 1 represents the perspective view of coating machine described in first embodiment of the invention;
Fig. 2 represents that in first embodiment of the invention, Systems for optical inspection detects the schematic diagram of substrate surface thin layer;
Fig. 3 represents the perspective view of coating machine described in second embodiment of the invention;
Fig. 4 represents that in second embodiment of the invention, Systems for optical inspection detects the schematic diagram of substrate surface thin layer;
The detection signal figure of light intensity and reflected light coordinate when Fig. 5 A and Fig. 5 B represents that substrate surface thin layer is normal;
The detection signal figure of light intensity and reflected light coordinate when Fig. 6 A and Fig. 6 B represents that substrate surface thin layer exists bad.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly, describe the present invention below in conjunction with the accompanying drawings and the specific embodiments.
Coating machine described in the specific embodiment of the invention, the dispense tip comprising the first frame and be arranged in the first frame, wherein said coating machine also comprises:
Arrange the second frame of Systems for optical inspection, described Systems for optical inspection is for detecting substrate surface situation;
Driving mechanism, be connected with described second frame, for to move in the process carrying out being coated with along first direction at described dispense tip, drive described second frame simultaneously along first direction action after described first frame, described Systems for optical inspection to described dispense tip be coated with after substrate surface thin layer detect.
The coating machine of above-described embodiment, in coating process, second frame action together with the first frame arranging dispense tip of Systems for optical inspection is set, in coating process, utilize Systems for optical inspection to carry out quality testing to the substrate surface thin layer after coating like this, realize the real-time monitoring to dispense tip Painting effect, with Timeliness coverage unfavorable condition, prevent the substrate that batch is bad, thus solve in the painting process of prior art display making, coating process detects and causes the bad substrate of coating to occur, to the damnous problem of the making of display not in time.
The coating machine of the embodiment of the present invention, Systems for optical inspection, by detecting the light intensity of the reflected light of light after the reflection of substrate surface thin layer being emitted to substrate surface thin layer, judges substrate surface thin layer situation.Certainly, optical detection statistics is not limited to this one to the mode that base plate coating rear surface thin layer quality detects, and other modes also can be adopted to realize.
Be described in detail below in conjunction with the concrete structure of accompanying drawing to specific embodiment of the invention coating machine.
Composition graphs 1, coating machine described in first embodiment of the invention, comprise the first frame 10 and the second frame 20, wherein dispense tip 11 is arranged in the first frame 10, and the second frame 20 is provided with Systems for optical inspection.
In first embodiment of the invention, first frame 10 is connected with the second frame 20 one, when the dispense tip 11 of coating machine carries out painting work along first direction (being parallel to X-direction) movement above substrate 30, second frame 20 is identical along the speed of first direction movement with the first frame 10, synchronizing moving.Relative to the moving direction of first direction, the second frame 20 is after the first frame 10, and after dispense tip 11 pairs of substrate surfaces are coated with, Systems for optical inspection detects the substrate surface thin layer after coating.
Based on above structure, coating machine also comprises a driving mechanism, moves for driving the first frame 10 and the second frame 20 simultaneously.
It will be appreciated by those skilled in the art that, dispense tip 11 has a coating width perpendicular in the second direction (being also namely parallel to the Y-direction of Fig. 1) of moving direction (first direction), this coating width is usually corresponding with the width of substrate 30 in Y-direction shown in Fig. 1, like this through the moving process of coating machine above substrate 30, the surface of whole substrate 30 is disposable completes coating process.
In addition, in first embodiment of the invention, consult Fig. 1, Systems for optical inspection is arranged on the second frame 20 side relative with substrate 30, specifically comprises:
Illuminating source 41, the range of exposures in second direction (Y-direction) is corresponding with the coating width of dispense tip 11 in second direction (Y-direction); Illuminating source 41 is for towards coating metacoxal plate 30 surface film layer emission of light;
Optical signal receiver 42, for receiving the reflection ray after the reflection of substrate 30 surface film layer;
Signal analysis device (not shown), for the reflection ray received according to optical signal receiver 42, judges whether coating metacoxal plate surface film layer exists bad.
Figure 2 shows that in first embodiment of the invention, Systems for optical inspection detects the principle of substrate surface thin layer, illuminating source 41 is towards substrate 30 surface film layer emission of light, through substrate 30 surface film layer reflection light receive by optical signal receiver 42, it will be appreciated by those skilled in the art that, when whole substrate 30 surface film layer does not have unfavorable condition, light intensity signal through substrate 30 surface film layer reflection ray is stablized, there will not be fluctuation, when unfavorable condition appears in substrate 30 surface film layer, during if any rupture of membranes or vertical line, there is fluctuation in the light intensity signal through substrate surface thin layer reflection ray, different from the light intensity of the reflection ray of other positions, based on this principle, whether the reflection ray that signal analysis device is received by analysis optical signal receiver there is fluctuation, and there is the position of fluctuation, namely can judge whether coating metacoxal plate surface film layer exists bad, and bad position.
Preferably, in the first embodiment, optical signal receiver and dispense tip 11 be arranged in parallel, and corresponding with dispense tip 11 coating width in a second direction perpendicular to the width on dispense tip 11 moving direction (second direction).
The present invention also provides the coating machine of the second embodiment, as shown in Figure 3, in a second embodiment, identical with the first embodiment, coating machine comprises the first frame 10 and the second frame 20 that one connects, and dispense tip 11 is arranged in the first frame 10, and the second frame 20 is provided with Systems for optical inspection.Further, identical with the first embodiment, the first frame 10 is connected with the second frame 20 one, and the second frame 20 is identical along the speed of first direction movement with the first frame 10, synchronizing moving.Second frame 20 is after the first frame 10, and after dispense tip 11 pairs of substrate surfaces are coated with, Systems for optical inspection detects the substrate surface thin layer after coating.In addition, dispense tip 11 has a coating width perpendicular in the second direction (being also namely parallel to the Y-direction of Fig. 1) of moving direction (first direction), this coating width is usually corresponding with the width of substrate 30 in Y-direction shown in Fig. 1, like this through the moving process of coating machine above substrate 30, the surface of whole substrate 30 is disposable completes coating process.
Described in second embodiment, the Systems for optical inspection of coating machine is different compared to the first embodiment.Consult Fig. 3 and Fig. 4, Systems for optical inspection is arranged on the second frame 20 side relative with substrate 30, specifically comprises:
Illuminating source 41, for emission of light;
Reflective prism 43, for receiving the light emitted line of illuminating source 41, and by emission of light towards the reflection of coating metacoxal plate 30 surface film layer, obtain the first reflection ray 51, wherein said first reflection ray 51 range of exposures is in a second direction corresponding with dispense tip 11 coating width in a second direction; Reflective prism 43 also for receiving after the first reflection ray 51 arrives coating metacoxal plate 30 surface film layer, through the second reflection ray 52 of substrate 30 surface film layer reflection, and by the second reflection ray 52 secondary reflection again, obtains the 3rd reflection ray 53;
Optical signal receiver 42, for receiving the 3rd reflection ray 53;
Signal analysis device (not shown), for the 3rd reflection ray 53 received according to optical signal receiver 42, judges whether coating metacoxal plate 30 surface film layer exists bad.
Consult Systems for optical inspection in second embodiment of the invention shown in Fig. 4 and detect the principle schematic of substrate surface thin layer.The light emitted line of illuminating source 41 transfers to reflective prism 43, and illuminating source 41 emitted light towards the reflection of substrate 30 surface film layer, is obtained the first reflection ray 51 by reflective prism 43; Afterwards, the first reflection ray 51 transfers to substrate 30 surface film layer, through substrate 30 surface film layer reflection acquisition second reflection ray 52; Second reflection ray 52 arrives again to reflective prism 43, again reflects acquisition the 3rd reflection ray the 53, three reflection ray 53 transfer to optical signal receiver 42 through reflective prism 43.
Preferably, reflective prism 43 is provided with multiple prism structure towards different directions, utilize the setting of reflective prism 43, after illuminating source 41 emitted light is reflected by reflective prism 43, all transfer to substrate 30 surface film layer with same direction, ensure illuminating source 41 send light and all can transfer on substrate 30; Can ensure again again reflect by reflective prism acquisition, transfer to the 3rd reflection ray 53 of optical signal receiver 42, all receive by optical signal receiver 42.
Preferably, dispense tip 11, illuminating source 41 and reflective prism 43 are parallel to each other, and the direction (second direction) perpendicular along dispense tip 11 moving direction has development length respectively; Further preferably, optical signal receiver 42 also parallels setting with dispense tip 11, and width is in a second direction corresponding with dispense tip width in a second direction.
Utilize and above-mentioned structure is set, when whole substrate surface thin layer does not have unfavorable condition, light intensity signal through substrate 30 surface film layer reflection ray is stablized, there will not be fluctuation, by analyzing optical signal receiver 42 received optical signal, the detection signal figure of light intensity and reflected light coordinate shown in Fig. 5 A and Fig. 5 B can be obtained; When unfavorable condition appears in substrate 30 surface film layer, during if any rupture of membranes or vertical line, there is fluctuation in the light intensity signal through substrate 30 surface film layer reflection ray, different from the light intensity of the reflection ray of other positions, can obtain the detection signal figure of light intensity and reflected light coordinate shown in Fig. 6 A and Fig. 6 B; Based on this principle, whether the reflection ray that signal analysis device is received by analysis optical signal receiver there is fluctuation, and occurs the position of fluctuation, namely can judge whether coating metacoxal plate surface film layer exists bad, and bad position.
In the first embodiment and the second embodiment, described signal analysis device specifically can comprise:
Coordinate setting device, for calculate described optical signal receiver receive the position coordinates of reflection ray relative to coated substrates;
Light intensity comparator device, for the reflection ray of reflection ray corresponding for position coordinates place to be detected and other position coordinates places is compared, when judging that the reflection ray at position coordinates place to be detected is different from the reflection ray at other position coordinates places, then determine that position coordinates place to be detected substrate surface exists bad.
Preferably, this signal analysis device also comprises a display, for the signal fluctuation of display light signal receiver received light, understands coating process situation to make technician in time according to shown image.
In addition, in the first embodiment and the second embodiment, optical signal receiver 42 is formed as, along with the upper integrative-structure that arranges in the perpendicular direction of the moving direction of dispense tip 11 (second direction) or comprise multiple light signal receiving element, being spaced successively along described second direction; By optical signal receiver 42 along the continuous setting in second direction, and illuminating source 41 is along the continuous setting in second direction, cover whole substrate 30 in a second direction, substrate 30 surface film layer on the whole substrate width direction of dispense tip 11 coating process can be detected like this, to ensure to lose dew surveyed area.
Certainly, illuminating source 41 also can be formed as, along with the upper integrative-structure that arranges in the perpendicular direction of the moving direction of dispense tip 11 (second direction) or comprise multiple luminescence unit, being spaced successively along described second direction; In like manner, luminous prism 43 also can be formed as, along with the upper integrative-structure that arranges in the perpendicular direction of the moving direction of dispense tip 11 (second direction) or comprise multiple prism unit, being spaced successively along described second direction.
In second embodiment of the invention, illuminating source 41, reflective prism 43 and optical signal receiver 42 are all arranged on the side of the second support 20 towards substrate 30, preferably, these three parts are except arranged in parallel, concrete mounting means on the second support 20 and position are not particularly limited, as long as each device can meet above-mentioned functions; As illuminating source 41 shown in Fig. 3 and optical signal receiver 42 can be adopted for setting up and down, the mode that luminous prism 43 is positioned at illuminating source 41 and optical signal receiver 42 side is arranged.
Further, preferably, in the first embodiment and the second embodiment, illuminating source 41 send light wavelength coverage be 577 to 597 nanometers, be also yellow band light source, to avoid detecting influence of light photoresist colloidality energy.
Further preferably, coating machine described in the embodiment of the present invention also comprises a shading baffle, in order to enclose just in coated substrates and the first frame, the second frame, and shading ring environmental light, reduce surrounding enviroment light and Systems for optical inspection is detected to the interference caused, improve detection accuracy.
Adopt the coating machine of the embodiment of the present invention, in coating process, utilize Systems for optical inspection to carry out quality testing to the substrate surface thin layer after coating, once occur that bad can shutdown confirms adjustment coating machine, effectively can prevent bad continuous appearance, reduce loss.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (11)
1. a coating machine, the dispense tip comprising the first frame and be arranged in the first frame, is characterized in that, described coating machine also comprises:
Arrange the second frame of Systems for optical inspection, described Systems for optical inspection is for detecting substrate surface situation;
Driving mechanism, be connected with described second frame, for to move in the process carrying out being coated with along first direction at described dispense tip, drive described second frame simultaneously along first direction action after described first frame, described Systems for optical inspection to described dispense tip be coated with after substrate surface thin layer detect.
2. coating machine as claimed in claim 1, it is characterized in that, described first frame is integrated with described second frame and is connected, and described first frame is identical along the speed of described first direction movement with described second frame.
3. coating machine as claimed in claim 1, is characterized in that, described Systems for optical inspection, by detecting the light intensity of the reflected light of light after the reflection of substrate surface thin layer being emitted to substrate surface thin layer, judges substrate surface thin layer situation.
4. coating machine as claimed in claim 3, is characterized in that, described dispense tip has a coating width along in the second direction perpendicular to described first direction, and described Systems for optical inspection comprises:
Illuminating source, range of exposures is in this second direction corresponding with described dispense tip coating width in this second direction, and described illuminating source is used for towards coating metacoxal plate surface film layer emission of light;
Optical signal receiver, for receiving the reflection ray after the reflection of substrate surface thin layer;
Signal analysis device, for the reflection ray received according to described optical signal receiver, judges whether coating metacoxal plate surface film layer exists bad.
5. coating machine as claimed in claim 3, is characterized in that, described dispense tip has a coating width along in the second direction perpendicular to described first direction, and described Systems for optical inspection comprises:
Illuminating source, for emission of light;
Reflective prism, for receiving the light emitted line of illuminating source, and by emission of light towards the reflection of coating metacoxal plate surface film layer, obtain the first reflection ray, wherein said first reflection ray range of exposures is in this second direction corresponding with described dispense tip coating width in this second direction; Described reflective prism also for receiving after described first reflection ray arrives coating metacoxal plate surface film layer, through the second reflection ray of substrate surface thin layer reflection, and by the second reflection ray secondary reflection again, obtains the 3rd reflection ray;
Optical signal receiver, for receiving described 3rd reflection ray;
Signal analysis device, for described 3rd reflection ray received according to described optical signal receiver, judges whether coating metacoxal plate surface film layer exists bad.
6. coating machine as claimed in claim 5, it is characterized in that, described dispense tip, described illuminating source and described reflective prism are parallel to each other, and have development length respectively along described second direction.
7. the coating machine as described in claim 4 or 5, is characterized in that,
Described optical signal receiver and described dispense tip be arranged in parallel, and width is in a second direction corresponding with described dispense tip coating width in a second direction.
8. coating machine as claimed in claim 7, it is characterized in that, described optical signal receiver is formed as along the integrative-structure that described second direction is arranged or comprises multiple light signal receiving element, is spaced successively along described second direction.
9. the coating machine as described in claim 4 or 5, is characterized in that, described signal analysis device comprises:
Coordinate setting device, for calculate described optical signal receiver receive the position coordinates of reflection ray relative to coated substrates;
Light intensity comparator device, for the reflection ray of reflection ray corresponding for position coordinates place to be detected and other position coordinates places is compared, when judging that the reflection ray at position coordinates place to be detected is different from the reflection ray at other position coordinates places, then determine that position coordinates place to be detected substrate surface exists bad.
10. coating machine as claimed in claim 2, is characterized in that, described driving mechanism also carries out coating process for driving described first frame to drive described dispense tip to move along first direction.
11. coating machines as described in claim 4 or 5, is characterized in that, described illuminating source send light wavelength coverage be 577 to 597 nanometers.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510187495.8A CN104808586A (en) | 2015-04-20 | 2015-04-20 | Coating machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510187495.8A CN104808586A (en) | 2015-04-20 | 2015-04-20 | Coating machine |
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| CN104808586A true CN104808586A (en) | 2015-07-29 |
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| CN201510187495.8A Pending CN104808586A (en) | 2015-04-20 | 2015-04-20 | Coating machine |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107321557A (en) * | 2017-08-17 | 2017-11-07 | 京东方科技集团股份有限公司 | One kind coating detection means, coating apparatus and coating detection method |
| CN107367516A (en) * | 2017-07-19 | 2017-11-21 | 武汉华星光电半导体显示技术有限公司 | One kind coating detection prosthetic device and its method |
| CN108917580A (en) * | 2018-09-14 | 2018-11-30 | 重庆惠科金渝光电科技有限公司 | The detection method of coating head coagulation and the production technology of optical filter |
| CN109562407A (en) * | 2016-08-22 | 2019-04-02 | 住友重机械工业株式会社 | Membrane formation device and film forming method |
| CN114682446A (en) * | 2022-03-22 | 2022-07-01 | 南京贝迪新材料科技股份有限公司 | Optical film coating production equipment |
| CN116794068A (en) * | 2023-05-31 | 2023-09-22 | 成都瑞波科材料科技有限公司 | Rainbow pattern detection device and method for coating process and coating process equipment |
| CN116818798A (en) * | 2023-05-31 | 2023-09-29 | 成都瑞波科材料科技有限公司 | Rainbow pattern detection device and method for coating process and coating process equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1501065A (en) * | 2002-11-19 | 2004-06-02 | 友达光电股份有限公司 | Polysilicon film crystallization quality detecting apparatus, detecting and controlling method therefor |
| CN1548247A (en) * | 2003-05-19 | 2004-11-24 | 乐金电子（沈阳）有限公司 | Ink jetting coating unit for making display board |
| CN1846875A (en) * | 2005-04-04 | 2006-10-18 | 展茂光电股份有限公司 | Real-time film thickness monitoring method and device for slit spraying process |
| CN1847816A (en) * | 2005-01-24 | 2006-10-18 | 株式会社茉莉特斯 | Method and apparatus for measuring optical aeolotropic parameter |
| CN102486410A (en) * | 2010-12-06 | 2012-06-06 | 中国科学院微电子研究所 | Optical imaging device |
| CN104022053A (en) * | 2014-05-20 | 2014-09-03 | 京东方科技集团股份有限公司 | Detection equipment of vacuum chamber for film formation and vacuum chamber detection method |
-
2015
- 2015-04-20 CN CN201510187495.8A patent/CN104808586A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1501065A (en) * | 2002-11-19 | 2004-06-02 | 友达光电股份有限公司 | Polysilicon film crystallization quality detecting apparatus, detecting and controlling method therefor |
| CN1548247A (en) * | 2003-05-19 | 2004-11-24 | 乐金电子（沈阳）有限公司 | Ink jetting coating unit for making display board |
| CN1847816A (en) * | 2005-01-24 | 2006-10-18 | 株式会社茉莉特斯 | Method and apparatus for measuring optical aeolotropic parameter |
| CN1846875A (en) * | 2005-04-04 | 2006-10-18 | 展茂光电股份有限公司 | Real-time film thickness monitoring method and device for slit spraying process |
| CN102486410A (en) * | 2010-12-06 | 2012-06-06 | 中国科学院微电子研究所 | Optical imaging device |
| CN104022053A (en) * | 2014-05-20 | 2014-09-03 | 京东方科技集团股份有限公司 | Detection equipment of vacuum chamber for film formation and vacuum chamber detection method |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109562407A (en) * | 2016-08-22 | 2019-04-02 | 住友重机械工业株式会社 | Membrane formation device and film forming method |
| CN107367516A (en) * | 2017-07-19 | 2017-11-21 | 武汉华星光电半导体显示技术有限公司 | One kind coating detection prosthetic device and its method |
| CN107367516B (en) * | 2017-07-19 | 2020-08-04 | 武汉华星光电半导体显示技术有限公司 | Coating detection and repair device and method thereof |
| CN107321557A (en) * | 2017-08-17 | 2017-11-07 | 京东方科技集团股份有限公司 | One kind coating detection means, coating apparatus and coating detection method |
| CN108917580A (en) * | 2018-09-14 | 2018-11-30 | 重庆惠科金渝光电科技有限公司 | The detection method of coating head coagulation and the production technology of optical filter |
| CN114682446A (en) * | 2022-03-22 | 2022-07-01 | 南京贝迪新材料科技股份有限公司 | Optical film coating production equipment |
| CN114682446B (en) * | 2022-03-22 | 2023-03-03 | 南京贝迪新材料科技股份有限公司 | Optical film coating production equipment |
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