CN1846875A - Real-time film thickness monitoring method and device for slit spraying process - Google Patents
Real-time film thickness monitoring method and device for slit spraying process Download PDFInfo
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- CN1846875A CN1846875A CN 200510059986 CN200510059986A CN1846875A CN 1846875 A CN1846875 A CN 1846875A CN 200510059986 CN200510059986 CN 200510059986 CN 200510059986 A CN200510059986 A CN 200510059986A CN 1846875 A CN1846875 A CN 1846875A
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Abstract
The present invention relates to real-time film thickness monitoring method includes detecting the substrate surface before coating with one optical sensor to emit and receive optical signal; detecting the thickness of the coating on the substrate with the optical sensor to emit and receive optical signal; calculating the thickness of the coating continuously with one optical signal processor and based on the optical signals; and feeding back the thickness for real-time control on the thickness of the coating. The present invention realizes real-time measurement of film thickness and real-time control of film thickness and homogeneity.
Description
Technical field
The invention relates to a kind of slit spraying process, and particularly relevant for a kind of real-time film thickness monitoring method and device thereof of slit spraying process.
Background technology
LCD (liquid crystal display) improvement of Manufacturing Technology, especially large-sized trend makes the application of vacuum tube display originally to be replaced mostly by LCD.The related industry of LCD becomes hot product in recent years.
In the manufacturing process of LCD, photoetching process (Lithography) is one of wherein a series of important technologies.Photoetching process is by coating photoresist (phororesist coating), the steps such as (exposure) of developing (development), expose, the rete in the patterning LCD.Before the 4th generation panel, the coating photoresist generally adopts spin coating mode (Spin coating) coating.Since the 5th generation panel because panel size is excessive, generally adopt the fine seam type rubbing method.The whether even qualification rate that is concerning subsequent technique of photoresist layer thickness.On large-sized panel, control the photoresist layer uniform thickness, testing the technical capability of the relevant manufacturer of LCD.
Whether uniformly the fine seam type rubbing method of prior art exists the thickness that can't know coating or rete situation in technology.Know just when detecting after the technology whether above-mentioned thickness or rete be even, often caused product needed in the technology to re-execute technology or scrap.In order to address the above problem, the relevant manufacturer of LCD there's no one who doesn't or isn't actively proposes the method for innovation, with the challenge in the face of the fine seam type rubbing method.
Summary of the invention
Therefore purpose of the present invention is exactly that a kind of film thickness monitoring method and device thereof of slit spraying process are being provided, in order to the thickness of real-time control coating.
The above-mentioned purpose according to the present invention proposes a kind of film thickness monitoring method of slit spraying process, is applicable to real-time control and adjusts the thickness of coating.By optical pickocff emission and receiving optical signal, detect the preceding substrate surface of coating.By optical pickocff emission and receiving optical signal, detect the coating of the substrate surface after being coated with.By the optical signalling that reaches before the optical signal processor contrast coating after being coated with, use and calculate this coating layer thickness continuously.Feed back the thickness of coating, use the thickness of real-time control coating.
From the above, use the real-time film thickness monitoring method and the device thereof of slit spraying process of the present invention,, and control the thickness and the uniformity thereof in real time by optical pickocff real-time measurement thickness.
Description of drawings
Fig. 1 is the schematic diagram according to a kind of fine seam type coating device of the present invention's one preferred technique scheme;
Fig. 2 is the schematic diagram according to a kind of vacuum coater of another preferred technique scheme of the present invention;
Fig. 3 is the real-time film thickness monitoring method flow chart according to a kind of slit spraying process of the present invention's one preferred technique scheme;
Fig. 4 is the real-time film thickness monitoring method flow chart according to a kind of technique for vacuum coating of another preferred technique scheme of the present invention.
The figure number explanation:
Fine seam type coating device 100 pedestals 102 base materials 104
Coating 106 optical pickocffs 110 optical transmitting set 110a
Nozzle opening 114a nozzle and base material spacing d signal processing apparatus 120/220
The specific embodiment
The present invention is above-mentioned to be become apparent with other purpose, feature and advantage in order to allow, and preferred embodiment cited below particularly and conjunction with figs. are described in detail below.
Can't know coating film thickness or rete situation in the slit spraying process in order to solve whether uniformly, the present invention proposes a kind of real-time film thickness monitoring method and device thereof of slit spraying process.This real-time film thickness monitoring method and device thereof before coating and after the coating, utilize optical pickocff to detect coating film thickness.The thickness of feedback coating is given the nozzle control device, uses real-time control coating layer thickness.
Please refer to Fig. 1, it illustrates the schematic diagram according to a kind of fine seam type coating device of the present invention's one preferred technique scheme.The technical program fine seam type coating device 100 is to be applicable to that coating large tracts of land coating 106 is on base material 104.This fine seam type coating device 100 before coating and after the coating, detects the coating 106 of substrate surface 104 and substrate surface by two groups of optical pickocffs 110 respectively.Detection mode is to penetrate optical signalling 112a with optical transmitting set 110a, and with the optical signalling 112b of optical receiver 110b reception through base material 104 or coating 106 reflections.Light signal processing device 120, the signal that utilizes two groups of optical pickocffs 110 to measure calculates two distances between sensor and base material 104 or the coating 106 respectively, and the difference between two distances promptly is the thickness of coating.Nozzle control device 130 utilizes the coating film thickness of measuring, and adjusts or change technological parameter in real time with the control thickness.Above-mentioned two groups of optical pickocffs 110 electrically connect with light signal processing device 120 respectively, and nozzle control device 130 electrically connects with light signal processing device 120 and fine seam type coating nozzle 114 respectively.
Please refer to Fig. 1 and Fig. 3, wherein Fig. 3 is the real-time film thickness monitoring method flow chart that illustrates according to a kind of slit spraying process of the present invention's one preferred technique scheme.In step 300, before coating, launch and accept optical signalling by one group of optical pickocff (optical transmitting set 110a and optical receiver 110b), calculate the distance of 104 of optical pickocff 110 and base materials through light signal processing device 120.In step 302, launch by one group of optical pickocff 110 (optical transmitting set 110a and optical receiver 110b) in coating back and accept optical signalling, calculate the distance of 106 of optical pickocff 110 and coatings through light signal processing device 120.In step 304, before the light signal processing device 120 contrast coating and after the coating, the difference of optical pickocff 110 and 106 distances of coating can calculate the thickness of coating 106.In step 306, nozzle control device 130, coating 106 thickness that receiving optical signals treating apparatus 120 is fed back are used and are adjusted or the change technological parameter.The thickness of slit spraying process can be the technological parameter of nozzle translational speed, nozzle and substrate spacing d or photoresist discharge-amount and controls.
Please refer to Fig. 2, it illustrates the schematic diagram according to a kind of vacuum coater of another preferred technique scheme of the present invention.This vacuum coater has designed optical transmitting set 110a and optical receiver 110b respectively in the both sides of vacuum chamber 200, and penetrates optical signalling 112a by optical transmitting set 110a, and receives the optical signalling 112b that reflects through film 204 with optical receiver 110b.Light signal processing device 220, the signal that utilizes optical transmitting set 110a and optical receiver 110b to measure continues to calculate the distance between sensor and the film 204.When the thickness of film 204 arrived predetermined thickness, the distance between sensor and the film 204 was a certain value.Therefore, process control device 230 is or directly to calculate thickness with above-mentioned definite value, decides the terminal point of coating process, rather than the simple thickness that utilizes time control film 204.Above-mentioned light signal processing device 220 is to electrically connect with optical transmitting set 110a and optical receiver 110b respectively, and process control device 230 electrically connects with light signal processing device 220 and vacuum chamber 200 respectively.In order to keep away in the face coating process, the particle in the vacuum chamber may be deposited on optical transmitting set 110a and the optical receiver 110b, has designed masking device 206a and 206b, uses for optical transmitting set 110a and optical receiver 110b and can fix within it.
With reference to Fig. 2 and Fig. 4, wherein Fig. 4 is the real-time film thickness monitoring method flow chart of describing according to a kind of technique for vacuum coating of another preferred technique scheme of the present invention.In step 400, optical transmitting set 110a launches an optical signalling 112a, towards film 204.In step 402, optical receiver 110b accepts the optical signalling 112b through film 204 reflections.In step 404, light signal processing device 220 processing optical signals 112a and optical signalling 112b, use calculate coating film thickness continuously or define coating film thickness and sensor and film 204 between the relation of distance.In step 406, film 204 thickness that process control device 230 receiving optical signals treating apparatus 220 are fed back when the thickness of film 204 arrives predetermined thickness, implement to stop technology.Above-mentioned method is applicable to various film formation devices, for example various filming equipments (sputter, evaporation, plating) and various device for coating (spray printing, drum-type coating, rotation coating, squash type coating).
Though the present invention has done explanation as above with preferred embodiment; but it is not in order to limit the present invention; any those skilled in the art; in not breaking away from method of the present invention and scope; can do various replacements and modification, so protection domain of the present invention being as the criterion with defined in claims.
Claims (7)
1. a fine seam type coating device is applicable to real-time monitoring coating film thickness, and it is characterized in that: described apparatus for coating comprises at least:
One pedestal carries a base material;
One fine seam type coating nozzle is positioned at the pedestal top;
Two groups of optical sensing subassemblies, lay respectively at before the coating of described fine seam type coating nozzle and both sides, coating back, every group of optical sensing subassembly comprises an optical transmitting set and an optical receiver, utilizes described optical transmitting set to penetrate optical signal to described base material, and described optical receiver receives the optical signal through the base material reflection;
One signal processor electrically connects with described two groups of optical sensing subassemblies, and contrasts described two groups of optical signals that optical sensing subassembly is measured, and uses the coating layer thickness that calculates continuously on the described base material; And
One nozzle controller electrically connects with described signal processor and receives the coating layer thickness that it calculates, and uses the thickness of the described coating of real-time control.
2. a kind of fine seam type coating device according to claim 1 is characterized in that: optical transmitting set and optical receiver are to be arranged at respectively in other masking device.
3. a kind of fine seam type coating device according to claim 1 is characterized in that: two groups of optical sensing subassemblies calculate two distances between base material or the coating respectively, and the difference between two distances promptly is coating film thickness.
4. the real-time film thickness monitoring method of a slit spraying process comprises following steps at least:
By optical pickocff emission and receiving optical signal, detect the preceding substrate surface of coating;
By optical pickocff emission and receiving optical signal, detect a coating of the substrate surface after being coated with;
Reach the optical signalling after being coated with before the contrast coating, use and calculate described coating layer thickness continuously; And feed back described coating layer thickness, use the described coating layer thickness of real-time control.
5. the real-time film thickness monitoring method of a kind of slit spraying process according to claim 4 is characterized in that: reach the work of the optical signalling after being coated with before the signal processing apparatus execution contrast coating.
6. the real-time film thickness monitoring method of a kind of slit spraying process according to claim 4 is characterized in that: also comprise the feedback thickness that receives described coating by a nozzle control device, use the thickness of the described coating of real-time control.
7. the real-time film thickness monitoring method of a kind of slit spraying process according to claim 6, the thickness of wherein said coating is controlled by the technological parameter of the spacing of nozzle translational speed, nozzle and substrate or photoresist discharge-amount.
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| CN 200510059986 CN1846875A (en) | 2005-04-04 | 2005-04-04 | Real-time film thickness monitoring method and device for slit spraying process |
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| CN 200510059986 CN1846875A (en) | 2005-04-04 | 2005-04-04 | Real-time film thickness monitoring method and device for slit spraying process |
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| CN102139260A (en) * | 2011-01-13 | 2011-08-03 | 株洲时代新材料科技股份有限公司 | Method and device for automatically detecting coating of glue sprayer |
| CN102671835A (en) * | 2011-03-16 | 2012-09-19 | 东京毅力科创株式会社 | Coating film forming method and coating film forming device |
| CN102728507A (en) * | 2011-04-15 | 2012-10-17 | 长庚大学 | Fluorescent powder coating equipment and method for detecting white light color temperature in real time in manufacturing process |
| CN104668152A (en) * | 2013-11-27 | 2015-06-03 | 芝浦机械电子装置株式会社 | Applicator, application method, and appratus and method for manufacturing a display device member |
| CN104808586A (en) * | 2015-04-20 | 2015-07-29 | 京东方科技集团股份有限公司 | Coating machine |
| CN105115432A (en) * | 2015-09-01 | 2015-12-02 | 武汉华星光电技术有限公司 | Detection system and method of coating membrane thickness |
| WO2016192290A1 (en) * | 2015-06-01 | 2016-12-08 | 京东方科技集团股份有限公司 | Coating system and coating method |
| CN106567044A (en) * | 2015-10-08 | 2017-04-19 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Film preparation cavity and method |
| CN107309130A (en) * | 2017-08-24 | 2017-11-03 | 太仓市众翔精密五金有限公司 | The efficient auto spray painting line and its technique of a kind of control film thickness |
| CN108906508A (en) * | 2018-08-06 | 2018-11-30 | Oppo（重庆）智能科技有限公司 | Glue amount control method and glue amount control device |
| CN109225763A (en) * | 2018-10-30 | 2019-01-18 | 深圳市曼恩斯特科技有限公司 | Coating head, apparatus for coating and coating method |
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- 2005-04-04 CN CN 200510059986 patent/CN1846875A/en active Pending
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| CN102139260A (en) * | 2011-01-13 | 2011-08-03 | 株洲时代新材料科技股份有限公司 | Method and device for automatically detecting coating of glue sprayer |
| CN102139260B (en) * | 2011-01-13 | 2014-02-05 | 株洲时代新材料科技股份有限公司 | Method and device for automatically detecting coating of glue sprayer |
| CN102671835A (en) * | 2011-03-16 | 2012-09-19 | 东京毅力科创株式会社 | Coating film forming method and coating film forming device |
| CN102671835B (en) * | 2011-03-16 | 2014-12-03 | 东京毅力科创株式会社 | Coating film forming method and coating film forming device |
| CN102728507A (en) * | 2011-04-15 | 2012-10-17 | 长庚大学 | Fluorescent powder coating equipment and method for detecting white light color temperature in real time in manufacturing process |
| CN102728507B (en) * | 2011-04-15 | 2014-08-13 | 长庚大学 | Fluorescent powder coating equipment and method for detecting white light color temperature in real time in manufacturing process |
| CN104668152A (en) * | 2013-11-27 | 2015-06-03 | 芝浦机械电子装置株式会社 | Applicator, application method, and appratus and method for manufacturing a display device member |
| CN104808586A (en) * | 2015-04-20 | 2015-07-29 | 京东方科技集团股份有限公司 | Coating machine |
| US10201828B2 (en) * | 2015-06-01 | 2019-02-12 | Boe Technology Group Co., Ltd. | Coating system and coating method |
| WO2016192290A1 (en) * | 2015-06-01 | 2016-12-08 | 京东方科技集团股份有限公司 | Coating system and coating method |
| CN105115432A (en) * | 2015-09-01 | 2015-12-02 | 武汉华星光电技术有限公司 | Detection system and method of coating membrane thickness |
| CN106567044A (en) * | 2015-10-08 | 2017-04-19 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Film preparation cavity and method |
| CN107309130B (en) * | 2017-08-24 | 2023-04-07 | 太仓市众翔精密五金有限公司 | Efficient automatic paint spraying line capable of controlling thickness of paint film and process thereof |
| CN107309130A (en) * | 2017-08-24 | 2017-11-03 | 太仓市众翔精密五金有限公司 | The efficient auto spray painting line and its technique of a kind of control film thickness |
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| CN110126262B (en) * | 2019-06-11 | 2023-12-29 | 深圳市深科达智能装备股份有限公司 | 3D printing glue layer equipment for display or touch module |
| CN110126262A (en) * | 2019-06-11 | 2019-08-16 | 深圳市深科达智能装备股份有限公司 | Display or touch module 3D printing glue-line equipment |
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| CN113039666A (en) * | 2019-10-17 | 2021-06-25 | 株式会社Lg化学 | Electrode paste coating apparatus and method for forming dual active material layer |
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| CN111570150A (en) * | 2020-04-09 | 2020-08-25 | 中国科学院微电子研究所 | Photoresist coating system and method |
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