CN1847816A

CN1847816A - Method and apparatus for measuring optical aeolotropic parameter

Info

Publication number: CN1847816A
Application number: CNA2006100840315A
Authority: CN
Inventors: 田之冈大辅
Original assignee: Moritex Corp
Current assignee: Moritex Corp
Priority date: 2005-01-24
Filing date: 2006-01-24
Publication date: 2006-10-18
Anticipated expiration: 2026-01-24
Also published as: TW200632305A; KR20060085574A; TWI384213B; CN100570310C; KR101280335B1

Abstract

This invention provides an approach and a device which can measure the direction and magnitude of the optical axis of an optical anisotropic membrane and thickness of the membrane with a high speed and a high precision, and furthermore capable of distribution measurement by 2-D light receiving elements. The P-polarized monochromatic light is made to irradiate from a plurality of incident directions with a specific angular intervals while centering the normal line (Z) provided on the measurement point (M), the S-polarized light in the reflected light is detected corresponding to the incident directions, among the incident directions showing minimal values in the intensity of the reflection light, the azimuth direction ([Phi]<SB>A</SB>) of the optical axis (OX) is determined based on the incident direction (v<SB>1</SB>) in which the minimal value (V<SB>1</SB>) held between the maximal values ([Lambda]<SB>1</SB>) and ([Lambda]<SB>2</SB>), and the polar angle direction ([theta]) is determined based on the incident direction in which the minimal value (V<SB>3</SB>) held between maximal ([Lambda]<SB>1</SB>) of maximum peak and its adjacent maximal ([Lambda]<SB>3</SB>) of medium peak is measured.

Description

Measuring optical aeolotropic parameter method and determinator

Technical field

The present invention relates to a kind ofly can measure anisotropic measuring optical aeolotropic parameter method of film test piece optic axis and determinator, be specially adapted to the inspection of liquid crystal orientation film etc.

Background technology

LCD is alignment films to be faced mutually across distance piece by the face side glass substrate of the dorsal part glass substrate that surperficial lamination is had transparency electrode and alignment films and surperficial lamination chromatic colour light filter, transparency electrode and alignment films, in the gap of this alignment films, enclose seal under the state of liquid crystal in, the structure that forms at its surface and both sides, back side superimposed layer polarized light filter.

At this, for making the LCD normal running, liquid crystal molecule need be arranged on the same direction equably, alignment films has determined the directivity of liquid crystal molecule.

This alignment films can make the reason of liquid crystal molecule orientation be owing to have the uniaxiality optical anisotropy.If alignment films all has the optically anisotropic words of uniform uniaxiality on its whole surface, then LCD is not easy to produce defective, if there is the uneven part of optical anisotropy, the direction confusion of liquid crystal molecule, so LCD becomes substandard products.

That is, the quality of alignment films itself can influence the quality of LCD.The defective of alignment films makes the directivity confusion of liquid crystal molecule, causes LCD also will produce defective.

Therefore, if when assembling liquid crystal display, whether have defective by checking alignment films in advance, the stable alignment films of using character only then can improve the yield rate of LCD, enhances productivity.

Therefore, proposed since so far to measure azimuth direction as the optic axis of anisotropic parameters, polar angle direction, thickness etc.,, checked the method that whether has defective by estimating the optical anisotropy of this alignment films for alignment films.

The most general method is to use the method for ellipsometer, can measure quite exactly, but the minute of each measuring point needs about 2 minutes length, when the anisotropy of an alignment films is estimated, measure the words of 10,000 of 100 * 100 totals, single calculating finally is impossible with regard to needing about 2 time-of-weeks of cost, therefore be loaded in to carry out complete inspection on the production line.

Also has a kind of method, be that the normal that makes progress with the measuring point from film test piece is as the center, from a plurality of incident directions of setting at interval at a predetermined angle, the said determination point makes P polarized light or S polarized light with predetermined incident angle irradiation relatively, mensuration be included in the polarized light component in its reflected light, with the intensity of reflected light of the polarized light component of the polarization direction quadrature of irradiates light, detect thus and the corresponding intensity of reflected light variation of incident direction, can calculate azimuth direction, polar angle direction and thickness thus as the optical anisotropic film parameter.

Patent documentation 1 spy opens 2001-272308

But when trying to achieve the optical anisotropic film parameter, this method need be measured on all orientation according to this method, therefore has the problem of spended time.

And, owing to need to measure the absolute magnitude of intensity of reflected light and since about the influence of external factor such as the linear property of photo detector sensitivity, dynamic range the mensuration precision, error becomes big possibility height, exists to be difficult to improve the problem of measuring precision.

In addition, owing to need be no less than 6 parameter according to direction of principal axis and size, the thickness of film and the normalization constant etc. that nonlinear least square method calculates principal dielectric constants simultaneously, therefore not only exist and calculate the possibility of separating, and exist the problem that needs huge computing time with the local minimum convergent.

Summary of the invention

At this, technical task of the present invention provides can be at a high speed, the direction and the inclination angle of the optic axis of high-precision measuring optical anisotropic film, and the method and apparatus that can carry out measure of spread according to two-dimensional photoreceptor.

For solving this problem, the present invention is a kind of measuring optical aeolotropic parameter method, it measures azimuth direction and polar angle direction as the optic axis of film test piece anisotropic parameters, it is characterized by the normal that makes progress with the measuring point from film test piece as the center, from a plurality of incident directions of setting at interval at a predetermined angle, the said determination point makes the monochromatic light of P polarized light or S polarized light with predetermined incident angle irradiation relatively, corresponding to incident direction, detect and be included in the polarized light component in its reflected light, intensity of reflected light with the polarized light component of the polarization direction quadrature of irradiates light, demonstrate in the minimizing incident direction in described intensity of reflected light, minimal value that clips based on tested two maximum value having made as maximum peak or the minimizing incident direction that clips as two maximum value of middle crest, determine the azimuth direction of optic axis in the measuring point, the minimizing incident direction that clips based on the tested maximum value of having made as the maximum value of described intensity of reflected light maximum peak and the middle crest that is adjacent, or, determine the polar angle direction of optic axis in its measuring point based on the tested incident direction of having made as the maximum value of maximum peak.

According to the present invention, at first, by the normal that makes progress with the measuring point from film test piece as the center, from a plurality of incident directions of setting at interval at a predetermined angle, the said determination point makes the monochromatic light of P polarized light or S polarized light with predetermined incident angle irradiation relatively, determine be included in the polarized light component in its reflected light, with the intensity of reflected light of the polarized light component of the polarization direction quadrature of irradiates light, detect intensity of reflected light corresponding to incident direction.

When incident direction changes between 0-360 °, the measured value that becomes intensity of reflected light and two maximum value adjacency as maximum peak with optically anisotropic film test piece, simultaneously, between each maximum value, have four minimizing waveforms with two maximum value adjacency as middle crest.

At this, the angle of the azimuth direction of film test piece optic axis, promptly, optic axis in the mensuration face towards equating with minimizing direction that tested two maximum value having made as maximum peak clip, therefore this direction is defined as azimuth direction, this angle is placed this measuring point azimuthal direction Φ _A=0 place.

In addition, because 180 ° of minimizing deviations in driction that this direction clips from tested two maximum value having made as middle crest, therefore also can determine from the minimizing direction that tested two maximum value having made as middle crest clip.

After this, the angle of film test piece optic axis polar angle direction promptly, can be calculated by formula (2) or formula (3) with respect to the pitch angle of the optic axis of base plan.

At this, in the formula (2) (3), variable beyond the angle θ of polar angle direction be known all or is measured value, therefore, according to formula (2) time, by detecting such angle, promptly tested having made as the maximum value of maximum peak and the minimizing angle that clips as the maximum value of middle crest, perhaps the time, can calculate by detecting tested having made as the angle of the maximum value of maximum peak according to formula (3).

Formula 1

sinΦ _A＝0 (1)

\cos Φ_{B} = μ \frac{\sin Φ_{0} N_{2}}{ϵ_{0} \cos Φ_{2}} \tan θ . . . (2)

\frac{\cos (2 Φ_{C, D})}{\sin Φ_{C, D}} = μ \frac{\sin Φ_{0} N_{2}}{ϵ_{0} \cos Φ_{2}} \tan θ . . . (3)

Φ _A: the minimizing incident direction (=azimuth direction=0) that tested two maximum value having made as maximum peak clip

Φ _B: tested having made as the maximum value of maximum peak and the minimizing incident direction that clips as the maximum value of middle crest

Φ _C: the tested incident direction of having made as the maximum value of maximum peak

Φ _D: the tested incident direction of having made as the maximum value of maximum peak

θ: the angle (pitch angle) of the optic axis polar angle direction that begins from base plan

μ :+/-(reflection strength with respect to the P polarized light of S polarized light incident is "+", is "-" with respect to the reflection strength of the S polarized light of P polarized light incident)

Φ ₀: to the incident angle of film

Φ ₂: the angle of leaving the substrate time

N ₂: the refractive index of substrate

ε ₀: the ordinary light specific inductive capacity of film test piece

Further, by measuring the zone on the relative film test piece arbitrarily, the monochromatic light of P polarized light or S polarized light is shone with predetermined incident angle, detect in the contained polarized light component in its reflected light, with the intensity of reflected light Two dimensional Distribution of the polarized light component of the polarization direction quadrature of irradiates light, by with respect to measure region memory each measuring point detect intensity of reflected light corresponding to incident direction, can calculate indivedual azimuth directions and polar angle direction for a plurality of measuring points.

In addition, under the situation that for example adopts liquid crystal orientation film as film test piece, make the optic axis unanimity by friction, near this frictional direction and with the direction of its quadrature near when carrying out incident, intensity of reflected light exists as minimum extreme value.

In addition, intensity of reflected light exists as the angle of the maximum value of maximum peak or middle crest (direction) and depends on the polar angle direction, under the situation of making liquid crystal orientation film,, can determine by formula (3) based on this polar angle direction by the general polar angle direction of frictional strength (pressure) experience ground control.

Therefore, by will with frictional direction and with the direction of its quadrature be the center, make light incident in for example predetermined angular range, the angle of being envisioned when perhaps frictional direction and intensity of reflected light being existed the maximum value as maximum peak (direction) is the center, make light incident in predetermined angular range, can dwindle measurement range.

And this angular range is based on the statistical deviation of the azimuth direction that experience measures etc. in the production line of liquid crystal orientation film etc., and deviation is little, then is limited to ± about 20 ° it is enough, and deviation is big, then can expand to ± about 45 ° scope in.

Thus, need only incident direction, just can determine the azimuth direction and the polar angle direction of optic axis, and, measure thickness t, the ordinary light DIELECTRIC CONSTANT of the anisotropic band of film test piece for the known measuring point of these values according to catoptrical minimal value, maximum value ₀, unusual optical dielectric constant ε _eThe time, it is just enough to adopt ellipsometer or reverberator measuring instrument to measure from 2 or 3 directions, can and determine these optical anisotropy parameters exactly with the extremely short time.

Description of drawings

Fig. 1 is the key diagram that shows an example of apparatus for measuring optical aeolotropic parameter of the present invention.

Fig. 2 is a synoptic diagram of having represented the relation between display optical axle azimuth direction and the polar angle direction.

Fig. 3 is the curve map that shows its measurement result.

Fig. 4 is the key diagram that shows other apparatus for measuring optical aeolotropic parameter.

Fig. 5 is the key diagram of demonstration along with the passing of each measuring point position of the rotation of film test piece.

Fig. 6 is the key diagram that shows polar distribution.

Fig. 7 is the key diagram that has further shown other apparatus for measuring optical aeolotropic parameter.

Fig. 8 is the curve map that shows its measurement result.

Fig. 9 is the curve map that shows its measurement result.

Embodiment

The present invention is for reaching at a high speed, measure the direction of optic axis of optical anisotropic film and the purpose at inclination angle accurately, the normal that makes progress with the measuring point from film test piece is as the center, from a plurality of incident directions of setting at interval at a predetermined angle, the said determination point makes the monochromatic light of P polarized light or S polarized light with predetermined incident angle irradiation relatively, corresponding to incident direction, detect in the polarized light component that is included in its reflected light, intensity of reflected light with the polarized light component of the polarization direction quadrature of irradiates light, demonstrate in the minimizing incident direction in described intensity of reflected light, the minimizing incident direction that clips based on tested two maximum value having made as maximum peak, determine the azimuth direction of measuring point place optic axis, based on the tested maximum value of having made as described intensity of reflected light maximum peak and the minimizing incident direction that the maximum value as middle crest that is adjacent clips, determine the polar angle direction of its measuring point place optic axis.

Fig. 1 is the key diagram that shows an example of apparatus for measuring optical aeolotropic parameter of the present invention, Fig. 2 has represented that intensity of reflected light demonstrates the synoptic diagram of the incident direction and the relation between optic axis azimuth direction and the polar angle direction of minimum value, Fig. 3 is the curve map that shows the intensity of reflected light measurement result, Fig. 4 is the key diagram that shows other apparatus for measuring optical aeolotropic parameter, Fig. 5 is the key diagram of demonstration along with the passing of each measuring point position of the rotation of film test piece, Fig. 6 is the key diagram that shows pitch angle Determination of distribution result, Fig. 7 is the key diagram that has further shown other apparatus for measuring optical aeolotropic parameter, and Fig. 8 and Fig. 9 are the curve maps that shows its measurement result.

Example 1

At the apparatus for measuring optical aeolotropic parameter shown in Fig. 1 and Fig. 21 is the azimuth direction Φ as the optic axis OX of anisotropic parameters that is used to measure the film test piece 3 that is loaded on the microscope carrier 2 _ADeterminator with polar angle direction θ, this device has the normal Z that makes progress with the measuring point M from film test piece 3 as the center, from a plurality of incident directions of setting at interval at a predetermined angle, said determination point M makes the light emitting optical system 4 of the monochromatic light of P polarized light or S polarized light with predetermined incident angle irradiation relatively; Corresponding to incident direction, detect in the polarized light component that is included in its reflected light, with the light receiving optical system 5 of the intensity of reflected light of the polarized light component of the polarization direction quadrature of irradiates light; And the arithmetic processing apparatus 6 of determining the polar angle direction of measuring point M place optic axis based on this measurement result.

Microscope carrier 2 has the lifting table 12 that makes microscope carrier 2 liftings on base 11, make the universal stage 13 of microscope carrier 2 rotations, the XY platform 14 that microscope carrier 2 is moved horizontally with respect to the rotation center Z of universal stage 13 in the XY direction, and platform 15 is adjusted in the swing that universal stage 13 is adjusted the swing of microscope carrier 2 when rotated.

And above microscope carrier 2, be equipped with the autocollimator 7 of the oscillating quantity of measuring microscope carrier 2 optically, based on its measurement result, oscillating quantity is adjusted.

Light emitting optical system 4 is to constitute like this, wavelength is that 632.8nm, light intensity are the rotation center Z of the He-Ne laser instrument 21 of 25mW towards universal stage 13, to be configured to measure near the incident angle (being 60 ° in the present example) the better Brewster angle of precision, along its irradiation optical axis L _IR,

configuration polariscope

22,22, this polariscope is by 2 Glans that the P polarized light is seen through-thomson prism (extinction ratio 10 ^-6) form, form the structure of only shining pure P polarized light thus.

Light receiving optical system 5 is to form like this, and it is equipped with along the reflection optical axis L that irradiates from above-mentioned laser instrument 21, reflected by film test piece 3 _RF, cancellation is from the pinhole slit 23 of the light of the backside reflection of test specimen 3; By 2 Glans that the S polarized light is seen through-thomson prism (extinction ratio 10 ^-6) the

detection photon

24,24 that forms; Wavelength is selected light filter 25 and photomultiplier 26, and the detection signal of photomultiplier 26 exports arithmetic processing apparatus 6 to.

In addition, detect photon 24, can adopt photomultiplier 26 only to detect pure S polarized light by using 2.

In arithmetic processing apparatus 6, when the every rotation predetermined angular of universal stage 13, input is stored the relation of this anglec of rotation (incident direction) and intensity of reflected light from the detection signal of photomultiplier 26 outputs.

For having optically anisotropic film test piece 3, make incident direction when 0 is changed to 360 °, detected intensity of reflected light changes generally the curve map G as Fig. 3 ₁Shown in, become and have 2 maximum value ∧ that form maximum peak ₁, ∧ ₂, form 2 maximum value ∧ of middle crest ₃, ∧ ₄, and four minimal value V between them ₁-V ₄Waveform.

Like this, as shown in Figure 2,, from the longitudinal direction incident of optic axis OX the time, measure minimum value V from planimetric map ₁, V ₂, in the profile that comprises optic axis OX, during from the orthogonal directions incident relative, measure minimal value V with optic axis ₃, V ₄

Thus, demonstrate minimizing incident direction v in intensity of reflected light ₁-v ₄In, made by 2 maximum value ∧ that form maximum peak based on tested ₁, ∧ ₂The minimal value V that clips ₁Incident direction v ₁, determine the azimuth direction Φ of measuring point place optic axis _AAlso be about to incident direction v ₁Be decided to be azimuth direction Φ _A=0.

In addition, made the maximum value ∧ that intensity of reflected light forms maximum peak based on tested ₁With the maximum value ∧ that forms middle crest that is adjacent ₃The minimal value V that clips ₃Incident direction v ₃, testedly made the maximum value ∧ that intensity of reflected light forms maximum peak ₂With the maximum value ∧ that forms middle crest that is adjacent ₄The minimal value V that clips ₄Incident direction v ₄, perhaps tested having made forms maximum peak maximum value ∧ ₁Or ∧ ₂Incident direction λ ₁Or λ ₂, determine the polar angle direction θ of this measuring point place optic axis.

In this case, preferably make under the situation about calculating based on formula (2)

Φ _B＝v ₃-v ₁＝v ₄-v ₁

Under the situation about calculating based on formula (3), preferably make

|Φ _C|＝|Φ _D|＝|λ ₁-λ ₂|/2＝|λ ₃-λ ₄|/2

More than be one of apparatus of the present invention and constitute example, below method of the present invention is described.

After this, because the azimuth direction Φ of the optic axis OX of film test piece 3 _A, therefore θ is known for the polar angle direction, adopts ellipsometer or reverberator measuring instrument to measure from any 2 directions, just can obtain the size and the thickness of the principal dielectric constants of film test piece.

As film test piece 3, prepare like this, after passing through polyamic acid on the spin coater rotary coating (the daily output chemistry is made PI-C) on the glass substrate 8, under 260 ℃, carry out sintering, adopt polishing cloth to rub.

The thickness T=80nm of film before the friction, DIELECTRIC CONSTANT=3.00.

After test specimen 3 after the friction adopts existing known manner to measure in advance, when frictional direction is 0 °, the azimuth direction v of optic axis OX ₁=0.7 °, polar angle direction θ=24.2 °, ordinary light DIELECTRIC CONSTANT ₀=2.83, unusual optical dielectric constant ε _e=3.43, the thickness t=12nm of anisotropic band.The minute of this moment is a measuring point cost 60 seconds.

Film test piece 3 is loaded on the microscope carrier 2, adopts autocollimator 7 to detect the oscillating quantity of test specimen, adopt swing to adjust platform 15 test specimen 3 is adjusted into level.Be optimization with the height control of test specimen 3 further, make reflected light enter photo detector from test specimen 3 by lifting table 12.

After the swing of test specimen 3, height control are finished, make universal stage 13 rotations, determine the intensity of reflected light of the S polarized light of relative incident direction.

The azimuth direction Φ of the film test piece 3 that rubbed _ACan be contemplated for and this frictional direction (directions X) almost parallel, polar angle direction θ can be contemplated for be in its roughly on the position of quadrature, therefore in the present example, with the frictional direction be the center ± 20 °, with the direction (Y direction) of its quadrature for the center ± 20 ° scope in, with 2 ° measuring space intensity of reflected light.

And this measurement range, by the exploration azimuth direction of envisioning of optic axis and the deviation of the true bearing angular direction that experience determines, for example preferably be set in ± 45 °, ± 30 ° etc. arbitrarily angled scope in.

The amplified curve figure G of Fig. 3 ₂, G ₃Be to be that intensity of reflected light in each measurement range at center changes with directions X and Y direction.

Can obtain the azimuth direction Φ of optic axis OX from this determination data _A, polar angle direction θ.

When asking tiltangle, the ordinary light specific inductive capacity of formula (2) is set at the DIELECTRIC CONSTANT of the preceding polyimide film of friction ₀=3.00.

For curve map G ₂Measurement result carry out The Fitting Calculation, be subjected to light intensity to form minimum orientation v in calculating ₁The time, v ₁=0.4 °.Therefore as can be known, the azimuth direction Φ of optic axis OX _ATilt 0.4 ° by Y-axis.

In addition, with respect to curve map G ₃Measurement result carry out The Fitting Calculation, be subjected to light intensity to form minimum orientation v in calculating ₃The time, as Φ _B=v ₃-v ₁, the ordinary light DIELECTRIC CONSTANT ₀=3.00 (specific inductive capacity of polyimide film before the friction), based on formula (2) when calculating tiltangle, θ=22.5 °.

And the minute of a measuring point is about 2 seconds at this moment.

Based on this result, the azimuth direction of the optic axis of test specimen and with 2 directions of the direction of its quadrature on, when adopting ellipsometer to measure, ordinary light DIELECTRIC CONSTANT as can be known ₀=2.79, unusual optical dielectric constant ε _e=3.44, the thickness t=11nm of anisotropic band.From this ordinary light DIELECTRIC CONSTANT ₀Value when calculating tiltangle again, the θ value is 24.5 °.

At this moment, even add the time that ellipsometer is measured, minute is about 4 seconds for each measuring point, can measure the result the same with existing method at a high speed.

Embodiment 2

Fig. 4 has shown other forms of implementation of apparatus for measuring optical aeolotropic parameter, and therefore the part additional phase identical with Fig. 1 symbol together omits its detailed description.

In the apparatus for measuring optical aeolotropic parameter 31 of this example, light emitting optical system 4 is provided with xenon lamp 32, along its irradiation optical axis L _IR, at the focal point place of catoptron 33 pinhole slit 34 is set, makes its collimation lens that sees through parallel lightization 35, interference filters 36, polariscope 22 that the P polarized light is seen through.

At this moment, interference filters 35 is set like this, and its centre wavelength is chosen to be 450nm, and the beam diameter that the half value overall with is chosen to be 2nm, be radiated on the film test piece 3 is set at 10mm ², incident angle is set at as 60 ° near the Brewster angle.

In addition, light receiving optical system 5 is along its reflection optical axis L _RF, detection photon 24, wavelength that the S polarized light is seen through are set select light filter 37, two-dimensional CCD camera 38.

Thus, can measure simultaneously from the 10mm that is radiated on the test specimen 3 ²Mensuration zone A in the intensity of reflected light of a plurality of measuring point Mij.

Test specimen 3 is prepared like this, and rotary coating polyamic acid on the Si substrate (daily output chemistry make PI-C) carries out sintering under 260 ℃, adopts the polishing cloth formation that rubs.In when friction, rub with bigger frictional strength to the right by the left side of test specimen 3.

When adopting existing method to measure the tiltangle of this test specimen 3 with 10 * 10=100 point, the right side be distributed as 30-34 °, the left side be distributed as 27-29 °.

In addition, minute is about 100 minutes of 100 points.

Test specimen 3 is arranged on the microscope carrier 2, behind adjustment angle of oscillation, the height, makes universal stage 13 rotations, with respect to 2 yuan of distributions of measurement of incidence direction intensity of reflected light.

Fig. 5 (a) shown the measuring point Mij that measures before the rotation in the regional A (i, j=1-10).

Fig. 5 (b) has shown that each measuring point Mij is with polar coordinates Mij=(r along with the image rotating of universal stage 13 rotations _n, α _m) expression, when universal stage 13 rotated with angle γ, Mij=(r was adopted in the position of Mij _n, α _{M+ γ}) expression.

Therefore, can with Mij=(r _n, α _m+ γ) measure intensity of reflected light in the pixel area of corresponding CCD camera 39.

Thus, for each the measuring point Mij that amounts to 100 points, the same with embodiment 1, with frictional direction (directions X) be the center ± 20 °, and with it the direction of quadrature (Y direction) be the center ± 20 ° scope in, with 2 ° measuring space intensity of reflected light, employing formula (7) is obtained the distribution of tiltangle.The minute of the measuring point of 100 points is 2 seconds at this moment.

Based on this result, for each measuring point Mij of test specimen, at the azimuth direction Φ of optic axis OX _AWith with 2 directions of the direction of its quadrature, adopt ellipsometer to measure, measure the ordinary light DIELECTRIC CONSTANT ₀, unusual optical dielectric constant ε _e, anisotropic band thickness t.

Fig. 6 is the ordinary light DIELECTRIC CONSTANT from determining ₀The distribution of the tiltangle that calculates again of value.

Thus, the right side is 30-34 ° distribution, and the left side is 27-29 ° distribution, obtains and the same result who adopts existing method to determine.

At this moment, even add the time that ellipsometer is measured, the minute of the measuring point of 100 points is about 6 seconds, can measure the result the same with the method that has now by hypervelocity.

Embodiment 3

Fig. 7 has shown other forms of implementation of apparatus for measuring optical aeolotropic parameter, and the part identical with Fig. 1 adopts prosign to represent, omitted its detailed description.

The apparatus for measuring optical aeolotropic parameter 41 of this example does not make test specimen 3 rotations measure the optical anisotropy parameter.

Light emitting optical system 4 with frictional direction (directions X) be the center ± 20 °, with Y direction be with its quadrature the center ± 20 ° scope in, set a plurality of irradiation optical axis L with 5 ° interval _IR, this optical axis makes near the incident angle (being 60 ° in the present example) Brewster angle locate the irradiates light to measuring point M.

At each irradiation optical axis L _IRThe place, it is 780nm that wavelength is set, light intensity is the semiconductor laser 42 of 20mW, the polariscope 22 that the P polarized light is seen through.

Light receiving optical system 5 is to form like this, and it is equipped with along each the reflection optical axis L that irradiates from being equipped with laser instrument 42, reflected by film test piece 3 _RF, cancellation is from the pinhole slit 23 of the light of the backside reflection of test specimen 3; The detection photon 24 that the S polarized light is seen through; Wavelength is selected light filter 25 and photomultiplier 26, and the detection signal of each photomultiplier 26 exports arithmetic processing apparatus 6 to.

Test specimen 3 is prepared like this, after glass substrate (blank glass) go up to adopt rotary coating machine rotary coating polyamic acid (the daily output chemistry is made PI-C), carries out sintering under 260 ℃, adopts the polishing cloth formation that rubs.

The thickness T=93nm of film before the friction, DIELECTRIC CONSTANT=2.98.

When the test specimen 3 after the friction adopts existing known manner to measure in advance, when frictional direction is 0 °, the azimuth direction v of optic axis OX ₁=1.5 °, polar angle direction θ=20.4 °, ordinary light DIELECTRIC CONSTANT ₀=2.78, unusual optical dielectric constant ε _e=3.32, the thickness t=12nm of anisotropic band.The minute of this moment is a measuring point cost 60 seconds.

Behind the angle of oscillation of adjustment film test piece 3, the height, measure from the reflection of light light intensity of each laser instrument 42 output.

Fig. 8 and Fig. 9 be respectively with directions X (180 °) and Y direction (90 °) be the center ± determination data in 20 ° of angular ranges.

Measurement result with respect to Fig. 8 is carried out The Fitting Calculation, is subjected to the minimum orientation v of light intensity in calculating ₁The time, v ₁=1.8 °.Therefore as can be known, the azimuth direction Φ of optic axis OX _ATilt 1.8 ° from Y-axis.

In addition, when carrying out The Fitting Calculation, calculate and be subjected to the minimum orientation v of light intensity with respect to the measurement result of Fig. 9 ₃, as Φ _B=v ₃-v ₁, the ordinary light DIELECTRIC CONSTANT ₀=2.98 (frictions before polyimide film specific inductive capacity), when calculating tiltangle based on formula (2), θ=19.0 °.

And the minute of a measuring point is about 0.5 second at this moment.

Based on this result, adopt ellipsometer to measure at the azimuth direction of the optic axis of test specimen with 2 directions of the direction of its quadrature after, the ordinary light DIELECTRIC CONSTANT ₀=2.76, unusual optical dielectric constant ε _e=3.38, the thickness t=16nm of anisotropic band.From this ordinary light DIELECTRIC CONSTANT ₀Value when calculating tiltangle again, θ=20.5 °.

At this moment, even add the time that ellipsometer is measured, minute is about 2 seconds for each measuring point, can measure the result the same with existing method at a high speed.

Utilizability on the industry

The present invention is applicable to having optically anisotropic film article, is specially adapted to liquid crystal orientation film Quality inspection etc.

Claims

1, a kind of measuring optical aeolotropic parameter method, it measures azimuth direction and polar angle direction as the optic axis of film test piece anisotropic parameters,

The normal that makes progress with the measuring point from film test piece is as the center, from a plurality of incident directions of setting at interval at a predetermined angle, relatively the said determination point make P polarized light or S polarized light monochromatic light with predetermined incident angle irradiation,

Corresponding to incident direction, detect in the polarized light component that is included in its reflected light, with the intensity of reflected light of the polarized light component of the polarization direction quadrature of irradiates light,

Based on demonstrate in described intensity of reflected light in the minimizing incident direction, minimal value that tested two maximum value having made as maximum peak clip or the minimizing incident direction that clips as two maximum value of middle crest, determine the azimuth direction of optic axis in the measuring point

Made as the maximum value of described intensity of reflected light maximum peak and the minimizing incident direction that clips as the maximum value of the middle crest that is adjacent based on tested, or, determine the polar angle direction of optic axis in its measuring point based on the tested incident direction of having made as the maximum value of maximum peak.

2, measuring optical aeolotropic parameter method as claimed in claim 1 is wherein by being that the center makes the test specimen rotation with described normal, from the monochromatic light of the relative said determination point of a plurality of incident directions with predetermined incident angle irradiation P polarized light or S polarized light.

3, measuring optical aeolotropic parameter method as claimed in claim 1, wherein by being the center with described normal, from around it at a predetermined angle a plurality of illuminating parts of arranged spaced shine the monochromatic light of described P polarized light or S polarized light.

4,,, measure the anisotropy of optic axis for a plurality of measuring points wherein by mobile film test piece as each described measuring optical aeolotropic parameter method of claim 1-3.

5, measuring optical aeolotropic parameter method as claimed in claim 1, wherein with described normal as the center at a predetermined angle at interval the monochromatic incident direction of the P polarized light of incident or S polarized light be to be the center with first angle and second angle, in predetermined angular range, set a plurality of respectively at a predetermined angle at interval, wherein first angle is to figure out in advance when existing the minimal value that 2 maximum value as maximum peak clip, and second angle is to exist as maximum peak maximum value and the minimal value that clips as the maximum value of middle crest, maximum value as maximum peak, figure out in advance during perhaps as the maximum value of middle crest.

6, a kind of measuring optical aeolotropic parameter method, it measures azimuth direction and polar angle direction as the optic axis of film test piece anisotropic parameters,

The normal that makes progress with the center in the mensuration zone from film test piece is as the center, from a plurality of incident directions of setting at interval at a predetermined angle, relatively the said determination zone make P polarized light or S polarized light monochromatic light with predetermined incident angle irradiation,

By detect be included in its reflected light in the polarized light component, distribute with the intensity of reflected light of the polarized light component of the polarization direction quadrature of irradiates light, for measure region memory each measuring point detect separately intensity of reflected light two-dimensionally corresponding to incident direction

For each measuring point, based on demonstrate in described intensity of reflected light in the minimizing incident direction, minimal value that tested two maximum value having made as maximum peak clip or the minimizing incident direction that clips as two maximum value of middle crest, determine the azimuth direction of optic axis in this measuring point

Made as the maximum value of described intensity of reflected light maximum peak and the minimizing incident direction that clips as the maximum value of the middle crest that is adjacent based on tested, or, determine the polar angle direction of optic axis in this measuring point based on the tested incident direction of having made as the maximum value of maximum peak.

7, measuring optical aeolotropic parameter method as claimed in claim 1, wherein based on the azimuth direction of determining, adopt ellipsometer or reverberator measuring instrument to measure from 2 directions at least arbitrarily, obtain principal dielectric constants, thickness as the anisotropic films of optical anisotropy parameter.

8, a kind of apparatus for measuring optical aeolotropic parameter, azimuth direction and polar angle direction that it is measured as the optic axis of film test piece anisotropic parameters have:

The normal that makes progress with the measuring point from film test piece is as the center, and from a plurality of incident directions of setting at interval at a predetermined angle, the said determination point makes the light emitting optical system of the monochromatic light of P polarized light or S polarized light with predetermined incident angle irradiation relatively;

Detect corresponding to incident direction in the polarized light component that is included in its reflected light, with the light receiving optical system of the intensity of reflected light of the polarized light component of the polarization direction quadrature of irradiates light; And

Arithmetic processing apparatus, it is based on demonstrating in the minimizing incident direction in described intensity of reflected light, minimal value that tested two maximum value having made as maximum peak clip or the minimizing incident direction that clips as two maximum value of middle crest, determine the azimuth direction of optic axis in its measuring point, made as the maximum value of described intensity of reflected light maximum peak and the minimizing incident direction that clips as the maximum value of the middle crest that is adjacent simultaneously based on tested, or, determine the polar angle direction of optic axis in its measuring point based on the tested incident direction of having made as the maximum value of maximum peak.

9, it is that the center is rotatable that apparatus for measuring optical aeolotropic parameter as claimed in claim 8, wherein said test specimen are configured to described normal.

10, apparatus for measuring optical aeolotropic parameter as claimed in claim 8, wherein said light emitting optical system and light receiving optical system are that the center is provided with many groups at a predetermined angle at interval around it with described normal.

11, apparatus for measuring optical aeolotropic parameter as claimed in claim 8 wherein has the microscope carrier that film test piece is moved in order to measure the anisotropy of optic axis for a plurality of measuring points.

12, apparatus for measuring optical aeolotropic parameter as claimed in claim 8, wherein with described normal as the center at a predetermined angle at interval the monochromatic incident direction of the P polarized light of incident or S polarized light be to be the center with first angle and second angle, in predetermined angular range, set a plurality of respectively at a predetermined angle at interval, wherein first angle is to figure out in advance when existing the minimal value that 2 maximum value as maximum peak clip, and second angle is to exist as the maximum value of maximum peak and the minimal value that clips as the maximum value of middle crest, maximum value as maximum peak, figure out in advance during perhaps as in the maximum value of middle crest any one.

13, a kind of apparatus for measuring optical aeolotropic parameter, azimuth direction and polar angle direction that it is measured as the optic axis of film test piece anisotropic parameters have:

The normal that makes progress with the center in the mensuration zone from film test piece is as the center, from a plurality of incident directions of setting at interval at a predetermined angle, the said determination zone makes the light emitting optical system of the monochromatic light of P polarized light or S polarized light with predetermined incident angle irradiation relatively;

Light receiving optical system with two-dimensional photoreceptor, its by mensuration be included in the polarized light component in its reflected light, distribute with the intensity of reflected light of the polarized light component of the polarization direction quadrature of irradiates light, for measure region memory each measuring point, detect separately intensity of reflected light corresponding to incident direction; And

Arithmetic processing apparatus, it is for each measuring point, based on demonstrating in the minimizing incident direction in described intensity of reflected light, minimal value that tested two maximum value having made as maximum peak clip or the minimizing incident direction that clips as two maximum value of middle crest, determine the azimuth direction of optic axis in this measuring point, made as the maximum value of described intensity of reflected light maximum peak and the minimizing incident direction that clips as the maximum value of the middle crest that is adjacent simultaneously based on tested, or, determine the polar angle direction of optic axis in this measuring point based on the tested incident direction of having made as the maximum value of maximum peak.