CN107367516A - One kind coating detection prosthetic device and its method - Google Patents
One kind coating detection prosthetic device and its method Download PDFInfo
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- CN107367516A CN107367516A CN201710595274.3A CN201710595274A CN107367516A CN 107367516 A CN107367516 A CN 107367516A CN 201710595274 A CN201710595274 A CN 201710595274A CN 107367516 A CN107367516 A CN 107367516A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
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- Gas-Filled Discharge Tubes (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Coating Apparatus (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
One kind coating detection prosthetic device and its corresponding method, detection unit and reparation unit are all integrated on coating machine, and the overall board repaired as a coating detection uses.After coating machine completes coating work, detection unit is detected using the means of microcell light transmittance to the bearing substrate and flexible base board that are placed on coating machine, distinguishes the presence of the bubble or particle foreign matter in simultaneously positioning flexible substrate；Repair unit and local heating is carried out to the bubble of detection positioning using microwave, make air bubble expansion and be moved to flexible base board surface spilling, and positioning is marked to the follow-up reparation of needs or the defects of evading, the yields of flexible display screen preparation can be improved using the manufacture method of the present apparatus, reduces manufacture risk.
Description
Technical field
The invention belongs to the preparation of flexible display apparatus preparation field, more particularly to AMOLED screen.
Background technology
In the preparation of flexible display apparatus, especially AMOLED screen, flexible base board is wherein vital basic courses department
Point.As bearing substrate, it needs to have good flatness, bending resistance, high-temperature stability, corrosion resistance and well
Obstruct the characteristic of water oxygen.
In the preparation process of flexible base board generally use, bubble caused by painting process is often most, such as former
In liquid itself it is existing but during there is no a bubble removed completely, and gas caused by the foreign matter in coating process on substrate
Bubble etc., itself is existing or being relatively large in diameter of being introduced in flexible base board coating process in the bubble and stoste that are relatively large in diameter
Foreign particle is the same, during follow-up high temperature film forming, annealing or Excimer-Laser Crystallization crystallize to a-Si, it is difficult to again
Removed using means such as base-plate cleanings, it is also difficult to which the inorganic film being subsequently vapor-deposited or the organic film of other coatings are complete
All standing, " singular point " easily concentrated as energy cause serious broken an ancient egg-shaped, holed wind instrument or ablation so that substrate can not play water oxygen resistance
Every effect, while pollution sources can be also introduced to follow-up support board, increase processing procedure risk, or even influence equipment safety.
Therefore, the presence to the particle pollution in flexible base board coating process and bubble needs tight monitoring.It is existing
Detection means, be to use automatic optical detector (AOI), so-called defect detected using CCD scanning techniques.It is but such a
Detection method is inefficient, is easier to malfunction；Another aspect automatic optical detector structure is more complicated, it is necessary to independent operating,
Need to set transhipment process after flexible base board coating, be in transit easily secondarily contaminated.
The content of the invention
It is an object of the invention to provide a kind of side for being coated with detection prosthetic device and carrying out flexible base board detection reparation
Method.
The present invention is achieved in that a kind of coating detection prosthetic device, and detection unit is integrated on coating machine, described
Detection unit is detected using microcell light transmittance method, and detection object is that product to be detected is detected on the coating machine,
The product to be detected includes bearing substrate and conforms to the flexible base board on the bearing substrate surface, and the detection unit includes
The light that the light source is sent is impinged perpendicularly on the flexibility by light source, optical module, integrating sphere and spectrometer, the optical module
Substrate surface, the light is collected after passing through the flexible base board and bearing substrate by the integrating sphere, then is passed by the integrating sphere
It is defeated by the spectrometer to analyze light quantity, to judge to whether there is defect between bearing substrate and flexible base board.
Wherein, the light source is highlighted xenon lamp or high-pressure sodium lamp.
Wherein, the optical module is collimation or focus module.
Wherein, the spectrometer is wide spectrum instrument.
Wherein, the flexible base board is its uncured state, and coating detection prosthetic device also includes being arranged at the coating
Reparation unit on machine, the reparation unit are repaired by launching the microwave to the defect detected.
Wherein, the reparation unit also includes microwave generator, algorithm for power modulation unit, microwave beam splitting arrangement and Microwave emission
Microwave energy caused by the microwave generator is maintained certain sequential by antenna, the algorithm for power modulation unit, through the microwave point
Bundle device modulation after from the microwave transmitting antenna to it is described flexible the defects of send microwave.
Wherein, the microwave beam splitting arrangement includes at least one of isolator or attenuator, for extracting current institute
State microwave signal.
Wherein, the reparation unit also includes feedback unit, data processing unit and indexing unit, and the feedback unit connects
The microwave signal is received, sequential is repaired in the data processing unit control, the microwave signal received to the feedback unit
With being analyzed, judge that the product after repairing whether there is remaining defect, and calculate defective locations and physical features, the mark
Unit marks the physical location of the remaining defect.
The detection carried out with the detection of the present invention and prosthetic device and restorative procedure, comprise the following steps：
Product to be measured is placed on coating machine, the product to be detected includes bearing substrate and conforms to the bearing substrate
The flexible base board on surface；
The light that detection unit is sent impinges perpendicularly on flexible base board surface；
Integrating sphere collects the light through flexible base board and bearing substrate；
Spectrometer carries out contrasting detection to light quantity, determines whether existing defects, repairs unit with triggering and defect is repaiied
It is multiple.
Further, as repair mechanism is triggered, then it is as follows to repair step：
Repair unit and launch microwave energy to defect, bubble heating is expanded to spilling；
Repair unit to receive microwave signal and carry out contrast judgement, with triggered mark unit；
To it is remaining after reparation the defects of be marked.
The method detected by introducing microcell light transmittance, using the difference through spectrum tested diverse location and obtained, sweeps
Retouch and differentiate bubble or foreign particle on the flexible base board after coating, and position their exact physical location, enter
And heating operation is carried out to the bubble of positioning using the microbeam so that the bubble in the flexible base board is in the flexible base
Overflowed before plate overall " solidification ", the risk for avoiding bubble from being brought to the substrate.Meanwhile the foreign matter grain for detecting and positioning
Son, it can be buried in successive process with means such as coverings, for the larger foreign particle that can not be buried, then in successive process
Middle mark is display unit, i.e., mark is dim spot in program is shown ", reduction is such a to pollute what is brought to flexible base board
Risk.
Brief description of the drawings
In order to illustrate more clearly of technical scheme, letter will be made to the required accompanying drawing used in embodiment below
Singly introduce, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for the common skill in this area
For art personnel, on the premise of not paying creative work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the schematic diagram of present invention coating detection and prosthetic device；
Fig. 2 is the schematic diagram of the flexible base board；
Fig. 3 is the detailed construction schematic diagram of the detection unit；
Fig. 4 is the transmission spectrum that the detection unit obtains；
Fig. 5 is the detailed construction schematic diagram of the reparation unit；
Fig. 6 is repaired obtained complete flexible display panels；
Fig. 7 is the method flow diagram using this detection prosthetic device.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes.
As shown in figure 1, a kind of coating detection prosthetic device provided in an embodiment of the present invention, the detection unit 300 are integrated
In on the coating machine 10, the coating machine 10 includes board 200, driver element 201, portal frame 203, spray head 204 and institute
Monitoring processing system 202 is stated, the detection unit 300 is arranged on the spray head, is detected and is pacified using microcell printing opacity sensor
The product to be detected being placed on the coating machine 10, the product to be detected include bearing substrate 100 and conformed to described
The flexible base board 101 on the surface of bearing substrate 100, the bearing substrate 100 are fixed on the board 200.The monitoring processing
System 202 sends instructions to the driver element 201, and the driver element 201 drives the portal frame 203 and the spray head
204 so that the motion monitoring processing system on three-dimensional occurs relative to the product to be detected for the detection unit 300
The detection signal that the detection unit 300 provides is collected and handled to system 202.
Fig. 2 is the schematic diagram of the flexible base board, and the bearing substrate 100 is glass plate in the present embodiment；It is described soft
Property substrate 101 be in the present embodiment coated and cured obtained polyimide film on a glass；Show in final flexibility
In display screen, this layer of polyimide film is the supporting layer of flexible display screen and the water oxygen barrier layer of lower section.In the present embodiment,
Polyimide film is divided into two regions and is respectively coated on the glass substrate, and A-A ' and B-B ' are respectively the coating side of coating machine
To 102 is the bubble of more than 500 μm of diameter more often occur, and corpuscular property foreign matter does not mark in Fig. 2.
During work, the monitoring processing system 202 sends instructions to the driver element 201, and the driver element 201 drives
After the coating machine 10 is moved by A-A ' or the coating of B-B ' directions, the detection unit 300 of the driving with microcell printing opacity sensor
With the product relative motion to be measured, the detection of optical transmittance in smaller substrate regions is completed one by one, and will transmit through spectrum hair
Give the monitoring processing system 202 and carry out data processing and signal differentiation, so as to realize the detection function of apparatus of the present invention.
Relative to CCD Scanning Detctions, the microcell light transmittance technology used particular for flexible display screen, can obtain higher
Sentence error rate, improve detection efficiency.And the detection unit 300 is integrated on the coating machine 10, reduce independent censorship
Process, save the time, it also avoid the situation that flexible base board 101 is secondarily contaminated described in circulation process, so as to carry
Yield rate prepared by high flexibility display screen.
Fig. 3 is the detailed construction of the detection unit 300, and the light source 301 and the optical module 302 are treated positioned at described
Detect below product, fortune synchronous with the integrating sphere 303 and the spectrometer 304 being separated by above the product to be detected
Dynamic, the light source 301 sends one group of detection light beam, and after the effect of the optical module 302, light beam pools definite shape
With the hot spot of size, and the surface of the flexible base board 101 is impinged perpendicularly on, the integrating sphere 303 is collected through the flexible base
The light beam that plate 101 transmits, and the light transmission capacity under different wave length is passed into the spectrometer 304 and detected.
Relative to automatic optical detector (AOI), the volume of the detection unit 300 is smaller, and structure is simpler, it is easier to
It is integrated on the coating machine 10, while is also easier to later maintenance and maintenance.
Preferably, the light source 301 is usually highlighted xenon lamp or high-pressure sodium lamp etc..
Preferably, the optical module 302 possesses collimation or focussing force, to be further ensured that beam orthogonal incides
The flexible base board 101.
Preferably, the spectrometer 304 selects wide spectrum instrument, to expand detectable scope, avoids omitting the light beam transmitted.
Fig. 4 be the present embodiment described in detection unit 300 obtain pass through spectrum, including it is perfect it is sunken described in
The optical transmission spectra 306 of flexible base board 101, the optical transmission spectra containing alveolate optical transmission spectra 305, and the foreign matter containing corpuscular property
307.If corpuscular property foreign matter or bubble be present in the flexible base board 101, obtained spectrum and complete described soft is transmitted
Property substrate 101 is entirely different.It has been confirmed that when containing larger foreign particle in the flexible base board 101, wide spectrum
In the range of transmitance be worth the more complete flawless flexible base board 101 transmitance value it is low；On the contrary, work as the flexible base board
When containing larger bubble in 101, the transmitance in wide spectral range is worth the transmitance of more complete flawless flexible base board 101
Value is high.
It will be apparent that gathered one by one by the spectrum to different tiny areas and focus on judgement, Ke Yiquan
Situation the defects of detecting flexible base board 101 in face, information support is provided for next step processing.
The reparation unit 400 is arranged on the spray head 204, and the driver element 201 drives the reparation unit
400 the motion on three-dimensional occurs relative to the product to be measured.
The reparation concrete structure of unit 400 is as shown in figure 5, the flexible base board 101 needs to locate when carrying out repair
In its uncured state, for position 103 corresponding to bubble in the flexible base board wet film, the microwave generator 401 produces one
Determine the microwave energy of power, the energy is remained micro- in certain sequential (i.e. repair time section) by the algorithm for power modulation unit 402
The stabilization of ripple emergent power, then through the microwave beam splitting arrangement 403 modulate the microwave after, from the microwave transmitting antenna 404 to
Position 103 corresponding to bubble sends microwave in the flexible base board, carries out local heating so that air bubble expansion is simultaneously moved to described
The surface of flexible base board 101 and spilling.
Relative to using pulse laser beam ablation bubble, or bubble diameter directly to be led more than 500 μm in the prior art
Coating process can largely be improved by causing the flexible base board 101 reparation disposal means, the Microwave method technology such as abandon, scrap
In harmful effect caused by caused bubble, improve prepare yield rate.
Preferably, the microwave beam splitting arrangement 403 may include at least one of isolator or attenuator unit, be used for
The current microwave signal of extraction, judge to provide foundation for subsequent analysis.
Preferably, the microwave transmitting antenna 404 can also receive the microwave signal of feedback, deliver to the feedback unit
405, then will test spectral that just (negative) is obtaining to microwave with the detection unit 300 or institute from the data processing unit 406
The microwave signal for stating the extraction of microwave beam splitting arrangement 403 is compared differentiation, calculates and stores the position of defect, physics spy
The parameter such as sign, the frequency of modulated microwave, power, decay speed, while control some row software functions such as clock signal of reparation.
The indexing unit 407 positions the physical location of current defect using laser labelling, can be optical markings, only lossless mark
Current defect coordinate sends microwave unit to and carries out repair process；Can also be physical markings, at current defect coordinate position
The special token of ablation one, it is easy to the operations such as subsequent slice parsing.
Repaired obtained complete flexible display panels, may be as shown in fig. 6, original bubble has been repaired
Surface leaves light defects or spot etc., but this defect can be covered by follow-up film layer such as other deposited inorganic layers 104
Lid, the situations such as broken an ancient egg-shaped, holed wind instrument will not also occur in Excimer-Laser Crystallization a-Si processing procedure.The flexible base board 101 after repair
The upper preparation for completing follow-up display unit device, obtains complete flexible display panels 105.
The method for being detected and being repaired using the present apparatus is shown in Fig. 7, first passes through the defects of detection judges whether to need to repair,
Product to be detected is placed on coating machine, the product to be detected includes bearing substrate and conforms to the bearing substrate surface
Flexible base board；Start the detection unit so that detection unit lights, and impinges perpendicularly on the flexible base board surface；Pass through
The integrating sphere collects the light through flexible base board and bearing substrate；Contrasting detection is carried out to light quantity by the spectrometer,
Determine whether existing defects, defect is repaired with determining whether that unit is repaired in triggering；
If the defects of in the presence of needing to repair, the reparation unit launches microwave energy to defect, and bubble heating is expanded to
Overflow；The reparation unit is also responsible for receiving microwave signal and carries out contrast judgement, with triggered mark unit；The indexing unit
Remaining defect after reparation is marked.
The difference through spectrum obtained using diverse location is tested, scan and differentiate the flexible base board after coating
Bubble or foreign particle on 101, and their exact physical location is positioned, and then the bubble using microbeam to positioning
Carry out heating operation so that bubble overflows before the integrally curing of flexible base board 101, avoids bubble to the flexible base board
101 risks brought.Meanwhile the foreign particle for detecting and positioning, it can be buried in successive process with means such as coverings,
For the larger foreign particle that can not be buried, then mark is display unit in successive process, i.e., in program is shown
Labeled as " dim spot ", reduction is such a to pollute the risk brought to the flexible base board 101.
It is necessary to ensure that the flexible base board 101 is not yet solid in order to obtain more preferable repairing effect, when being repaired using the method
Change, carry out reparing process within 30 minutes after the completion of being preferably coated with.
Described above is the preferred embodiment of the present invention, it is noted that for those skilled in the art
For, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications are also considered as
Protection scope of the present invention.
Claims (10)
1. one kind coating detection prosthetic device, it is characterised in that detection unit is integrated on coating machine, using microcell light transmittance
Method, the product to be detected being positioned on coating machine is detected, the product to be detected includes bearing substrate and conformed to
The flexible base board on the bearing substrate surface, the detection unit includes light source, optical module, integrating sphere and spectrometer, described
The light that the light source is sent is impinged perpendicularly on the flexible base board surface by optical module, the light through the flexible base board and
Collected after bearing substrate by the integrating sphere, then the spectrometer is transferred to by the integrating sphere light quantity is analyzed, to sentence
Determine to whether there is defect between bearing substrate and flexible base board.
A kind of 2. coating detection prosthetic device according to claim 1, it is characterised in that the light source be highlighted xenon lamp or
High-pressure sodium lamp.
A kind of 3. coating detection prosthetic device according to claim 1, it is characterised in that the optical module for collimation or
Person's focus module.
4. a kind of coating detection prosthetic device according to claim 1, it is characterised in that the spectrometer is wide spectrum
Instrument.
5. a kind of coating detection prosthetic device according to claim 1, it is characterised in that coating detection prosthetic device is also
Including the reparation unit being integrated on the coating machine, the reparation unit is used to launch microwave, by the microwave to detection
To the defect repaired.
6. a kind of coating detection prosthetic device according to claim 5, it is characterised in that the reparation unit also includes micro-
Wave producer, algorithm for power modulation unit, microwave beam splitting arrangement and microwave transmitting antenna, the algorithm for power modulation unit send out the microwave
Microwave energy caused by raw device maintains certain sequential, and the microwave sent in the sequential is modulated through the microwave beam splitting arrangement
Sent afterwards from the microwave transmitting antenna to the flexible base board defect.
7. a kind of coating detection prosthetic device according to claim 6, it is characterised in that the microwave beam splitting arrangement includes
Isolator and/or attenuator, the isolator and/or attenuator are used to extract the current microwave signal, are subsequent analysis
Judge to provide foundation.
8. a kind of coating detection prosthetic device according to claim 6, it is characterised in that the reparation unit also includes anti-
Unit, data processing unit and indexing unit are presented, the feedback unit receives the microwave signal, the data processing unit control
System repairs sequential, and the microwave signal received to the feedback unit is analyzed, and judges that the product after repairing whether there is
Remaining defect, and defective locations and physical features are calculated, the indexing unit is used for the physical location for marking the remaining defect.
A kind of 9. method repaired using coating detection prosthetic device progress flexible base board detection, it is characterised in that including following
Step：
Product to be detected is placed on coating machine, the product to be detected includes bearing substrate and conforms to the bearing substrate table
The flexible base board in face；
Start the detection unit so that detection unit lights, and impinges perpendicularly on the flexible base board surface；
The light through flexible base board and bearing substrate is collected by the integrating sphere；
Contrasting detection is carried out to light quantity by the spectrometer, determines whether existing defects, unit is repaired with triggering defect is entered
Row is repaired.
10. the method that flexible base board detection according to claim 9 is repaired, it is characterised in that comprise the following steps：
The reparation unit launches microwave energy to defect, and bubble heating is expanded into spilling；
The reparation unit receives microwave signal and carries out contrast judgement, with triggered mark unit；
Remaining defect after reparation is marked the indexing unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710595274.3A CN107367516B (en) | 2017-07-19 | 2017-07-19 | Coating detection and repair device and method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710595274.3A CN107367516B (en) | 2017-07-19 | 2017-07-19 | Coating detection and repair device and method thereof |
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| Publication Number | Publication Date |
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| CN107367516A true CN107367516A (en) | 2017-11-21 |
| CN107367516B CN107367516B (en) | 2020-08-04 |
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| CN201710595274.3A Active CN107367516B (en) | 2017-07-19 | 2017-07-19 | Coating detection and repair device and method thereof |
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| CN113019778B (en) * | 2021-03-03 | 2022-04-12 | 湖南昕逸辰科技有限公司 | AF film coating method and device |
| CN113601984A (en) * | 2021-08-11 | 2021-11-05 | 四川轻化工大学 | High-precision printing type coating machine and control method thereof |
| CN114383810B (en) * | 2022-01-10 | 2023-09-12 | 中国建筑材料科学研究总院有限公司 | Device and method for pre-judging and discriminating leakage points of optical fiber image transmission element or material |
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