CN105486690A - Optical detection device - Google Patents
Optical detection device Download PDFInfo
- Publication number
- CN105486690A CN105486690A CN201510976340.2A CN201510976340A CN105486690A CN 105486690 A CN105486690 A CN 105486690A CN 201510976340 A CN201510976340 A CN 201510976340A CN 105486690 A CN105486690 A CN 105486690A
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- light source
- light
- optical detection
- detection apparatus
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
Abstract
The invention provides an optical detection device for detecting surface defects of an object to be detected. The optical detection device comprises a color camera and an illuminating system, wherein the color camera comprises three groups of sensors for respectively sensing first coloured light, second coloured light and third coloured light; the illuminating system comprises a first light source, a second light source and a third light source, the first light source emits the first coloured light, the second light source emits the second coloured light, and the third light source emits the third coloured light; the first light source is used for light field illumination, the second light source is used for dark field illumination, and the third light source serves as a backlight source for simultaneously performing light field detection, dark field detection and backlight detection on the object to be detected. According to an optical detection system, light field, dark field and backlight illumination systems can be simultaneously used to defect related defects on the surface of the object, a great amount of detection time is saved, the design is simple, and the design cost is reduced.
Description
Technical field
The present invention relates to field of optical detection, particularly relate to a kind of optical detection apparatus.
Background technology
Line sweep optical detection apparatus generally comprises bright field detection system, dark field detection or backlight detection system, is respectively used to the inspection of different defect.The light source that each system uses is different, generally can only use a kind of detection system, to avoid the imaging of other light sources system to disturb, cause related defects effectively not detect when detecting determinand.Such as, some defect can manifest when bright field illumination system, if but open backlight illuminating system and just can not manifest simultaneously.If want the various surface imperfection of comprehensive detected object, the repeatedly different illuminator of general normal employing separately detects.Existing line sweep optical detection apparatus is consuming time comparatively of a specified duration when carrying out determinand surface imperfection and checking, design space demand is larger, and cost is also higher.
Summary of the invention
Therefore, an object of the present invention is to provide a kind of Systems for optical inspection and optical detection apparatus optical detection apparatus in prior art is consuming time for a long time, design space is large, the technical matters of high in cost of production to solve.
The invention provides a kind of optical detection apparatus, for the detection of object under test surface imperfection, this optical detection apparatus comprises color camera and illuminator, and this color camera comprises three groups of sensors, and these three groups of sensors are respectively used to perception first coloured light, the second coloured light and the 3rd coloured light; And this illuminator comprises the first light source, secondary light source and the 3rd light source, and this first light source sends this first coloured light, and this secondary light source sends this second coloured light, and the 3rd light source sends the 3rd coloured light; This first light source is used for bright field illumination, and this secondary light source is used for dark ground illumination, and the 3rd light source is used as backlight, detects to carry out bright field detection, dark field detection and backlight to this determinand simultaneously.
As further alternative technical scheme, this first coloured light, this second coloured light and the 3rd coloured light are selected from red light, green light and blue light, and this first coloured light, this second coloured light and the 3rd look this is different between two.
As further alternative technical scheme, this color camera is line scan camera.
As further alternative technical scheme, this Systems for optical inspection also comprises spectroscope, and this spectroscope is used for the light beam splitting that this first light source sends to go out the on-axis rays parallel with the optical axis of this color camera, and this on-axis rays is used for this bright field illumination.
As further alternative technical scheme, this Systems for optical inspection also comprises convex lens, and the light refraction that the 3rd light source sends is directional light by these convex lens, and this directional light is used as backlight.
As further alternative technical scheme, this first light source, this secondary light source and the 3rd light source are LED light source.
As further alternative technical scheme, this secondary light source comprises two groups of light sources, and these two groups of light sources this color camera symmetry relatively.
As further alternative technical scheme, this secondary light source is ring light.
As further alternative technical scheme, this optical detection apparatus also comprises transparent support platform, this object under test is placed on this transparent support platform, and this first light source and this secondary light source are positioned at above this object under test, and the 3rd light source is arranged at below this transparent support platform.
As further alternative technical scheme, this optical detection apparatus also comprises a plurality of driving rolls, this a plurality of driving rolls is arranged at the periphery of this transparent support platform and supports this transparent support platform, this a plurality of driving rolls drives this transparent support platform to drive this object under test to move, to realize whole detection of this object under test.
Compared with prior art, Systems for optical inspection of the present invention can use the related defects on light field, details in a play not acted out on stage, but told through dialogues and backlight illuminating system inspected object surface simultaneously, and different illuminator does not form interference to associated imaging system, saves a large amount of detection time, and simplicity of design, save design cost.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the optical detection apparatus of one embodiment of the invention.
Embodiment
For making there is further understanding to object of the present invention, structure, feature and function thereof, embodiment is hereby coordinated to be described in detail as follows.
Please refer to Fig. 1, Fig. 1 is the schematic diagram of the optical detection apparatus of one embodiment of the invention.Optical detection apparatus 100 of the present invention is for the detection of object under test 200 surface imperfection, it comprises color camera 10 and illuminator, color camera 10 comprises three groups of sensors 11, 12, 13, three groups of sensors 11, 12, 13 are respectively used to perception first coloured light, second coloured light and the 3rd coloured light, as sensor 11 only can perception first coloured light, two can not perception second coloured light and the 3rd coloured light, similarly, sensor 12 only can perception second coloured light, and can not perception first coloured light and the 3rd coloured light, and sensor 13 energy perception the 3rd coloured light, can not perception first coloured light and the second coloured light.Illuminator comprises the first light source 20, secondary light source 30 and the 3rd light source 40, and the first light source 20 sends the first coloured light, and secondary light source 30 sends the second coloured light, and the 3rd light source 40 sends the 3rd coloured light; Wherein, the first light source 20 is for bright field illumination, and secondary light source 30 is for dark ground illumination, and the 3rd light source 40 is used as backlight, detects to carry out bright field detection, dark field detection and backlight to determinand 200 simultaneously.
In an embodiment, first coloured light, the second coloured light and the 3rd coloured light are selected from red light, green light and blue light, and the first coloured light, the second coloured light and the 3rd look this is different between two, namely the first coloured light, the second coloured light, the 3rd coloured light can be RGB, red bluish-green, bluish-green red, Lan Hong is green, green red indigo plant, the turquoise multiple color combination such as red.Such as, the first light source 20 is red light source, and for bright field illumination, secondary light source 30 is green light source, and for dark ground illumination, the 3rd light source 40 is blue-light source, for back lighting; When carrying out optical detection, the imaging respectively by 11,12,13 perception of three groups of sensors respectively of the green light that the red optics that first light source 20 sends, secondary light source 30 send and the blue ray that the 3rd light source 40 sends, three groups of sensor 11,12,13 and first light sources 20, secondary light source 30 and the 3rd light sources 40 carry out work and non-interference simultaneously, thus realize the detection of bright field detection, dark field detection and backlight simultaneously, and do not need to carry out bright field detection, the detection of dark field detection machine backlight respectively, and then decrease detection required time, improve detection efficiency.
In an embodiment, color camera 10 is line scan camera, as being color linear scanning CCD camera or color linear scanning CMOS camera.
In a preferred embodiment, optical detection apparatus 100 also comprises spectroscope 50, spectroscope 50 goes out the on-axis rays L11 parallel with the optical axis R of color camera for the light L1 beam splitting sent by the first light source 20, on-axis rays L11 irradiates directly over determinand 200, for the illumination of bright field detection.But not as limit, spectroscope 50 can also substitute, depending on actual design demand by prism.
In a specific embodiment, Systems for optical inspection 100 also comprises convex lens 60, and the light L3 that the 3rd light source 40 sends is refracted as directional light L33 by convex lens 60, and directional light L33 is used as backlight, thus improves the utilization factor of the 3rd light source 40.
Preferably, the first light source 20, secondary light source 30 and the 3rd light source 40 are LED light source; Certainly, the first light source 20, secondary light source 30 and the 3rd light source 40 can also be that other monochromatic source or nonmonochromatic light are far converted into monochromatic source, make it be converted into monochromatic light as added filter before Halogen lamp LED, but not as limit.
In a preferred embodiment, secondary light source 30 comprises two groups of light sources 31,31, and the relative color cameras 10 of two groups of light sources 31,32 are symmetrical, thus provides uniform dark ground illumination for optical detection.
In a preferred embodiment, secondary light source 30 is ring light, to improve light source irradiation intensity and homogeneity.
In an embodiment, optical detection apparatus 100 also comprises transparent support platform 70, object under test 200 is placed on transparent support platform 70, and the first light source 20 is positioned at above object under test 200 with secondary light source 30,3rd light source 40 is arranged at below transparent support platform 70, the light L3 that 3rd light source 40 sends is irradiated to the back side of object under test 200 through transparent support platform 70, to carry out backlight detection.
In an embodiment, optical detection apparatus 100 also comprises a plurality of driving rolls (not illustrating), a plurality of driving rolls is arranged at the periphery of transparent support platform 70 and supports transparent support platform 70, a plurality of driving rolls drives this bright support platform 70 to drive object under test 200 to move, to realize the detection of diverse location on object under test 200, thus reach whole detection of measuring targets 200.
The present invention is described by above-mentioned related embodiment, but above-described embodiment is only enforcement example of the present invention.Must it is noted that the embodiment disclosed limit the scope of the invention.On the contrary, change done without departing from the spirit and scope of the present invention and retouching, all belong to scope of patent protection of the present invention.
Claims (10)
1. an optical detection apparatus, for the detection of object under test surface imperfection, this optical detection apparatus comprises color camera and illuminator, it is characterized in that,
This color camera comprises three groups of sensors, and these three groups of sensors are respectively used to perception first coloured light, the second coloured light and the 3rd coloured light; And
This illuminator comprises the first light source, secondary light source and the 3rd light source, and this first light source sends this first coloured light, and this secondary light source sends this second coloured light, and the 3rd light source sends the 3rd coloured light;
Wherein, this first light source is used for bright field illumination, and this secondary light source is used for dark ground illumination, and the 3rd light source is used as backlight, detects to carry out bright field detection, dark field detection and backlight to this determinand simultaneously.
2. optical detection apparatus as claimed in claim 1, it is characterized in that, this first coloured light, this second coloured light and the 3rd coloured light are selected from red light, green light and blue light, and this first coloured light, this second coloured light and the 3rd look this is different between two.
3. optical detection apparatus as claimed in claim 1, it is characterized in that, this color camera is line scan camera.
4. optical detection apparatus as claimed in claim 1, it is characterized in that, this Systems for optical inspection also comprises spectroscope, and this spectroscope is used for the light beam splitting that this first light source sends to go out the on-axis rays parallel with the optical axis of this color camera, and this on-axis rays is used for this bright field illumination.
5. optical detection apparatus as claimed in claim 1, it is characterized in that, this Systems for optical inspection also comprises convex lens, and the light refraction that the 3rd light source sends is directional light by these convex lens, and this directional light is used as backlight.
6. optical detection apparatus as claimed in claim 1, it is characterized in that, this first light source, this secondary light source and the 3rd light source are LED light source.
7. optical detection apparatus as claimed in claim 1, it is characterized in that, this secondary light source comprises two groups of light sources, and these two groups of light sources this color camera symmetry relatively.
8. optical detection apparatus as claimed in claim 7, it is characterized in that, this secondary light source is ring light.
9. optical detection apparatus as claimed in claim 1, it is characterized in that, this optical detection apparatus also comprises transparent support platform, this object under test is placed on this transparent support platform, and this first light source and this secondary light source are positioned at above this object under test, the 3rd light source is arranged at below this transparent support platform.
10. optical detection apparatus as claimed in claim 9, it is characterized in that, this optical detection apparatus also comprises a plurality of driving rolls, this a plurality of driving rolls is arranged at the periphery of this transparent support platform and supports this transparent support platform, this a plurality of driving rolls drives this transparent support platform to drive this object under test to move, to realize whole detection of this object under test.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510976340.2A CN105486690A (en) | 2015-12-23 | 2015-12-23 | Optical detection device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510976340.2A CN105486690A (en) | 2015-12-23 | 2015-12-23 | Optical detection device |
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| CN105486690A true CN105486690A (en) | 2016-04-13 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106092970A (en) * | 2016-06-07 | 2016-11-09 | 京东方科技集团股份有限公司 | A kind of Systems for optical inspection and optical detection apparatus |
| CN106623004A (en) * | 2017-01-24 | 2017-05-10 | 浙江四点灵机器人股份有限公司 | High-precision optical detector |
| CN108072659A (en) * | 2016-11-11 | 2018-05-25 | 三星显示有限公司 | More optical visual equipment |
| CN108414530A (en) * | 2018-03-13 | 2018-08-17 | 昆山国显光电有限公司 | Automated optical detection equipment |
| CN110108720A (en) * | 2019-05-30 | 2019-08-09 | 苏州精濑光电有限公司 | Optical detection apparatus |
| CN110998406A (en) * | 2017-07-12 | 2020-04-10 | 卡尔蔡司显微镜有限责任公司 | Flicker in variable angle lighting |
| CN114113113A (en) * | 2021-11-29 | 2022-03-01 | 哈尔滨工业大学 | Three-light-source microscope system device for positioning and identifying surface micro-defects |
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| US20090237653A1 (en) * | 2005-10-01 | 2009-09-24 | Chromasens Gmbh | Device for recording a number of images of disk-shaped objects |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106092970A (en) * | 2016-06-07 | 2016-11-09 | 京东方科技集团股份有限公司 | A kind of Systems for optical inspection and optical detection apparatus |
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| CN108072659A (en) * | 2016-11-11 | 2018-05-25 | 三星显示有限公司 | More optical visual equipment |
| CN108072659B (en) * | 2016-11-11 | 2022-05-31 | 三星显示有限公司 | Multi-optical vision apparatus |
| CN106623004A (en) * | 2017-01-24 | 2017-05-10 | 浙江四点灵机器人股份有限公司 | High-precision optical detector |
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| CN108414530A (en) * | 2018-03-13 | 2018-08-17 | 昆山国显光电有限公司 | Automated optical detection equipment |
| CN110108720A (en) * | 2019-05-30 | 2019-08-09 | 苏州精濑光电有限公司 | Optical detection apparatus |
| CN114113113A (en) * | 2021-11-29 | 2022-03-01 | 哈尔滨工业大学 | Three-light-source microscope system device for positioning and identifying surface micro-defects |
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Application publication date: 20160413 |