TWM453842U - OLED testing machine and its optical inspection apparatus - Google Patents

OLED testing machine and its optical inspection apparatus Download PDF

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TWM453842U
TWM453842U TW101223475U TW101223475U TWM453842U TW M453842 U TWM453842 U TW M453842U TW 101223475 U TW101223475 U TW 101223475U TW 101223475 U TW101223475 U TW 101223475U TW M453842 U TWM453842 U TW M453842U
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Taiwan
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optical
oled panel
light beam
oled
disposed
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TW101223475U
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Chinese (zh)
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qing-long Chen
ming-feng Xie
Xin-Yang Liang
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Hirose Tech Co Ltd
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Description

OLED檢測機台及其光學檢測裝置OLED detecting machine and optical detecting device thereof

本創作係關於一種OLED檢測機台及其光學檢測裝置,尤其是指一種利用多種光源進行光學檢測之OLED檢測機台及其光學檢測裝置。The present invention relates to an OLED detecting machine and an optical detecting device thereof, and particularly to an OLED detecting machine and an optical detecting device thereof, which use various light sources for optical detection.

近年來隨著科技發展的腳步日新月異,資訊的傳播已然成為日常生活中的一部份,而資訊的傳播途徑以電腦或電視等裝置為主,因此帶動了顯示裝置的產業蓬勃發展。In recent years, with the rapid development of science and technology, the dissemination of information has become a part of daily life. The dissemination of information is mainly based on computers or televisions, which has led to the vigorous development of the display device industry.

早期的顯示裝置如CRT(陰極射線管)螢幕等,由於其具有體積大且笨重的缺點,已逐漸被厚度薄、體積小的LCD(液晶顯示器)所取代。然而,近年來又以OLED(Organic Light Emitting Diode,有機發光二極體)作為發展重點,其原因在於利用OLED面板所製成的顯示裝置具有輕薄、可撓曲、全彩高亮度、省電、可視角較廣以及無殘影等優點。Early display devices such as CRT (Cathode Ray Tube) screens have been gradually replaced by thin (thick) LCDs (liquid crystal displays) due to their large size and bulkiness. However, in recent years, OLED (Organic Light Emitting Diode) has been the focus of development, because the display device made of the OLED panel has a thin, flexible, full-color, high-brightness, power-saving, Can have a wide viewing angle and no residual image.

由於OLED面板的製程與LCD的製程之間有落差,使現有的LCD製程並無法直接套用在OLED面板的製程上。而現有的OLED面板檢測方式是以各種光學檢測儀器來分別對OLED面板進行不同的光學檢測,且必須在不同的檢測站進行檢測,導致檢測所需耗費的時間增加。Due to the gap between the process of the OLED panel and the process of the LCD, the existing LCD process cannot be directly applied to the process of the OLED panel. The existing OLED panel detection method uses different optical detection instruments to perform different optical detections on the OLED panel, and must be detected at different detection stations, resulting in an increase in the time required for detection.

緣此,本案創作人認為實有必要開發出一種OLED檢測機台及其光學檢測裝置,使其可因應OLED面板的檢測需求,而選擇性地進行各種光學檢測。Therefore, the creators of this case believe that it is necessary to develop an OLED detection machine and its optical detection device, so that it can selectively perform various optical detections in response to the detection requirements of the OLED panel.

綜觀以上所述,在現有的技術中,OLED面板的檢測需以不同的光學檢測儀器個別地進行光學檢測,且OLED面板在不同的檢測站進行檢測,其檢測所耗費的時間較長且不便。In view of the above, in the prior art, the detection of the OLED panel needs to be optically detected by different optical detecting instruments, and the OLED panel is detected at different detecting stations, and the detection takes a long time and is inconvenient.

緣此,本創作之主要目的在於提供一種OLED檢測機台及其光學檢測裝置,其係光學檢測裝置對OLED面板進行各種光學檢測。Therefore, the main purpose of the present invention is to provide an OLED detecting machine and an optical detecting device thereof, which are optical detecting devices for performing various optical inspections on the OLED panel.

本創作為解決習知技術之問題所採用之技術手段係提供一種OLED(Organic Light Emitting Diode,OLED)檢測機台,其係用以檢測一OLED面板,而此OLED檢測機台包含一機台本體、一探針座以及一光學檢測裝置。The technical means for solving the problem of the prior art is to provide an OLED (Organic Light Emitting Diode, OLED) detecting machine for detecting an OLED panel, and the OLED detecting machine includes a machine body , a probe holder and an optical detecting device.

機台本體包含一檢測平台、一第一導軌對組、一第二導軌對組、一第一龍門架以及一第二龍門架。檢測平台係用以承載OLED面板;第一導軌對組係設置於檢測平台上方;第二導軌對組係設置於檢測平台上方,且位於第一導軌對組外側;第一龍門架係沿一第一軸向可移動地設置於第一導軌對組上;第二龍門架係沿第一軸向 可移動地設置於第二導軌對組上。探針座係沿一垂直於第一軸向之第二軸向可移動地設置於第一龍門架上,並用以點亮OLED面板。光學檢測裝置係用以檢測OLED面板,且光學檢測裝置包含一裝置本體、一多倍率鏡頭組、一白光光源、一UV光源、一光纖光源以及一影像擷取元件。裝置本體係沿第二軸向可移動地設置於第二龍門架上;多倍率鏡頭組係設置於裝置本體,用以對焦於OLED面板;白光光源係設置於裝置本體,以提供一第一光束沿一第一光學路徑傳送至多倍率鏡頭組,使第一光束經由多倍率鏡頭組照射至OLED面板;UV光源係設置於裝置本體,以提供一第二光束沿一第二光學路徑傳送至多倍率鏡頭組,使第二光束照射至OLED面板;光纖光源係設置於裝置本體,以提供一第三光束沿一第三光學路徑傳送至多倍率鏡頭組,使第三光束照射至OLED面板;影像擷取元件係設置於裝置本體,以經由一第四光學路徑接收自OLED面板反射之第一光束、第二光束以及第三光束其中之一。其中,藉由檢測平台與光學檢測裝置之間相對移動,使多倍率鏡頭組對焦於OLED面板,進而對OLED面板進行光學檢測。The machine body includes a detecting platform, a first pair of rails, a pair of second rails, a first gantry and a second gantry. The detecting platform is configured to carry the OLED panel; the first rail pair is disposed above the detecting platform; the second rail pair is disposed above the detecting platform and located outside the first rail pair; the first gantry is along the first An axially movably disposed on the first pair of rails; the second gantry is along the first axis It is movably disposed on the second pair of rails. The probe holder is movably disposed on the first gantry along a second axis perpendicular to the first axis and is used to illuminate the OLED panel. The optical detecting device is configured to detect an OLED panel, and the optical detecting device comprises a device body, a multi-magnification lens group, a white light source, a UV light source, a fiber source, and an image capturing component. The device is movably disposed on the second gantry in a second axial direction; the multi-magnification lens assembly is disposed on the device body for focusing on the OLED panel; the white light source is disposed on the device body to provide a first beam Transmitting to the multi-magnification lens group along a first optical path, the first light beam is irradiated to the OLED panel via the multi-magnification lens group; the UV light source is disposed on the device body to provide a second light beam to be transmitted along a second optical path to the multi-magnification lens The second light beam is disposed on the OLED panel; the optical fiber light source is disposed on the device body to provide a third light beam to be transmitted along a third optical path to the multi-magnification lens group, so that the third light beam is irradiated to the OLED panel; the image capturing component The device is disposed on the device body to receive one of the first beam, the second beam, and the third beam reflected from the OLED panel via a fourth optical path. The multi-magnification lens group is focused on the OLED panel by optically detecting the relative movement between the detection platform and the optical detecting device, thereby performing optical detection on the OLED panel.

在本創作之一較佳實施例中,光學檢測裝置更包含一升降機構,其係設置於裝置本體與第二龍門架之間,藉以使裝置本體可升降地設置於第二龍門架上。In a preferred embodiment of the present invention, the optical detecting device further includes a lifting mechanism disposed between the device body and the second gantry, so that the device body is vertically disposed on the second gantry.

在本創作之一較佳實施例中,裝置本體內更設有複數個分光鏡。In a preferred embodiment of the present invention, the device body is further provided with a plurality of beamsplitters.

在本創作之一較佳實施例中,光纖光源係以一光纖 外接連結至一輝度計,以接受輝度計所產生之第三光束,藉以使光纖光源提供第三光束。In a preferred embodiment of the present invention, the fiber optic source is an optical fiber The external light is connected to a luminance meter to receive the third light beam generated by the luminance meter, so that the optical fiber light source provides the third light beam.

在本創作之一較佳實施例中,UV光源係以一光纖外接連結至一光譜儀,以將自OLED面板反射之第一光束、第二光束以及第三光束其中之一經由第二光學路徑傳送至光譜儀。In a preferred embodiment of the present invention, the UV light source is externally coupled to a spectrometer with an optical fiber to transmit one of the first beam, the second beam, and the third beam reflected from the OLED panel via the second optical path. To the spectrometer.

本創作為解決習知技術之問題更提供一種光學檢測裝置,其係用以檢測一OLED面板,光學檢測裝置包含一裝置本體、一多倍率鏡頭組、一白光光源、一UV光源、一光纖光源以及一影像擷取元件。多倍率鏡頭組係設置於裝置本體,用以對焦於OLED面板;白光光源係設置於裝置本體,以提供一第一光束沿一第一光學路徑傳送至多倍率鏡頭組,使第一光束經由多倍率鏡頭組照射至OLED面板;UV光源係設置於裝置本體,以提供一第二光束沿一第二光學路徑傳送至多倍率鏡頭組,使第二光束照射至OLED面板;光纖光源係設置於裝置本體,以提供一第三光束沿一第三光學路徑傳送至多倍率鏡頭組,使第三光束照射至OLED面板;影像擷取元件係設置於裝置本體,以經由一第四光學路徑接收自OLED面板反射之第一光束、第二光束以及第三光束其中之一。In order to solve the problem of the prior art, the present invention further provides an optical detecting device for detecting an OLED panel. The optical detecting device comprises a device body, a multi-magnification lens group, a white light source, a UV light source, and a fiber light source. And an image capture component. The multi-magnification lens assembly is disposed on the device body for focusing on the OLED panel; the white light source is disposed on the device body to provide a first light beam to be transmitted along a first optical path to the multi-magnification lens group, so that the first light beam passes through the multiple magnification. The lens group is irradiated to the OLED panel; the UV light source is disposed on the device body to provide a second light beam to be transmitted to the multi-magnification lens group along a second optical path, and the second light beam is irradiated to the OLED panel; the fiber light source is disposed on the device body. Providing a third light beam to be transmitted along a third optical path to the multi-magnification lens group to illuminate the third light beam to the OLED panel; the image capturing component is disposed on the device body to receive the reflection from the OLED panel via a fourth optical path One of the first beam, the second beam, and the third beam.

在本創作之一較佳實施例中,光學檢測裝置更包含一升降機構,其係設置於裝置本體,用以升降裝置本體。In a preferred embodiment of the present invention, the optical detecting device further includes a lifting mechanism disposed on the device body for lifting the device body.

在本創作之一較佳實施例中,裝置本體內更設有複數個分光鏡。In a preferred embodiment of the present invention, the device body is further provided with a plurality of beamsplitters.

在本創作之一較佳實施例中,光纖光源係以一光纖外接連結至一輝度計,以接受輝度計所產生之第三光束,藉以使光纖光源提供第三光束。In a preferred embodiment of the present invention, the optical fiber source is externally coupled to a luminance meter by an optical fiber to receive the third light beam generated by the luminance meter, thereby providing the third optical beam to the optical fiber source.

在本創作之一較佳實施例中,UV光源係以一光纖外接連結至一光譜儀,以將自OLED面板反射之第一光束、第二光束以及第三光束其中之一經由第二光學路徑傳送至光譜儀。In a preferred embodiment of the present invention, the UV light source is externally coupled to a spectrometer with an optical fiber to transmit one of the first beam, the second beam, and the third beam reflected from the OLED panel via the second optical path. To the spectrometer.

從以上述可知,相較於習知技術所述之OLED面板的檢測方式,由於本創作所提供之OLED檢測機台及其光學檢測裝置可以利用不同的檢測光源對OLED面板進行檢測,而不必如習知技術般需到不同的工作站個別進行檢測,不但省時且更為方便。As can be seen from the above, compared with the detection method of the OLED panel described in the prior art, the OLED detection machine and the optical detecting device provided by the present invention can detect the OLED panel by using different detection light sources, without Conventional technology requires separate inspections on different workstations, which saves time and is more convenient.

本創作所採用的具體實施例,將藉由以下之實施例及圖式作進一步之說明。The specific embodiments used in the present application will be further illustrated by the following examples and drawings.

由於本創作所提供之OLED檢測機台及其光學檢測裝置,可對OLED面板進行各種光學檢測,其實施方式更是不勝枚舉,故在此不再一一贅述,僅列舉其中較佳之實施例來加以具體說明。Since the OLED detection machine and the optical detecting device provided by the present invention can perform various optical detections on the OLED panel, the implementation manner thereof is also numerous, and therefore will not be further described herein, only the preferred embodiments are listed. To be specific.

請參閱第一圖,第一圖係顯示本創作所提供之OLED檢測機台之立體外觀示意圖。如圖所示,一種 OLED檢測機台100包含一機台本體1、一探針座2以及一光學檢測裝置3。Please refer to the first figure. The first figure shows the stereoscopic appearance of the OLED inspection machine provided by this creation. As shown, one The OLED inspection machine 100 includes a machine body 1, a probe holder 2, and an optical detecting device 3.

機台本體1包含一檢測平台11、一第一導軌對組12、一第二導軌對組13、一第一龍門架14以及一第二龍門架15。檢測平台11係用以承載一OLED面板200;第一導軌對組12係設置於檢測平台11上方;第二導軌對組13係設置於檢測平台11上方,且位於第一導軌對組12外側,且第二導軌對組13平行於第一導軌對組12;第一龍門架14係沿一第一軸向L1可移動地設置於第一導軌對組12上;第二龍門架15係沿第一軸向L1可移動地設置於第二導軌對組13上。其中,第二龍門架15係高於第一龍門架14,藉以在第一龍門架14與第二龍門架15分別於第一導軌對組12與第二導軌對組13上移動時,不會互相碰撞。其中,第一導軌對組12、第二導軌對組13、第一龍門架14以及一第二龍門架15在實際運用上,主要是利用線性馬達驅動,尤其是指一種無鐵心式的線性馬達。The machine body 1 includes a detecting platform 11, a first pair of rails 12, a second pair of rails 13, a first gantry 14 and a second gantry 15. The detecting platform 11 is configured to carry an OLED panel 200; the first pair of rails 12 is disposed above the detecting platform 11; the second pair of rails 13 is disposed above the detecting platform 11 and located outside the first pair of rails 12 And the second pair of rails 13 is parallel to the first pair of rails 12; the first gantry 14 is movably disposed on the first pair of rails 12 along a first axis L1; the second gantry 15 is along the first An axial direction L1 is movably disposed on the second pair of rail pairs 13. Wherein, the second gantry 15 is higher than the first gantry 14 , so that when the first gantry 14 and the second gantry 15 move on the first pair of rails 12 and the second pair of rails 13 respectively, Collide with each other. The first rail pair group 12, the second rail pair group 13, the first gantry 14 and the second gantry 15 are mainly driven by a linear motor, in particular, a coreless linear motor. .

探針座2係沿一第二軸向L2可移動地設置於第一龍門架14上,用以點亮OLED面板200。其中,第二軸向L2係垂直於第一軸向L1,因此探針座2可進行二維運動,以點亮檢測平台11上之OLED面板200。The probe base 2 is movably disposed on the first gantry 14 along a second axial direction L2 for illuminating the OLED panel 200. Wherein, the second axial direction L2 is perpendicular to the first axial direction L1, so the probe holder 2 can perform two-dimensional movement to illuminate the OLED panel 200 on the detection platform 11.

請一併參閱第一圖至第三圖,第二圖係顯示本創作所提供之光學檢測裝置之立體外觀示意圖;第三圖係顯示本創作所提供之光學檢測裝置之剖面示意圖。如圖所示,光學檢測裝置3係用以檢測OLED面板200,而光 學檢測裝置3包含一裝置本體31、一升降機構32、一多倍率鏡頭組33、一白光光源34、一UV光源35、一光纖光源36以及一影像擷取元件37。Please refer to the first to third figures together. The second figure shows the stereoscopic appearance of the optical detecting device provided by the present invention. The third figure shows a schematic cross-sectional view of the optical detecting device provided by the present invention. As shown, the optical detecting device 3 is used to detect the OLED panel 200, and the light The learning device 3 includes a device body 31, a lifting mechanism 32, a multi-magnification lens group 33, a white light source 34, a UV light source 35, a fiber source 36, and an image capturing member 37.

裝置本體31係沿第二軸向L2可移動地設置於第二龍門架15上,且裝置本體31內更設有4個分光鏡311、312、313、314。The device body 31 is movably disposed on the second gantry 15 along the second axial direction L2, and the device body 31 is further provided with four beam splitters 311, 312, 313, and 314.

升降機構32係設置於裝置本體31與第二龍門架15之間,藉以使裝置本體31可升降地設置於第二龍門架15上。The lifting mechanism 32 is disposed between the apparatus body 31 and the second gantry 15 , so that the apparatus body 31 can be lifted and disposed on the second gantry 15 .

多倍率鏡頭組33係設置於裝置本體31,用以對焦於OLED面板200,在本實施例中,多倍率鏡頭組33具有2倍、10倍、20倍以及50倍等4種倍率。The multi-magnification lens group 33 is disposed on the device body 31 for focusing on the OLED panel 200. In the embodiment, the multi-magnification lens group 33 has four magnifications of 2, 10, 20, and 50 times.

白光光源34係設置於裝置本體31,以提供一第一光束沿一第一光學路徑傳送至多倍率鏡頭組33,使第一光束經由多倍率鏡頭組33照射至OLED面板200;其中,白光光源34係為一白光LED,而第一光束則為一白光光束,且第一光學路徑係指第一光束依序經由分光鏡311、312、313與314傳送至多倍率鏡頭組33之路徑。The white light source 34 is disposed on the device body 31 to provide a first light beam to the multi-magnification lens group 33 along a first optical path, so that the first light beam is irradiated to the OLED panel 200 via the multi-magnification lens group 33; wherein the white light source 34 The first light beam is a white light beam, and the first optical path refers to the path of the first light beam sequentially transmitted to the multi-magnification lens group 33 via the beam splitters 311, 312, 313 and 314.

UV光源35係設置於裝置本體31,以提供一第二光束沿一第二光學路徑傳送至多倍率鏡頭組33,使第二光束照射至OLED面板200;其中,第二光束係為一UV光束,且第二光學路徑係指第二光束依序經由分光鏡313與分光鏡314傳送至多倍率鏡頭組33之路徑。此外,UV光源35更以一光纖外接連結至一光譜儀400,以將自OLED面板200反射之第一光束、第二光束以及 第三光束其中之一經由第二光學路徑傳送至光譜儀400。The UV light source 35 is disposed on the device body 31 to provide a second light beam to be transmitted along a second optical path to the multi-magnification lens group 33 to illuminate the second light beam to the OLED panel 200. The second light beam is a UV light beam. And the second optical path refers to a path in which the second light beam is sequentially transmitted to the multi-magnification lens group 33 via the beam splitter 313 and the beam splitter 314. In addition, the UV light source 35 is externally coupled to a spectrometer 400 by an optical fiber to reflect the first beam and the second beam from the OLED panel 200. One of the third beams is transmitted to the spectrometer 400 via the second optical path.

光纖光源36係設置於裝置本體31,以提供一第三光束沿一第三光學路徑傳送至多倍率鏡頭組33,使第三光束照射至OLED面板200;其中,第三光學路徑係指第三光束經由分光鏡314直接傳送至多倍率鏡頭組33之路徑,且光纖光源36係經由光纖連結至一輝度計300,而此輝度計300係設置於第二龍門架15上,以依據使用者的需求將特定波長之光線經由光纖傳達至光纖光源36,藉以使光纖光源36提供第三光束。The optical fiber light source 36 is disposed on the device body 31 to provide a third light beam to be transmitted along a third optical path to the multi-magnification lens group 33 to illuminate the third light beam to the OLED panel 200. The third optical path is referred to as the third light beam. The optical fiber light source 36 is directly connected to the path of the multi-magnification lens group 33 via the beam splitter 314, and the optical fiber light source 36 is connected to a luminance meter 300 via an optical fiber. The luminance meter 300 is disposed on the second gantry 15 to meet the needs of the user. Light of a particular wavelength is transmitted to the fiber source 36 via an optical fiber whereby the fiber source 36 provides a third beam.

影像擷取元件37係設置於裝置本體31,以經由一第四光學路徑接收自OLED面板200反射之第一光束、第二光束以及第三光束其中之一,而第四光學路徑則是指光從OLED面板200反射並依序經由分光鏡314、313與312傳送至影像擷取元件37之路徑。在本實施例中,影像擷取元件37例如是一電荷耦合元件(Charge Couple Device,CCD)。The image capturing component 37 is disposed on the device body 31 to receive one of the first beam, the second beam, and the third beam reflected from the OLED panel 200 via a fourth optical path, and the fourth optical path refers to the light. The path from the OLED panel 200 is reflected and sequentially transmitted to the image capturing element 37 via the beam splitters 314, 313 and 312. In the embodiment, the image capturing component 37 is, for example, a charge coupled device (CCD).

綜上所述,本創作之OLED檢測機台100是利用第一導軌對組12與第二導軌對組13分別使第一龍門架14與第二龍門架15沿第一軸向L1作相對移動,而探針座2與光學檢測裝置3分別在第一龍門架14與第二龍門架15上沿第二軸向L2作相對移動,因此可以利用探針座2點亮OLED面板200,使光學檢測裝置3移動至被點亮的OLED面板200,且由於光學檢測裝置3之裝置本體31可利用升降結構32進行升降,使多倍率鏡頭組33 可自動對焦於OLED面板200,進而對OLED面板200進行光學檢測。In summary, the OLED inspection machine 100 of the present invention uses the first pair of rails 12 and the second pair of rails 13 to move the first gantry 14 and the second gantry 15 relative to each other along the first axis L1. The probe holder 2 and the optical detecting device 3 are respectively moved relative to each other on the first gantry 14 and the second gantry 15 along the second axial direction L2, so that the OLED panel 200 can be illuminated by the probe holder 2 to make the optical The detecting device 3 moves to the illuminated OLED panel 200, and since the device body 31 of the optical detecting device 3 can be lifted and lowered by the lifting structure 32, the multi-magnification lens group 33 is caused. The OLED panel 200 can be automatically focused to optically detect the OLED panel 200.

在進行光學檢測時,由於本創作之光學檢測裝置具有白光光源34、UV光源35以及光纖光源36,因此可以依據使用者的需求來進行各種光學測試。其中,利用白光光源34所發出的第一光束依序經由分光鏡311、312、313、314與多倍率鏡頭組33照射至OLED面板200後,第一光束自OLED面板200反射至多倍率鏡頭組33,並依序經由分光鏡314、313與312傳送至影像擷取元件37,以檢測OLED面板200之外觀;以及,利用UV光源35所發出之第二光束依序經由分光鏡313、314與多倍率鏡頭組33照射至OLED面板200後,第二光束自OLED面板200反射至多倍率鏡頭組33,並依序經由分光鏡314、313、312傳送至影像擷取元件37,以利用UV光檢測OLED面板200的光學特性;此外,利用光纖光源36所發出之第三光束經分光鏡314與多倍率鏡頭組33照射至OLED面板200後,第三光束自OLED面板200反射至多倍率鏡頭組33,並依序經由分光鏡314、313與312傳送至影像擷取元件37,而由於第三光束是由光譜儀300所產生具特定波長之光束,因此可以檢測出OLED面板200之厚度。In the optical detection, since the optical detecting device of the present invention has the white light source 34, the UV light source 35, and the fiber light source 36, various optical tests can be performed according to the needs of the user. After the first light beam emitted by the white light source 34 is sequentially irradiated to the OLED panel 200 via the beam splitters 311, 312, 313, and 314 and the multi-magnification lens group 33, the first light beam is reflected from the OLED panel 200 to the multi-magnification lens group 33. And sequentially transmitted to the image capturing component 37 via the beam splitters 314, 313 and 312 to detect the appearance of the OLED panel 200; and the second light beam emitted by the UV light source 35 is sequentially passed through the beam splitters 313, 314 and After the magnification lens group 33 is irradiated to the OLED panel 200, the second light beam is reflected from the OLED panel 200 to the multi-magnification lens group 33, and sequentially transmitted to the image capturing component 37 via the beam splitters 314, 313, 312 to detect the OLED by using UV light. In addition, after the third light beam emitted from the optical fiber source 36 is irradiated to the OLED panel 200 through the beam splitter 314 and the multi-magnification lens group 33, the third light beam is reflected from the OLED panel 200 to the multi-magnification lens group 33, and The image pickup element 37 is sequentially transmitted via the beam splitters 314, 313, and 312, and since the third light beam is a light beam of a specific wavelength generated by the spectrometer 300, the thickness of the OLED panel 200 can be detected.

相信舉凡在所屬技術領域中具有通常知識者在閱讀以上所揭露之技術後,應更可輕易理解,藉由本創作所提供之OLED檢測機台及其光學檢測裝置,可以對OLED面板進行各種光學檢測,相較於現有的OLED檢 測技術,本創作具有方便且省時的優點。It is believed that those having ordinary knowledge in the technical field should be able to understand more easily after reading the above-disclosed technology. With the OLED detection machine provided by the present invention and its optical detecting device, various optical detections can be performed on the OLED panel. Compared to existing OLED inspections Measurement technology, this creation has the advantages of convenience and time saving.

藉由上述之本創作實施例可知,本創作確具產業上之利用價值。惟以上之實施例說明,僅為本創作之較佳實施例說明,舉凡所屬技術領域中具有通常知識者當可依據本創作之上述實施例說明而作其它種種之改良及變化。然而這些依據本創作實施例所作的種種改良及變化,當仍屬於本創作之創作精神及界定之專利範圍內。It can be seen from the above-mentioned embodiments of the present invention that the creation has an industrial use value. However, the above embodiments are merely illustrative of the preferred embodiments of the present invention, and those skilled in the art can make various other modifications and changes as described in the above embodiments of the present invention. However, all of the improvements and variations made in accordance with the present embodiment are still within the scope of the creative spirit and definition of the present invention.

100‧‧‧OLED檢測機台100‧‧‧OLED testing machine

200‧‧‧OLED面板200‧‧‧OLED panel

300‧‧‧輝度計300‧‧‧luminometer

400‧‧‧光譜儀400‧‧‧ Spectrometer

1‧‧‧機台本體1‧‧‧ machine body

11‧‧‧檢測平台11‧‧‧Testing platform

12‧‧‧第一導軌對組12‧‧‧First rail pair group

13‧‧‧第二導軌對組13‧‧‧Second rail pair

14‧‧‧第一龍門架14‧‧‧First gantry

15‧‧‧第二龍門架15‧‧‧Second gantry

2‧‧‧探針座2‧‧‧ probe holder

3‧‧‧光學檢測裝置3‧‧‧Optical inspection device

31‧‧‧裝置本體31‧‧‧ device body

311、312、313、314‧‧‧分光鏡311, 312, 313, 314‧‧ ‧ beamsplitters

32‧‧‧升降機構32‧‧‧ Lifting mechanism

33‧‧‧多倍率鏡頭組33‧‧‧Multi-magnification lens group

34‧‧‧白光光源34‧‧‧White light source

35‧‧‧UV光源35‧‧‧UV light source

36‧‧‧光纖光源36‧‧‧Fiber optic light source

37‧‧‧影像擷取元件37‧‧‧Image capture component

L1‧‧‧第一軸向L1‧‧‧first axial direction

L2‧‧‧第二軸向L2‧‧‧second axial

第一圖係顯示本創作所提供之OLED檢測機台之立體外觀示意圖;第二圖係顯示本創作所提供之光學檢測裝置之立體外觀示意圖;以及第三圖係顯示本創作所提供之光學檢測裝置之剖面示意圖。The first figure shows a stereoscopic appearance of the OLED inspection machine provided by the present invention; the second figure shows the stereoscopic appearance of the optical detection device provided by the present creation; and the third figure shows the optical inspection provided by the creation. Schematic diagram of the device.

100‧‧‧OLED檢測機台100‧‧‧OLED testing machine

200‧‧‧OLED面板200‧‧‧OLED panel

300‧‧‧輝度計300‧‧‧luminometer

400‧‧‧光譜儀400‧‧‧ Spectrometer

1‧‧‧機台本體1‧‧‧ machine body

11‧‧‧檢測平台11‧‧‧Testing platform

12‧‧‧第一導軌對組12‧‧‧First rail pair group

13‧‧‧第二導軌對組13‧‧‧Second rail pair

14‧‧‧第一龍門架14‧‧‧First gantry

15‧‧‧第二龍門架15‧‧‧Second gantry

2‧‧‧探針座2‧‧‧ probe holder

3‧‧‧光學檢測裝置3‧‧‧Optical inspection device

L1‧‧‧第一軸向L1‧‧‧first axial direction

L2‧‧‧第二軸向L2‧‧‧second axial

Claims (10)

一種OLED(Organic Light Emitting Diode,OLED)檢測機台,係用以檢測一OLED面板,該OLED檢測機台包含:一機台本體,包含:一檢測平台,係用以承載該OLED面板;一第一導軌對組,係設置於該檢測平台上方;一第二導軌對組,係設置於該檢測平台上方,且位於該第一導軌對組外側;一第一龍門架,係沿一第一軸向可移動地設置於該第一導軌對組上;以及一第二龍門架,係沿該第一軸向可移動地設置於該第二導軌對組上;一探針座,係沿一垂直於該第一軸向之第二軸向可移動地設置於該第一龍門架上,並用以點亮該OLED面板;以及一光學檢測裝置,係用以檢測該OLED面板,該光學檢測裝置包含:一裝置本體,係沿該第二軸向可移動地設置於該第二龍門架上;一多倍率鏡頭組,係設置於該裝置本體,用以對焦於該OLED面板;一白光光源,係設置於該裝置本體,以提供一第一光束沿一第一光學路徑傳送至該多倍率鏡頭組,使該第一光束經由該多倍率鏡頭組照射至該OLED面 板;一UV光源,係設置於該裝置本體,以提供一第二光束沿一第二光學路徑傳送至該多倍率鏡頭組,使該第二光束照射至該OLED面板;一光纖光源,係設置於該裝置本體,以提供一第三光束沿一第三光學路徑傳送至該多倍率鏡頭組,使該第三光束照射至該OLED面板;以及一影像擷取元件,係設置於該裝置本體,以經由一第四光學路徑接收自該OLED面板反射之該第一光束、該第二光束以及該第三光束其中之一。An OLED (Organic Light Emitting Diode, OLED) detecting machine for detecting an OLED panel, the OLED detecting machine comprising: a machine body, comprising: a detecting platform for carrying the OLED panel; a pair of rails is disposed above the detecting platform; a pair of second rails is disposed above the detecting platform and located outside the pair of first rails; a first gantry is along a first axis a pair of movably disposed on the first pair of rails; and a second gantry movably disposed along the first axial direction on the pair of second rails; a probe holder along a vertical a second axial direction of the first axis is movably disposed on the first gantry and used to illuminate the OLED panel; and an optical detecting device is configured to detect the OLED panel, the optical detecting device includes a device body is movably disposed on the second gantry along the second axis; a multi-magnification lens set is disposed on the device body for focusing on the OLED panel; a white light source Provided on the device body to provide a Transmitting a light beam along a first optical path to a plurality of the magnification lens groups, so that the first beam is irradiated to the surface via the plurality of OLED magnification lens groups a UV light source is disposed on the apparatus body to provide a second light beam to be transmitted along the second optical path to the multi-magnification lens group to illuminate the second light beam to the OLED panel; The apparatus body is configured to provide a third light beam to be transmitted to the multi-magnification lens group along a third optical path to illuminate the third light beam to the OLED panel; and an image capturing component is disposed on the device body. Receiving one of the first light beam, the second light beam, and the third light beam reflected from the OLED panel via a fourth optical path. 如申請專利範圍第1項所述之OLED檢測機台,其中,該光學檢測裝置更包含一升降機構,其係設置於該裝置本體與該第二龍門架之間,藉以使該裝置本體可升降地設置於該第二龍門架上。The OLED inspection machine of claim 1, wherein the optical detection device further comprises a lifting mechanism disposed between the device body and the second gantry, so that the device body can be raised and lowered The ground is disposed on the second gantry. 如申請專利範圍第1項所述之OLED檢測機台,其中,該裝置本體內更設有複數個分光鏡。The OLED inspection machine of claim 1, wherein the device body further comprises a plurality of beamsplitters. 如申請專利範圍第1項所述之OLED檢測機台,其中,該光纖光源係以一光纖外接連結至一輝度計,以接受該輝度計所產生之該第三光束,藉以使該光纖光源提供該第三光束。The OLED inspection machine of claim 1, wherein the optical fiber source is externally coupled to a luminance meter by an optical fiber to receive the third light beam generated by the luminance meter, thereby providing the optical fiber source. The third beam. 如申請專利範圍第1項所述之OLED檢測機台,其中, 該UV光源係以一光纖外接連結至一光譜儀,以將自該OLED面板反射之該第一光束、該第二光束以及該第三光束其中之一經由該第二光學路徑傳送至該光譜儀。For example, the OLED inspection machine described in claim 1 of the patent scope, wherein The UV light source is externally coupled to a spectrometer with an optical fiber to transmit one of the first beam, the second beam, and the third beam reflected from the OLED panel to the spectrometer via the second optical path. 一種光學檢測裝置,其係用以檢測一OLED面板,該光學檢測裝置包含:一裝置本體;一多倍率鏡頭組,係設置於該裝置本體,用以對焦於該OLED面板;一白光光源,係設置於該裝置本體,以提供一第一光束沿一第一光學路徑傳送至該多倍率鏡頭組,使該第一光束經由該多倍率鏡頭組照射至該OLED面板;一UV光源,係設置於該裝置本體,以提供一第二光束沿一第二光學路徑傳送至該多倍率鏡頭組,使該第二光束照射至該OLED面板;一光纖光源,係設置於該裝置本體,以提供一第三光束沿一第三光學路徑傳送至該多倍率鏡頭組,使該第三光束照射至該OLED面板;以及一影像擷取元件,係設置於該裝置本體,以經由一第四光學路徑接收自該OLED面板反射之該第一光束、該第二光束以及該第三光束其中之一。An optical detecting device for detecting an OLED panel, the optical detecting device comprising: a device body; a multi-magnification lens group disposed on the device body for focusing on the OLED panel; a white light source Provided on the apparatus body to provide a first light beam to be transmitted to the multi-magnification lens group along a first optical path, so that the first light beam is irradiated to the OLED panel via the multi-magnification lens group; a UV light source is disposed on the The apparatus body is configured to provide a second light beam to the multi-magnification lens group along a second optical path to illuminate the second light beam to the OLED panel; a fiber light source is disposed on the device body to provide a second The three light beams are transmitted to the multi-magnification lens group along a third optical path to illuminate the third light beam to the OLED panel; and an image capturing component is disposed on the device body to be received via a fourth optical path The OLED panel reflects one of the first beam, the second beam, and the third beam. 如申請專利範圍第6項所述之光學檢測裝置,其中,該光學檢測裝置更包含一升降機構,其係設置於該裝置本體,用以升降該裝置本體。The optical detecting device of claim 6, wherein the optical detecting device further comprises a lifting mechanism disposed on the device body for lifting the device body. 如申請專利範圍第6項所述之光學檢測裝置,其中,該裝置本體內更設有複數個分光鏡。The optical detecting device of claim 6, wherein the device further comprises a plurality of beamsplitters. 如申請專利範圍第6項所述之光學檢測裝置,其中,該光纖光源係以一光纖外接連結至一輝度計,以接受該輝度計所產生之該第三光束,藉以使該光纖光源提供該第三光束。The optical detection device of claim 6, wherein the optical fiber source is externally coupled to a luminance meter by an optical fiber to receive the third light beam generated by the luminance meter, so that the optical fiber source provides the optical fiber source. The third beam. 如申請專利範圍第6項所述之光學檢測裝置,其中,該UV光源係以一光纖外接連結至一光譜儀,以將自該OLED面板反射之該第一光束、該第二光束以及該第三光束其中之一經由該第二光學路徑傳送至該光譜儀。The optical detecting device of claim 6, wherein the UV light source is externally coupled to a spectrometer with an optical fiber to reflect the first light beam, the second light beam, and the third light reflected from the OLED panel. One of the beams is transmitted to the spectrometer via the second optical path.
TW101223475U 2012-12-04 2012-12-04 OLED testing machine and its optical inspection apparatus TWM453842U (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104714123A (en) * 2013-12-13 2015-06-17 旺矽科技股份有限公司 Electrical property detection device
US9459279B2 (en) 2013-12-13 2016-10-04 Mpi Corporation Electrical testing machine
CN110977818A (en) * 2019-12-02 2020-04-10 苏州精濑光电有限公司 Universal jig

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104714123A (en) * 2013-12-13 2015-06-17 旺矽科技股份有限公司 Electrical property detection device
US9459279B2 (en) 2013-12-13 2016-10-04 Mpi Corporation Electrical testing machine
CN104714123B (en) * 2013-12-13 2018-03-20 旺矽科技股份有限公司 Electrical property detection device
CN110977818A (en) * 2019-12-02 2020-04-10 苏州精濑光电有限公司 Universal jig

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