KR20170049266A - Vision inspection apparatus and vision inspection method - Google Patents

Vision inspection apparatus and vision inspection method Download PDF

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Publication number
KR20170049266A
KR20170049266A KR1020150150443A KR20150150443A KR20170049266A KR 20170049266 A KR20170049266 A KR 20170049266A KR 1020150150443 A KR1020150150443 A KR 1020150150443A KR 20150150443 A KR20150150443 A KR 20150150443A KR 20170049266 A KR20170049266 A KR 20170049266A
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KR
South Korea
Prior art keywords
sample
light
incident
image
vision inspection
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Application number
KR1020150150443A
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Korean (ko)
Inventor
김묵현
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주식회사 화인스텍
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Priority to KR1020150150443A priority Critical patent/KR20170049266A/en
Publication of KR20170049266A publication Critical patent/KR20170049266A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8845—Multiple wavelengths of illumination or detection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10004—Still image; Photographic image
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10024—Color image
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10048—Infrared image

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to vision inspection, and more particularly, to a vision inspection apparatus and a vision inspection method for performing vision inspection of a sample on which light is incident by causing light to be incident on a surface of a sample.
The present invention relates to a vision inspection apparatus for acquiring two or more images according to incident angles and wavelengths of a sample incident by light having different incident angles and wavelengths and analyzing two or more images obtained thereby to perform inspection of a sample At least two light sources for irradiating the surface of the sample with light of different incident angles and wavelengths; And two or more image acquiring units for acquiring an image of a sample incident by light of a wavelength corresponding to each of at least two or more light sources of the two or more light sources.

Description

[0001] VISION INSPECTION APPARATUS AND VISION INSPECTION METHOD [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to vision inspection, and more particularly, to a vision inspection apparatus and a vision inspection method for performing vision inspection of a sample on which light is incident by causing light to be incident on a surface of a sample.

Vision inspection refers to performing a vision inspection of a sample incident on a light by incident light on the surface of the sample.

Here, the object to be subjected to the vision inspection may be all objects requiring vision inspection for a fine pattern formed on a substrate, such as a semiconductor device, an LCD panel, an organic light emitting display panel, or a solar cell device.

On the other hand, in the samples to be subjected to the vision inspection, the formed patterns are miniaturized to several nanometers.

Therefore, it is necessary to refine the level of vision inspection for the sample in which such a fine pattern is formed.

However, in the conventional vision inspection apparatus, since the wavelength of the light incident on the sample is composed of only a single wavelength or white light, and the camera for image acquisition of the sample is also constituted by only one, there is a limit to increase the resolution for vision inspection.

Particularly, since the cameras used in the conventional vision inspection apparatus are configured to be able to recognize R, G, and B, there is a limit in the degree of integration of the image pickup devices, thereby increasing the resolution for vision inspection.

Furthermore, the wavelength and the incident angle of light incident on the sample vary depending on the pattern type formed on the sample. To do this, it is necessary to repeat the vision inspection with different wavelengths and incident angles of light.

Furthermore, it is difficult to detect defects such as crack formation, scratch formation, pattern defect, etc., depending on the wavelength and incident angle of light incident on the sample, and even though it is normal due to foreign substances such as dust remaining on the surface of the sample, ), Scratch formation, pattern defects, and the like.

Specifically, cracks or scratches formed on the surface of the sample are easily detected when the incident angle to the surface of the sample is less than 90 ° and the light is incident at a lower angle.

Conversely, in the case of a pattern formed on a sample, since a clear image is preferable, it is preferable that light is irradiated as close as possible to an incident angle of 90 DEG with respect to the surface of the sample.

On the other hand, the pattern formed on the sample is preferably white light having various colors according to the physical properties thereof, but it is required to provide imaging elements by combination of R, G, and B for color image acquisition, There is a problem.

In addition, when vision inspection is performed by irradiating a single wavelength, that is, monochromatic light, on the surface of the sample, image acquisition and analysis must be repeated according to the number of monochromatic lights to be irradiated.

In order to solve the above problems, the present invention provides a vision inspection apparatus and a vision inspection apparatus capable of high-speed and high-resolution vision inspection by irradiating light of different wavelengths and incident angles to a sample and obtaining a plurality of images corresponding to respective wavelengths and incident angles, And to provide an inspection method.

The present invention has been made to achieve the above-mentioned object of the present invention, and it is an object of the present invention to acquire and acquire two or more images according to the incident angle and wavelength for a sample incident by light having different incident angles and wavelengths And two or more light sources for irradiating the surface of the sample with light of different incident angles and wavelengths; And two or more image acquiring units for acquiring an image of a sample incident by light of a wavelength corresponding to each of at least two or more light sources of the two or more light sources.

The vision inspection apparatus includes a light path dividing section that divides the light path into a path corresponding to the number of the two or more image obtaining sections so that the two or more image obtaining sections can acquire images on the same optical axis with respect to the surface of the sample, . ≪ / RTI >

The two or more image obtaining units may include an image pickup unit formed of a plurality of CCD elements or CMOS elements, and an optical filter unit provided between the sample and the image pickup unit to transmit only light of a corresponding wavelength.

In the two or more image acquiring units, a line scanner or a camera for acquiring an image for a certain area may be used.

The incident angle of the two or more light source portions may be any one of 30 °, 60 °, and 90 ° with respect to the surface of the sample.

The two or more light sources may emit light having a color of any one of R, G, B, and infrared rays.

The vision inspection apparatus according to the present invention can examine patterns formed on a sample, whether a crack is formed, and whether a scratch is formed.

The vision inspection apparatus according to the present invention is a vision inspection apparatus for acquiring two or more images based on incident angles and wavelengths of a sample incident by light having different incident angles and wavelengths through the two or more image acquisition units, And an image analyzer for analyzing the sample and performing an inspection on the sample.

According to another aspect of the present invention, there is provided a method of measuring an image, comprising the steps of: inputting two or more incident light beams having different incident angles and wavelengths on a surface of a sample; obtaining two or more images corresponding to the incident angle and wavelength, A vision inspection method for inspecting a sample by analyzing two or more images is disclosed.

The two or more images can be obtained by dividing the optical path into a path corresponding to the number of the two or more images such that the two or more images can be acquired with the same optical axis for the surface of the sample.

The incident angle of the two or more incident light beams may be any one of 30 °, 60 °, and 90 ° with respect to the surface of the sample.

The two or more light sources may emit light having a color of any one of R, G, B, and infrared rays.

The vision inspection method according to the present invention can examine patterns formed on a sample, whether a crack is formed, and whether a scratch is formed.

The vision inspection apparatus and the vision inspection method according to the present invention are advantageous in that high-speed and high-resolution vision inspection can be performed by irradiating light of different wavelengths and incident angles to a sample and acquiring a plurality of images corresponding to respective wavelengths and incident angles.

As a specific example, the vision inspection apparatus and the vision inspection method according to the present invention are characterized in that green light and blue light are incident on the sample surface at a wavelength of 30 ° and 60 °, respectively, The image obtained by the CCD camera or the CCD scanner can be acquired and the two acquired images can be analyzed.

The vision inspection apparatus and the vision inspection method according to the present invention are advantageous in that the resolution can be increased three times as much as that of a CCD camera or a CCD scanner that acquires a color image since it acquires images of green light and blue light, have.

In the vision inspection apparatus and the vision inspection method according to the present invention, the blue light is incident on the surface of the sample at 90 degrees (coaxial with the image acquiring direction) and the red light is incident at 30 or 60 degrees, It is possible to analyze two images obtained after acquiring an image with a CCD camera or a CCD scanner corresponding to each of the blue light and the red light with respect to the irradiated sample surface.

In addition, since the images formed by different incident angles are acquired through separate CCD cameras or CCD scanners, the vision inspection apparatus and the vision inspection method according to the present invention can be used to detect abnormalities, cracks, or scratches Or the like can be detected more accurately.

Particularly, the vision inspection apparatus and the vision inspection method according to the present invention irradiate light of different wavelengths and incident angles to a sample and acquire a plurality of images corresponding to respective wavelengths and incident angles. Therefore, a vision by irradiation of light of different wavelengths and incident angles The inspection can be performed at once to significantly increase the inspection speed.

As shown in FIGS. 2A and 2B, foreign matter such as dust is formed on the upper side with respect to the surface of the sample, and cracks or scratches are formed on the lower side with reference to the surface of the sample. Therefore, And a plurality of images corresponding to the respective wavelengths and incident angles are obtained, it is possible to distinguish foreign objects, cracks, or scratches by comparing a plurality of images, thereby preventing erroneous detection by foreign substances and improving the reliability of the inspection .

That is, the vision inspection apparatus and the vision inspection method according to the present invention irradiate light of different wavelengths and incident angles to a sample, acquire a plurality of images corresponding to respective wavelengths and incident angles, analyze the acquired images, There is an advantage that it is possible to prevent the occurrence of cracks or scratches due to the residual and to increase the reliability of the inspection.

1 is a conceptual diagram showing the concept of a vision inspection apparatus according to the present invention.
Figs. 2A and 2B are partial cross-sectional views showing examples of vision inspection by the vision inspection apparatus of Fig.

Hereinafter, a vision inspection apparatus and a vision inspection method according to the present invention will be described with reference to the accompanying drawings.

Vision testing apparatus according to the invention, the different angles of incidence (θ 1, θ 2, θ 3) and the angle of incidence with respect to the specimen 10 is incident, by the wavelength of light (θ 1, θ 2, θ 3) and the wavelength And the vision inspection of the sample 10 is performed by analyzing the obtained two or more images.

More specifically, as shown in FIG. 1, the vision inspection apparatus according to the present invention includes at least two (2) or more (three or more) projections for irradiating the surface of the sample 10 with light having different incident angles (? 1 ,? 2 ,? 3 ) Light sources 110, 120, and 130; Two or more images that acquire an image of a sample 10 incident by light of a wavelength corresponding to each of at least two light sources 110, 120, and 130 among two or more light sources 110, 120, and 130, And includes acquisition units 310, 320, and 330. FIG.

The light source units 110, 120, and 130 are installed at two or more different incidence angles (θ 1 , θ 2 , θ 3 ) and wavelengths of light with respect to the surface of the sample 10.

For example, the incident angles (? 1 ,? 2 ,? 3 ) of the two or more light sources 110, 120, and 130 may be any one of 30 °, 60 °, and 90 ° with respect to the surface of the sample 10 Value. ≪ / RTI >

When the incident angle θ 3 of the two or more light sources 110, 120, and 130 is 90 ° (coaxial with the image acquiring direction), the light path (C 1 ) of the image acquisition units 310, And may be interfered with image acquisition by the image acquisition units 310, 320, and 330. [

Therefore, as the incident angle (θ 3) of said at least two light sources (110, 120, 130) the 90 ° of the light source unit 130, shown in Figure 1 in order to prevent disturbance of the image obtained, the half-transmitting member ( 320 are installed on the optical path C 1 of the image acquisition units 310, 320 and 330 so that the incident angle θ of the sample 10 with respect to the sample 10 without interfering with the image acquisition of the image acquisition units 310, 3 ) can irradiate light of 90 [deg.].

The two or more light sources 110, 120, and 130 may be any one of red (R), green (G), blue (B) Light can be irradiated.

The two or more light sources 110, 120, and 130 are configured to emit light of at least two of R, G, B, and infrared so that the incident angle of light corresponding to each wavelength can be changed. And an infrared ray. [0031] In the above-described embodiments, It should be noted that the incident light irradiated by the light sources 110, 120, and 130 may be defined not only as R, G, and B but also as a wavelength.

The two or more light sources 110, 120, and 130 may have various configurations such as an LED, a halogen bulb, and the like, depending on the type of the light source.

The two or more light source units 110, 120, and 130 may be configured to form a circular, elliptical, rectangular, polygonal, or line-shaped irradiation region with respect to the sample 10.

The two or more light source units 110, 120, and 130 may be formed of a plurality of rings or a single module, or may form one module together with the image acquisition units 310, 320, have.

The image acquisition units 310, 320, and 330 may include at least two light sources 110, 120, and 130, a plurality of light sources 110, 120, and 130, Lt; RTI ID = 0.0 > 10 < / RTI >

The image acquisition units 310, 320, and 330 may be configured to acquire images of the sample 10 incident on the sample 10 due to light having different incident angles (? 1 ,? 2 ,? 3 ) Any configuration is possible as long as the configuration can be obtained.

For example, the two or more image acquiring units 310, 320, and 330 may have various configurations such as a line scanner or a camera for acquiring an image of a predetermined area.

Each of the image acquisition units 310, 320, and 330 includes an imaging unit including a plurality of CCD elements or CMOS elements, and an optical filter provided between the sample 10 and the imaging unit to transmit only light of a corresponding wavelength. Section.

The image acquisition units 310, 320, and 330 may be configured to acquire images of monochromatic light corresponding to wavelengths of light incident on the surface of the sample 10, respectively.

When the image acquisition units 310, 320, and 330 are configured to acquire an image for monochromatic light, the integration degree of the imaging device can be increased as compared with the conventional configuration for acquiring a color image, have.

On the other hand, the two or more image acquiring units 310, 320, and 330 need to acquire an image of the sample 10 at the same area and angle with respect to the surface of the sample 10 for more accurate image contrast.

The vision inspection apparatus includes at least two image acquisition units 310, 320, and 330 so that two or more image acquisition units 310, 320, and 330 can acquire images with the same optical axis C1 on the surface of the sample 10 320, and 330. The optical path dividing unit 210 divides the optical path into a path corresponding to the number of paths,

The optical path dividing unit 210 is provided on the same optical axis C1 with respect to the surface of the sample 10 and is provided with a path corresponding to the number of the two or more image obtaining units 310, Any configuration can be used as long as it can be divided.

For example, the optical path dividing section 210 may be composed of a plurality of transflective members, or may be composed of a prism.

On the other hand, the vision inspection unit, at different angles of incidence (θ 1, θ 2, θ 3) and the angle of incidence with respect to the light of the sample (10) joined by a wavelength (θ 1, θ 2, θ 3) and the wavelength The two or more light sources 110, 120, and 130 and the two or more light sources 110, 120, and 130, which are described above, can be used to acquire two or more images corresponding to the two or more images, The vision check module may be constituted by the image obtaining units 310, 320, and 330 as described above.

In addition, the vision inspection apparatus includes a vision inspection module for moving the sample 10 relative to the vision inspection module, such as a horizontal movement of the sample 10, A loading configuration for automatically loading the sample 10, an unloading configuration for automatically unloading the sample 10 after vision inspection, and the like.

It is needless to say that the apparatus for performing the vision inspection method according to the present invention may be variously constructed in addition to the vision inspection apparatus illustrated in FIG.

In addition to the configuration of the vision inspection module having the above-described configuration, the vision inspection apparatus can be applied to a sample 10 incident by light of different incident angles (? 1 ,? 2 ,? 3 ) Two or more images according to different incident angles (? 1 ,? 2 ,? 3 ) and wavelengths are acquired through two or more image acquisition units 310, 320, and 330 and two or more images obtained are analyzed to generate a sample (Not shown) for performing an inspection on the image data (e.g., 10).

The image analyzer compares two or more images acquired by the two or more image acquisition units 310, 320, and 330 with each other to determine whether there is an abnormal pattern of a pattern formed on the sample 10, Or whether a scratch is formed or not, can be variously configured as a logical configuration rather than a physical configuration.

For example, the image analyzing unit may be constituted by one or more arithmetic circuits, or at least partly integrated with a control unit for controlling the vision inspection apparatus such as control of the light source unit and control of the image acquisition unit.

Meanwhile, when light is irradiated to the surface of the sample 10 from the light source units 110, 120 and 130, or images are acquired with respect to the sample 10 by the image acquisition units 310, 320 and 330, It is needless to say that an optical system including at least one lens, a translucent member, a mirror, and the like may be provided on the path for converging, diffusing, converting paths,

The optical system may include at least one lens, a translucent member, a mirror, or the like to guide light from the light source units 110, 120, and 130 to the surface of the sample 10 with appropriate illumination, 320, and 330, and the like, and various configurations are possible depending on the installation location and purpose.

In the meantime, the present invention provides a vision inspection method, wherein two or more incident light beams having different incident angles (? 1 ,? 2 ,? 3 ) and wavelengths are incident on a surface of a sample (10) 10), two or more images corresponding to the incident angles (? 1 ,? 2 ,? 3 ) and wavelengths are acquired, and the two or more images obtained are analyzed to perform inspection on the sample (10).

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined in the appended claims. It is to be understood that both the technical idea and the technical spirit of the invention are included in the scope of the present invention.

10: Sample
110, 120, and 130:
310, 320, 330: Image acquisition unit

Claims (13)

A vision inspection apparatus for acquiring two or more images according to incident angles and wavelengths of a sample incident by light having different incident angles and wavelengths and analyzing two or more images obtained to perform inspection on the sample,
Two or more light sources for irradiating the surface of the sample with light of different incident angles and wavelengths;
And two or more image acquiring units for acquiring an image of a sample incident by light of a wavelength corresponding to each of at least two or more light sources of the two or more light sources. The method according to claim 1,
Further comprising an optical path dividing section for dividing the optical path into a path corresponding to the number of the two or more image obtaining sections so that the two or more image obtaining sections can acquire an image with the same optical axis with respect to the surface of the sample A vision inspection device characterized by. The method according to claim 1,
Wherein the two or more image obtaining units include an image pickup unit composed of a plurality of CCD elements or CMOS elements and an optical filter unit provided between the sample and the image pickup unit so as to transmit only light of a corresponding wavelength. . The method according to claim 1,
Wherein the at least two image acquiring units are cameras that acquire an image of a line scanner or a predetermined area. The method according to any one of claims 1 to 4,
Wherein the incident angle of the two or more light source portions is any one of 30 deg., 60 deg., And 90 deg. Relative to the surface of the sample. The method according to any one of claims 1 to 4,
Wherein the at least two light source units irradiate light having a color of any one of R, G, B, and infrared rays. The method according to any one of claims 1 to 4,
A pattern formed on the sample, whether or not a crack is formed, and whether or not a scratch is formed. The method according to any one of claims 1 to 4,
Two or more images according to the incident angle and wavelength are acquired through the two or more image acquiring units with respect to the sample incident by the light of different incident angles and wavelengths and the obtained two or more images are analyzed to check the sample And an image analyzing unit for analyzing the image. Two or more incident light beams having different incident angles and wavelengths are incident on the surface of the sample, and two or more images corresponding to the incident angle and the wavelength of the incident sample are incident on the two or more incident light beams, A method of vision inspection that analyzes the specimens. The method of claim 9,
Characterized in that the two or more images are obtained by dividing the optical path into a path corresponding to the number of the two or more images so that the two or more images can be obtained with the same optical axis for the surface of the sample. method of inspection. The method according to any one of claims 9 to 10,
Wherein the incidence angles of the two or more incident light beams are any one of 30 deg., 60 deg., And 90 deg. Relative to the surface of the sample. The method according to any one of claims 9 to 10,
Wherein the at least two light source units irradiate light having a color of any one of R, G, B, and infrared rays. The method according to any one of claims 9 to 10,
A pattern formed on the sample, whether or not a crack is formed, and whether or not a scratch is formed.
KR1020150150443A 2015-10-28 2015-10-28 Vision inspection apparatus and vision inspection method KR20170049266A (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190027045A (en) * 2017-09-05 2019-03-14 주식회사 에이치비테크놀러지 Surface inspection device of multilayer panel having transparent PID as an insulator between layers
KR20190027043A (en) * 2017-09-05 2019-03-14 주식회사 에이치비테크놀러지 Checking device of multi-layer panel having transparent PID as an insulator between layers
CN109840984A (en) * 2017-11-28 2019-06-04 南京造币有限公司 A kind of coin surface quality inspection system, method and apparatus
KR102011417B1 (en) 2018-06-04 2019-08-16 주식회사 옵티바이오 Triple magnification type machine vision inspection module
KR102108724B1 (en) * 2019-03-07 2020-05-08 문준호 inspection system using infrared light and visible light
KR102485850B1 (en) * 2022-08-18 2023-01-09 주식회사 제덱스 Optical foreign substances detection device using light scattering and image processing
KR102598469B1 (en) * 2022-10-14 2023-11-06 주식회사쎈비젼 Examining apparatus with multi-faceted lighting

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190027045A (en) * 2017-09-05 2019-03-14 주식회사 에이치비테크놀러지 Surface inspection device of multilayer panel having transparent PID as an insulator between layers
KR20190027043A (en) * 2017-09-05 2019-03-14 주식회사 에이치비테크놀러지 Checking device of multi-layer panel having transparent PID as an insulator between layers
CN109840984A (en) * 2017-11-28 2019-06-04 南京造币有限公司 A kind of coin surface quality inspection system, method and apparatus
KR102011417B1 (en) 2018-06-04 2019-08-16 주식회사 옵티바이오 Triple magnification type machine vision inspection module
KR102108724B1 (en) * 2019-03-07 2020-05-08 문준호 inspection system using infrared light and visible light
KR102485850B1 (en) * 2022-08-18 2023-01-09 주식회사 제덱스 Optical foreign substances detection device using light scattering and image processing
KR102598469B1 (en) * 2022-10-14 2023-11-06 주식회사쎈비젼 Examining apparatus with multi-faceted lighting

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