CN113125343A - Optical detection device and optical detection method - Google Patents
Optical detection device and optical detection method Download PDFInfo
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- CN113125343A CN113125343A CN202011047647.1A CN202011047647A CN113125343A CN 113125343 A CN113125343 A CN 113125343A CN 202011047647 A CN202011047647 A CN 202011047647A CN 113125343 A CN113125343 A CN 113125343A
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- optical inspection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention provides an optical detection device and an optical detection method, which are used for detecting an object to be detected. The object to be measured is suitable for bearing on the platform. The side light source provides parallel light to pass through and is close to at least one surface of the object to be detected. The image capturing unit faces the direction of the object to be measured so as to acquire an image of the object to be measured. The image processing unit is electrically connected with the image capturing unit to receive the image of the object to be measured so as to evaluate the surface quality of the object to be measured.
Description
Technical Field
The present disclosure relates to inspection devices and methods, and particularly to an optical inspection device and an optical inspection method.
Background
In the manufacturing process of the panel (panel), a bright spot or a broken bright spot may be generated when the panel is lighted due to a defect or a mistake in the process. Therefore, after the panel is manufactured, the optical detection equipment is used to detect the panel, and determine whether the panel has bright spots or broken bright spots, if so, the position of the bright spot or broken bright spot is further obtained to perform a repairing procedure. However, in the optical detection process, the acquired image may include images of bright spots in the panel, broken bright spots in the panel, and foreign objects attached to the panel, and if careless, the foreign objects attached to the panel may be erroneously determined as the bright spots or the broken bright spots, thereby causing an over-detection (overkill) during the detection process.
Generally, the optical inspection apparatus is provided with a side light source for projecting side light to the panel to obtain an image of the foreign matter attached to the panel. However, limited by the angle of the side light projected to the panel, it is difficult to reduce the distance between the side light source and the panel, so that the brightness of the light projected to the panel is insufficient, thereby affecting the accuracy of the detection.
Disclosure of Invention
The invention aims at an optical detection device and an optical detection method, and is beneficial to improving the detection accuracy.
According to an embodiment of the present invention, an optical inspection apparatus for inspecting an object to be inspected includes a stage, at least one side light source, an image capturing unit and an image processing unit. The object to be measured is suitable for bearing on the platform. The side light source provides parallel light to pass through and is close to at least one surface of the object to be detected. The image capturing unit faces the direction of the object to be measured so as to acquire an image of the object to be measured. The image processing unit is electrically connected with the image capturing unit to receive the image of the object to be measured so as to evaluate the surface quality of the object to be measured.
According to the embodiment of the invention, the optical detection method is suitable for the optical detection equipment to detect at least one surface of the object to be detected. The optical detection method comprises the following steps: placing an object to be detected on a platform of the optical detection equipment; providing at least one parallel light which passes through and is close to at least one surface of the object to be detected, and acquiring a detection image of the at least one surface by using an image capturing unit, wherein the at least one parallel light is parallel to the at least one surface; and evaluating the detected image of the at least one surface by the image processing unit.
Based on the above, for the object to be measured placed on the platform, the side light source provides parallel light, and the parallel light passes through and is close to at least one surface of the object to be measured, and the parallel light is parallel to the surface. Therefore, when the parallel light meets foreign matters or defects on the surface, the image capturing unit can acquire surface images at the foreign matters or the defects due to the reflected or scattered light, and then the surface images are transmitted to the image processing unit for evaluation so as to confirm the surface quality of the object to be detected.
The side light source provides parallel light, so that the side light source can be close to or even contact with the surface of the object to be detected as far as possible without being shielded by a structure, an image of a position with foreign matters or defects on the object to be detected can be more obvious, and an acquired image with better recognition degree can be provided for the image processing unit to judge. Therefore, the identification accuracy of the image processing unit can be effectively improved, and the over-detection rate and the omission rate in the detection process can be reduced accordingly.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the invention and together with the description serve to explain the principles of the invention.
FIG. 1 is a schematic side view of an optical inspection apparatus according to an embodiment of the present invention;
FIG. 2 is an electrical diagram of the components of the optical inspection apparatus of FIG. 1;
FIG. 3 is a partial top view of the optical inspection device of FIG. 1;
FIG. 4 is an enlarged partial side view of the optical inspection apparatus of FIG. 1;
FIG. 5 is a flow chart of an optical detection method;
FIG. 6 is a partial top view of an optical inspection apparatus according to another embodiment of the present invention.
Description of the reference numerals
100: an optical detection device;
110: a platform;
120A: a first side light source;
120B: a second side light source;
130: an image capturing unit;
140: an image processing unit;
150: a control unit;
160. 360: a frame;
161. 361: an opening;
170: a reflective component;
200: an object to be tested;
l1: a first parallel light;
l1 a: a first detection light;
l2 a: a second detection light;
l2: a second parallel light;
s1: an upper surface;
s2: a lower surface;
X-Y-Z: rectangular coordinates;
s110, S120, S130, S140: and (5) carrying out the following steps.
Detailed Description
Reference will now be made in detail to exemplary embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers will be used throughout the drawings and the description to refer to the same or like parts.
FIG. 1 is a schematic side view of an optical inspection apparatus according to an embodiment of the present invention. Fig. 2 is an electrical relationship diagram of components of the optical inspection apparatus of fig. 1. Orthogonal coordinates X-Y-Z are also provided herein to facilitate component description. Referring to fig. 1 and fig. 2, in the present embodiment, the optical inspection apparatus 100 is used to inspect the surface condition of the object 200. Here, the object 200 is, for example, a panel (in the embodiment, the panel is a light-permeable panel). The optical inspection apparatus 100 includes a stage 110, at least one side light source (for example, a first side light source 120A and a second side light source 120B in the embodiment), an image capturing unit 130, an image processing unit 140, and a control unit 150.
The object 200 is adapted to be carried on the stage 110. The control unit 150 is electrically connected to the first side light source 120A, the second side light source 120B, the image capturing unit 130 and the image processing unit 140 to drive the components respectively to complete the detection process. The first side light source 120A and the second side light source 120B provide parallel light to pass through and close to two surfaces of the object 200 (in the embodiment, two opposite surfaces of the object 200). The image capturing unit 130 faces the object 200 to acquire an image of the surface of the object 200. The image processing unit 140 is electrically connected to the image capturing unit 130 through the control unit 150 to receive the acquired image of the surface of the object 200 to complete the detection of the object 200 and the evaluation of the surface quality.
As mentioned above, the conventional detection device is often limited by the angle of the side light projected to the panel, and it is difficult to reduce the distance between the side light source and the panel, so that the brightness of the light projected to the panel is insufficient, thereby affecting the detection accuracy. Accordingly, the first side light source 120A and the second side light source 120B provided in the present embodiment are respectively located on the upper side of the platform 110 and on the same side of the object 200. The first side light source 120A is substantially located at one side of the object 200, and the second side light source 120B is located at the upper side of the side to avoid interference with the first side light source 120A. Here, the lateral direction corresponds to the positive X-axis direction.
Accordingly, the first side light source 120A provides the first parallel light L1 passing through the upper surface S1 of the dut 200, and the second side light source 120B provides the second parallel light L2, and the second parallel light L2 passes through the lower surface S2 of the dut 200 after being reflected by the reflection assembly 170 disposed on the stage 110. The first parallel light L1 is parallel to and contacts the upper surface S1 of the dut 200, and the second parallel light L2 is parallel to and contacts the lower surface S2 of the dut 200. In this way, the parallel lights (the first parallel light L1 and the second parallel light L2) generated by the first side light source 120A and the second side light source 120B can directly approach and contact the upper surface S1 and the lower surface S2 of the object 200 without any obstruction, so that the above problem can be effectively solved, and the image capturing unit 130 can acquire an image with better recognition rate (definition).
It should be noted that the first side light source 120A and the second side light source 120B of the present embodiment each have a light emitting unit and an optical conversion component. The light emitting unit is, for example, an LED, and the optical conversion component is, for example, a light collecting rod or a collimating mirror, and the optical conversion component is used for converting light generated by the LED into parallel light traveling toward the object 200 to be measured. The form of the light emitting unit and the optical conversion element is not limited herein, and the above forms are known in the art and are not described herein again.
Fig. 3 is a partial top view of the optical detection apparatus of fig. 1. Fig. 4 is an enlarged partial side view of the optical inspection apparatus of fig. 1. Referring to fig. 1, fig. 3 and fig. 4, in detail, since the object 200 is supported on the platform 110, in order to make the upper surface S1 and the lower surface S2 of the object 200 smoothly pass the first parallel light L1 and the second parallel light L2, the lower surface S2 of the object 200 needs to be limited to prevent the detected light from being blocked or shielded by the member except that the first side light source 120A is directly disposed on the side of the object 200 to make the first parallel light L1 directly pass and approach the upper surface S1. Accordingly, the optical inspection apparatus 100 of the present embodiment further includes a frame 160 disposed on the platform 110 and hollowed out, as shown in fig. 3 in a top view, and the frame 160 substantially carries (contacts) the periphery of the object 200 to be inspected. Meanwhile, the frame 160 has an opening 161 facing to the side direction, that is, the opening 161 faces to the positive X-axis direction substantially and faces to the first side light source 120A, and also faces to the second parallel light L2 reflected by the reflection assembly 170, so that the second parallel light L2 generated by the second side light source 120B enters the area surrounded by the frame 160, that is, the position of the lower surface S2 of the object 200 to be measured, through the opening 161 after being reflected by the reflection assembly 170.
As shown in fig. 4, after the first parallel light L1 passes through and approaches the upper surface S1 of the object 200 to be detected, if a foreign object or a defect is encountered, the first parallel light L1 can be reflected or scattered, so that the first detection light L1a is formed and projected into the image capturing unit 130 to form a first detection image. Similarly, after the second parallel light L2 passes through and approaches the lower surface S2 of the object 200, if a foreign object or a defect is encountered, the second parallel light L2 can be reflected or scattered, and passes through the panel to generate the second detection light L2a, which is projected into the image capturing unit 130 to form the second detection image. Thus, the image processing unit 140 can perform detection evaluation according to the detection image obtained by the image capturing unit 130.
Fig. 5 is a flow chart of an optical detection method. Referring to fig. 5 and referring to fig. 1, the optical inspection method is suitable for the optical inspection apparatus 100 shown in fig. 1, in step S110 of the present embodiment, an object 200 (panel) is firstly placed on the platform 110 of the optical inspection apparatus 100, then, in step S120, a first side light source 120A provides a first parallel light L1 to pass through and approach the upper surface S1 of the panel, and an image capturing unit 130 obtains an inspection image of the upper surface S1; next, in step S130, the second side light source 120B provides a second parallel light L2, which is reflected by the reflection element 170, travels through and is close to the lower surface S2 of the panel, and the image capturing unit 130 obtains a detection image of the lower surface S2. Finally, in step S140, the control unit 150 transmits the image acquired by the image capturing unit 130 to the image processing unit 140 for performing surface quality evaluation on the upper surface S1 and the lower surface S2 of the panel.
In addition, since the optical inspection apparatus 100 has the aforementioned features, the features of the components required for the first parallel light L1 and the second parallel light L2 to pass through and approach the upper surface S1 and the lower surface S2 of the dut 200 are disclosed, and thus are not described herein again.
However, the present invention does not limit the image capturing and detecting means, and the optical detecting apparatus 100 is electrically connected to the first side light source 120A and the second side light source 120B by the control unit 150, so that the user can drive the first side light source 120A and the second side light source 120B according to the detecting requirement. That is, in the optical inspection method of another embodiment, the user can switchably drive the first side light source 120A and the second side light source 120B through the control unit 150 to respectively inspect the upper surface S1 of the panel and the lower surface S2 of the panel without limiting the inspection sequence, thereby generating different inspection results such as inspection evaluation only on the upper surface S1, inspection evaluation only on the lower surface S2, and inspection evaluation on the upper surface S1 and the lower surface S2 at the same time.
FIG. 6 is a partial top view of an optical inspection apparatus according to another embodiment of the present invention. Referring to fig. 6, different from the previous embodiment, the frame 360 of the present embodiment has an opening 361, and the opening 361 faces both the first side light source 120A and the second side light source 120B, that is, in a top view as shown in fig. 6, the frame 360 is substantially L-shaped, and the first side light source 120A and the second side light source 120B are located at two adjacent sides and face the opening 361. Accordingly, the first parallel light L1 provided by the first side light source 120A and the second parallel light L2 provided by the second side light source 120B can selectively pass through and be close to the two opposite surfaces of the object 200, and one of the first parallel light L1 provided by the first side light source 120A and the second parallel light L2 provided by the second side light source 120B passes through the opening 361 of the frame 360. In other words, the first side light source 120A and the second side light source 120B of the present embodiment directly irradiate the two opposite surfaces of the object 200 with parallel light respectively without the aid of the reflection assembly 170, so as to obtain the required detection image.
In summary, in the above embodiments of the invention, the optical detection apparatus provides the parallel light by the side light source, and the parallel light passes through and is close to at least one surface of the object to be detected, and the parallel light is parallel to the surface. When the parallel light meets the foreign matter on the surface, the parallel light can generate reflection or scattering light, so that the image capturing unit obtains the image of the surface of the object to be measured, and the image processing unit judges the obtained image to confirm the surface quality of the object to be measured.
The side light source can generate parallel light, so the parallel light is not blocked or shielded by the structure and is close to or even contacts the surface of the object to be detected as much as possible, and further, the image of the position with foreign matters or defects on the object to be detected can be more obvious, so that the acquired image with better recognition degree can be provided for the image processing unit to judge. Therefore, the identification accuracy of the detection unit can be effectively improved, and the over-detection rate and the missing-detection rate in the detection process can be reduced accordingly.
In addition, in order to enable the parallel light generated by the side light source to smoothly pass through and be close to the two opposite surfaces of the object to be detected, the object to be detected is further supported on the frame, the frame is hollowed and provided with an opening, so that the parallel light provided by the other side light source is reflected by the reflecting component and then passes through the lower surface of the object to be detected after passing through the opening of the frame, the parallel light of the two side light sources respectively irradiates different surfaces of the object to be detected along different light paths, and accordingly the image capturing unit obtains detection images of the different surfaces.
In addition, the user can further drive the two side light sources according to the detection requirement, namely, the corresponding side light sources are started aiming at the surface of the object to be detected to achieve the required detection effect.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (12)
1. An optical inspection apparatus for inspecting an object, the optical inspection apparatus comprising:
the object to be tested is suitable for bearing on the platform;
at least one side light source for providing parallel light to pass through and close to at least one surface of the object to be detected;
the image capturing unit faces the direction of the object to be detected to acquire an image of the object to be detected; and
and the image processing unit is electrically connected with the image capturing unit to receive the image of the object to be measured so as to evaluate the surface quality of the object to be measured.
2. The optical inspection apparatus of claim 1 wherein the collimated light is parallel to and contacts the at least one surface.
3. The apparatus according to claim 1, wherein the at least one surface includes an upper surface and a lower surface opposite to each other, and the at least one side light source includes a first side light source and a second side light source, which respectively provide parallel light to pass through and close to the upper surface and the lower surface, so that the image capturing unit captures images of the upper surface and the lower surface of the object.
4. The optical inspection apparatus of claim 3, further comprising a reflection assembly disposed on the platform, wherein the first side light source provides parallel light to directly pass through and close to the upper surface of the object to be inspected, and the second side light source provides parallel light to pass through and close to the lower surface of the object to be inspected after being reflected by the reflection assembly.
5. The optical inspection apparatus of claim 3, further comprising a frame disposed on the platform, wherein the frame is hollowed to support the lower surface of the object, the frame has an opening, the parallel light from the second side light source enters the frame through the opening and passes through and is close to the lower surface of the object, and the opening faces the first side light source.
6. The optical inspection apparatus of claim 5, wherein the frame is L-shaped, the opening faces both the first side light source and the second side light source, and one of the parallel lights of the first side light source and the second side light source passes through the opening and approaches the lower surface of the object.
7. An optical inspection method, adapted for use in an optical inspection apparatus for inspecting at least one surface of an object, the optical inspection method comprising:
placing the object to be detected on a platform of the optical detection equipment;
providing at least one parallel light which passes through and is close to the at least one surface of the object to be detected, and acquiring a detection image of the at least one surface by using an image capturing unit, wherein the at least one parallel light is parallel to the at least one surface; and
the detected image of the at least one surface is evaluated by an image processing unit.
8. The optical inspection method of claim 7, further comprising:
providing first parallel light to pass through and approach to the upper surface of the object to be detected, and acquiring a detection image of the upper surface by the image capturing unit; and
and providing second parallel light to pass through and be close to the lower surface of the object to be detected, and acquiring a detection image of the lower surface by the image acquisition unit.
9. The optical inspection method of claim 8, wherein the optical inspection apparatus further comprises a frame, the frame is hollow and bears a periphery of the lower surface of the object to be inspected, and the second parallel light passes through the opening of the frame and approaches the lower surface.
10. The optical inspection method of claim 9, wherein the optical inspection apparatus further comprises a reflection assembly disposed on the platform, and the second parallel light passes through the opening after being reflected by the reflection assembly.
11. The optical inspection method of claim 8, wherein the optical inspection apparatus further comprises a frame, the frame is hollow and L-shaped, and bears a periphery of the lower surface of the object to be inspected, and one of the first parallel light and the second parallel light passes through the opening of the frame and passes through and is respectively close to the upper surface and the lower surface.
12. The optical inspection method of claim 7, wherein the optical inspection apparatus comprises a control unit and two side light sources, the control unit being electrically connected to the two side light sources, the optical inspection method further comprising:
the two side light sources are driven in a switchable manner through the control unit so as to detect the upper surface of the object to be detected or the lower surface of the object to be detected.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW108148608 | 2019-12-31 | ||
| TW108148608A TW202127012A (en) | 2019-12-31 | 2019-12-31 | Optical inspection apparatus and optical inspection method |
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| CN113125343A true CN113125343A (en) | 2021-07-16 |
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| CN202011047647.1A Pending CN113125343A (en) | 2019-12-31 | 2020-09-29 | Optical detection device and optical detection method |
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| CN (1) | CN113125343A (en) |
| TW (1) | TW202127012A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116106320A (en) * | 2023-02-20 | 2023-05-12 | 苏州天准科技股份有限公司 | Detection device and detection method for notebook computer shell surface |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117147586A (en) * | 2023-10-26 | 2023-12-01 | 江苏纳沛斯半导体有限公司 | COF resin region foreign matter detection method |
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| TW202127012A (en) | 2021-07-16 |
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