CN109799236A - Optical detection apparatus and optical detecting method - Google Patents
Optical detection apparatus and optical detecting method Download PDFInfo
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- CN109799236A CN109799236A CN201810000835.5A CN201810000835A CN109799236A CN 109799236 A CN109799236 A CN 109799236A CN 201810000835 A CN201810000835 A CN 201810000835A CN 109799236 A CN109799236 A CN 109799236A
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- determinand
- dust
- microscope carrier
- extraction unit
- acquisition device
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- 230000003287 optical effect Effects 0.000 title claims abstract description 51
- 238000001514 detection method Methods 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000000605 extraction Methods 0.000 claims abstract description 51
- 239000000428 dust Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention provides a kind of optical detection apparatus and optical detecting method.Optical detection apparatus includes microscope carrier, image acquiring device and dust-extraction unit.Microscope carrier is suitable for carrying determinand.Image acquiring device is suitable for obtaining the image of the determinand on microscope carrier, to detect determinand.Dust-extraction unit is connected to image acquiring device and is suitable for as the image acquiring device is relative to determinand movement, and is suitable for providing dedusting air-flow toward the determinand on microscope carrier.
Description
Technical field
The present invention relates to a kind of optical detection apparatus and optical detecting method more particularly to a kind of light with dust removing effects
Learn detection device and optical detecting method.
Background technique
With development in science and technology, people are higher and higher for the measure of precision and quality requirements of electronic component in electronic product.
For example, the quality and appearance of the various elements in electronic product on circuit board be detected as manufacture and checkout procedure in it is important
Step, the function to ensure circuit board are normal.
A kind of detection mode of electronic component is the image of electronic component to be obtained using image acquiring device, and scheme accordingly
Manufacture quality as judging electronic component.In general, operator need to first with cleaner to the surface of electronic component into
Then row dedusting recycles image acquiring device to detect the surface of electronic component, to avoid the surface of electronic component
Detection accuracy is influenced there are foreign matters such as dusts.However, after dedusting operation, if not detected immediately to electronic component
Operation, the surface of electronic component may after the dedusting operation with accumulate the foreign matters such as dust before detection operation, and still can shadow
Ring detection accuracy.
Specifically, existing operation mode is that operating personnel first uses independent dust-extraction unit (such as to can provide except dust and gas
The blowning installation of stream) comprehensive dedusting is carried out to electronic component surface, then start to carry out image detection to electronic component again.
Under such operation mode, dedusting operation is not carried out with detection operation simultaneously, but is just stopped before detection operation starts, therefore
Electronic component surface is after dedusting and is easy to accumulate the foreign matters such as dust again before detection, accumulates on the dust etc. on electronic component surface
Foreign matter can make image detection generate erroneous judgement (such as by the image of the foreign matters such as dust be mistaken for electronic component surface structural failure or
Defect) and reduce detection accuracy.Therefore, how to allow dedusting operation that can carry out simultaneously with detection operation, be that optical detection is set
The important topic in standby field.
Summary of the invention
The present invention provides a kind of optical detection apparatus and optical detecting method, can be dusted work while detecting operation
Industry.
Optical detection apparatus of the invention includes microscope carrier, image acquiring device and dust-extraction unit.Microscope carrier is suitable for carrying to be measured
Object.Image acquiring device is suitable for obtaining the image of the determinand on microscope carrier, and to detect determinand, dust-extraction unit is connected to image and obtains
It takes device and is suitable for as image acquiring device is relative to determinand movement, and be suitable for providing toward the determinand on microscope carrier and remove dust and gas
Stream.
Optical detecting method of the invention, comprising: determinand is carried by microscope carrier；Image acquiring device and dedusting dress are provided
It sets；Drive the dust-extraction unit mobile relative to the determinand with described image acquisition device；It is obtained by described image
Device obtains the image of the determinand on the microscope carrier, to detect the determinand；And it is past by the dust-extraction unit
The determinand on the microscope carrier provides dedusting air-flow.
Based on above-mentioned, in optical detection apparatus of the invention, image acquiring device and dust-extraction unit are integrated,
Keep dust-extraction unit mobile relative to determinand with image acquiring device.Whereby, dust-extraction unit can be in image acquiring device
It is dusted operation while detecting determinand, certainly to avoid the surface of determinand from influencing to detect there are foreign matters such as dusts
Accuracy.
To make the foregoing features and advantages of the present invention clearer and more comprehensible, special embodiment below, and it is detailed to cooperate attached drawing to make
Carefully it is described as follows.
Detailed description of the invention
Fig. 1 is the side view of the optical detection apparatus of the embodiment of the present invention；
Fig. 2 is the partial component side view of the optical detection apparatus of Fig. 1；
Fig. 3 is the optical detecting method flow chart of the embodiment of the present invention.
Drawing reference numeral explanation
50: determinand；
100: optical detection apparatus；
110: microscope carrier；
122: image acquiring device；
124: dust-extraction unit；
124a: opening；
126: bracket；
128: light source；
130: beam splitter；
A: optical axis；
F: dedusting air-flow；
L: light beam.
Specific embodiment
Fig. 1 is the side view of the optical detection apparatus of the embodiment of the present invention.Referring to FIG. 1, the optical detection of the present embodiment
Equipment 100 includes microscope carrier 110 and image acquiring device 122.Microscope carrier 110 is suitable for carrying determinand 50, for image acquiring device 122
It is detected.Determinand 50 is, for example, that circuit board, display panel, touch panel or other kinds of determinand, the present invention be not right
This is limited.
It further include dust-extraction unit 124 in the optical detection apparatus 100 of the present embodiment.Image acquiring device 122 is, for example, electricity
The photographic device of lotus coupling element (Charge Coupled Device, CCD) form or other appropriate forms, the present invention be not right
This is limited.Image acquiring device 122 is suitable for obtaining the image of the determinand 50 on microscope carrier 110, to detect determinand 50.It removes
Dirt device 124 is connected to image acquiring device 122 and is suitable for as image acquiring device 122 is relative to the movement of determinand 50, and
Suitable for providing dedusting air-flow F toward the determinand 50 on microscope carrier 110.
As above image acquiring device 122 and dust-extraction unit 124 are integrated, image acquiring device 122 can be made
And dust-extraction unit 124 is fixed to each other and is suitable for synchronously moving.Whereby, dust-extraction unit 124 can be detected in image acquiring device 122
It is dusted operation while determinand 50, certainly to avoid the surface of determinand 50 from influencing to detect there are foreign matters such as dusts
Accuracy.In addition, can more arrange in pairs or groups Xelminator (not shown) simultaneously or other kinds of dust-extraction unit come to determinand 50 into
Row dedusting operation, the present invention limit not to this.The Xelminator eliminates 50 table of determinand in a manner of corona discharge
The electrostatic in face is adsorbed in determinand 50 because of electrostatic to avoid dust or other foreign matters.
In the present embodiment, microscope carrier 110 and determinand 50 thereon are e.g. fixed, and image acquiring device 122
Suitable for being translated above microscope carrier 110 sequentially to detect each region of determinand 50.In other embodiments, image can also be obtained
It takes device 122 to be set as fixed, and determinand 50 is driven to translate on microscope carrier 110 relative to image acquiring device 122, with
Image acquiring device 122 is set sequentially to detect each region of determinand 50.In addition, in other embodiments, microscope carrier 110 can be gas
Floating microscope carrier, damages the back side of determinand 50 with the contact of microscope carrier 110 to avoid determinand 50.
In the present embodiment, the distance between dust-extraction unit 124 and microscope carrier 110 are less than image acquiring device 122 and microscope carrier
The distance between 110, the dedusting air-flow F for enabling dust-extraction unit 124 to provide effectively is dusted determinand 50.This implementation
The dust-extraction unit 124 of example has opening 124a and is suitable for providing the dedusting air-flow F in a manner of blowing from opening 124a.Work as figure
When as acquisition device 122 to the region of the determinand 50 being located on microscope carrier 110, the opening 124a of dust-extraction unit 124 is towards microscope carrier
The region of determinand 50 on 110 makes dedusting air-flow F reach the region that image acquiring device 122 detects.
Fig. 2 is the partial component side view of the optical detection apparatus of Fig. 1.The part knot of the bracket 126 of Fig. 1 is omitted in Fig. 2
Structure keeps light source 128 and dust-extraction unit 124 apparent.Fig. 1 and Fig. 2 is please referred to, the optical detection apparatus 100 of the present embodiment is also
Including bracket 126 and light source 128.Bracket 126 is connected to image acquiring device 122 and extends toward microscope carrier 110, and light source 128 configures
In bracket 132 end and be suitable for toward on microscope carrier 110 determinand 50 provide light beam L, be image acquiring device 122 acquisition to
Survey required light when the image of object 50.Aforementioned dust-extraction unit 124 is configured at the end of bracket 126.That is, light source 128 with
124 shared support 126 of dust-extraction unit, and the structure of optical detection apparatus 100 can be simplified.
In the present embodiment, dust-extraction unit 124 is, for example, to mention along the direction for the optical axis A for favouring image acquiring device 122
For dedusting air-flow F.In addition, the direction that dust-extraction unit 124 provides dedusting air-flow F is for example parallel to the extension of the optical axis of light source 128
Direction (i.e. the direction of light beam L).So invention is not limited thereto, and in other embodiments, dust-extraction unit 124 can be appropriate along other
Direction provides dedusting air-flow F.
Referring to FIG. 2, the settable beam splitter 130 of optical detection apparatus 100 of the present embodiment.The light that light source 128 provides
Beam L can reach image acquiring device 122 by the guiding of beam splitter 130 after being reflected by determinand 50.In other embodiments
In, the light beam L that light source 128 can be made to provide by other means reaches image acquiring device 122, and the present invention is limited not to this
System.
Explanation corresponds to the optical detecting method of the present embodiment below.Fig. 3 is the optical detecting method of the embodiment of the present invention
Flow chart.Fig. 1 and Fig. 3 is please referred to, firstly, carrying determinand 50 (step S602) by microscope carrier 110.Then, image is provided to obtain
Take device 122 and dust-extraction unit 124 (step S604).Drive dust-extraction unit 124 as image acquiring device 122 is relative to be measured
Object 50 is mobile (step S606).Image (the step of the determinand 50 on microscope carrier 110 is obtained by image acquiring device 122
S608A), to detect determinand 50.Dedusting air-flow F (step is provided toward the determinand 50 on microscope carrier 110 by dust-extraction unit 124
S608B).The step S608A and step S608B can be carried out simultaneously, to reach the effect being dusted while image obtains
Fruit.
In the optical detecting method, image acquiring device 122 and dust-extraction unit 124 can be driven synchronously to move, and
The distance between dust-extraction unit 124 and microscope carrier 110 can be made to be less than the distance between image acquiring device 122 and microscope carrier 110.This
Outside, in the optical detecting method, the light of image acquiring device 122 can be favoured from the edge opening 124a of dust-extraction unit 124
The direction of axis A provides dedusting air-flow F, and when region of the image acquiring device 122 to the determinand 50 being located on microscope carrier 110,
Opening 124a can be made towards the region of the determinand 50 on microscope carrier 110.In addition, can lead in the optical detecting method
It crosses light source 128 and provides light beam L toward the determinand 50 on microscope carrier 110, and the optical axis direction of light source 128 can be made to be parallel to dust-extraction unit
124 provide the direction of dedusting air-flow F.
In conclusion integrate image acquiring device and dust-extraction unit in optical detection apparatus of the invention,
Keep dust-extraction unit mobile relative to determinand with image acquiring device.Whereby, dust-extraction unit can be in image acquiring device
It is dusted operation while detecting determinand, certainly to avoid the surface of determinand from influencing to detect there are foreign matters such as dusts
Accuracy.
Although the present invention is disclosed as above with embodiment, however, it is not to limit the invention, any technical field
Middle technical staff, without departing from the spirit and scope of the present invention, when can make a little change and retouching, therefore protection of the invention
Range is subject to view as defined in claim.
Claims (10)
1. a kind of optical detection apparatus, comprising:
Microscope carrier is suitable for carrying determinand；
Image acquiring device, suitable for obtaining the image of the determinand on the microscope carrier, to detect the determinand；And
Dust-extraction unit is connected to described image acquisition device and is suitable for as described image acquisition device is relative to the determinand
It is mobile, and be suitable for providing dedusting air-flow toward the determinand on the microscope carrier.
2. optical detection apparatus according to claim 1, wherein described image acquisition device and the dust-extraction unit are mutual
It fixes and is suitable for synchronously moving.
Further include bracket and light source 3. optical detection apparatus according to claim 1, wherein the dust-extraction unit with it is described
The distance between microscope carrier is less than the distance between described image acquisition device and the microscope carrier, and the bracket is connected to described image
Acquisition device and extend toward the microscope carrier, the light source is configured at the end of the bracket and is suitable for toward described on the microscope carrier
Determinand provides light beam, and the dust-extraction unit is configured at the end of the bracket.
4. optical detection apparatus according to claim 3, wherein the dust-extraction unit is suitable for providing the dedusting along direction
Air-flow, the optical axis for being oriented parallel to the light source.
5. optical detection apparatus according to claim 1, wherein the dust-extraction unit has opening and is suitable for opening from described
Mouth provides the dedusting air-flow, when region of the described image acquisition device to the determinand being located on the microscope carrier, institute
Opening is stated towards the region of the determinand on the microscope carrier.
6. optical detection apparatus according to claim 1, wherein the dust-extraction unit is suitable for providing the dedusting along direction
Air-flow, the direction favour the optical axis of described image acquisition device.
7. a kind of optical detecting method, comprising:
Determinand is carried by microscope carrier；
Image acquiring device and dust-extraction unit are provided；
Drive the dust-extraction unit mobile relative to the determinand with described image acquisition device；
The image of the determinand on the microscope carrier is obtained, by described image acquisition device to detect the determinand；With
And
Dedusting air-flow is provided toward the determinand on the microscope carrier by the dust-extraction unit.
8. optical detecting method according to claim 7, comprising:
Driving described image acquisition device and the dust-extraction unit synchronously move；And
Make the distance between the dust-extraction unit and the microscope carrier be less than between described image acquisition device and the microscope carrier away from
From.
9. optical detecting method according to claim 7, comprising:
The dedusting air-flow is provided from the opening of the dust-extraction unit；And
When region of the described image acquisition device to the determinand being located on the microscope carrier, make the opening described in
The region of the determinand on microscope carrier.
10. optical detecting method according to claim 7, comprising:
The dedusting air-flow is provided along direction by the dust-extraction unit, wherein the direction favours described image acquisition device
Optical axis；
Light beam is provided toward the determinand on the microscope carrier by light source；And
The dedusting air-flow is provided along direction by the dust-extraction unit, wherein the optical axis for being oriented parallel to the light source.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW106139641A TW201923335A (en) | 2017-11-16 | 2017-11-16 | Optical inspection apparatus and optical inspection method |
| TW106139641 | 2017-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109799236A true CN109799236A (en) | 2019-05-24 |
Family
ID=66556181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810000835.5A Pending CN109799236A (en) | 2017-11-16 | 2018-01-02 | Optical detection apparatus and optical detecting method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109799236A (en) |
| TW (1) | TW201923335A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113125343A (en) * | 2019-12-31 | 2021-07-16 | 由田新技股份有限公司 | Optical detection device and optical detection method |
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|---|---|---|---|---|
| JP2002243652A (en) * | 2001-02-15 | 2002-08-28 | Matsushita Electric Ind Co Ltd | Method and apparatus for specifying dust, and method for specifying dust source |
| TWM446679U (en) * | 2012-09-25 | 2013-02-11 | Ta Liang Technology Co Ltd | Graduation blowing inspection device |
| CN203786043U (en) * | 2014-01-21 | 2014-08-20 | 奥蒂玛光学科技（深圳）有限公司 | Circuit board optical detector |
| CN204882389U (en) * | 2015-07-09 | 2015-12-16 | 汉克科技有限公司 | Optical detection device |
| CN105424717A (en) * | 2014-09-05 | 2016-03-23 | 由田新技股份有限公司 | Optical detection device for detecting multiple defects |
| CN105548194A (en) * | 2015-12-03 | 2016-05-04 | 苏州威盛视信息科技有限公司 | Surface detection method and device |
-
2017
- 2017-11-16 TW TW106139641A patent/TW201923335A/en unknown
-
2018
- 2018-01-02 CN CN201810000835.5A patent/CN109799236A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002243652A (en) * | 2001-02-15 | 2002-08-28 | Matsushita Electric Ind Co Ltd | Method and apparatus for specifying dust, and method for specifying dust source |
| TWM446679U (en) * | 2012-09-25 | 2013-02-11 | Ta Liang Technology Co Ltd | Graduation blowing inspection device |
| CN203786043U (en) * | 2014-01-21 | 2014-08-20 | 奥蒂玛光学科技（深圳）有限公司 | Circuit board optical detector |
| CN105424717A (en) * | 2014-09-05 | 2016-03-23 | 由田新技股份有限公司 | Optical detection device for detecting multiple defects |
| CN204882389U (en) * | 2015-07-09 | 2015-12-16 | 汉克科技有限公司 | Optical detection device |
| CN105548194A (en) * | 2015-12-03 | 2016-05-04 | 苏州威盛视信息科技有限公司 | Surface detection method and device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113125343A (en) * | 2019-12-31 | 2021-07-16 | 由田新技股份有限公司 | Optical detection device and optical detection method |
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| Publication number | Publication date |
|---|---|
| TW201923335A (en) | 2019-06-16 |
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Application publication date: 20190524 |
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