CN109791086B

CN109791086B - Leak inspection support device and leak inspection method using same

Info

Publication number: CN109791086B
Application number: CN201780060013.XA
Authority: CN
Inventors: 川崎康司
Original assignee: Airex Co Ltd
Current assignee: Acous Corp
Priority date: 2016-11-16
Filing date: 2017-10-03
Publication date: 2021-06-29
Anticipated expiration: 2037-10-03
Also published as: US10976212B2; US20190265122A1; KR102312575B1; CN109791086A; JP2018080998A; WO2018092441A1; JP6803607B2; KR20190083644A

Abstract

Provided are a leak inspection auxiliary device and a leak inspection method using the same, which can use a normal leak inspection device when inspecting a filter in a clean room, and which does not require a scanning robot, a large-sized device, an accompanying work, or the like, and therefore, which has a small cost burden and can perform accurate leak inspection by a small number of workers. The leakage inspection device is provided with a projection device, wherein a suction point of a suction detector attached to the leakage inspection device for performing leakage inspection is projected on the surface of the filter in the dust-free chamber in a mode of moving along the surface of the filter in the X-Y axis direction which is orthogonal to each other at a constant interval and a constant speed, and an operator scans the suction detector according to the movement of the suction point.

Description

Leak inspection support device and leak inspection method using same

Technical Field

The present invention relates to a leak inspection assisting device used together with a leak inspection device when performing leak inspection of an air cleaning filter installed in a clean environment such as a clean room. The present invention also relates to a leak inspection method using the leak inspection support device.

Background

In a work performed in a clean atmosphere, for example, a work in a manufacturing stage of a pharmaceutical or a work in a manufacturing stage of a semiconductor or an electronic component, the work is performed in a clean work environment in which the inside is kept in a dust-free and sterile state so as to prevent a contaminant from entering from the outside environment. As such a work environment, a clean room is generally used. In the clean room, an operator wearing clean clothes performs work.

Clean air is supplied from an air supply device to the interior of the clean room through a HEPA filter, an ULPA filter, or the like (hereinafter, simply referred to as "filter"). Thus, the interior of the clean room is ensured to be class A (aseptic pharmaceutical manufacturing guideline, labor and cost saving) required for pharmaceutical manufacturing or the like or to be clean in accordance therewith. In order to maintain the cleanliness, a filter installed in the clean room is periodically subjected to a leak test.

In general, leak inspection is performed by introducing an aerosol containing fine particles such as PAO (polyalphaolefin) into the upstream side of a filter and detecting the leaked fine particles (hereinafter referred to as "leak") with a leak inspection apparatus on the downstream side of the filter. The leak inspection apparatus includes a suction detector for capturing fine particles and a fine particle detector such as a particle counter for detecting the captured fine particles. In the actual leak inspection work, an operator holds the suction probe by hand and scans the filter surface in the X-Y axis direction. In conjunction with this, the particle detection and the number of detections by the particle detector are confirmed by another operator (see fig. 3). When the particle detector detects a particle, the operator who is checking the particle detector signals the operator who scans the suction detector. Then, the portion is confirmed again to specify the leakage portion of the filter.

In the direction of such leak inspection, it is difficult to maintain the scanning speed and the scanning interval of the suction probe constant, and therefore there is a high possibility that a leak is not recognized due to variation in the accuracy of the leak inspection. Further, the worker needs at least two persons or more, and a large-scale work is performed by a plurality of persons. In contrast, patent document 1 listed below proposes an automatic leak test apparatus in which a scanning robot for moving a suction probe in an X-Y axis direction at a constant speed is disposed downstream of a filter. In addition, patent document 2 below proposes a leak inspection apparatus in which the automatic leak test apparatus of patent document 1 below is improved. Further, patent documents 3 and 4 below also propose a leak inspection system and an automatic leak test system in which a scanning robot is fixed to the entire ceiling surface of a clean room in advance.

Documents of the prior art

Patent document 1: japanese laid-open patent publication No. 59-010831

Patent document 2: japanese patent laid-open No. 2001-108606

Patent document 3: japanese patent laid-open publication No. 2005-300263

Patent document 4: japanese patent laid-open No. 2014-219135

Disclosure of Invention

Problems to be solved by the invention

However, in both the automatic leak test apparatus and the leak inspection apparatus proposed in patent documents 1 and 2, the scanning speed and the scanning interval can be maintained constant. In addition, there is an advantage that it is possible to cope with this by one operator who operates the scanning robot. However, the scanning robot needs to be prepared in advance, which causes a large cost burden. In addition, it is necessary to design or adjust the filter according to the position and size of the filter in the clean room where the leak inspection is performed. In addition, in the leak inspection, it is necessary to perform an operation of disposing a scanning robot to each filter in the clean room.

In the leak inspection system and the automatic leak test system proposed in patent documents 3 and 4, since the scanning device is fixed to the entire ceiling surface in advance, it is not necessary to perform the operation of disposing the scanning robot to each filter in the clean room at the time of leak inspection. However, the above system requires a large-sized apparatus and an accompanying work in a clean room, and further increases the cost burden.

Accordingly, the present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a leak inspection support device and a leak inspection method using the same, which can perform a leak inspection accurately by a small number of workers, with a small cost burden, because a normal leak inspection device can be used when performing a leak inspection of a filter in a clean room, and a scanning robot, a large-sized device, an additional work, and the like are not required.

Means for solving the problems

The present inventors have made extensive studies to solve the above problems, and have found that the above problems can be solved by using a projection mapping technique for leak inspection, and have completed the present invention.

That is, the leak inspection assisting device (50) according to the present invention is used for performing a leak inspection of a filter in a working room provided with one or more filters (20) on a ceiling wall surface or a side wall surface to supply or discharge clean air between the working room and an external environment,

the leak check auxiliary device (50) is characterized in that,

the leakage inspection device is provided with a projection device (51), wherein the projection device (51) projects a suction point (54) of a suction detector (31) attached to the leakage inspection device (30) for performing the leakage inspection on the surface of the filter in a mode of moving along the surface of the filter in the X-Y axis direction which is mutually orthogonal at a constant interval and a constant speed.

In addition, according to a second aspect of the present invention, in addition to the leak inspection support device according to the first aspect,

leakage information (55) detected by a particle detector (32) attached to the leakage inspection device is projected onto the surface of the filter by the projection device.

A third aspect of the present invention is the leak inspection support device according to the first or second aspect,

the projection device directly or indirectly placed on the floor of the work room has a projection correction means for correcting the positional relationship between the projection device and the surface of the filter provided on the ceiling wall surface or the side wall surface (11),

under the condition that the outline (33b) of a scanning line shown by a projection image (53) projected from a projection window (51b) of the projection device to the surface of the filter is matched with the outline (23) of the filter and projected by the action of the projection correction unit,

projecting the attraction point on the surface of the filter.

A fourth aspect of the present invention is the leak inspection support device according to the first or second aspect, further including:

a filter position detection device (56) that detects the positional relationship between the projection device directly or indirectly placed on the floor surface of the work room and the surface of the filter provided on the ceiling wall surface or the side wall surface; and

an information processing device (52) for calculating the direction and distance from the projection window of the projection device to each position of the outline of the filter based on the detected positional relationship, correcting the direction and distance so that the outline of the scanning line shown in the projection image matches the outline of the filter, and projecting the corrected outline,

in a state where the contour of the scanning line indicated by the projection image is projected in accordance with the contour of the filter by the correction of the information processing device,

projecting the attraction point on the surface of the filter.

Further, as described in the first aspect, the leak inspection method of the present invention is a leak inspection method for performing a leak inspection of a filter using a leak inspection apparatus in a working room in which one or a plurality of filters are provided on a ceiling wall surface or a side wall surface, clean air is supplied or exhausted between the working room and an external environment,

the above-described leak inspection method is characterized in that,

the leak inspection apparatus includes a particle detector and a suction detector connected to the particle detector,

when the suction detector is used to scan the surface of the filter, the leak inspection assisting device according to any one of the first to fourth aspects is used,

the suction detector is thereby caused to scan so as to track a suction point projected so as to move at a constant interval and at a constant speed in mutually orthogonal X-Y axis directions along the surface of the filter.

Effects of the invention

According to the above configuration, the leak inspection assisting apparatus of the present invention includes the projecting device. The projection device projects an attraction point of the attraction probe to a surface of a filter provided on a wall surface of the work room. The attraction point projected to the surface of the filter moves along the surface of the filter at a constant interval and at a constant speed in mutually orthogonal X-Y axis directions. In this case, the worker who performs the leak inspection may simply move the suction probe in accordance with the movement of the suction point.

This makes it possible to move the suction probe along the surface of the filter at a constant interval and at a constant speed, and to accurately perform a leak check of the filter. Further, if the leak inspection support device is used, a normal leak inspection device can be used, so that a scanning robot, a large-sized device, an accompanying work, and the like are not required, and the cost burden of leak inspection becomes small.

Further, according to the above configuration, in the leak inspection assisting apparatus according to the present invention, the leakage information detected by the particle detector attached to the leak inspection apparatus may be projected on the surface of the filter by the projection apparatus. When the leakage information is projected onto the surface of the filter, the leakage information can be confirmed by the same operator while scanning the suction probe, and the leakage position can be accurately specified. This enables accurate leak inspection by a small number of workers, in addition to the above-described effects.

Thus, according to the above-described configurations, it is possible to provide a leak inspection auxiliary device that can use a normal leak inspection device in leak inspection of a filter in a clean room, does not require a scanning robot, a large-sized device, an accompanying work, and the like, and therefore has a small cost burden and can perform accurate leak inspection by a small number of workers.

Further, according to the above configuration, in the leak inspection assisting apparatus of the present invention, the projection apparatus includes the projection correction unit. The projection correction unit functions to correct a positional relationship between a position of the projection device directly or indirectly placed on the floor of the work room and the surface of the filter. The projection correction unit performs correction so that the contour of a scan line indicated by a projection image projected from a projection window of the projection device onto the surface of the filter matches the contour of the filter and is projected.

In this way, by matching the profile of the scan line shown by the projected image with the profile of the filter, the projected attraction point can be moved at constant intervals and at constant speed along the surface of the filter. Thus, even if the position of the projection device directly or indirectly placed on the floor of the work room is shifted from the position directly below the filter, accurate leak inspection can be performed. This can more specifically exhibit each of the above-described effects.

Further, according to the above configuration, the leak inspection assisting apparatus of the present invention includes the filter position detecting device and the information processing device. The filter position detection device detects a positional relationship between the projection device directly or indirectly placed on the floor surface of the work room and the surface of the filter provided on the ceiling wall surface or the side wall surface. On the other hand, the information processing device calculates the direction and distance from the projection window of the projection device to each position of the outline of the filter based on the positional relationship detected by the filter position detection device, and corrects the direction and distance so that the outline of the scan line shown in the projection image matches the outline of the filter and projects the calculated direction and distance.

By matching the profile of the scanning line shown in the projection image with the profile of the filter in this way, the projected attraction point can be moved at a constant interval and at a constant speed along the surface of the filter. Thus, the position of the projection device directly or indirectly placed on the floor of the work room can be checked for a leak accurately regardless of the position in the work room. This can more specifically exhibit each of the above-described effects.

Further, according to the above configuration, the leak inspection apparatus according to the present invention includes a particle detector and a suction detector connected to the particle detector. In addition, the leak inspection support device according to any one of the first to fourth aspects is used in the leak inspection method. Thus, a leak inspection method can be provided that can use a normal leak inspection device, does not require a scanning robot, a large-sized device, an additional work, and the like, and therefore has a small cost burden and can perform accurate leak inspection by a small number of operators.

Thus, according to the above configuration, it is possible to provide a leak inspection method that can use a normal leak inspection apparatus when inspecting a filter in a clean room, does not require a scanning robot, a large-sized apparatus, an additional work, and the like, and therefore has a small cost burden and can perform accurate leak inspection by a small number of workers.

Drawings

Fig. 1 is a schematic diagram showing a general leak inspection method.

Fig. 2 is a schematic diagram showing a direction in which a suction probe is caused to scan a filter medium surface on the exhaust side surface of the filter.

Fig. 3 is a schematic diagram showing a conventional leak inspection operation.

Fig. 4 is a schematic diagram showing a working state of leak inspection using the leak inspection support device of the present embodiment.

Fig. 5 is a schematic diagram showing a projection image projected from the leak inspection assisting apparatus of the present embodiment onto the exhaust-side surface of the filter.

Fig. 6 is a schematic diagram showing a case where the positional relationship between the projection device and the surface of the filter is corrected by the projection correction function in embodiment 1.

Fig. 7 is a schematic diagram showing a case where the positional relationship between the projection apparatus and each part of the filter is detected by the filter position detection apparatus in example 2.

Detailed Description

First, a leak inspection method is explained. In addition, the simplest and generally widely used leak inspection method based on manual operation is described here. Note that, as in patent documents 1 to 4, a special leak inspection method that requires a scanning robot, a large-sized device, an accompanying process, and the like is not mentioned here.

Fig. 1 is a schematic diagram showing a general leak inspection method. In fig. 1, a leak test is performed on a HEPA filter 20 disposed on a ceiling wall surface 11 of a clean room (not shown). In fig. 1, a HEPA filter is used, but another filter such as an ULPA filter may be used. In fig. 1, the underside of the HEPA filter 20 is the interior of the clean room. In the leak inspection, first, the suction probe 31 of the leak inspection apparatus 30 is disposed on the downstream side 12 (lower side in the drawing) of the HEPA filter 20 in a state where the air supply apparatus (not shown) is operated. The number of particles (particles leaking from the filter) sucked from the suction port opened at the upper part of the suction detector 31 is detected by a particle counter 32 which is a particle detector of the leak inspection apparatus.

Next, the aerosol 40 of fine particles for detection, for example, fine particles containing PAO (polyalphaolefin), is put into the upstream side 13 (upper side in the drawing) of the HEPA filter 20, and the leak test is started. The leak inspection is performed by scanning the suction probe 31 at a constant interval and a constant speed by an operator (not shown) in the clean room. In fig. 1, a single arrow 33 indicates an operation direction of the suction probe 31, and a double arrow 34 indicates a maintenance interval between the suction port of the suction probe 31 and the HEPA filter 20.

Here, fig. 2 is a schematic view showing a direction in which the suction probe is caused to scan the filter medium surface on the exhaust side surface of the filter. In fig. 2, the HEPA filter 20 is composed of a rectangular attachment frame 21 and a filter member 22 stretched inside the attachment frame. The number of HEPA filters 20 provided on the ceiling wall surface of the clean room or the like is designed according to the size of the clean room, but in many cases, a plurality of HEPA filters 20 are provided in parallel on the ceiling wall surface. Therefore, it is also necessary to check the airtightness (presence or absence of leakage) between the attachment frame 21 of the HEPA filter 20 and the adjacent HEPA filter or ceiling wall surface.

Therefore, as shown in fig. 2, the worker moves the suction probe 31 in the direction of the arrow on the scanning line 33a on the surface of the filter medium 22 and the scanning line 33b on the outer periphery of the mounting frame 21 (the outline of the filter), and performs the leak inspection. Further, the interval between the

adjacent operation wires

33a and 33b needs to be such that the suction detector 31 performs scanning such that the suction ports (see fig. 1) of the suction detector 31 slightly overlap.

In the leak inspection of such a filter, various standards are strictly defined. As the above-mentioned standards, there are the standard of the American society for Environmental science and Technology (IEST: Institute of Environmental Sciences and Technology) (IEST-RP-CC006.2), the standard of the International organization for standardization (ISO 29463), the Japanese Industrial Standard (JIS B9917-3), and the like. In the present invention, it is also assumed that a leak check based on these standards can be performed.

For example, in the IEST standard, the upstream-side particle counter is 0.1cft/min (cubic feet per minute) or 0.2cft/min (cubic feet per minute), and can detect fine particles having a particle diameter of 0.3 μm or more. On the other hand, the downstream particle counter is set to a suction amount of 1.0cft/min, and can detect fine particles having a particle diameter of 0.3 μm or more. The amount of particulates generated on the upstream side is set to 1,000,000 particulates/cf, which is 0.5 μm or more.

The suction probe was brought close to within 25mm (1inch) from the measurement surface (filter surface), and scanning was performed over the entire surface at a scanning speed of within 5cm/sec. (10 ft/min.). In the case where particles of 0.5 μm or more are continuously measured during the scanning, continuous measurement is performed at the position. If no fine particles of 0.5 μm or more are continuously detected, it is determined that dust is attached, and the scanning is continued. In the IEST standard, as described above, the suction probe must scan so that the suction ports of the suction probe overlap.

In the IEST standard, the criterion for the HEPA filter is set to a continuous detection site (continuous counting point) where no leak exceeding 0.01% of the number of particles on the upstream side is indicated. For example, in the case where the number of fine particles on the upstream side is 1,000,000/cf, 0.01% thereof is 100/cf. The allowable number of fine particles in this case is 100 (0.5 μm or more).

Here, the operation of the leak inspection using the leak inspection apparatus will be described. Fig. 3 is a schematic diagram showing a conventional leak inspection operation. In fig. 3, two workers W1 and W2 are present in the clean room 10, and leak inspection is being performed on the HEPA filter 20 disposed on the ceiling wall 11. Further, a curing by the plastic sheet 14 is configured on the downstream side 12 of the HEPA filter 20.

In fig. 3, in a state where the air supply device F is operated, the aerosol 40 containing fine particles of PAO (polyalphaolefin) is introduced with the upstream side 13 of the HEPA filter 20 as the primary side. On the other hand, the downstream side 12 of the HEPA filter 20 is a secondary side, and the leaked particulate matter is detected. In the leak inspection, the leak inspection device 30 is used. The leak inspection apparatus 30 is composed of two particle counters 32 and 36 that attract particles contained in the air on the primary side and the secondary side and detect the number of particles.

The primary-side particle counter 36 includes a suction port 35 opened at the primary side (upstream side 13) and a pipe 35a connecting the suction port 35 and the particle counter 36. The primary-side fine particles sucked from the suction port 35 are sent to the particle counter 36 through the pipe 35a, and the number of fine particles per unit volume is detected. The number of detected fine particles is displayed on the monitor of the particle counter 36, and the operator W2 confirms that the aerosol 40 containing the fine particles is discharged by a predetermined amount on the primary side.

The particle counter 32 on the secondary side includes a suction detector 31 that scans the secondary side (downstream side 12) and a pipe 31a that connects the suction detector 31 and the particle counter 32. The suction probe 31 is manually scanned in the X-Y axis direction along the filter surface by the operator W1. As described above, it is important to scan the suction probe 31 at a constant interval and a constant speed in accordance with the IEST standard or the like, and the accuracy of the leak inspection largely depends on the experience of the operator W1. The secondary-side particulates (particulates leaked from the filter) sucked from the suction detector 31 are sent to the particle counter 32 through the pipe 31a, and the number of particulates per unit volume is detected. The number of detected fine particles is displayed on the monitor of the particle counter 32, and the operator W2 confirms the detection of the fine particles leaking on the secondary side.

When the number of fine particles displayed on the monitor of the particle counter 32 exceeds a predetermined reference, the operator W2 who has confirmed this fact notifies the operator W1 who has scanned the suction probe 31. The notified operator W1 continuously measures the current position of the suction probe 31, determines that dust is attached if the position is not continuously detected, and continues scanning. On the other hand, if the continuous measurement is continuously performed, the current position of the suction probe 31 is determined as the leak portion. As described above, in the conventional leak inspection work, at least two workers W1 and W2 are required, and particularly, the worker W1 who scans the suction probe 31 needs a great deal of experience.

In contrast, the operation of the leak inspection using the leak inspection support device of the present embodiment together with the leak inspection device will be described. Fig. 4 is a schematic diagram showing a working state of leak inspection using the leak inspection support device of the present embodiment. In fig. 4, one worker W1 is present in the clean room 10, and performs a leak check of the HEPA filter 20 disposed on the ceiling wall 11. Further, a curing by the plastic sheet 14 is configured on the downstream side 12 of the HEPA filter 20.

In fig. 4, in a state where the air supply device F is operated, the aerosol 40 containing fine particles of PAO (polyalphaolefin) is introduced with the upstream side 13 of the HEPA filter 20 as the primary side. On the other hand, the downstream side 12 of the HEPA filter 20 is a secondary side, and the leaked particulate matter is detected. The leak inspection device 30 and the auxiliary leak inspection device 50 are used for leak inspection. The leak inspection apparatus 30 includes two particle counters 32 and 36 that attract particles contained in air on the primary side and the secondary side and detect the number of the particles.

The primary-side particle counter 36 includes a suction port 35 opened at the primary side (upstream side 13) and a pipe 35a connecting the suction port 35 and the particle counter 36. The primary-side fine particles sucked from the suction port 35 are sent to the particle counter 36 through the pipe 35a, and the number of fine particles per unit volume is detected. The number of detected microparticles is displayed on a monitor of the particle counter 36, and is transmitted as electronic information to a personal computer 52 (described later) via a connection line 52 a.

The secondary-side particle counter 32 includes a suction detector 31 that scans the secondary side (downstream side 12) and a pipe 31a that connects the suction detector 31 and the particle counter 32. As described above, the suction probe 31 is manually scanned in the X-Y axis direction along the filter surface by the worker W1 (see fig. 2). The secondary-side particulates (particulates leaking from the filter) sucked from the suction detector 31 are sent to the particle counter 32 through the pipe 31a, and the number of particulates per unit volume is detected. The number of detected microparticles is displayed on a monitor of the particle counter 32, and is transmitted as electronic information to a personal computer 52 (described later) via a connection line 52 a.

On the other hand, the leak inspection assisting apparatus 50 is composed of a projector 51 as a projection apparatus and a personal computer 52 as an information processing apparatus. The projector 51 may have an information processing device incorporated therein. In fig. 4, a projector 51 is connected to a personal computer 52 via a connection line 51 a. The projector 51 projects a projection image 53 from the projection window 51b onto the surface of the HEPA filter 20. The content projected on the surface of the HEPA filter 20 as the projection image 53 is programmed in advance and is installed in the personal computer 52.

Next, a projection image 53 projected on the surface of the HEPA filter 20 in the state of fig. 4 will be described. The relationship between the projected image 53 programmed in the personal computer 52 and the surface of the HEPA filter 20 for projection of the projected image 53 applies the basic technique of animated projection based on projection mapping. Here, projection mapping is a general term for a technique of projecting an image onto a building, an object, a space, or the like using a CG (computer graphics) generated by a personal computer and a projection device such as a projector. Projection mapping is a projection method in which a term of mapping is added instead of such a simple projection, and here, a meaning of matching an image with a projected object is given, and a meaning of accurately matching an object with an image is given.

In the present embodiment, the object of projection is the surface of the HEPA filter 20, and the projected image is the suction position of the suction detector 31 and the particulate detection information. Fig. 5 is a schematic diagram showing a projection image projected from the leak inspection assisting apparatus of the present embodiment onto the exhaust-side surface of the filter. In fig. 5, a rectangular mounting frame 21 and a filter 22 stretched on the inside thereof are provided on the exhaust side surface (inside of the clean room) of the HEPA filter 20. The outer peripheral portion 23 of the attachment frame 21 indicates a boundary with an adjacent HEPA filter or ceiling wall surface. On the surface of the filter medium 22, an attraction point 54 of an attraction detector (not shown) and fine particle detection information 55 are projected.

The attraction point 54 is projected in such a manner as to move at a constant interval and at a constant speed in accordance with the IEST standard or the like along the X-Y axis direction parallel to or orthogonal to the mounting frame 21 (see fig. 2). In fig. 5, a part of the scanning lines (33 a and 33b in fig. 2) along which the attraction point 54 moves is shown.

The particulate detection information 55 is projected on the surface of the HEPA filter 20 at a position that is easily visually recognized from the operator W1. Therefore, the projection position of the particle detection information 55 may be changed in accordance with the movement of the attraction point 54. As information indicated in the microparticle detection information 55, the number 55b of microparticles on the secondary side detected by the particle counter 32 at the current attraction point 54 is displayed in order. As other information, the filter number 55a currently under leak inspection, the number of primary-side particulates detected by the particle counter 36 (not shown), and the like may be displayed. In fig. 5, the filter number and the detected number of secondary-side particulates are shown for each particle diameter.

In addition, when the number of fine particles detected by the particle counter 32 exceeds a predetermined reference, an abnormality warning may be displayed in the fine particle detection information 55 by the personal computer 52. On the other hand, when the number of fine particles discharged to the primary side is changed by the detection of the particle counter 36, an abnormality warning may be displayed in the fine particle detection information 55 by the personal computer 52. The warning may be displayed by other means such as an alarm in addition to or instead of the display of the particle detection information 55.

In this way, by using the leak inspection support device 50 of the present embodiment in combination with the leak inspection apparatus 30 used in the related art, one operator W1 can cause the suction probe 31 to perform accurate scanning in accordance with the IEST standard or the like. Thus, the position of the leakage of the surface and the mounting portion of the filter can be accurately determined. In addition, the worker of the leak inspection does not need special skill and experience.

Next, a method of matching the projection image 53 projected from the projection window 51b of the projector 51 with the surface of the HEPA filter 20 will be described. Specifically, the contour of the scanning line shown in the projection image 53 (the scanning line 33b in fig. 2) is projected so as to match the contour of the HEPA filter 20 (the outer peripheral portion 23 in fig. 5). In the present invention, the matching method is not particularly limited, and a projection correction method provided in a projector may be used. In addition, basic techniques based on projection mapping may also be used. Examples of these are described in the following examples.

Example 1

In embodiment 1, a method of matching the projection image 53 with the surface of the HEPA filter 20 using the projection correction function provided in the leak inspection support device 50 in the configuration of the leak inspection device 30 and the leak inspection support device 50 shown in fig. 4 will be described.

In the leak inspection support device 50, a projection image 53 projected from the projector 51 is programmed in advance and installed in the personal computer 52. Information such as the number, the vertical and horizontal dimensions of the HEPA filter for leak inspection, the dimensions of the mounting frame, and the dimensions of the suction port of the suction probe is input to the program, and the setting and arrangement of the

scanning lines

33a and 33b of the projection image 53, the speed of the suction point 54, and the like are set.

Fig. 6 is a schematic diagram showing a case where the positional relationship between the projection device and the surface of the filter is corrected by the projection correction function in embodiment 1. Fig. 6 shows a view of the exhaust side surface of the HEPA filter 20 disposed on the ceiling wall surface of the clean room (directly below the HEPA filter 20) from the ground side of the clean room. In fig. 6, only one HEPA filter 20 is shown, and the adjacent HEPA filters or ceiling wall surfaces around the HEPA filter 20 (upper, lower, left, and right in the drawing) are omitted. Therefore, one HEPA filter 20 is in contact with an adjacent HEPA filter or ceiling wall surface at the outer peripheral portion 23 of the mounting frame 21, and the boundary is a mounting portion of the HEPA filter 20, and a leak check is also required at this portion.

In fig. 6, the projection image 53 is projected so as to overlap the surface of the HEPA filter 20. The projected image 53 is substantially trapezoidal in shape larger than the filter surface and does not match the surface of the HEPA filter 20. Even when the projection window 51b of the projector 51 is positioned directly below the HEPA filter 20, the projection image 53 may be rectangular and matched with the surface of the HEPA filter 20, but it is practically difficult to realize the rectangular projection. In fig. 6, the projector 51 is located on the lower front side with respect to the drawing.

Therefore, the position of the projector 51 is not directly below the HEPA filter 20 but is shifted, so that the projected image 53 has a trapezoidal or simple quadrangular shape and does not match the surface of the HEPA filter 20. Therefore, it is necessary to match the projection image 53 projected on the ceiling wall surface of the clean room with the surface of the HEPA filter 20.

Here, in the projection image 53 projected onto the ceiling wall surface of the clean room, a scan line 33b (see fig. 2) for performing a leak inspection of the outer peripheral portion 23 of the attachment frame 21 of the HEPA filter 20 (the boundary with the adjacent HEPA filter or the ceiling wall surface) is set. In fig. 6, the scanning line 33b is also substantially trapezoidal along the outer frame 53a of the projection image 53. Therefore, the contour of the HEPA filter 20 disposed on the ceiling wall surface of the clean room (the outer peripheral portion 23 of the mounting frame 21) is corrected so as to match the contour of the scanning line (the scanning line 33b) shown in the projection image 53, using the projection correction function provided in the leak inspection assisting device 50.

Specifically, in fig. 6, the projection image 53 is corrected so that the four corners d1, d2, d3, and d4 of the scanning line 33b are moved to the positions of the four corners P1, P2, P3, and P4 of the outer peripheral portion 23 of the HEPA filter 20. The movement mechanism may use a correction function provided in the projector 51, or may use a projection mapping function of a program installed in the personal computer 52.

In this way, in a state where the contour of the scanning line (scanning line 33b) shown by the projection image 53 projected from the projection window 51b of the projector 51 to the surface of the HEPA filter 20 is projected in accordance with the contour of the HEPA filter 20 (the outer peripheral portion 23 of the mounting frame 21), the attraction point 54 of the attraction detector 31 is projected so as to move at a constant interval and at a constant speed in the X-Y axis direction parallel to or orthogonal to the mounting frame 21 on the surface of the HEPA filter 20 (see fig. 2).

Further, by correcting the substantially trapezoidal projection image 53 in a rectangular shape, the leak inspection support device 50 can detect how much the position of the projector 51 is displaced from directly below the HEPA filter 20. The projection image 53 may be corrected so that the scanning speed of the attraction point 54 projected on the surface of the HEPA filter 20 becomes constant according to the degree of the deviation. In addition, the projected image 53 does not need to be corrected as long as the scanning speed of the attraction point 54 corresponding to the deviation between the position of the projector 51 and the position of the HEPA filter 20 is within ± 10% of the set value.

Example 2

In embodiment 2, a method of matching the projection image 53 with the surface of the HEPA filter 20 using the filter position detection device included in the leak inspection support device 50 in the configurations of the leak inspection device 30 and the leak inspection support device 50 shown in fig. 4 will be described.

In the leak inspection assisting apparatus 50, a projection image 53 projected from the projector 51 is programmed in advance and is installed in the personal computer 52. The setting and arrangement of the

scanning lines

33a and 33b of the projection image 53, the speed of the suction point 54, and the like are set by inputting information such as the number, the vertical and horizontal dimensions, the dimensions of the mounting frame, and the dimensions of the suction port of the suction probe of the leak inspection into the program.

Fig. 7 is a schematic diagram showing a case where the positional relationship between the projection device and each part of the filter is detected by the filter position detection device in example 2. Fig. 7 shows a positional relationship between the HEPA filter 20 disposed on the ceiling wall surface of the clean room and the projector 51 disposed on the floor surface when viewed from the side. In fig. 7, the position of the projector 51 is not directly below the HEPA filter 20 but is shifted, so that the projection image 53 from the projector 51 has a trapezoidal shape or a simple quadrangular shape, and does not match the surface of the HEPA filter 20 (not shown). Therefore, it is necessary to match the projection image 53 projected onto the ceiling wall surface of the clean room with the surface of the HEPA filter 20.

In fig. 7, the projector 51 incorporates a filter position detection device 56, and is disposed at a position where a part thereof contacts the projection window 51 b. The filter position detection device 56 detects the distances and direction angles (vertical direction angle and horizontal direction angle) from the projection window 51b to the positions of four corners P1, P2, P3, and P4 (see fig. 6) of the outer peripheral portion 23 of the HEPA filter 20. The method of detecting the distance and the direction angle may be any method, and various sensors or projection mapping functions may be used.

Specifically, in fig. 7, a distance L1 from the projection window 51b to one corner P1 of the HEPA filter 20, a vertical direction angle θ 1 thereof, and a horizontal direction angle (not shown) thereof are detected. The distance L2 from the projection window 51b to the other corner P2 of the HEPA filter 20, the vertical angle θ 2 thereof, and the horizontal angle (not shown) thereof are detected. Similarly, the distance from the projection window 51b to the other two corners P3 and P4 of the HEPA filter 20, the vertical angle, and the horizontal angle (both not shown) are detected.

In this way, the distances from the projection window 51b of the projector 51 to the positions of the four corners P1, P2, P3, and P4 (see fig. 6) of the outer peripheral portion 23 of the HEPA filter 20, and the vertical direction angle and the horizontal direction angle thereof are specified. From these detection values, the projection image 53 projected from the projector 51 onto the surface of the HEPA filter 20 is corrected by a program installed in the personal computer 52. In this way, in a state where the contour of the scanning line (scanning line 33b) shown by the projection image 53 projected from the projection window 51b of the projector 51 to the surface of the HEPA filter 20 is projected in accordance with the contour of the HEPA filter 20 (the outer peripheral portion 23 of the mounting frame 21), the attraction point 54 of the attraction detector 31 is projected so as to move at a constant interval and at a constant speed in the X-Y axis direction parallel to or orthogonal to the mounting frame 21 on the surface of the HEPA filter 20 (see fig. 2).

Further, the projected image 53 may be corrected so that the scanning speed of the attraction point 54 projected onto the surface of the HEPA filter 20 becomes constant by correcting the projected image 53 using a program installed in the personal computer 52. In addition, the projected image 53 does not need to be corrected as long as the scanning speed of the attraction point 54 corresponding to the deviation between the position of the projector 51 and the position of the HEPA filter 20 is within ± 10% of the set value.

As described above, according to the present embodiment, it is possible to provide a leak inspection assisting device and a leak inspection method using the same, which can use a normal leak inspection device in leak inspection of a filter in a clean room, and which does not require a scanning robot, a large-sized device, an additional work, or the like, and therefore, have a small cost burden and can perform accurate leak inspection by a small number of workers.

Description of the reference numerals

10 … clean room, 11 … ceiling wall, 12 … downstream side, 13 … upstream side, 14 … plastic sheet, 20 … HEPA filter, 21 … mounting frame, 22 … filter material, 23 … peripheral part, 30 … leakage inspection device, 31 … suction detector, 32, 36 … particle counter, 33 … single arrow (operation direction), 34 … double arrow (maintenance interval), 33a, 33b … scanning line, 35 … suction port, 31a, 35a … piping, 40 … aerosol containing particles, 50 … leakage inspection auxiliary device, 51 … projector, 51a, 52a … connecting line, 51b … projection window, 52 … personal computer, 53 … projection image, 53a … peripheral frame, 54 … suction point, 55 … particle detection information, 55a … filter number, 55b … particle number, 56 b … position detection device, L …, filter position detection device, L …, θ 1 filter position detection device, and p3, The angle of θ 2 …, the corners of the outer periphery of the P1 to P4 … filters, the corners of the d1 to d4 … scan lines, the F … gas supply device, and the W1 and W2 … workers.

Claims

1. A leak inspection support device used for performing leak inspection of a filter in a working room provided with one or a plurality of filters on a ceiling wall surface or a side wall surface to supply or discharge clean air between the working room and an external environment,

the leak check aid is characterized in that,

a projection correction unit provided in the projection device, the projection correction unit being configured to correct a positional relationship so that each corner of an outer peripheral contour of a scanning line of a projection image projected onto a surface of the filter from a projection window of the projection device is moved to a position of each corner of the outer peripheral contour of the filter, and to bring an outer peripheral contour of the scanning line shown in the projection image into a state of being projected while being matched with the outer peripheral contour of the filter,

the projection device projects leakage information detected by a particle detector attached to the leakage inspection device onto the surface of the filter while correcting the moving speed of the attraction point based on the correction of the positional relationship so that the attraction point attached to the attraction detector of the leakage inspection device moves along the surface of the filter at a constant interval and at a constant speed in the mutually orthogonal X-Y axis directions.

2. A leak inspection support device used for performing leak inspection of a filter in a working room provided with one or a plurality of filters on a ceiling wall surface or a side wall surface to supply or discharge clean air between the working room and an external environment,

the leak check aid is characterized in that,

comprises a projection device directly or indirectly mounted on the floor of the operation room, a filter position detection device, and an information processing device,

the filter position detection means detects a distance from a projection window of the projection means to a position of each corner of the outer peripheral outline of the filter, and a vertical direction angle and a horizontal direction angle thereof as a positional relationship,

the information processing device calculates a direction and a distance from a projection window of the projection device to each corner position of the outer peripheral contour of the filter based on the detected positional relationship, corrects the outer peripheral contour of the scan line shown in the projection image so that the outer peripheral contour of the scan line shown in the projection image matches the outer peripheral contour of the filter and is projected,

the projection device projects onto the surface of the filter leakage information detected by a particle detector attached to the leakage inspection device, while correcting the moving speed of the attraction point based on the correction of the outer peripheral contour so that the attraction point attached to the attraction detector of the leakage inspection device moves along the surface of the filter at a constant interval and at a constant speed in mutually orthogonal X-Y axis directions.

3. The leak inspection assistance device according to claim 1 or 2,

the leakage information detected by the particle detector is projected on the surface of the filter in real time as the number of detected particles, and an abnormality warning is issued when the number of detected particles exceeds a predetermined reference.

4. A leak inspection method for performing a leak inspection of a filter in a working room provided with one or a plurality of filters on a ceiling wall surface or a side wall surface and performing supply or exhaust of clean air between the working room and an external environment,

the method of leak checking is characterized in that,

the leak inspection apparatus includes a particle detector and an attraction detector connected to the particle detector,

using the leak inspection assisting apparatus of any one of claims 1 to 3 when scanning the surface of the filter using the attraction detector,

thereby causing the attraction detector to scan in a manner to track attraction points projected in a manner to move at constant intervals and at constant speed in mutually orthogonal X-Y axis directions along the surface of the filter.