CN211042088U - Dimension measuring device for glass substrate - Google Patents
Dimension measuring device for glass substrate Download PDFInfo
- Publication number
- CN211042088U CN211042088U CN201921538700.0U CN201921538700U CN211042088U CN 211042088 U CN211042088 U CN 211042088U CN 201921538700 U CN201921538700 U CN 201921538700U CN 211042088 U CN211042088 U CN 211042088U
- Authority
- CN
- China
- Prior art keywords
- glass substrate
- defect
- measuring apparatus
- dimension measuring
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model provides a size measuring device of glass substrate that can carry out nondestructive test's size measurement. A dimension measurement device (1) for a glass substrate (G) is provided with: a floating platform (2) which sprays gas to the lower surface of the glass substrate (G) in a horizontal posture so as to support the glass substrate (G) in a floating state; and an imaging element (4) that images the glass substrate (G), images image data including a measurement point (P) of the glass substrate (G) on the float table (2) by the imaging element (4), acquires coordinates of the measurement point (P) from the image data, and calculates the size of the glass substrate (G) based on the coordinates of the measurement point (P).
Description
Technical Field
The utility model relates to a glass substrate size measuring device's technique.
Background
Conventionally, a technique for measuring the size of a glass substrate for a Flat Panel Display (FPD) during the production of the glass substrate has been known. For example, as described in patent document 1.
Patent document 1 discloses a shape measuring apparatus for measuring the vertical and horizontal dimensions and the right angles of four corners of a glass substrate. The shape measuring apparatus photographs the edge position of the glass substrate at a measurement point on the outer periphery of the glass substrate, and performs image processing on the photographed image to calculate the coordinates of the edge position. Then, the shape measuring device calculates the vertical and horizontal dimensions of the glass substrate, the right angles of the four corners, and the like based on the coordinates of the edge positions.
Prior art documents
Patent document
Patent document 1: japanese patent laid-open publication No. 2007-205724
SUMMERY OF THE UTILITY MODEL
Problem to be solved by utility model
However, the above-described shape measuring apparatus is configured to carry the glass substrate to the glass inspection table and perform dimension measurement offline in order to perform dimension measurement. In off-line measurement, a glass inspection table is in contact with and supports a glass substrate, and an operator touches the glass substrate, thereby causing scratches and stains on the glass substrate. In addition, with the recent increase in size of glass substrates, the possibility of the glass substrate coming into contact with surrounding objects increases during conveyance onto the glass inspection table. Therefore, the dimensional measurement becomes a destructive inspection.
An object of the present invention is to provide a measuring device for a glass substrate capable of performing a nondestructive inspection.
Means for solving the problems
The problem to be solved by the present invention is as described above, and the means for solving the problem will be described below.
Namely, the utility model discloses a glass substrate size measuring device possesses: a float table for supporting the glass substrate in a state in which the glass substrate is floated by ejecting gas to a lower surface of the glass substrate in a horizontal posture; preferably, the image pickup device picks up image data including a measurement point of the glass substrate on the floating table, acquires coordinates of the measurement point from the image data, and calculates the size of the glass substrate based on the coordinates of the measurement point.
According to the above-mentioned the utility model provides a glass substrate size measurement device can carry out size measurement with the not contact state of floating platform and shooting component and glass substrate. Therefore, the size measurement of the nondestructive inspection can be realized.
Further, in the dimension measuring apparatus for a glass substrate according to the present invention, it is preferable that the dimension measuring apparatus for a glass substrate further includes a positioning device for positioning the glass substrate, and the positioning device abuts against the rectangular plate-shaped glass substrate at 5 positions to perform positioning.
According to the above-described dimension measuring device for a glass substrate of the present invention, since the positioning device can be abutted against the end faces of the glass substrate, the glass substrate can be reliably positioned. Therefore, the dimensional measurement can be accurately performed.
In the glass substrate dimension measuring apparatus according to the present invention, it is preferable that 8 measurement points are provided on the rectangular plate-shaped glass substrate.
According to the above, the utility model provides a glass substrate size measuring device can set up the measuring point respectively on the terminal surface that is close to the four corners of glass substrate. Therefore, the dimensions of the four corners of the glass substrate can be measured with the dimensions ensured.
In addition, in the glass substrate dimension measuring apparatus of the present invention, it is preferable that the imaging element is a microscope.
According to the aforesaid the utility model provides a glass substrate size measuring device can acquire the coordinate of measuring point with high accuracy. Therefore, dimensional measurement can be achieved precisely.
In addition, in the dimension measuring apparatus for a glass substrate according to the present invention, it is preferable that the dimension measuring apparatus for a glass substrate also serves as a defect content specifying device which specifies the content of a defect of the glass substrate based on image data captured by the imaging element.
According to the above-mentioned the utility model provides a glass substrate size measurement device need not to set up size measurement device and defect content confirm device alone. Therefore, the measurement of the dimension and the determination of the content of the defect can be realized with a simple configuration.
Further, in the dimension measuring apparatus for a glass substrate according to the present invention, it is preferable that the dimension measuring apparatus for a glass substrate further includes a defect position specifying device for detecting a defect of the glass substrate and specifying a coordinate of the detected defect, and the defect position specifying device is provided at a position on an upstream side of the floating table and the imaging element in a carrying direction of the glass substrate.
According to the above-mentioned the utility model provides a glass substrate size measurement device detects glass substrate and has no defect before carrying out the size measurement. The determination of the defect content of the glass substrate needs to be performed for all glass substrates. On the other hand, it is not necessary to perform measurement of the size of the glass substrate for all the glass substrates. Therefore, a glass substrate having no defect or a glass substrate having few defects can be selected for the dimension measurement.
In addition, in the glass substrate dimension measuring apparatus of the present invention, it is preferable that the glass substrate dimension measurement is performed after the content of the defect of the glass substrate is determined.
According to the size measuring apparatus for a glass substrate of the present invention as described above, it is possible to measure the size with sufficient time after the content of the defect is determined. Therefore, the measurement of the size and the determination of the content of the defect can be performed efficiently with time.
In addition, in the glass substrate dimension measuring apparatus of the present invention, it is preferable that the glass substrate, on which the defect is not detected by the defect position determining device, is subjected to dimension measurement.
According to the above-described dimension measuring apparatus for a glass substrate of the present invention, since the content of the defect is not specified when the defect is not detected, time is sufficient and dimension measurement can be performed. Therefore, the dimension measurement and the defect content determination can be efficiently performed with time.
Effect of the utility model
As an effect of the present invention, the following effect is obtained.
Namely, according to the utility model provides a glass substrate size measuring device can carry out nondestructive test's dimensional measurement.
Drawings
Fig. 1 is a schematic view showing steps for processing a glass substrate according to an embodiment of the present invention.
Fig. 2 is a view showing a portion where a defect content specifying step and a dimension measuring step are performed in the dimension measuring apparatus according to the embodiment of the present invention, in which fig. 2 (a) is a schematic plan view thereof and fig. 2 (b) is a schematic side view thereof.
Fig. 3 is a view showing a portion where a defect coordinate specifying step is performed in the dimension measuring apparatus according to the embodiment of the present invention, in which fig. 3 (a) is a schematic plan view thereof and fig. 3 (b) is a schematic front view thereof.
Description of reference numerals:
a dimensional measurement device;
a floating platform;
a positioning device;
a capture element;
defect content determining means;
defect position determining means;
a glass substrate;
measuring points.
Detailed Description
Next, a dimension measuring apparatus 1 for a glass substrate G according to an embodiment of the present invention will be described with reference to fig. 1 to 3.
In the following description, for convenience of explanation, the direction of the arrow a is defined as the conveyance direction of the glass substrate G.
The dimension measuring apparatus 1 for the glass substrate G (hereinafter simply referred to as the dimension measuring apparatus 1) is an apparatus for measuring the dimension of the glass substrate G.
The glass substrate G subjected to dimension measurement by the dimension measuring apparatus 1 has, for example, a rectangular plate shape. For example, the dimension measuring apparatus 1 is used for measuring the dimension (the amount of machining of the end face) of the glass substrate G after the glass substrate G is subjected to machining such as end face machining.
As shown in fig. 1, the processing for the glass substrate G includes: a charging step S1 for charging the glass substrate G; a processing step S2 of processing the glass substrate G put in the putting step S1; a cleaning step S3 of cleaning the glass substrate G processed in the processing step S2; an inspection step S4 of inspecting the glass substrate G cleaned in the cleaning step S3 for defects; a dimension measurement step S5 of performing dimension measurement of the glass substrate G subjected to the defect inspection in the inspection step S4; and a packaging step S6 of packaging the glass substrates G that have undergone the dimension measuring step S5.
The inspection process S4 includes a defect coordinate determination process S4a of determining coordinates of a defect, and a defect content determination process S4b of determining the content of the defect at the coordinates determined in the defect coordinate determination process S4 a. The number of lines in the defect content identifying step S4b is larger than the number of lines in the defect coordinate identifying step S4a, and the glass substrates G that have passed through the lines in the defect coordinate identifying step S4a are assigned to the lines in the defect content identifying step S4 b.
The size measuring process S5 is provided after the defect content identifying process S4b, but is not particularly limited thereto, and may be provided before the defect content identifying process S4b in the order of replacement with the defect content identifying process S4 b. In the dimension measuring step S5, the dimension of all the glass substrates G to be inspected may be measured, or the dimension of some of the glass substrates G may be measured.
Next, the dimension measuring apparatus 1 will be described in detail with reference to fig. 2.
The dimension measuring apparatus 1 mainly includes a floating platform 2, a positioning device 3, and a photographing element 4. The floating platform 2, the positioning device 3, and the imaging element 4 are used in the defect content determination step S4b and the dimension measurement step S5 (see fig. 1).
The float table 2 ejects a gas (for example, air) to the lower surface of the glass substrate G in the horizontal posture, thereby supporting the glass substrate G in a floating state. The floating platform 2 does not contact the glass substrate G when supporting the glass substrate G in a floating state. The glass substrate G is conveyed in the conveyance direction (see arrow a) on the float 2 by a shuttle (not shown) or the like. The glass substrate G is lifted up from the floating platform 2, and is conveyed in a state of being in contact with only the shuttle.
The positioning device 3 abuts against a rectangular plate-shaped glass substrate G to position the glass substrate G. For example, the positioning device 3 is constituted by a plurality of registration rollers. The positioning device 3 is configured to abut against the glass substrate G at five locations, but is not particularly limited, and may abut against the glass substrate G at four locations.
When the positioning device 3 is brought into contact with the glass substrate G at five positions, one registration roller is provided on each of the upstream side and the downstream side in the conveyance direction (see arrow a), one registration roller is provided on one side in the width direction orthogonal to the conveyance direction, and two registration rollers are provided on the other side. When the positioning device 3 abuts against the glass substrate G at four locations, one registration roller is provided on each of the upstream side and the downstream side in the conveyance direction, and one registration roller is provided on each of the one side and the other side in the width direction.
The positioning device 3 includes a contact member 5 that contacts an end surface of the glass substrate G, an actuator (not shown) that moves the contact member 5 in the vertical direction, and an actuator (not shown) that moves the contact member 5 in the horizontal direction. The contact member 5 is formed in a cylindrical shape and is rotatable about an axial center extending in the vertical direction.
When one registration roller is provided on one end surface of the glass substrate G, the abutment member 5 abuts on the center portion of the end surface of the glass substrate G. In the case where two registration rollers are provided on one end surface of the glass substrate G (in the case where two registration rollers are provided on the other side in the width direction), the abutment members 5 abut against the upstream side and the downstream side of the end surface of the glass substrate G, respectively.
For example, when positioning the glass substrate G, first, the abutment member 5 on the downstream side in the conveyance direction (see arrow a) and the abutment member 5 on one side in the width direction are arranged so that the glass substrate G is stopped at a predetermined position where the positioning is performed. Next, the glass substrate G is conveyed toward a predetermined position in the conveying direction by the reciprocating member. At the same time, the abutment member 5 on the upstream side in the conveyance direction and the abutment member 5 on the other side in the width direction abut on the end face of the glass substrate G, and the glass substrate G is moved toward a predetermined position. When the glass substrate G reaches the predetermined position, the end surface of the glass substrate G abuts against the abutting member 5 on the downstream side in the conveying direction and the abutting member 5 on one side in the width direction, and the glass substrate G stops. When the glass substrate G stops at a predetermined position, the shuttle is separated from the glass substrate G. Thus, the glass substrate G is positioned in a state of being floated with respect to the floating table 2, and is thus in point contact with only the plurality of abutment members 5 and 5.
The imaging element 4 is a member for imaging the glass substrate G. For example, the imaging device 4 is a microscope, but is not particularly limited thereto, and may be a CCD camera. The imaging element 4 is supported above the glass substrate G by a moving mechanism 6 such as a gantry. The moving mechanism 6 is configured to be able to move the imaging element 4 in parallel to the conveying direction (see arrow a) and the width direction. The imaging element 4 images image data including the measurement point P of the glass substrate G in a state where the glass substrate G is positioned on the floating table 2 by the positioning device 3. The position of the measurement point P can be arbitrarily set.
For example, the measurement points P are disposed at positions on the end surface of the glass substrate G separated by a predetermined distance in the horizontal direction from the four corners of the glass substrate G, and are provided at 8 positions in total. For example, a specified distance is 10 mm. When the measurement points P are provided at 8 positions, the imaging device 4 sequentially images the image data including the measurement points P by moving clockwise or counterclockwise on the end surface of the glass substrate G after imaging the image data of the measurement points P including an arbitrary position.
The measurement points P may be arranged at 3 positions with respect to one end surface of the glass substrate G, and may be arranged at twelve positions in total. In this case, the three measurement points P on each end surface of the glass substrate G are disposed at both end portions of the end surface of the glass substrate G and at the center portion of the end surface of the glass substrate G.
The control device (not shown) of the dimension measuring apparatus 1 acquires the coordinates of the measurement point P from the image data captured by the imaging device 4. Next, the control device calculates the size of the glass substrate G based on the coordinates of the acquired measurement point P. For example, the dimensions of the glass substrate G are the outer dimensions of the glass substrate G and the right angles at the four corners.
According to the dimension measuring apparatus 1 of the present invention as described above, dimension measurement is performed in a state where the floating platform 2 and the imaging device 4 are not in contact with the glass substrate G. Thus enabling dimensional measurement for non-destructive inspection.
In addition, according to the size measuring apparatus 1 of the present invention as described above, since the positioning devices 3 can be respectively abutted against the end surfaces of the glass substrates G, the glass substrates G can be reliably positioned. Therefore, the dimensional measurement can be accurately performed.
In addition, according to the size measuring apparatus 1 of the present invention as described above, when the measuring points P at 8 positions are provided for the glass substrate G, the measuring points P can be provided on the end surfaces of the glass substrate G near the four corners. Therefore, the dimensions of the four corners of the glass substrate G can be measured with the dimensions ensured.
In addition, when the glass substrate G is provided with 12 measurement points P, each measurement point P may be provided at the center of the end surface of the glass substrate G. Therefore, the dimension measurement can be performed while ensuring the dimension at the central portion of the end face of the glass substrate G.
In addition, according to the size measuring apparatus 1 of the present invention as described above, the coordinates of the measuring point P can be acquired with high accuracy. Therefore, dimensional measurement can be performed with precision.
Further, according to the dimension measuring apparatus 1 of the present invention as described above, it is possible to measure the dimension with a sufficient time after the contents of the defect are specified. Therefore, the measurement of the size and the determination of the content of the large defect can be performed efficiently with the use of time.
The dimension measuring apparatus 1 also serves as a defect content specifying device 7, and the defect content specifying device 7 specifies the content of the defect of the glass substrate G based on the image data captured by the imaging device 4. The content of the defect is determined by the control device based on the image data, but is not particularly limited, and may be determined by manually observing the image data.
According to the dimension measuring apparatus 1 of the present invention as described above, it is not necessary to separately provide the dimension measuring apparatus 1 and the defect content determining apparatus 7. Therefore, the measurement of the dimension and the determination of the content of the defect can be realized with a simple configuration.
As shown in fig. 3, the dimension measuring apparatus 1 is further provided with a defect position determining device 8. The defect position specifying device 8 detects a defect of the glass substrate G and specifies coordinates of the detected defect.
The defect position specifying device 8 mainly includes a light source unit 9 and an imaging unit 10. The defect position specifying device 8 is used in the defect coordinate specifying step S4a (see fig. 1).
In the defect coordinate determination step S4a, the glass substrate G is floated on the floating platform 11 by ejecting gas (for example, air) to the lower surface of the glass substrate G in the horizontal posture. The glass substrate G is conveyed in the conveying direction (see arrow a) by a plurality of rollers 12 and 12 provided at both ends in the width direction. The glass substrate G is in a state of being floated with respect to the floating table 11, and is thus conveyed in the conveying direction in a state of being in point contact with only the plurality of rollers 12 and 12.
For example, the imaging unit 10 is a camera disposed opposite to the light source unit 9 via the conveyance path of the glass substrate G. The light source unit 9 irradiates a wide area in the width direction from below the glass substrate G. The imaging unit 10 images a wide area in the width direction from above the glass substrate G. In a state where the imaging unit 10 is fixed to the defect position specifying device 8, the glass substrate G is passed through the conveyance path, and the entire glass substrate G is imaged.
The control device of the dimension measuring apparatus 1 detects a defect of the glass substrate G from the image data captured by the imaging section 10, and specifies the coordinates of the detected defect.
According to the dimension measuring apparatus 1 of the present invention as described above, before the dimension measurement, it is detected whether or not the glass substrate G has a defect. The determination of the defect content of the glass substrate G needs to be performed for all the glass substrates G. On the other hand, the measurement of the size of the glass substrate G need not be performed for all the glass substrates G. Therefore, the glass substrate G having no defect or the glass substrate G having few defects can be selected for the dimension measurement.
In addition, according to the dimension measuring apparatus 1 of the present invention as described above, since the content of the defect is not specified when the defect is not detected, a time is sufficient and the dimension measurement can be performed. Therefore, the measurement of the size and the determination of the content of the defect can be performed efficiently with time.
The above embodiments are merely representative embodiments, and various modifications can be made without departing from the scope of the present invention. The present invention can be carried out in various ways, and the scope of the present invention is defined by the description of the claims, and includes all modifications within the equivalent meaning and scope of the claims.
Industrial applicability
The utility model discloses be fit for being used for the glass substrate size measurement of off-line.
Claims (9)
1. A dimension measuring apparatus for a glass substrate, comprising:
a float table for supporting the glass substrate in a state in which the glass substrate is floated by ejecting gas to a lower surface of the glass substrate in a horizontal posture; and
an imaging element that images the glass substrate,
the dimension measuring apparatus for a glass substrate is characterized in that,
image data including a measurement point of the glass substrate on the float table is captured by the imaging element, coordinates of the measurement point are acquired from the image data, and the size of the glass substrate is calculated based on the coordinates of the measurement point.
2. The dimension measuring apparatus of a glass substrate according to claim 1,
the dimension measuring apparatus for a glass substrate further comprises a positioning device for positioning the glass substrate,
the positioning device abuts against the rectangular plate-shaped glass substrate at 5 positions to perform positioning.
3. The dimension measuring apparatus of a glass substrate according to claim 1 or 2,
8 measurement points were set on a rectangular plate-shaped glass substrate.
4. The dimension measuring apparatus of a glass substrate according to claim 1 or 2,
the imaging element is a microscope.
5. The dimension measuring apparatus of a glass substrate according to claim 3,
the dimension measuring device of the glass substrate also serves as a defect content determining device that determines the content of a defect of the glass substrate based on image data captured by the imaging element.
6. The dimension measuring apparatus of a glass substrate according to claim 5,
the glass substrate dimension measuring apparatus further includes a defect position determining device that detects a defect of the glass substrate and determines coordinates of the detected defect,
the defect position specifying device is provided upstream of the floating table and the imaging element in the glass substrate conveying direction.
7. The dimension measuring apparatus of a glass substrate according to claim 4,
the apparatus also serves as a defect content determination apparatus that determines the content of a defect of the glass substrate based on image data captured by the imaging device and performs a dimension measurement of the glass substrate after determining the content of the defect of the glass substrate.
8. The dimension measuring apparatus of a glass substrate according to claim 7,
the glass substrate dimension measuring apparatus further includes a defect position determining device that detects a defect of the glass substrate and determines coordinates of the detected defect,
the defect position specifying device is provided upstream of the floating table and the imaging element in the glass substrate conveying direction.
9. The dimension measuring apparatus of a glass substrate according to claim 3,
the glass substrate dimension measuring apparatus also serves as a defect content specifying apparatus including a defect position specifying apparatus for detecting a defect of the glass substrate and specifying a coordinate of the detected defect,
the defect content determination device performs a size measurement of the glass substrate, the defect of which is not detected by the defect position determination device, and determines a content of the defect of the glass substrate from the image data captured by the imaging element,
the defect position specifying device is provided upstream of the floating table and the imaging element in the glass substrate conveying direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921538700.0U CN211042088U (en) | 2019-09-16 | 2019-09-16 | Dimension measuring device for glass substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921538700.0U CN211042088U (en) | 2019-09-16 | 2019-09-16 | Dimension measuring device for glass substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211042088U true CN211042088U (en) | 2020-07-17 |
Family
ID=71567844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921538700.0U Active CN211042088U (en) | 2019-09-16 | 2019-09-16 | Dimension measuring device for glass substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211042088U (en) |
-
2019
- 2019-09-16 CN CN201921538700.0U patent/CN211042088U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4157037B2 (en) | Defect inspection equipment | |
| KR102114718B1 (en) | Electronic part mounting apparatus and mounted part inspection method | |
| KR101697216B1 (en) | Plate glass inspection unit and manufacturing facility | |
| TW201734460A (en) | Linear inspection system | |
| JP2007107945A (en) | Inspection device of substrate | |
| JP4747602B2 (en) | Glass substrate inspection apparatus and inspection method | |
| JP2006329714A (en) | Lens inspection apparatus | |
| JP4704793B2 (en) | Appearance inspection device | |
| TW201432252A (en) | Substrate defect inspection method, substrate defect inspection device, program, and computer-readable medium | |
| JP6123135B2 (en) | Thickness inspection method and thickness inspection apparatus | |
| CN111289521A (en) | Surface damage inspection system for processed product | |
| JP6193028B2 (en) | Inspection device | |
| JP5875811B2 (en) | Substrate inspection apparatus and correction information acquisition method | |
| KR102623714B1 (en) | Manufacturing method of glass plate | |
| CN211042088U (en) | Dimension measuring device for glass substrate | |
| CN112730420B (en) | Appearance flaw detection workstation | |
| CN113015901A (en) | Method for producing glass plate and apparatus for producing glass plate | |
| JP2010002232A (en) | Inspection method of forged product | |
| JP2006349599A (en) | Device and method for inspecting transparent substrate | |
| JP2009133745A (en) | Inspection method and device | |
| JP6277347B2 (en) | Inspection apparatus and inspection method for flexible circuit board | |
| TW201804558A (en) | Electronic component conveying apparatus and electronic component inspecting apparatus capable of improving production efficiency by photographing the terminal surface after the electronic component is held | |
| JPH11148902A (en) | Apparatus for inspecting surface flaw of flat substrate | |
| JP7395950B2 (en) | Visual inspection equipment and visual inspection method | |
| JP2005201880A (en) | Apparatus for inspecting surface defect |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |