JP6193028B2 - Inspection device - Google Patents

Description

  The present invention relates to an inspection apparatus for inspecting a metal mask sheet.

  2. Description of the Related Art Conventionally, a metal mask inspection apparatus that performs an appearance inspection of a metal mask used when vacuum deposition is performed in a manufacturing process of an organic EL element is known (for example, see Patent Document 1).

JP 2004-037134 A

  By the way, a metal mask is manufactured by attaching a metal mask sheet to a metal mask frame, but it is necessary to inspect the metal mask sheet alone before being attached to the metal mask frame. In general, when a single metal mask sheet is inspected, the inspection is performed with the metal mask sheet placed on an inspection table.

  However, since the metal mask sheet is an extremely thin and easily deformable member, it may be deformed when placed on the inspection table and cannot be inspected accurately.

  An object of the present invention is to provide an inspection apparatus capable of accurately inspecting a metal mask sheet.

Predetermined inspection apparatus of the present invention, the at least one tension part to apply tension against the metal mask sheet, relative to the metal mask sheet before being affixed to the metal mask frame by the tension unit, a preset In a state where the inspection tension is applied , a dimension measuring unit that measures the dimension of the metal mask sheet, a deflection measuring unit that measures the deflection of the metal mask sheet, and an appearance inspection that inspects defects in the appearance of the metal mask sheet An inspection section having a section, an adjustment section for changing the tension applied to the metal mask sheet by the tension section, and causing the dimension measurement section to measure the dimension of the metal mask sheet while changing the tension by the adjustment section. And measuring the deflection of the metal mask sheet on the deflection measuring portion while changing the tension by the adjusting portion. Based on the measurement result using the control unit and the control unit, the relationship between the tension applied to the metal mask sheet, the elongation amount of the metal mask sheet, and the deflection amount of the metal mask sheet A calculating unit for calculating, and a sticking tension determining unit for determining a tension for sticking the metal mask sheet to the metal mask frame based on a result calculated by the calculating unit .

Further, the inspection apparatus of the present invention determines whether or not the metal mask sheet is suitable as a member used for manufacturing a metal mask based on the inspection result by the inspection unit , or a determination unit that ranks the metal mask sheet It is characterized by providing.

  According to the inspection apparatus of the present invention, a metal mask sheet can be accurately inspected.

It is a perspective view which shows the inspection apparatus which concerns on embodiment. It is a figure which shows the metal mask sheet | seat test | inspected by the test | inspection apparatus which concerns on embodiment. It is a figure which shows the metal mask manufactured using the metal mask sheet | seat inspected by the inspection apparatus which concerns on embodiment. It is the figure which looked at the inspection part of the inspection device concerning an embodiment from the front. It is a figure which shows the tension device with which the inspection apparatus which concerns on embodiment is equipped. It is a perspective view which shows the inspection apparatus which concerns on other embodiment.

  Hereinafter, an inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings, taking as an example an inspection apparatus that inspects a metal mask sheet used when vacuum deposition is performed in a manufacturing process of an organic EL element. FIG. 1 is a perspective view showing an inspection apparatus. The inspection apparatus 2 includes a table portion 6 which is a rectangular flat plate on which a strip-shaped metal mask sheet 4 which is long in one direction is placed, and an inspection portion 8 for inspecting the metal mask sheet 4 placed on the table portion 6. A frame 10 that supports the inspection unit 8 so as to be slidable in the longitudinal direction of the metal mask sheet 4, a pair of guide rails 12 that slidably support the frame 10 in a direction perpendicular to the longitudinal direction of the metal mask sheet 4, 4 is provided with a tension device 13 for applying tension in the longitudinal direction of 4 and a base 14. The tension device 13 is handled as a pair of sets, and is arranged on both sides of the metal mask sheet 4 so as to face each other.

  Here, the metal mask sheet 4 is made of a thin metal plate and has a plurality of rectangular openings 4a having a large number of slits along the longitudinal direction, as shown in FIG. In addition, a plurality of management points 4b are provided along the edge in the short side direction of the opening 4a, which serve as an index when the coordinates of the metal mask sheet 4 are measured. In the metal mask manufacturing process, the metal mask 20 is manufactured by attaching the metal mask sheet 4 to the metal mask frame 18 as shown in FIG. The metal mask 20 is used when vacuum-depositing an organic material in the manufacturing process of the organic EL element.

  FIG. 4 is a view of the inspection unit 8 as viewed from the front. As shown in FIG. 4, the inspection unit 8 includes a dimension measuring microscope 22 that measures the dimensions of the metal mask sheet 4, an appearance inspection microscope 24 that performs appearance inspections such as scratches and etching defects on the metal mask sheet 4, and metal. A laser displacement meter 26 that measures the amount of deflection of the mask sheet 4 using laser light is provided.

  Here, the dimension measuring microscope 22 includes an objective lens 22b for observing the metal mask sheet 4 at a predetermined magnification at a lower end portion of the lens barrel 22a, and an objective lens 22b at an upper end portion of the lens barrel 22a. The camera 22c which images the image of the metal mask sheet 4 to be observed is provided. Further, the appearance inspection microscope 24 includes an objective lens 24b for observing the metal mask sheet 4 at a predetermined magnification at the lower end of the lens barrel 24a, and is observed by the objective lens 24b at the upper end of the lens barrel 24a. The camera 24c which images the image of the metal mask sheet 4 to be used is provided.

  FIG. 5 is a diagram illustrating the tension device 13 provided in the inspection device according to the embodiment. As shown in FIG. 5, the tension device 13 includes a motor 13a, a ball screw 13b, and a movable portion 13c. Here, when the motor 13a is driven to rotate the ball screw 13b, the nut 13d moves to the right side in the figure, and the entire movable portion 13c moves to the right side in the figure along the linear guide rail 13e.

  The movable portion 13c is slidably supported on the linear guide rail 13e via the linear guide block 13f. The linear guide rail 13e extends in the longitudinal direction of the metal mask sheet 4 (see FIG. 1), and is provided at a predetermined position of the inspection apparatus 2.

  When the movable part 13c moves to the right side of the figure, tension is applied to the metal mask sheet 4 held by the holding part 13g, and the applied tension is measured by the measuring part 13h.

  Next, the inspection process of the metal mask sheet 4 by the inspection apparatus 2 according to the embodiment will be described with reference to the drawings. First, when the metal mask sheet 4 is transferred to a predetermined inspection position of the table unit 6, a control unit (not shown) of the inspection apparatus 2 performs a metal mask by a clamping unit 13g (see FIG. 5) as shown in FIG. The both ends of the sheet 4 are clamped. Next, the tension device 13 moves the movable portion 13c by driving the motor 13a to apply a predetermined inspection tension to the metal mask sheet 4, and stretches the metal mask sheet 4 flat without distortion or slack. Put it in a state.

  Here, the tension calculated in advance by simulation or the like is used as the predetermined inspection tension. For example, a tension that is theoretically the same as the design value of the metal mask sheet 4 is used. As a specific example, when the metal mask sheet 4 has a length of 800 mm, a width of 60 mm, and a thickness of 40 μm, a tension of 20 N is applied as a predetermined inspection tension.

  When a predetermined inspection tension is applied to the metal mask sheet 4, the control unit starts dimensional inspection of the metal mask sheet 4. Here, there are three types of inspections as dimensional inspections. That is, there are three types of inspections: a long dimension measurement for measuring the coordinates of the management point 4b of the metal mask sheet 4, a short dimension measurement for measuring the dimension of the opening 4a, and a deflection measurement for measuring the presence or absence of the deflection of the metal mask sheet 4. Exists. Here, a case where an appearance inspection is performed after performing a dimension inspection in the order of long dimension measurement, short dimension measurement, and deflection measurement will be described as an example.

  First, when the long dimension measurement is started, the control unit aligns the position of the dimension measuring microscope 22 directly above the management point 4b (see FIG. 2) located at the lower left end on the lower side of the metal mask sheet 4, and the objective. An image of the management point 4b observed by the lens 22b is taken by the camera 22c. Similarly, the control unit captures images of all the management points 4b with the camera 22c while moving the position of the dimension measuring microscope 22.

  Next, the control unit calculates a position coordinate of the management point 4b in the image by performing predetermined image processing on the image data of the captured image. Next, the position coordinate of the management point 4b on the table unit 6 is specified based on the position coordinate of the management point 4b in the image and the position coordinate of the camera 22c at the time of imaging on the table unit 6.

  Next, the control unit reads the design drawing data of the metal mask sheet 4 stored in the information storage unit (not shown), and the design drawing when the metal mask sheet on the design drawing is placed at a predetermined inspection position. The position coordinates on the table unit 6 of the management point (hereinafter referred to as design management point) of the upper metal mask sheet are specified.

  Next, the control unit determines whether or not the deviation between the position coordinates of the management point 4b of the metal mask sheet 4 and the position coordinates of the design management point of the metal mask sheet on the design drawing falls within a predetermined error range. To do. When the deviation falls within a predetermined error range, the control unit determines that the metal mask sheet 4 is a non-defective product. And the metal mask 20 (refer FIG. 3) is manufactured using this metal mask sheet 4. FIG. On the other hand, when the deviation does not fall within a predetermined error range, the control unit determines that the result of the dimensional inspection is a failure. If it fails, the inspection is interrupted or the next short dimension inspection is started.

  When the short dimension measurement is started, the control unit aligns the position of the dimension measuring microscope 22 directly above the opening 4a (see FIG. 2) located at the leftmost end of the metal mask sheet 4, and is observed by the objective lens 22b. An image of the opening 4a is captured by the camera 22c. Similarly, the control unit captures images of all the openings 4a with the camera 22c.

  Next, the control unit compares the size of each opening 4a with the size of each opening of the metal mask sheet on the design drawing based on the image of the captured opening 4a, and each opening of the metal mask sheet 4 It is determined whether or not the difference between the dimension 4a and the dimension of each opening of the metal mask sheet on the design drawing falls within a predetermined error range.

  When the dimensional difference falls within a predetermined error range, the control unit determines that the metal mask sheet 4 is a non-defective product. Then, the metal mask 20 is manufactured using the metal mask sheet 4. On the other hand, when the dimensional difference does not fall within a predetermined error range, the control unit determines that the result of the dimensional inspection is a failure. If it fails, the inspection is interrupted or the next deflection inspection is started.

  When the deflection measurement is started, the control unit moves the laser displacement meter 26 to align the position directly above a predetermined measurement position (not shown) of the metal mask sheet 4. Next, the laser displacement meter 26 irradiates the metal mask sheet 4 with laser light, and receives the reflected light reflected by the surface of the metal mask sheet 4, thereby measuring the deflection at a predetermined measurement position. When there are a plurality of predetermined measurement positions, the control unit similarly measures the deflection of all the predetermined measurement positions.

  Next, the control unit determines whether or not the deflection amounts of all the predetermined measurement positions are within the predetermined deflection amount range. When the amount of bending at all the predetermined measurement positions is equal to or less than the predetermined amount of bending, the control unit determines that the metal mask sheet 4 is a non-defective product. Then, the metal mask 20 is manufactured using the metal mask sheet 4. On the other hand, when the deflection amount of all the predetermined measurement positions is not within the range of the predetermined deflection amount, the control unit determines that the result of the dimensional inspection is unacceptable. If it fails, the inspection is interrupted or the next visual inspection is started.

  When the appearance inspection is started, the control unit captures the image of the metal mask sheet 4 observed by the objective lens 24b with the camera 24c while sequentially moving the appearance inspection microscope 24, and the image captured by the camera 24c. Defects are detected by image processing the data. For example, defects such as scratches on the surface of the metal mask sheet 4, defective etching, and damage to the slits of the opening 4 a are detected.

  The detected defect is visually confirmed using the dimension measurement microscope 22 or a review microscope (not shown).

  As a result of the confirmation, if it is determined that the metal mask sheet 4 has a defective portion, the metal mask sheet 4 is rejected. If it is determined that there is no defective portion, the metal mask sheet 4 is used to form a metal mask. 20 (see FIG. 3) is manufactured.

  According to the inspection apparatus 2 according to this embodiment, the metal mask sheet 4 is deformed in order to perform inspection while applying a predetermined inspection tension to the metal mask sheet 4 before being attached to the metal mask frame 18. Can be accurately inspected.

  Next, a deformation amount measuring process of the metal mask sheet 4 by the inspection apparatus 2 according to the embodiment will be described with reference to the drawings. First, as shown in FIG. 1, the metal mask sheet 4 selected as a sample is transferred to a predetermined inspection position of the table portion 6, and both end portions 4 c of the metal mask sheet 4 are held by the sandwiching portions 13 g (see FIG. 5). It is pinched.

  Next, the control unit drives the motor 13a to move the movable unit 13c to apply tension in the longitudinal direction of the metal mask sheet 4, and gradually increases the applied tension while the measuring unit 13h increases the tension. Measure. Each time the tension is increased by a predetermined amount, an image of the management point 4b (see FIG. 2) is picked up by the camera 22c (see FIG. 4), and the deflection of the predetermined measurement position is measured by the laser displacement meter 26.

  Next, the control unit calculates the elongation amount of the metal mask sheet 4 when the tension is increased by a predetermined amount based on the measurement result of the tension by the measurement unit 13h and the image of the captured management point. Further, based on the measurement result of the tension by the measurement unit 13h and the measurement result by the laser displacement meter 26, the deflection amount of the metal mask sheet 4 when the tension is increased by a predetermined amount is calculated. Next, based on the measurement result and the calculation result, relational data indicating the relationship between the tension, the amount of elongation of the metal mask sheet 4 and the amount of deflection when the tension is increased for each predetermined amount is created, not shown. Store in the information storage unit.

  Here, the relational data stored in the information storage unit is used when determining the tension when the metal mask sheet 4 is attached to the metal mask frame 18. For example, the control unit refers to the relationship data, and determines the tension at which the elongation amount of the metal mask sheet 4 becomes a predetermined elongation amount and the deflection amount of the metal mask sheet 4 as the predetermined deflection amount as the tension at the time of application. decide. Further, the control unit refers to the relational data at the time of pasting and aligns the metal mask sheet 4 with respect to the metal mask frame 18 while taking into account the amount of elongation and the amount of deflection of the metal mask sheet 4.

  Thus, the relationship data which shows the relationship between tension | tensile_strength, the amount of expansion | extension of the metal mask sheet 4, and the amount of deflection | deviations, applying tension | tensile_strength to the metal mask sheet | seat 4 actually using a sample and increasing tension | tensile_strength for every predetermined amount. Therefore, when the metal mask sheet 4 is affixed to the metal mask frame 18, the metal mask sheet 4 can be affixed at an accurate position with optimum tension while referring to the relational data.

  In the above-described embodiment, as shown in FIG. 1, the longitudinal direction of the metal mask sheet 4 is set in a direction parallel to the frame 10, and tension in the direction parallel to the frame 10 is applied to the metal mask sheet 4. However, as shown in FIG. 6, the longitudinal direction of the metal mask sheet 4 is set in a direction orthogonal to the frame 10, and the tension in the direction orthogonal to the frame 10 is applied to the metal mask sheet 4. It may be given.

  The tension device 13 may be attached to both sides of the metal mask sheet 4 as shown in FIGS. 1 and 6, but when there is no need to move the position of the metal mask sheet 4, You may attach only to one side. Further, the number of tension devices 13 may be increased according to the width of the metal mask sheet 4.

  In the above-described embodiment, the appearance inspection is performed after the dimension inspection, but the dimension inspection may be performed after the appearance inspection. Further, the dimension inspection and the appearance inspection may be performed separately. Further, the measurement order in the dimension inspection is not limited to the order of long dimension measurement, short dimension measurement, and deflection measurement. Further, as the dimension measurement, not only long dimension measurement and short dimension measurement but also functions such as sheet edge straightness measurement and pattern shape measurement can be easily added by calculation processing of the inspection apparatus 2.

  In addition, the predetermined inspection tension in the above-described embodiment may be obtained based on relational data.

  In addition, in the appearance inspection of the above-described embodiment, a case where a defective portion is confirmed using a review machine is described as an example. However, a confirmation operation using a review microscope is not performed, and the control unit is a metal The presence / absence of a defect may be detected from the image data of the mask sheet 4, and the pass / fail determination of the appearance inspection may be performed based on the defect detection result.

  In the appearance inspection according to the above-described embodiment, the metal mask sheet 4 is imaged by an area camera (camera 24c provided in the appearance inspection microscope 24). A scanning method may be used. Thereby, it is possible to speed up the appearance inspection.

  Further, when the long dimension measurement is performed in the above embodiment, it is not always necessary to measure the position coordinates of the management point 4b (see FIG. 2). For example, when the metal mask sheet 4 having a dot pattern having a large number of holes arranged in a dot shape in the opening 4a is used, even if the long dimension measurement is performed by measuring the position coordinates of the holes arranged in a dot shape. Good.

  In addition, since the inspection apparatus 2 has a result output function to the outside, when the metal mask sheet manufacturer uses the inspection apparatus 2, the metal mask sheet 4 is shipped when the metal mask sheet 4 is shipped. Related data or the like may be attached to 4 as shipping inspection data.

  Moreover, in the above-mentioned embodiment, although the case where the pass / fail determination is performed based on the deviation amount, the deflection amount, and the presence / absence of a defect of the metal mask sheet 4 is described as an example, the deviation amount, the deflection amount, and the defect are described. The metal mask sheets 4 may be rank-classified according to the size and number.

  Here, when the metal mask manufacturer uses the inspection apparatus 2, the rank classification result may be directly transferred to the next process such as a sheet sticking apparatus, or the rank classification is performed via the host computer of the metal mask manufacturer. The result may be transferred to the next step. The transferred apparatus of the next process may divide the rank of the metal mask 20 to be manufactured using the rank classification result. For example, the metal mask 20 is manufactured using the metal mask sheet 4 having the same rank.

  In the above-described embodiment, the laser displacement meter 26 is used. However, a displacement meter of a system other than the laser may be used.

  Moreover, in the above-mentioned embodiment, although the case where the metal mask 20 (refer FIG. 3) is used in the manufacturing process of an organic EL element is demonstrated to an example, the metal mask 20 is a semiconductor element, a printed circuit board, a liquid crystal. It may be used in a manufacturing process of a display element or the like.

DESCRIPTION OF SYMBOLS 2 ... Inspection apparatus, 4 ... Metal mask sheet, 4a ... Opening part, 4b ... Management point, 8 ... Inspection part, 13 ... Tension device, 13c ... Movable part, 13g ... Nipping part, 13h ... Measuring part, 22 ... Dimensions Measuring microscope, 24 ... Visual inspection microscope, 26 ... Laser displacement meter

Claims (2)

At least one tension portion for applying tension to the metal mask sheet;
With respect to the metal mask sheet before being affixed to the metal mask frame by the tension unit, in the state imparted with preset predetermined test tension, dimension measuring unit for measuring the dimensions of the metallic mask sheet, said An inspection unit having a deflection measuring unit for measuring the deflection of the metal mask sheet, and an appearance inspection unit for inspecting defects in the appearance of the metal mask sheet ;
An adjustment unit that changes a tension applied to the metal mask sheet by the tension unit;
Causing the dimension measuring unit to measure the dimension of the metal mask sheet while changing the tension by the adjusting unit; and causing the deflection measuring unit to measure the deflection of the metal mask sheet while changing the tension by the adjusting unit. A control unit for executing
Based on the measurement result using the control unit, a calculation unit that calculates the relationship between the tension applied to the metal mask sheet, the elongation amount of the metal mask sheet, and the deflection amount of the metal mask sheet;
An inspection apparatus comprising: a sticking tension determining unit that determines a tension when the metal mask sheet is stuck to the metal mask frame based on a result calculated by the calculating unit. Based on the result of inspection by the inspection unit, according to claim wherein the metal mask sheet, characterized in that it comprises determining whether it is appropriate as a member for use in the production of the metal mask, or a determination unit for ranking the metal mask sheet The inspection apparatus according to 1 .

Images