JP5310982B2 - Metal mask holder - Google Patents

Description

  The present invention relates to a holder particularly suitable for inspection and conveyance in a process of manufacturing a metal mask used for manufacturing a flat display device such as an organic EL.

In recent years, flat display devices have been widely used. In particular, an organic EL display intended for high image quality including ultra-thin, low power consumption, and high-speed response is expected. Various methods have been proposed for manufacturing a panel for an organic EL display. Among them, a method of pattern-depositing an organic material on the surface of a substrate has been performed. (For example, see Patent Document 1)
JP, 2000-113979, A In pattern vapor deposition, only the part which wants to form a film selectively opens a window, and the metal mask processed to mask the part which does not need film formation is prepared beforehand, and this metal mask is made into a substrate. It is carried out by carrying out vacuum deposition in a state where the window-opened surface is placed facing the evaporation source in a vacuum, in close contact with or in close contact with.

  When manufacturing a metal mask used in the above process, many metal masks used for manufacturing an organic EL display panel require a particularly fine pattern, and usually a metal plate is processed by a photoetching method. To do. The strength of the metal mask after processing is very weak, and it becomes bent even with a slight external pressure. As an inspection method, visual appearance inspection and dimensional inspection using a length measuring machine are performed. In either case, it is necessary to apply an appropriate force in the outer peripheral direction of the metal mask to realize a pulled state and inspect it. is there. Conventionally, inspection was performed by manually pulling the metal mask. However, in the case of a fine slit-shaped pattern, if the force is insufficient, the slit-shaped metal band is twisted or the slits are cleaved, and deformation occurs if the force is excessive. It was difficult to maintain a stable state with good reproducibility.

  Also, when the metal mask is transported after processing, it is easily deformed by a slight external pressure as in the case of the above inspection.

  The present invention has been made in view of the above-mentioned problems, and the problem is that in the manufacturing process of the metal mask, particularly when fine slit-like patterns are aligned and processed. In order to prevent the deformation trouble at the time of conveyance, it is to provide an optimal holder as means for that.

According to one aspect of the present invention, a holder for a metal mask for inspection or for transporting holding the metal mask slit-like pattern having a thickness of 30~100μm were processed in alignment, the frame connecting the comprises means for clamping the metal mask to each other one side of the opposing sides of the frame body, in addition to the one side facing the means for clamping the metal mask, the clamping means and the frame A tensioning means for applying tension in the outer circumferential direction parallel to the metal mask surface, and the other of the frame body so that the tension applied in the outer circumferential direction parallel to the metal mask surface is in two different directions. One side of the pair of sides facing each other has means for holding the metal mask, and the other side facing each other is given tension in the outer peripheral direction parallel to the means for holding the metal mask and the metal mask surface , and , to connect the clamping means and the frame A holder for a metal mask and having a Zhang fastening means of the fit.

  According to the metal mask holder of the present invention, in order to hold the metal mask in a flat plate shape with appropriate and uniform tension, an inspection is performed particularly on a metal mask in which fine slit-shaped patterns are aligned and processed. It can be carried out accurately. That is, twisting, opening, and deformation are prevented in the appearance inspection, and the length measurement accuracy is improved. Further, deformation troubles during conveyance can be prevented. In both inspection and transport processes, the object is fixed to a strong frame with uniform tension, so the entire object can be handled as if it were a solid flat plate. Therefore, it is possible to carry out inspection and transportation without special consideration even when it is performed manually. Furthermore, as a result of the above, it is possible to contribute to the improvement of the quality of the metal mask and to increase the production yield of a flat display device such as an organic EL.

  First, a brief description will be given according to the metal mask manufacturing process. Depending on the size of the panel, a metal mask sheet with multiple panels will be produced. As the material of the metal plate, an invar material or the like with a plate thickness of about 30 to 100 μm is used. After patterning the resist by a photolithography process with the main processes of application, exposure, and development using a photosensitive acid-resistant resist, ferric chloride solution is used as the etchant to etch the metal at the window opening, and an alkaline solution The resist is stripped using as a stripping solution. As an example of a fine pattern, a 12-sided multi-sided metal mask is formed with a thickness of 50 μm, a slit-like pattern having a line width of 40 μm, a line interval of 180 μm, a slit length of 70 mm, and a slit row width of 100 mm as one unit. . If necessary, the entire cut part is transferred to the inspection process. Here, the metal mask holder according to the present invention is used. Hereinafter, it demonstrates according to drawing.

  FIG. 1 is an explanatory plan view showing an outline of an embodiment of a holder to which a metal mask is attached. The metal mask 1 has one or more metal mask pattern processing portions 3 and is coupled to the frame 2 at the peripheral portion. The frame 2 is composed of one side 21, 22, 23, 24 of the frame. Although the connection part of the metal mask and the frame includes at least a pair of two sides facing each other, FIG. 1 shows a connection part of two pairs and four sides. The number and position of the coupling points depends on the overall design of the metal mask, starting with the metal mask pattern processing portion, but in the case of a set of slit patterns, priority is given to the coupling points that apply tension in the slit direction. The frame 2 needs to have a sufficiently strong material and form compared to the metal mask 1, but it is also desirable to reduce the weight as much as possible in consideration of ease of handling. Aluminum materials are also suitable for use.

  FIG. 2 is a cross-sectional explanatory diagram (XX ′ cross-sectional explanatory diagram of FIG. 1) showing an outline of an embodiment of a holder to which a metal mask is attached. One of the configurations of the coupling portion is connected to the clamping means 61 via an L-shaped fixture 51 that is continuous with one side 21 of the frame body, and its tip end sandwiches one side of the metal mask 1. The other of the configuration of the coupling portion is the other holding means 62 sandwiching the opposite sides of the metal mask, and the fulcrum equivalent portion 82 of the holding means is fixed in an L shape that is continuous with the one side 22 on the opposite side of the frame. It is connected to the tool 52 via the sticking means 72.

  The L-shaped fixtures 51 and 52 are a means for connecting the frame and the clamping means or the tensioning means, and other connecting methods are possible.

  When the metal mask 1 is fixed, the tensioning means 72 is devised so as to give a constant tension and be uniform in each part of the side of the metal mask. A so-called spring or a spring is used for the tensioning means 72, and the tensioning means 72 is divided into a plurality of parts, although not shown in the figure, in order to give a uniform tension to the entire side of the metal mask. Or the rigidity of the fulcrum equivalent portion 82 or the L-shaped fixture 52 of the clamping means to be connected is increased so that the transmission of force from the tensioning means 72 is uniform. As the magnitude of the tension applied to the side of the metal mask, about 0.5 to 0.6 N / mm is appropriate.

  Various types of springs and springs can be used as the tensioning means, and the elasticity of rubber may be used. In the tension means 72 that connects the L-shaped fixture 52 and the clamping means 62 connected to the frame body 22 in a tensioned state, the mechanism of each connection point is particularly important. For springs and springs, you can use a spring coil or a spring coil with a hook that is generally available. However, the hook attachment method is matched to the specific properties of the L-shaped fixture or clamping means as the attachment destination. Decide. In addition, since the entire holder is used as a plane plate as much as possible, a structure that is as flat as possible in parallel with the metal mask plane is optimal.

  The clamping means 61, 62, 63, 64 have a mechanism for securely clamping the metal mask 1 with a uniform force, and can use a spring material, but a simple configuration in which the metal mask 1 is sandwiched between both sides by a plate material is also possible. is there. However, since it is also a portion where tension is applied, a sandwiching mechanism is necessary in which the metal mask does not shift or come off and come off.

  As described in the above description, the embodiment of the present invention is a holder for holding a metal mask, and the metal mask is sandwiched between the frame and one side of the frame facing each other. A holding means for holding the metal mask on the other side opposite to each other and a tensioning means for applying tension in the outer peripheral direction parallel to the metal mask surface. The direction in which tension is applied is one direction. In order to fix the metal mask in a tensioned state, when the metal mask pattern processing part is an assembly of slit patterns, a tension is applied in the slit direction and the mechanism of the connecting portion is made so that the transmission of the tension is uniform. Consider.

  In addition to the above embodiment, another embodiment of the present invention opposes the other pair of the frame body so that the tension applied in the outer peripheral direction parallel to the metal mask surface is two different directions. One side has a means for sandwiching the metal mask, and the other opposite side has a means for sandwiching the metal mask and a tension means for applying tension in the outer peripheral direction parallel to the metal mask surface. A metal mask holder characterized by having a tension in two directions. In this case as well, the mechanism of the connecting portion is considered so that the transmission of the tension is uniform. Although it is easier to achieve uniform tension in the metal mask surface by using two different tensions instead of one direction, the mechanism of the holder becomes more complicated and the number of adjustment points increases, so the pattern shape and size It may be selected according to various conditions such as required flatness.

  In another embodiment of the present invention, as described above, the metal mask is applied in one or two directions, and the tension is applied in the outer peripheral direction parallel to the metal mask surface, and the metal mask is attached to the holder. The mask is inspected.

  In another embodiment of the present invention, as described above, the metal mask is applied in one or two directions, and the tension is applied in the outer peripheral direction parallel to the metal mask surface, and the metal mask is attached to the holder. The mask is conveyed.

As for the former inspection, in the appearance inspection, the above-described mounted metal mask is placed in an environment where observation is easy with an auxiliary device that substitutes for the function of a hand or a person's arm, and unevenness and defects are visually inspected. For the details of the observation method with appropriate illumination and angle setting for observation and movement such as rotation, a conventional method for handling a solid object can be applied as it is. Also in the length measurement inspection, the conventional method can be applied as it is because the strong frame body defines the outer shape and the length to be measured is flat.

  Furthermore, as for the latter transportation, the mounted metal mask can be handled as if it is a solid flat plate because of its strong frame, so that it can be handled by both conventional and automatic transportation. A method of handling a solid object can be applied almost similarly.

  Moreover, although the metal mask holder of the present invention has an embodiment in which the frame opening 4 is surrounded by the frame 2, even if the frame opening is physically blocked, for example, transmission In the inspection by light illumination, there is no inconvenience if it is covered with a transparent plate. In the inspection and transport using reflected light illumination, generally even transparency is not essential. If there is no problem in strength, for example, a form in which a transparent acrylic plate is used as a support plate that also serves as a frame can be easily considered.

It is plane explanatory drawing which shows the outline | summary of embodiment of the holder which attached the metal mask.

It is a section explanatory view (XX 'section explanatory view of Drawing 1) showing an outline of an embodiment of a holder which attached a metal mask.

Explanation of symbols

1 .... Metal mask 2 .... Frame 3 ... Metal mask pattern processing part 4 .... Frame body openings 21, 22, 23 24, one side of the frame 51, 52, 53, 54 ... L-shaped fixtures 61, 62, 63, 64 ... clamping means 72, 74 ... Means 81, 82..., Fulcrum equivalent part of clamping means

Claims (1)

A holder for a metal mask for inspection or for conveying slit-like pattern having a thickness of 30~100μm holds the metal mask that has been processed in alignment, a frame body, facing each other of the frame member and means for holding the metal mask on the one side edge, opposed to the other one side of, and means for holding the metal mask, for connecting the clamping means and the frame, parallel to the outer periphery and the metal mask surface One side of the other pair of opposite sides of the frame so that there are two different directions of tension applied in the outer circumferential direction parallel to the metal mask surface. Has a means for clamping the metal mask, tension is applied to the opposite one side of the metal mask and the outer peripheral direction parallel to the metal mask surface , and the clamping means and the frame are connected. and a it is because of Zhang wear means Holder for a metal mask, wherein the door.

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