CN103668050A - Assembling method of mask component - Google Patents
Assembling method of mask component Download PDFInfo
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- CN103668050A CN103668050A CN201210329233.7A CN201210329233A CN103668050A CN 103668050 A CN103668050 A CN 103668050A CN 201210329233 A CN201210329233 A CN 201210329233A CN 103668050 A CN103668050 A CN 103668050A
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Abstract
The invention discloses an assembling method of a mask component, which comprises the following steps: S1, preparing a mask framework, placing the mask framework on an assembling platform, and ensuring that an inner frame and a reinforcement bar of the mask framework are aligned and placed properly by an alignment and support mechanism; S2, fixing a tightening net, tightening a mask part through a tightening net device to ensure that the mask part clings to a mask fixing surface of the mask framework, and fixing the tightened mask part on the inner frame of the mask framework; and S3, adjusting a connection mechanism, further finely adjusting a welded and fixed mask component, and ensuring that the mask part has better surface smoothness and higher pattern positioning accuracy. According to the assembling method of a mask component, the problem of mask plate sinking can be effectively solved, the printing accuracy and quality can be improved, and the yield of final products can be effectively increased.
Description
Technical field
The present invention relates to electronic printing field, relate in particular to a kind of assemble method of mask assembly.
Background technology
Compare with existing LCD technology, utilizing the made indicating meter of organic light emitting diode (OLED) technology not only to have can true color, the reaction times is fast, high brightness (100 ~ 14,000cd/m
2), the above visual angle of high luminous efficiency (16 ~ 38lm/W), 170 degree, LCD ghost as none, can be made into large size and flexibility panel, can be in the scopes of-30 degree ~ 80 degree Celsius the advantage such as operation, and processing procedure simply, integral thickness also can be contracted to below 1mm, cost more only has 30 ~ 40% of TFT-LCD.Therefore, utilize the made indicating meter of OLED technology firmly getting society's welcome.
At present, the made indicating meter of OLED technology has reached volume production technology in small size, and comparatively ripe.But for by manufacture a plurality of OLED indicating meters to realize the raising of output simultaneously, or produce large-sized OLED indicating meter, just need to increase the size of the large substrate of tradition, just must increase the size for the mask assembly of evaporation organic materials accordingly.
Shown in Figure 14, be that tradition is for the structural representation of the mask assembly of evaporation organic materials, it comprises housing 11 and is fixed on the mask portion 12 on housing 11 by solder joint 120, mask portion 12 is welded on housing 11 by applying at two ends after pulling force is tightened, and discharges pulling force after welding.During mask assembly horizontal positioned, because mask portion 12 bounces back in the other direction and causes housing 11 Shang Xia (in Figure 14 up and down orientation) support section to occur the phenomenon of indent shown in figure along original pulling force, thereby make mask portion 12 occur sagging (particularly mask portion 12 region intermediates), the consequence so causing is that pattern position precision, the size that evaporation obtains relatively all can have certain deviation, thereby affects quality and the yield of product.
Chinese Patent Application No. is 2010101136655 to disclose a kind of mask assembly and for using the depositing device of the flat-panel monitor of this mask assembly, its primary structure is: on the housing of mask assembly, be provided with the support stick of the open area forming across housing, thereby reduce the sag of chain of mask portion.The Chinese patent patent No. provides a kind of mask for the manufacture of large size display panel for 01138161.2, and it comprises: have the main frame in a plurality of holes, in the hole that is assemblied in main frame according to the size that will manufacture and pattern from mask.With upper type, have certain effect realizing in OLED indicating meter volume production, but there is certain limitation making on large size display screen.
Summary of the invention
In view of this, need to overcome at least one in above-mentioned defect of the prior art.The invention provides a kind of assemble method of mask assembly.
The assemble method of a kind of mask assembly provided herein, specifically comprises the following steps:
S1: mask frame contraposition is installed: described mask frame is placed on assembly platform, the inside casing of described mask frame and strengthening bar are correctly placed by the contraposition of contraposition supporting mechanism;
S2: the mask portion net that stretches tight is fixing: tighten and make mask portion to be close to the mask fixed face of described mask frame described mask portion by the net arrangement that stretches tight, the described mask portion tightening is fixed on the inside casing of described mask frame;
S3: mask plate tension force fine setting: by adjusting connection mechanism, the further mask assembly of fine setting after fixing, makes described mask portion surface finish better, and pattern position precision is more accurate.
In addition, according to the assemble method of a kind of mask assembly disclosed by the invention, also there is following additional technical feature:
According to embodiments of the invention, in step S1, further, mask frame is placed horizontally on assembly platform, connection mechanism is adjusted to relaxed state, adjusts contraposition supporting mechanism position, make in contraposition, to be close to state between described contraposition supporting mechanism, now, between described inside casing and strengthening bar, there is spacing.
According to embodiments of the invention, in step S2, further, described mask portion is that monolithic mask plate or polylith mask unit are spliced.
According to embodiments of the invention, in step S2, further, adopt stretch tight net mode or the polygon net mode that stretches tight of two ends to stretch tight and draw mask portion.
In the present invention, can stretch tight net mode or the polygon net mode that stretches tight to the monolithic mask plate net that stretches tight with two ends, but the mask portion being spliced for polylith mask unit needs to adopt the polygon net mode that stretches tight to carry out.Preferably, adopt the polygon net mode that stretches tight to the monolithic mask plate net that stretches tight.
According to embodiments of the invention, in step S2, further, before described mask portion is fixing, need to locate by locating mechanism, make the relatively described mask frame of described mask portion there is accurately location.
According to embodiments of the invention, in step S2, further,
Can be
S21: described mask portion is monolithic mask plate, network process only need once stretch tight;
Or
S22: described mask portion is spliced by polylith mask unit, needs to comprise the net fixation procedure that repeatedly stretches tight, until all described mask unit stretch tight, net fixedly completes.
According to embodiments of the invention, in step S2, further, described fixed form is the alternate manners such as laser welding fixed form or glue is bonding.
More preferably, fixed form is laser welding fixed form.
According to embodiments of the invention, in step S3, further, described connection mechanism comprises screw, by cooperation, rotate governing screw, make to recover to a certain extent the state before deformation at stretch tight leave behind one group of opposite side 211 of inside casing of distortion of mask portion, thus the sag of chain of corresponding minimizing mask portion, when governing screw, need to monitor constantly the mask assembly parameter of the final results of use of impact such as positional precision, opening size of pattern in mask portion.
In step S3, preferably, described screw is fine groove screw.
Described fine groove screw not only can be born larger anchorage force, and can to described mask portion, carry out meticulousr adjusting according to corresponding pulling force.
According to embodiments of the invention, in step S3, further,
Can be:
When mask portion is single mask plate, described connection mechanism, by order governing screw, carries out tension adjustment to mask plate;
Or:
When mask portion is a plurality of splicing mask unit, described connection mechanism can adopt first intermediate regulations, then regulates at a side specific position of axis, then regulates to take the opposite side correspondence position that axis is mirror image, regulates so successively.
A kind of concrete structure of mask frame of the related mask assembly of above step and formation mask assembly is as described below:
The related mask frame of this patent mainly comprises: inside casing, strengthening bar and for connect inside casing, strengthening bar connection mechanism.Wherein inside casing comprises two groups of opposite side, and described two groups of opposite side form a sealing rectangular frame, and described opposite side can be one-body molded, or by the interconnecting piece structure that links into an integrated entity.Between described inside casing and strengthening bar, also there is contraposition supporting mechanism, symmetrical mechanism can be that the setting of certain described raised structures and sunk structure also can be replaced between described opposite side and described strengthening bar near near the raised structures that is provided with sunk structure two ends, opposite side outer or two ends and arranges the two ends of strengthening bar correspondence position or two ends.After sunk structure and raised structures align and coincide, between described inside casing and strengthening bar, there is certain spacing.
Described in the related mask assembly of this patent, connection mechanism comprises screw, preferably, the screw using is fine groove screw, its cooperation by the limit with described inside casing is combined with described strengthening bar, due to the effect of described contraposition supporting mechanism, between the outer, limit of described inside casing and described strengthening bar inner side, form certain spacing.
Described connection mechanism also comprises the corresponding pairing hole connecting for screw that is provided with on one group of opposite side of described inside casing, strengthening bar, wherein preferably, on one group of opposite side of described inside casing, is set to tapped bind hole, on strengthening bar, is set to cylinder ladder hole.Arrange according to certain rules in described pairing hole on one group of opposite side of described inside casing, strengthening bar length direction, preferably, two ends are sparse arranges for middle closely collection; Or evenly arrange or middle sparse two ends intensive.
Described strengthening bar also comprises the raised platform that side arranges, the limit lower surface close contact of described raised platform and described inside casing, and while covering described mask frame horizontal positioned, described raised platform plays the effect of supporting described inside casing; Further, the inner side on the limit of described raised platform and described inside casing is provided with chamfering structure, is so designed with the evaporate process that is beneficial to luminous organic material.
Between one side of described inside casing and strengthening bar, can also comprise the spring structure that keeps stable between inside casing and strengthening bar.
Related mask frame can also be included in two groups of support bars that opposite side difference is parallel inside setting and formation mask frame inside casing of mask frame herein, thereby the size that mask assembly can be in the past larger is developed.Spacing between described inside casing and described strengthening bar can design as required
The mask assembly that this patent is related, it comprises: the described mask frame that this patent is related and mask portion, described mask portion is fixed on described mask frame.Described mask portion can be that polylith mask unit is spliced, and can be also integrated monolithic mask plate; Described mask portion is bonding by glue, laser welding or alternate manner are fixed on the inside casing of described mask frame.
The aspect that the present invention is additional and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become from the following description of the accompanying drawings of embodiments and obviously and easily understand, wherein:
Fig. 1 is the fixedly schematic diagram of net that stretches tight;
Fig. 2 is the embodiment schematic diagram of a kind of mask frame of the present invention;
Fig. 3 is 20 part enlarged diagrams in Fig. 2;
Fig. 4 is that Fig. 4 is one embodiment of the invention mask frame overall plan view;
Fig. 5 is for being 41 part enlarged diagrams in Fig. 4;
Fig. 6 is 42 region A-A schematic cross-sections in Fig. 4;
Fig. 7 Fig. 7 is the structural representation of mask assembly;
Fig. 8 is schematic cross-section shown in S-S direction in Fig. 7;
Fig. 9 is 81 part enlarged diagrams in Fig. 8;
It shown in Figure 10, is a kind of improvement mechanism of structure shown in Fig. 9;
Figure 11 is for being another kind of embodiment of the present invention;
Figure 12 is for being another kind of embodiment of the present invention;
Figure 13 is the enlarged diagram for 215 regions in Figure 12;
Shown in Figure 14, be that tradition is for the structural representation of the mask assembly of evaporation organic materials;
The assemble method schema of a kind of mask assembly of Figure 15.
Wherein, in Fig. 1,10 is mask fixed face, and F is the application of force direction that stretches tight and net;
In Fig. 2,20 for treating magnification region, and 21 is inside casing, and 22 is strengthening bar, 23Wei connection mechanism, and 211,212 is opposite side;
In Fig. 3,31 is contraposition supporting mechanism, and 32 is contraposition supporting mechanism;
In Fig. 4,41 for treating amplifier section, and 42 for treating anatomic region, and 43 is the pairing hole for connecting inside casing 21 and strengthening bar 22;
In Fig. 5, d is the spacing between inside casing 21 and strengthening bar;
In Fig. 7,24 is mask portion, and 241 is fixed connection structure;
In Fig. 8,81 for treating magnification region;
In Fig. 9,221 is strengthening bar 22 upper process platforms, and 2110 is inside casing 211 inner side chamfering structures, and 2210 is strengthening bar 221 inner side chamfering structures;
In Figure 10,10 is elastomeric element;
In Figure 11,213 for being fixed on the transverse support bar on inside casing;
In Figure 12,214 for to be fixed on the vertical supporting bar on inside casing, and 215 for treating magnification region;
In Figure 14,11 is housing, and 120 is solder joint, and 12 is mask portion.
?
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, only for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " on ", orientation or the position relationship of the indication such as D score, " end ", " top ", 'fornt', 'back', " interior ", " outward ", " horizontal stroke ", " erecting " be based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, rather than indicate or imply that the device of indication or element must have specific orientation, with specific orientation, construct and operation, therefore can not be interpreted as limitation of the present invention.
In description of the invention, it should be noted that, unless otherwise clearly defined and limited, term " connection ", " connection ", " being connected ", " connection " should be interpreted broadly, and for example, can be to be fixedly connected with, connecting integratedly, can be also to removably connect; It can be the connection of two element internals; Can be to be directly connected, also can indirectly be connected by intermediary, for the ordinary skill in the art, can particular case understand above-mentioned term concrete meaning in the present invention.
Inventive concept of the present invention is as follows, because existing mask stretches tight in network technology, there will be the sagging problem of large size mask plate producing large size panel, when size is larger, to the precision of product, quality, all can make a big impact, and reduces good article rate simultaneously.The assemble method of a kind of mask assembly provided by the invention passes through S1: mask frame contraposition is installed, mask portion stretches tight to net and fixes, S3: mask plate tension force trim step causes aduncate opposite side to apply contrary external force to mask frame because the net that stretches tight produces internal-direction-force, reduce curved degree in it, and then improve precision and the quality of product; Meanwhile, when size further strengthens, can increase support bar to mask frame and corresponding mask assembly thereof, strengthen and reduce the more sagging ability of large size mask plate, making to manufacture more large size panel becomes possibility.
Describe below with reference to accompanying drawings the assemble method of mask assembly of the present invention and the mask frame relating to and mask assembly are carried out to respective description, wherein Fig. 1 is the fixedly schematic diagram of net that stretches tight; Fig. 2 is the embodiment schematic diagram of a kind of mask frame of the present invention; Fig. 4 is that Fig. 4 is one embodiment of the invention mask frame overall plan view; Fig. 7 is the structural representation of mask assembly; It shown in Figure 10, is a kind of improvement mechanism of structure shown in Fig. 9; Figure 11 is for being another kind of embodiment of the present invention; Figure 12 is for being another kind of embodiment of the present invention; Shown in Figure 14, be the structural representation of traditional mask assembly for evaporation organic materials, Figure 15 is the assemble method schema of a kind of mask assembly of Figure 15.
According to embodiments of the invention, a kind of assemble method of mask assembly, as shown in Fig. 1-15,
S1: mask frame contraposition is installed: described mask frame is placed on assembly platform, the inside casing 21 of described mask frame and strengthening bar 22 are correctly placed by 31,32 contrapositions of contraposition supporting mechanism;
S2: the mask portion net that stretches tight is fixing: tighten and make mask portion 24 to be close to the mask fixed face of described mask frame described mask portion 24 by the net arrangement that stretches tight, the described mask portion tightening is fixed on the inside casing 21 of described mask frame;
S3: mask plate tension force fine setting: by adjusting connection mechanism 23, the further mask portion 24 of fine setting after fixing, makes described mask portion 24 surface finishs better, and pattern position precision is more accurate.
In addition, according to the assemble method of a kind of mask assembly disclosed by the invention, also there is following additional technical feature:
According to embodiments of the invention, in step S1, further, mask frame is placed horizontally on assembly platform, connection mechanism 23 is adjusted to relaxed state, adjusts contraposition supporting mechanism 31,32 positions (shown in Fig. 3), make in contraposition, to be close to state between described contraposition supporting mechanism 31,32, now, between described inside casing 21 and strengthening bar 22, there is spacing d.As shown in Figure 4.
According to embodiments of the invention, in step S2, further, and described mask, the 24th, monolithic mask plate or polylith mask unit is spliced, the mask portion 24 that polylith mask unit is spliced is shown in Figure 1.
According to embodiments of the invention, in step S2, further, adopt stretch tight net mode or the polygon net mode that stretches tight of two ends to stretch tight and draw mask portion 24, net mode is stretched tight referring to Fig. 1 in two ends.
In the present invention, can stretch tight net mode or the polygon net mode that stretches tight to the monolithic mask plate net that stretches tight with two ends, but the mask portion being spliced for polylith mask unit needs to adopt the polygon net mode that stretches tight to carry out.Preferably, adopt the polygon net mode that stretches tight to the monolithic mask plate net that stretches tight.
According to embodiments of the invention, in step S2, further, before described mask portion 24 is fixing, need to locate by locating mechanism, make described mask portion 24 relatively described mask frames there is accurately location.
According to embodiments of the invention, in step S2, further,
Can be
S21: described mask portion 24 is monolithic mask plates, network process only need once stretch tight;
Or
S22: described mask portion 24 is spliced by polylith mask unit, needs to comprise the net fixation procedure that repeatedly stretches tight, until all described mask unit stretch tight, net fixedly completes, as shown in Figure 3, each mask plates unit net that all needs to stretch tight is fixed.
According to embodiments of the invention, in step S2, further, described fixed form is the alternate manners such as laser welding fixed form or glue is bonding.
More preferably, fixed form is laser welding fixed form.
According to embodiments of the invention, in step S3, further, described connection mechanism 23 comprises screw, as shown in Fig. 6,9,10, by cooperation, rotates governing screw, make mask portion 24 stretch tight leave behind distortion 21 1 groups of opposite side 211 of inside casing recover to a certain extent the state before deformation, thereby the sag of chain of corresponding minimizing mask portion 24, when governing screw, need to monitor the mask assembly parameter of the final results of use of impact such as positional precision, opening size of pattern in mask portion 24 constantly.
In step S3, preferably, described screw is fine groove screw.
Described fine groove screw not only can be born larger anchorage force, and can to described mask portion, carry out meticulousr adjusting according to corresponding pulling force.
According to embodiments of the invention, in step S3, further,
Can be:
When mask portion is single mask plate, described connection mechanism 23, by order governing screw, carries out tension adjustment to mask plate;
Or:
When mask portion is a plurality of splicing mask unit, described connection mechanism can adopt first intermediate regulations, then regulates at a side specific position of axis, then regulates to take the opposite side correspondence position that axis is mirror image, regulates so successively.
A kind of concrete structure of mask frame of the related mask assembly of above step and formation mask assembly is as described below:
The related mask frame of this patent mainly comprises: inside casing 21, strengthening bar 22 and for connect inside casing, strengthening bar connection mechanism 23.Wherein inside casing comprises two groups of opposite side 211,212, and described two groups of opposite side 211,212 form a sealing rectangular frame, and described opposite side can be one-body molded, or by the interconnecting piece structure that links into an integrated entity.Between described inside casing 21 and strengthening bar 22, also there is contraposition supporting mechanism, symmetrical mechanism can be that the setting of certain described raised structures 32 and sunk structure 31 also can be replaced between described opposite side and described strengthening bar near near the raised structures 32 that is provided with sunk structure 31 two ends, opposite side outer or two ends and arranges the two ends of strengthening bar correspondence position or two ends.After sunk structure and raised structures align and coincide, between described inside casing and strengthening bar, there is certain spacing d, as shown in Figure 3,4.Preferably, the sunk structure 31 in the present embodiment is concentric cylinder with raised structures 32, and radius is identical, and after cooperation, the two can realize coincidence; Certainly, contraposition supporting mechanism can be also the structure that other type has function of the same race.
Described in the related mask assembly of this patent, connection mechanism 23 comprises screw, as shown in Figure 6, preferably, the screw using is fine groove screw, it coordinates and described strengthening bar 23 combinations by the limit with described inside casing, due to the effect of described contraposition supporting mechanism 31,32, between the outer, limit of described inside casing 21 and described strengthening bar 22 inner sides, form certain spacing d.
As shown in Figure 4, described connection mechanism 23 also comprises the corresponding pairing hole 43 connecting for screw that is provided with on 21 1 groups of opposite side 211 of described inside casing, strengthening bar 22, wherein preferably, on one group of opposite side 211 of described inside casing 21, be set to tapped bind hole, on strengthening bar 22, be set to cylinder ladder hole.Arrange according to certain rules in described pairing hole 43 on one group of opposite side 211 of described inside casing 21, strengthening bar 22 length directions, preferably, as shown in Figure 4, two ends are sparse arranges for middle closely collection; Or evenly arrange or middle sparse two ends intensive.
Described strengthening bar 22 also comprises the raised platform 221 that side arranges, as shown in Figure 8, the limit lower surface close contact of described raised platform 221 and described inside casing 21, when described mask frame horizontal positioned, described raised platform 221 plays the effect of supporting described inside casing 21; Further, described raised platform 221 is provided with chamfering structure 2210,2110 with the inner side on the limit of described inside casing 21, is so designed with the evaporate process that is beneficial to luminous organic material.
Between one side of described inside casing 21 and strengthening bar 22, can also comprise 22 stable spring structures 10 of maintenance inside casing 21 and strengthening bar.
Related mask frame can also be included in two groups of support bars 213,214 that opposite side difference is parallel inside setting and formation mask frame inside casing of mask frame herein, thereby the size that mask assembly can be in the past larger is developed.Spacing d between described inside casing 21 and described strengthening bar 22 can design as required.
The mask assembly that this patent is related, it comprises: the described mask frame that this patent is related and mask portion 24, described mask portion 24 is fixed on described mask frame.Described mask portion 24 can be that polylith mask unit is spliced (as shown in Figure 1), can be also integrated monolithic mask plate; Described mask portion 24 is bonding by glue, laser welding or alternate manner are fixed on the inside casing of described mask frame.As shown in Figure 7, described mask portion 24 consists of one group of bar shaped mask unit being arranged in parallel, and its two ends are fixedly connected on by fixed connection structure 241 on the inside casing 21 of mask frame, and preferably, described fixed connection structure 241 is laser welding.
Concrete member, structure or feature that any mentioning " embodiment ", " embodiment ", " illustrative examples " etc. mean to describe in conjunction with this embodiment are contained at least one embodiment of the present invention.In this schematic statement everywhere of this specification sheets, not necessarily refer to identical embodiment.And, when describing concrete member, structure or feature in conjunction with any embodiment, advocate, within realizing in conjunction with other embodiment the scope that such member, structure or feature all drop on those skilled in the art.
Although the specific embodiment of the present invention is described in detail with reference to a plurality of illustrative examples of the present invention, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, and these improve and within embodiment will drop on spirit and scope.Particularly, within the scope of aforementioned open, accompanying drawing and claim, can aspect the layout of component and/or subordinate composite configuration, make rational modification and improvement, and can not depart from spirit of the present invention.Except modification and the improvement of component and/or layout aspect, its scope is limited by claims and equivalent thereof.
Claims (10)
1. an assemble method for mask assembly, is characterized in that, comprising:
S1: mask frame contraposition is installed: described mask frame is placed on assembly platform, the inside casing of described mask frame and strengthening bar are correctly placed by the contraposition of contraposition supporting mechanism;
S2: the mask portion net that stretches tight is fixing: tighten and make mask portion to be close to the mask fixed face of described mask frame described mask portion by the net arrangement that stretches tight, the described mask portion tightening is fixed on the inside casing of described mask frame;
S3: mask plate tension force fine setting: by adjusting connection mechanism, the further mask assembly of fine setting after fixing, makes described mask portion surface finish better, and pattern position precision is more accurate.
2. the assemble method of mask assembly according to claim 1, is characterized in that, in step S1, and S11:
Mask frame is placed horizontally on assembly platform, and connection mechanism is adjusted to relaxed state, adjusts contraposition supporting mechanism position, makes in contraposition, to be close to state between described contraposition supporting mechanism, now, between described inside casing and strengthening bar, has spacing.
3. the assemble method of mask assembly according to claim 1, is characterized in that, in step S2, described mask portion is that monolithic mask plate or polylith mask unit are spliced.
4. the assemble method of mask assembly according to claim 1, is characterized in that, in step S2, adopts stretch tight net mode or the polygon net mode that stretches tight of two ends to stretch tight and draw mask portion.
5. the assemble method of mask assembly according to claim 1, is characterized in that, in step S2, before described mask portion is fixing, needs to locate by locating mechanism, makes the relatively described mask frame of described mask portion have accurately location.
6. the assemble method of mask assembly according to claim 1, is characterized in that, in step S2, can be
S21: described mask portion is monolithic mask plate, network process only need once stretch tight;
Or
S22: described mask portion is spliced by polylith mask unit, needs to comprise the net fixation procedure that repeatedly stretches tight, until all described mask unit stretch tight, net fixedly completes.
7. the assemble method of mask assembly according to claim 1, is characterized in that, in step S2, described fixed form is the alternate manners such as laser welding fixed form or glue is bonding.
8. the assemble method of mask assembly according to claim 1, it is characterized in that, in step S3, described connection mechanism comprises screw, by cooperation, rotate governing screw, make to recover to a certain extent the state before deformation at stretch tight leave behind one group of opposite side 211 of inside casing of distortion of mask portion, thus the sag of chain of corresponding minimizing mask portion, when governing screw, need to monitor constantly the mask assembly parameter of the final results of use of impact such as positional precision, opening size of pattern in mask portion.
9. the assemble method of mask assembly according to claim 7, is characterized in that, in step S3, described screw is fine groove screw.
10. the assemble method of mask assembly according to claim 7, is characterized in that, in step S3, can be:
When mask portion is single mask plate, described connection mechanism, by order governing screw mode, carries out tension adjustment to mask plate;
Or:
When mask portion is a plurality of splicing mask unit, described connection mechanism can adopt first intermediate regulations, then regulates at a side specific position of axis, then regulates to take the opposite side correspondence position that axis is mirror image, regulates so successively.
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CN108878327A (en) * | 2018-07-02 | 2018-11-23 | 京东方科技集团股份有限公司 | Carry board and its control method |
CN108878327B (en) * | 2018-07-02 | 2020-07-28 | 京东方科技集团股份有限公司 | Bearing machine platform and control method thereof |
CN109825802A (en) * | 2019-04-10 | 2019-05-31 | 京东方科技集团股份有限公司 | Mask plate and preparation method thereof |
CN109825802B (en) * | 2019-04-10 | 2021-01-26 | 京东方科技集团股份有限公司 | Mask plate and preparation method thereof |
CN112427875A (en) * | 2021-01-28 | 2021-03-02 | 上海精骊电子技术有限公司 | Clamping device of net-opening machine |
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