CN112427875A - Clamping device of net-opening machine - Google Patents
Clamping device of net-opening machine Download PDFInfo
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- CN112427875A CN112427875A CN202110115555.0A CN202110115555A CN112427875A CN 112427875 A CN112427875 A CN 112427875A CN 202110115555 A CN202110115555 A CN 202110115555A CN 112427875 A CN112427875 A CN 112427875A
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- clamping
- stage
- clamping jaw
- driving mechanism
- metal mask
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0426—Fixtures for other work
- B23K37/0435—Clamps
- B23K37/0443—Jigs
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/22—Nets, wire fabrics or the like
Abstract
The invention relates to a clamping device of a net-opening machine, which comprises two groups of clamping structures and two clamping jaw tables; the two groups of clamping structures are oppositely arranged along the X direction, and each group of clamping structures comprises at least 2 clamping jaw assemblies which are arranged side by side along the Y direction; a Y-direction translation mechanism for driving the clamping jaw assembly to move in the Y direction is arranged below each clamping jaw assembly; the Y-direction translation mechanism is arranged on the clamping jaw table; the clamping jaw assembly comprises two stages of X-direction driving mechanisms which are respectively used for carrying out X-direction coarse adjustment and fine adjustment on the position of the fine metal mask plate; the Y-direction translation mechanism comprises two stages of Y-direction driving mechanisms which are respectively used for carrying out Y-direction coarse and fine adjustment on the position of the fine metal mask plate. When the clamping device works, the X-direction and Y-direction stretching of the fine metal mask plate is achieved by adopting two-stage driving mechanisms, the two-stage driving mechanisms respectively conduct coarse adjustment and fine adjustment on the position of the fine metal mask plate, double-freedom-degree and high-precision position adjustment is achieved, Y-direction position adjustment is added, and the effect of reducing wrinkles can be achieved.
Description
Technical Field
The invention relates to the field of display panel manufacturing equipment, in particular to a clamping device of a net tensioning machine.
Background
An Organic Light Emitting Diode (OLED) display panel is a panel using OLEDs as display pixels. Compared with the traditional liquid crystal display panel, the OLED display panel is more and more popular in the market due to the advantages of self-luminescence, low power consumption, good color effect, capability of being used for flexible display and the like.
The OLED light emitting device is generally manufactured by evaporating an organic material onto a substrate (e.g., a TFT substrate in an AM-type panel). The organic material evaporation usually requires the use of a Mask plate such as a Common Fine Metal Mask (CMM) or a Fine Metal Mask (FMM), and the Mask plate is usually disposed on a Metal frame and placed in an evaporation machine for use, wherein the Fine Metal Mask plate mesh plate and the Fine Metal Mask plate frame are generally welded together. The fine metal mask plate screen plate is a plurality of screen plates, and is clamped by clamping jaws one by one during screen stretching, is adjusted to a preset position by stretching and moving, and is welded on a metal frame. The clamping mechanism in the existing foreign net tensioning equipment is generally simple in design, only has one degree of freedom in the stretching direction generally, the driving unit for position adjustment cannot give consideration to the stroke and the precision, hysteresis exists during adjustment, and the position repeatability is poor. The wrinkle problem of the mask plate in the stretching process cannot be effectively reduced, the mask plate has obvious influence on the display performance of the OLED light emitting layer obtained by evaporation, and then the subsequent evaporation process is influenced, so that the yield of the product is reduced.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention provides the clamping device of the screen expanding machine with more freedom of movement and higher precision, the clamping device improves the freedom degree and the displacement adjustment precision of the clamping jaw which can be adjusted in the screen expanding process, can reduce the position deviation value of the pixel hole and the wrinkle problem of the mask plate in the stretching process, and improves the product yield of the subsequent evaporation process.
The technical scheme for solving the technical problems is as follows:
the invention provides a clamping device of a net-opening machine, which comprises two groups of clamping structures and two clamping jaw tables;
the two groups of clamping structures are respectively and oppositely arranged on the two clamping jaw tables along the X direction, and each group of clamping structures comprises at least 2 clamping jaw assemblies which are arranged side by side and stretch the fine metal mask plate along the X direction; the clamping jaw assembly is used for clamping a clamping lug arranged at the edge of the fine metal mask plate;
each clamping jaw assembly is correspondingly provided with a Y-direction translation mechanism, and the Y-direction translation mechanism is installed on the clamping jaw table and used for driving the corresponding clamping jaw assembly to move in the Y direction;
the clamping jaw assembly comprises a two-stage X-direction driving mechanism, and the two-stage X-direction driving mechanism comprises a first-stage X-direction driving mechanism for roughly adjusting the position of the fine metal mask plate in the X direction and a second-stage X-direction driving mechanism for finely adjusting the position of the fine metal mask plate in the X direction;
the Y-direction translation mechanism comprises two stages of Y-direction driving mechanisms, and each two stage of Y-direction driving mechanism comprises a first stage of Y-direction driving mechanism for carrying out Y-direction coarse adjustment on the position of the fine metal mask plate and a second stage of Y-direction driving mechanism for carrying out Y-direction fine adjustment on the position of the fine metal mask plate;
the X direction is the length direction of the fine metal mask plate during stretching, and the Y direction is the width direction of the fine metal mask plate during stretching.
When the clamping device works, two stages of driving mechanisms are adopted for stretching the fine metal mask plate in the X direction and the Y direction, the two stages of driving mechanisms carry out coarse adjustment and fine adjustment on the position of the fine metal mask plate respectively, double-freedom-degree and high-precision position adjustment is realized, Y-direction position adjustment is added, and the effect of adjusting the FMM posture and reducing wrinkles is achieved.
Furthermore, a bottom plate is arranged on the clamping jaw table, and a first Y-direction guide rail is arranged on the bottom plate;
the clamping jaw assembly is connected with the first Y-direction guide rail in a sliding mode through a first sliding block; and a second-stage Y-direction driving mechanism in the two-stage Y-direction driving mechanism is connected with the corresponding clamping jaw assembly.
Further, the first-stage Y-direction driving mechanism comprises a Y-direction servo motor, and the second-stage Y-direction driving mechanism comprises a Y-direction piezoelectric actuator;
y is installed to servo motor's stiff end the clamping jaw bench, its output with Y is connected to piezoelectric actuator's stiff end, Y to piezoelectric actuator's output with clamping jaw subassembly fixed connection.
Furthermore, the first-stage X-direction driving mechanism comprises an X-direction servo motor and a planetary reducer; the second-stage X-direction driving mechanism comprises an X-direction piezoelectric actuator, and the fixed end of the X-direction piezoelectric actuator is fixedly connected with the output end of the X servo motor through the planetary reducer.
Furthermore, the clamping device of the net expanding machine further comprises a plurality of first locking mechanisms, wherein the first locking mechanisms are fixedly connected with the clamping jaw assemblies in a one-to-one correspondence mode, are in sliding connection with the first Y-direction guide rails and are used for locking Y-direction sliding positions of the corresponding clamping jaw assemblies.
Further, the clamping jaw assembly further comprises: a clamping jaw base and a clamping mechanism;
the two-stage X-direction driving mechanism and the clamping mechanism are arranged on the clamping jaw base, and the clamping jaw base is connected with the first Y-direction guide rail in a sliding manner through the first sliding block and is fixedly connected with the second-stage Y-direction driving mechanism in the two-stage Y-direction driving mechanism;
the clamping mechanism is used for clamping lugs arranged at the edge of the fine metal mask plate and is fixedly connected with the second-stage X-direction driving mechanism.
Further, the clamping mechanism comprises a clamping head, a clamping frame and a clamping cylinder;
the chuck is used for clamping a fine metal mask plate;
the clamping frame is used for supporting the chuck and the clamping cylinder, one side of the clamping frame is connected with the second-stage X-direction driving mechanism, and a lug matched with the chuck is arranged on the clamping frame;
the utility model discloses a fine metal mask plate, including clamping cylinder, clamping cylinder's stiff end is installed on the clamping frame just clamping cylinder's output is connected with the chuck through a connecting piece, the chuck is in drive down of clamping mechanism the meticulous metal mask plate removes.
Further, a force sensor is connected between the clamping frame and the second-stage X-direction driving mechanism.
Furthermore, a second locking mechanism is further arranged at the bottom of the clamping frame, and the second locking mechanism is fixedly connected with the clamping frame and is in sliding connection with the X-direction guide rail and used for locking the X-direction sliding position of the clamping frame.
Furthermore, the clamping device of the net stretching machine also comprises a second Y-direction guide rail and a driving mechanism;
the clamping jaw table is installed on the second Y-direction guide rail, and the driving mechanism is used for driving the clamping jaw table to move on the second Y-direction guide rail along the Y direction.
The invention has the beneficial effects that: the servo motor with low precision (5-20 mu m) and large stroke (more than or equal to 30 mm) is matched with the piezoelectric actuator with high precision (0.05% -0.1% F.S) and small stroke (10-200 mu m), and the motion requirement of the high precision and large stroke is considered at the same time.
Drawings
Fig. 1 is a top view of the overall structure of a clamping device of a net-tensioning machine according to an embodiment of the invention;
FIG. 2 is a schematic structural diagram of a clamping structure, a Y-direction translation mechanism and a clamping jaw table on one side of the clamping mechanism according to an embodiment of the present invention;
fig. 3 is a schematic structural view of a clamping jaw assembly provided in an embodiment of the invention.
In the drawings, the components represented by the respective reference numerals are listed below:
1. a jaw assembly; 2. a Y-direction translation mechanism; 3. a jaw table; 4. fine metal mask plates; 5. a second Y-direction guide rail; 6. a drive mechanism;
101. an X-direction servo motor; 102. a planetary reducer; 103. a motor base; 104. an X-direction piezoelectric actuator; 105. a force sensor; 106. a chuck; 107. a clamping cylinder; 108. a jaw base; 109. an X-direction guide rail; 110. a first mounting seat; 111. a second locking mechanism; 112. a clamping frame; 113. an X-direction guide rail;
201. a Y-direction servo motor; 202. a Y-direction piezoelectric actuator; 203. a first locking mechanism; 204. a first slider;
301. a base plate; 302. the first Y-direction guide rail.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
The designed FMM shrinkage rate used in the six-generation AMOLED production line is generally about 99.985%, and the length is about 1200 mm. The whole stretching process is about 180 μm, and the left and right clamping jaws move 90 μm respectively. The higher the precision of the jaw movement over this range of travel, the easier it is to arrive at the pixel aperture position offset value (PPA). In a commonly used scheme that a servo motor is matched with a planetary reducer, the return clearance of the reducer causes the hysteresis of a motor pulse and tension curve, and a dead zone is generated once the rotation direction of the motor is changed, so that the number of wheels and PPA of automatic mesh opening are increased. On the other hand, the tension of the clamping jaw is usually adjusted only by adjusting the X-direction position of the clamping jaw in the automatic mesh tensioning process of the existing foreign mesh tensioning equipment, and effective adjustment is difficult to perform when wrinkles generated by the FMM meet the X-direction PPA standard and do not meet the Y-direction PPA standard.
Therefore, an embodiment of the present invention provides a clamping device for a web-tensioning machine, as shown in fig. 1 to 3. The device includes: two clamping jaw platforms 3 are symmetrically arranged in the FMM stretching direction (namely the X direction), a plurality of clamping jaw assemblies 1 used for stretching a fine metal mask plate along the X direction are arranged on each clamping jaw platform 3 side by side, a plurality of Y-direction translation mechanisms 2 are further arranged on each clamping jaw platform 3, and the clamping jaw assemblies 1 on each clamping jaw platform 3 correspond to the Y-direction translation mechanisms 2 one to one.
The FMM is placed between the two clamping jaw tables 3, clamping lugs arranged on the edges of the FMM are respectively clamped by the clamping jaw assemblies 1 on the clamping jaw tables 3, and 2 to 6 clamping jaw assemblies can be arranged on one clamping jaw table 3 as required in practical application.
Since the two gripper tables 3 and the gripper assemblies 1 and the Y-direction translation mechanism 2 arranged thereon are completely symmetrical, the present embodiment is only described with respect to one side of the clamping device of the web-expanding machine.
For the sake of convenience, the two gripper assemblies 1 and the Y-direction translation mechanism 2 are provided on each gripper block 3 in the present embodiment.
The clamping jaw platform 3 is provided with a bottom plate 301, a first Y-direction guide rail 302 is mounted on the bottom plate 301, the clamping jaw assembly 1 is mounted on the first Y-direction guide rail 302 through a first sliding block 204, and the Y-direction translation mechanism 2 is connected with the clamping jaw assembly 1 and used for adjusting the Y-direction position of the clamping jaw assembly.
A first locking mechanism 203 is slidably mounted on the first Y-guide rail 302, and the first locking mechanism 203 is fixedly connected with the jaw assemblies 1 in a one-to-one correspondence manner, and is used for locking the positions of the corresponding jaw assemblies 1 on the first Y-guide rail 302.
In theory, the first Y-guide 302 may comprise one or more rails, and the mounting of the plurality of rails may make the movement of the jaw assembly 1 more smooth, so that the embodiment of the present invention mounts two parallel first Y-guide rails 302 on the base plate 301.
The jaw assembly includes a two-stage X-drive mechanism. The two-stage X-direction driving mechanism comprises a first-stage X-direction driving mechanism and a second-stage X-direction driving mechanism, the first-stage X-direction driving mechanism is used for carrying out X-direction coarse adjustment on the position of the fine metal mask plate, and the second-stage X-direction driving mechanism is used for carrying out X-direction fine adjustment on the position of the fine metal mask plate. The first-stage X-direction driving mechanism comprises an X-direction servo motor 101 and a planetary reducer 102 and is responsible for carrying out low-precision large-stroke displacement adjustment on the fine metal mask plate; the second stage of the X-direction driving mechanism, including the X-direction piezoelectric actuator 104, is responsible for performing high-precision small-stroke displacement adjustment on the fine metal mask plate.
The jaw assembly 1 further comprises: a jaw base 108, a clamping mechanism. The first locking mechanism 203, the two-stage X-direction driving mechanism, and the clamping mechanism are all disposed on the jaw base 108, and the jaw base 108 is slidably connected to the first Y-direction rail 302 through the first slider 204.
Specifically, the X-direction servo motor 101 is connected with the planetary reducer 102 and then fixed on the motor base 103, the motor base 103 is connected with the clamping jaw base 108 and fixed, and the planetary reducer 102 is used for improving the motion repetition precision. The planetary reducer 102 is connected to the mounting seat 110 of the X-direction piezoelectric actuator 104 through a screw rod and a ball nut, the part of the motion stroke is not less than 30mm, and the repeated positioning precision can reach 5-10 mu m. The mounting block 110 is connected to an X-guide rail 109 fixed to the jaw base 108 via a second slider. The clamping mechanism includes a clamping frame 112 and a clamping cylinder 107. The X-direction piezoelectric actuator 104 is connected with a clamping frame 112 in the clamping mechanism through a force sensor 105, the movement stroke can be 90-200 mu m, and the repeated positioning precision can reach 0.05% -0.1% F.S. The clamp frame 112 is mounted on the X-directional guide rail 113 through a slider, and the second locking mechanism 111 is mounted on the clamp frame 112 and connected to the X-directional guide rail 113 for locking the position of the clamp frame 112 on the X-directional guide rail 113. A clamping cylinder 107 installed on a clamping frame 112 is guided by two ball splines and drives a chuck 106 to move through a connecting member, the chuck 106 is used for holding a fine metal mask plate 4, and a protrusion which is matched with the chuck 106 is provided on the clamping frame 112.
Preferably, the second locking mechanism 111 is fixedly connected to the bottom of the clamping frame 112 and slidably connected to the X-direction guide rail 113 for locking the X-direction sliding position of the clamping frame 112.
The Y-direction translation mechanism 2 comprises two stages of Y-direction driving mechanisms, wherein the first stage of Y-direction driving mechanism is used for carrying out Y-direction coarse adjustment on the position of the fine metal mask plate, and the second stage of Y-direction driving mechanism is used for carrying out Y-direction fine adjustment on the position of the fine metal mask plate. The first-stage Y-direction driving mechanism comprises a Y-direction servo motor 201 and is responsible for carrying out low-precision large-stroke displacement adjustment on the fine metal mask plate, and the second-stage Y-direction driving mechanism comprises a Y-direction piezoelectric actuator 202 and is responsible for carrying out high-precision small-stroke displacement adjustment on the fine metal mask plate. The Y-direction servo motor 201 is connected to a second mounting seat of the Y-direction piezoelectric actuator 202 through a screw rod and a ball nut, the second mounting seat is driven to drive the Y-direction piezoelectric actuator 202 to move in a large stroke, the moving stroke is 30-300mm, and the repeated positioning precision is 10-20 microns; the Y-direction piezoelectric actuator 202 is connected to the clamping jaw base 108 in the clamping jaw assembly 1, can drive the clamping jaw assembly 1 to move along the Y-direction guide rail, and can drive the fine metal mask plate 4 to make Y-direction precise movement, the movement stroke is 30-50 mu m, and the repeated positioning precision can reach 0.05% -0.1% F.S.
The clamping device of the net stretching machine in the embodiment of the invention further comprises a second Y-direction guide rail 5 and a driving mechanism 6, the clamping jaw table 3 is installed on the second Y-direction guide rail 5, and the driving mechanism 6 is used for driving the clamping jaw table 3 to move on the second Y-direction guide rail 5 along the Y direction.
The invention divides the whole net-opening action flow into two stages: in the first stage, only the X-direction servo motor 101 and the Y-direction servo motor 201 are driven to move in a large stroke to meet different spacing requirements of clamping jaws when FMM materials of different specifications are expanded, and the FMM materials enter the next stage after being clamped; the second stage adjusts the attitude and zoom of the FMM using only the X-direction piezoelectric actuator 104 and the Y-direction piezoelectric actuator 202, which can achieve much higher precision of repeated positioning than a servo motor, thereby reducing wrinkles.
The method for screening the fine metal mask plate by adopting the clamping device in the embodiment comprises the following steps:
1. moving the clamping jaw table 3 and adjusting the clamping head 106 to a preset position to clamp the fine metal mask plate 4 by using an X-direction servo motor 101 and a Y-direction servo motor 201;
2. controlling an X-direction servo motor 101 to apply a preset pulling force on the fine metal mask plate 4, and adjusting to enable the reading of a force sensor 105 to reach a set parameter;
3. the movable clamping jaw table 3 moves the fine metal mask plate 4 to a screen stretching position;
4. adjusting a Y-direction piezoelectric actuator 202 to enable Y-direction position deviation of four mark points closest to the clamping jaw on the fine metal mask plate 4 to be smaller than 0.5 micron, then locking by using a first locking mechanism 203, precisely stretching by using an X-direction piezoelectric actuator 104, adjusting position deviation of detection hole positions on the fine metal mask plate 4, and then locking by using a second locking mechanism 111;
5. measuring whether a pixel hole position deviation value (PPA) on the fine metal mask plate 4 reaches a set index, and returning to the step 4 to readjust and lock the pixel hole position deviation value (PPA) until all test values reach the set index;
6. welding the fine metal mask plate 4 on the mask frame, and loosening the chuck 106 after detecting the PPA.
The invention uses the matching of a servo motor with low precision (5-20 mu m) and large stroke (more than or equal to 30 mm) and a piezoelectric actuator with high precision (0.05% -0.1% F.S) and small stroke (10-200 mu m), and simultaneously considers the motion requirement of high precision and large stroke, the piezoelectric actuator takes piezoelectric ceramics as a basic element, is packaged by an external mechanical structure, outputs displacement and output force, has no return clearance and high positioning precision, and simultaneously combines the matching of the servo motor and a planetary reducer, thereby meeting the motion stroke requirement of a chuck on about 30mm in the X direction when clamping a fine metal mask plate 4. In addition, the locking mechanism is configured, so that the influence of creep generated by the piezoelectric actuator under the action of external force on the tension testing process is avoided, and the measurement repeatability is improved; furthermore, an additional degree of freedom is provided in a direction (Y direction) perpendicular to the stretching direction of the fine metal mask 4, and an effect of adjusting the posture of the fine metal mask 4 to reduce wrinkles is achieved.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A clamping device of a net-opening machine is characterized by comprising two groups of clamping structures and two clamping jaw tables (3);
the two groups of clamping structures are respectively and oppositely arranged on the two clamping jaw tables (3) along the X direction, and each group of clamping structures comprises at least 2 clamping jaw assemblies (1) which are arranged side by side and used for stretching the fine metal mask plate along the X direction; the clamping jaw assembly (1) is used for clamping lugs arranged at the edge of the fine metal mask plate;
each clamping jaw assembly (1) is correspondingly provided with a Y-direction translation mechanism (2), and the Y-direction translation mechanism (2) is installed on the clamping jaw table (3) and used for driving the corresponding clamping jaw assembly (1) to move in the Y direction;
the clamping jaw assembly (1) comprises a two-stage X-direction driving mechanism, and the two-stage X-direction driving mechanism comprises a first-stage X-direction driving mechanism for roughly adjusting the position of the fine metal mask plate in the X direction and a second-stage X-direction driving mechanism for finely adjusting the position of the fine metal mask plate in the X direction;
the Y-direction translation mechanism (2) comprises two stages of Y-direction driving mechanisms, and each two stage of Y-direction driving mechanism comprises a first stage of Y-direction driving mechanism for carrying out Y-direction coarse adjustment on the position of the fine metal mask plate and a second stage of Y-direction driving mechanism for carrying out Y-direction fine adjustment on the position of the fine metal mask plate;
the X direction is the length direction of the fine metal mask plate during stretching, and the Y direction is the width direction of the fine metal mask plate during stretching.
2. The clamping device of the net stretching machine according to claim 1, wherein a bottom plate (301) is installed on the clamping jaw table (3), a first Y-directional guide rail (302) is arranged on the bottom plate (301),
the clamping jaw assembly (1) is connected with the first Y-direction guide rail (302) in a sliding mode through a first sliding block (204); and a second-stage Y-direction driving mechanism in the two-stage Y-direction driving mechanism is connected with the corresponding clamping jaw assembly (1).
3. The tenter clamping device of claim 2, characterized in that the first stage Y-direction drive mechanism comprises a Y-direction servo motor (201), and the second stage Y-direction drive mechanism comprises a Y-direction piezoelectric actuator (202);
y is installed to the stiff end of servo motor (201) on clamping jaw platform (3), its output with Y is connected to the stiff end of piezoelectric actuator (202), Y to the output of piezoelectric actuator (202) with clamping jaw subassembly (1) fixed connection.
4. The stretching machine clamping device as claimed in claim 2, wherein the first stage of X-direction driving mechanism comprises an X-direction servo motor (101), a planetary reducer (102); the second-stage X-direction driving mechanism comprises an X-direction piezoelectric actuator (104), and the fixed end of the X-direction piezoelectric actuator (104) is fixedly connected with the output end of the X servo motor (101) through the planetary reducer (102).
5. The clamping device of the net stretching machine according to claim 2, further comprising a plurality of first locking mechanisms (203), wherein the first locking mechanisms (203) are fixedly connected with the clamping jaw assemblies (1) in a one-to-one correspondence manner, and are slidably connected with the first Y-direction guide rail, and are used for locking the Y-direction sliding positions of the corresponding clamping jaw assemblies (1).
6. A tensioning machine clamping device according to any one of claims 2-5, characterized in that the clamping jaw assembly (1) further comprises: a jaw base (108), a clamping mechanism;
the two-stage X-direction driving mechanism and the clamping mechanism are arranged on the clamping jaw base (108), and the clamping jaw base (108) is connected with the first Y-direction guide rail (302) in a sliding mode through the first sliding block (204) and fixedly connected with the second-stage Y-direction driving mechanism in the two-stage Y-direction driving mechanism;
the clamping mechanism is used for clamping lugs arranged at the edge of the fine metal mask plate and is fixedly connected with the second-stage X-direction driving mechanism.
7. The tenter clamping device according to claim 6, characterized in that the clamping mechanism comprises a clamping head (106), a clamping frame (112) and a clamping cylinder (107);
the clamping head (106) is used for clamping the fine metal mask plate (4);
the clamping frame (112) is used for supporting the chuck (106) and the clamping cylinder (107), one side of the clamping frame (112) is connected with the second-stage X-direction driving mechanism, and a protruding block matched with the chuck (106) is arranged on the clamping frame (112);
the stiff end of die clamping cylinder (107) is installed on die clamping frame (112) just the output of die clamping cylinder (107) is connected with chuck (106) through a connecting piece, chuck (106) are in drive of clamping mechanism drives the removal of accurate meticulous metal mask board.
8. The tenter clamping device according to claim 7, characterized in that a force sensor (105) is further connected between the clamping frame (112) and the second stage X-direction drive mechanism.
9. The clamping device of the net expanding machine according to claim 7, wherein a second locking mechanism (111) is further arranged at the bottom of the clamping frame (112), and the second locking mechanism (111) is fixedly connected with the clamping frame (112) and is slidably connected with the X-direction guide rail (113) for locking the X-direction sliding position of the clamping frame (112).
10. The tenter clamping device according to claim 6, characterized by further comprising a second Y-directional guide rail (5) and a driving mechanism (6);
the clamping jaw table (3) is mounted on the second Y-direction guide rail (5), and the driving mechanism (6) is used for driving the clamping jaw table (3) to move on the second Y-direction guide rail (5) along the Y direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110115555.0A CN112427875A (en) | 2021-01-28 | 2021-01-28 | Clamping device of net-opening machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110115555.0A CN112427875A (en) | 2021-01-28 | 2021-01-28 | Clamping device of net-opening machine |
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| CN112427875A true CN112427875A (en) | 2021-03-02 |
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|---|---|---|---|
| CN202110115555.0A Pending CN112427875A (en) | 2021-01-28 | 2021-01-28 | Clamping device of net-opening machine |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114101910A (en) * | 2022-01-25 | 2022-03-01 | 江苏乐萌精密科技有限公司 | Common metal mask plate manual net stretching machine |
| CN114182201A (en) * | 2021-11-30 | 2022-03-15 | 合肥维信诺科技有限公司 | Mask plate assembly |
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| CN103668050A (en) * | 2012-09-07 | 2014-03-26 | 昆山允升吉光电科技有限公司 | Assembling method of mask component |
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