CN111593299A - Mask plate and manufacturing method thereof - Google Patents

Mask plate and manufacturing method thereof Download PDF

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Publication number
CN111593299A
CN111593299A CN202010604899.3A CN202010604899A CN111593299A CN 111593299 A CN111593299 A CN 111593299A CN 202010604899 A CN202010604899 A CN 202010604899A CN 111593299 A CN111593299 A CN 111593299A
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CN
China
Prior art keywords
strip
boss
shaped
sub
shaped sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010604899.3A
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Chinese (zh)
Inventor
丁彦红
张少雄
李娟�
王威
王魁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Publication date
Application filed by BOE Technology Group Co Ltd, Chengdu BOE Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN202010604899.3A priority Critical patent/CN111593299A/en
Publication of CN111593299A publication Critical patent/CN111593299A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K31/00Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
    • B23K31/02Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to soldering or welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation

Abstract

The application discloses a mask plate and a manufacturing method thereof, and relates to the technical field of display. One end of a mask plate body included by the mask plate can be connected with at least one strip-shaped sub-boss in the first strip-shaped sub-boss and the second strip-shaped sub-boss, and the other end of the mask plate body can be connected with at least one strip-shaped sub-boss in the third strip-shaped sub-boss and the fourth strip-shaped sub-boss. Because the two ends of the mask plate body can be respectively connected with at least one strip-shaped sub-boss, the reliability of connection between the two ends of the mask plate body and the strip-shaped sub-bosses can be ensured, and the quality of the mask plate is better. Furthermore, the quality of the film layer prepared by the mask plate can be ensured, and the yield of the display panel is improved.

Description

Mask plate and manufacturing method thereof
Technical Field
The application relates to the technical field of display, in particular to a mask plate and a manufacturing method thereof.
Background
In a process of preparing each film layer in an organic light-emitting diode (OLED) display panel, a mask plate is required to shield the surface of a substrate. And then, evaporating the coating material to the surface of the part, which is not shielded by the mask plate, of the substrate by adopting an evaporation process to form a graphical film layer.
In the related art, a mask includes a frame body, and a mask body connected to the frame body. However, in the related art, the reliability of the connection between the mask body and the frame main body in the mask is low, which results in poor quality of the mask, and further affects the quality of the film layer prepared by using the mask, and the yield of the display panel is low.
Disclosure of Invention
The application provides a mask plate and a manufacturing method thereof, which can solve the problem that the yield of a display panel in the related art is low. The technical scheme is as follows:
in one aspect, a mask is provided, which includes: the mask comprises a mask body, an annular frame main body, a first strip-shaped boss and a second strip-shaped boss, wherein the first strip-shaped boss and the second strip-shaped boss are oppositely arranged on the frame main body and are fixedly connected with the frame main body;
the first strip-shaped boss comprises: the first strip-shaped sub-bosses and the second strip-shaped sub-bosses are arranged at intervals along the extending direction vertical to the first strip-shaped bosses;
the second strip-shaped boss comprises: the third strip-shaped sub boss and the fourth strip-shaped sub boss are arranged at intervals along the extending direction vertical to the second strip-shaped boss;
one end of the mask plate body is connected with at least one of the first strip-shaped sub-boss and the second strip-shaped sub-boss, and the other end of the mask plate body is connected with at least one of the third strip-shaped sub-boss and the fourth strip-shaped sub-boss.
Optionally, the first strip-shaped sub-boss has a first through hole, the second strip-shaped sub-boss has a second through hole corresponding to the first through hole, and one through hole of the first through hole and the second through hole is a threaded hole, and the other through hole is a unthreaded hole;
the axis of the first through hole and the axis of the second through hole are perpendicular to the extending direction of the first strip-shaped sub-boss and are parallel to the mask plate body.
Optionally, the third strip-shaped sub-boss has a third through hole, the fourth strip-shaped sub-boss has a fourth through hole corresponding to the third through hole, one of the third through hole and the fourth through hole is a threaded hole, and the other through hole is a light hole;
the axis of the third through hole and the axis of the fourth through hole are perpendicular to the extending direction of the third strip-shaped sub-boss and are parallel to the mask plate body.
Optionally, the mask further includes: a first screw and a second screw;
the first screw is used for penetrating through the unthreaded holes in the first through hole and the second through hole and is connected with a threaded hole;
the second screw is used for penetrating through the unthreaded holes in the third through hole and the fourth through hole and is connected with a threaded hole.
Optionally, the first strip sub-projection is away from the center of the annular frame body relative to the second strip sub-projection, and the third strip sub-projection is away from the center of the annular frame body relative to the fourth strip sub-projection;
the length of the first strip-shaped sub-boss along a first direction is greater than that of the second strip-shaped sub-boss along the first direction, and the first direction is perpendicular to the extending direction of the first strip-shaped sub-boss;
the length of the third strip-shaped sub-boss along the second direction is greater than that of the fourth strip-shaped sub-boss along the second direction, and the second direction is perpendicular to the extending direction of the third strip-shaped sub-boss.
Optionally, the frame main body is a rectangular frame main body, the first strip-shaped boss is arranged on a first side of the frame main body, and the second strip-shaped boss is arranged on a second side of the frame main body; the mask plate further comprises: the supporting assembly is arranged on a third strip-shaped boss on the third side of the frame main body, and a fourth strip-shaped boss on the fourth side of the frame main body;
the support assembly is located on one side, close to the frame main body, of the mask plate body, and the support assembly is connected with the third strip-shaped boss and the fourth strip-shaped boss and used for supporting the mask plate body.
Optionally, the extending direction of the first strip-shaped boss is parallel to the extending direction of the second strip-shaped boss, and the extending direction of the third strip-shaped boss is parallel to the extending direction of the fourth strip-shaped boss;
the first strip-shaped boss, the third strip-shaped boss, the second strip-shaped boss and the fourth strip-shaped boss are sequentially connected, and the first strip-shaped boss, the third strip-shaped boss, the second strip-shaped boss and the fourth strip-shaped boss are of an integrated structure.
Optionally, the third strip-shaped boss has at least one first groove, and the fourth strip-shaped boss has at least one second groove;
the support assembly is connected to the third strip boss through the at least one first groove and to the fourth strip boss through the at least one second groove.
In another aspect, a method for manufacturing a mask is provided, the method including:
provide annular frame main part, first strip boss, second strip boss to and the mask plate body, wherein, first strip boss with second strip boss sets up relatively in the frame main part and with frame main part fixed connection, first strip boss includes: along the perpendicular to first strip boss's extending direction interval first strip boss and the sub-boss of second strip, second strip boss includes: the third strip-shaped sub boss and the fourth strip-shaped sub boss are arranged at intervals along the extending direction vertical to the second strip-shaped boss;
and welding one end of the mask plate body with at least one of the first strip-shaped sub-boss and the second strip-shaped sub-boss, and welding the other end of the mask plate body with at least one of the third strip-shaped sub-boss and the fourth strip-shaped sub-boss.
Optionally, the first bar sub-boss is located away from the center of the annular frame body relative to the second bar sub-boss; the third tab is distal from the center of the annular frame body relative to the fourth tab; the one end with the one end of mask plate body with in first strip sub-boss with the second strip sub-boss welds to the other end with the third strip sub-boss with in the fourth strip sub-boss welds, includes:
welding one end of the mask plate body with the first strip-shaped sub-boss, and welding the other end of the mask plate body with the third strip-shaped sub-boss;
determining the welding quality of one end of the mask plate body and the first strip-shaped sub-boss and the welding quality of the other end of the mask plate body and the third strip-shaped sub-boss;
if one end of the mask plate body and at least part of the first welding area of the first strip-shaped sub-boss are broken, welding one end of the mask plate body and the second strip-shaped sub-boss;
and if the other end of the mask plate body and at least part of the second welding area of the third strip-shaped sub-boss are broken, welding the other end of the mask plate body and the fourth strip-shaped sub-boss.
The beneficial effect that technical scheme that this application provided brought includes at least:
the application provides a mask plate and a manufacturing method thereof, wherein one end of a mask plate body of the mask plate can be connected with at least one strip-shaped sub boss in a first strip-shaped sub boss and a second strip-shaped sub boss, and the other end of the mask plate body can be connected with at least one strip-shaped sub boss in a third strip-shaped sub boss and a fourth strip-shaped sub boss. Because the two ends of the mask plate body can be respectively connected with at least one strip-shaped sub-boss, the reliability of connection between the two ends of the mask plate body and the strip-shaped sub-bosses can be ensured, and the quality of the mask plate is better. Furthermore, the quality of the film layer prepared by the mask plate can be ensured, and the yield of the display panel is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a mask provided in an embodiment of the present application;
fig. 2 is a schematic view of a frame body, a first strip-shaped boss and a second strip-shaped boss according to an embodiment of the present disclosure;
FIG. 3 is a top view of the frame body, first strip bosses and second strip bosses of FIG. 2;
FIG. 4 is a schematic view of a first bar sub-panel and a second bar sub-panel provided by an embodiment of the present application;
fig. 5 is a schematic view of a first bar projection, a second bar projection and a first screw according to an embodiment of the present disclosure;
fig. 6 is a schematic partial structure diagram of a mask provided in an embodiment of the present application;
fig. 7 is a schematic view of a mask body according to an embodiment of the present disclosure;
fig. 8 is a schematic structural diagram of another mask provided in an embodiment of the present application;
fig. 9 is a schematic structural diagram of another mask provided in an embodiment of the present application;
FIG. 10 is a schematic structural diagram of a support assembly provided in an embodiment of the present application;
FIG. 11 is a top view of the support assembly shown in FIG. 10;
FIG. 12 is a schematic structural diagram of another support assembly provided in embodiments of the present application;
fig. 13 is a flowchart of a manufacturing method of a mask according to an embodiment of the present application;
fig. 14 is a flowchart of another mask manufacturing method according to an embodiment of the present application.
Detailed Description
To make the objects, technical solutions and advantages of the present application more clear, embodiments of the present application will be described in further detail below with reference to the accompanying drawings.
In the related art, each film layer in the OLED display panel is manufactured by a vacuum evaporation method. In order to achieve a better display effect of the OLED display panel, light emitting layers in sub-pixels of each color in the OLED display panel need to be deposited on a substrate of the OLED display panel. The light-emitting layer in each sub-pixel needs to be prepared by adopting a precise mask plate. The precision mask may include: the mask comprises a frame main body and a precise mask body connected with the frame main body. In the production process of the mask plate, the precise mask plate body is welded on the frame main body through the screen-stretching device so as to obtain the precise mask plate. However, in general, the welding quality of the mask body and the frame body is poor, which results in low reliability of connection between the mask body and the frame body, and further results in large position deviation of the precise mask body, poor quality of the evaporated film layer, and low yield of the display panel.
Therefore, in the related art, in order to improve the yield of the display panel, the precision mask is usually repaired, that is, after the precision mask body 101 is torn from the frame main body 102, a new precision mask body 101 is welded to the frame main body 102 again. But causes additional cost due to the high cost of the precision mask body 101.
Fig. 1 is a schematic structural diagram of a mask provided in an embodiment of the present application, where the mask provided in the embodiment of the present application can solve a problem of a low yield of a display panel in the related art. As can be seen with reference to fig. 1, the mask 10 may include: the mask comprises a mask body 101, an annular frame main body 102, and a first strip-shaped boss 103 and a second strip-shaped boss 104 which are oppositely arranged on the frame main body 102 and fixedly connected with the frame main body 102.
Fig. 2 is a schematic view of a frame body, a first strip-shaped boss and a second strip-shaped boss according to an embodiment of the present disclosure. Fig. 3 is a top view of the frame body, the first strip-shaped bosses and the second strip-shaped bosses shown in fig. 2. As can be seen with reference to fig. 2 and 3, the first bar-shaped protrusion 103 may include: the first strip-shaped sub-bosses 1031 and the second strip-shaped sub-bosses 1032 are arranged at intervals in the extending direction X perpendicular to the first strip-shaped bosses 103. That is, a first strip-shaped gap a may be formed between the first strip-shaped sub-projection 1031 and the second strip-shaped sub-projection 1032, and the first gap a may be parallel to the extending direction X of the first strip-shaped projection 103.
The second strip-shaped boss 104 may include: and the third strip-shaped sub-bosses 1041 and the fourth strip-shaped sub-bosses 1042 are arranged at intervals in the extending direction Y perpendicular to the second strip-shaped bosses 104. That is, a strip-shaped second gap b may be formed between the third strip-shaped protrusion 1041 and the fourth strip-shaped protrusion 1042, and the second gap b may be parallel to the extending direction Y of the second strip-shaped protrusion 104.
In this embodiment, one end of the mask body 101 may be connected to at least one of the first strip-shaped sub-protrusion 1031 and the second strip-shaped sub-protrusion 1032, and the other end of the mask body 101 may be connected to at least one of the third strip-shaped sub-protrusion 1041 and the fourth strip-shaped sub-protrusion 1042.
If the connection quality between one end of the mask body 101 and one of the first strip-shaped sub-projection 1031 and the second strip-shaped sub-projection 1032 is good, the one end of the mask body 101 does not need to be connected with another strip-shaped sub-projection. If the connection quality between one end of the mask body 101 and one of the first strip-shaped sub-projection 1031 and the second strip-shaped sub-projection 1032 is poor, the one end of the mask body 101 may be further connected to another strip-shaped sub-projection. Therefore, the connection quality of one end of the mask plate body 101 and the strip-shaped sub-boss can be guaranteed, and the connection reliability of one end of the mask plate body 101 and the strip-shaped sub-boss is improved.
Similarly, if the connection quality between the other end of the mask body 101 and one of the third strip-shaped sub-boss 1041 and the fourth strip-shaped sub-boss 1042 is better, the other end of the mask body 101 does not need to be connected to another strip-shaped sub-boss.
If the connection quality between the other end of the mask body 101 and one of the first strip-shaped sub-projection 1031 and the second strip-shaped sub-projection 1032 is poor, the other end of the mask body 101 may be connected to another strip-shaped sub-projection. Therefore, the connection quality of the other end of the mask plate body 101 and the strip-shaped sub-boss can be guaranteed, and the connection reliability of the other end of the mask plate body 101 and the strip-shaped sub-boss is improved.
That is, the connection quality between the two ends of the mask body 101 and the strip-shaped sub-bosses is high, that is, the connection reliability between the two ends of the mask body 101 and the strip-shaped sub-bosses is high, the quality of the mask is good, the quality of a film layer prepared by the mask can be guaranteed, and the yield of the display panel is improved.
In addition, if one end of the mask body 101 in the mask 10 is connected to only one of the first strip-shaped sub-projection 1031 and the second strip-shaped sub-projection 1032, and the other end of the mask body 101 is connected to only one of the third strip-shaped sub-projection 1041 and the fourth strip-shaped sub-projection 1042. When the welding quality of the mask body 101 and the strip-shaped sub-bosses is poor and the mask needs to be repaired, one end of the mask body can be directly connected with the other strip-shaped sub-boss in the first strip-shaped sub-boss 1031 and the second strip-shaped sub-boss 1032, the other end of the mask body is connected with the other strip-shaped sub-boss in the third strip-shaped sub-boss 1041 and the second strip-shaped sub-boss 1042, the mask body 101 does not need to be torn off, a new mask body is welded on the frame main body 102, and the cost is low.
To sum up, this application embodiment provides a mask plate, and the one end of the mask plate body that this mask plate includes can be connected with at least one strip sub-boss in first strip sub-boss and the second strip sub-boss, and the other end of this mask plate body can be connected with at least one strip sub-boss in third strip sub-boss and the fourth strip sub-boss. Because the two ends of the mask plate body can be respectively connected with at least one strip-shaped sub-boss, the reliability of connection between the two ends of the mask plate body and the strip-shaped sub-bosses can be ensured, and the quality of the mask plate is better. Furthermore, the quality of the film layer prepared by the mask plate can be ensured, and the yield of the display panel is improved.
Alternatively, the frame body 102, the first strip-shaped bosses 103, and the second strip-shaped bosses 104 may be an integral structure. The frame body 102, the first strip-shaped bosses 1032, and the second strip-shaped bosses 104 may be all made of invar (invar).
In the embodiment of the present application, referring to fig. 3, the length of the first gap a in the first direction M (i.e., the width of the first gap a) may range from 1 millimeter (mm) to 4 mm. The width of the first gap a is, for example, 3 mm. The length of the second gap b in the second direction N (i.e., the width of the second gap b) may also range from 1mm to 4 mm. The width of the second gap b is, for example, 3 mm. The first direction M is perpendicular to the extending direction of the first strip-shaped sub-tab 1031, and the second direction N is perpendicular to the extending direction of the third strip-shaped sub-tab 1041.
Optionally, an angle between the extending direction of the first strip sub-tab 1031 and the extending direction of the second strip sub-tab 1032 may be smaller than an angle threshold. Moreover, an included angle between the extending direction of the third bar-shaped sub-projection 1041 and the extending direction of the fourth bar-shaped sub-projection 1042 may be smaller than an included angle threshold. Wherein, the range of the included angle threshold value can be 0 degree to 5 degrees. That is, the extending direction of the first strip sub-tab 1031 may be parallel or approximately parallel to the extending direction of the second strip sub-tab 1032. The extending direction of the third bar-shaped sub-projection 1041 may be parallel or approximately parallel to the extending direction of the fourth bar-shaped sub-projection 1042.
In the embodiment of the present application, referring to fig. 3, the first strip-shaped protrusion 103 may include: the plurality of first bar sub-bosses 1031 and the plurality of second bar sub-bosses 1032 may be arranged in a same line, and the extending directions of the plurality of first bar sub-bosses 1031 may be collinear, and the extending directions of the plurality of second bar sub-bosses 1032 may be collinear. Every two adjacent first strip-shaped sub-bosses 1031 have a first distance along the extending direction X of the first strip-shaped bosses 103, and every two adjacent second strip-shaped sub-bosses 1032 have a second distance along the extending direction X of the first strip-shaped bosses 103. The first pitch may be equal to the second pitch.
Also, the second bar-shaped protrusion 104 may include: the plurality of third bar bosses 1041 and the plurality of fourth bar bosses 1042 may be arranged in a same line, and the plurality of third bar bosses 1041 may extend in a same line, and the plurality of fourth bar bosses 1042 may extend in a same line. Every two adjacent third strip-shaped sub-bosses 1041 have a third distance along the extending direction Y of the second strip-shaped boss 104, and every two adjacent fourth strip-shaped sub-bosses 1042 have a fourth distance along the extending direction Y of the second strip-shaped boss 104. The third pitch may be equal to the fourth pitch. And, the third pitch may be equal to the first pitch.
Because the first strip-shaped boss 103 includes a plurality of first strip-shaped sub-bosses 1031 and a plurality of second strip-shaped sub-bosses 1032, and the second strip-shaped boss 104 includes a plurality of third strip-shaped sub-bosses 1041 and a plurality of fourth strip-shaped sub-bosses 1042, the first strip-shaped boss 103 and the second strip-shaped boss 104 in the mask plate 10 may be connected with a plurality of mask plate bodies 101 (for example, two mask plate bodies 101 are shown in fig. 1), and then a large number of display panels can be obtained by one-time preparation using the mask plate 10, thereby improving the efficiency of display panel preparation.
In the embodiment of the present application, the number of the first strip-shaped sub-protrusions 1031 included in the first strip-shaped protrusion 103 may be the same as the number of the second strip-shaped sub-protrusions 1032. The number of the third bar-shaped sub-protrusions 1041 included in the second bar-shaped protrusion 104 may be the same as the number of the fourth bar-shaped sub-protrusions 1042. Also, the number of the first strip-shaped bosses 1031 included in the first strip-shaped boss 103 may be the same as the number of the third strip-shaped bosses 1041 included in the second strip-shaped boss 104. That is, the first bar sub-bosses 1031, the second bar sub-bosses 1032, the third bar sub-bosses 1041, and the fourth bar sub-bosses 1042 are equal in number.
The number of the mask body 101 included in the mask 10 may be the same as the number of the first bar-shaped sub-protrusions 1031. One end of each mask body 101 may be connected to at least one of one first strip sub-projection 1031 of the plurality of first strip sub-projections and one second strip sub-projection 1032 of the plurality of second strip sub-projections 1032 corresponding to the first strip sub-projection. The other end of each mask body 101 may be connected to at least one of a third strip-shaped sub-projection 1041 of the plurality of third strip-shaped sub-projections and a fourth strip-shaped sub-projection 1042 of the plurality of fourth strip-shaped sub-projections 1042, which corresponds to the third strip-shaped sub-projection.
It should be noted that the first strip sub-tab 1031 corresponds to the second strip sub-tab 1032, which means that a strip first gap a is formed between the first strip sub-tab 1031 and the second strip sub-tab 1032. The third strip-shaped sub-projection 1041 corresponds to the fourth strip-shaped sub-projection 1042, that is, a strip-shaped second gap b is formed between the third strip-shaped sub-projection 1041 and the fourth strip-shaped sub-projection 1042.
By way of example, two first bar sub-bosses 1031, two second bar sub-bosses 1032, two third bar sub-bosses 1041, and two fourth bar sub-bosses 1042 are shown in fig. 2 and 3.
As can also be seen with reference to fig. 3, the first strip-shaped boss 103 may further include: a plurality of first connection portions 1033. The plurality of first connecting portions 1033 may be used to connect the plurality of first strip-shaped sub-bosses 1031 and the plurality of second strip-shaped sub-bosses 1032 included in the first strip-shaped boss 103. Moreover, the second strip-shaped boss 104 may further include: a plurality of second connection portions 1034. The second connecting portions 1034 may be used to connect the third strip-shaped bosses 1041 and the fourth strip-shaped bosses 1042 included in the second strip-shaped boss 104.
Fig. 4 is a schematic structural diagram of a first strip-shaped sub-boss and a second strip-shaped sub-boss provided in an embodiment of the present application. Referring to fig. 4, the first bar-shaped sub-tab 1031 may have a first through hole 1031a, the second bar-shaped sub-tab 1032 has a second through hole 1032a corresponding to the first through hole 1031a, and one of the first through hole 1031a and the second through hole 1032a may be a screw hole and the other may be a through hole. The axis of the first through hole 1031a and the axis of the second through hole 1032a may be both perpendicular to the extending direction of the first strip-shaped sub-projection 1031 and both parallel to the mask body 101. The axis of the first through hole 1031a may be collinear with the axis of the second through hole 1032 a.
By arranging the first through hole 1031a in the first strip-shaped sub-boss 1031 and the second through hole 1032a in the second strip-shaped sub-boss 1032, the first strip-shaped sub-boss 1031 and the second strip-shaped sub-boss 1032 can be conveniently connected by screws, and the distance between the first strip-shaped sub-boss 1031 and the second strip-shaped sub-boss 1032 can be adjusted by adjusting the fastening degree of the screws, so that the stretching degree of the mask body 101 is adjusted, and the flatness of the mask body 101 is ensured.
In fig. 4, the second through hole 1032a is a screw hole, and the first through hole 1031a is a light hole. Of course, the second through hole 1032a may be a light hole, and the first through hole 1031a may be a screw hole. The embodiment of the present application does not limit this.
Referring to fig. 5, the mask 10 may further include a first screw 105. The first screw 105 may be used to penetrate through the light holes in the first and second through holes 1031a and 1032a and be connected to the screw hole. Alternatively, the material of the first screw 105 may be invar.
For example, referring to fig. 4, the first through hole 1031a in the first strip sub-projection 1031 is a light hole, and the second through hole 1032a in the second strip sub-projection 1032 is a screw hole. In this case, referring to fig. 5, the first screw 105 may penetrate through the first through hole 1031a and be connected to the second through hole 1032 a. Alternatively, the first through hole 1031a in the first strip-shaped sub-projection 1031 is a threaded hole, and the second through hole 1032a in the second strip-shaped sub-projection 1032 is a light hole. In this case, the first screw 105 may penetrate through the second through hole 1032a and be connected to the first through hole 1031 a.
In the present embodiment, an aperture a1 near the screw hole of the optical holes of the first and second through holes 1031a and 1032a is smaller than an aperture a2 far from the screw hole. That is, the unthreaded hole may be a countersunk screw hole.
Therefore, the head of the first screw 105 can be located in the light hole, the head of the first screw 105 is prevented from protruding out of the first strip-shaped sub-boss 1031 and being affected by other devices, and the reliability of the first screw 105 in connecting the first strip-shaped sub-boss 1031 and the second strip-shaped sub-boss 1032 is ensured.
In this embodiment, the third strip-shaped sub-protrusion 1041 may have a third through hole, the fourth strip-shaped sub-protrusion 1042 may have a fourth through hole corresponding to the third through hole, and one of the third through hole and the fourth through hole may be a threaded hole, and the other may be an unthreaded hole. The axes of the third through hole and the fourth through hole may be both perpendicular to the extending direction of the third strip-shaped sub-boss 1041, and both parallel to the mask body 101. The axis of the third through hole may be collinear with the axis of the fourth through hole.
By arranging the third through hole in the third strip-shaped sub-boss 1041 and the fourth through hole in the fourth strip-shaped sub-boss 1042, the third strip-shaped sub-boss 1041 and the fourth strip-shaped sub-boss 1042 can be connected by screws, and the distance between the third strip-shaped sub-boss 1041 and the fourth strip-shaped sub-boss 1042 can be adjusted by adjusting the fastening degree of the screws, so that the stretching degree of the mask body 101 is adjusted, and the smoothness of the mask body 101 is ensured.
In this embodiment, the mask may further include: a second screw. The second screw may be adapted to pass through the unthreaded hole in the third through-hole and the fourth through-hole and be connected to the threaded hole. Alternatively, the material of the second screw may be invar.
Illustratively, the third through hole in the third strip-shaped sub-projection 1041 is a light hole, and the fourth through hole in the fourth strip-shaped sub-projection 1042 is a threaded hole. In this case, the second screw may penetrate through the third through hole and be connected to the fourth through hole. Alternatively, the third through hole in the third strip-shaped sub-projection 1041 is a threaded hole, and the fourth through hole in the fourth strip-shaped sub-projection 1042 is a unthreaded hole. In this case, the second screw may penetrate through the fourth through hole and be connected to the third through hole.
In this embodiment, the third strip protrusion 1041 may have the same shape as the first strip protrusion 1031, the fourth strip protrusion 1042 may have the same shape as the second strip protrusion 1032, and the connection manner between the second screw and the third strip protrusion 1041 and the fourth strip protrusion 1042 may be the same as the connection manner between the first screw 105 and the first strip protrusion 1031 and the second strip protrusion 1032. Therefore, the structures of the third strip-shaped sub-boss 1041, the fourth strip-shaped sub-boss 1042, and the second screw can refer to fig. 4 or fig. 5, and the description of the embodiment of the present application is omitted here.
Optionally, the diameter of the first screw 105 may be smaller than the length of the first stripe-shaped projection 103 in the direction perpendicular to the mask body 101, and the diameter of the second screw may be smaller than the length of the second stripe-shaped projection 104 in the direction perpendicular to the mask body 101. For example, the diameter of the first screw 105 and the diameter of the second screw each range from 3mm to 15 mm.
As can be seen by referring to fig. 2 and 6, the first strip-shaped sub-tab 1031 may have a plurality of first through holes 1031a, for example, 6 first through holes 1031a are shown in fig. 6. Accordingly, the second bar-shaped sub-projection 1032 may have a plurality of second through holes 1032 a. The number of the first through holes 1031a of the first strip sub-tab 1031 may be the same as the number of the second through holes 1032a of the second strip sub-tab 1032.
Alternatively, the third strip-shaped sub-boss 1041 may have a plurality of third through holes. Accordingly, the fourth linear sub-protrusion 1042 may have a plurality of fourth through holes. The number of the third through holes of the third strip-shaped sub-projection 1041 may be the same as the number of the fourth through holes of the fourth strip-shaped sub-projection 1042.
In the embodiment of the present application, a distance between axes of every two adjacent first through holes 1031a in the plurality of first through holes 1031a, a distance between axes of every two adjacent second through holes 1032a in the plurality of second through holes 1032a, a distance between axes of every two adjacent third through holes in the plurality of third through holes, and a distance between axes of every two adjacent fourth through holes in the plurality of fourth through holes are all in a range of 15mm to 30 mm.
For example, the distance between the axes of every two adjacent first through holes 1031a is equal to the distance between the axes of every two adjacent second through holes 1032a, and is 20mm, for example. The distance between the axes of every two adjacent third through holes is equal to the distance between the axes of every two adjacent fourth through holes, for example, 20 mm.
As can be seen with reference to fig. 2 and 3, the first strip tab 1031 is distal from the center of the annular frame body 102 relative to the second strip tab 1032. The third tab 1041 is located away from the center of the annular frame body 102 relative to the fourth tab 1042.
In this embodiment, one end of the mask body 101 may be connected to the first bar-shaped sub-protrusion 1031. If the connection quality between one end of the mask body 101 and the first bar-shaped sub-projection 1031 is poor, in order to ensure the connection reliability between one end of the mask body 101 and the sub-projections, one end of the mask body 101 may be further connected to the second bar-shaped sub-projection 1032, that is, one end of the mask body 101 may be connected to both the first bar-shaped sub-projection 1031 and the second bar-shaped sub-projection 1032.
As can be seen with reference to fig. 4 and 5, the length L1 of the first strip sub-tab 1031 in the first direction M may be greater than the length L2 of the second strip sub-tab 1032 in the first direction M, which is perpendicular to the extending direction of the first strip sub-tab 1031.
Optionally, the length L1 of the second bar sub-boss 1032 in the first direction M ranges from 5mm to 10 mm. The length L2 of the first stripe sub-projection 1032 along the first direction M may be 1.5 times to 3 times the length L1 of the second stripe sub-projection 1032 along the first direction M. For example, the length L2 of the first strip sub-panel 1032 in the first direction M may be 2 times the length L1, and the length L2 of the first strip sub-panel 1032 in the first direction M may range from 10mm to 20 mm.
Since the length L1 of the first strip sub-tab 1031 in the first direction M is greater than the length L2 of the second strip sub-tab 1032 in the first direction M, the rigidity of the first strip sub-tab 1031 is greater than the rigidity of the second strip sub-tab 1032. Therefore, if one end of the mask body 101 is connected to the second strip-shaped sub-projection 1032, and the first screw 105 is used to connect the first strip-shaped sub-projection 1031 and the second strip-shaped sub-projection 1032, the second strip-shaped sub-projection 1032 can move in a direction close to the first strip-shaped sub-projection 1031 under the action of the first screw 105, and further, one end of the mask body 101 connected to the second strip-shaped sub-projection 1032 is stretched, so that the flatness of the mask body 101 is ensured.
As can be seen by referring to fig. 4 and 5, a side of the frame main body 102 away from the mask body 101 has a slope, and a first gap a between the first strip-shaped sub-projection 1031 and the second strip-shaped sub-projection 1032 may penetrate the frame main body 102. The first screw 105 can apply a force to the second strip-shaped sub-boss 1032 conveniently to adjust the flatness of the mask body 101.
In the embodiment of the application, by adjusting the fastening degree of the first screw 105 connecting the first strip-shaped sub-projection 1031 and the second strip-shaped sub-projection 1032, the degree of the second strip-shaped sub-projection 1032 moving towards the first strip-shaped sub-projection 1031 can be adjusted, and further the position of the mask plate body 101 connected with the second strip-shaped sub-projection 1032 can be adjusted. After the position of the mask plate body 101 is adjusted, an operator can stop adjusting the fastening degree of the first screw 105, so that the position of an opening for forming a film layer in the mask plate body 101 is accurate, the accuracy of the position of the film layer prepared by the mask plate is guaranteed, the quality of the film layer is good, and the yield of a display panel is high.
In addition, the other end of the mask body 101 may be connected to the third strip-shaped sub-boss 1041. If the quality of the connection between the other end of the mask body 101 and the third strip-shaped sub-boss 1041 is poor, in order to ensure the reliability of the connection between the other end of the mask body 101 and the strip-shaped sub-bosses, the other end of the mask body 101 may be further connected to the fourth strip-shaped sub-boss 1042, that is, the other end of the mask body 101 may be connected to both the third strip-shaped sub-boss 1041 and the fourth strip-shaped sub-boss 1042.
Optionally, the length of the third strip-shaped sub-projection 1041 along the second direction N may be greater than the length of the fourth strip-shaped sub-projection 1042 along the second direction N, where the second direction N is perpendicular to the extending direction of the third strip-shaped sub-projection 1041.
Alternatively, the length of the third strip-shaped sub-tab 1041 along the second direction N may be equal to the length of the first strip-shaped sub-tab 1031 along the first direction M. The length of the fourth bar-shaped sub-protrusion 1042 in the second direction N may be equal to the length of the third bar-shaped sub-protrusion 1041 in the second direction N. For example, the length of the third strip-shaped sub-projection 1041 along the second direction N may range from 5mm to 10mm, and the length of the fourth strip-shaped sub-projection 1042 along the second direction N may range from 10mm to 20 mm.
Since the length of the third strip-shaped sub-projection 1041 along the second direction N is greater than the length of the fourth strip-shaped sub-projection 1042 along the second direction N, the rigidity of the third strip-shaped sub-projection 1041 is greater than the rigidity of the fourth strip-shaped sub-projection 1042. Therefore, if the other end of the mask body 101 is connected to the fourth strip-shaped sub-boss 1042 and the third strip-shaped sub-boss 1041 and the fourth strip-shaped sub-boss 1042 are connected by a second screw, the fourth strip-shaped sub-boss 1042 can move in a direction close to the third strip-shaped sub-boss 1041 under the action of the second screw, so as to stretch the other end of the mask body 101 connected to the fourth strip-shaped sub-boss 1042, thereby ensuring the smoothness of the mask body 101.
In the embodiment of the present application, by adjusting the fastening degree of the second screw connecting the third strip-shaped sub-boss 1041 and the fourth strip-shaped sub-boss 1042, the degree of the fourth strip-shaped sub-boss 1042 moving toward the third strip-shaped sub-boss 1041 can be adjusted, and then the position of the mask body 101 connected to the fourth strip-shaped sub-boss 1042 is adjusted. After the position of this mask body 101 has been adjusted, operating personnel can stop adjusting the fastening degree of this second screw, can make the open-ended position that forms the rete in this mask body 101 comparatively accurate, and then guarantees the accuracy of the position of the rete that adopts this mask preparation to obtain, and the quality of this rete is better, and display panel's yield is higher.
Optionally, the mask body 101 provided in the embodiment of the present application may be used for preparing a light emitting layer of a subpixel in a display panel. In addition, because the light-emitting layers in the sub-pixels in the display panel need to be prepared from light-emitting materials with different colors, and the sub-pixels are small in size, the mask body 101 can be a precise mask body 101.
For example, suppose there are three color sub-pixels in the display panel, namely, a red sub-pixel, a green sub-pixel, and a blue sub-pixel. A mask body 101 is provided corresponding to the light-emitting layer of each color sub-pixel. That is, three masks are used to prepare the light emitting layer of each sub-pixel in the display panel, and the light emitting layer of the red sub-pixel, the light emitting layer of the green sub-pixel, and the light emitting layer of the blue sub-pixel are prepared respectively.
In the embodiment of the present application, if the mask body 101 is used for preparing the light emitting layer of the sub-pixel, by adjusting the fastening degree of the first screw 105 and the second screw, each opening in the mask body 101 can be located in the region where the light emitting layer to be formed is located, so as to ensure the yield of the display panel.
Fig. 7 is a schematic view of a mask body according to an embodiment of the present application. As can be seen with reference to fig. 7, the mask body 101 may have a pattern region 101a and a welding region 101 b. The pattern region 101a may be used to form a film layer, and the welding region 101b may be used to weld with the stripe sub-bump.
Alternatively, assuming that the mask body 101 is used to prepare the light-emitting layer of a sub-pixel, the pattern region 101a of the mask body 101 may have a plurality of openings, and each opening may be used to prepare the light-emitting layer of one sub-pixel. Moreover, for one mask body 101, the plurality of openings in the pattern region 101b of the mask body 101 may be openings for preparing light emitting layers of sub-pixels of the same color.
Referring to fig. 7, the mask body 101 has two welding regions 101b, wherein one welding region 101b may be used to connect with at least one of the first and second strip sub-bosses 1031 and 1032. Another weld region 101b may be used to connect with at least one of the third tab 1041 and the fourth tab 1042.
As can also be seen with reference to fig. 7, the mask body 101 may further have a clamping region 101c, and a stretching machine may clamp the clamping region 101c of the mask body 101 to move the mask body 101 to a proper position. After the mask body 101 is expanded, the clamping area 101c of the mask body 101 may be removed.
As can be seen with reference to fig. 2 and 3, the frame body 102 may be a rectangular frame body 102. Of course, the frame body 102 may also be another polygonal frame body 102, for example, a hexagonal frame body 102, which is not limited in this embodiment of the present application.
Referring to fig. 2 and 3, the first strip-shaped protrusion 103 may be disposed on the first edge 102a of the frame body 102, and the second strip-shaped protrusion 104 may be disposed on the second edge 102b of the frame body 102. Fig. 8 is a schematic view of another mask provided in the embodiment of the present application, and fig. 9 is a schematic view of another mask provided in the embodiment of the present application. Referring to fig. 8 and 9, the mask 10 may further include: a support assembly 106, a third strip boss 107, and a fourth strip boss 108.
Referring to fig. 2, 8 and 9, the third strip-shaped protrusion 107 may be disposed on the third side 102c of the frame body 102, and the fourth strip-shaped protrusion 108 may be disposed on the fourth side 102d of the frame body 102. The supporting component 106 can be located on one side of the mask body 101 close to the frame main body 102, and the supporting component 106 can be connected with the third strip-shaped boss 107 and the fourth strip-shaped boss 108, so as to support the mask body 101, avoid deformation of the mask body 101, and ensure quality of the mask 10.
Alternatively, the frame body 102, the first strip-shaped boss 103, the second strip-shaped boss 104, the third strip-shaped boss 107, and the fourth strip-shaped boss 10 may be an integral structure. Also, the material of the support member 106, the third strip-shaped projection 107, and the fourth strip-shaped projection 108 may all be invar.
Referring to fig. 8 and 9, an extending direction X of the first stripe-shaped projection 103 may be parallel to an extending direction Y of the second stripe-shaped projection 104, and an extending direction R of the third stripe-shaped projection 107 may be parallel to an extending direction S of the fourth stripe-shaped projection 108. Moreover, the first strip-shaped boss 103, the third strip-shaped boss 107, the second strip-shaped boss 104 and the fourth strip-shaped boss 108 can be sequentially connected, and the first strip-shaped boss 103, the third strip-shaped boss 107, the second strip-shaped boss 104 and the fourth strip-shaped boss 108 can be of an integrated structure. That is, the first strip-shaped boss 103, the third strip-shaped boss 107, the second strip-shaped boss 104, and the fourth strip-shaped boss 108 are connected in sequence to form a rectangular boss.
In the present embodiment, referring to fig. 8 and 9, in order to connect the support member 106 with the third strip-shaped boss 107 and the fourth strip-shaped boss 108, the third strip-shaped boss 107 may have at least one first groove 107a, and the fourth strip-shaped boss 108 may have at least one second groove 108 a. The support member 106 may be connected to the third strip-shaped projection 107 by the at least one first groove 107a and to the fourth strip-shaped projection 108 by the at least one second groove 108 a.
Illustratively, the third strip-shaped projection 107 shown in fig. 8 has two first grooves 107a, and the fourth strip-shaped projection 108 has two second grooves 108 a. The third strip-shaped projection 107 shown in fig. 9 has four first grooves 107a, and the fourth strip-shaped projection 108 has four second grooves 108 a.
Of course, referring to fig. 2, in order to ensure the reliability of the connection of the supporting member 106, the first bar-shaped protrusion 103 may have at least one third groove 103a, and the second bar-shaped protrusion 104 may have at least one fourth groove 104 a. The supporting component 106 can also be connected to the first strip-shaped boss 103 through the at least one third groove 103a, and connected to the second strip-shaped boss 104 through the at least one fourth groove 104 a.
Alternatively, referring to fig. 2 and 3, the third recess 103a may be located in a region where the first connection portion 1033 is located, and the fourth recess 104a may be located in a region where the second connection portion 1043 is located.
Illustratively, the first strip-shaped boss 103 shown in fig. 2 has three third grooves 103a, and the second strip-shaped boss 104 has three fourth grooves 104 a. The three third recesses 103a may be respectively located in an area where the first connection portion 1033 is located, and the three fourth recesses 104a may be respectively located in an area where the second connection portion 1043 is located.
In the embodiment of the present application, in order to ensure the flatness of the first strip-shaped boss 103, the second strip-shaped boss 104, the third strip-shaped boss 107, and the fourth strip-shaped boss 108 on the side away from the frame main body 102, the flatness of the mask body 101 is further ensured. On one hand, the first strip-shaped boss 103, the second strip-shaped boss 104, the third strip-shaped boss 107 and the fourth strip-shaped boss 108 can be precisely machined on the side away from the frame body 102. On the other hand, the first strip-shaped boss 103, the second strip-shaped boss 104, the third strip-shaped boss 107 and the fourth strip-shaped boss 108 are coplanar on the side away from the frame body 102. That is, the lengths of the first strip-shaped boss 103, the second strip-shaped boss 104, the third strip-shaped boss 107, and the fourth strip-shaped boss 108 in the third direction W are equal. The third direction W is perpendicular to the mask body 101.
Illustratively, the lengths of the first strip-shaped boss 103, the second strip-shaped boss 104, the third strip-shaped boss 107, and the fourth strip-shaped boss 108 along the third direction W range from 5mm to 20 mm.
Fig. 10 is a schematic view of a support assembly provided in an embodiment of the present application. Fig. 11 is a top view of the support assembly shown in fig. 10. Referring to fig. 10 and 11, the support member 106 may be a sheet structure having at least one opening 106 a. By way of example, 6 openings 106a are shown in fig. 10 and 11. Wherein, the size of each opening 106a may be the same as the size of the display panel to be prepared, and each opening 106a may enable a film layer of one display panel to be deposited on a substrate in the display panel from the opening 106a, so as to implement the preparation of the display panel.
In the embodiment of the present application, in order to ensure the quality of the prepared film layer, one surface of the mask body 101 close to the frame main body 102 needs to be coplanar with one surface of the first strip-shaped boss 103, one surface of the second strip-shaped boss 104, one surface of the third strip-shaped boss 107, and one surface of the fourth strip-shaped boss 108 close to the mask body 101.
Also, since the supporting member 106 is a sheet structure, the lengths of the respective regions in the third direction W may be the same. Therefore, the length of the first groove 107a in the third direction W (i.e., the depth of the first groove 107 a), the length of the second groove 108a in the third direction W (i.e., the depth of the second groove 108 a), the length of the third groove 103a in the third direction W (i.e., the depth of the third groove 103 a), and the length of the fourth groove 104a in the third direction W (i.e., the depth of the fourth groove 104 a) can be equal to the length of the sheet-like structure in the third direction W (i.e., the thickness of the sheet-like structure).
Optionally, the length of the first groove 107a along the third direction W, the length of the second groove 108a along the third direction W, the length of the third groove 103a along the third direction W, the length of the fourth groove 104a along the third direction W, and the length of the sheet-like structure along the third direction W are all in a range of 50 micrometers (μm) to 200 μm. For example, each 100 μm.
Alternatively, fig. 12 is a schematic view of another support assembly provided in the embodiments of the present application. Referring to fig. 12, the support assembly 106 may include a plurality of bar structures that may enclose at least one opening 106 a. By way of example, 6 openings 106a are shown in fig. 12. Wherein, the size of each opening 106a may be the same as the size of the display panel to be prepared, and each opening 106a may enable a film layer of one display panel to be deposited on a substrate in the display panel from the opening 106a, so as to implement the preparation of the display panel.
In the embodiment of the present application, the plurality of bar structures 106 may include a first bar structure 1061 and a second bar structure 1062. The first stripe structures 1061 are close to the mask body 101 relative to the second stripe structures 1062, and the extending direction G of the first stripe structures 1061 may intersect with the extending direction H of the second stripe structures 1062.
For example, the extending direction G of the first stripe structure 1061 may be parallel to the extending direction X of the first stripe projection 103, and the extending direction H of the second stripe structure 1062 may be parallel to the extending direction R of the third stripe projection 107. That is, the extending direction G of the first stripe structure 1061 is perpendicular to the extending direction H of the second stripe structure 1062. Therefore, two ends of the first bar-shaped structure 1061 may be connected to the third bar-shaped protrusion 107 and the fourth bar-shaped protrusion 108, respectively, and two ends of the second bar-shaped structure 1062 may be connected to the first bar-shaped protrusion 103 and the fourth bar-shaped protrusion 108, respectively.
Therefore, in order to make one surface of the mask body 101 close to the frame main body 102 coplanar with one surface of the mask body 101, the first strip-shaped boss 103, the second strip-shaped boss 104, the third strip-shaped boss 107, and the fourth strip-shaped boss 108 close to the mask body 101. The length of the first groove 107a in the third direction W and the length of the second groove 108a in the third direction W may be greater than the length of the third groove 103a in the third direction W and the length of the fourth groove 104a in the third direction W.
For example, the length of the third groove 103a along the third direction W and the length of the fourth groove 104a along the third direction W may be equal to the length of the second stripe structure 1062 along the third direction W (i.e., the thickness of the second stripe structure 1062). The length of the first groove 107a along the third direction W and the length of the second groove 108a along the third direction W may be equal to the sum of the lengths of the first and second stripe structures 1061 and 1062 along the third direction W (i.e., after the thickness of the first and second stripe structures 1061 and 1062).
Alternatively, the lengths of the third groove 103a, the fourth groove 104a and the second stripe structure 1062 along the third direction W may all range from 40 μm to 100 μm. The length of the first groove 107a along the third direction W, the length of the second groove 108a along the third direction W, and the sum of the lengths of the first and second stripe structures 1061 and 1062 along the third direction W may all be in a range of 90 μm to 200 μm.
To sum up, this application embodiment provides a mask plate, and the one end of the mask plate body that this mask plate includes can be connected with at least one strip sub-boss in first strip sub-boss and the second strip sub-boss, and the other end of this mask plate body can be connected with at least one strip sub-boss in third strip sub-boss and the fourth strip sub-boss. Because the two ends of the mask plate body can be respectively connected with at least one strip-shaped sub-boss, the reliability of connection between the two ends of the mask plate body and the strip-shaped sub-bosses can be ensured, and the quality of the mask plate is better. Furthermore, the quality of the film layer prepared by the mask plate can be ensured, and the yield of the display panel is improved.
Fig. 13 is a flowchart of a manufacturing method of a mask according to an embodiment of the present application. The method can be used for preparing the mask plate provided by the embodiment of the application, and is described by taking the preparation of the mask plate shown in fig. 1 as an example, with reference to fig. 13, the method may include:
step 201, providing an annular frame main body, a first strip-shaped boss, a second strip-shaped boss and a mask plate body.
Referring to fig. 2, the first strip-shaped protrusion 103 and the second strip-shaped protrusion 104 are oppositely disposed on the frame body 102 and are fixedly connected to the frame body 102. The first bar-shaped protrusion 103 may include: the first strip-shaped sub-bosses 1031 and the second strip-shaped sub-bosses 1032 are arranged at intervals in a direction perpendicular to the extending direction of the first strip-shaped bosses 103. The second strip-shaped boss 104 may include: and the third strip-shaped sub-bosses 1041 and the fourth strip-shaped sub-bosses 1042 are arranged at intervals in a direction perpendicular to the extending direction of the second strip-shaped bosses 104.
Step 202, welding one end of the mask plate body with at least one of the first strip-shaped sub-boss and the second strip-shaped sub-boss, and welding the other end of the mask plate body with at least one of the third strip-shaped sub-boss and the fourth strip-shaped sub-boss.
In this embodiment, if the welding quality is good after welding one end of the mask body 101 to one of the first strip-shaped sub-projection 1031 and the second strip-shaped sub-projection 1032, the one end of the mask body 101 does not need to be welded to another strip-shaped sub-projection. If the welding quality is poor after the one end of the mask body 101 is welded to one of the first strip-shaped sub-projection 1031 and the second strip-shaped sub-projection 1032, the one end of the mask body 101 may be welded to the other strip-shaped sub-projection. Therefore, the welding quality of one end of the mask plate body 101 and the strip-shaped sub-bosses can be guaranteed, and the reliability of welding of one end of the mask plate body 101 and the strip-shaped sub-bosses is improved.
Similarly, if the other end of the mask body 101 is welded to one of the third strip-shaped sub-boss 1041 and the fourth strip-shaped sub-boss 1042 with good welding quality, the other end of the mask body 101 does not need to be welded to another strip-shaped sub-boss. If the welding quality is poor after the other end of the mask body 101 is welded to one of the first strip-shaped sub-projection 1031 and the second strip-shaped sub-projection 1032, the other end of the mask body 101 may be welded to the other strip-shaped sub-projection. Therefore, the welding quality of the other end of the mask plate body 101 and the strip-shaped sub-bosses can be guaranteed, and the reliability of welding the other end of the mask plate body 101 and the strip-shaped sub-bosses is improved.
That is, the welding quality of the two ends of the mask body 101 and the strip-shaped sub-bosses is high, namely, the reliability of the welding of the two ends of the mask body 101 and the strip-shaped sub-bosses is high, the quality of the mask is good, the quality of a film layer prepared by the mask can be guaranteed, and the yield of the display panel is improved.
To sum up, the embodiment of the present application provides a method for manufacturing a mask, which may connect one end of a mask body with at least one strip-shaped sub-boss of a first strip-shaped sub-boss and a second strip-shaped sub-boss, and connect the other end of the mask body with at least one strip-shaped sub-boss of a third strip-shaped sub-boss and a fourth strip-shaped sub-boss. Because the two ends of the mask plate body can be respectively connected with at least one strip-shaped sub-boss, the reliability of connection between the two ends of the mask plate body and the strip-shaped sub-bosses can be ensured, and the quality of the mask plate is better. Furthermore, the quality of the film layer prepared by the mask plate can be ensured, and the yield of the display panel is improved.
Fig. 14 is a flowchart of another mask manufacturing method provided in an embodiment of the present application, where the method may be used to manufacture a mask provided in an embodiment of the present application, and referring to fig. 14, the method may include:
301, providing an annular frame main body, a first strip-shaped boss, a second strip-shaped boss and a mask plate body.
Referring to fig. 2, the first strip-shaped protrusion 103 and the second strip-shaped protrusion 104 are oppositely disposed on the frame body 102 and are fixedly connected to the frame body 102. The first bar-shaped protrusion 103 may include: the first strip-shaped sub-bosses 1031 and the second strip-shaped sub-bosses 1032 are arranged at intervals in a direction perpendicular to the extending direction of the first strip-shaped bosses 103. The second strip-shaped boss 104 may include: and the third strip-shaped sub-bosses 1041 and the fourth strip-shaped sub-bosses 1042 are arranged at intervals in a direction perpendicular to the extending direction of the second strip-shaped bosses 104.
Step 302, welding the support assembly with the first strip-shaped boss, the second strip-shaped boss, the third strip-shaped boss and the fourth strip-shaped boss.
In the embodiment of the present application, a mesh-stretching machine may be used to weld the supporting component 106 to the first groove 107a of the third strip-shaped boss 107, the second groove 108a of the fourth strip-shaped boss 108, the third groove 103a of the first strip-shaped boss 103, and the fourth groove 104a of the second strip-shaped boss 104.
And 303, welding one end of the mask plate body with the first strip-shaped sub-boss, and welding the other end of the mask plate body with the third strip-shaped sub-boss.
In this embodiment of the application, the mask plate body can be stretched to a suitable position by using a mesh stretching machine, so that the welding region 101b of the mask plate body 101 contacts with one side of the strip-shaped sub-boss far away from the frame main body 102. Then, one end of the mask body 101 is welded to the first strip-shaped sub-boss 1031 by laser generated by a screen-stretching machine, and the other end of the mask body 101 is welded to the third strip-shaped sub-boss 1041.
Referring to fig. 3, the first bar tab 1031 is away from the center of the ring-shaped frame body 102 relative to the second bar tab 1032, and the third bar tab 1041 is away from the center of the ring-shaped frame body 102 relative to the fourth bar tab 1042. That is, when the mask body 101 is primarily welded, the strip-shaped sub-protrusions away from the center of the frame body 102 may be welded.
And 304, determining the welding quality of one end of the mask plate body and the first strip-shaped sub-boss and the welding quality of the other end of the mask plate body and the third strip-shaped sub-boss.
In this embodiment, the screen expanding machine may determine the welding quality between one end of the mask body 101 and the first strip-shaped sub-projection 1031, and the welding quality between the other end of the mask body 101 and the third strip-shaped sub-projection 1041. When it is determined that the welding quality between one end of the mask body 101 and the first strip-shaped sub-boss 1031 is good, the following step 305 is not required to be executed; when it is determined that the welding quality of the one end of the mask body 101 and the first bar-shaped sub-projection 1031 is poor, the following step 305 is performed. Moreover, when it is determined that the welding quality between the other end of the mask plate body 101 and the third strip-shaped sub-boss 1041 is good, the following step 306 is not required to be executed; when it is determined that the welding quality between the other end of the mask body 101 and the third strip-shaped sub-boss 1041 is poor, the following step 306 is performed.
Of course, if it is determined that the welding quality between one end of the mask body 101 and the first strip-shaped sub-projection 1031 is good, and it is determined that the welding quality between the other end of the mask body 101 and the third strip-shaped sub-projection 1041 is good, the following step 305 and the following step 306 are not required to be executed, that is, the preparation of the mask 10 is completed.
In the embodiment of the present invention, if one end of the mask body 101 is not welded to the second stripe sub-projection 1032 in the process of manufacturing the mask 10. In the subsequent use process of the mask 10, if it is determined that the welding quality between one end of the mask body 101 and the first bar-shaped sub-projection 1031 is poor, the following step 305 may be performed again. In addition, if the other end of the mask body 101 is not welded to the fourth sub-projection 1042 in the process of manufacturing the mask 10. In the subsequent use process of the mask 10, if it is determined that the welding quality between the other end of the mask body 101 and the third sub-projection 1041 is poor, the following step 306 may be performed again.
And 305, welding one end of the mask plate body with the second strip-shaped sub-boss if at least part of the area of one end of the mask plate body and the first welding area of the first strip-shaped sub-boss is broken.
In this embodiment, if a screen printer detects that at least a partial region of the first welding region between the one end of the mask body 101 and the first bar-shaped sub-projection 1031 is broken, that is, the screen printer detects that the welding quality between the one end of the mask body 101 and the first bar-shaped sub-projection 1031 is poor. Therefore, one end of the mask body 101 can be welded to the second strip-shaped sub-boss 1032 by using a mesh-stretching machine, so that the reliability of welding between the one end of the mask body 101 and the strip-shaped sub-boss is ensured.
Then, in order to ensure the flatness of the mask body 101, the first screw 105 may be inserted into the through holes of the first through hole and the second through hole and connected to the threaded hole, and the fastening degree of the first screw 105 is adjusted, so that the second strip-shaped sub-projection 1032 moves toward the first strip-shaped sub-projection 1031, and the end of the mask body 101 connected to the second strip-shaped sub-projection 1032 is further stretched, thereby ensuring the flatness of the mask body 101.
Moreover, if the mask body 101 is used for preparing the light emitting layers of the sub-pixels, the opening in the mask body 101 can be located in the region where the light emitting layers to be formed by adjusting the fastening degree of the first screw 105, so that the yield of the display panel is ensured.
And 306, if at least part of the area in the second welding area of the mask plate body and the third strip-shaped sub-boss is broken, welding the other end of the mask plate body and the fourth strip-shaped sub-boss.
In this embodiment of the application, if a screen printer detects that at least a part of the region in the second welding region between the other end of the mask plate body 101 and the third sub-boss 1041 is broken, that is, the screen printer detects that the welding quality between the other end of the mask plate body 101 and the third sub-boss 1041 is poor, so that wrinkles exist in a part of the region of the mask plate body 101. At this time, the other end of the mask body 101 may be welded to the fourth strip-shaped sub-boss 1042 by using a mesh-stretching machine, so as to ensure the reliability of the welding between the other end of the mask body 101 and the strip-shaped sub-boss.
Then, in order to ensure the smoothness of the mask body 101, a second screw may be inserted into the unthreaded holes of the third through hole and the fourth through hole and connected to the threaded hole, and the fastening degree of the second screw is adjusted, so that the fourth strip-shaped boss 1042 moves toward the third strip-shaped boss 1041, and the other end of the mask body 101 connected to the fourth strip-shaped boss 1042 is further stretched, thereby ensuring the smoothness of the mask body 101.
Moreover, if the mask body 101 is used for preparing the light emitting layers of the sub-pixels, the opening in the mask body 101 can be located in the region where the light emitting layers to be formed are located by adjusting the fastening degree of the second screw, so that the yield of the display panel is ensured.
Optionally, the order of the steps of the manufacturing method of the mask plate provided by the embodiment of the application may be appropriately adjusted, and the steps may also be correspondingly increased or decreased according to the situation. For example, step 302 may be deleted as appropriate. Any method that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present application is covered by the protection scope of the present application, and thus the detailed description thereof is omitted.
To sum up, the embodiment of the present application provides a method for manufacturing a mask, which may connect one end of a mask body with at least one strip-shaped sub-boss of a first strip-shaped sub-boss and a second strip-shaped sub-boss, and connect the other end of the mask body with at least one strip-shaped sub-boss of a third strip-shaped sub-boss and a fourth strip-shaped sub-boss. Because the two ends of the mask plate body can be respectively connected with at least one strip-shaped sub-boss, the reliability of connection between the two ends of the mask plate body and the strip-shaped sub-bosses can be ensured, and the quality of the mask plate is better. Furthermore, the quality of the film layer prepared by the mask plate can be ensured, and the yield of the display panel is improved.
The above description is only exemplary of the present application and should not be taken as limiting, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. A mask plate, characterized in that, the mask plate includes: the mask comprises a mask body, an annular frame main body, a first strip-shaped boss and a second strip-shaped boss, wherein the first strip-shaped boss and the second strip-shaped boss are oppositely arranged on the frame main body and are fixedly connected with the frame main body;
the first strip-shaped boss comprises: the first strip-shaped sub-bosses and the second strip-shaped sub-bosses are arranged at intervals along the extending direction vertical to the first strip-shaped bosses;
the second strip-shaped boss comprises: the third strip-shaped sub boss and the fourth strip-shaped sub boss are arranged at intervals along the extending direction vertical to the second strip-shaped boss;
one end of the mask plate body is connected with at least one of the first strip-shaped sub-boss and the second strip-shaped sub-boss, and the other end of the mask plate body is connected with at least one of the third strip-shaped sub-boss and the fourth strip-shaped sub-boss.
2. A mask plate according to claim 1, wherein the first strip-shaped sub-projection has a first through hole, the second strip-shaped sub-projection has a second through hole corresponding to the first through hole, and one of the first through hole and the second through hole is a threaded hole, and the other through hole is a light hole;
the axis of the first through hole and the axis of the second through hole are perpendicular to the extending direction of the first strip-shaped sub-boss and are parallel to the mask plate body.
3. A mask plate according to claim 2, wherein the third strip-shaped sub-boss has a third through hole, the fourth strip-shaped sub-boss has a fourth through hole corresponding to the third through hole, and one of the third through hole and the fourth through hole is a threaded hole, and the other through hole is a light hole;
the axis of the third through hole and the axis of the fourth through hole are perpendicular to the extending direction of the third strip-shaped sub-boss and are parallel to the mask plate body.
4. A mask according to claim 3, further comprising: a first screw and a second screw;
the first screw is used for penetrating through the unthreaded holes in the first through hole and the second through hole and is connected with a threaded hole;
the second screw is used for penetrating through the unthreaded holes in the third through hole and the fourth through hole and is connected with a threaded hole.
5. A mask according to any one of claims 1 to 4, wherein the first strip-shaped sub-projection is away from the center of the annular frame body with respect to the second strip-shaped sub-projection, and the third strip-shaped sub-projection is away from the center of the annular frame body with respect to the fourth strip-shaped sub-projection;
the length of the first strip-shaped sub-boss along a first direction is greater than that of the second strip-shaped sub-boss along the first direction, and the first direction is perpendicular to the extending direction of the first strip-shaped sub-boss;
the length of the third strip-shaped sub-boss along the second direction is greater than that of the fourth strip-shaped sub-boss along the second direction, and the second direction is perpendicular to the extending direction of the third strip-shaped sub-boss.
6. A mask plate according to any one of claims 1 to 4, wherein the frame body is a rectangular frame body, the first strip-shaped bosses are arranged on a first side of the frame body, and the second strip-shaped bosses are arranged on a second side of the frame body; the mask plate further comprises: the supporting assembly is arranged on a third strip-shaped boss on the third side of the frame main body, and a fourth strip-shaped boss on the fourth side of the frame main body;
the support assembly is located on one side, close to the frame main body, of the mask plate body, and the support assembly is connected with the third strip-shaped boss and the fourth strip-shaped boss and used for supporting the mask plate body.
7. A mask plate according to claim 6, wherein the extending direction of the first strip-shaped bosses is parallel to the extending direction of the second strip-shaped bosses, and the extending direction of the third strip-shaped bosses is parallel to the extending direction of the fourth strip-shaped bosses;
the first strip-shaped boss, the third strip-shaped boss, the second strip-shaped boss and the fourth strip-shaped boss are sequentially connected, and the first strip-shaped boss, the third strip-shaped boss, the second strip-shaped boss and the fourth strip-shaped boss are of an integrated structure.
8. A mask according to claim 6, wherein the third strip-shaped boss has at least one first groove, and the fourth strip-shaped boss has at least one second groove;
the support assembly is connected to the third strip boss through the at least one first groove and to the fourth strip boss through the at least one second groove.
9. A manufacturing method of a mask plate is characterized by comprising the following steps:
provide annular frame main part, first strip boss, second strip boss to and the mask plate body, wherein, first strip boss with second strip boss sets up relatively in the frame main part and with frame main part fixed connection, first strip boss includes: along the perpendicular to first strip boss's extending direction interval first strip boss and the sub-boss of second strip, second strip boss includes: the third strip-shaped sub boss and the fourth strip-shaped sub boss are arranged at intervals along the extending direction vertical to the second strip-shaped boss;
and welding one end of the mask plate body with at least one of the first strip-shaped sub-boss and the second strip-shaped sub-boss, and welding the other end of the mask plate body with at least one of the third strip-shaped sub-boss and the fourth strip-shaped sub-boss.
10. The manufacturing method according to claim 9, wherein the first bar sub-boss is located away from a center of the annular frame body with respect to the second bar sub-boss; the third tab is distal from the center of the annular frame body relative to the fourth tab; the one end with the one end of mask plate body with in first strip sub-boss with the second strip sub-boss welds to the other end with the third strip sub-boss with in the fourth strip sub-boss welds, includes:
welding one end of the mask plate body with the first strip-shaped sub-boss, and welding the other end of the mask plate body with the third strip-shaped sub-boss;
determining the welding quality of one end of the mask plate body and the first strip-shaped sub-boss and the welding quality of the other end of the mask plate body and the third strip-shaped sub-boss;
if one end of the mask plate body and at least part of the first welding area of the first strip-shaped sub-boss are broken, welding one end of the mask plate body and the second strip-shaped sub-boss;
and if the other end of the mask plate body and at least part of the second welding area of the third strip-shaped sub-boss are broken, welding the other end of the mask plate body and the fourth strip-shaped sub-boss.
CN202010604899.3A 2020-06-29 2020-06-29 Mask plate and manufacturing method thereof Pending CN111593299A (en)

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Application Number Priority Date Filing Date Title
CN202010604899.3A CN111593299A (en) 2020-06-29 2020-06-29 Mask plate and manufacturing method thereof

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Application Number Priority Date Filing Date Title
CN202010604899.3A CN111593299A (en) 2020-06-29 2020-06-29 Mask plate and manufacturing method thereof

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