CN108611595A - A kind of mask plate framework and its application method and mask set - Google Patents

A kind of mask plate framework and its application method and mask set Download PDF

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Publication number
CN108611595A
CN108611595A CN201810439064.XA CN201810439064A CN108611595A CN 108611595 A CN108611595 A CN 108611595A CN 201810439064 A CN201810439064 A CN 201810439064A CN 108611595 A CN108611595 A CN 108611595A
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CN
China
Prior art keywords
lug boss
fixing lug
mask plate
frame body
fixed part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810439064.XA
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Chinese (zh)
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CN108611595B (en
Inventor
戚海平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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BOE Technology Group Co Ltd
Ordos Yuansheng Optoelectronics Co Ltd
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Priority to CN201810439064.XA priority Critical patent/CN108611595B/en
Publication of CN108611595A publication Critical patent/CN108611595A/en
Application granted granted Critical
Publication of CN108611595B publication Critical patent/CN108611595B/en
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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation

Abstract

The present invention relates to display technology field, more particularly to a kind of mask plate framework and its application method and mask set.The mask plate framework includes frame body, and a side surface of the frame body, which has, to be oppositely arranged and for the fixed part of permanent mask plate;The fixed part includes on the outside of the frame body towards at least two fixing lug boss of frame body inside successively parallel arranged.The mask plate framework can carry out the welding and use of multiple mask plate by least two fixing lug boss of parallel arranged, and then can be used repeatedly, increase operation rate, saving material and reduce production cost.

Description

A kind of mask plate framework and its application method and mask set
Technical field
The present invention relates to display technology field, more particularly to a kind of mask plate framework and its application method and mask set.
Background technology
OLED (Organic Light-Emitting Diode, Organic Light Emitting Diode) display device, which has, actively to be sent out Many advantages, such as light, driving voltage are low, angular field of view is big, fast response time, image stabilization, high resolution, before being considered as most One of the display product on way.
During preparing OLED display, generally OLED material is steamed according to predetermined extent by the method for vapor deposition It is plated on LTPS (Low Temperature Poly-silicon, low temperature polycrystalline silicon) backboard, in evaporation process, makes OLED materials Material passes through mask set by RGB organic matter vaporization plating to specified position.Mask set generally comprises mask plate framework and mask Plate, mask plate are welded on mask plate framework so that mask plate framework can only weld a mask plate, lead to existing mask sheet frame Frame cannot reuse and utilization rate it is relatively low, waste material and improve production cost the problem of.
Invention content
The present invention provides a kind of mask plate framework and its application method and mask set, which passes through parallel At least two fixing lug boss of arrangement can carry out the welding and use of multiple mask plate, and then can be used repeatedly, carry High usage saves material and reduces production cost.
In order to achieve the above objectives, the present invention provides following technical scheme:
A kind of mask plate framework, which includes frame body, and a side surface of the frame body has phase To being arranged and for the fixed part of permanent mask plate;The fixed part includes on the outside of the frame body towards the frame At least two fixing lug boss of parallel arranged successively on the inside of ontology.
In aforementioned mask plate framework, the fixed part for permanent mask plate includes that at least two fixations of parallel arranged are convex Platform, along towards the direction on the inside of the frame body, at least two fixing lug boss may include the on the outside of the frame body One fixing lug boss, the second fixing lug boss ... N fixing lug boss, N are the natural number more than or equal to 2;Mask plate is stated in use During frame, in solder mask plate for the first time on mask plate framework, mask plate can be welded and be located at mask plate frame most In first fixing lug boss in outside, when second of solder mask plate, then mask plate is welded on close to the first fixing lug boss In two fixing lug boss, can first it polish the first fixing lug boss before second of solder mask plate;According to from mask plate The outside of frame to inside sequence at least two fixing lug boss solder mask plate successively, until solid in innermost N It is a cycle to determine solder mask plate on boss;And in polishing, the fixing lug boss polished is made to all have same height, To facilitate the mask plate welding for carrying out the second wheel, third round ... in fixing lug boss or even taking turns more;Due on mask plate framework At least two fixing lug boss of parallel arranged are provided with, each fixing lug boss can weld one or many mask plates, make to cover Template framework can be used repeatedly, increase operation rate, saving material and reduce production cost.
Therefore, which can carry out the weldering of multiple mask plate by least two fixing lug boss of parallel arranged It connects and uses, and then can be used repeatedly, increase operation rate, saving material and reduce production cost.
Preferably, the orientation of at least two fixing lug boss is parallel to the length extending direction of the mask plate.
Preferably, the fixed part further includes the pedestal for being installed on the frame body, and the pedestal has away from described The mounting surface of frame body;The fixing lug boss is installed on the mounting surface.
Preferably, it is monolithic construction between the fixing lug boss and the pedestal, alternatively, the fixing lug boss is detachable Ground is installed on the pedestal.
Preferably, the fixing lug boss is removably installed in the pedestal, and the pedestal is provided with opening described in The threaded hole of fixing lug boss, the fixing lug boss, which is provided with, to be corresponded with the threaded hole and for wearing the logical of fastener The one end in hole, the fastener passes through the through-hole and the opening and is threadedly coupled with the threaded hole, for will each consolidate Determine boss and is fixedly connected on the pedestal.
Preferably, the fastener is screw.
Preferably, the height of each fixing lug boss is 3mm-7mm, and the width of each fixing lug boss is 1mm- 3mm, and the gap between the adjacent fixing lug boss is 1mm-3mm.
Preferably, the fixed part further includes multiple parallel arrangeds and being auxiliarily fixed of intersecting with the fixing lug boss is convex Platform, along the short transverse of the fixing lug boss, the top surface and the top surface that boss is auxiliarily fixed of each fixing lug boss it Between it is coplanar.
Preferably, there are multiple fixed parts in a side surface of the frame body.
In addition, the present invention also provides a kind of mask set, which includes mask plate, further includes such as above-mentioned technology Any one mask plate framework that scheme provides;The mask plate framework includes frame body, the side table of the frame body Face has the fixed part being oppositely arranged;The fixed part include on the outside of the frame body towards on the inside of the frame body according to At least two fixing lug boss of secondary parallel arranged;The both ends of the mask plate are fixedly connected in the fixing lug boss.
The present invention also provides a kind of application methods of any one the mask plate framework provided such as above-mentioned technical proposal, should Application method includes:
The mask plate framework and mask plate are provided, the mask plate framework includes frame body, the frame body One side surface has the fixed part for being used for permanent mask plate and being oppositely arranged;The fixed part includes outside the frame body At least two fixing lug boss of the side towards frame body inside successively parallel arranged;
The both ends of the mask plate are respectively welded at positioned at the frame body outermost and the opposite fixation is convex Platform;
Dismantle the mask plate.
Preferably, after the step of dismantling the mask plate, further include:
Reduce the apical side height of the fixing lug boss after dismantling the mask plate.
Preferably, the fixed part includes on the outside of the frame body towards frame body inside successively parallel row The first fixing lug boss and the second fixing lug boss of row, the both ends of the mask plate are respectively welded at positioned at the frame body most The fixing lug boss after the mask plate is dismantled in the outside and opposite fixing lug boss, the dismounting mask plate and reduction Apical side height, specifically include:
The both ends of the mask plate are respectively welded in opposite first fixing lug boss by first step;
Second step dismantles the mask plate from first fixing lug boss;
Third step reduces the apical side height of first fixing lug boss;
The both ends of the mask plate are respectively welded in opposite second fixing lug boss by four steps;
5th step dismantles the mask plate from second fixing lug boss;
6th step reduces the apical side height of second fixing lug boss.
Preferably, in the 6th step, further include:
Keep top surface and the top surface of first fixing lug boss of second fixing lug boss coplanar.
Preferably, after the 6th step, further include:
First step is repeated to the 6th step.
Compared with prior art, the invention has the advantages that:
An embodiment of the present invention provides a kind of mask plate framework and its application method and mask set, which includes Mask plate framework and the mask plate for being fixed on mask plate framework;The mask plate framework is fixed convex by at least two of parallel arranged Platform can carry out the welding and use of multiple mask plate, and then can be used repeatedly, increase operation rate, saving material and drop Low production cost.
Description of the drawings
Fig. 1 is the structural schematic diagram of mask set provided in an embodiment of the present invention;
Fig. 2 is the A-A of mask assembly that is provided in Fig. 1 to schematic cross-sectional view;
Fig. 3 is the structural schematic diagram of mask plate framework provided in an embodiment of the present invention;
Fig. 4 is a kind of close-up schematic view of fixed part in the mask plate framework provided in Fig. 3;
Fig. 5 a-5c are two kinds of schematic cross-sectional views of the B-B direction of the fixed part provided in Fig. 4;
Fig. 6 is another close-up schematic view of fixed part in the mask plate framework provided in Fig. 3;
Fig. 7 be the C-C of fixed part that is provided in Fig. 6 to schematic cross-sectional view;
Fig. 8 is the process flow chart of the application method of mask plate framework provided in an embodiment of the present invention;
Fig. 9 a-9c are the structure change schematic diagram of mask set corresponding with the application method provided in Fig. 8.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
An embodiment of the present invention provides a kind of mask plate framework and its application method and mask set, which includes Mask plate framework and the mask plate for being fixed on mask plate framework;The mask plate framework is fixed convex by at least two of parallel arranged Platform can carry out the welding and use of multiple mask plate, and then can be used repeatedly, increase operation rate, saving material and drop Low production cost.
Wherein, it please refers to Fig.1, Fig. 2 and Fig. 3, mask plate framework 11 provided in an embodiment of the present invention, the mask plate framework 11 include frame body 111, and the centre position of frame body 111 is provided with opening 113, the side surface tool of frame body 111 Have and is oppositely arranged and for the fixed part 112 of permanent mask plate 12;Mask plate framework 11, frame as shown in Fig. 1 and Fig. 3 structures One side surface of frame ontology 111 is provided with 6 opposite fixed parts 112, and the both ends of mask plate 12 are welded by solder joint 13 respectively In in the portion of being relatively fixed 112;Fixed part 112 includes parallel successively from 111 outside of frame body towards 111 inside of frame body At least two fixing lug boss 1121 of arrangement;Along the direction from 111 outside of frame body towards 111 inside of frame body, at least Two fixing lug boss 1121 may include consolidating from 111 outside of frame body towards 111 inside of frame body is arranged in order first Determine boss 11211, the second fixing lug boss 11212 ... N fixing lug boss, N is the natural number more than or equal to 2.Such as Fig. 5 a and figure Shown in 5b structures, fixed part 112 includes the fixing lug boss 1121 of 4 parallel arrangeds, and 4 fixing lug boss 1121 be respectively from The first fixing lug boss 11211, the second fixing lug boss that 111 outside of frame body is arranged in order towards 111 inside of frame body 11212, third fixing lug boss 11213 and the 4th fixing lug boss 11214, in the actual production process, fixing lug boss 1121 Setting quantity matches with actual needs, that is, can be arranged 2,3,4,5 or multiple, that is to say, that N can for 2, 3, the natural numbers such as 4,5,6.
In aforementioned mask plate framework 11, for permanent mask plate 12 each fixed part 112 include parallel arranged extremely Few two fixing lug boss 1121, during stating mask plate framework 11 in use, welding is covered for the first time on mask plate framework 11 When template 12, as shown in Fig. 9 a structures, mask plate 12 can be welded convex positioned at the fixation of mask plate frame 11 outermost first On platform 11211, when second of solder mask plate 12, as shown in Fig. 9 b structures, then mask plate 12 is welded on the second fixing lug boss On 11212, can first it polish the first fixing lug boss 11211 before second of solder mask plate 12;According to from mask The outside of plate framework 11 to inside sequence at least two fixing lug boss 1121 solder mask plate 12 successively, such as Fig. 9 c structures It is shown, until solder mask plate 12 is a cycle in innermost 4th fixing lug boss 11214;And in polishing, such as Shown in Fig. 9 c structures, the fixing lug boss polished 1121 is made to all have same height, it is enterprising in fixing lug boss 1121 to facilitate The wheel of row second, third round ... or even the welding of mask plate 12 more taken turns;Due to being provided with parallel arranged on mask plate framework 11 At least two fixing lug boss 1121, each fixing lug boss 1121 can weld one or many mask plates 12, make mask sheet frame Frame 11 can be used repeatedly, increase operation rate, saving material and reduce production cost.With fixed part 112 shown in Fig. 4 For, including four fixing lug boss 1121 of parallel arranged, that is, the first fixing lug boss 11211, the second fixing lug boss 11212, therefore third fixing lug boss 11213 and the 4th fixing lug boss 11214 pass through the first fixing lug boss 11211, second Fixing lug boss 11212, third fixing lug boss 11213 and the 4th fixing lug boss 11214 can at least fix 4 mask plates 12, Assuming that each fixing lug boss 1121 can polish once, then, each mask plate framework 11 can fix 8 mask plates, greatly The earth improves the utilization ratio of mask plate framework 11.
Therefore, which can carry out multiple mask by least two fixing lug boss 1121 of parallel arranged The welding and use of plate 12, and then can be used repeatedly, increase operation rate, saving material and reduce production cost.
As shown in Fig. 3 structures, the orientation of at least two fixing lug boss 1121 is parallel to the length extension of mask plate 12 Direction.
As shown in Fig. 5 a and Fig. 5 b structures, fixed part 112 further includes the pedestal 1122 for being installed on frame body 111, pedestal 1122 have the mounting surface away from frame body 111;Fixing lug boss 1121 is installed on mounting surface.Also, as shown in Fig. 5 a structures, It is monolithic construction between fixing lug boss 1121 and pedestal 1122, that is, fixing lug boss 1121 can be integrated into pedestal 1122 Type;Alternatively, as shown in Fig. 5 b structures, fixing lug boss 1121 is removably installed in pedestal 1122, that is, fixing lug boss 1121 can It is disassembled from pedestal 1122.
As shown in Fig. 5 b and Fig. 5 c structures, each fixing lug boss 1121 can be an overall structure, or by layer The fixing lug boss 1121 of folded setting is constituted;It is convex in some fixation when fixing lug boss 1121 is removably installed in pedestal 1122 When platform 1121 goes wrong or is undesirable, can will have defect or undesirable fixing lug boss 1121 from pedestal It disassembles on 1122, then it is repaired or replaced, imitated convenient for improving pedestal 1122 or utilizing for fixing lug boss 1121 Rate enables pedestal 1122 and fixing lug boss 1121 to reuse, and can reduce the manufacture difficulty of fixed part 112, moreover it is possible to It saves material, therefore, using the pedestal 1122 and fixing lug boss 1121 of detachable structure, mask plate frame 11 can be made to obtain Recycling, and then the utilization rate of mask plate frame 11 can be improved, the production cost of display device is reduced, product competition is improved Power.
Similarly, in process of production, can also make also to use detachable structure between pedestal 1122 and frame body 111, And then the utilization ratio of frame body 111 can also be improved, production cost can be equally reduced, product competitiveness is improved.
In a kind of specific embodiment, as shown in Fig. 5 b structures, fixing lug boss 1121 is removably installed in pedestal 1122, pedestal 1122 is provided with threaded hole of the opening towards fixing lug boss 1121, and fixing lug boss 1121 is provided with and threaded hole one One corresponds to and for wearing the through-hole of fastener 1123, one end of fastener 1123 pass through through-hole and be open and with threaded hole spiral shell Line connects, for each fixing lug boss 1121 to be fixedly connected on pedestal 1122.Fastener 1123 can be that screw, bolt etc. connect Fitting.
As shown in Fig. 5 a structures, the height of each fixing lug boss 1121 can be 3mm-7mm, each fixing lug boss 1121 Width is 1mm-3mm, and the gap between adjacent fixing lug boss 1121 is 1mm-3mm.
Specifically, in process of production, the height of each fixing lug boss 1121 can be 3mm, 3.5mm, 4mm, 4.5mm, 5mm、5.5mm、6mm、6.5mm、7mm;The width of each fixing lug boss 1121, that is, in Fig. 3 and Fig. 4 structures, fixing lug boss 1121 size from the left side of the page to right side, width dimensions are specifically as follows 1mm, 1.5mm, 2mm, 2.5mm, 3mm;And edge The orientation of fixing lug boss 1121, the gap between adjacent fixing lug boss 1121 can be 1mm, 1.5mm, 2mm, 2.5mm, 3mm;In the various sizes of fixing lug boss 1121 mentioned above, it is not limited to above-mentioned specific size, it can also be according to actual conditions Determine others actual size.
As shown in Fig. 6 and Fig. 7 structures, fixed part 112 further include parallel arranged and at least two fixing lug boss, 1121 phase That hands over is auxiliarily fixed boss 1124, and along the short transverse of fixing lug boss 1121, the top surface of each fixing lug boss 1121 and auxiliary are solid Determine coplanar between the top surface of boss 1124.
Due to fixed part 112 further include it is multiple boss 1124 is auxiliarily fixed, boss 1124 and fixing lug boss is auxiliarily fixed Can be to intersect vertically between 1121;Therefore, when being welded to mask plate 12, mask plate 12 can be welded simultaneously It in fixing lug boss 1121 and is auxiliarily fixed on boss 1124, that is, in fixing lug boss 1121 and can be auxiliarily fixed on boss 1124 Multiple solder joints 13 are arranged mask plate is fixed, boss 1124 are auxiliarily fixed due to being additionally arranged, therefore, it is possible to improve mask plate 12 stability and bonding strength, and then improve the display effect of evaporating quality and display device.
As shown in Fig. 1 and Fig. 3 structures, there are multiple fixed parts 112 in a side surface of frame body 111;Multiple fixations The quantity of boss 1121 is 2-10, such as:2,3,4,5,6,7,8,9,10.Fixing lug boss 1121 Particular number can be configured according to the actual needs of evaporation process, however it is not limited to the quantity such as 2,3,4,5,6,7,8,9,10.
On the basis of above-mentioned various embodiments, fixed part 112 can be only arranged at frame body as shown in Fig. 3 structures 111 opposite two sides, can also be arranged on four sides with frame body 111, can when being set on four sides First to use the fixed part 112 on two opposite sides, the fixed part on other two opposite sides is then reused 112, the utilization rate of mask plate framework 11 can also be improved in this way, and further decreases production cost.
In addition, as shown in Fig. 1 structures, the embodiment of the present invention additionally provides a kind of mask set 1, which includes Mask plate 12 further includes any one the mask plate framework 11 provided such as above-described embodiment;Mask plate framework 11 includes frame sheet Body 111, a side surface of frame body 111 have the fixed part 112 being oppositely arranged;Fixed part 112 includes from frame body 111 At least two fixing lug boss 1121 of the outside towards 111 inside of frame body successively parallel arranged;The both ends of mask plate 12 are solid Surely it is connected to fixing lug boss 1121.In Fig. 1 structures, mask plate framework 11 has six fixed parts 112 being oppositely arranged, and Welding be relatively fixed between portion 112 there are three mask plate 12, it is convex that the both ends of mask plate 12 are welded in fixation by solder joint 13 On platform 1121.
In addition, as shown in figure 8, the present invention also provides a kind of any one mask plate frameworks provided such as above-described embodiment 11 application method, the application method include:
Step S21, provides mask plate framework 11 and mask plate 12, and mask plate framework 11 includes frame body 111, frame sheet One side surface of body 111 has the fixed part 112 for being used for permanent mask plate 12 and being oppositely arranged;Fixed part 112 includes from frame At least two fixing lug boss 1121 of 111 outside of ontology towards 111 inside of frame body successively parallel arranged;At least two fix Boss 1121 may include the first fixing lug boss being arranged in order from 111 outside of frame body towards 111 inside of frame body 11211, the second fixing lug boss 11212 ... N fixing lug boss 1121, N are the natural number more than or equal to 2;
The both ends of mask plate 12 are respectively welded at positioned at 111 outermost of frame body and are relatively fixed convex by step S22 Platform 1121;
Step S23 dismantles mask plate 12.
Since in actual use, aforementioned mask plate framework 11 has at least two fixing lug boss 1121, simultaneously also It can further increase fixed number of times of the mask plate framework 11 to mask plate 12 by handling fixing lug boss 1121, make same One mask plate framework 11 can be generally reused many times, it is thus possible to improve the access times of mask plate framework 11, that is, be improved The utilization ratio of mask plate framework 11, so as to reduce production cost.
Specifically, after the step of dismantling mask plate 12, can also include:
Step S24 reduces the apical side height of the fixing lug boss 1121 after dismounting mask plate 12.
When reducing the apical side height of fixing lug boss 1121, doing for 1121 top surface of grinding process fixing lug boss may be used Method, can also be as shown in Fig. 5 c structures, and one in the multiple fixing lug boss 1121 being stacked under dismounting realizes.
Further, it is illustrated by taking mask plate framework 11 in Fig. 3 as an example, fixed part 112 may include from frame sheet Two fixing lug boss 1121 of 111 outside of body towards 111 inside of frame body successively parallel arranged, that is, the first fixing lug boss 11211 and second fixing lug boss 11212, the both ends of mask plate 12 are respectively welded at positioned at 111 outermost of frame body and phase To fixing lug boss 1121, dismounting mask plate 12 and reduce dismounting mask plate 12 after fixing lug boss 1121 apical side height, Specifically include following steps:
The both ends of mask plate 12 are respectively welded in the first opposite fixing lug boss 11211 by first step;In use, First the both ends of mask plate 12 are welded in 111 outermost first fixing lug boss 11211 of frame body;
Second step dismantles mask plate 12 from the first fixing lug boss 11211;
Third step polishes to reduce the top of the first fixing lug boss 11211 to the top surface of the first fixing lug boss 11211 Face height;It polishes the top surface of the first fixing lug boss 11211, specific grinding depth can be 0.05mm-0.1mm, polishing Afterwards, the top surface of the first fixing lug boss 11211 is then less than the apical side height of other fixing lug boss 1121;
The both ends of mask plate 12 are respectively welded in the second opposite fixing lug boss 11212 by four steps;Next will The both ends of mask plate 12 are welded on by solder joint 13 in the second fixing lug boss 11212 adjacent with the first fixing lug boss 11211;
5th step dismantles mask plate 12 from the second fixing lug boss 11212;
6th step polishes to the top surface of the second fixing lug boss 11212, to reduce the second fixing lug boss 11212 Apical side height, more specifically, keeping the top surface of the second fixing lug boss 11212 and the top surface of the first fixing lug boss 11211 coplanar;
In order to improve the service efficiency of aforementioned mask plate framework 11 and/or mask plate 12, and production cost is reduced, After completing above-mentioned six steps, it can continue to repeat above-mentioned first step to the 6th step, use mask sheet frame Reused after frame 11 and/or mask plate 12 are primary it is primary, of course, it is possible to according to actual conditions, to mask plate framework 11 and/ Or mask plate 12 reuses repeatedly, until mask plate framework 11 and/or mask plate 12 cannot meet production requirement.
In order to more intuitive, figuratively bright aforementioned mask plate framework 11 reuse situation, below in Fig. 3 It is illustrated for mask plate framework 11, in figure 3, fixed part 112 includes on the outside of frame body 111 towards frame body Four fixing lug boss 1121 of 111 inside parallel arrangeds successively, that is, the first fixing lug boss 11211, the second fixing lug boss 11212, Third fixing lug boss 11213 and the 4th fixing lug boss 11214, specifically used method include the following steps:
The both ends of mask plate 12 are respectively welded in the first opposite fixing lug boss 11211;As shown in Fig. 9 a structures, make The both ends of mask plate 12 are first welded in 111 outermost first fixing lug boss 11211 of frame body by the used time;
Mask plate 12 is dismantled from the first fixing lug boss 11211;
It polishes the top surface of the first fixing lug boss 11211 to reduce the apical side height of the first fixing lug boss 11211;Such as It shown in Fig. 9 b structures, polishes the top surface of the first fixing lug boss 11211, specific grinding depth can be 0.05mm- 0.1mm, after polishing, the top surface of the first fixing lug boss 11211 is then less than the apical side height of other fixing lug boss 1121;
The both ends of mask plate 12 are respectively welded in the second opposite fixing lug boss 11212;As shown in Fig. 9 b structures, connect Get off and the both ends of mask plate 12 are welded on second fixing lug boss adjacent with the first fixing lug boss 11211 by solder joint 13 On 11212;
Mask plate 12 is dismantled from the second fixing lug boss 11212;
It polishes the top surface of the second fixing lug boss 11212, to reduce the apical side height of the second fixing lug boss 11212, More specifically, keeping the top surface of the second fixing lug boss 11212 and the top surface of the first fixing lug boss 11211 coplanar;
The both ends of mask plate 12 are respectively welded in opposite third fixing lug boss 11213;
Mask plate 12 is dismantled from third fixing lug boss 11213;
It polishes the top surface of third fixing lug boss 11213, to reduce the apical side height of third fixing lug boss 11213, And keep the top surface of the first fixing lug boss 11211, the second fixing lug boss 11212 and third fixing lug boss 11213 coplanar, such as scheme Shown in 9c structures;
The both ends of mask plate 12 are respectively welded in innermost 4th fixing lug boss 11214, as shown in Fig. 9 c structures;
Mask plate 12 is dismantled from the 4th fixing lug boss 11214;
It polishes the top surface of the 4th fixing lug boss 11214, to reduce the apical side height of the 4th fixing lug boss 11214, And make the first fixing lug boss 11211, the second fixing lug boss 11212, third fixing lug boss 11213 and the 4th fixing lug boss 11214 top surface is coplanar;
The first round that four fixing lug boss 1121 are completed by above step uses, next, can also be according to above-mentioned Step repeats, no longer superfluous herein with the use that the second wheel, the third round or more that carry out four fixing lug boss 1121 are taken turns It states.
Also, in the apical side height of above-mentioned reduction fixing lug boss 1121 the step of, using the processing mode of polishing to solid Can be 0.05mm-0.1mm, example to the grinding depth of fixing lug boss 1121 when determining the apical side height of boss 1121 and being handled Such as:0.05mm、0.06mm、0.07mm、0.08mm、0.09mm、0.1mm.
Each mask plate framework 11 is can be seen that due to being provided at least by the application method of aforementioned mask plate framework 11 Two fixing lug boss 1121, then in use, can by least two fixing lug boss 1121 successively solder mask plate, and Take turns can be carried out to mask plate 12 by technique for grinding or the method for replacing fixing lug boss 1121 to fix, therefore, each more Mask plate framework 11 can reuse repeatedly, not only increase the service efficiency of mask plate framework 11, additionally it is possible to reduce production Cost, and the material for preparing mask plate framework 11 can be saved.
Obviously, those skilled in the art can carry out the embodiment of the present invention various modification and variations without departing from this hair Bright spirit and scope.In this way, if these modifications and changes of the present invention belongs to the claims in the present invention and its equivalent technologies Within the scope of, then the present invention is also intended to include these modifications and variations.

Claims (14)

1. a kind of mask plate framework, including frame body, which is characterized in that a side surface of the frame body has opposite set It sets and for the fixed part of permanent mask plate;The fixed part includes on the outside of the frame body towards the frame body At least two fixing lug boss of inside parallel arranged successively.
2. mask plate framework according to claim 1, which is characterized in that the orientation of at least two fixing lug boss It is parallel to the length extending direction of the mask plate.
3. mask plate framework according to claim 1, which is characterized in that the fixed part further includes being installed on the frame The pedestal of ontology, the pedestal have the mounting surface away from the frame body;The fixing lug boss is installed on the mounting surface.
4. mask plate framework according to claim 3, which is characterized in that be whole between the fixing lug boss and the pedestal Body formula structure, alternatively, the fixing lug boss is removably installed in the pedestal.
5. mask plate framework according to claim 4, which is characterized in that the fixing lug boss is removably installed in described Pedestal, the pedestal are provided with threaded hole of the opening towards the fixing lug boss, and the fixing lug boss is provided with and the screw thread Hole corresponds and for wearing the through-hole of fastener, one end of the fastener pass through the through-hole and the opening and with The threaded hole is threadedly coupled, for each fixing lug boss to be fixedly connected on the pedestal.
6. mask plate framework according to claim 1, which is characterized in that the height of each fixing lug boss is 3mm- The width of 7mm, each fixing lug boss are 1mm-3mm, and the gap between the adjacent fixing lug boss is 1mm-3mm.
7. according to claim 1-6 any one of them mask plate frameworks, which is characterized in that the fixed part further include it is multiple simultaneously Row arranges and boss is auxiliarily fixed with what the fixing lug boss intersected, each described solid along the short transverse of the fixing lug boss Determine boss top surface and it is described be auxiliarily fixed it is coplanar between the top surface of boss.
8. according to claim 1-6 any one of them mask plate frameworks, which is characterized in that in the side table of the frame body Face has multiple fixed parts.
9. a kind of mask set, including mask plate, which is characterized in that further include such as claim 1-9 any one of them masks Plate framework;The mask plate framework includes frame body, and a side surface of the frame body has the fixed part being oppositely arranged; The fixed part includes consolidating from frame body outside towards at least two of frame body inside successively parallel arranged Determine boss;The both ends of the mask plate are fixedly connected in the fixing lug boss.
10. a kind of application method of such as claim 1-8 any one of them mask plate frameworks, which is characterized in that including:
The mask plate framework and mask plate are provided, the mask plate framework includes frame body, the side of the frame body Surface has the fixed part for being used for permanent mask plate and being oppositely arranged;The fixed part includes from court on the outside of the frame body To at least two fixing lug boss of frame body inside successively parallel arranged;
The both ends of the mask plate are respectively welded to the fixing lug boss positioned at the frame body outermost and opposite;
Dismantle the mask plate.
11. application method according to claim 10, which is characterized in that after the step of dismantling the mask plate, also Including:
Reduce the apical side height of the fixing lug boss after dismantling the mask plate.
12. application method according to claim 11, which is characterized in that the fixed part includes outside the frame body Side is towards the first fixing lug boss and the second fixing lug boss of parallel arranged successively on the inside of the frame body, by the mask plate Both ends are respectively welded at positioned at the frame body outermost and the opposite fixing lug boss, the dismounting mask plate and drop The apical side height of the fixing lug boss after the low dismounting mask plate, specifically includes:
The both ends of the mask plate are respectively welded in opposite first fixing lug boss by first step;
Second step dismantles the mask plate from first fixing lug boss;
Third step reduces the apical side height of first fixing lug boss;
The both ends of the mask plate are respectively welded in opposite second fixing lug boss by four steps;
5th step dismantles the mask plate from second fixing lug boss;
6th step reduces the apical side height of second fixing lug boss.
13. application method according to claim 12, which is characterized in that in the 6th step, further include:
Keep top surface and the top surface of first fixing lug boss of second fixing lug boss coplanar.
14. application method according to claim 12 or 13, which is characterized in that after the 6th step, further include:
First step is repeated to the 6th step.
CN201810439064.XA 2018-05-09 2018-05-09 Mask plate frame and using method thereof and mask device Active CN108611595B (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111593299A (en) * 2020-06-29 2020-08-28 京东方科技集团股份有限公司 Mask plate and manufacturing method thereof
CN113088877A (en) * 2021-04-08 2021-07-09 京东方科技集团股份有限公司 Mask frame reusing method, mask frame and mask
CN115110028A (en) * 2022-06-23 2022-09-27 合肥维信诺科技有限公司 Mask plate frame and mask plate assembly
WO2024066146A1 (en) * 2022-09-26 2024-04-04 云谷(固安)科技有限公司 Mask frame and mask assembly
CN111593299B (en) * 2020-06-29 2024-05-14 京东方科技集团股份有限公司 Mask plate and manufacturing method thereof

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Publication number Priority date Publication date Assignee Title
CN105200370A (en) * 2015-10-27 2015-12-30 唐军 Recyclable mask plate frame and mask plate possessing same
CN106048521A (en) * 2016-06-12 2016-10-26 鄂尔多斯市源盛光电有限责任公司 Preparation method of metal mask plate and metal mask plate
CN205688000U (en) * 2016-06-29 2016-11-16 鄂尔多斯市源盛光电有限责任公司 A kind of mask plate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105200370A (en) * 2015-10-27 2015-12-30 唐军 Recyclable mask plate frame and mask plate possessing same
CN106048521A (en) * 2016-06-12 2016-10-26 鄂尔多斯市源盛光电有限责任公司 Preparation method of metal mask plate and metal mask plate
CN205688000U (en) * 2016-06-29 2016-11-16 鄂尔多斯市源盛光电有限责任公司 A kind of mask plate

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111593299A (en) * 2020-06-29 2020-08-28 京东方科技集团股份有限公司 Mask plate and manufacturing method thereof
CN111593299B (en) * 2020-06-29 2024-05-14 京东方科技集团股份有限公司 Mask plate and manufacturing method thereof
CN113088877A (en) * 2021-04-08 2021-07-09 京东方科技集团股份有限公司 Mask frame reusing method, mask frame and mask
CN115110028A (en) * 2022-06-23 2022-09-27 合肥维信诺科技有限公司 Mask plate frame and mask plate assembly
WO2024066146A1 (en) * 2022-09-26 2024-04-04 云谷(固安)科技有限公司 Mask frame and mask assembly

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