CN108611595B - Mask plate frame and using method thereof and mask device - Google Patents
Mask plate frame and using method thereof and mask device Download PDFInfo
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- CN108611595B CN108611595B CN201810439064.XA CN201810439064A CN108611595B CN 108611595 B CN108611595 B CN 108611595B CN 201810439064 A CN201810439064 A CN 201810439064A CN 108611595 B CN108611595 B CN 108611595B
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- fixing
- mask plate
- mask
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
The invention relates to the technical field of display, in particular to a mask plate frame, a using method thereof and a mask device. The mask plate frame comprises a frame body, wherein one side surface of the frame body is provided with a fixing part which is oppositely arranged and used for fixing a mask plate; the fixing part comprises at least two fixing bosses which are sequentially arranged in parallel from the outer side of the frame body to the inner side of the frame body. The mask plate frame can be used for welding and using the mask plate for multiple times through the at least two fixing bosses which are arranged in parallel, so that the mask plate frame can be repeatedly used for multiple times, the utilization rate is improved, materials are saved, and the production cost is reduced.
Description
Technical Field
The invention relates to the technical field of display, in particular to a mask plate frame, a using method thereof and a mask device.
Background
An OLED (Organic Light-Emitting Diode) display device has many advantages of active Light emission, low driving voltage, wide viewing angle range, fast response speed, stable image, high resolution, and the like, and is considered as one of the most promising display products.
In the process of manufacturing the OLED display device, generally, an OLED material is evaporated to a predetermined degree onto an LTPS (Low Temperature Poly-silicon) backplane by an evaporation method, and in the evaporation process, red, green, and blue organic substances are evaporated to a predetermined position by the OLED material through a mask device. The mask device generally comprises a mask plate frame and a mask plate, wherein the mask plate is welded on the mask plate frame, so that the mask plate frame can only weld the mask plate once, and the problems that the existing mask plate frame cannot be reused, the utilization rate is low, materials are wasted, and the production cost is increased are caused.
Disclosure of Invention
The invention provides a mask plate frame, a use method thereof and a mask device.
In order to achieve the purpose, the invention provides the following technical scheme:
a mask frame comprises a frame body, wherein one side surface of the frame body is provided with a fixing part which is oppositely arranged and used for fixing a mask; the fixing part comprises at least two fixing bosses which are sequentially arranged in parallel from the outer side of the frame body to the inner side of the frame body.
In the mask frame, the fixing portion for fixing the mask may include at least two fixing bosses arranged in parallel, and the at least two fixing bosses may include a first fixing boss and an nth fixing boss … …, where N is a natural number greater than or equal to 2, in a direction from the outer side of the frame body toward the inner side of the frame body; in the process of using the mask plate frame, when a mask plate is welded on the mask plate frame for the first time, the mask plate can be welded on a first fixed boss positioned on the outermost side of the mask plate frame, when the mask plate is welded for the second time, the mask plate is welded on a second fixed boss close to the first fixed boss, and the first fixed boss can be polished before the mask plate is welded for the second time; sequentially welding mask plates on the at least two fixed bosses according to the sequence from the outer side to the inner side of the mask plate frame until the mask plate is welded on the Nth fixed boss at the innermost side in a cycle; in addition, when polishing is carried out, the polished fixed bosses have the same height, so that mask plate welding of a second wheel, a third wheel … … and even multiple wheels can be conveniently carried out on the fixed bosses; because the mask plate frame is provided with at least two fixing bosses which are arranged in parallel, each fixing boss can be welded with the mask plate once or for many times, so that the mask plate frame can be repeatedly utilized for many times, the utilization rate is improved, the material is saved, and the production cost is reduced.
Therefore, the mask plate frame can be used for welding and using the mask plate for multiple times through the at least two fixing bosses which are arranged in parallel, so that the mask plate frame can be repeatedly used for multiple times, the utilization rate is improved, materials are saved, and the production cost is reduced.
Preferably, the arrangement direction of the at least two fixing bosses is parallel to the length extension direction of the mask plate.
Preferably, the fixing part further comprises a base mounted to the frame body, the base having a mounting surface facing away from the frame body; the fixing boss is mounted on the mounting surface.
Preferably, an integral structure is arranged between the fixing boss and the base, or the fixing boss is detachably mounted on the base.
Preferably, fixed boss detachably install in the base, the base is provided with the opening orientation the screw hole of fixed boss, fixed boss be provided with the screw hole one-to-one and be used for wearing to establish the through-hole of fastener, the one end of fastener pass the through-hole with the opening, and with screw hole threaded connection for with every fixed boss fixed connection in the base.
Preferably, the fastener is a screw.
Preferably, the height of each fixing boss is 3mm-7mm, the width of each fixing boss is 1mm-3mm, and the gap between adjacent fixing bosses is 1mm-3 mm.
Preferably, the fixing portion further includes a plurality of auxiliary fixing bosses arranged in parallel and intersecting with the fixing bosses, and a top surface of each of the fixing bosses and a top surface of the auxiliary fixing boss are coplanar in a height direction of the fixing boss.
Preferably, the frame body has a plurality of fixing parts on one side surface thereof.
In addition, the invention also provides a mask device, which comprises a mask plate and any one mask plate frame provided by the technical scheme; the mask plate frame comprises a frame body, wherein one side surface of the frame body is provided with a fixing part which is arranged oppositely; the fixing part comprises at least two fixing bosses which are sequentially arranged in parallel from the outer side of the frame body to the inner side of the frame body; both ends of the mask plate are fixedly connected to the fixed bosses.
The invention also provides a using method of any mask frame provided by the technical scheme, and the using method comprises the following steps:
providing the mask plate frame and a mask plate, wherein the mask plate frame comprises a frame body, and one side surface of the frame body is provided with a fixing part which is used for fixing the mask plate and is oppositely arranged; the fixing part comprises at least two fixing bosses which are sequentially arranged in parallel from the outer side of the frame body to the inner side of the frame body;
welding two ends of the mask plate to the fixing bosses which are located on the outermost side of the frame body and are opposite to each other respectively;
and disassembling the mask plate.
Preferably, after the step of detaching the mask plate, the method further comprises:
and reducing the height of the top surface of the fixed boss after the mask plate is detached.
Preferably, the fixing portion includes a first fixing boss and a second fixing boss sequentially arranged in parallel from the outside of the frame body toward the inside of the frame body, and the two ends of the mask plate are respectively welded to the fixing boss located at the outermost side of the frame body and opposite to the fixing boss, the mask plate is detached, and the height of the top surface of the fixing boss after the mask plate is detached is reduced, and the fixing portion specifically includes:
firstly, welding two ends of the mask plate on the opposite first fixed bosses respectively;
a second step of detaching the mask plate from the first fixing boss;
a third step of reducing the height of the top surface of the first fixed boss;
fourthly, welding two ends of the mask plate on the second fixing bosses which are opposite to each other respectively;
fifthly, detaching the mask plate from the second fixing boss;
and a sixth step of reducing the height of the top surface of the second fixing boss.
Preferably, in the sixth step, the method further includes:
and the top surface of the second fixing boss is coplanar with the top surface of the first fixing boss.
Preferably, after the sixth step, the method further comprises:
the first to sixth steps are repeatedly performed.
Compared with the prior art, the invention has the following beneficial effects:
the embodiment of the invention provides a mask plate frame, a using method thereof and a mask device, wherein the mask device comprises the mask plate frame and a mask plate fixed on the mask plate frame; the mask plate frame can be used for welding and using the mask plate for multiple times through the at least two fixing bosses which are arranged in parallel, so that the mask plate frame can be repeatedly used for multiple times, the utilization rate is improved, materials are saved, and the production cost is reduced.
Drawings
FIG. 1 is a schematic structural diagram of a mask device according to an embodiment of the present invention;
FIG. 2 is a schematic sectional view of the mask assembly provided in FIG. 1;
fig. 3 is a schematic structural diagram of a mask blank frame according to an embodiment of the present invention;
FIG. 4 is an enlarged partial view of a stationary portion of the reticle frame provided in FIG. 3;
FIGS. 5a-5c are schematic views of the B-B direction of the anchoring portion provided in FIG. 4;
fig. 6 is another enlarged partial schematic view of a stationary portion of the reticle frame provided in fig. 3;
FIG. 7 is a cross-sectional view in the direction C-C of the anchor portion provided in FIG. 6;
fig. 8 is a process flow diagram of a method of using a mask frame according to an embodiment of the present invention;
fig. 9a-9c are schematic views of variations of the structure of the masking device corresponding to the method of use provided in fig. 8.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention provides a mask plate frame, a using method thereof and a mask device, wherein the mask device comprises the mask plate frame and a mask plate fixed on the mask plate frame; the mask plate frame can be used for welding and using the mask plate for multiple times through the at least two fixing bosses which are arranged in parallel, so that the mask plate frame can be repeatedly used for multiple times, the utilization rate is improved, materials are saved, and the production cost is reduced.
Referring to fig. 1, fig. 2 and fig. 3, a mask frame 11 according to an embodiment of the present invention includes a frame body 111, an opening 113 is disposed at a middle position of the frame body 111, and a fixing portion 112 is disposed on a side surface of the frame body 111 and is opposite to the fixing portion and used for fixing a mask 12; as shown in the mask frame 11 of fig. 1 and fig. 3, one side surface of the frame body 111 is provided with 6 opposite fixing portions 112, and two ends of the mask 12 are respectively soldered to the opposite fixing portions 112 through solder joints 13; the fixing portion 112 includes at least two fixing bosses 1121 arranged in parallel in sequence from the outside of the frame body 111 toward the inside of the frame body 111; the at least two fixing bosses 1121 may include a first fixing boss 11211, a second fixing boss 11212 … …, an nth fixing boss N being a natural number greater than or equal to 2, arranged in order from the outside of the frame body 111 toward the inside of the frame body 111 in a direction from the outside of the frame body 111 toward the inside of the frame body 111. As shown in the structure of fig. 5a and 5b, the fixing portion 112 includes 4 fixing bosses 1121 arranged in parallel, and the 4 fixing bosses 1121 are respectively a first fixing boss 11211, a second fixing boss 11212, a third fixing boss 11213 and a fourth fixing boss 11214 arranged in sequence from the outer side of the frame body 111 toward the inner side of the frame body 111, and in an actual production process, the number of the fixing bosses 1121 is matched with an actual requirement, that is, 2, 3, 4, 5 or more fixing bosses 1121 may be provided, that is, N may be a natural number such as 2, 3, 4, 5, 6, etc.
In the mask frame 11, each fixing portion 112 for fixing the mask plate 12 includes at least two fixing bosses 1121 arranged in parallel, in the process of using the mask frame 11, when the mask plate 12 is first welded on the mask frame 11, as shown in the structure of fig. 9a, the mask plate 12 may be welded on a first fixing boss 11211 located at the outermost side of the mask frame 11, and when the mask plate 12 is second welded, as shown in the structure of fig. 9b, the mask plate 12 is welded on a second fixing boss 11212, and before the mask plate 12 is second welded, the first fixing boss 11211 may be polished; sequentially welding the mask plates 12 on the at least two fixing bosses 1121 in order from the outside to the inside of the mask frame 11, as shown in the structure of fig. 9c, until welding the mask plates 12 on the innermost fourth fixing boss 11214 in one cycle; and during polishing, as shown in the structure of fig. 9c, the polished fixing bosses 1121 are all made to have the same height, so as to facilitate welding of the second wheel, the third wheel … … and even multiple wheels of mask plates 12 on the fixing bosses 1121; because the mask frame 11 is provided with at least two fixing bosses 1121 arranged in parallel, each fixing boss 1121 can be welded with one or more masks 12, so that the mask frame 11 can be reused for multiple times, the utilization rate is improved, materials are saved, and the production cost is reduced. Taking the fixing portion 112 shown in fig. 4 as an example, four fixing bosses 1121, i.e., a first fixing boss 11211, a second fixing boss 11212, a third fixing boss 11213, and a fourth fixing boss 11214, are included in parallel, so that the mask plate 12 can be fixed at least 4 times by the first fixing boss 11211, the second fixing boss 11212, the third fixing boss 11213, and the fourth fixing boss 11214, and assuming that each fixing boss 1121 can be ground once, each mask plate frame 11 can be fixed 8 times, greatly improving the utilization efficiency of the mask plate frame 11.
Therefore, the mask frame 11 can perform multiple times of welding and using of the mask 12 through the at least two fixing bosses 1121 arranged in parallel, and further can be repeatedly used, improve the utilization rate, save materials, and reduce the production cost.
As shown in the structure of fig. 3, the arrangement direction of the at least two fixing bosses 1121 is parallel to the length extension direction of the mask plate 12.
As shown in fig. 5a and 5b, the fixing portion 112 further includes a base 1122 mounted on the frame body 111, and the base 1122 has a mounting surface facing away from the frame body 111; the fixing boss 1121 is attached to the mounting surface. Moreover, as shown in the structure of fig. 5a, the fixing boss 1121 and the base 1122 are of an integral structure, that is, the fixing boss 1121 and the base 1122 may be integrally formed; alternatively, as shown in fig. 5b, the fixing bosses 1121 may be detachably attached to the base 1122, that is, the fixing bosses 1121 may be detachable from the base 1122.
As shown in fig. 5b and 5c, each fixing boss 1121 may be an integral structure, or may be formed by stacking fixing bosses 1121; when the fixing bosses 1121 are detachably mounted on the base 1122, when a problem occurs in a certain fixing boss 1121, or when the fixing boss 1121 does not meet a requirement, the fixing boss 1121 having a defect or not meeting the requirement can be detached from the base 1122, and then is maintained or replaced, so that the utilization efficiency of the base 1122 or the fixing boss 1121 is improved, the base 1122 and the fixing boss 1121 can be reused, the manufacturing difficulty of the fixing portion 112 can be reduced, and raw materials can be saved.
Similarly, in the production process, a detachable structure can be used between the base 1122 and the frame body 111, so that the utilization efficiency of the frame body 111 can be improved, the production cost can be reduced, and the product competitiveness can be improved.
In a specific embodiment, as shown in fig. 5b, the fixing bosses 1121 are detachably mounted on the base 1122, the base 1122 is provided with threaded holes having openings facing the fixing bosses 1121, the fixing bosses 1121 are provided with through holes corresponding to the threaded holes one by one and used for inserting the fastening pieces 1123, and one end of the fastening piece 1123 passes through the through holes and the openings and is in threaded connection with the threaded holes for fixedly connecting each fixing boss 1121 to the base 1122. The fasteners 1123 may be screws, bolts, or the like.
As shown in the structure of fig. 5a, the height of each fixing protrusion 1121 may be 3mm to 7mm, the width of each fixing protrusion 1121 is 1mm to 3mm, and the gap between adjacent fixing protrusions 1121 is 1mm to 3 mm.
Specifically, the height of each fixing boss 1121 may be 3mm, 3.5mm, 4mm, 4.5mm, 5mm, 5.5mm, 6mm, 6.5mm, 7mm during the production process; the width of each fixing boss 1121, that is, in the structures of fig. 3 and 4, the size of the fixing boss 1121 from the left side to the right side of the page, and the width size may be 1mm, 1.5mm, 2mm, 2.5mm, 3 mm; and along the arrangement direction of the fixing bosses 1121, the gap between adjacent fixing bosses 1121 may be 1mm, 1.5mm, 2mm, 2.5mm, 3 mm; the dimensions of the fixing bosses 1121 are not limited to the specific dimensions, and other actual dimensions may be determined according to actual conditions.
As shown in fig. 6 and fig. 7, the fixing portion 112 further includes auxiliary fixing bosses 1124 arranged in parallel and intersecting with at least two fixing bosses 1121, and a top surface of each fixing boss 1121 is coplanar with a top surface of the auxiliary fixing boss 1124 along a height direction of the fixing boss 1121.
Because the fixing portion 112 further includes a plurality of auxiliary fixing bosses 1124, the auxiliary fixing bosses 1124 and the fixing bosses 1121 may intersect perpendicularly; therefore, when the mask plate 12 is welded, the mask plate 12 can be welded to the fixing bosses 1121 and the auxiliary fixing bosses 1124 at the same time, that is, the fixing bosses 1121 and the auxiliary fixing bosses 1124 can be provided with a plurality of welding spots 13 to fix the mask plate, and the auxiliary fixing bosses 1124 are added, so that the stability and the connection strength of the mask plate 12 can be improved, and the evaporation quality and the display effect of the display device can be improved.
As shown in fig. 1 and 3, a plurality of fixing parts 112 are provided on one side surface of the frame body 111; the number of the plurality of fixing bosses 1121 is 2 to 10, such as: 2, 3, 4, 5, 6, 7, 8, 9, 10. The number of the fixing bosses 1121 may be set according to the actual requirement of the evaporation process, and is not limited to 2, 3, 4, 5, 6, 7, 8, 9, 10, etc.
On the basis of the above embodiments, the fixing portions 112 may be disposed only on two opposite sides of the frame body 111 as shown in the structure of fig. 3, or may be disposed on four sides of the frame body 111, and when disposed on the four sides, the fixing portions 112 on the two opposite sides may be used first, and then the fixing portions 112 on the other two opposite sides may be used, so as to further improve the utilization rate of the mask frame 11 and further reduce the production cost.
In addition, as shown in the structure of fig. 1, an embodiment of the present invention further provides a mask device 1, where the mask device 1 includes a mask plate 12, and further includes any one of the mask plate frames 11 provided in the above embodiments; the mask frame 11 includes a frame body 111, and one side surface of the frame body 111 has a fixing portion 112 oppositely disposed; the fixing portion 112 includes at least two fixing bosses 1121 arranged in parallel in sequence from the outside of the frame body 111 toward the inside of the frame body 111; both ends of the mask plate 12 are fixedly connected to the fixing bosses 1121. As shown in fig. 1, the mask frame 11 has six opposite fixing portions 112, and three masks 12 are welded between the opposite fixing portions 112, and both ends of each mask 12 are welded to the fixing bosses 1121 through the welding points 13.
In addition, as shown in fig. 8, the present invention also provides a method of using any one of the mask frame 11 provided in the above embodiments, the method including:
step S21, providing a mask frame 11 and a mask 12, where the mask frame 11 includes a frame body 111, and one side surface of the frame body 111 has a fixing portion 112 for fixing the mask 12 and arranged oppositely; the fixing portion 112 includes at least two fixing bosses 1121 arranged in parallel in sequence from the outside of the frame body 111 toward the inside of the frame body 111; the at least two fixing bosses 1121 may include a first fixing boss 11211, a second fixing boss 11212 … …, an nth fixing boss 1121, which is a natural number greater than or equal to 2, sequentially arranged from the outer side of the frame body 111 toward the inner side of the frame body 111;
step S22, welding the two ends of the mask plate 12 to the fixing bosses 1121 located on the outermost sides of the frame body 111 and opposite to each other;
in step S23, the mask plate 12 is detached.
In an actual use process, the mask frame 11 has at least two fixing bosses 1121, and the fixing bosses 1121 are processed, so that the fixing times of the mask frame 11 to the mask 12 are further increased, and the same mask frame 11 can be reused for multiple times, so that the use times of the mask frame 11 can be increased, that is, the utilization efficiency of the mask frame 11 is increased, and the production cost can be reduced.
Specifically, after the step of detaching the mask plate 12, the method may further include:
in step S24, the top surface height of the fixing boss 1121 after the mask plate 12 is detached is lowered.
When the height of the top surface of the fixing protrusion 1121 is reduced, the top surface of the fixing protrusion 1121 may be polished, or as shown in fig. 5c, one of the fixing protrusions 1121 stacked in the lower layer may be removed.
Further, taking the mask frame 11 in fig. 3 as an example for illustration, the fixing portion 112 may include two fixing bosses 1121, i.e., a first fixing boss 11211 and a second fixing boss 11212, arranged in parallel from the outer side of the frame body 111 toward the inner side of the frame body 111, respectively welding two ends of the mask 12 to the fixing bosses 1121 located at the outermost side of the frame body 111 and opposite to each other, detaching the mask 12, and reducing the height of the top surfaces of the fixing bosses 1121 after detaching the mask 12, specifically including the following steps:
a first step of welding both ends of the mask plate 12 to the first fixing bosses 11211, respectively; when in use, the two ends of the mask plate 12 are welded on the first fixed bosses 11211 at the outermost side of the frame body 111;
a second step of detaching the mask plate 12 from the first fixing bosses 11211;
a third step of grinding the top surface of the first fixing boss 11211 to reduce the height of the top surface of the first fixing boss 11211; polishing the top surface of the first fixing boss 11211, wherein the specific polishing depth can be 0.05mm-0.1mm, and after polishing, the top surface of the first fixing boss 11211 is lower than the top surface height of other fixing bosses 1121;
a fourth step of welding both ends of the mask plate 12 to the second fixing bosses 11212 opposite thereto, respectively; then, welding two ends of the mask plate 12 on second fixing bosses 11212 adjacent to the first fixing bosses 11211 through welding points 13;
a fifth step of detaching the mask plate 12 from the second fixing bosses 11212;
a sixth step of grinding the top surface of the second fixing boss 11212 to reduce the height of the top surface of the second fixing boss 11212, more specifically, to make the top surface of the second fixing boss 11212 coplanar with the top surface of the first fixing boss 11211;
in order to improve the utilization efficiency of the mask frame 11 and/or the mask plate 12 and reduce the production cost, after the six steps are completed, the first step to the sixth step may be continuously and repeatedly executed, and the mask frame 11 and/or the mask plate 12 may be reused once after the mask frame 11 and/or the mask plate 12 is used once, but of course, the mask frame 11 and/or the mask plate 12 may be repeatedly used for multiple times according to actual situations until the mask frame 11 and/or the mask plate 12 cannot meet the production requirements.
In order to more intuitively and vividly explain the above repeated use of the mask frame 11, the mask frame 11 in fig. 3 is taken as an example for explanation, in fig. 3, the fixing portion 112 includes four fixing bosses 1121, namely, a first fixing boss 11211, a second fixing boss 11212, a third fixing boss 11213 and a fourth fixing boss 11214, which are sequentially arranged in parallel from the outer side of the frame body 111 toward the inner side of the frame body 111, and the specific use method includes the following steps:
welding two ends of the mask plate 12 on the opposite first fixing bosses 11211 respectively; as shown in the structure of fig. 9a, in use, first, two ends of the mask plate 12 are welded on the first fixing bosses 11211 located at the outermost sides of the frame body 111;
detaching the mask plate 12 from the first fixing bosses 11211;
grinding the top surface of the first fixing boss 11211 to reduce the height of the top surface of the first fixing boss 11211; as shown in the structure of fig. 9b, the top surface of the first fixing boss 11211 is polished to a depth of 0.05mm to 0.1mm, and after polishing, the top surface of the first fixing boss 11211 is lower than the top surface of the other fixing bosses 1121;
welding two ends of the mask plate 12 on the opposite second fixing bosses 11212 respectively; as shown in the structure of fig. 9b, two ends of the mask plate 12 are welded to the second fixing bosses 11212 adjacent to the first fixing bosses 11211 by the welding points 13;
detaching the mask plate 12 from the second fixing bosses 11212;
grinding the top surface of the second fixing boss 11212 to reduce the height of the top surface of the second fixing boss 11212, more specifically, to make the top surface of the second fixing boss 11212 coplanar with the top surface of the first fixing boss 11211;
welding both ends of the mask plate 12 to the opposite third fixing bosses 11213, respectively;
detaching the mask plate 12 from the third fixing bosses 11213;
polishing the top surface of the third fastening protrusion 11213 to reduce the height of the top surface of the third fastening protrusion 11213 and make the top surfaces of the first fastening protrusion 11211, the second fastening protrusion 11212 and the third fastening protrusion 11213 coplanar, as shown in the structure of fig. 9 c;
welding two ends of the mask plate 12 on the innermost fourth fixing bosses 11214 respectively, as shown in the structure of fig. 9 c;
the mask plate 12 is detached from the fourth fixing bosses 11214;
polishing the top surface of the fourth fixing boss 11214 to reduce the height of the top surface of the fourth fixing boss 11214, and making the top surfaces of the first fixing boss 11211, the second fixing boss 11212, the third fixing boss 11213 and the fourth fixing boss 11214 coplanar;
the first round of use of the four fixing bosses 1121 is completed through the above steps, and then, the above steps may be repeated to use a second round, a third round or more rounds of use of the four fixing bosses 1121, which is not described herein again.
In the step of reducing the height of the top surface of the fixing boss 1121, when the height of the top surface of the fixing boss 1121 is processed by polishing, the polishing depth of the fixing boss 1121 may be 0.05mm to 0.1mm, for example: 0.05mm, 0.06mm, 0.07mm, 0.08mm, 0.09mm, 0.1 mm.
As can be seen from the use method of the mask frame 11, since each mask frame 11 is provided with at least two fixing bosses 1121, in the use process, masks can be sequentially welded through the at least two fixing bosses 1121, and the mask 12 can be fixed by a polishing process or a method of replacing the fixing bosses 1121 through multiple rounds, so that each mask frame 11 can be reused for multiple times, the use efficiency of the mask frame 11 is improved, the production cost can be reduced, and materials for preparing the mask frame 11 can be saved.
It will be apparent to those skilled in the art that various changes and modifications may be made in the embodiments of the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (13)
1. A mask plate frame comprises a frame body and is characterized in that one side surface of the frame body is provided with a fixing part which is oppositely arranged and used for fixing a mask plate; the fixing part comprises at least two fixing bosses which are sequentially arranged in parallel from the outer side of the frame body to the inner side of the frame body;
each fixation boss is of unitary construction or, alternatively, each fixation boss includes a plurality of sub-portions arranged in layers.
2. The mask frame according to claim 1, wherein the at least two fixing bosses are arranged in a direction parallel to a lengthwise extending direction of the mask.
3. A reticle frame according to claim 1, wherein the fixture further comprises a pedestal mounted to the frame body, the pedestal having a mounting face facing away from the frame body; the fixing boss is mounted on the mounting surface.
4. The mask frame of claim 3 wherein the mounting bosses are integral with the base or the mounting bosses are removably mounted to the base.
5. The mask frame according to claim 4, wherein the fixing bosses are detachably mounted on the base, the base is provided with threaded holes with openings facing the fixing bosses, the fixing bosses are provided with through holes corresponding to the threaded holes one by one and used for penetrating fasteners, and one ends of the fasteners penetrate through the through holes and the openings and are in threaded connection with the threaded holes for fixedly connecting each fixing boss to the base.
6. The mask frame of claim 1 wherein the height of each of the fixing bosses is 3mm to 7mm, the width of each of the fixing bosses is 1mm to 3mm, and the gap between adjacent fixing bosses is 1mm to 3 mm.
7. A mask frame according to any one of claims 1 to 6, wherein the fixing portion further comprises a plurality of auxiliary fixing projections arranged in parallel and intersecting with the fixing projections, and a top surface of each of the fixing projections and a top surface of the auxiliary fixing projection are coplanar in a height direction of the fixing projection.
8. The mask frame according to any one of claims 1 to 6, wherein a plurality of the fixing portions are provided on one side surface of the frame body.
9. A mask arrangement comprising a mask plate, characterized by further comprising a mask plate frame according to any one of claims 1-8; the mask plate frame comprises a frame body, wherein one side surface of the frame body is provided with a fixing part which is arranged oppositely; the fixing part comprises at least two fixing bosses which are sequentially arranged in parallel from the outer side of the frame body to the inner side of the frame body; both ends of the mask plate are fixedly connected to the fixed bosses.
10. A method of using the reticle frame of any one of claims 1-8, comprising:
providing the mask plate frame and a mask plate, wherein the mask plate frame comprises a frame body, and one side surface of the frame body is provided with a fixing part which is used for fixing the mask plate and is oppositely arranged; the fixing part comprises at least two fixing bosses which are sequentially arranged in parallel from the outer side of the frame body to the inner side of the frame body;
welding two ends of the mask plate to the fixing bosses which are located on the outermost side of the frame body and are opposite to each other respectively;
disassembling the mask plate;
after the step of disassembling the mask plate, the method further comprises the following steps:
and reducing the height of the top surface of the fixed boss after the mask plate is detached.
11. The use method according to claim 10, wherein the fixing portion includes a first fixing boss and a second fixing boss arranged in parallel from the outer side of the frame body toward the inner side of the frame body, and the steps of respectively welding two ends of the mask plate to the fixing bosses located at the outermost side of the frame body and opposite to each other, detaching the mask plate, and lowering the height of the top surfaces of the fixing bosses after detaching the mask plate specifically include:
firstly, welding two ends of the mask plate on the opposite first fixed bosses respectively;
a second step of detaching the mask plate from the first fixing boss;
a third step of reducing the height of the top surface of the first fixed boss;
fourthly, welding two ends of the mask plate on the second fixing bosses which are opposite to each other respectively;
fifthly, detaching the mask plate from the second fixing boss;
and a sixth step of reducing the height of the top surface of the second fixing boss.
12. The use method according to claim 11, wherein in the sixth step, further comprising:
and the top surface of the second fixing boss is coplanar with the top surface of the first fixing boss.
13. Use according to claim 11 or 12, characterized in that it further comprises, after said sixth step:
the first to sixth steps are repeatedly performed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810439064.XA CN108611595B (en) | 2018-05-09 | 2018-05-09 | Mask plate frame and using method thereof and mask device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810439064.XA CN108611595B (en) | 2018-05-09 | 2018-05-09 | Mask plate frame and using method thereof and mask device |
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| CN108611595A CN108611595A (en) | 2018-10-02 |
| CN108611595B true CN108611595B (en) | 2021-03-16 |
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| CN201810439064.XA Active CN108611595B (en) | 2018-05-09 | 2018-05-09 | Mask plate frame and using method thereof and mask device |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113088877A (en) * | 2021-04-08 | 2021-07-09 | 京东方科技集团股份有限公司 | Mask frame reusing method, mask frame and mask |
| CN115110028A (en) * | 2022-06-23 | 2022-09-27 | 合肥维信诺科技有限公司 | Mask plate frame and mask plate assembly |
| CN115418605B (en) * | 2022-09-26 | 2024-04-16 | 云谷（固安）科技有限公司 | Mask plate frame and mask plate assembly |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105200370A (en) * | 2015-10-27 | 2015-12-30 | 唐军 | Recyclable mask plate frame and mask plate possessing same |
| CN205688000U (en) * | 2016-06-29 | 2016-11-16 | 鄂尔多斯市源盛光电有限责任公司 | A kind of mask plate |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106048521B (en) * | 2016-06-12 | 2018-09-18 | 鄂尔多斯市源盛光电有限责任公司 | A kind of preparation method and metal mask plate of metal mask plate |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105200370A (en) * | 2015-10-27 | 2015-12-30 | 唐军 | Recyclable mask plate frame and mask plate possessing same |
| CN205688000U (en) * | 2016-06-29 | 2016-11-16 | 鄂尔多斯市源盛光电有限责任公司 | A kind of mask plate |
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| CN108611595A (en) | 2018-10-02 |
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