JP2006169587A - Method and device for mounting metal mask on frame - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and a device for mounting a metal mask on a frame where, at the time when the four sides of a metal mask 1 provided with a plurality of mask parts 2 are pulled by a plurality of clamps 18, so as to be drawn into a state free from distortion and sagging, interference between the clamps arranged with the corner parts of the metal mask interposed is avoided, and the same can be drawn to the corner parts at a prescribed dimensional precision. <P>SOLUTION: Clamps 18 arranged with the corner parts of a metal mask 1 interposed are beforehand made movable to a direction perpendicular to a tensile force applying direction, and, at the time when the metal mask is pulled by the clamps 18 adjoining with the corner parts interposed to the directions A, B perpendicular to each other, the clamps 18 move in following-up the movement of the metal mask, thus interference between the clamps is avoided, and the metal mask 1 can be smoothly drawn to the corner parts. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a metal having a very thin and different region of rigidity, such as a metal mask having a mask portion having a large number of openings, which is used for a vapor deposition mask used in an organic EL element manufacturing process. The present invention relates to a method and an apparatus for attaching a mask to a frame-like frame in a flat state without distortion.

  Conventionally, vacuum vapor deposition is performed in the manufacture of organic EL elements, and a metal mask having a mask portion having a large number of elongated minute openings that allow vapor deposition is used as the vapor deposition mask. In vapor deposition, the metal mask is attached to a frame having a large rigidity having an opening larger than that of the mask by a magnet or the like. However, in recent years, when the patterning has been miniaturized and the openings formed in the mask portion have become finer and the thickness of the metal mask itself has become thinner, the metal mask is simply attached to a frame-like frame with a magnet or the like. Only by using and fixing, there arises a problem that the mask portion is distorted or sag, and the accuracy of the opening cannot be maintained.

  Therefore, as a result of studies to solve this problem, the applicant of the present invention manufactured each of the four sides of the metal mask even in a multi-sided metal mask having a structure in which a plurality of mask portions are formed with an extremely thin metal plate. By gripping with multiple clamps, applying tensile force to the metal mask with each clamp, and adjusting the tensile force for each clamp, the metal mask is in a flat state without distortion or sagging, and each mask part Since the elongated openings can be held in a straight line at a constant pitch and fixed to the frame-like frame by spot welding or the like in that state, the metal mask is flattened by applying a tensile force even after the clamp is removed. Therefore, it is found that a multi-face mask can be held without distortion and sagging by using a frame with a simple structure. Mask has been developed a method and apparatus for securing the frame-shaped frame without distortion and sagging state (JP 2004-311335 JP reference, see JP 2004-311336).

However, as shown in FIG. 12, when the metal mask 1 having the plurality of mask portions 2 is held by the clamps 18 of the plurality of tension units 13 and a tensile force is applied in the directions indicated by arrows A and B, the metal mask 1 Since there is no mask part at the corner part, the rigidity is higher than other parts and it is difficult to stretch, and the tension directions A and B of the tension unit 13 arranged across the corner part are orthogonal to each other. They cannot interfere with each other and cannot be pulled sufficiently. For this reason, the corner portion of the effective area of the metal mask 1 that should be pulled to the position indicated by the symbol P may be pulled only to the position indicated by the symbol P ′. It was. For this reason, for example, in the case of a multi-face mask for vapor deposition used for manufacturing an organic EL element, a total pitch of ± 10 μm or less may be required with respect to the position of each mask portion 2, but the mask near the corner portion of the metal mask. Part 2 sometimes did not reach the target accuracy. To avoid this problem, when applying a tensile force to the metal mask 1, repeat the operation of applying the tensile force by alternately removing the clamps of the tension units arranged across the corners. Is effective, but requires extra work and takes time. Further, in the method described in Japanese Patent Application Laid-Open No. 2004-311336, when a tension is applied to the metal mask 1, the corner portion is first gripped by a clamp, and a diagonal tensile force is applied to the corner portion to thereby remove the corner portion. Stretching and then adding the tensile force by adding the four sides of the metal mask with multiple clamps, but this method also takes time and time because it applies the tensile force in two stages. there were.
JP 2004-31335 A JP 2004-31335 A

  The present invention was made in view of such problems, and a metal mask having regions with different rigidity, such as a multifaceted mask for vapor deposition in which a mask portion having a large number of openings is formed at a plurality of locations, A metal mask frame that stretches the corners with a simple operation and improves the positioning accuracy of the masks located near the corners when being fixed to a frame-like frame without distortion or sagging. It is an object to provide an attachment method and apparatus.

  The invention according to claim 1 of the present application to solve the above-described problem is a tensioning process in which each of the four sides of the metal mask is held by a plurality of clamps and the metal mask is stretched by applying a tensile force. And a step of fixing the stretched metal mask to a frame-shaped frame, and in the tensioning step, a clamp that holds at least the vicinity of the corner of the metal mask is parallel to the metal mask and in the direction in which a tensile force is applied. The metal mask frame mounting method is characterized in that a tensile force is applied in such a manner that the metal mask can move in a direction perpendicular to the metal mask.

  The invention according to claim 2 provides an apparatus used for carrying out the above-described method for mounting the frame of the metal mask, corresponding to each side so that a tensile force can be applied to each of the four sides of the metal mask. A metal mask frame mounting apparatus comprising a plurality of tension units provided and fixed to a frame-shaped frame in a state where the metal mask is stretched, wherein the tension unit holds the metal mask. And a clamp moving means for moving the clamp to apply a tensile force to the metal mask held by the clamp, and at least a tension unit arranged to hold the vicinity of the corner of the metal mask. The clamp is parallel to the gripped metal mask and perpendicular to the direction in which the tensile force is applied A frame mounting apparatus of the metal mask, which is a movable.

  The invention according to claim 3 is the above-described invention according to claim 2, wherein a tension unit disposed so as to grip the vicinity of a corner portion of the metal mask is a first base member attached at a fixed position, and A second base member held on the first base member so as to be parallel to the metal mask held by the clamp and movable in a direction perpendicular to the direction in which the tensile force is applied; and a tensile force applied to the metal mask on the second base member A clamp support base that is movably held in parallel with the additional direction; and the clamp and a clamp opening / closing mechanism that opens and closes the clamp are held by the clamp support base, and the clamp moving means is connected to the second base. The clamp support is connected to the second base member so as to move in the direction in which the tensile force is applied.

  According to a fourth aspect of the present invention, there is provided the base member according to the second aspect of the invention, wherein a tension unit arranged so as to grip the vicinity of the corner portion of the metal mask is attached to a fixed position, and the base member A first clamp support that is movably held parallel to the direction in which the tensile force is applied to the metal mask, and the first clamp support is parallel to the metal mask held by the clamp and in the direction in which the tensile force is applied. The second clamp support base is movably held in a perpendicular direction, and the clamp and a clamp opening / closing mechanism for opening and closing the clamp are held by the second clamp support base, and the clamp moving means is the base. The first clamp support base is connected to the base member so as to move in the direction in which a tensile force is applied. .

  According to a fifth aspect of the present invention, in the above-mentioned second aspect of the present invention, a base member attached to a fixed position, and a base member disposed so as to grip the vicinity of a corner portion of the metal mask, and the base member And a clamp support that is held so as to be movable parallel to the direction in which the tensile force is applied to the metal mask, and the clamp is mounted on the clamp support and parallel to the metal mask gripped by the clamp and A clamp opening / closing mechanism that opens and closes the clamp is held by the clamp support base, the clamp moving means is held by the base member, and the clamp support base is held by the base. The member is connected so as to move in the direction in which the tensile force is applied.

  The above-described metal mask frame mounting method and apparatus according to the present invention is used when the metal mask is held in a state free from distortion and sagging by gripping the four sides of the metal mask with a plurality of clamps and applying a tensile force to the metal mask. Because the clamp that holds the vicinity of the corner of the metal mask can move in the direction perpendicular to the tensile direction, the clamps placed across the corner do not interfere with each other. The corner portion of the metal mask can be stretched to a predetermined position, and the metal mask can be positioned within a predetermined dimensional accuracy range including the corner portion without distortion and sagging. Can be fixed to the frame. Thus, in the mask unit formed by attaching the metal mask to the frame by the method and apparatus of the present invention, the position of each part in the metal mask (for example, the metal mask provided with a plurality of mask parts) is in a state without distortion and sagging. In this case, the position of each mask portion is maintained within a predetermined dimensional accuracy including the corner portion. By using this mask unit, for example, vapor deposition can be performed to accurately deposit a fine pattern.

  INDUSTRIAL APPLICABILITY The present invention can be applied to a case where an arbitrary metal mask that needs to be held in a flat state without distortion or sagging is attached to a frame-like frame, but it is particularly required to manufacture an organic EL element that requires high precision. It is preferable to apply to a metal mask used as a multi-face mask for vapor deposition. Hereinafter, a preferred embodiment of the present invention will be described by taking a metal mask used as a multi-face mask for vapor deposition in manufacturing an organic EL element as an example.

  FIG. 10 is a schematic perspective view showing a metal mask and a frame-like frame handled by a frame mounting apparatus according to an embodiment to be described later, and FIG. 11 is a schematic perspective view showing a mask unit formed by fixing the metal mask to the frame. . In FIG. 10, 1 is a right-sided quadrilateral metal mask used as a vapor deposition mask, and a plurality of mask portions 2 are formed side by side. Each mask portion 2 is provided with a large number of minute openings allowing vapor deposition. The shape and arrangement of the openings in each mask part 2 are arbitrary. For example, those in which elongated slit-like openings are arranged in parallel, those in which slot-like openings are arranged in the vertical direction and in parallel, etc. Can be mentioned. A frame 3 having a large rigidity for attaching the metal mask 1 includes an opening 4 having a size including a region (referred to as an effective region) in which a large number of mask portions 2 of the metal mask 1 are formed. The metal mask 1 is made larger in both the vertical and horizontal directions than the frame 3, and an easy cutting line 5 that can be easily cut by bending is formed at a position substantially corresponding to the outer peripheral edge of the frame 3. The easy cutting line 5 has a strength that can withstand a tensile force applied to the metal mask 1. The thickness of the metal mask 1, the dimensions of the mask portion 2, the dimensions of a large number of minute openings formed thereon are not particularly limited, but as a typical example, the thickness of the metal mask 1 is 30 to 200 μm. The dimensions of the mask portion 2 are 50 to 70 mm in length, 30 to 50 mm in width, 40 to 100 μm in width of the opening, 80 to 200 μm in width of the non-porous portion between the openings arranged in parallel, etc. it can. 11 is formed by fixing the metal mask 1 to the frame 3 by spot welding or the like, and cutting and removing the peripheral portion using the easy cutting line 5.

  1 is a schematic plan view of a frame mounting apparatus for a metal mask according to an embodiment of the present invention, FIG. 2 is a schematic sectional view of the frame mounting apparatus, and FIGS. 3 (a) and 3 (b) are provided in the frame mounting apparatus. FIGS. 4A and 4B are schematic side views showing the tension unit 13 in different operating states. FIGS. 4A and 4B show the tension unit 13A provided at a position for gripping the vicinity of the corner of the metal mask in the frame mounting device. FIG. 5 is a schematic front view showing the tension unit 13A shown in FIG. 4B in the direction of the arrow V-V. 1 and 2, a metal mask frame mounting apparatus, generally indicated by reference numeral 10, holds a tension by holding a support 11 and a plurality of locations on each of the four sides of the metal mask 1 on the support 11. A plurality of tension units 13 and 13A arranged so that they can be added are provided. Here, the tension unit 13A is disposed at a position for gripping the vicinity of the corner portion of the metal mask 1, and the tension unit 13 is disposed in another region.

  As shown in an enlarged view in FIG. 3, the tension unit 13 includes a base member 15 fixed to a support rail 14 provided on the support base 11 so that the mounting position can be adjusted, and a linear motion guide to the base member 15. 16, a clamp support base 17 that is held so as to be movable in a direction in which a tensile force is applied to the metal mask, a clamp 18 that is provided on the clamp support base 17 and grips the metal mask 1, and opens and closes the clamp 18. A clamp opening / closing mechanism 19 and a clamp moving means 23 for moving the clamp support 18 holding the clamp 18 relative to the base member 15 so as to apply a tensile force to the metal mask 1 held by the clamp 18 are provided.

  The clamp 18 includes a fixed claw 18a fixed to the clamp support base 17, and a movable claw 18b that can be opened and closed with respect thereto. The clamp opening / closing mechanism 19 includes a toggle mechanism 20 and a cylinder mechanism 21 such as an air cylinder that opens and closes the movable claw 18 b of the clamp 18 via the toggle mechanism 20. The toggle mechanism 20 includes a first lever 20b that is pivotably held around a pin 20a on a support plate 17a attached to the clamp support base 17, and a first lever 20b that is pivotally held around a pin 20c on the support plate 17a. A two lever 20d, a link 20e for connecting the first lever 20b and the second lever 20d, and the like are provided. A cylinder mechanism 21 is connected to the first lever 20b, and a movable claw of the clamp 18 is connected to the second lever 20d. 18b is rotatably held. Further, an adjustment screw 20f that supports the back surface of the movable claw 18b is attached to the tip of the second lever 20d, and this adjustment screw 20f allows the movement when the clamp 18 is in the closed position as shown in FIG. The height position of the claw 18b can be adjusted. Although illustration is omitted, as shown in FIG. 3A, the movable claw 18b is brought into contact with the adjusting screw 20f even when the second lever 20d is pivoted upward to open the movable claw 18b. A spring is provided for holding in position. With these configurations, the cylinder mechanism 21 can reciprocate the first lever 20b to open and close the clamp 18, and in the closed position shown in FIG. 3B, the metal mask 1 is fixed to the fixed claw 18a and the movable claw 18b. Can be firmly gripped.

  The clamp moving means 23 reciprocates the clamp support base 17 with respect to the base member 15, and an air cylinder is used in this embodiment. As shown in FIG. 3B, the clamp moving means 23 moves the clamp support base 17 in the direction of arrow A, so that the tensile force in the direction of arrow A is applied to the metal mask 1 held by the clamp 18. Can be added. Although the air cylinder is used here as the clamp moving means 23, the present invention is not limited to this, and a hydraulic cylinder, a servo motor, or the like may be used.

  A frame support 25 that supports the frame 3 is attached to the base member 15. The frame support 25 is placed on the metal mask 1 on which the frame 3 is placed so that the frame 3 is positioned at a predetermined position in a horizontal plane, and the upper surface of the frame 3 is held by the clamp 18 and applied with tension. It arrange | positions so that it can also position in an up-down direction so that it may become a position which touches substantially. Further, the frame support 25 also acts as a stopper for restricting the advance position of the clamp support base 17.

  As shown in FIGS. 4 and 5, the tension unit 13 </ b> A arranged so as to hold the vicinity of the corner portion of the metal mask 1 is fixed to the support rail 14 provided on the support base 11 in an adjustable form. The first base member 15A, and the first base member 15A through the linear guide 27, parallel to the metal mask 1 held by the clamp 18 and perpendicular to the direction in which the tensile force is applied to the metal mask. The second base member 15B held movably in the first base member 15 and a direction in which a tensile force is applied to the metal mask via the second base member 15B via the linear motion guide 16 (the same direction as the moving direction of the clamp support 17 described later) ) Movably held by the clamp support 17, the clamp 18 provided on the clamp support 17 and holding the metal mask 1, and the clamp 18 by the toggle mechanism 2. A clamp opening / closing mechanism 19 having a cylinder mechanism 21 such as an air cylinder that opens and closes via a clamp, and a clamp support base 17 holding the clamp 18 so that a tensile force is applied to the metal mask 1 held by the clamp 18. A clamp moving means 23 for moving the member 15B and a frame support 25 for supporting the frame 3 are provided. Here, since the second base member 15B can be moved in the direction perpendicular to the moving direction of the clamp support base 17 by the linear motion guide 27, the clamp support base 17 and the clamps 18 held by the second base member 15B can be moved to the metal mask 1. It is possible to move in the direction A in which a tensile force is applied to BB and in the BB direction perpendicular thereto. The second base member 15B is allowed to move between the first base member 15A and the second base member 15B when a force in the BB direction is applied to the second base member 15B, but the force is lost. A position return spring is provided for returning to the original center position. The frame support 25 is held by the first base member 15A. Other structures are the same as those of the tension unit 13 shown in FIG.

  1 and 2, the tension units 13 and 13A are arranged so that each side of the metal mask 1 can be gripped by a plurality of tension units 13 and 13A and tension can be applied to the sides in a perpendicular direction. Yes. Further, the clamps 18 of the plurality of tension units 13 and 13A arranged so as to hold each side of the metal mask 1 are arranged in accordance with the mask part 2 and the non-mask part of the metal mask 1, and accordingly, The region extending in the vertical direction and the region extending in the horizontal direction in which the mask portion 2 of the metal mask 1 is formed, and the region extending in the vertical direction and the region extending in the horizontal direction without the mask portion are respectively pulled by separate clamps 18 and tensioned. Can be given.

  The clamp moving means 23 provided in each of the plurality of tension units 13 and 13A is an adjustment means for individually adjusting the driving force by the clamp moving means 23 so that the tension applied to the metal mask 1 can be individually adjusted. (Not shown) is provided. More specifically, an air supply pipe is connected to the air cylinder constituting the clamp moving means 23, and a regulator capable of individually adjusting the supply pressure to each air cylinder is used as the adjustment means. Is provided. Note that air is supplied to the air supply pipes connected to these air cylinders via a common on-off valve so that the clamp moving means (air cylinders) 23 of all the tension units 13 can be operated simultaneously. A speed controller is also provided in the air supply piping to each air cylinder so that the operation timing of each air cylinder can be adjusted.

  Next, a metal mask attaching operation by the metal mask frame attaching apparatus 10 having the above-described configuration will be described. As shown in FIGS. 3 (a) and 4 (a), with the clamp support base 17 in the advanced position and the clamp 18 opened, first, the frame 3 is attached to the frame supports 25 of the plurality of tension units 13, 13A. Next, the metal mask 1 is placed thereon, and the four sides thereof are held by the clamps 18 of the plurality of tension units 13. At this time, the metal mask 1 is positioned with respect to the frame 3 using a plurality of positioning pins (not shown). Next, pressurized air is sent to a clamp moving means (air cylinder) 23 connected to each clamp support base 17 to move each clamp 18 in a direction away from the metal mask 1, and the metal mask 1 is moved by a number of clamps. A small tensile force is applied in both the vertical and horizontal directions so that the metal mask 1 is lightly stretched. In this state, the positioning pins are removed, and then a large tensile force is applied to the metal mask 1. This state is shown in FIGS. 3B and 4B. Even if the positioning pins are removed from the metal mask 1, the position of the metal mask 1 with respect to the frame 3 does not change much, and the desired positioning accuracy of the metal mask 1 with respect to the frame 3 is maintained.

  As described above, by holding the four sides of the metal mask 1 with the tension units 13 arranged on the four sides of the metal mask 1 and applying a tensile force, as shown in FIG. 18 is pulled in both vertical and horizontal directions. In this state, the surface condition of the metal mask 1 is visually inspected, and if there is distortion or sagging, the working fluid pressure to the clamp moving means (air cylinder) 23 connected to the clamp 18 pulling the region is adjusted. Then, the metal mask 1 is adjusted to a flat state free from distortion and sagging, and to the state in which the openings of the mask part 2 are aligned in parallel. Further, the position of each mask portion 2 formed on the metal mask 1 is inspected, and the working fluid to each clamp moving means (air cylinder) 23 is placed so that each mask portion 2 enters a position within a predetermined dimensional accuracy. Adjust pressure. In this adjustment operation, as shown in FIG. 6, in the tension units 13A and 13A arranged in the vicinity of the corner portion of the metal mask 1, the clamps 18 and 18 are attached to the metal mask 1 in the direction of arrow A, The portion of the metal mask 1 gripped by the clamp 18 of each tension unit 13A is stretched by applying a tensile force in the B direction. Therefore, the tension unit 13A disposed on the adjacent side across the corner portion is used. The tension is pulled in the direction perpendicular to the tension direction by the clamp 18 (B direction or A direction), and the force acts on the clamp 18. However, in the tension unit 13A, the clamp support 17 (see FIGS. 4 and 5) that supports the clamp 18 can move in a direction perpendicular to the direction in which the tensile force is applied to the metal mask. Pulled to move. For this reason, the corner portion of the metal mask 1 can be stretched to a predetermined size, and the corner portion of the effective region can be positioned at a desired point P. Thus, the metal mask 1 can be in a state where there is no distortion or sagging and each mask portion 2 is located within a predetermined dimensional accuracy range including the mask portions 2 arranged at the corner portions.

  Next, in this state, as shown in FIG. 2, the metal mask 1 is spot welded to the frame 3 using a laser welding machine 30. This spot welding is performed by moving the laser welding machine 30 to a desired spot welding position one after another. Thereby, the several location of the metal mask 1 is fixed to the flame | frame 3 by the spot welding part 32 (refer FIG. 1). Thereafter, the clamp 18 is released to release the grip of the metal mask 1, and the peripheral portion of the metal mask 1 is removed using the easy cutting line 5 (see FIG. 12). In this way, as shown in FIG. 11, the mask unit 8 having a configuration in which the metal mask 1 is fixed to the frame 3 is manufactured. In the obtained mask unit 8, the metal mask 1 is kept in a state where there is no distortion or sagging, and the openings of the mask portions 2 are accurately aligned in parallel, and the positions of the mask portions 2 are also predetermined. Is kept within the dimensional accuracy. Thus, by performing vapor deposition using the mask unit 8, it is possible to accurately perform vapor deposition of a fine pattern. For example, a deposition substrate such as a glass substrate is attached to the mask unit 8, set in a deposition machine, and an organic layer of an organic EL element or a cathode electrode is deposited, thereby depositing a fine pattern with high positional accuracy. And a high quality organic layer or cathode electrode can be formed.

  In the above-described embodiment, one tension unit 13A that allows the clamp 18 to move in a direction perpendicular to the direction in which the tensile force is applied to the metal mask is disposed at a position closest to the corner portion of each side. The number of tension units 13A can be appropriately increased or decreased. In some cases, all tension units may be tension units 13A. In the above-described embodiment, in the tension unit 13A, the clamp 18 can be moved in the direction perpendicular to the direction in which the tensile force is applied to the metal mask. Although the member 15B is movable in the direction perpendicular to the direction in which the tensile force is applied, the present invention is not limited to this configuration, and it is sufficient that at least the clamp 18 is movable in the direction perpendicular to the direction in which the tensile force is applied. Hereinafter, another example of the tension unit that can be used in the present invention will be described.

  The tension unit 13B shown in FIG. 7 divides the clamp support base 17 in the tension unit 13 shown in FIG. 3 into an upper and lower first clamp support base 17A and a second clamp support base 17B, and a linear motion guide 34 between them. The second clamp support base 17B can be moved in a direction parallel to the metal mask 1 gripped by the clamp 18 and perpendicular to the direction A in which the tensile force is applied to the metal mask. The clamp 18 and the clamp opening / closing mechanism 19 are The clamp moving means 23 is connected to the first clamp support base 17A by being held by the two clamp support bases 17B. A position return spring (not shown) for returning the second clamp support base 17B to the center position with respect to the first clamp support base 17A is also provided. Other structures are the same as those of the tension unit 13 shown in FIG. Also in this tension unit 13B, the clamp 18 can move in a direction perpendicular to the direction in which the tension is applied to the metal mask. The portion can be stretched to a predetermined dimensional position without hindrance.

  In the tension unit 13C shown in FIGS. 8 and 9, the clamp 18A is composed of a fixed claw 18Aa and a movable claw 18Ab that can be pivoted with respect to the fixed claw 18Aa via a pin 36. On the other hand, it is possible to move in parallel to the metal mask 1 held by the clamp 18A via the linear motion guide 38 and in a direction perpendicular to the direction in which the tensile force is applied to the metal mask. A position return spring for returning the clamp 18A to the center position with respect to the clamp support base 17 is also provided. Further, the clamp support base 17 holds a clamp opening / closing mechanism 19A having a toggle mechanism 20A and a cylinder mechanism 21 for opening and closing the clamp 18A. The toggle mechanism 20A is supported on a support plate 17a attached to the clamp support base 17 so as to be pivotable about the pin 20a, and to the support plate 17a so as to be pivotable about the pin 20c. A second lever 20d, a link 20e for connecting the first lever 20b and the second lever 20d, and the like are provided. The cylinder mechanism 21 is connected to the first lever 20b, and the clamp 18A is movable to the second lever 20d. An adjusting screw 20g for pressing the claw 18Ab to the closed position is attached. The adjustment screw 20g can also adjust the tightening force by the movable claw 18Ab when the clamp 18A is in the closed position as shown in FIG. 8B. In addition, in order to open and close the movable claw 18Ab in conjunction with the reciprocating turning of the second lever 20b, a torsion coil spring 40 is also provided to connect the two. Other structures are the same as those of the tension unit 13 shown in FIG. Also in this tension unit 13C, the clamp 18C can move in a direction perpendicular to the direction in which the tensile force is applied to the metal mask, so that it can be used to grip the vicinity of the corner portion of the metal mask 1 so that the metal mask 1 The corner portion can be stretched to a predetermined dimensional position without hindrance.

  The preferred embodiments of the present invention have been described above, but the present invention is not limited to these embodiments, and various modifications can be made within the scope of the claims. For example, in the above-described embodiment, the working fluid pressure supplied to the clamp moving means (air cylinder) 23 for applying a tensile force to each of the plurality of clamps 18 can be individually adjusted so that each clamp 18 is applied to the metal mask 1. The applied tensile force can be adjusted individually. In this configuration, the tensile force applied to the metal mask 1 can be precisely adjusted, so that even the metal mask 1 that is likely to be distorted or sag is advantageous in that it can be pulled and held in an extremely flat state. For example, in the case of using a metal mask that can be pulled and held relatively easily in a flat state, for example, a plurality of clamps arranged on each side, for example, a clamp corresponding to the mask portion is a first set, The clamps corresponding to the non-mask portions may be divided into a plurality of groups so as to form the second group, and the working fluid pressure to the cylinder devices connected to the clamps of each group may be adjusted in common.

  Further, the tension units 13 and 13A (or 13B and 13C) disposed on each side of the metal mask 1 are not necessarily disposed so that the respective clamps 18 are positioned in accordance with the mask portion 2 and the non-mask portion. The present invention is not limited to this, and a change may be made such that a mask portion and a non-mask portion are appropriately combined and changed so as to hold a wider width, or more clamps are used so that a more finely divided region can be held. In any case, the number and arrangement of tension units (clamps) may be determined according to the characteristics of the metal mask used so that the metal mask can be pulled and held in a state free from distortion and sagging.

Schematic plan view of a frame mounting apparatus for a metal mask according to an embodiment of the present invention Schematic sectional view of the frame mounting device shown in FIG. (A), (b) is a schematic side view which shows the tension unit 13 provided in the frame attachment apparatus shown in FIG. (A), (b) is a schematic side view which shows tension unit 13A provided in the frame mounting apparatus shown in FIG. Schematic front view taken along arrow VV in FIG. FIG. 1 is a schematic plan view illustrating a state in which the corner area of the metal mask is pulled by a plurality of tension units in the frame mounting apparatus shown in FIG. (A), (b) is a partial cross-sectional schematic side view which shows the tension unit 13B used for other embodiment in a different operation state. (A), (b) is a partial cross-sectional schematic side view which shows the tension unit 13C used for another embodiment in a different operation | movement state. (A), (b) is the schematic front view and schematic side view which show the clamp of the tension unit 13C shown in FIG. Schematic perspective view of metal mask and frame-shaped frame Schematic perspective view of a mask unit formed by attaching a metal mask to the frame Schematic plan view explaining the problems that occur when the metal mask corner area is pulled with multiple tension units

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Metal mask 2 Mask part 3 Frame 4 Opening 5 Easy cutting line 8 Mask unit 10 Metal mask frame mounting apparatus 11 Support stand 13, 13A, 13B 13C Tension unit 14 Support rail 15 Base member 15A First base member 15B Second base Member 16, 27, 34, 38 Linear motion guide 17 Clamp support base 17A First clamp support base 17B Second clamp support base 18 Clamp 18a, 18Aa Fixed claw 18b, 18Ab Movable claw 19, 19A Clamp opening / closing mechanism 20, 20A Toggle mechanism 21 Cylinder device 23 Clamp moving means 30 Laser welding machine 32 Spot welded part 36 Pin 40 Torsion coil spring

Claims (5)

  A step of holding each of the four sides of the metal mask with a plurality of clamps and applying a tensile force to stretch the metal mask, and a step of fixing the stretched metal mask to the frame-shaped frame And, in the tensioning step, a tensile force is applied in such a manner that the clamp holding at least the corner portion of the metal mask is movable in a direction parallel to the metal mask and perpendicular to the direction in which the tensile force is applied. The metal mask frame mounting method.   A structure in which a plurality of tension units are provided corresponding to each side so that a tensile force can be applied to each of the four sides of the metal mask, and the metal mask is stretched and fixed to a frame-like frame The metal mask frame mounting apparatus according to claim 1, wherein the tension unit has a clamp for holding the metal mask and a clamp moving means for moving the clamp to apply a tensile force to the metal mask held by the clamp. Further, in the tension unit arranged to grip at least the vicinity of the corner of the metal mask, the clamp is movable parallel to the gripped metal mask and perpendicular to the direction of applying the tensile force. A metal mask frame mounting device characterized by the above.   A tension unit arranged to grip the vicinity of the corner portion of the metal mask has a first base member attached at a fixed position, and the first base member is parallel to the metal mask gripped by the clamp and pulled. A second base member that is held so as to be movable in a direction perpendicular to the force application direction, and a clamp support base that is held so as to be movable parallel to the direction in which the tensile force is applied to the metal mask are provided on the second base member. The clamp and a clamp opening / closing mechanism for opening and closing the clamp are held by the clamp support base, the clamp moving means is held by the second base member, and the clamp support base is pulled against the second base member. 3. The metal mask frame mounting device according to claim 2, wherein the metal mask frame mounting device is connected so as to move in an additional direction.   A tension unit arranged to grip the vicinity of the corner portion of the metal mask is held by a base member attached at a fixed position and movably parallel to the direction of applying a tensile force to the metal mask. A first clamp support base and a second clamp support base that is held parallel to the metal mask gripped by the clamp and movably in a direction perpendicular to the direction in which the tensile force is applied. The clamp and a clamp opening / closing mechanism for opening and closing the clamp are held by the second clamp support base, the clamp moving means is held by the base member, and the first clamp support base is pulled against the base member. 3. The metal mask frame mounting device according to claim 2, wherein the metal mask frame mounting device is connected so as to move in a force-applying direction.   A tension unit arranged to grip the vicinity of the corner portion of the metal mask is held by a base member attached at a fixed position and movably parallel to the direction of applying a tensile force to the metal mask. A clamp support, and the clamp is held on the clamp support so as to be parallel to the metal mask gripped by the clamp and movable in a direction perpendicular to the direction in which the tensile force is applied, and opens and closes the clamp. A clamp opening / closing mechanism is held by the clamp support base, the clamp moving means is held by the base member, and is connected to move the clamp support base to the base member in the direction of applying a tensile force. The metal mask frame mounting device according to claim 2.

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