CN203320115U - Mask plate for manufacturing organic light emitting display - Google Patents
Mask plate for manufacturing organic light emitting display Download PDFInfo
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- CN203320115U CN203320115U CN2013201249578U CN201320124957U CN203320115U CN 203320115 U CN203320115 U CN 203320115U CN 2013201249578 U CN2013201249578 U CN 2013201249578U CN 201320124957 U CN201320124957 U CN 201320124957U CN 203320115 U CN203320115 U CN 203320115U
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- mask plate
- opening
- emitting display
- organic light
- light emitting
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Abstract
The utility model discloses a mask plate for manufacturing an organic lighting emitting display. The mask plate for manufacturing the organic lighting emitting display comprises a flat panel and openings formed in the flat panel, wherein the openings are arrayed in preset positions, the inner wall of each opening forms a smooth transition curve on any section perpendicular to the upper and lower surfaces of the flat panel, each smooth transition curve is not perpendicular to the upper and lower surfaces of the flat panel, and each smooth transition curve and the upper and lower surfaces of the flat panel form a pattern of a vapor deposition source with a large opening at one side and a small opening at the other side. By virtue of the structure, no dead space exists in the vapor deposition process, the influence of an existing structure on deposition evenness is completely avoided, and thus the product quality can be improved greatly.
Description
Technical field
The utility model relates to a kind of mask plate, is specifically related to a kind of mask plate of using for the organic light-emitting display device picture element evaporation.
Background technology
With existing LCD technology, compare, utilize organic light emitting diode (OLED) but the made indicating meter of technology not only has that true color, reaction times are fast, high brightness (100 ~ 14,000cd/m2), the above visual angle of high luminous efficiency (16 ~ 38lm/W), 170 degree, LCD ghost as none, can be made into large size and flexibility panel, the advantage such as operation in the scopes that can spend at-30 degree ~ 80 Celsius, and processing procedure is simple, integral thickness also can be contracted to below 1mm, and cost more only has 30 ~ 40% of TFT-LCD.Therefore, utilize the made indicating meter of OLED technology firmly getting society's welcome.
In the manufacturing processed of organic light emitting display, wherein the deposition of organic layer can use mask plate, Figure 1 shows that the schematic diagram that adopts mask plate evaporation organic materials.Mask plate 10 is due to thinner, before evaporation, can be fixed on mask housing 11 by related process, during evaporation, mask plate 10 is fixed on brace table 12 by mask housing 11, organic materials in vapor deposition source 13 by evaporation and diffusion to mask plate 10 belows, be provided with opening 100 in certain position on mask plate 10, organic materials is deposited on position corresponding on substrate 14 by opening 100, forms pixel.
Figure 2 shows that the floor map of mask plate, mask plate is justifying structure (shown in figure) or is spliced (not shown for polylith, so-called splicing is that mask plate is spliced into large-sized mask plate by some relatively little unit templates), be provided with the opening corresponding with pixel on organic light emitting display 100 on mask plate 10, opening 100 is generally array structure on mask plate 10.Mask plate 10 is realized and being connected of mask housing 11 by techniques such as laser welding or ultrasonic welding.Figure 3 shows that shown in Fig. 1 the plane enlarged diagram of A part in mask plate, opening 100 is whole forms the opening matrixes.
In technical requirements, the size of pixel is all in micron level, with the gauge of mask plate on the same order of magnitude.So when the cross section (cross section of an opening on the a-a direction as shown in Figure 3) of opening pattern is set to the geometry shown in Fig. 4, the inwall and the plate face that are opening are vertical relation, the angle 1000 of opening 100 belows (i.e. the one side of close vapor deposition source 13) can enter inner generation of opening 100 to organic materials and hinder, thereby affect the deposition uniformity of organic materials on substrate 14, thereby make the quality of organic light emitting display not high.
For overcoming the above problems, the patent that application number is 2004100339303 discloses a kind of for evenly forming the shadowing mask of organic light-emitting device, it has carried out design as shown in Figure 5 to the opening that has above problem, be about to the structure that mask plate opening inwall is set to two back taper, opening exists back taper structure 1001 and back taper structure 1002.By analysis, recognize, so design is based on etch process and makes mask plate, the back taper structure 1001 on top is the unavoidable a kind of defect of etch process, and this back taper structure 1001 forms dead angle to a certain extent, still affects the deposition uniformity of organic materials on substrate.Based on this, industry is needed the evaporation process that a kind of more excellent mask plate meets high-quality organic light emitting display badly.
The utility model content
In view of this, need to overcome at least one in above-mentioned defect of the prior art.The utility model provides a kind of mask plate for the manufacture of organic light emitting display, it comprises smooth plate and is formed on the opening on smooth plate, it is characterized in that: described opening is by default positional alignment, described opening inwall forms on the cross section of lower plane on perpendicular to described smooth plate and seamlessly transits curve at any one, described seamlessly transit lower plane on curve and described smooth plate be non-perpendicular structure and with the figure that the upper and lower plane of described smooth plate forms be that vapor deposition source one side opening is large, the structure that the opposite side opening is little, the described center of curvature that seamlessly transits all curves of curve is positioned at described opening one side.。
The inwall place direction of described opening is all non-perpendicular structure with the in-plane at smooth plate place.Structure shown in Fig. 6, the in-plane B angle α at the inwall place direction A of opening and smooth plate place is not equal to 90 degree.
According to described to prior art in the utility model background technology, the combination that upper and lower two planes of opening section in prior art on mask plate and mask plate are vertical stratification or two back taper structures, mask plate with vertical stratification can impact the deposition uniformity of material on substrate of vapor deposition source volatilization, and the mask plate with back taper textural association not only can impact the deposition uniformity of material on substrate of vapor deposition source volatilization, form to a certain extent the evaporation dead angle, and this structure also is based on the unavoidable a kind of defect of etch process, therefore must find a kind of new structure avoids the deposition uniformity of material on substrate of vapor deposition source volatilization impacted, the structure that the utility model adopts is for adopting the laser technology cutting to form, described opening inwall forms on the cross section of lower plane on perpendicular to described smooth plate and seamlessly transits curve at any one, it is described that to seamlessly transit lower plane on curve and described smooth plate be non-perpendicular structure, the described center of curvature that seamlessly transits all curves of curve is positioned at described opening one side.This kind of structure can guarantee not have the dead angle that may exist in evaporate process, and the impact that can avoid above-mentioned several structure to cause deposition uniformity fully promotes great help is arranged the quality of product.
In addition, also there is following additional technical feature according to the disclosed mask plate for the manufacture of organic light emitting display of the utility model:
Further, described opening on described smooth plate the formation on lower plane by pattern form, be long strip shape or rectangle or circle.
Further, the rectangle that described rectangle is be rounded down/chamfering.
Simultaneously, on the pattern that described opening forms and substrate, corresponding pixel position adapts, (as prior art, being deposited on the pixel position on substrate).
Further, the described curve that seamlessly transits is straight line.
Further, the tangent line angular range α that the in-plane at described transitions smooth curve and described smooth plate place is is 20 °～70 °.
Further, the tangent line angular range α that the in-plane at described transitions smooth curve and described smooth plate place is is 30 °～60 °.
Preferably, the tangent line angular range α that the in-plane at described transitions smooth curve and described smooth plate place is is 40 °～50 °.
Further preferably, the tangent line angular range α that the in-plane at described transitions smooth curve and described smooth plate place is is 45 °.
Further, described mask plate is to be made by laser technology cutting.
Further, described mask plate also comprises for the fixing mask housing of use.
The constitutional features of the above mask plate is the structure under ideal state; precision problem due to the technique of making own; the plate face of actual product, the inwall of opening may not reach absolute plane, therefore still drop in protection domain of the present utility model in the modification of deliberately making without prejudice to core content of the present utility model.
By the above mask plate is provided, dead angle area when there is not the organic materials evaporation in it, thus make organic materials be deposited on more uniformly on substrate, form the pixel of good quality.
Fig. 6, Fig. 7 are respectively the reverse side of mask plate described in the utility model and positive plane partial view.
Fig. 8,9 is respectively the plane partial schematic diagram with circular open and strip gab mask plate reverse side.
The aspect that the utility model is additional and advantage part in the following description provide, and part will become obviously from the following description, or recognize by practice of the present utility model.
The accompanying drawing explanation
Above-mentioned and/or additional aspect of the present utility model and advantage will become from the following description of the accompanying drawings of embodiments and obviously and easily understand, wherein:
Figure 1 shows that the schematic diagram that adopts mask plate evaporation organic materials;
Figure 2 shows that the floor map of mask plate;
Figure 3 shows that shown in Fig. 2 the plane enlarged diagram of A part in mask plate;
Fig. 4 is along the schematic cross-section of an opening of the direction of a-a shown in Fig. 3 on mask plate;
Fig. 5 is a kind of improved opening schematic diagram (prior art);
The schematic diagram of a kind of embodiment of opening section that Fig. 6 is the utility model mask plate;
The reverse side partial schematic diagram of a kind of embodiment that Fig. 7 is mask plate described in the utility model;
Fig. 8 is the front partial schematic diagram with the corresponding embodiment of Fig. 7;
Fig. 9 has the plane partial schematic diagram of circular open mask plate reverse side for another;
Figure 10 has the plane partial schematic diagram of strip gab mask plate reverse side for another.
Wherein, mask plate 10, mask housing 11, brace table 12, vapor deposition source 13, opening 100, substrate 14, angle 1000, top back taper structure 1001, bottom 1002, opening inwall 1003, the inwall place direction A of opening, the tangent line angle α that the in-plane at transitions smooth curve and described smooth plate place is, a-a is observed ray.
Embodiment
Below describe embodiment of the present utility model in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label means same or similar element or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment be described with reference to the drawings, only for explaining the utility model, and can not be interpreted as restriction of the present utility model.
In description of the present utility model, it will be appreciated that, term " on ", orientation or the position relationship of the indications such as D score, " end ", " top ", 'fornt', 'back', " interior ", " outward ", " left side ", " right side " be based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, rather than indicate or imply that the device of indication or element must have specific orientation, construct and operation with specific orientation, therefore can not be interpreted as restriction of the present utility model.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " connection ", " connection ", " being connected ", " connection " should be done broad understanding, for example, can be to be fixedly connected with, connecting integratedly, can be also to removably connect; It can be the connection of two element internals; Can be directly to be connected, also can indirectly be connected by intermediary, for the ordinary skill in the art, can particular case understand the concrete meaning of above-mentioned term in the utility model.
Utility model design of the present utility model is as follows, the combination that upper and lower two planes of opening section in prior art on mask plate and mask plate are vertical stratification or two back taper structures, this class formation can form the evaporation dead angle, can the deposition uniformity of material on substrate of vapor deposition source volatilization be impacted, therefore must find a kind of new structure avoids the deposition uniformity of material on substrate of vapor deposition source volatilization impacted, the structure that the utility model adopts is for adopting the laser technology cutting to form, described opening inwall forms on the cross section of lower plane on perpendicular to described smooth plate and seamlessly transits curve at any one, it is described that to seamlessly transit lower plane on curve and described smooth plate be non-perpendicular structure, and this class formation described seamlessly transit on curve and described smooth plate lower plane be non-perpendicular structure and with the figure that the upper and lower plane of described smooth plate forms be that vapor deposition source one side opening is large, the structure that the opposite side opening is little, the described center of curvature that seamlessly transits all curves of curve is positioned at described opening one side, not there will be the dead angle existed in evaporate process, the impact that can avoid above-mentioned several structure to cause deposition uniformity, quality lifting to product has great help.
Mask plate for the manufacture of organic light emitting display of the present utility model is described below with reference to accompanying drawings, wherein Fig. 1-Fig. 5 is the prior art diagram, the schematic diagram of a kind of embodiment of opening section that Fig. 6 is the utility model mask plate, the reverse side partial schematic diagram of a kind of embodiment that Fig. 7 is mask plate described in the utility model, Fig. 8 is the front partial schematic diagram with the corresponding embodiment of Fig. 7, Fig. 9 has the plane partial schematic diagram of circular open mask plate reverse side for another, and another is the plane partial schematic diagram with strip gab mask plate reverse side for Figure 10.
According to embodiment of the present utility model, as shown in Fig. 6-10, a kind of mask plate for the manufacture of organic light emitting display that the utility model provides, it comprises smooth plate and is formed on the opening 100 on smooth plate, it is characterized in that: described opening 100 is by default positional alignment, described opening inwall 1003 forms on the cross section of lower plane on perpendicular to described smooth plate and seamlessly transits curve at any one, described seamlessly transit lower plane on curve and described smooth plate be non-perpendicular structure and with the figure that the upper and lower plane of described smooth plate forms be that vapor deposition source 13 1 side openings are large, the structure that the opposite side opening is little, the described center of curvature that seamlessly transits all curves of curve is positioned at described opening one side, from Fig. 6 and Figure 10, can find out, the curve that seamlessly transits in Fig. 6 is straight line, its the curvature center is in opening one side.As another kind of embodiment, the smooth excessiveness curve is the camber line (not shown), and its curvature center is in opening one side, in like manner, seamlessly transits curve and be the curvature center of camber line combination also in opening one side.
In evaporate process, vapor deposition source 13 volatilization deposition material are deposited on substrate 14 by opening 100, because opening inwall 1003 is smooth transition curve with upper and lower two planes of mask plate 10, and with pattern that the upper and lower plane of mask plate forms be towards the opening of vapor deposition source 13 1 sides greatly, patterning that the opposite side opening is little, as shown in Figure 6, therefore there do not is the evaporation dead angle, can guarantee the homogeneity of deposition of material.
According to embodiment more of the present utility model, the pattern form of described opening 100 formation on lower plane on described smooth plate is long strip shape or rectangle or circle, as Fig. 7-10, Fig. 7 split shed is shaped as rectangle, its sign be the diagram that a side larger from opening observed, Fig. 8 is a less side is observed from opening diagram; Figure 9 shows that circular open, its sign is the diagram that a side larger from opening observed; Figure 10 is the long strip shape opening, and generally, long-width ratio is greater than in 50 situation can think long strip shape.
Vapor deposition source is positioned at the side that opening is larger, and deposition material enters from the larger side of opening, is pooled to gradually the side that opening is less, not there will be the evaporation dead angle in evaporate process.
According to embodiment more of the present utility model, the rectangle that described rectangle is be rounded down/chamfering.
Simultaneously, on the pattern that described opening 100 forms and substrate, corresponding pixel position adapts, (as prior art, being deposited on the pixel position on substrate).
According to embodiment more of the present utility model, the described curve that seamlessly transits is straight line, as shown in Figure 6.
According to embodiment more of the present utility model, the tangent line angular range α that the in-plane at described transitions smooth curve and described smooth plate place is is 20 °～70 °.
According to embodiment more of the present utility model, the tangent line angular range α that the in-plane at described transitions smooth curve and described smooth plate place is is 30 °～60 °.
Preferably, the tangent line angular range α that the in-plane at described transitions smooth curve and described smooth plate place is is 40 °～50 °.
According to an embodiment of the present utility model, further preferably, the tangent line angular range α that the in-plane at described transitions smooth curve and described smooth plate place is is 45 °, as shown in Figure 6.
According to embodiment of the present utility model, described mask plate 10 is to be made by laser technology cutting.
According to embodiment of the present utility model, described mask plate 10 also comprises for the fixing mask housing 11 of use.
The constitutional features of the above mask plate is the structure under ideal state; precision problem due to the technique of making own; the plate face of actual product, the inwall of opening may not reach absolute plane, therefore still drop in protection domain of the present utility model in the modification of deliberately making without prejudice to core content of the present utility model.
By the above mask plate is provided, dead angle area when there is not the organic materials evaporation in it, thus make organic materials be deposited on more uniformly on substrate, form the pixel of good quality.
Although with reference to a plurality of illustrative examples of the present utility model, embodiment of the present utility model is described in detail, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, and these improve and within embodiment will drop on the spirit and scope of the utility model principle.Particularly, within the scope of aforementioned open, accompanying drawing and claim, can aspect the layout of component and/or subordinate composite configuration, make rational modification and improvement, and can not break away from spirit of the present utility model.Except modification and the improvement of component and/or layout aspect, its scope is limited by claims and equivalent thereof.
Claims (9)
1. the mask plate for the manufacture of organic light emitting display, it comprises smooth plate and is formed on the opening on smooth plate, it is characterized in that: described opening is by default positional alignment, described opening inwall forms on the cross section of lower plane on perpendicular to described smooth plate and seamlessly transits curve at any one, described seamlessly transit lower plane on curve and described smooth plate be non-perpendicular structure and with the figure that the upper and lower plane of described smooth plate forms be that vapor deposition source one side opening is large, the structure that the opposite side opening is little, the described center of curvature that seamlessly transits all curves of curve is positioned at described opening one side.
2. the mask plate for the manufacture of organic light emitting display according to claim 1, is characterized in that, the described curve that seamlessly transits is straight line.
3. according to claim 1 or the mask plate for the manufacture of organic light emitting display claimed in claim 2, it is characterized in that, described opening on described smooth plate the formation on lower plane by pattern form, be rectangle or circle.
4. the mask plate for the manufacture of organic light emitting display according to claim 3, is characterized in that, the rectangle that described rectangle is be rounded down/chamfering.
5. according to claim 1 or the mask plate for the manufacture of organic light emitting display claimed in claim 2, it is characterized in that, on the pattern that described opening forms and substrate, corresponding pixel position adapts.
6. according to claim 1 or the mask plate for the manufacture of organic light emitting display claimed in claim 2, it is characterized in that, the tangent line angular range α that the in-plane at described transitions smooth curve and described smooth plate place is is 20 °～70 °.
7. the mask plate for the manufacture of organic light emitting display according to claim 6, is characterized in that, the tangent line angular range α that the in-plane at described transitions smooth curve and described smooth plate place is is 30 °～60 °.
8. the mask plate for the manufacture of organic light emitting display according to claim 7, is characterized in that, the tangent line angular range α that the in-plane at described transitions smooth curve and described smooth plate place is is 40 °～50 °.
9. the mask plate for the manufacture of organic light emitting display according to claim 8, is characterized in that, the tangent line angular range α that the in-plane at described transitions smooth curve and described smooth plate place is is 45 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013201249578U CN203320115U (en) | 2013-03-19 | 2013-03-19 | Mask plate for manufacturing organic light emitting display |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013201249578U CN203320115U (en) | 2013-03-19 | 2013-03-19 | Mask plate for manufacturing organic light emitting display |
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| Publication Number | Publication Date |
|---|---|
| CN203320115U true CN203320115U (en) | 2013-12-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013201249578U Expired - Fee Related CN203320115U (en) | 2013-03-19 | 2013-03-19 | Mask plate for manufacturing organic light emitting display |
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| CN (1) | CN203320115U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104060219A (en) * | 2013-03-19 | 2014-09-24 | 昆山允升吉光电科技有限公司 | Mask plate for manufacturing organic light-emitting display |
| CN107815640A (en) * | 2016-09-12 | 2018-03-20 | 三星显示有限公司 | Mask and manufacture include the method for the mask assembly of mask |
| CN110760793A (en) * | 2015-04-24 | 2020-02-07 | Lg伊诺特有限公司 | Deposition mask |
-
2013
- 2013-03-19 CN CN2013201249578U patent/CN203320115U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104060219A (en) * | 2013-03-19 | 2014-09-24 | 昆山允升吉光电科技有限公司 | Mask plate for manufacturing organic light-emitting display |
| CN110760793A (en) * | 2015-04-24 | 2020-02-07 | Lg伊诺特有限公司 | Deposition mask |
| CN107815640A (en) * | 2016-09-12 | 2018-03-20 | 三星显示有限公司 | Mask and manufacture include the method for the mask assembly of mask |
| CN107815640B (en) * | 2016-09-12 | 2021-08-31 | 三星显示有限公司 | Mask and method of manufacturing mask assembly including the same |
| US11207705B2 (en) | 2016-09-12 | 2021-12-28 | Samsung Display Co., Ltd. | Mask and method of manufacturing mask assembly including the same |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PP01 | Preservation of patent right | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20190808 Granted publication date: 20131204 |
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| PD01 | Discharge of preservation of patent | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20220808 Granted publication date: 20131204 |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131204 Termination date: 20200319 |