CN103668051A - Mask frame and corresponding mask component thereof for vapor deposition - Google Patents
Mask frame and corresponding mask component thereof for vapor deposition Download PDFInfo
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- CN103668051A CN103668051A CN201210329245.XA CN201210329245A CN103668051A CN 103668051 A CN103668051 A CN 103668051A CN 201210329245 A CN201210329245 A CN 201210329245A CN 103668051 A CN103668051 A CN 103668051A
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- 238000007740 vapor deposition Methods 0.000 title abstract 3
- 230000007246 mechanism Effects 0.000 claims abstract description 46
- 230000008020 evaporation Effects 0.000 claims description 17
- 238000001704 evaporation Methods 0.000 claims description 17
- 238000007789 sealing Methods 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 9
- 229910000679 solder Inorganic materials 0.000 claims description 5
- 238000003466 welding Methods 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 239000003292 glue Substances 0.000 claims 1
- 238000007665 sagging Methods 0.000 abstract description 9
- 230000013011 mating Effects 0.000 abstract 3
- 238000010586 diagram Methods 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 9
- 239000011368 organic material Substances 0.000 description 8
- 230000008901 benefit Effects 0.000 description 7
- 230000006872 improvement Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000543 intermediate Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- Engineering & Computer Science (AREA)
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- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a mask frame and a corresponding mask component thereof for vapor deposition. The mask frame comprises an outer frame comprising two sets of opposite sides, a fixing bar arranged inside the outer frame, and a fixing mechanism for connecting the outer frame and the fixing bar, wherein the contact part of the outer frame and the fixing bar is provided with a mating mechanism, so that a clearance is left between the outer frame and the fixing bar; meanwhile, the outer frame is provided with mating holes in the region corresponding to the fixing bar; the mating holes can be distributed on the basis of the calculation according to the stress condition; and the mask frame can also comprise a support bar and an elastic part, thereby further lowering the sagging phenomenon of the mask plate. The mask component for vapor deposition comprises the mask frame disclosed by the invention and a mask part, wherein the mask part can be an integrally-formed mask plate or a mask plate spliced by a plurality of mask plates. The mask frame and corresponding mask component thereof can further lower the sag phenomenon of the mask plate, enhance the quality, precision and yield of the product, and prepare a panel with larger sizes.
Description
Technical field
The present invention relates to electronic printing field, relate in particular to a kind of mask frame and corresponding evaporation mask assembly thereof.
Background technology
Compare with existing LCD technology, utilizing the made indicating meter of organic light emitting diode (OLED) technology not only to have can true color, the reaction times is fast, high brightness (100 ~ 14,000cd/m2), the above visual angle of high luminous efficiency (16 ~ 38lm/W), 170 degree, LCD ghost as none, can be made into large size and flexibility panel, can be in the scopes of-30 degree ~ 80 degree Celsius the advantage such as operation, and processing procedure simply, integral thickness also can be contracted to below 1mm, cost more only has 30 ~ 40% of TFT-LCD.Therefore, utilize the made indicating meter of OLED technology firmly getting society's welcome.
At present, the made indicating meter of OLED technology has reached volume production technology in small size, and comparatively ripe.But for by manufacture a plurality of OLED indicating meters to realize the raising of output simultaneously, or produce large-sized OLED indicating meter, just need to increase the size of the large substrate of tradition, just must increase the size for the mask assembly of evaporation organic materials accordingly.
Shown in Fig. 1, be that tradition is for the structural representation of the mask assembly of evaporation organic materials, it comprises housing 11 and is fixed on the mask portion 12 on housing 11 by solder joint 120, mask portion 12 is welded on housing 11 by applying at two ends after pulling force is tightened, and discharges pulling force after welding.During mask assembly horizontal positioned, because mask portion 12 bounces back in the other direction and causes housing 11 Shang Xia (in Fig. 1 up and down orientation) support section to occur the phenomenon of indent shown in figure along original pulling force, thereby make mask portion 12 occur sagging (particularly mask portion 12 region intermediates), the consequence so causing is that pattern position precision, the size that evaporation obtains relatively all can have certain deviation, thereby affects quality and the yield of product.
Chinese Patent Application No. is 2010101136655 to disclose a kind of mask assembly and for using the depositing device of the flat-panel monitor of this mask assembly, its primary structure is: on the housing of mask assembly, be provided with the support stick of the open area forming across housing, thereby reduce the sag of chain of mask portion.The Chinese patent patent No. provides a kind of mask for the manufacture of large size display panel for 01138161.2, and it comprises: have the main frame in a plurality of holes, in the hole that is assemblied in main frame according to the size that will manufacture and pattern from mask.With upper type, have certain effect realizing in OLED indicating meter volume production, but there is certain limitation making on large size display screen.
Summary of the invention
In view of this, need to overcome at least one in above-mentioned defect of the prior art.The invention provides a kind of mask frame and corresponding evaporation mask assembly thereof.
Described mask frame comprises housing, and described housing comprises two groups of opposite side, and described two groups of opposite side form a hollow sealing rectangular frame; Fixed link, described fixed link is placed in described housing inner side and is connected with one group of opposite side of mask plate; And fixed mechanism, described fixed mechanism is for connecting described housing and the described fixed link that is placed in described housing inner side, play and support described fixed link, the described fixed link inwardly shrinking is outwards stretched, play the effect that reduces or make up the inside shrinkage of described fixed link frame producing when described fixed link is tightened described mask plate.
According in this patent background technology to described in prior art, as shown in Figure 1, when the limit of housing 11 is subject to inside pulling force, housing is Shang Xia 11 (upper and lower orientation in Fig. 1) there is the indent phenomenon shown in Fig. 1, thereby has caused the sagging of mask portion in support section; Now regulate described connection mechanism can reduce or make up indent situation in housing support section, improve precision, the quality of product, and improve good article rate.
In addition, according to mask frame disclosed by the invention, also there is following additional technical feature:
According to embodiments of the invention, described hollow sealing rectangular frame is formed in one or is connected and composed by interconnecting piece by described two groups of opposite side.
A kind of mask frame disclosed by the invention is more prone to solve the product of preparing large size panel, although integrated described sealing rectangular frame has certain advantage in this regard, but when size further increases, by the described sealing rectangular frame connecting and composing by interconnecting piece, there is more obvious advantage.
According to embodiments of the invention, described fixed link is fixed on one group of opposite side inner side of described housing by described fixed mechanism.
Further, between described housing and described fixed link, be provided with matching mechanism, and described matching mechanism when being connected with described fixed link, described housing has gap.
Preferably, near four angles that are arranged on mask frame of described matching mechanism symmetry.
Further, according to embodiments of the invention, the matching mechanism of described correspondence is to lay respectively at described housing and described fixed link contact site has pinpoint bulge-structure and sunk structure.
Preferably, according to embodiments of the invention, the described bulge-structure with positioning action is that radius is identical with sunk structure, the trapezoidal bulge-structure that coordinates the latter two right cylinders that can realize coincidence or can coordinate and can coordinate with described trapezoidal bulge-structure location sunk structure or n be more than or equal to 1 columnar projections structure with can with the sunk structure of described columnar projections respective outer side edges, the medullary ray of the sunk structure of described columnar protrusions structure and described columnar projections respective outer side edges overlaps and perpendicular to surface, described contact site or have projection ball-like structure and a depression spherical crown chamber that coordinates positioning function.
According to embodiments of the invention, described fixed mechanism is screw and is arranged on the screw counter sink structure on described housing and is arranged on the Screw hole structure on fixed link.
Further, described screw is fine groove screw.
Further, described Screw hole structure is tapped bind hole on described fixed link.
Syndeton can be common, easy screw structural, and it is more convenient when maintenance assembling is changed, and fine groove screw structural preferably can regulate meticulousr and bear stronger anchorage force.Meanwhile, described tapped bind hole can be avoided the possibility that in operation, slurry overflows along through hole, also can further reduce the stressed impact of inside casing one-piece construction.
According to embodiments of the invention, described fixed mechanism is arranged by rule on described housing and described fixed link length direction.
Preferably, described fixed mechanism is middle intensive, evenly distributed or middle sparse, the two ends dense arrangement of two ends Sparse rules arrangement.
Conventionally in the operation under state, on fixed link, suffered power can be rule and arranges, and generally there will be middle part stressed larger, and both sides are stressed lower, and therefore can rationally arrange according to stressing conditions in described pairing hole.
According to some embodiments of the present invention, described fixed mechanism also comprises the elastomeric element for increasing anchorage force between described fixed link and described housing.
Preferably, described elastomeric element is spring.
According to embodiments of the invention, described housing also comprises and has raised platform, described raised platform and described fixed link opposite side lower surface close contact, and during solder mask frame horizontal positioned, described raised platform plays the effect of supporting described fixed link.
Further, the inner side of described raised platform and described housing opposite side is provided with chamfering structure or transition curve structure.
So design can reduce assembly to the stopping of luminous organic material, is conducive to the evaporate process of luminous organic material.
According to embodiments of the invention, the upper surface position of described fixed link is not less than on mask frame plane in parallel in other structure.
Further, on one group of opposite side of described housing, be provided with crowning, the upper surface of described fixed link is in the same plane with it.
So, can guarantee that mask plate can be in the same plane, keep surfacing.
According to some embodiments of the present invention, described mask frame is also included in the chock corresponding with described fixed link arranging on one group of opposite side of described housing, and described chock can make described fixed link end positions fix.
The evaporation mask assembly that the invention also discloses a kind of correspondence, is characterized in that, comprises described mask frame and the mask parts of claim 1-19, and described mask parts is fixedly connected on the described fixed link in described mask frame.
Preferably, described mask parts and the joint portion laser welding syndeton that forms the described fixed link of mask frame.
According to embodiments of the invention, described mask parts is that polylith mask plate is spliced, or integrated monolithic mask plate forms.
Integrated monolithic mask plate, when continuing to increase size, will run into many difficulties in making itself on the one hand, and on the other hand, its internal structure rigidity constantly reduces, and sagging is more serious; Therefore the splicing of polylith mask plate can solve problems better.
The aspect that the present invention is additional and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become from the following description of the accompanying drawings of embodiments and obviously and easily understand, wherein:
Shown in Fig. 1, be that tradition is for the structural representation of the mask assembly of evaporation organic materials
Figure 2 shows that a kind of mask frame of the present invention splits schematic diagram;
Fig. 3 is the schematic diagram after mask frame is coordinated;
Figure 4 shows that the enlarged diagram of 30 parts in Fig. 3;
Figure 5 shows that the schematic diagram plane after mask frame coordinates;
Fig. 6 be in Fig. 5 50 parts along the sectional view of A-A direction;
Fig. 7 is whole a kind of structure iron of mask plate for evaporation of the present invention;
Fig. 8 is that evaporation shown in Fig. 7 uses mask plate along the sectional view of B-B direction;
Fig. 9 is the enlarged diagram of 80 parts shown in Fig. 8;
Figure 10 is a kind of improvement project of structure shown in Fig. 9;
Figure 11 is the enlarged diagram of 51 parts of mask frame shown in Fig. 5;
Figure 12 is a kind of improvement structure of structure shown in Figure 11;
Wherein:
In Fig. 1,11---housing, 120---solder joint;
In Fig. 2,21---housing, 211,212---form two opposite side of housing, 22---fixed link, 23---fixed mechanism (screw), 231---the counterbore on housing 21,232---the tapped bind hole on fixed link 22;
In Fig. 3,30---treat magnification region;
In Fig. 4,221---the upper surface of fixed link 22,2120---the highest of housing 21,40---matching mechanism, 222---form the depression parts of matching mechanism 40,2110---forming the protruding part of matching mechanism 40, d---are the inner side on housing 21 limits 211 and the spacing between the outside of fixed link 22 after coordinating;
In Fig. 5,50 for need to dissect magnification region, and 51 for treating enlarged diagram;
In Fig. 7,24---mask parts, 241---splicing mask plate;
In Fig. 8 80---treat magnification region;
In Fig. 9,2111---raised platform, 2112,220---inclined design
In Figure 10,100---a spring structure;
In Figure 12,2120---the fixing chock at fixed link 22 two ends;
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, only for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " on ", orientation or the position relationship of the indication such as D score, " end ", " top ", 'fornt', 'back', " interior ", " outward ", " horizontal stroke ", " erecting " be based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, rather than indicate or imply that the device of indication or element must have specific orientation, with specific orientation, construct and operation, therefore can not be interpreted as limitation of the present invention.
In description of the invention, it should be noted that, unless otherwise clearly defined and limited, term " connection ", " connection ", " being connected ", " connection " should be interpreted broadly, and for example, can be to be fixedly connected with, connecting integratedly, can be also to removably connect; It can be the connection of two element internals; Can be to be directly connected, also can indirectly be connected by intermediary, for the ordinary skill in the art, can particular case understand above-mentioned term concrete meaning in the present invention.
Inventive concept of the present invention is as follows, because existing mask stretches tight in network technology, there will be the sagging problem of large size mask plate producing large size panel, when size is larger, to the precision of product, quality, all can make a big impact, and reduces good article rate simultaneously.Mask frame provided by the invention and corresponding mask assembly thereof cause aduncate fixed link to apply contrary external force by mask frame is netted to generation internal-direction-force because stretching tight, and reduce curved degree in it, and then improve precision and the quality of product; Meanwhile, when size further strengthens, can increase support bar to mask frame and corresponding mask assembly thereof, strengthen and reduce the more sagging ability of large size mask plate, making to manufacture more large size panel becomes possibility.
Describing below with reference to accompanying drawings mask frame of the present invention and corresponding evaporation mask assembly thereof, is wherein that tradition is for the structural representation of the mask assembly of evaporation organic materials shown in Fig. 1; Figure 2 shows that a kind of mask frame of the present invention splits schematic diagram; Fig. 3 is the schematic diagram after mask frame is coordinated; Figure 5 shows that the schematic diagram plane after mask frame coordinates; Fig. 7 is whole a kind of structure iron of mask plate for evaporation of the present invention; Figure 10 is a kind of improvement project of structure shown in Fig. 9; Figure 12 is a kind of improvement structure of structure shown in Figure 11.
According to embodiments of the invention, as shown in Figure 2,4, described mask frame comprises housing 21, and described housing comprises two groups of opposite side 211,212, and described two groups of opposite side form a hollow sealing rectangular frame; Fixed link 22, described fixed link is placed in described housing inner side and is connected with one group of opposite side of mask plate; And fixed mechanism 23, described fixed mechanism is for connecting described housing and the described fixed link that is placed in described housing inner side, play and support described fixed link, the described fixed link inwardly shrinking is outwards stretched, play the effect that reduces or make up the inside shrinkage of described fixed link frame producing when described fixed link is tightened described mask plate.
According in this patent background technology to described in prior art, as shown in Figure 1, when the limit of housing 11 is subject to inside pulling force, housing is Shang Xia 11 (upper and lower orientation in Fig. 1) there is the indent phenomenon shown in Fig. 1, thereby has caused the sagging of mask portion in support section; Now regulate described connection mechanism can reduce or make up indent situation in housing support section, improve precision, the quality of product, and improve good article rate.
In addition, according to mask frame disclosed by the invention, also there is following additional technical feature:
According to embodiments of the invention, described hollow sealing rectangular frame is formed in one or is connected and composed by interconnecting piece by described two groups of opposite side.
A kind of mask frame disclosed by the invention is more prone to solve the product of preparing large size panel, although integrated described sealing rectangular frame has certain advantage in this regard, but when size further increases, by the described sealing rectangular frame connecting and composing by interconnecting piece, there is more obvious advantage.
According to embodiments of the invention, described fixed link 22 is fixed on one group of opposite side 211 inner side of described housing 21, as shown in Figure 2 by described fixed mechanism 23.
Further, 23 of described housing 21 and described fixed links are provided with matching mechanism 40, and described matching mechanism 40 has gap d when described housing 21 is connected with described fixed link 22, as shown in Figure 4, wherein matching mechanism 40 comprises the depression parts 222 that form matching mechanism 40 and the protruding part 2110 that forms matching mechanism 40.
Preferably, near four angles that are arranged on mask frame of described matching mechanism 40 symmetries.
Further, according to embodiments of the invention, the matching mechanism 40 of described correspondence is to lay respectively at described housing and described fixed link contact site has pinpoint bulge-structure and sunk structure, as the depression parts 222 of the formation matching mechanism 40 in Fig. 4 with form the protruding part 2110 of matching mechanism 40.
Preferably, according to embodiments of the invention, the described bulge-structure with positioning action is that radius is identical with sunk structure, the trapezoidal bulge-structure that coordinates the latter two right cylinders that can realize coincidence or can coordinate and can coordinate with described trapezoidal bulge-structure location sunk structure or n be more than or equal to 1 columnar projections structure with can with the sunk structure of described columnar projections respective outer side edges, the medullary ray of the sunk structure of described columnar protrusions structure and described columnar projections respective outer side edges overlaps and perpendicular to surface, described contact site or have projection ball-like structure and a depression spherical crown chamber that coordinates positioning function, as Figure 11, shown in 12 40.
According to embodiments of the invention, described fixed mechanism 23 is screws and is arranged on the screw counter sink structure (as 231 in Fig. 2) on described housing and is arranged on the Screw hole structure on fixed link.
Further, described screw is fine groove screw.
Further, described Screw hole structure is tapped bind hole on described fixed link, as shown in 232 in Fig. 2.
Syndeton can be common, easy screw structural, and it is more convenient when maintenance assembling is changed, and fine groove screw structural preferably can regulate meticulousr and bear stronger anchorage force.Meanwhile, described tapped bind hole can be avoided the possibility that in operation, slurry overflows along through hole, also can further reduce the stressed impact of inside casing one-piece construction.
According to embodiments of the invention, described fixed mechanism 23 is arranged by rule on described housing and described fixed link length direction.
Preferably, described fixed mechanism 23 is middle intensive, evenly distributed or middle sparse, the two ends dense arrangement of two ends Sparse rules arrangement.
Conventionally in the operation under state, on fixed link, suffered power can be rule and arranges, and generally there will be middle part stressed larger, and both sides are stressed lower, and therefore can rationally arrange according to stressing conditions in described pairing hole.
According to some embodiments of the present invention, described fixed mechanism 23 also comprises the elastomeric element for increasing anchorage force between described fixed link and described housing.
Preferably, described elastomeric element is spring, as shown in 100 in Figure 10.
According to embodiments of the invention, as shown in Figure 9, described housing 21 also comprises and has raised platform 2111, described raised platform 2111 and described fixed link 22 opposite side lower surface close contacts, during solder mask frame horizontal positioned, described raised platform 2111 plays the effect of supporting described fixed link 22.
Further, described raised platform 2111 is provided with chamfering structure or transition curve structure with the inner side of described housing opposite side, as shown in 220 in Fig. 9 and 2112.
So design can reduce assembly to the stopping of luminous organic material, is conducive to the evaporate process of luminous organic material.
According to embodiments of the invention, the upper surface position of described fixed link 22 is not less than on mask frame plane in parallel in other structure.
Further, on one group of opposite side of described housing, be provided with crowning, the upper surface of itself and described fixed link is in the same plane.
So, can guarantee that mask plate can be in the same plane, keep surfacing.
According to some embodiments of the present invention, described mask frame is also included in the chock corresponding with described fixed link 2120 arranging on one group of opposite side of described housing, and as shown in figure 12, described chock can make described fixed link end positions fix.
According to embodiments of the invention, described mask frame also comprises support bar, and described support bar is used for further reducing the sag of chain of mask plate.Described support bar can be many and parallel construction, or single structure; Also can be cross one another array mode.
When the product size of needs making further increases, the size of mask plate also increases accordingly, the sag of chain bringing thus also will further increase, the effect of simple strengthening bar is likely difficult to produce a desired effect, and now support bar can further reduce the sagging of described mask plate region intermediate.
The invention also discloses a kind of evaporation mask assembly of correspondence, comprise described mask frame and mask parts 24 that this patent provides, described mask parts 24 is fixedly connected on the described fixed link 23 in described mask frame, as shown in Figure 7,8.
Preferably, described mask parts 24 and the joint portion laser welding syndeton that forms the described fixed link 22 of mask frame.
According to embodiments of the invention, described mask parts 24 is that polylith splicing mask plate 241 is spliced, or integrated monolithic mask plate forms.
Integrated monolithic mask plate, when continuing to increase size, will run into many difficulties in making itself on the one hand, and on the other hand, its internal structure rigidity constantly reduces, and sagging is more serious; Therefore the splicing of polylith mask plate can solve problems better.
Concrete member, structure or feature that any mentioning " embodiment ", " embodiment ", " illustrative examples " etc. mean to describe in conjunction with this embodiment are contained at least one embodiment of the present invention.In this schematic statement everywhere of this specification sheets, not necessarily refer to identical embodiment.And, when describing concrete member, structure or feature in conjunction with any embodiment, advocate, within realizing in conjunction with other embodiment the scope that such member, structure or feature all drop on those skilled in the art.
Although the specific embodiment of the present invention is described in detail with reference to a plurality of illustrative examples of the present invention, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, and these improve and within embodiment will drop on spirit and scope.Particularly, within the scope of aforementioned open, accompanying drawing and claim, can aspect the layout of component and/or subordinate composite configuration, make rational modification and improvement, and can not depart from spirit of the present invention.Except modification and the improvement of component and/or layout aspect, its scope is limited by claims and equivalent thereof.
Claims (22)
1. a mask frame, is characterized in that, comprising:
Housing, described housing comprises two groups of opposite side, described two groups of opposite side form a hollow sealing rectangular frame;
Fixed link, described fixed link is placed in described housing inner side and is connected with one group of opposite side of mask plate;
And fixed mechanism, described fixed mechanism is for connecting described housing and the described fixed link that is placed in described housing inner side, play and support described fixed link, the described fixed link inwardly shrinking is outwards stretched, play the effect that reduces or make up the inside shrinkage of described fixed link frame producing when described fixed link is tightened described mask plate.
2. mask frame according to claim 1, is characterized in that, described hollow sealing rectangular frame is formed in one or is connected and composed by interconnecting piece by described two groups of opposite side.
3. mask frame according to claim 1, is characterized in that, described fixed link is fixed on one group of opposite side inner side of described housing by described fixed mechanism.
4. mask frame according to claim 1, is characterized in that, between described housing and described fixed link, is provided with matching mechanism, and described matching mechanism has gap when described housing is connected with described fixed link.
5. mask frame according to claim 4, is characterized in that, near four angles that are arranged on mask frame of described matching mechanism symmetry.
6. mask frame according to claim 4, is characterized in that, the matching mechanism of described correspondence is to lay respectively at described housing and described fixed link contact site has pinpoint bulge-structure and sunk structure.
7. mask frame according to claim 6, it is characterized in that, the described bulge-structure with positioning action is that radius is identical with sunk structure, the trapezoidal bulge-structure that coordinates the latter two right cylinders that can realize coincidence or can coordinate and can coordinate with described trapezoidal bulge-structure location sunk structure or n be more than or equal to 1 columnar projections structure with can with the sunk structure of described columnar projections respective outer side edges, the medullary ray of the sunk structure of described columnar protrusions structure and described columnar projections respective outer side edges overlaps and perpendicular to surface, described contact site or have projection ball-like structure and a depression spherical crown chamber that coordinates positioning function.
8. mask frame according to claim 1, is characterized in that, described fixed mechanism is screw and is arranged on the screw counter sink structure on described housing and is arranged on the Screw hole structure on fixed link.
9. mask frame according to claim 8, is characterized in that, described screw is fine groove screw.
10. mask frame according to claim 8, is characterized in that, described Screw hole structure is tapped bind hole on described fixed link.
11. mask frames according to claim 8, is characterized in that, described fixed mechanism is arranged by rule on described housing and described fixed link length direction.
12. mask frames according to claim 11, is characterized in that, described fixed mechanism is middle intensive, evenly distributed or middle sparse, the two ends dense arrangement of two ends Sparse rules arrangement.
13. mask frames according to claim 8, is characterized in that, described fixed mechanism also comprises the elastomeric element for increasing anchorage force between described fixed link and described housing.
14. mask frames according to claim 13, is characterized in that, described elastomeric element is spring.
15. mask frames according to claim 1, it is characterized in that, described housing also comprises and has raised platform, described raised platform and described fixed link opposite side lower surface close contact, during solder mask frame horizontal positioned, described raised platform plays the effect of supporting described fixed link.
16. mask frames according to claim 15, is characterized in that, the inner side of described raised platform and described housing opposite side is provided with chamfering structure or transition curve structure.
17. mask frames according to claim 1, is characterized in that, the upper surface position of described fixed link is not less than on mask frame plane in parallel in other structure.
18. mask frames according to claim 17, is characterized in that, on one group of opposite side of described housing, are provided with crowning, and the upper surface of described fixed link is in the same plane with it.
19. according to the mask frame described in claim 1-18 any one, it is characterized in that, described mask frame is also included in the chock corresponding with described fixed link arranging on one group of opposite side of described housing, and described chock can make described fixed link end positions fix.
20. 1 kinds of corresponding evaporation mask assemblies, is characterized in that, comprise described mask frame and the mask parts of claim 1-19, and described mask parts is fixedly connected on the described fixed link in described mask frame.
The evaporation mask assembly of 21. correspondences according to claim 20, is characterized in that, described mask parts is that polylith mask plate is spliced, or integrated monolithic mask plate forms.
The evaporation mask assembly of 22. correspondences according to claim 20, is characterized in that, described mask parts and the joint portion that forms the inside casing of mask frame are the bonding or laser welding syndeton of glue.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210329245.XA CN103668051A (en) | 2012-09-07 | 2012-09-07 | Mask frame and corresponding mask component thereof for vapor deposition |
| PCT/CN2013/081586 WO2014036881A1 (en) | 2012-09-07 | 2013-08-15 | Mask frame and corresponding evaporation mask component of mask frame |
| TW102132121A TWI503427B (en) | 2012-09-07 | 2013-09-06 | Mask frame and mask component for evaporation thereof |
| TW102216761U TWM474258U (en) | 2012-09-07 | 2013-09-06 | Mask frame and mask component for evaporation thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210329245.XA CN103668051A (en) | 2012-09-07 | 2012-09-07 | Mask frame and corresponding mask component thereof for vapor deposition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103668051A true CN103668051A (en) | 2014-03-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210329245.XA Pending CN103668051A (en) | 2012-09-07 | 2012-09-07 | Mask frame and corresponding mask component thereof for vapor deposition |
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| Country | Link |
|---|---|
| CN (1) | CN103668051A (en) |
| TW (2) | TWM474258U (en) |
| WO (1) | WO2014036881A1 (en) |
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| CN104298069A (en) * | 2014-10-13 | 2015-01-21 | 京东方科技集团股份有限公司 | Mask framework, mask plate and manufacturing method of mask plate |
| CN107002219A (en) * | 2014-12-10 | 2017-08-01 | 应用材料公司 | Mask-placement for masking substrate in the processing chamber |
| CN107058946A (en) * | 2017-05-12 | 2017-08-18 | 京东方科技集团股份有限公司 | Fine mask plate support frame, fine mask plate and preparation method thereof |
| WO2018028183A1 (en) * | 2016-08-08 | 2018-02-15 | 京东方科技集团股份有限公司 | Mask plate and evaporation device |
| CN107779816A (en) * | 2016-08-24 | 2018-03-09 | 三星显示有限公司 | Deposition mas component |
| WO2019063074A1 (en) * | 2017-09-27 | 2019-04-04 | Applied Materials, Inc. | Mask arrangement for masking a substrate, apparatus for processing a substrate, and method therefor |
| CN110846614A (en) * | 2019-11-21 | 2020-02-28 | 昆山国显光电有限公司 | Mask and evaporation system |
| CN111118448A (en) * | 2020-01-16 | 2020-05-08 | 合肥维信诺科技有限公司 | Mask and preparation method thereof |
| CN113463018A (en) * | 2016-09-30 | 2021-10-01 | 大日本印刷株式会社 | Frame-integrated vapor deposition mask, production body and production method therefor, and vapor deposition pattern formation method |
| CN114703450A (en) * | 2022-04-06 | 2022-07-05 | 江苏高光半导体材料有限公司 | Metal mask frame, mask assembly and screen-stretching processing method thereof |
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| US10841823B2 (en) * | 2014-07-31 | 2020-11-17 | Ntt Docomo, Inc. | User terminal, radio communication system and radio communication method |
| JP6876244B2 (en) * | 2016-03-25 | 2021-05-26 | 日新電機株式会社 | Mask frame and vacuum processing equipment |
| CN106048521B (en) | 2016-06-12 | 2018-09-18 | 鄂尔多斯市源盛光电有限责任公司 | A kind of preparation method and metal mask plate of metal mask plate |
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| CN201179753Y (en) * | 2008-08-15 | 2009-01-14 | 天津普林电路股份有限公司 | High-density interlinkage circuit board printing contraposition adjustable net frame |
| CN202913047U (en) * | 2012-09-07 | 2013-05-01 | 昆山允升吉光电科技有限公司 | Mask frame and corresponding evaporation mask component |
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| CN104298069B (en) * | 2014-10-13 | 2016-03-02 | 京东方科技集团股份有限公司 | A kind of solder mask frame, mask plate and preparation method thereof |
| WO2016058311A1 (en) * | 2014-10-13 | 2016-04-21 | 京东方科技集团股份有限公司 | Mask frame, mask plate and manufacturing method thereof |
| CN104298069A (en) * | 2014-10-13 | 2015-01-21 | 京东方科技集团股份有限公司 | Mask framework, mask plate and manufacturing method of mask plate |
| CN107002219A (en) * | 2014-12-10 | 2017-08-01 | 应用材料公司 | Mask-placement for masking substrate in the processing chamber |
| US11718904B2 (en) | 2014-12-10 | 2023-08-08 | Applied Materials, Inc. | Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber |
| CN107002219B (en) * | 2014-12-10 | 2021-09-03 | 应用材料公司 | Mask arrangement, apparatus for depositing a layer on a substrate and method of aligning a mask arrangement |
| US10465277B2 (en) | 2016-08-08 | 2019-11-05 | Boe Technology Group Co., Ltd. | Mask and evaporation device |
| WO2018028183A1 (en) * | 2016-08-08 | 2018-02-15 | 京东方科技集团股份有限公司 | Mask plate and evaporation device |
| CN107779816A (en) * | 2016-08-24 | 2018-03-09 | 三星显示有限公司 | Deposition mas component |
| CN113463018A (en) * | 2016-09-30 | 2021-10-01 | 大日本印刷株式会社 | Frame-integrated vapor deposition mask, production body and production method therefor, and vapor deposition pattern formation method |
| US10961616B2 (en) | 2017-05-12 | 2021-03-30 | Boe Technology Group Co., Ltd. | Fine mask support frame, fine mask, and method for fabricating the same |
| CN107058946A (en) * | 2017-05-12 | 2017-08-18 | 京东方科技集团股份有限公司 | Fine mask plate support frame, fine mask plate and preparation method thereof |
| CN109844164B (en) * | 2017-09-27 | 2021-05-25 | 应用材料公司 | Mask arrangement for masking a substrate, apparatus for processing a substrate and method thereof |
| CN109844164A (en) * | 2017-09-27 | 2019-06-04 | 应用材料公司 | Mask-placement for masking substrate, the device and method thereof for handling substrate |
| WO2019063074A1 (en) * | 2017-09-27 | 2019-04-04 | Applied Materials, Inc. | Mask arrangement for masking a substrate, apparatus for processing a substrate, and method therefor |
| CN110846614A (en) * | 2019-11-21 | 2020-02-28 | 昆山国显光电有限公司 | Mask and evaporation system |
| CN110846614B (en) * | 2019-11-21 | 2022-03-25 | 昆山国显光电有限公司 | Mask and evaporation system |
| US12084754B2 (en) | 2019-11-21 | 2024-09-10 | Kunshan Go-Visionox Opto-Electronics Co., Ltd | Mask plate and evaporation system |
| CN111118448A (en) * | 2020-01-16 | 2020-05-08 | 合肥维信诺科技有限公司 | Mask and preparation method thereof |
| CN111118448B (en) * | 2020-01-16 | 2021-12-14 | 合肥维信诺科技有限公司 | Mask and preparation method thereof |
| CN114703450A (en) * | 2022-04-06 | 2022-07-05 | 江苏高光半导体材料有限公司 | Metal mask frame, mask assembly and screen-stretching processing method thereof |
| CN114703450B (en) * | 2022-04-06 | 2024-09-03 | 江苏高光半导体材料有限公司 | Metal mask frame, mask assembly and screen tensioning processing method of mask assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201410894A (en) | 2014-03-16 |
| WO2014036881A1 (en) | 2014-03-13 |
| TWM474258U (en) | 2014-03-11 |
| TWI503427B (en) | 2015-10-11 |
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