CN204738017U - Mask plate frame - Google Patents
Mask plate frame Download PDFInfo
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- CN204738017U CN204738017U CN201520485843.5U CN201520485843U CN204738017U CN 204738017 U CN204738017 U CN 204738017U CN 201520485843 U CN201520485843 U CN 201520485843U CN 204738017 U CN204738017 U CN 204738017U
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- mask plate
- fixed strip
- breach
- plate framework
- framework
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Abstract
The utility model provides a mask plate frame for fixed mask plate, it includes: the main part, it is provided with the opening, a plurality of fixed strips, each the fixed strip set up respectively in the main part the open -ended edge for fixed mask plate, and, each the fixed strip encircles the opening distributes and encloses into a hollow framework, each the fixed strip constitutes a side of framework, and at least one a tip of fixed strip is equipped with the breach, so that at least one end angle deal with is seted up and is put in the framework. Above -mentioned mask plate frame is because the tip of fixed strip is provided with the breach to make and break off each other between the double -phase adjacent fixed strip, when with the base plate pressfitting after, it is less that the base plate pressurized supports the area, and the base plate only receives the effort of an orientation on the end angular zone, and the stack of the effort of unparalled orientation, can great degree ground reduce the area that the ripple that forms on the base plate and perk influence were distinguished, is favorable to the coating by vaporization yield.
Description
Technical field
The utility model relates to mask plate technical field, particularly relates to a kind of mask plate framework.
Background technology
Organic electroluminescent LED (Organic Light-Emitting Diodes, be called for short OLED) be selfluminous element, do not need backlight, outward appearance is light, thin, and traditional liquid-crystal display (LCD) needs backlight to work, apparent size is thicker.Organic light emitting diode display low in energy consumption, visual angle is wide, and screen response is fast, is to meet the following technology to display function requirement of people.Therefore, Organic Light Emitting Diode is expected to replace liquid-crystal display in the near future, has very high market potential.
Organic molecule photodiode is in making processes, comparatively proven technique adopts vacuum evaporation technology at present, in device fabrication process, organic materials can be deposited on the substrate that is positioned at above evaporation source, for forming distinctive pattern, below substrate, being glued with mask plate, mask plate leaving and designs typesetted opening in advance, final organic materials by the open area on mask plate, can be deposited to thereon.
The effect of mask plate framework supports mask plate and substrate.Refer to Fig. 1, it is schematic diagram after mask plate framework and substrate pressing in prior art.Mask plate framework comprises main body 11 and four fixed strips 12, and fixed strip 12 is arranged in main body 11, and four fixed strips 12 join end to end and surround rectangular configuration, and fixed strip 12 is for supporting mask plate and substrate 13.Refer to Fig. 2, because four fixed strips 12 all support substrate 13, and after contraposition completes, substrate 13 is all subject to being fixed constraint on fixed strip 12, the substrate 13 easy generation ripple of pressurized zone and the bending of tilting, and in the junction of two fixed strips, namely hold the pressurized Area of bearing on angular zone larger, and hold angle to be subject to the compression constraint of both direction simultaneously, the stressed superposition of both direction causes substrate 13 end angle to cause the bending of larger ripple effects district and tilting, and ripple and tilting bending easily cause mask plate framework four angular zone place's substrate and attaching mask bad, affect evaporation effect.
Utility model content
Based on this, for the problems referred to above, be necessary to provide a kind of mask plate framework, its solve technical problem mainly comprise how to reduce substrate formed after pressurized ripple and tilt the zone of influence area and how to improve evaporation yield etc.
A kind of mask plate framework, for fixing mask plate, comprising:
Main body, it is provided with opening;
Some fixed strips, each described fixed strip is arranged at the edge of the described opening of described main body respectively, for fixing mask plate;
Further, each described fixed strip is around described aperture distribution and surround the framework of a hollow, and fixed strip described in each forms a side of described framework, and an end of at least one described fixed strip is provided with breach, arranges to make in described framework at least angle, one end place disconnect.
Wherein in an embodiment, the both ends of described fixed strip are equipped with described breach.
Wherein in an embodiment, the both ends of the two described fixed strips be oppositely arranged are provided with described breach.
Wherein in an embodiment, the length of each described breach is equal.
Wherein in an embodiment, described breach runs through described fixed strip.
Wherein in an embodiment, the both ends of each described fixed strip are provided with described breach.
Wherein in an embodiment, the length of described breach is less than 1/3 of the length of described fixed strip.
Wherein in an embodiment, described main body and described fixed strip are formed in one structure.
Wherein in an embodiment, also comprise some support bars, the two ends of described support bar are fixedly installed on two fixed strips be oppositely arranged respectively.
Wherein in an embodiment, some support bars form gridiron.
Above-mentioned mask plate framework, because the end of fixed strip is provided with breach, to make mutually to disconnect between two adjacent fixed strips, when with substrate pressing after, substrate pressurized Area of bearing is less, and substrate is only subject to the reactive force in a direction on end angular zone, and the superposition of reactive force without both direction, the ripple formed on substrate and the area tilting the zone of influence can be reduced largely, be conducive to evaporation yield.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of mask plate framework and substrate pressing in prior art;
Fig. 2 is the design sketch of substrate on the mask plate framework shown in Fig. 1 after pressurized;
Fig. 3 is the structural representation of mask plate framework in the utility model one embodiment;
Fig. 4 is the design sketch of substrate on the mask plate framework shown in Fig. 3 after pressurized;
Fig. 5 is the structural representation of mask plate framework in another embodiment of the utility model;
Fig. 6 is the structural representation of mask plate framework in the another embodiment of the utility model.
Embodiment
For enabling above-mentioned purpose of the present utility model, feature and advantage become apparent more, are described in detail embodiment of the present utility model below in conjunction with accompanying drawing.Set forth a lot of detail in the following description so that fully understand the utility model.But the utility model can be much different from alternate manner described here to implement, those skilled in the art can when doing similar improvement without prejudice to when the utility model intension, and therefore the utility model is by the restriction of following public concrete enforcement.
It should be noted that, when element is called as " being fixed on " another element, directly can there is element placed in the middle in it on another element or also.When an element is considered to " connection " another element, it can be directly connected to another element or may there is centering elements simultaneously.Term as used herein " vertical ", " level ", "left", "right" and similar statement just for illustrative purposes, do not represent it is unique embodiment.
Unless otherwise defined, all technology used herein and scientific terminology are identical with belonging to the implication that those skilled in the art of the present utility model understand usually.The object of the term used in specification sheets of the present utility model herein just in order to describe concrete embodiment, is not intended to be restriction the utility model.Term as used herein " and/or " comprise arbitrary and all combinations of one or more relevant Listed Items.
The utility model provides a kind of mask plate framework, and for fixing mask plate, it comprises: main body, and it is provided with opening; Some fixed strips, each described fixed strip is arranged at the edge of the described opening of described main body respectively, for fixing mask plate; Further, each described fixed strip is around described aperture distribution and surround the framework of a hollow, and fixed strip described in each forms a side of described framework, and an end of at least one described fixed strip is provided with breach, arranges to make in described framework at least angle, one end place disconnect.
Refer to Fig. 3, it is the structural representation of mask plate framework in the utility model one embodiment.
Mask plate framework 10 comprises: main body 100 and fixed strip 200, main body 100 is provided with opening 110, fixed strip 200 is arranged at the edge of the opening 110 of main body 100, fixed strip 200 distributes around opening 110 and surrounds the framework of a hollow, each fixed strip 200 forms a side of framework, and the both ends of one group of fixed strip be oppositely arranged 200 are provided with breach 210, disconnects arranging to make framework middle-end angle place, in other words, namely mutually disconnect between two adjacent fixed strips 200 in framework.Such as, described main body is a retaining plate or loading plate.
When carrying out evaporation, substrate and the contraposition of mask plate framework, substrate is subject to being fixed constraint on fixed strip.Refer to Fig. 4, it is the design sketch after substrate pressurized.Because the end of fixed strip is provided with breach, to make mutually to disconnect between two adjacent fixed strips, when with substrate pressing after, substrate pressurized Area of bearing is less, and substrate is only subject to the reactive force in a direction on end angular zone, and the superposition of reactive force without both direction, the ripple formed on substrate and the area tilting the zone of influence can be reduced largely, be conducive to evaporation yield.
Consider that region to be deposited in substrate is generally rectangle, refer to Fig. 3, opening 110 is rectangle, and fixed strip 200 surrounds the void region area rectangular box identical with opening 110 area.Certainly, opening 110 also can be other shapes, such as, according to the shape in region to be deposited on substrate, and the shape of designed openings.
For the ease of producing, and improve the mechanical stability of mask plate framework, such as, described main body and described fixed strip are formed in one structure, and for example, the edge of opening of main body convexes to form described fixed strip, like this, so that the production of mask plate framework, can also improve the mechanical stability of mask plate framework simultaneously.
In order to improve the mechanical stability of mask plate framework further, reduce the distortion that mask plate framework causes due to the tensile force of mask plate, refer to Fig. 3, mask plate framework 10 also comprises some support bars 300, and the two ends of support bar 300 are fixedly installed on two fixed strips be oppositely arranged 200 respectively.Further, some support bars 300 form gridiron.By arranging support bar on mask plate framework, the rigidity of its entirety can be strengthened, improving its mechanical stability, to reduce it to cause mask plate framework distortion due to the tensile force of mask plate, improve the work-ing life of mask plate framework.
In the present embodiment, it is equal that mask plate framework 10 comprises fixed strip 200 length that two groups of fixed strips be oppositely arranged 200, two are oppositely arranged, and the identical length etc. of each breach 210.Certainly, in other embodiments, the length of breach can be not exclusively equal.
Refer to Fig. 5, it is the structural representation of mask plate framework in another embodiment of the utility model.
Mask plate framework 20 comprises: main body 100, fixed strip 200 and support bar 300, and wherein, main body 100 is provided with a rectangular aperture 110, and fixed strip 200 to distribute the formation one hollow region area rectangular box identical with opening 110 around opening 110.Wherein, the two ends of one group of two fixed strip be oppositely arranged 200 are equipped with breach 210, and breach 210 runs through fixed strip 200, and in other words, the edge of rectangular aperture 110 only arranges one group of fixed strip 200.When carrying out evaporation, substrate is only by the support of one group of fixed strip, avoid substrate causes ripple simultaneously and tilts the zone of influence by the reactive force of both direction superposition at end angle place, reduce the ripple formed on substrate and the area tilting the zone of influence largely, be conducive to evaporation yield.
Refer to Fig. 6, it is the structural representation of mask plate framework in the another embodiment of the utility model.
Mask plate framework 30 comprises: main body 100, fixed strip 200 and support bar 300, and wherein, main body 100 is provided with a rectangular aperture 110, and fixed strip 200 to distribute the formation one void region area rectangular box identical with opening 110 around opening 110.Wherein, the both ends of each fixed strip 200 are provided with breach 210, that is, mutually disconnect between two adjacent fixed strips 200 in rectangular box, also can be understood as, substrate at end angle place without support.When carrying out evaporation, substrate without support, avoids the superposition that edge of substrate angle place produces ripple and tilts the zone of influence at end angle place, reduces the ripple formed on substrate and the area tilting the zone of influence largely, is conducive to evaporation yield.
Preferably, the length of the breach 210 of two groups of fixed strips be oppositely arranged 200 is equal, and the length of breach 210 is less than 1/3 of fixed strip 200.Such as, the length of breach 210 is 25% ~ 30% of the length of fixed strip 200.Like this, fixed strip can not be affected to while the fixed function of mask plate, reduce area substrate being formed ripple and the tilting zone of influence.
It should be noted that, the number that in the utility model mask plate framework, breach is arranged and length are not limited to above-described embodiment, in other embodiments, number and the length of breach can be set as the case may be, as long as make mutually to disconnect between two adjacent fixed strips.
Above-mentioned mask plate framework, because the end of fixed strip is provided with breach, to make mutually to disconnect between two adjacent fixed strips, when with substrate pressing after, substrate pressurized Area of bearing is less, and substrate is only subject to the reactive force in a direction on end angular zone, and the superposition of reactive force without both direction, the ripple formed on substrate and the area tilting the zone of influence can be reduced largely, be conducive to evaporation yield.
Each technical characteristic of the above embodiment can combine arbitrarily, for making description succinct, the all possible combination of each technical characteristic in above-described embodiment is not all described, but, as long as the combination of these technical characteristics does not exist contradiction, be all considered to be the scope that this specification sheets is recorded.
The above embodiment only have expressed several embodiment of the present utility model, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to utility model patent scope.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (10)
1. a mask plate framework, for fixing mask plate, is characterized in that, comprising:
Main body, it is provided with opening;
Some fixed strips, each described fixed strip is arranged at the edge of the described opening of described main body respectively, for fixing mask plate;
Further, each described fixed strip is around described aperture distribution and surround the framework of a hollow, and fixed strip described in each forms a side of described framework, and an end of at least one described fixed strip is provided with breach, arranges to make in described framework at least angle, one end place disconnect.
2. mask plate framework according to claim 1, is characterized in that, the both ends of described fixed strip are equipped with described breach.
3. mask plate framework according to claim 2, is characterized in that, the both ends of the two described fixed strips be oppositely arranged are provided with described breach.
4. mask plate framework according to claim 3, is characterized in that, the length of each described breach is equal.
5. mask plate framework according to claim 3, is characterized in that, described breach runs through described fixed strip.
6. mask plate framework according to claim 3, is characterized in that, the both ends of each described fixed strip are provided with described breach.
7. mask plate framework according to claim 6, is characterized in that, the length of described breach is less than 1/3 of the length of described fixed strip.
8. mask plate framework according to claim 1, is characterized in that, described main body and described fixed strip are formed in one structure.
9. mask plate framework according to claim 1, is characterized in that, also comprises some support bars, and the two ends of described support bar are fixedly installed on two fixed strips be oppositely arranged respectively.
10. mask plate framework according to claim 9, is characterized in that, some support bars form gridiron.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520485843.5U CN204738017U (en) | 2015-07-06 | 2015-07-06 | Mask plate frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520485843.5U CN204738017U (en) | 2015-07-06 | 2015-07-06 | Mask plate frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204738017U true CN204738017U (en) | 2015-11-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520485843.5U Active CN204738017U (en) | 2015-07-06 | 2015-07-06 | Mask plate frame |
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| CN (1) | CN204738017U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106086782A (en) * | 2016-06-28 | 2016-11-09 | 京东方科技集团股份有限公司 | A kind of mask plate assembly and installation method, evaporation coating device |
| CN107419218A (en) * | 2017-07-28 | 2017-12-01 | 京东方科技集团股份有限公司 | Mask framework, evaporation coating device and mask framework localization method |
| CN107435130A (en) * | 2017-09-28 | 2017-12-05 | 上海天马微电子有限公司 | Mask device, evaporated device and evaporation coating method |
| CN107653437A (en) * | 2017-11-08 | 2018-02-02 | 武汉华星光电半导体显示技术有限公司 | The compound mask plate of evaporation |
| CN115161591A (en) * | 2022-05-27 | 2022-10-11 | 成都拓维高科光电科技有限公司 | Method for manufacturing sheet mask |
-
2015
- 2015-07-06 CN CN201520485843.5U patent/CN204738017U/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106086782A (en) * | 2016-06-28 | 2016-11-09 | 京东方科技集团股份有限公司 | A kind of mask plate assembly and installation method, evaporation coating device |
| CN106086782B (en) * | 2016-06-28 | 2018-10-23 | 京东方科技集团股份有限公司 | A kind of mask plate component and its installation method, evaporation coating device |
| CN107419218A (en) * | 2017-07-28 | 2017-12-01 | 京东方科技集团股份有限公司 | Mask framework, evaporation coating device and mask framework localization method |
| CN107419218B (en) * | 2017-07-28 | 2019-08-27 | 京东方科技集团股份有限公司 | Mask frame, evaporation coating device and mask frame localization method |
| CN107435130A (en) * | 2017-09-28 | 2017-12-05 | 上海天马微电子有限公司 | Mask device, evaporated device and evaporation coating method |
| CN107653437A (en) * | 2017-11-08 | 2018-02-02 | 武汉华星光电半导体显示技术有限公司 | The compound mask plate of evaporation |
| CN107653437B (en) * | 2017-11-08 | 2019-10-25 | 武汉华星光电半导体显示技术有限公司 | The compound mask plate of vapor deposition |
| CN115161591A (en) * | 2022-05-27 | 2022-10-11 | 成都拓维高科光电科技有限公司 | Method for manufacturing sheet mask |
| CN115161591B (en) * | 2022-05-27 | 2024-04-19 | 成都拓维高科光电科技有限公司 | Manufacturing method of flaky mask |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |