CN202913044U - Mask plate assembly for evaporation of large-size OLED - Google Patents
Mask plate assembly for evaporation of large-size OLED Download PDFInfo
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- CN202913044U CN202913044U CN 201220454410 CN201220454410U CN202913044U CN 202913044 U CN202913044 U CN 202913044U CN 201220454410 CN201220454410 CN 201220454410 CN 201220454410 U CN201220454410 U CN 201220454410U CN 202913044 U CN202913044 U CN 202913044U
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- mask
- support portion
- large size
- plate component
- mask plate
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Abstract
The utility model discloses a mask plate assembly for evaporation of a large-size OLED (organic light emitting diode). The mask plate assembly comprises an outer mask frame, a mask part and a supporting part, wherein the mask part is connected with the supporting part fixed to the outer mask frame; the supporting part comprises N supporting part units (N is not less than 2); each supporting part unit comprise supporting strips; mask openings are formed in the mask part; and the mask openings are not covered with the supporting part units and form a mask pattern region on the mask part. According to the mask plate assembly, the problems of low precision, low yield and the like caused by sinking of the surface of a mask plate and the problem of dislocation of the conventional mask part formed by assembling a plurality of mask units can be solved, the precision and the quality of a product are effectively improved, and the yield is increased.
Description
Technical field
The present invention relates to the electronic printing field, relate in particular to a kind of large size OLED evaporation mask plate component.
Background technology
Because organic electroluminescent LED (Organic Light-Emitting Diode, OLED) owing to possessing simultaneously luminous, do not need that backlight, contrast gradient are high, the characteristic of thin thickness, the excellence such as the visual angle is wide, speed of response is fast, can be used for the flexibility panel, the use temperature scope is wide, structure and processing procedure are simpler, be considered to the emerging utilisation technology of follow-on flat-panel screens.
A most important link is that organic layer is applied in the basic unit according to the requirement that drives matrix in the OLED production process, forms crucial luminescence display unit.OLED is a kind of solid material, and the development of its high precision paint-on technique is the key of restriction OLED commercialization.Finish at present this work, mainly adopt the method for vacuum moulding machine or vacuum thermal evaporation (VTE), it is to be positioned at the organic molecule mild heat (evaporation) of vacuum cavity, so that these molecules condense upon in the lower basic unit of temperature with the form of film.The high-accuracy mask plate that needs in this course to adapt with OLED luminescence display unit precision is as medium.
Mask plate is made of mask section and mask housing, and shown in Figure 1 is the structural representation of traditional small size mask plate, and it comprises integrated mask section 11 and is used for being fixed as one the mask housing 12 of moulding mask section 11.In practical application area, people wish to produce larger sized mask plate, thereby satisfy the manufacturing demand of volume production and large size OLED display screen, can have following problem but make the large size mask plate: the mask section of the large face width of cloth is because serious sagging can appear in the weight of itself.For addressing this problem, people are designed to a plurality of mask unit with mask section and assemble, as shown in Figure 2, mask section is made of several mask unit 20, mask unit is by on the 200 permanent mask housings of two ends, because mask unit is to fix by the fixing mode in two ends, in case deviation appears in adjacent two mask section fixation procedure, then very easily produce each other certain position skew, thereby be difficult to further raising at the yield of OLED product.
Summary of the invention
In view of this, need to overcome in the defects of the prior art at least one.The invention provides a kind of composite mask plate.
Described a kind of large size OLED evaporation mask plate component comprises mask housing, mask section and support portion, wherein, described mask section be connected with the described support portion that is connected described mask housing; Described support portion comprises that N is more than or equal to unit, 2 support portions; Unit, described support portion is made of described support bar, in the described mask section mask open is arranged, and unit, described support portion can not block described mask open, and described mask open consists of the mask pattern district in the described mask section.
According to described to prior art in this patent background technology, if make the large size mask plate, the mask main body of its metal mold can have larger linear quality, thereby it is sagging to cause mask main board face to produce, and according to large size OLED evaporation provided by the invention mask plate component, mask section is fitted in the support section, and the support portion can accurately be located first, again mask section is fitted on the support portion, the anchorage force of direct applying so can be provided sagging mask main body, reduce or remedy mask main board face and produce sagging situation, and avoided in this patent background technology having the problem of the mask section appearance that is assembled by a plurality of mask unit now, as shown in Figure 2, be that mask unit is to fix by the fixing mode in two ends, in case deviation appears in adjacent two mask section fixation procedure, then very easily produce each other certain position skew, thereby the yield at the OLED product is difficult to further raising, the large size OLED evaporation that this patent provides can effectively improve the precision of product with mask plate component, quality, and improve good article rate.
In addition, also have a following additional technical feature according to composite mask plate disclosed by the invention:
According to embodiments of the invention, described mask section has a mask pattern district at least.
According to embodiments of the invention, arbitrary described mask open places between two adjacent described support bars of described support portion in the described mask section, the spacing of adjacent described support bar be described mask open spacing M doubly, described M is more than or equal to 1 and be positive integer.
According to some embodiments of the present invention, described support bar is evenly arranged.
According to embodiments of the invention, adopt described support portion has the alloy material structure of magnetic property.
Preferably, the Invar alloy material structure is adopted in described support portion.
According to embodiments of the invention, that described mask section adopts is wear-resisting, high temperature resistant, acid and alkali-resistance and and described supporting layer between the material structure of good adhesion is arranged.
Preferably, described mask section adopts the polymerization macromolecule material structure of stable performance.
According to embodiments of the invention, described support portion thickness is more than or equal to 20 μ m, less than or equal to 60 μ m.
According to some embodiments of the present invention, described support portion thickness is 20 μ m or 30 μ m or 40 μ m or 50 μ m or 60 μ m.
According to embodiments of the invention, described mask section thickness is more than or equal to 2 μ m, less than or equal to 20 μ m.
According to some embodiments of the present invention, described mask section thickness is 2 μ m or 6 μ m or 10 or 14 μ m or 18 μ m or 20 μ m.
According to one embodiment of present invention, described mask section thickness is 6 μ m, and described support portion thickness is 30 μ m.
According to embodiments of the invention, described mask open spacing more than or equal to 30 μ m less than or equal to 200 μ m.
Preferably, described mask open spacing more than or equal to 50 μ m less than or equal to 100 μ m.
According to one embodiment of present invention, described mask open spacing is 75 μ m.
According to embodiments of the invention, consist of between the unit, adjacent described support portion, described support portion and can fit or exist certain support portion unit interval.
Preferably, it is characterized in that, described support portion unit interval is m times of described mask open spacing, and m is not less than zero integer.
According to large size OLED evaporation mask plate component provided by the invention, described support portion can support described mask section, described support portion is fixed on the mask frame, and described mask section is fixed on the described support portion, so that described mask section location positioning each other, so relatively remedy, can make and satisfy high precision, the mask plate that large size OLED screen evaporation is used.
With respect to the traditional masks plate, can make higher PPI(and be Pixels per inch represented be pixel (pixel) number that per inch has) OLED display screen (open amount that per inch has on the composite mask plate main body is corresponding with the PPI of OLED display screen).For example: when the open centre spacing of traditional masks plate is 150um, the PPI=2.54cm/150um ≈ 169 that it is corresponding; And when the between centers d1 of the support bar 3220 of two formation mask support portions among the present invention is 150um (such as Fig. 6), large size OLED evaporation is PPI=2.54cm/d3=2.54cm/75um ≈ 339 with the actual PPI of mask plate main body, the OLED screen that makes thus so will surmount the limit 300PPI that human eye can be seen also for 339PPI.
The formation material of traditional masks plate is metal alloy, among the present invention with metal alloy compositions as supporting layer, zone corresponding with mask pattern on it is compared with the traditional masks plate, the interior metal material reduces in a large number, although increase the mask layer that organic materials consists of, but its quality is relatively light, thus so that the oeverall quality of composite mask plate minimizing.When being fixed on the composite mask plate on the housing with identical tension force, the inside sag of chain of composite mask plate also will weaken.
The aspect that the present invention adds and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Description of drawings
Above-mentioned and/or additional aspect of the present invention and advantage are from obviously and easily understanding becoming the description of embodiment below in conjunction with accompanying drawing, wherein:
Shown in Figure 1 is the structural representation of traditional small size mask plate;
Shown in Figure 2 is the mask section schematic diagram that several mask unit consist of;
Shown in Figure 3 is the front schematic view that large size OLED evaporation of the present invention is used mask plate,
The schematic cross-section of A-A direction in Fig. 4 corresponding diagram 3,
Fig. 5 is the reverse side schematic diagram that large size OLED evaporation of the present invention is used mask plate;
Fig. 6 is 50 structural representations that amplify among Fig. 5.
Wherein, among Fig. 1,11 is mask section, and 12 are the mask housing for the moulding mask section 11 that is fixed as one;
Among Fig. 2,20 is mask unit, and 200 is the two ends of mask unit;
Among Fig. 3,30 is that mask housing, 31 is mask section;
Among Fig. 4,32 is the support portion, and 320 is the unit, support portion, and h1 is mask section thickness, and h2 is support portion thickness;
Among Fig. 4,50 for treating amplifier section;
Among Fig. 6,3200 is support bar, and 310 is mask open, and d1 is the support bar spacing, and d2 is the support unit spacing, and d3 is the mask open spacing.
Embodiment
The below describes embodiments of the invention in detail, and the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment that is described with reference to the drawings, only be used for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " on ", orientation or the position relationship of the indications such as D score, " end ", " top ", 'fornt', 'back', " interior ", " outward ", " horizontal stroke ", " erecting " be based on orientation shown in the drawings or position relationship, only be for convenience of description the present invention and simplified characterization, rather than indication or the hint device of indication or element must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.
In description of the invention, need to prove, unless clear and definite regulation and restriction are arranged in addition, term " connection ", " connection ", " linking to each other ", " connection " should be done broad understanding, for example, can be to be fixedly connected with, connecting integratedly, also can be to removably connect; It can be the connection of two element internals; Can be directly to link to each other, also can indirectly link to each other by intermediary, for the ordinary skill in the art, can particular case understand above-mentioned term concrete meaning in the present invention.
Inventive concept of the present invention is as follows, large size mask plate sagging problem can occur producing large size panel because existing mask stretches tight in the network technology, when size is larger, all can make a big impact to precision, the quality of product, reduces simultaneously good article rate.Large size OLED evaporation provided by the invention with mask plate component by large size OLED evaporation is carried out improvement on the material structure with the mask layer in the mask plate component, reduce its original support function, only has the pattern function, add independent support portion and use the integral rigidity of mask plate component to increase large size OLED evaporation, the material that the materials'use integral body of mask section and support portion is lighter, its overall weight is alleviated, also slowed down the large size OLED evaporation possible sag of chain of mask plate component, mask section on after accurate fixed support portion, fitting simultaneously, make its location more accurate, make more large size panel and be more prone to realize thereby make.
Describe below with reference to accompanying drawings mask frame of the present invention and corresponding mask assembly thereof, wherein shown in Figure 1 is the structural representation of traditional small size mask plate; Shown in Figure 2 is the mask section schematic diagram that several mask unit consist of; Shown in Figure 3 is the front schematic view that large size OLED evaporation of the present invention is used mask plate, and Fig. 5 is the reverse side schematic diagram that large size OLED evaporation of the present invention is used mask plate.
According to embodiments of the invention, a kind of large size OLED evaporation mask plate component, such as Fig. 3-shown in Figure 6, described a kind of large size OLED evaporation mask plate component, comprise mask housing 30, mask section 31 and support portion 32, wherein, described mask section 31 be connected with the described support portion 32 that is connected described mask housing 30; Described support portion 32 comprises that N is more than or equal to unit, 2 support portions 320; Unit, described support portion 320 is made of described support bar 3200, in the described mask section 31 mask open 310 is arranged, and unit, described support portion 320 can not block described mask open 310, and described mask open 310 consists of the mask pattern district in the described mask section.
According to embodiments of the invention, described mask section 31 has a mask pattern district at least.
According to embodiments of the invention, arbitrary described mask open 310 places between two adjacent described support bars 3200 of unit, described support portion 320 in the described mask section 31, the M that adjacent described support bar spacing d1 is described mask open spacing d3 doubly, described M is more than or equal to 1 and be positive integer, as shown in Figure 6.
According to some embodiments of the present invention, described support bar 3200 is evenly arranged.
According to embodiments of the invention, adopt described support portion 32 has the alloy material structure of magnetic property.
Preferably, the Invar alloy material structure is adopted in described support portion 32.
According to embodiments of the invention, that described mask section 31 adopts is wear-resisting, high temperature resistant, acid and alkali-resistance and and described supporting layer between the material structure of good adhesion is arranged.
Preferably, described mask section 31 adopts the polymerization macromolecule material structure of stable performances.
According to embodiments of the invention, described support portion thickness h 2 is more than or equal to 20 μ m, less than or equal to 60 μ m, as shown in Figure 4.
According to some embodiments of the present invention, described support portion thickness h 2 is 20 μ m or 30 μ m or 40 μ m or 50 μ m or 60 μ m, as shown in Figure 4.
According to embodiments of the invention, described mask section thickness h 1 is more than or equal to 2 μ m, less than or equal to 20 μ m, as shown in Figure 4.
According to some embodiments of the present invention, described mask section thickness h 1 is 2 μ m or 6 μ m or 10 or 14 μ m or 18 μ m or 20 μ m, as shown in Figure 4.
According to one embodiment of present invention, described mask section thickness h 1 is 6 μ m, and described support portion thickness h 2 is 30 μ m, as shown in Figure 4.
According to embodiments of the invention, described mask open spacing d3 more than or equal to 30 μ m less than or equal to 200 μ m, as shown in Figure 6.
Preferably, described mask open spacing d3 more than or equal to 50 μ m less than or equal to 100 μ m, as shown in Figure 6.
According to one embodiment of present invention, described mask open spacing d3 is 75 μ m, as shown in Figure 6.
According to embodiments of the invention, consist of between the unit, 32 adjacent described support portion, described support portion 320 and can fit or exist certain support portion unit interval d2, as shown in Figure 6.
Preferably, it is characterized in that, the m that described support portion unit interval d2 is described mask open spacing d3 times, m is not less than zero integer, as shown in Figure 6.
The open area that is made of support bar 3200 is arranged in the unit, support portion 320 that consists of support portion 32 in opening 310 matrix area, as shown in Figure 6, support bar 3200 positions of the open area that consists of do not overlap with opening 310 positions in the mask section 31, as preferably, described support bar 3200 is evenly arranged, and the spacing d3 of 310 of adjacent two row openings has following relation: d1=n*d3(n=1,2 in the spacing d1 of 3200 of adjacent two support bars and the mask section 31,3,4 ...).
Further, as shown in Figure 6, consist of between the unit, adjacent two support portion, mask support portion and have certain spacing, as preferably, its spacing d2 and d3 have following relation: d2=n*d3(n=0,1,2,3,4 ...).
Any mentioning " embodiment ", " embodiment ", " illustrative examples " etc. mean to be contained among at least one embodiment of the present invention in conjunction with concrete member, structure or characteristics that this embodiment describes.Not necessarily refer to identical embodiment in this schematic statement everywhere of this specification sheets.And when describing concrete member, structure or characteristics in conjunction with any embodiment, what advocate is, realizes that in conjunction with other embodiment such member, structure or characteristics all drop within those skilled in the art's the scope.
Although with reference to a plurality of illustrative examples of the present invention the specific embodiment of the present invention is described in detail, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, and these improve and embodiment will drop within the spirit and scope.Particularly, within the scope of aforementioned open, accompanying drawing and claim, can make rational modification and improvement aspect the layout of component and/or subordinate composite configuration, and can not break away from spirit of the present invention.Except modification and the improvement of component and/or layout aspect, its scope is limited by claims and equivalent thereof.
Claims (15)
1. a large size OLED evaporation mask plate component comprises mask housing, mask section and mask support portion, it is characterized in that, described mask section be connected with the described mask support portion that is connected described mask housing; Described mask support portion comprises that N is more than or equal to unit, 2 support portions; Unit, described support portion is made of described support bar, in the described mask section mask open is arranged, and unit, described support portion can not block described mask open, and described opening consists of the mask pattern district.
2. large size OLED evaporation mask plate component according to claim 1 is characterized in that, described mask section has a mask pattern district at least.
3. large size OLED evaporation mask plate component according to claim 1, it is characterized in that, arbitrary described mask open places between two adjacent described support bars of described support portion in the described mask section, the spacing of adjacent described support bar be described mask open spacing M doubly, described M is more than or equal to 1 and be positive integer.
4. large size OLED evaporation mask plate component according to claim 1 is characterized in that, adopt described support portion has the alloy material structure of magnetic property.
5. large size OLED evaporation mask plate component according to claim 4 is characterized in that, the Invar alloy material structure is adopted in described support portion.
6. large size OLED evaporation mask plate component according to claim 1 is characterized in that, that described mask section adopts is wear-resisting, high temperature resistant, acid and alkali-resistance and and described supporting layer between the material structure of good adhesion is arranged.
7. large size OLED evaporation mask plate component according to claim 6 is characterized in that, described mask section adopts the polymerization macromolecule material structure of stable performance.
8. large size OLED evaporation mask plate component according to claim 1 is characterized in that, described support portion thickness is more than or equal to 20 μ m, less than or equal to 60 μ m.
9. large size OLED evaporation mask plate component according to claim 8 is characterized in that, described support portion thickness is 20 μ m or 30 μ m or 40 μ m or 50 μ m or 60 μ m.
10. large size OLED evaporation mask plate component according to claim 1 is characterized in that, described mask section thickness is more than or equal to 2 μ m, less than or equal to 20 μ m.
11. large size OLED evaporation mask plate component according to claim 10 is characterized in that, described mask section thickness is 2 μ m or 6 μ m or 10 or 14 μ m or 18 μ m or 20 μ m.
12. large size OLED evaporation mask plate component according to claim 1 is characterized in that, described mask open spacing more than or equal to 30 μ m less than or equal to 200 μ m.
13. large size OLED evaporation mask plate component according to claim 12 is characterized in that, described mask open spacing more than or equal to 50 μ m less than or equal to 100 μ m.
14. large size OLED evaporation mask plate component according to claim 1 is characterized in that, consists of between the unit, adjacent described support portion, described support portion to fit tightly or to exist certain support portion unit interval.
15. large size OLED evaporation mask plate component according to claim 1 is characterized in that, described support portion unit interval is m times of described mask open spacing, and m is not less than zero integer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220454410 CN202913044U (en) | 2012-09-07 | 2012-09-07 | Mask plate assembly for evaporation of large-size OLED |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220454410 CN202913044U (en) | 2012-09-07 | 2012-09-07 | Mask plate assembly for evaporation of large-size OLED |
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| Publication Number | Publication Date |
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| CN202913044U true CN202913044U (en) | 2013-05-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220454410 Expired - Fee Related CN202913044U (en) | 2012-09-07 | 2012-09-07 | Mask plate assembly for evaporation of large-size OLED |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014036894A1 (en) * | 2012-09-07 | 2014-03-13 | 昆山允升吉光电科技有限公司 | Mask plate assembly for evaporating large-size oled |
| CN103695842A (en) * | 2013-12-31 | 2014-04-02 | 信利半导体有限公司 | Mask plate and production method thereof |
| TWI500784B (en) * | 2012-09-07 | 2015-09-21 | Kun Shan Power Stencil Co Ltd | Mask plate component |
| CN105589306A (en) * | 2016-02-26 | 2016-05-18 | 合肥欣奕华智能机器有限公司 | Aligning system for mask plate |
| WO2017032248A1 (en) * | 2015-08-22 | 2017-03-02 | 昆山允升吉光电科技有限公司 | Small-opening mask plate for evaporation |
-
2012
- 2012-09-07 CN CN 201220454410 patent/CN202913044U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014036894A1 (en) * | 2012-09-07 | 2014-03-13 | 昆山允升吉光电科技有限公司 | Mask plate assembly for evaporating large-size oled |
| CN103668049A (en) * | 2012-09-07 | 2014-03-26 | 昆山允升吉光电科技有限公司 | Mask plate assembly for use in vapor deposition of large-sized OLED (Organic Light Emitting Diode) |
| TWI500785B (en) * | 2012-09-07 | 2015-09-21 | Kun Shan Power Stencil Co Ltd | Mask plate component for large-size oled evaporation |
| TWI500784B (en) * | 2012-09-07 | 2015-09-21 | Kun Shan Power Stencil Co Ltd | Mask plate component |
| CN103695842A (en) * | 2013-12-31 | 2014-04-02 | 信利半导体有限公司 | Mask plate and production method thereof |
| CN103695842B (en) * | 2013-12-31 | 2015-12-09 | 信利半导体有限公司 | A kind of mask plate and preparation method thereof |
| WO2017032248A1 (en) * | 2015-08-22 | 2017-03-02 | 昆山允升吉光电科技有限公司 | Small-opening mask plate for evaporation |
| CN105589306A (en) * | 2016-02-26 | 2016-05-18 | 合肥欣奕华智能机器有限公司 | Aligning system for mask plate |
| CN105589306B (en) * | 2016-02-26 | 2017-12-01 | 合肥欣奕华智能机器有限公司 | A kind of mask plate alignment system |
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