CN202913047U - Mask frame and corresponding evaporation mask component - Google Patents
Mask frame and corresponding evaporation mask component Download PDFInfo
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- CN202913047U CN202913047U CN 201220454508 CN201220454508U CN202913047U CN 202913047 U CN202913047 U CN 202913047U CN 201220454508 CN201220454508 CN 201220454508 CN 201220454508 U CN201220454508 U CN 201220454508U CN 202913047 U CN202913047 U CN 202913047U
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- fixed link
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- mask frame
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- housing
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Abstract
The utility model discloses a mask frame and a corresponding evaporation mask component, wherein the mask frame comprises two groups of opposite-side outer frames, fixing rods and fixing mechanisms, wherein the fixing rods are placed on the inner sides of the outer frames; the fixing mechanisms are used for connecting the outer frames and the fixing rods; the outer frames in contact with the fixing rods are provided with matching mechanisms, so that certain gaps are formed between the outer frames and the fixing rods; meanwhile, matching holes are formed in the outer frames corresponding to the fixing rods; the layout of the matching holes can be figured out according to stress situations; the mask frame can further comprise a supporting rod and an elastic part; and the drooping phenomena of a mask plate can be further reduced. Product quality and product accuracy are improved, the yield is increased and panels with larger sizes can be also prepared.
Description
Technical field
The utility model relates to the electronic printing field, relates in particular to a kind of mask frame and corresponding evaporation mask assembly thereof.
Background technology
Compare with existing LCD technology, utilize organic light emitting diode (OLED) but the made indicating meter of technology has not only that true color, reaction times are fast, high brightness (100 ~ 14,000cd/m2), high luminous efficiency (the above visual angle of 16 ~ 38lm/W), 170 degree, LCD ghost as none, can be made into large size and flexibility panel, can be in the scopes of-30 degree ~ 80 degree Celsius the advantage such as operation, and processing procedure simply, integral thickness also can be contracted to below the 1mm, cost more only has 30 ~ 40% of TFT-LCD.Therefore, utilize the made indicating meter of OLED technology firmly getting society's welcome.
At present, the made indicating meter of OLED technology has reached the volume production technology on small size, and comparatively ripe.But for by making simultaneously a plurality of OLED indicating meters realizing the raising of output, or produce large-sized OLED indicating meter, just need to increase the size of the large substrate of tradition, the corresponding size that just must increase the mask assembly that is used for the evaporation organic materials.
Shown in Figure 1 is the structural representation that tradition is used for the mask assembly of evaporation organic materials, it comprises housing 11 and is fixed on mask section 12 on the housing 11 by solder joint 120, mask section 12 is welded to after pulling force is tightened on the housing 11 by applying at two ends, discharges pulling force after the welding.During the mask assembly horizontal positioned, because bouncing back along original pulling force, mask section 12 cause housing about in the of 11 (among Fig. 1 up and down orientation) support section the phenomenon of indent shown in the figure to occur in the other direction, thereby so that sagging (particularly mask section 12 region intermediates) appear in mask section 12, the consequence that so causes is that pattern position precision, the size that evaporation obtains relatively all can have certain deviation, thereby affects quality and the yield of product.
Chinese patent application number is 2010101136655 to disclose a kind of mask assembly and be used for using the depositing device of the flat-panel monitor of this mask assembly, its primary structure is: be provided with the support stick of the open area that consists of across housing on the housing of mask assembly, thereby reduce the sag of chain of mask section.The Chinese patent patent No. provides a kind of mask for the manufacture of the large size display panel for 01138161.2, and it comprises: have the main frame in a plurality of holes, in the hole that mask is assemblied in main frame according to the size that will make and pattern.Realizing that with upper type OLED indicating meter volume production has certain effect, but having certain limitation at making large size display screen.
The utility model content
In view of this, need to overcome in the defects of the prior art at least one.The utility model provides a kind of mask frame and corresponding evaporation mask assembly thereof.
Described mask frame comprises housing, and described housing comprises two groups of opposite side, and described two groups of opposite side consist of a hollow sealing rectangular frame; Fixed link, described fixed link place described housing inboard and are connected with one group of opposite side of mask plate; And fixed mechanism, described fixed mechanism is used for connecting described housing and the described fixed link that places described housing inboard, play and support described fixed link, the described fixed link that inwardly shrinks is outwards stretched, play the effect that reduces or remedy the inside shrinkage of described fixed link frame that when described fixed link is tightened described mask plate, produces.
According to described to prior art in this patent background technology, as shown in Figure 1, when the limit of housing 11 was subject to inside pulling force, housing is (orientation about among Fig. 1) support section appearance indent phenomenon shown in Figure 1 about in the of 11, thereby has caused the sagging of mask section; Regulate described connection mechanism this moment and then can reduce or remedy indent situation in the housing support section, improve precision, the quality of product, and improve good article rate.
In addition, also have a following additional technical feature according to the disclosed mask frame of the utility model:
According to embodiment of the present utility model, described hollow sealing rectangular frame is formed in one or is connected and composed by interconnecting piece by described two groups of opposite side.
The disclosed a kind of mask frame of the utility model is more prone to solve the product of preparation large size panel, although integrated described sealing rectangular frame has certain advantage in this regard, but when size further increases, then has more obvious advantage by the described sealing rectangular frame that connects and composes by interconnecting piece.
According to embodiment of the present utility model, described fixed link is fixed on one group of opposite side inboard of described housing by described fixed mechanism.
Further, be provided with matching mechanism between described housing and described fixed link, and described matching mechanism makes described housing have the gap when fixed link connects with being connected.
Preferably, near four angles that are arranged on mask frame of described matching mechanism symmetry.
Further, according to embodiment of the present utility model, the matching mechanism of described correspondence is to lay respectively at described housing and described fixed link contact site has pinpoint bulge-structure and sunk structure.
Preferably, according to embodiment of the present utility model, described bulge-structure with positioning action is that radius is identical with sunk structure, cooperate the latter two can realize the right cylinder that overlaps or the trapezoidal bulge-structure that can cooperate and can cooperate with described trapezoidal bulge-structure the sunk structure of location or n more than or equal to 1 columnar projections structure and can with the sunk structure of described columnar projections respective outer side edges, the central lines of the sunk structure of described columnar protrusions structure and described columnar projections respective outer side edges and perpendicular to surface, described contact site or have the projection ball-like structure that cooperates positioning function and the spherical crown chamber that caves in.
According to embodiment of the present utility model, described fixed mechanism is screw and the screw counter sink structure and the Screw hole structure that is arranged on the fixed link that are arranged on the described housing.
Further, described screw is the fine groove screw.
Further, described Screw hole structure is tapped bind hole at described fixed link.
Syndeton can be common, easy screw structural, and it is more convenient when the maintenance assembling is changed, and fine groove screw structural preferably then can be regulated meticulousr and bear stronger anchorage force.Simultaneously, slurry also can further reduce the stressed impact of inside casing one-piece construction along the possibility that through hole overflows during described tapped bind hole can be avoided operating.
According to embodiment of the present utility model, described fixed mechanism is arranged by rule at described housing and described fixed link length direction.
Preferably, described fixed mechanism is middle intensive, evenly distributed or middle sparse, the two ends dense arrangement of two ends Sparse rules arrangement.
Usually in the operation under the state, suffered power can be rule and arranges on the fixed link, the middle part generally can occur stressed larger, and both sides are stressed lower, and therefore can rationally arrange according to stressing conditions in described pairing hole.
According to embodiment more of the present utility model, described fixed mechanism also comprises the elastomeric element for increasing anchorage force between described fixed link and the described housing.
Preferably, described elastomeric element is spring.
According to embodiment of the present utility model, described housing also comprises and raised platform is arranged, described raised platform and described fixed link opposite side lower surface close contact, and during the solder mask frame horizontal positioned, described raised platform plays the effect of supporting described fixed link.
Further, the inboard of described raised platform and described housing opposite side is provided with chamfering structure or transition curve structure.
So design can reduce assembly to the stopping of luminous organic material, is conducive to the evaporate process of luminous organic material.
According to embodiment of the present utility model, the upper surface position of described fixed link is not less than on the mask frame plane in parallel on other structure.
Further, be provided with crowning on one group of opposite side of described housing, the upper surface of described fixed link is in the same plane with it.
So, can guarantee that mask plate can be in the same plane, keep surfacing.
According to embodiment more of the present utility model, described mask frame also is included in the chock corresponding with described fixed link that arranges on one group of opposite side of described housing, and described chock can make described fixed link end positions fix.
The invention also discloses a kind of evaporation mask assembly of correspondence, it is characterized in that, comprise described mask frame and the mask parts of claim 1-19, described mask parts is fixedly connected on the described fixed link in the described mask frame.
Preferably, the joint portion laser welding syndeton of the described fixed link of described mask parts and formation mask frame.
According to embodiment of the present utility model, described mask parts is that the polylith mask plate is spliced, or integrated monolithic mask plate consists of.
Integrated monolithic mask plate will run into many difficulties in making itself on the one hand when continuing to increase size, on the other hand, its internal structure rigidity constantly reduces, and sagging is then more serious; Therefore the splicing of polylith mask plate then can solve problems better.
According to embodiment of the present utility model, the joint portion of described mask parts and the inside casing that consists of mask frame is the bonding or laser welding syndeton of glue.
The aspect that the utility model is additional and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present utility model.
Description of drawings
Above-mentioned and/or additional aspect of the present utility model and advantage are from obviously and easily understanding becoming the description of embodiment below in conjunction with accompanying drawing, wherein:
Shown in Figure 1 is the structural representation that tradition is used for the mask assembly of evaporation organic materials
Figure 2 shows that a kind of mask frame of the present utility model splits schematic diagram;
Fig. 3 is the schematic diagram after mask frame is cooperated;
Figure 4 shows that the enlarged diagram of 30 parts among Fig. 3;
Figure 5 shows that the schematic diagram plane after mask frame cooperates;
Fig. 6 be among Fig. 5 50 parts along the sectional view of A-A direction;
Fig. 7 is a kind of structure iron that the utility model evaporation is used the integral body of mask plate;
Fig. 8 is that evaporation shown in Figure 7 uses mask plate along the sectional view of B-B direction;
Fig. 9 is the enlarged diagram of 80 parts shown in Figure 8;
Figure 10 is a kind of improvement project of structure shown in Figure 9;
Figure 11 is the enlarged diagram of mask frame 51 parts shown in Figure 5;
Figure 12 is a kind of improvement structure of structure shown in Figure 11;
Wherein:
Among Fig. 1,11---housing, 120---solder joint;
Among Fig. 2,21---housing, 211,212---consist of two opposite side of housing, 22---fixed link, 23---fixed mechanism (screw), 231---the counterbore on the housing 21,232---the tapped bind hole on the fixed link 22;
Among Fig. 3,30---treat magnification region;
Among Fig. 4,221---the upper surface of fixed link 22,2120---the highest of housing 21,40---matching mechanism, 222---consist of the depression parts of matching mechanism 40, spacing between the inboard on 2110---consisting of the protruding part of matching mechanism 40, d---housing 21 limits 211 after cooperating and the outside of fixed link 22;
50 for needing the dissection magnification region among Fig. 5, and 51 for treating enlarged diagram;
Among Fig. 7,24---mask parts, 241---the splicing mask plate;
Among Fig. 8 80---treat magnification region;
Among Fig. 9,2111---raised platform, 2112,220---inclined design
Among Figure 10,100---a spring structure;
Among Figure 12,2120---the fixing chock at fixed link 22 two ends;
Embodiment
The below describes embodiment of the present utility model in detail, and the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment that is described with reference to the drawings, only be used for explaining the utility model, and can not be interpreted as restriction of the present utility model.
In description of the present utility model, it will be appreciated that, term " on ", orientation or the position relationship of the indications such as D score, " end ", " top ", 'fornt', 'back', " interior ", " outward ", " horizontal stroke ", " erecting " be based on orientation shown in the drawings or position relationship, only be for convenience of description the utility model and simplified characterization, rather than indication or the hint device of indication or element must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as restriction of the present utility model.
In description of the present utility model, need to prove, unless clear and definite regulation and restriction are arranged in addition, term " connection ", " connection ", " linking to each other ", " connection " should be done broad understanding, for example, can be to be fixedly connected with, connecting integratedly, also can be to removably connect; It can be the connection of two element internals; Can be directly to link to each other, also can indirectly link to each other by intermediary, for the ordinary skill in the art, can particular case understand the concrete meaning of above-mentioned term in the utility model.
Utility model of the present utility model design is as follows, large size mask plate sagging problem can occur producing large size panel because existing mask stretches tight in the network technology, when size is larger, all can make a big impact to precision, the quality of product, reduces simultaneously good article rate.The mask frame that the utility model provides and corresponding mask assembly thereof cause aduncate fixed link to apply opposite external force by mask frame is netted the generation internal-direction-force because stretching tight, and reduce curved degree in it, and then improve precision and the quality of product; Simultaneously, when size further strengthens, can increase support bar to mask frame and corresponding mask assembly thereof, strengthen and reduce the more sagging ability of large size mask plate, make and make more that large size panel becomes possibility.
Describe below with reference to accompanying drawings mask frame of the present utility model and corresponding evaporation mask assembly thereof, wherein shown in Figure 1 is the structural representation that tradition is used for the mask assembly of evaporation organic materials; Figure 2 shows that a kind of mask frame of the present utility model splits schematic diagram; Fig. 3 is the schematic diagram after mask frame is cooperated; Figure 5 shows that the schematic diagram plane after mask frame cooperates; Fig. 7 is a kind of structure iron that the utility model evaporation is used the integral body of mask plate; Figure 10 is a kind of improvement project of structure shown in Figure 9; Figure 12 is a kind of improvement structure of structure shown in Figure 11.
According to embodiment of the present utility model, shown in Fig. 2,4, described mask frame comprises housing 21, and described housing comprises two groups of opposite side 211,212, and described two groups of opposite side consist of a hollow sealing rectangular frame; Fixed link 22, described fixed link place described housing inboard and are connected with one group of opposite side of mask plate; And fixed mechanism 23, described fixed mechanism is used for connecting described housing and the described fixed link that places described housing inboard, play and support described fixed link, the described fixed link that inwardly shrinks is outwards stretched, play the effect that reduces or remedy the inside shrinkage of described fixed link frame that when described fixed link is tightened described mask plate, produces.
According to described to prior art in this patent background technology, as shown in Figure 1, when the limit of housing 11 was subject to inside pulling force, housing is (orientation about among Fig. 1) support section appearance indent phenomenon shown in Figure 1 about in the of 11, thereby has caused the sagging of mask section; Regulate described connection mechanism this moment and then can reduce or remedy indent situation in the housing support section, improve precision, the quality of product, and improve good article rate.
In addition, also have a following additional technical feature according to the disclosed mask frame of the utility model:
According to embodiment of the present utility model, described hollow sealing rectangular frame is formed in one or is connected and composed by interconnecting piece by described two groups of opposite side.
The disclosed a kind of mask frame of the utility model is more prone to solve the product of preparation large size panel, although integrated described sealing rectangular frame has certain advantage in this regard, but when size further increases, then has more obvious advantage by the described sealing rectangular frame that connects and composes by interconnecting piece.
According to embodiment of the present utility model, described fixed link 22 is fixed on one group of opposite side 211 inboard of described housing 21, as shown in Figure 2 by described fixed mechanism 23.
Further, 23 of described housing 21 and described fixed links are provided with matching mechanism 40, and described matching mechanism 40 makes described housing 21 have gap d when fixed link 22 connects with being connected, as shown in Figure 4, wherein matching mechanism 40 comprises the depression parts 222 that consist of matching mechanism 40 and the protruding part 2110 that consists of matching mechanism 40.
Preferably, near four angles that are arranged on mask frame of described matching mechanism 40 symmetries.
Further, according to embodiment of the present utility model, the matching mechanism 40 of described correspondence is to lay respectively at described housing and described fixed link contact site has pinpoint bulge-structure and sunk structure, such as the depression parts 222 of the formation matching mechanism 40 among Fig. 4 with consist of the protruding part 2110 of matching mechanism 40.
Preferably, according to embodiment of the present utility model, described bulge-structure with positioning action is that radius is identical with sunk structure, cooperate the latter two can realize the right cylinder that overlaps or the trapezoidal bulge-structure that can cooperate and can cooperate with described trapezoidal bulge-structure the sunk structure of location or n more than or equal to 1 columnar projections structure with can with the sunk structure of described columnar projections respective outer side edges, the central lines of the sunk structure of described columnar protrusions structure and described columnar projections respective outer side edges and projection ball-like structure and depression spherical crown chamber surperficial perpendicular to described contact site or that have the cooperation positioning function are such as Figure 11, shown in 12 40.
According to embodiment of the present utility model, described fixed mechanism 23 is screws and is arranged on the screw counter sink structure (such as 231 among Fig. 2) on the described housing and is arranged on Screw hole structure on the fixed link.
Further, described screw is the fine groove screw.
Further, described Screw hole structure is tapped bind hole at described fixed link, shown in 232 among Fig. 2.
Syndeton can be common, easy screw structural, and it is more convenient when the maintenance assembling is changed, and fine groove screw structural preferably then can be regulated meticulousr and bear stronger anchorage force.Simultaneously, slurry also can further reduce the stressed impact of inside casing one-piece construction along the possibility that through hole overflows during described tapped bind hole can be avoided operating.
According to embodiment of the present utility model, described fixed mechanism 23 is arranged by rule at described housing and described fixed link length direction.
Preferably, described fixed mechanism 23 is middle intensive, evenly distributed or middle sparse, the two ends dense arrangement of two ends Sparse rules arrangement.
Usually in the operation under the state, suffered power can be rule and arranges on the fixed link, the middle part generally can occur stressed larger, and both sides are stressed lower, and therefore can rationally arrange according to stressing conditions in described pairing hole.
According to embodiment more of the present utility model, described fixed mechanism 23 also comprises the elastomeric element for increasing anchorage force between described fixed link and the described housing.
Preferably, described elastomeric element is spring, shown in 100 among Figure 10.
According to embodiment of the present utility model, as shown in Figure 9, described housing 21 also comprises and raised platform 2111 is arranged, described raised platform 2111 and described fixed link 22 opposite side lower surface close contacts, during the solder mask frame horizontal positioned, described raised platform 2111 plays the effect of supporting described fixed link 22.
Further, described raised platform 2111 is provided with chamfering structure or transition curve structure with the inboard of described housing opposite side, shown in 220 among Fig. 9 and 2112.
So design can reduce assembly to the stopping of luminous organic material, is conducive to the evaporate process of luminous organic material.
According to embodiment of the present utility model, the upper surface position of described fixed link 22 is not less than on the mask frame plane in parallel on other structure.
Further, be provided with crowning on one group of opposite side of described housing, the upper surface of itself and described fixed link is in the same plane.
So, can guarantee that mask plate can be in the same plane, keep surfacing.
According to embodiment more of the present utility model, described mask frame also is included in the chock corresponding with described fixed link 2120 that arranges on one group of opposite side of described housing, and as shown in figure 12, described chock can make described fixed link end positions fix.
According to embodiment of the present utility model, described mask frame also comprises support bar, and described support bar is used for further reducing the sag of chain of mask plate.Described support bar can be many and parallel construction, or single structure; It also can be cross one another array mode.
When the product size of needs making further increases, the size of mask plate also increases accordingly, the sag of chain that brings thus also will further increase, the effect of simple reinforcement bar might be difficult to produce a desired effect, and this moment, support bar then can further reduce the sagging of described mask plate region intermediate.
The invention also discloses a kind of evaporation mask assembly of correspondence, comprise described mask frame and mask parts 24 that this patent provides, described mask parts 24 is fixedly connected on the described fixed link 23 in the described mask frame, shown in Fig. 7,8.
Preferably, the joint portion laser welding syndeton of the described fixed link 22 of described mask parts 24 and formation mask frame.
According to embodiment of the present utility model, described mask parts 24 is that polylith splicing mask plate 241 is spliced, or integrated monolithic mask plate consists of.
Integrated monolithic mask plate will run into many difficulties in making itself on the one hand when continuing to increase size, on the other hand, its internal structure rigidity constantly reduces, and sagging is then more serious; Therefore the splicing of polylith mask plate then can solve problems better.
Any mentioning " embodiment ", " embodiment ", " illustrative examples " etc. mean to be contained among at least one embodiment of the present utility model in conjunction with concrete member, structure or characteristics that this embodiment describes.Not necessarily refer to identical embodiment in this schematic statement everywhere of this specification sheets.And when describing concrete member, structure or characteristics in conjunction with any embodiment, what advocate is, realizes that in conjunction with other embodiment such member, structure or characteristics all drop within those skilled in the art's the scope.
Although with reference to a plurality of illustrative examples of the present utility model embodiment of the present utility model is described in detail, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, and these improve and embodiment will drop within the spirit and scope of the utility model principle.Particularly, within the scope of aforementioned open, accompanying drawing and claim, can make rational modification and improvement aspect the layout of component and/or subordinate composite configuration, and can not break away from spirit of the present utility model.Except modification and the improvement of component and/or layout aspect, its scope is limited by claims and equivalent thereof.
Claims (22)
1. a mask frame is characterized in that, comprising:
Housing, described housing comprise two groups of opposite side, and described two groups of opposite side consist of a hollow sealing rectangular frame;
Fixed link, described fixed link place described housing inboard and are connected with one group of opposite side of mask plate;
And fixed mechanism, described fixed mechanism is used for connecting described housing and the described fixed link that places described housing inboard, play and support described fixed link, the described fixed link that inwardly shrinks is outwards stretched, play the effect that reduces or remedy the inside shrinkage of described fixed link frame that when described fixed link is tightened described mask plate, produces.
2. mask frame according to claim 1 is characterized in that, described hollow sealing rectangular frame is formed in one or is connected and composed by interconnecting piece by described two groups of opposite side.
3. mask frame according to claim 1 is characterized in that, described fixed link is fixed on one group of opposite side inboard of described housing by described fixed mechanism.
4. mask frame according to claim 1 is characterized in that, is provided with matching mechanism between described housing and described fixed link, and described matching mechanism makes described housing have the gap when fixed link connects with being connected.
5. mask frame according to claim 4 is characterized in that, near four angles that are arranged on mask frame of described matching mechanism symmetry.
6. mask frame according to claim 4 is characterized in that, the matching mechanism of described correspondence is to lay respectively at described housing and described fixed link contact site has pinpoint bulge-structure and sunk structure.
7. mask frame according to claim 6, it is characterized in that, described bulge-structure with positioning action is that radius is identical with sunk structure, cooperate the latter two can realize the right cylinder that overlaps or the trapezoidal bulge-structure that can cooperate and can cooperate with described trapezoidal bulge-structure the sunk structure of location or n more than or equal to 1 columnar projections structure and can with the sunk structure of described columnar projections respective outer side edges, the central lines of the sunk structure of described columnar protrusions structure and described columnar projections respective outer side edges and perpendicular to surface, described contact site or have the projection ball-like structure that cooperates positioning function and the spherical crown chamber that caves in.
8. mask frame according to claim 1 is characterized in that, described fixed mechanism is screw and the screw counter sink structure and the Screw hole structure that is arranged on the fixed link that are arranged on the described housing.
9. mask frame according to claim 8 is characterized in that, described screw is the fine groove screw.
10. mask frame according to claim 8 is characterized in that, described Screw hole structure is tapped bind hole at described fixed link.
11. mask frame according to claim 8 is characterized in that, described fixed mechanism is arranged by rule at described housing and described fixed link length direction.
12. mask frame according to claim 11 is characterized in that, described fixed mechanism is middle intensive, evenly distributed or middle sparse, the two ends dense arrangement of two ends Sparse rules arrangement.
13. mask frame according to claim 8 is characterized in that, described fixed mechanism also comprises the elastomeric element for increasing anchorage force between described fixed link and the described housing.
14. mask frame according to claim 13 is characterized in that, described elastomeric element is spring.
15. mask frame according to claim 1, it is characterized in that, described housing also comprises and raised platform is arranged, described raised platform and described fixed link opposite side lower surface close contact, during the solder mask frame horizontal positioned, described raised platform plays the effect of supporting described fixed link.
16. mask frame according to claim 15 is characterized in that, the inboard of described raised platform and described housing opposite side is provided with chamfering structure or transition curve structure.
17. mask frame according to claim 1 is characterized in that, the upper surface position of described fixed link is not less than on the mask frame plane in parallel on other structure.
18. mask frame according to claim 18 is characterized in that, is provided with crowning on one group of opposite side of described housing, the upper surface of described fixed link is in the same plane with it.
19. each described mask frame is characterized in that according to claim 1-18, described mask frame also is included in the chock corresponding with described fixed link that arranges on one group of opposite side of described housing, and described chock can make described fixed link end positions fix.
20. the evaporation mask assembly of a correspondence is characterized in that, comprises described mask frame and the mask parts of claim 1-19, described mask parts is fixedly connected on the described fixed link in the described mask frame.
21. the evaporation mask assembly of correspondence according to claim 20 is characterized in that, described mask parts is that the polylith mask plate is spliced, or integrated monolithic mask plate consists of.
22. the evaporation mask assembly of correspondence according to claim 20 is characterized in that, the joint portion of described mask parts and the inside casing that consists of mask frame is the bonding or laser welding syndeton of glue.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220454508 CN202913047U (en) | 2012-09-07 | 2012-09-07 | Mask frame and corresponding evaporation mask component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220454508 CN202913047U (en) | 2012-09-07 | 2012-09-07 | Mask frame and corresponding evaporation mask component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202913047U true CN202913047U (en) | 2013-05-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220454508 Expired - Fee Related CN202913047U (en) | 2012-09-07 | 2012-09-07 | Mask frame and corresponding evaporation mask component |
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|---|---|
| CN (1) | CN202913047U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103668051A (en) * | 2012-09-07 | 2014-03-26 | 昆山允升吉光电科技有限公司 | Mask frame and corresponding mask component thereof for vapor deposition |
| CN105200370A (en) * | 2015-10-27 | 2015-12-30 | 唐军 | Recyclable mask plate frame and mask plate possessing same |
| CN107604326A (en) * | 2017-09-12 | 2018-01-19 | 深圳市华星光电半导体显示技术有限公司 | Sputter coating machine and sputtering film coating method |
| CN110117768A (en) * | 2019-05-17 | 2019-08-13 | 京东方科技集团股份有限公司 | Mask device |
| WO2021087732A1 (en) * | 2019-11-05 | 2021-05-14 | 京东方科技集团股份有限公司 | Mask device, mask plate and frame |
-
2012
- 2012-09-07 CN CN 201220454508 patent/CN202913047U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103668051A (en) * | 2012-09-07 | 2014-03-26 | 昆山允升吉光电科技有限公司 | Mask frame and corresponding mask component thereof for vapor deposition |
| CN105200370A (en) * | 2015-10-27 | 2015-12-30 | 唐军 | Recyclable mask plate frame and mask plate possessing same |
| CN107604326A (en) * | 2017-09-12 | 2018-01-19 | 深圳市华星光电半导体显示技术有限公司 | Sputter coating machine and sputtering film coating method |
| WO2019052024A1 (en) * | 2017-09-12 | 2019-03-21 | 深圳市华星光电半导体显示技术有限公司 | Sputter coating machine and sputter coating method |
| CN110117768A (en) * | 2019-05-17 | 2019-08-13 | 京东方科技集团股份有限公司 | Mask device |
| WO2021087732A1 (en) * | 2019-11-05 | 2021-05-14 | 京东方科技集团股份有限公司 | Mask device, mask plate and frame |
| US11560616B2 (en) | 2019-11-05 | 2023-01-24 | Boe Technology Group Co., Ltd. | Mask device, mask plate, and frame |
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