WO2019052024A1 - Sputter coating machine and sputter coating method - Google Patents

Sputter coating machine and sputter coating method Download PDF

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Publication number
WO2019052024A1
WO2019052024A1 PCT/CN2017/114482 CN2017114482W WO2019052024A1 WO 2019052024 A1 WO2019052024 A1 WO 2019052024A1 CN 2017114482 W CN2017114482 W CN 2017114482W WO 2019052024 A1 WO2019052024 A1 WO 2019052024A1
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WIPO (PCT)
Prior art keywords
frame
shaped
mask
shaped boss
slider
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PCT/CN2017/114482
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French (fr)
Chinese (zh)
Inventor
谭伟
姜亮
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深圳市华星光电半导体显示技术有限公司
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Publication of WO2019052024A1 publication Critical patent/WO2019052024A1/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Definitions

  • the present invention relates to the field of display technology, and in particular, to a sputter coating machine and a sputter coating method.
  • LCDs liquid crystal displays
  • Various consumer electronic products such as digital assistants, digital cameras, notebook computers, and desktop computers have become mainstream in display devices.
  • OLED Organic Light-Emitting Diode
  • OLED Organic Light-Emitting Diode
  • the working temperature has wide adaptability, light volume, fast response, easy to realize color display and large screen display, easy to realize integration with integrated circuit driver, easy to realize flexible display, and the like, and thus has broad application prospects.
  • Both the liquid crystal display and the organic electroluminescent display are involved in the coating process, which makes the sputtering coating machine widely used in the coating process of liquid crystal display and organic electroluminescent display, and many film forming processes (such as OLED cathode and TP (Touch) Panel, touch screen) film formation process of the shadow mask) does not require the entire substrate to be filmed, but the deposition of a specific shape of the film layer, and the pattern can not be completed with yellow light and other processes, which requires the use of sputter coating A metal mask (MASK) is used to deposit the desired film pattern.
  • a metal mask (MASK) is used to deposit the desired film pattern.
  • the current mask for a magnetron sputtering machine includes a mask sheet (MASK sheet) and a frame, which are formed by first using a mask sheet stretching machine to stretch the flat sheet and then pass it through.
  • the method of soldering is to fix the mask to the outer frame, and make a complete mask. Then, the mask is mounted on the carrier of the sputter coating device, fixed by screws, and periodically removed for a period of time. The mask is cleaned or replaced with a new one.
  • the coating of the sputter coating is generally metal oxide, which is difficult to clean.
  • the mask after repeated cleaning needs to be removed and replaced.
  • the new mask because the current mask manufacturing process usually uses the soldering method to fix the mask to the outer frame, so each time the mask is replaced, the outer frame needs to be reworked, that is, the outer frame
  • the welding position on the upper part is polished to ensure the flatness of the outer frame and the reliability of re-welding with the mask.
  • the grinding will cause the thickness of the outer frame to be thinned. Therefore, the outer frame must be scrapped after re-processing for many times, due to the outer frame.
  • the cost of reprocessing and scrapping is higher, thus This leads to an increase in the cost of sputter coating.
  • the object of the present invention is to provide a sputter coating machine which binds a mask to a carrying device by binding, and needs to disassemble and disassemble the mask at any time during maintenance or replacement of the mask, and the operation is simple. It is not necessary to rework the carrier device as the outer frame, and the replacement efficiency of the mask can be improved, and the production cost of the sputtering coating can be reduced.
  • Another object of the present invention is to provide a sputtering coating method which is coated by the above-described sputter coating machine, which has good coating quality and low coating cost.
  • the present invention provides a sputter coating machine comprising:
  • a carrying device disposed on the track and movable along the track, the carrying device comprising a frame-shaped substrate, a frame-shaped boss connected from the inner side of the frame-shaped substrate to the frame-shaped substrate, and located at the a frame-shaped opening on the inner side of the frame-shaped boss; the frame-shaped substrate is provided with a plurality of grooves distributed around the frame-shaped boss;
  • the fastening tensioning device including a slider movable along the groove, a threaded hole passing through the slider and a threaded screw, a pressing piece that cooperates with an upper surface of the slider, and a plurality of screws; one end of the screw abuts against an outer surface of the frame-shaped boss; an upper surface of the slider Forming a shape that matches the shape of the lower surface of the tablet; the plurality of screws are used to secure the tablet to the slider;
  • the groove is perpendicular to an outer surface of the frame-shaped boss, and the groove starts from an outer surface of the frame-shaped boss and extends away from the frame-shaped boss;
  • the outer surface of the frame-shaped boss is provided with a restriction mechanism, one end of the screw is fixed in the restriction mechanism, and the restriction mechanism limits the movement mode of the screw so that the screw can rotate but cannot move along the groove .
  • the carrying device further includes a bump connected to a bottom surface of the frame substrate, and the shape of the bump matches a shape of the track;
  • the top surface of the frame-shaped boss is higher than the upper surface of the slider.
  • An upper surface of the frame-shaped boss has a frame-shaped protrusion adjacent to a side of the frame-shaped opening, The bead has a shape that cooperates with the frame-shaped protrusion;
  • the upper surface of the slider is provided with a first groove and a first protrusion
  • the lower surface of the pressing piece is provided with a second protrusion corresponding to the first groove and the first protrusion, respectively The second groove.
  • a handle is disposed at an end of the screw away from the frame-shaped boss.
  • the invention also provides a sputter coating method, comprising:
  • the mask has a shape matching the upper surface of the slider and the lower surface of the tablet; and the mask is provided with a plurality of openings a pattern, the plurality of opening patterns being disposed corresponding to the frame-shaped opening of the fastening and tensioning device;
  • the mask is bound to the carrying device of the sputter coater, and the specific steps include:
  • a plurality of strips are respectively placed on the mask sheet corresponding to the four sides of the frame-shaped boss and pressed, so that the mask sheet is fixed between the bead and the frame-shaped boss to complete the mask sheet. Binding on the carrier device;
  • Providing a substrate to be coated placing the substrate to be coated on an area corresponding to a plurality of inner sides of the bead on the mask, moving the carrying device along the track and passing over the target, the carrying device During the process of passing over the target, the material sputtered from the target enters the plurality of opening patterns of the mask from the frame opening, and finally deposits onto the substrate to be coated to form a patterned film. .
  • the material of the mask is Invar.
  • the upper surface of the slider is provided with a first groove and a first protrusion
  • the lower surface of the pressing piece is provided with a second protrusion corresponding to the first groove and the first protrusion, respectively a second groove
  • the mask has a third recess corresponding to the first groove and the second protrusion
  • the third recessed portion and the third raised portion on the mask sheet are formed by stamping.
  • the invention also provides a sputter coating machine comprising:
  • a carrying device disposed on the track and movable along the track, the carrying device comprising a frame-shaped substrate, a frame-shaped boss connected from the inner side of the frame-shaped substrate to the frame-shaped substrate, and located at the a frame-shaped opening on the inner side of the frame-shaped boss; the frame-shaped substrate is provided with a plurality of grooves distributed around the frame-shaped boss;
  • the fastening tensioning device including a slider movable along the groove, a threaded hole passing through the slider and a threaded screw, a pressing piece that cooperates with an upper surface of the slider, and a plurality of screws; one end of the screw abuts against an outer surface of the frame-shaped boss; an upper surface of the slider Forming a shape that matches the shape of the lower surface of the tablet; the plurality of screws are used to secure the tablet to the slider;
  • the groove is perpendicular to an outer surface of the frame-shaped boss, the groove starting from an outer surface of the frame-shaped boss and extending away from the frame-shaped boss;
  • the outer surface of the frame-shaped boss is provided with a restriction mechanism, one end of the screw is fixed in the restriction mechanism, and the restriction mechanism limits the movement mode of the screw so that the screw can rotate but cannot move along the groove ;
  • the carrying device further includes a bump connected to a bottom surface of the frame substrate, and the shape of the bump matches a shape of the track;
  • the top surface of the frame-shaped boss is higher than the upper surface of the slider
  • the upper surface of the frame-shaped boss has a frame-shaped protrusion adjacent to a side of the frame-shaped opening, and the bead has a shape matching the frame-shaped protrusion;
  • the upper surface of the slider is provided with a first groove and a first protrusion
  • the lower surface of the pressing piece is provided with a second protrusion corresponding to the first groove and the first protrusion, respectively Second groove;
  • the screw is provided with a handle away from an end of the frame-shaped boss.
  • the invention has the beneficial effects that the sputter coating machine of the invention binds the mask sheet to the carrying device by binding, and provides a fastening tensioning device around the mask sheet, which can reach the surrounding area.
  • the purpose of fixing the mask can also achieve the purpose of tensioning and flattening, and the tensioning and flattening effect of the mask can achieve the tensioning and flattening effect of the existing masking machine and does not need to be used.
  • the masking plate stretching machine, the fastening tensioning device and the masking film are all provided with a concave-convex structure, and the side sliding phenomenon does not occur when the shielding film is fixed, because the connection manner between the shielding film and the carrying device For detachable connection, it is necessary to disassemble the mask at any time during maintenance or replacement of the mask.
  • the operation is simple, and it is not necessary to rework the carrying device as the outer frame, which can improve the replacement efficiency of the mask and reduce the efficiency of the mask.
  • the production cost of sputter coating The sputter coating method of the present invention is coated by the above-described sputter coater, and the quality of the coating is good, and the cost of the coating is low.
  • FIG. 1 is a top plan view of a sputter coater of the present invention before being bonded to a mask;
  • Figure 2 is a schematic cross-sectional view of the sputter coater of Figure 1;
  • FIG. 3 is a schematic structural view of the sputter coating machine of the present invention after binding a mask
  • FIG. 4 is a cross-sectional view showing the fastening device of the sputter coating machine of the present invention after binding a mask;
  • Figure 5 is a top plan view of a mask sheet bonded to the sputter coater of the present invention.
  • Figure 6 is a side elevational view of a mask sheet bonded to a sputter coater of the present invention.
  • Figure 7 is a flow chart of a sputter coating method of the present invention.
  • the present invention provides a sputter coating machine, comprising:
  • the fastening tensioning device 40 including a slider 41 movable along the groove 215, passing through the slider a threaded hole in the 41 is screwed to the threaded rod 42, a pressing piece 43 matching the upper surface of the slider 41, and a plurality of screws 44; one end of the screw 42 abuts against the frame-shaped boss 22 On the outer surface; the shape of the upper surface of the slider 41 matches the shape of the lower surface of the pressing piece 43; the plurality of screws 44 are used to fix the pressing piece 43 to the slider 41 Together
  • the sputter coater of the present invention is an improvement based on a conventional sputter coater which is used as a carrier mechanism of a substrate to be coated in a conventional sputter coater, in sputtering
  • the carrier device 20 moves along the track 10 during the coating process and completes the coating process during the movement.
  • the frame-shaped substrate 21 is integrally formed with the frame-shaped boss 22 .
  • the screw 44 is a screw.
  • the groove 215 is perpendicular to the outer surface of the frame-shaped boss 22, and the groove 215 starts from the outer surface of the frame-shaped boss 22 and faces away from the frame-shaped boss 22. The direction extends.
  • an outer surface of the frame-shaped boss 22 is provided with a restriction mechanism (not shown), and one end of the screw 42 is fixed in the restriction mechanism, and the restriction mechanism limits the movement mode of the screw 42 so that The screw 42 can rotate but cannot move along the groove 215.
  • the carrying device 20 further includes a bump 25 connected to the bottom surface of the frame substrate 21, and the shape of the bump 25 matches the shape of the rail 10.
  • the top surface of the frame-shaped boss 22 is higher than the upper surface of the slider 41, so that the plurality of sliders 41 of the plurality of fastening and tensioning devices 40 can be respectively removed from the mask at a lower position.
  • the four sides of the sheet 60 are tensioned so that the portion of the mask sheet 60 on the frame-shaped boss 22 and the frame-shaped opening 23 is stretched and flattened.
  • the upper surface of the frame-shaped boss 22 has a frame-shaped protrusion 221 near the side of the frame-shaped opening 23, and the bead 50 has a shape that matches the frame-shaped protrusion 221.
  • the upper surface of the slider 41 is provided with a first groove 411 and a first protrusion 412
  • the lower surface of the pressing piece 43 is respectively provided with the first groove a second protrusion 431 and a second groove 432 corresponding to the first protrusion 412; the mask sheet 60 is pressed against the slide during the tensioning and flattening of the mask sheet 60
  • the block 41 and the pressing piece 43 that is, fixed to the slider 41, when the sliders 41 in the plurality of fastening and tensioning devices 40 are all facing away from the
  • the periphery of the masking piece 60 is pulled outward, so that the center of the masking piece 60 is located on the frame-shaped boss 22 and the frame-shaped opening 23. Tightened and flattened.
  • the vertical projected area of the slider 41 on the frame substrate 21 is the same as the vertical projected area of the pressing piece 43 on the frame substrate 21.
  • a handle 425 is disposed at one end of the screw 42 away from the frame-shaped boss 22 to facilitate an operator to rotate the screw 42 by screwing the handle 425.
  • the sputter coating machine of the present invention binds the mask sheet 60 to the carrying device 20 in a binding manner, and provides a fastening tensioning device 40 around the mask sheet 60, so as to achieve the mask from the periphery.
  • the purpose of fixing 60 the purpose of tightening and flattening can also be achieved, and the tensioning and flattening effect of the mask sheet 60 can achieve the tensioning and flattening effect of the existing masking machine and does not require the use of a mask.
  • the plate tensioning machine, the fastening tensioning device 40 and the masking piece 60 are all provided with a concave-convex structure, and the side sliding phenomenon does not occur when the masking piece 60 is fixed, due to the gap between the masking piece 60 and the carrying device 20
  • the connection method is a detachable connection. Therefore, the mask 60 can be detached and detached at any time during maintenance or replacement of the mask 60, and the operation is simple, and the carrier 20 as the outer frame is not required to be reworked, and the mask can be improved.
  • the replacement efficiency of the sheet 60 reduces the production cost of the sputter coating.
  • the present invention further provides a sputter coating method based on the above sputter coating machine, comprising:
  • Step S1 providing the sputter coater and the mask sheet 60;
  • the mask sheet 60 has a shape matching the upper surface of the slider 41 and the lower surface of the pressing sheet 43; and the mask The sheet 60 is provided with a plurality of opening patterns 65, which are disposed corresponding to the frame-shaped openings 23 of the fastening and tensioning device 40;
  • the masking sheet 60 is bound to the carrying device 20 of the sputter coating machine, and the specific steps include:
  • a plurality of pressing pieces 43 are placed on the mask sheet 60 corresponding to the plurality of sliders 41, the shape of the lower surface of the pressing sheet 43, the shape of the mask sheet 60, and the upper surface of the slider 41. Shape matching;
  • a plurality of screws 44 are used to fix a plurality of pressing pieces 43 to a plurality of sliders 41;
  • the plurality of screws 42 are respectively rotated, and one end of the plurality of screws 42 is held against the outer surface of the frame-shaped boss 22 during the rotation, that is, the positions of the plurality of screws 42 are kept stationary.
  • the plurality of sliders 41 are respectively moved along a plurality of grooves 215 away from the frame-shaped boss 22, so that the mask sheet 60 is pulled toward the periphery, and the mask sheet 60 is located in the frame.
  • the portion of the shaped boss 22 and the frame-shaped opening 23 is tensioned and flattened;
  • a plurality of strips 50 are respectively placed on the mask sheet 60 corresponding to the four sides of the frame-shaped boss 22 and pressed to fix the mask sheet 60 to the bead 50 and the frame-shaped boss 22 The binding of the mask 60 on the carrier 20 is completed.
  • Step S2 providing a substrate to be coated (not shown), placing the substrate to be coated on an area of the mask sheet 60 corresponding to the inner side of the plurality of strips 50, and moving the carrying device 20 along the rail 10 And passing over the target 30, the material sputtered from the target 30 enters the mask sheet 60 from the frame-shaped opening 23 during the passage of the carrier device 20 from above the target 30.
  • the opening pattern 65 a film having a pattern is finally deposited on the substrate to be coated.
  • the material of the mask sheet 60 is invar, which has high mechanical strength, so that the mask sheet 60 is sufficient to support the substrate to be coated.
  • the substrate to be coated is usually a glass substrate.
  • the mask sheet 60 has a thickness of 2 ⁇ m.
  • the upper surface of the slider 41 is provided with a first groove 411 and a first protrusion 412
  • the lower surface of the pressing piece 43 is respectively provided with the first groove a second protrusion 431 and a second groove 432 corresponding to the first protrusion 412
  • the mask sheet 60 has a third recess corresponding to the first groove 411 and the second protrusion 431 And a third protrusion 62 corresponding to the first protrusion 412 and the second groove 432;
  • the third recessed portion 61 and the third raised portion 62 on the mask sheet 60 are formed by punching.
  • the screws 42 in the fastening tensioning device 40 on opposite sides of the mask sheet 60 are simultaneously rotated, so that the sliders 41 on both sides of the mask sheet 60 are simultaneously turned toward Moving away from the direction of the frame-shaped boss 22, both sides of the masking piece 60 are simultaneously tightened, so as to prevent the masking piece 60 from being pulled off by being pulled only from one side.
  • the mask sheet 60 is stretched and flattened by the fastening device 40, the mask sheet 60 is further fixed by the bead 50, so that the position of the mask sheet 60 is fixed and the mask sheet 60 is fixed.
  • the area having the opening pattern 65 is maintained in a stretched flat state for a long time.
  • the present invention employs a pair of fastening and tensioning devices 40.
  • the mask 60 is stretched and flattened, the mask 60 is further fixed by the bead 50, so that the area of the mask 60 on the inner side of the bead 50 is extremely flat, and the mask 60 is placed on the mask 60.
  • the substrate to be coated is closely attached to the mask sheet 60. Any gap is left to avoid the situation that the plating pattern is larger than the opening pattern 65 on the mask sheet 60, and the coating quality is improved.
  • the sputter coating method of the present invention binds the mask sheet 60 to the carrier device 20 by using the above-described sputter coater, and provides a fastening tensioning device 40 around the mask sheet 60, thereby achieving the mask from the periphery.
  • the purpose of fixing the sheet 60 is also to achieve the purpose of tensioning and flattening, and the tensioning and flattening effect of the masking sheet 60 can achieve the tensioning and flattening effect of the existing masking sheet stretching machine without using masking.
  • the film stretcher 40, the fastening tensioning device 40 and the mask 60 are provided with a concave-convex structure, and the side of the mask 60 is not fixed when the mask 60 is fixed, because the mask 60 and the carrying device 20
  • the connection mode is detachable. Therefore, the mask 60 can be attached and detached at any time during maintenance or replacement of the mask 60, and the operation is simple, and the carrier 20 as the outer frame is not required to be reworked, and the mask can be improved.
  • the replacement efficiency of the diaphragm 60 reduces the production cost of the sputter coating.
  • the present invention provides a sputter coating machine and a sputter coating method.
  • the sputter coating machine of the invention binds the mask to the carrying device by binding, and provides a fastening device around the mask to achieve the purpose of fixing the mask from all sides. It can also achieve the purpose of tightening and flattening.
  • the tensioning and flattening effect of the mask can achieve the tensioning and flattening effect of the existing masking machine and does not require the use of a masking machine.
  • Both the solid tensioning device and the mask are provided with a concave-convex structure, and the side of the mask is not fixed when the mask is fixed.
  • the sputter coating method of the present invention is coated by the above-described sputter coater, and the quality of the coating is good, and the cost of the coating is low.

Abstract

A sputter coating machine, comprising: a rail (10); a carrier (20) provided on the rail (10) and capable of moving along the rail (10), the carrier (20) comprising a frame-shaped substrate (21), a frame-shaped boss (22) connected to the frame-shaped substrate (21) from the inner side of the frame-shaped substrate (21), and a frame-shaped opening (23) located at the inner side of the frame-shaped boss (22), and the frame-shaped substrate (21) being provided with a plurality of recesses (215) distributed around the frame-shaped boss (22); a target material (30) corresponding to the frame-shaped opening (23); a plurality of fastening and tightening devices (40) of which the number corresponds to that of the plurality of recesses (215), the fastening and tightening devices (40) each comprising a sliding block (41) capable of moving along a recess (215), a threaded rod (42) passing through a threaded hole in the sliding block (41) to connected to threads thereof, a pressing sheet (43) fitted to the upper surface of the sliding block (41), and a plurality of screws (44), one end of the threaded rod (42) abutting against on the outer surface of the frame-shaped boss (22), the shape of the upper surface of the sliding block (41) being fitted to the shape of the lower surface of the pressing sheet (43), and the plurality of screws (44) being used for fixing the pressing sheet (43) and the sliding bock (41) together; a plurality of pressing strips (50) which has a shape fitted to the upper surface of the frame-shaped boss (22) and is used for fitting to the frame-shaped boss (22) after a mask sheet (60) is tightened and flattened so that the mask sheet (60) is fixed between the pressing strips (50) and the frame-shaped boss (22). Also disclosed is a sputter coating method.

Description

溅射镀膜机与溅射镀膜方法Sputter coating machine and sputtering coating method 技术领域Technical field
本发明涉及显示技术领域，尤其涉及一种溅射镀膜机与溅射镀膜方法。The present invention relates to the field of display technology, and in particular, to a sputter coating machine and a sputter coating method.
背景技术Background technique
随着显示技术的发展，液晶显示器(Liquid Crystal Display，LCD)等平面显示装置因具有高画质、省电、机身薄及应用范围广等优点，而被广泛地应用于手机、电视、个人数字助理、数字相机、笔记本电脑、台式计算机等各种消费性电子产品，成为显示装置中的主流。With the development of display technology, flat display devices such as liquid crystal displays (LCDs) are widely used in mobile phones, televisions, and individuals due to their high image quality, power saving, thin body and wide application range. Various consumer electronic products such as digital assistants, digital cameras, notebook computers, and desktop computers have become mainstream in display devices.
有机发光二极管(Organic Light-Emitting Diode，OLED)显示器，也称为有机电致发光显示器，是一种新兴的平板显示装置，由于其具有制备工艺简单、成本低、功耗低、发光亮度高、工作温度适应范围广、体积轻薄、响应速度快，而且易于实现彩色显示和大屏幕显示、易于实现和集成电路驱动器相匹配、易于实现柔性显示等优点，因而具有广阔的应用前景。An Organic Light-Emitting Diode (OLED) display, also known as an organic electroluminescent display, is an emerging flat panel display device because of its simple preparation process, low cost, low power consumption, and high luminance. The working temperature has wide adaptability, light volume, fast response, easy to realize color display and large screen display, easy to realize integration with integrated circuit driver, easy to realize flexible display, and the like, and thus has broad application prospects.
液晶显示器与有机电致发光显示器的制作过程均涉及镀膜制程，这使得溅射镀膜机广泛应用于液晶显示器与有机电致发光显示器的镀膜制程中，许多成膜制程(如OLED阴极与TP(Touch Panel，触摸屏)消影层的成膜制程)不需要整个基板都成膜，而是需要沉积特定形状的膜层，且图案不能用黄光及其它制程来完成，这就需要溅射镀膜时使用金属掩膜板(MASK)来沉积所需的膜层图案。Both the liquid crystal display and the organic electroluminescent display are involved in the coating process, which makes the sputtering coating machine widely used in the coating process of liquid crystal display and organic electroluminescent display, and many film forming processes (such as OLED cathode and TP (Touch) Panel, touch screen) film formation process of the shadow mask) does not require the entire substrate to be filmed, but the deposition of a specific shape of the film layer, and the pattern can not be completed with yellow light and other processes, which requires the use of sputter coating A metal mask (MASK) is used to deposit the desired film pattern.
目前的磁控溅射机用掩膜板包括掩膜片(MASK sheet)和外框(Frame)，其制作方式是先使用掩膜板张网机使所述掩膜片拉紧展平再通过焊接的方式将掩膜片固定到外框上，制作成完整的掩膜板，然后将掩膜板安装到溅射镀膜设备的承载装置(Carrier)上，用螺丝固定，使用一段时间定期拆下掩膜板进行保养清洗或更换新的掩膜板。The current mask for a magnetron sputtering machine includes a mask sheet (MASK sheet) and a frame, which are formed by first using a mask sheet stretching machine to stretch the flat sheet and then pass it through. The method of soldering is to fix the mask to the outer frame, and make a complete mask. Then, the mask is mounted on the carrier of the sputter coating device, fixed by screws, and periodically removed for a period of time. The mask is cleaned or replaced with a new one.
掩膜板使用过程中需定期对其进行清洗以保证产品质量，而溅射镀膜的镀层一般为金属氧化物，清洗难度大，多次清洗使用后的掩膜板需将掩膜片撕掉更换新的掩膜片，由于现行的掩膜板制作工艺通常采用焊接的方式将掩膜片固定在外框上，因此每次更换掩膜片时都需要对外框进行再加工(rework)，即对外框上的焊接位置进行打磨加工，以保证外框的平坦度及与掩膜片再次焊接的可靠性，而打磨会导致外框厚度减薄，因此再加工多次后外框必须报废，由于外框的再加工及报废换新的成本均较高，从而 导致溅射镀膜的成本增加。When the mask is used, it needs to be cleaned regularly to ensure the quality of the product. The coating of the sputter coating is generally metal oxide, which is difficult to clean. The mask after repeated cleaning needs to be removed and replaced. The new mask, because the current mask manufacturing process usually uses the soldering method to fix the mask to the outer frame, so each time the mask is replaced, the outer frame needs to be reworked, that is, the outer frame The welding position on the upper part is polished to ensure the flatness of the outer frame and the reliability of re-welding with the mask. The grinding will cause the thickness of the outer frame to be thinned. Therefore, the outer frame must be scrapped after re-processing for many times, due to the outer frame. The cost of reprocessing and scrapping is higher, thus This leads to an increase in the cost of sputter coating.
发明内容Summary of the invention
本发明的目的在于提供一种溅射镀膜机，采用绑定的方式将掩膜片绑定在承载装置上，需要对掩膜片进行保养或更换时可以随时拆装掩膜片，操作简单，不需要对作为外框的承载装置进行再加工，能够提高掩膜片的更换效率，降低溅射镀膜的生产成本。The object of the present invention is to provide a sputter coating machine which binds a mask to a carrying device by binding, and needs to disassemble and disassemble the mask at any time during maintenance or replacement of the mask, and the operation is simple. It is not necessary to rework the carrier device as the outer frame, and the replacement efficiency of the mask can be improved, and the production cost of the sputtering coating can be reduced.
本发明的目的还在于提供一种溅射镀膜方法，利用上述溅射镀膜机进行镀膜，镀膜质量好，且镀膜成本低。Another object of the present invention is to provide a sputtering coating method which is coated by the above-described sputter coating machine, which has good coating quality and low coating cost.
为实现上述目的，本发明提供一种溅射镀膜机，包括：To achieve the above object, the present invention provides a sputter coating machine comprising:
轨道；track;
设于所述轨道上并可沿所述轨道移动的承载装置，所述承载装置包括框形基板、从所述框形基板的内侧与所述框形基板相连的框形凸台、及位于所述框形凸台内侧的框形开口；所述框形基板上设有分布于所述框形凸台四周的数个沟槽；a carrying device disposed on the track and movable along the track, the carrying device comprising a frame-shaped substrate, a frame-shaped boss connected from the inner side of the frame-shaped substrate to the frame-shaped substrate, and located at the a frame-shaped opening on the inner side of the frame-shaped boss; the frame-shaped substrate is provided with a plurality of grooves distributed around the frame-shaped boss;
靶材，与所述框形开口相对应；a target corresponding to the frame opening;
与所述数个沟槽的数量相对应的数个紧固拉紧装置，所述紧固拉紧装置包括可沿所述沟槽移动的滑块、穿过所述滑块内的螺纹孔与其螺纹连接的螺杆、与所述滑块的上表面相配合的压片、及数个螺丝；所述螺杆的一端抵靠于所述框形凸台的外表面上；所述滑块的上表面的形状与所述压片的下表面的形状相配合；所述数个螺丝用于将所述压片与所述滑块固定在一起；a plurality of fastening tensioning devices corresponding to the number of the plurality of grooves, the fastening tensioning device including a slider movable along the groove, a threaded hole passing through the slider and a threaded screw, a pressing piece that cooperates with an upper surface of the slider, and a plurality of screws; one end of the screw abuts against an outer surface of the frame-shaped boss; an upper surface of the slider Forming a shape that matches the shape of the lower surface of the tablet; the plurality of screws are used to secure the tablet to the slider;
数个压条，所述压条具有与所述框形凸台的上表面相配合的形状，其用于在掩膜片被拉紧展平后与所述框形凸台配合，将掩膜片固定于所述压条与框形凸台之间。a plurality of beadings having a shape matching the upper surface of the frame-shaped boss for engaging the frame-shaped boss after the mask is stretched and flattened to fix the mask Between the bead and the frame-shaped boss.
所述沟槽垂直于所述框形凸台的外表面，所述沟槽从所述框形凸台的外表面起始并朝远离所述框形凸台的方向延伸；The groove is perpendicular to an outer surface of the frame-shaped boss, and the groove starts from an outer surface of the frame-shaped boss and extends away from the frame-shaped boss;
所述框形凸台的外表面设有限制机构，所述螺杆的一端固定于该限制机构内，所述限制机构限制所述螺杆的运动方式，使所述螺杆可以转动但不能沿沟槽移动。The outer surface of the frame-shaped boss is provided with a restriction mechanism, one end of the screw is fixed in the restriction mechanism, and the restriction mechanism limits the movement mode of the screw so that the screw can rotate but cannot move along the groove .
所述承载装置还包括与所述框形基板底面相连的凸块，所述凸块的形状与所述轨道的形状相配合；The carrying device further includes a bump connected to a bottom surface of the frame substrate, and the shape of the bump matches a shape of the track;
所述框形凸台的顶表面高于所述滑块的上表面。The top surface of the frame-shaped boss is higher than the upper surface of the slider.
所述框形凸台的上表面具有靠近所述框形开口一侧的框形凸起，所述 压条具有与所述框形凸起相配合的形状；An upper surface of the frame-shaped boss has a frame-shaped protrusion adjacent to a side of the frame-shaped opening, The bead has a shape that cooperates with the frame-shaped protrusion;
所述滑块的上表面设有第一凹槽和第一凸起，所述压片的下表面上设有分别与所述第一凹槽和第一凸起相对应的第二凸起和第二凹槽。The upper surface of the slider is provided with a first groove and a first protrusion, and the lower surface of the pressing piece is provided with a second protrusion corresponding to the first groove and the first protrusion, respectively The second groove.
所述螺杆远离所述框形凸台的一端设有手柄。A handle is disposed at an end of the screw away from the frame-shaped boss.
本发明还提供一种溅射镀膜方法，包括：The invention also provides a sputter coating method, comprising:
提供上述溅射镀膜机与掩膜片；所述掩膜片具有与所述滑块的上表面及所述压片的下表面相配合的形状；同时所述掩膜片上设有多个开口图案，所述多个开口图案对应于所述紧固拉紧装置的框形开口内设置；Providing the above sputter coater and a mask; the mask has a shape matching the upper surface of the slider and the lower surface of the tablet; and the mask is provided with a plurality of openings a pattern, the plurality of opening patterns being disposed corresponding to the frame-shaped opening of the fastening and tensioning device;
将所述掩膜片绑定于所述溅射镀膜机的承载装置上，具体步骤包括：The mask is bound to the carrying device of the sputter coater, and the specific steps include:
将所述掩膜片铺设于所述框形凸台及数个滑块上；Laying the mask sheet on the frame-shaped boss and a plurality of sliders;
将数个压片对应于所述数个滑块放置于所述掩膜片上，所述压片的下表面的形状、掩膜片的形状及滑块的上表面的形状相配合；And placing a plurality of pressing pieces on the mask sheet corresponding to the plurality of sliders, the shape of the lower surface of the pressing sheet, the shape of the mask sheet and the shape of the upper surface of the slider are matched;
采用数个螺丝将数个压片分别与数个滑块固定在一起；Several pieces of screws are respectively fixed with several sliders by using a plurality of screws;
分别转动数个螺杆，转动的过程中保持所述数个螺杆的一端抵靠于所述框形凸台的外表面上，即保持所述数个螺杆的位置不动，此时所述数个滑块分别沿数个沟槽朝远离所述框形凸台的方向移动，使所述掩膜片朝四周被拉紧，所述掩膜片位于所述框形凸台及框形开口上的部分被拉紧展平；Rotating a plurality of screws respectively, and maintaining one end of the plurality of screws against the outer surface of the frame-shaped boss during the rotation, that is, keeping the positions of the plurality of screws stationary, at this time, the plurality of screws The sliders are respectively moved along a plurality of grooves away from the frame-shaped bosses, so that the mask sheets are pulled toward the periphery, and the mask sheets are located on the frame-shaped bosses and the frame-shaped openings. Partially stretched and flattened;
将数个压条分别对应于所述框形凸台的四边放置于所述掩膜片上并压紧，使所述掩膜片固定于所述压条与框形凸台之间，完成掩膜片在承载装置上的绑定；A plurality of strips are respectively placed on the mask sheet corresponding to the four sides of the frame-shaped boss and pressed, so that the mask sheet is fixed between the bead and the frame-shaped boss to complete the mask sheet. Binding on the carrier device;
提供待镀膜基板，将所述待镀膜基板放置于所述掩膜片上对应于数个压条内侧的区域，使所述承载装置沿所述轨道移动并从靶材上方经过，所述承载装置从靶材上方经过的过程中，从靶材上溅射出来的材料从所述框形开口进入所述掩膜片的数个开口图案中，最终沉积到所述待镀膜基板上形成具有图案的薄膜。Providing a substrate to be coated, placing the substrate to be coated on an area corresponding to a plurality of inner sides of the bead on the mask, moving the carrying device along the track and passing over the target, the carrying device During the process of passing over the target, the material sputtered from the target enters the plurality of opening patterns of the mask from the frame opening, and finally deposits onto the substrate to be coated to form a patterned film. .
所述掩膜片的材料为因瓦合金。The material of the mask is Invar.
所述滑块的上表面设有第一凹槽和第一凸起，所述压片的下表面上设有分别与所述第一凹槽和第一凸起相对应的第二凸起和第二凹槽；所述掩膜片具有与所述第一凹槽和第二凸起相对应的第三凹陷部以及与所述第一凸起和第二凹槽相对应的第三凸起部；所述压片、掩膜片及滑块压合在一起时，所述第一凹槽、第二凸起及第三凹陷部相配合，所述第一凸起、第二凹槽及第三凸起部相配合，使得所述掩膜片被压合并固定于所述压片与滑块之间。The upper surface of the slider is provided with a first groove and a first protrusion, and the lower surface of the pressing piece is provided with a second protrusion corresponding to the first groove and the first protrusion, respectively a second groove; the mask has a third recess corresponding to the first groove and the second protrusion; and a third protrusion corresponding to the first protrusion and the second groove When the pressing piece, the mask piece and the slider are pressed together, the first groove, the second protrusion and the third recess part cooperate, the first protrusion and the second groove and The third raised portion cooperates such that the mask is pressed and fixed between the pressing piece and the slider.
所述掩膜片上的第三凹陷部与第三凸起部采用冲压方式形成。 The third recessed portion and the third raised portion on the mask sheet are formed by stamping.
在掩膜片的绑定过程中，同时转动位于掩膜片的相对两侧的紧固拉紧装置中的螺杆，使掩膜片两侧的滑块同时朝远离框形凸台的方向移动，使掩膜片的两侧同时被拉紧。During the bonding process of the mask, the screws in the fastening tensioning devices on opposite sides of the mask are simultaneously rotated, so that the sliders on both sides of the mask are simultaneously moved away from the frame-shaped boss. Both sides of the mask are simultaneously tensioned.
本发明还提供一种溅射镀膜机，包括：The invention also provides a sputter coating machine comprising:
轨道；track;
设于所述轨道上并可沿所述轨道移动的承载装置，所述承载装置包括框形基板、从所述框形基板的内侧与所述框形基板相连的框形凸台、及位于所述框形凸台内侧的框形开口；所述框形基板上设有分布于所述框形凸台四周的数个沟槽；a carrying device disposed on the track and movable along the track, the carrying device comprising a frame-shaped substrate, a frame-shaped boss connected from the inner side of the frame-shaped substrate to the frame-shaped substrate, and located at the a frame-shaped opening on the inner side of the frame-shaped boss; the frame-shaped substrate is provided with a plurality of grooves distributed around the frame-shaped boss;
靶材，与所述框形开口相对应；a target corresponding to the frame opening;
与所述数个沟槽的数量相对应的数个紧固拉紧装置，所述紧固拉紧装置包括可沿所述沟槽移动的滑块、穿过所述滑块内的螺纹孔与其螺纹连接的螺杆、与所述滑块的上表面相配合的压片、及数个螺丝；所述螺杆的一端抵靠于所述框形凸台的外表面上；所述滑块的上表面的形状与所述压片的下表面的形状相配合；所述数个螺丝用于将所述压片与所述滑块固定在一起；a plurality of fastening tensioning devices corresponding to the number of the plurality of grooves, the fastening tensioning device including a slider movable along the groove, a threaded hole passing through the slider and a threaded screw, a pressing piece that cooperates with an upper surface of the slider, and a plurality of screws; one end of the screw abuts against an outer surface of the frame-shaped boss; an upper surface of the slider Forming a shape that matches the shape of the lower surface of the tablet; the plurality of screws are used to secure the tablet to the slider;
数个压条，所述压条具有与所述框形凸台的上表面相配合的形状，其用于在掩膜片被拉紧展平后与所述框形凸台配合，将掩膜片固定于所述压条与框形凸台之间；a plurality of beadings having a shape matching the upper surface of the frame-shaped boss for engaging the frame-shaped boss after the mask is stretched and flattened to fix the mask Between the bead and the frame-shaped boss;
其中，所述沟槽垂直于所述框形凸台的外表面，所述沟槽从所述框形凸台的外表面起始并朝远离所述框形凸台的方向延伸；Wherein the groove is perpendicular to an outer surface of the frame-shaped boss, the groove starting from an outer surface of the frame-shaped boss and extending away from the frame-shaped boss;
所述框形凸台的外表面设有限制机构，所述螺杆的一端固定于该限制机构内，所述限制机构限制所述螺杆的运动方式，使所述螺杆可以转动但不能沿沟槽移动；The outer surface of the frame-shaped boss is provided with a restriction mechanism, one end of the screw is fixed in the restriction mechanism, and the restriction mechanism limits the movement mode of the screw so that the screw can rotate but cannot move along the groove ;
其中，所述承载装置还包括与所述框形基板底面相连的凸块，所述凸块的形状与所述轨道的形状相配合；The carrying device further includes a bump connected to a bottom surface of the frame substrate, and the shape of the bump matches a shape of the track;
所述框形凸台的顶表面高于所述滑块的上表面；The top surface of the frame-shaped boss is higher than the upper surface of the slider;
其中，所述框形凸台的上表面具有靠近所述框形开口一侧的框形凸起，所述压条具有与所述框形凸起相配合的形状；Wherein the upper surface of the frame-shaped boss has a frame-shaped protrusion adjacent to a side of the frame-shaped opening, and the bead has a shape matching the frame-shaped protrusion;
所述滑块的上表面设有第一凹槽和第一凸起，所述压片的下表面上设有分别与所述第一凹槽和第一凸起相对应的第二凸起和第二凹槽；The upper surface of the slider is provided with a first groove and a first protrusion, and the lower surface of the pressing piece is provided with a second protrusion corresponding to the first groove and the first protrusion, respectively Second groove;
其中，所述螺杆远离所述框形凸台的一端设有手柄。Wherein, the screw is provided with a handle away from an end of the frame-shaped boss.
本发明的有益效果：本发明的溅射镀膜机采用绑定的方式将掩膜片绑定在承载装置上，并在掩膜片的四周设置紧固拉紧装置，既能达到从四周 对掩膜片进行固定的目的，也能达到拉紧展平的目的，对掩膜片的拉紧展平效果能达到现有的掩膜板张网机的拉紧展平效果且不需要使用掩膜板张网机，紧固拉紧装置及掩膜片上均设有凹凸结构，对掩膜片进行固定时不会出现侧滑的现象，由于掩膜片与承载装置之间的连接方式为可拆卸连接，因此需要对掩膜片进行保养或更换时可以随时拆装掩膜片，操作简单，不需要对作为外框的承载装置进行再加工，能够提高掩膜片的更换效率，降低溅射镀膜的生产成本。本发明的溅射镀膜方法利用上述溅射镀膜机进行镀膜，镀膜质量好，且镀膜成本低。The invention has the beneficial effects that the sputter coating machine of the invention binds the mask sheet to the carrying device by binding, and provides a fastening tensioning device around the mask sheet, which can reach the surrounding area. The purpose of fixing the mask can also achieve the purpose of tensioning and flattening, and the tensioning and flattening effect of the mask can achieve the tensioning and flattening effect of the existing masking machine and does not need to be used. The masking plate stretching machine, the fastening tensioning device and the masking film are all provided with a concave-convex structure, and the side sliding phenomenon does not occur when the shielding film is fixed, because the connection manner between the shielding film and the carrying device For detachable connection, it is necessary to disassemble the mask at any time during maintenance or replacement of the mask. The operation is simple, and it is not necessary to rework the carrying device as the outer frame, which can improve the replacement efficiency of the mask and reduce the efficiency of the mask. The production cost of sputter coating. The sputter coating method of the present invention is coated by the above-described sputter coater, and the quality of the coating is good, and the cost of the coating is low.
为了能更进一步了解本发明的特征以及技术内容，请参阅以下有关本发明的详细说明与附图，然而附图仅提供参考与说明用，并非用来对本发明加以限制。The detailed description of the present invention and the accompanying drawings are to be understood,
附图说明DRAWINGS
下面结合附图，通过对本发明的具体实施方式详细描述，将使本发明的技术方案及其它有益效果显而易见。The technical solutions and other advantageous effects of the present invention will be apparent from the following detailed description of embodiments of the invention.
附图中，In the drawings,
图1为本发明的溅射镀膜机绑定掩膜片前的俯视示意图；1 is a top plan view of a sputter coater of the present invention before being bonded to a mask;
图2为图1的溅射镀膜机的剖视示意图；Figure 2 is a schematic cross-sectional view of the sputter coater of Figure 1;
图3为本发明的溅射镀膜机绑定掩膜片后的结构示意图；3 is a schematic structural view of the sputter coating machine of the present invention after binding a mask;
图4为本发明的溅射镀膜机中的紧固拉紧装置绑定掩膜片后的剖视示意图；4 is a cross-sectional view showing the fastening device of the sputter coating machine of the present invention after binding a mask;
图5为绑定于本发明的溅射镀膜机中的掩膜片的俯视示意图；Figure 5 is a top plan view of a mask sheet bonded to the sputter coater of the present invention;
图6为绑定于本发明的溅射镀膜机中的掩膜片的侧视示意图；Figure 6 is a side elevational view of a mask sheet bonded to a sputter coater of the present invention;
图7为本发明的溅射镀膜方法的流程图。Figure 7 is a flow chart of a sputter coating method of the present invention.
具体实施方式Detailed ways
为更进一步阐述本发明所采取的技术手段及其效果，以下结合本发明的优选实施例及其附图进行详细描述。In order to further clarify the technical means and effects of the present invention, the following detailed description will be made in conjunction with the preferred embodiments of the invention and the accompanying drawings.
请参阅图1至图6，本发明提供一种溅射镀膜机，包括：Referring to FIG. 1 to FIG. 6, the present invention provides a sputter coating machine, comprising:
轨道10； Track 10;
设于所述轨道10上并可沿所述轨道10移动的承载装置20，所述承载装置20包括框形基板21、从所述框形基板21的内侧与所述框形基板21相连的框形凸台22、及位于所述框形凸台22内侧的框形开口23；所述框形基板21上设有分布于所述框形凸台22四周的数个沟槽215； A carrier device 20 disposed on the rail 10 and movable along the rail 10, the carrier device 20 includes a frame substrate 21, and a frame connected from the inner side of the frame substrate 21 to the frame substrate 21. a convex boss 22, and a frame-shaped opening 23 located inside the frame-shaped boss 22; the frame-shaped substrate 21 is provided with a plurality of grooves 215 distributed around the frame-shaped boss 22;
靶材30，与所述框形开口23相对应；a target 30 corresponding to the frame-shaped opening 23;
与所述数个沟槽215的数量相对应的数个紧固拉紧装置40，所述紧固拉紧装置40包括可沿所述沟槽215移动的滑块41、穿过所述滑块41内的螺纹孔与其螺纹连接的螺杆42、与所述滑块41的上表面相配合的压片43、及数个螺丝44；所述螺杆42的一端抵靠于所述框形凸台22的外表面上；所述滑块41的上表面的形状与所述压片43的下表面的形状相配合；所述数个螺丝44用于将所述压片43与所述滑块41固定在一起；a plurality of fastening tensioning devices 40 corresponding to the number of the plurality of grooves 215, the fastening tensioning device 40 including a slider 41 movable along the groove 215, passing through the slider a threaded hole in the 41 is screwed to the threaded rod 42, a pressing piece 43 matching the upper surface of the slider 41, and a plurality of screws 44; one end of the screw 42 abuts against the frame-shaped boss 22 On the outer surface; the shape of the upper surface of the slider 41 matches the shape of the lower surface of the pressing piece 43; the plurality of screws 44 are used to fix the pressing piece 43 to the slider 41 Together
数个压条50，所述压条50具有与所述框形凸台22的上表面相配合的形状，其用于在掩膜片60被拉紧展平后与所述框形凸台22配合，将掩膜片60固定于所述压条50与框形凸台22之间。a plurality of strips 50 having a shape matching the upper surface of the frame-shaped boss 22 for mating with the frame-shaped boss 22 after the mask sheet 60 is stretched and flattened, The mask sheet 60 is fixed between the bead 50 and the frame-shaped boss 22.
具体地，本发明的溅射镀膜机是在传统的溅射镀膜机的基础上进行的改进，所述承载装置20在传统的溅射镀膜机中用作待镀膜基板的承载机构，在溅射镀膜过程中所述承载装置20沿轨道10移动，并在移动的过程中完成镀膜制程。Specifically, the sputter coater of the present invention is an improvement based on a conventional sputter coater which is used as a carrier mechanism of a substrate to be coated in a conventional sputter coater, in sputtering The carrier device 20 moves along the track 10 during the coating process and completes the coating process during the movement.
优选地，所述框形基板21与框形凸台22一体成型。Preferably, the frame-shaped substrate 21 is integrally formed with the frame-shaped boss 22 .
具体地，所述螺丝44为螺钉。Specifically, the screw 44 is a screw.
具体地，所述沟槽215垂直于所述框形凸台22的外表面，所述沟槽215从所述框形凸台22的外表面起始并朝远离所述框形凸台22的方向延伸。Specifically, the groove 215 is perpendicular to the outer surface of the frame-shaped boss 22, and the groove 215 starts from the outer surface of the frame-shaped boss 22 and faces away from the frame-shaped boss 22. The direction extends.
具体地，所述框形凸台22的外表面设有限制机构(未图示)，所述螺杆42的一端固定于该限制机构内，所述限制机构限制所述螺杆42的运动方式，使所述螺杆42可以转动但不能沿沟槽215移动。Specifically, an outer surface of the frame-shaped boss 22 is provided with a restriction mechanism (not shown), and one end of the screw 42 is fixed in the restriction mechanism, and the restriction mechanism limits the movement mode of the screw 42 so that The screw 42 can rotate but cannot move along the groove 215.
具体地，所述承载装置20还包括与所述框形基板21底面相连的凸块25，所述凸块25的形状与所述轨道10的形状相配合。Specifically, the carrying device 20 further includes a bump 25 connected to the bottom surface of the frame substrate 21, and the shape of the bump 25 matches the shape of the rail 10.
具体地，所述框形凸台22的顶表面高于所述滑块41的上表面，从而可以使数个紧固拉紧装置40中的数个滑块41分别在较低位置从掩膜片60的四条边对其进行拉紧，使掩膜片60位于所述框形凸台22及框形开口23上的部分被拉紧展平。Specifically, the top surface of the frame-shaped boss 22 is higher than the upper surface of the slider 41, so that the plurality of sliders 41 of the plurality of fastening and tensioning devices 40 can be respectively removed from the mask at a lower position. The four sides of the sheet 60 are tensioned so that the portion of the mask sheet 60 on the frame-shaped boss 22 and the frame-shaped opening 23 is stretched and flattened.
具体地，所述框形凸台22的上表面具有靠近所述框形开口23一侧的框形凸起221，所述压条50具有与所述框形凸起221相配合的形状。Specifically, the upper surface of the frame-shaped boss 22 has a frame-shaped protrusion 221 near the side of the frame-shaped opening 23, and the bead 50 has a shape that matches the frame-shaped protrusion 221.
具体地，如图4所示，所述滑块41的上表面设有第一凹槽411和第一凸起412，所述压片43的下表面上设有分别与所述第一凹槽411和第一凸起412相对应的第二凸起431和第二凹槽432；在对掩膜片60进行拉紧展平的过程中，所述掩膜片60被压合于所述滑块41与压片43之间，即固定于所述滑块41上，当所述数个紧固拉紧装置40中的滑块41均朝远离所述 框形凸台22的方向移动时，所述掩膜片60的四周均被朝外拉紧，从而使所述掩膜片60中央位于所述框形凸台22及框形开口23上的部分被拉紧展平。Specifically, as shown in FIG. 4, the upper surface of the slider 41 is provided with a first groove 411 and a first protrusion 412, and the lower surface of the pressing piece 43 is respectively provided with the first groove a second protrusion 431 and a second groove 432 corresponding to the first protrusion 412; the mask sheet 60 is pressed against the slide during the tensioning and flattening of the mask sheet 60 Between the block 41 and the pressing piece 43, that is, fixed to the slider 41, when the sliders 41 in the plurality of fastening and tensioning devices 40 are all facing away from the When the direction of the frame-shaped boss 22 is moved, the periphery of the masking piece 60 is pulled outward, so that the center of the masking piece 60 is located on the frame-shaped boss 22 and the frame-shaped opening 23. Tightened and flattened.
优选地，所述滑块41在所述框形基板21上的垂直投影面积与所述压片43在所述框形基板21上的垂直投影面积相同。Preferably, the vertical projected area of the slider 41 on the frame substrate 21 is the same as the vertical projected area of the pressing piece 43 on the frame substrate 21.
具体地，所述螺杆42远离所述框形凸台22的一端设有手柄425，以方便操作人员通过旋拧手柄425来转动螺杆42。Specifically, a handle 425 is disposed at one end of the screw 42 away from the frame-shaped boss 22 to facilitate an operator to rotate the screw 42 by screwing the handle 425.
本发明的溅射镀膜机采用绑定的方式将掩膜片60绑定在承载装置20上，并在掩膜片60的四周设置紧固拉紧装置40，既能达到从四周对掩膜片60进行固定的目的，也能达到拉紧展平的目的，对掩膜片60的拉紧展平效果能达到现有的掩膜板张网机的拉紧展平效果且不需要使用掩膜板张网机，紧固拉紧装置40及掩膜片60上均设有凹凸结构，对掩膜片60进行固定时不会出现侧滑的现象，由于掩膜片60与承载装置20之间的连接方式为可拆卸连接，因此需要对掩膜片60进行保养或更换时可以随时拆装掩膜片60，操作简单，不需要对作为外框的承载装置20进行再加工，能够提高掩膜片60的更换效率，降低溅射镀膜的生产成本。The sputter coating machine of the present invention binds the mask sheet 60 to the carrying device 20 in a binding manner, and provides a fastening tensioning device 40 around the mask sheet 60, so as to achieve the mask from the periphery. For the purpose of fixing 60, the purpose of tightening and flattening can also be achieved, and the tensioning and flattening effect of the mask sheet 60 can achieve the tensioning and flattening effect of the existing masking machine and does not require the use of a mask. The plate tensioning machine, the fastening tensioning device 40 and the masking piece 60 are all provided with a concave-convex structure, and the side sliding phenomenon does not occur when the masking piece 60 is fixed, due to the gap between the masking piece 60 and the carrying device 20 The connection method is a detachable connection. Therefore, the mask 60 can be detached and detached at any time during maintenance or replacement of the mask 60, and the operation is simple, and the carrier 20 as the outer frame is not required to be reworked, and the mask can be improved. The replacement efficiency of the sheet 60 reduces the production cost of the sputter coating.
请参阅图7，同时参阅图1至图6，基于上述溅射镀膜机，本发明还提供一种溅射镀膜方法，包括：Referring to FIG. 7 and referring to FIG. 1 to FIG. 6 , the present invention further provides a sputter coating method based on the above sputter coating machine, comprising:
步骤S1、提供上述溅射镀膜机与掩膜片60；所述掩膜片60具有与所述滑块41的上表面及所述压片43的下表面相配合的形状；同时所述掩膜片60上设有多个开口图案65，所述多个开口图案65对应于所述紧固拉紧装置40的框形开口23内设置；Step S1, providing the sputter coater and the mask sheet 60; the mask sheet 60 has a shape matching the upper surface of the slider 41 and the lower surface of the pressing sheet 43; and the mask The sheet 60 is provided with a plurality of opening patterns 65, which are disposed corresponding to the frame-shaped openings 23 of the fastening and tensioning device 40;
将所述掩膜片60绑定于所述溅射镀膜机的承载装置20上，具体步骤包括：The masking sheet 60 is bound to the carrying device 20 of the sputter coating machine, and the specific steps include:
将所述掩膜片60铺设于所述框形凸台22及数个滑块41上；Laying the mask sheet 60 on the frame-shaped boss 22 and the plurality of sliders 41;
将数个压片43对应于所述数个滑块41放置于所述掩膜片60上，所述压片43的下表面的形状、掩膜片60的形状及滑块41的上表面的形状相配合；A plurality of pressing pieces 43 are placed on the mask sheet 60 corresponding to the plurality of sliders 41, the shape of the lower surface of the pressing sheet 43, the shape of the mask sheet 60, and the upper surface of the slider 41. Shape matching;
采用数个螺丝44将数个压片43分别与数个滑块41固定在一起；a plurality of screws 44 are used to fix a plurality of pressing pieces 43 to a plurality of sliders 41;
分别转动数个螺杆42，转动的过程中保持所述数个螺杆42的一端抵靠于所述框形凸台22的外表面上，即保持所述数个螺杆42的位置不动，此时所述数个滑块41分别沿数个沟槽215朝远离所述框形凸台22的方向移动，使所述掩膜片60朝四周被拉紧，所述掩膜片60位于所述框形凸台22及框形开口23上的部分被拉紧展平； The plurality of screws 42 are respectively rotated, and one end of the plurality of screws 42 is held against the outer surface of the frame-shaped boss 22 during the rotation, that is, the positions of the plurality of screws 42 are kept stationary. The plurality of sliders 41 are respectively moved along a plurality of grooves 215 away from the frame-shaped boss 22, so that the mask sheet 60 is pulled toward the periphery, and the mask sheet 60 is located in the frame. The portion of the shaped boss 22 and the frame-shaped opening 23 is tensioned and flattened;
将数个压条50分别对应于所述框形凸台22的四边放置于所述掩膜片60上并压紧，使所述掩膜片60固定于所述压条50与框形凸台22之间，完成掩膜片60在承载装置20上的绑定。A plurality of strips 50 are respectively placed on the mask sheet 60 corresponding to the four sides of the frame-shaped boss 22 and pressed to fix the mask sheet 60 to the bead 50 and the frame-shaped boss 22 The binding of the mask 60 on the carrier 20 is completed.
步骤S2、提供待镀膜基板(未图示)，将所述待镀膜基板放置于所述掩膜片60上对应于数个压条50内侧的区域，使所述承载装置20沿所述轨道10移动并从靶材30上方经过，所述承载装置20从靶材30上方经过的过程中，从靶材30上溅射出来的材料从所述框形开口23进入所述掩膜片60的数个开口图案65中，最终沉积到所述待镀膜基板上形成具有图案的薄膜。Step S2, providing a substrate to be coated (not shown), placing the substrate to be coated on an area of the mask sheet 60 corresponding to the inner side of the plurality of strips 50, and moving the carrying device 20 along the rail 10 And passing over the target 30, the material sputtered from the target 30 enters the mask sheet 60 from the frame-shaped opening 23 during the passage of the carrier device 20 from above the target 30. In the opening pattern 65, a film having a pattern is finally deposited on the substrate to be coated.
具体地，所述掩膜片60的材料为因瓦合金(invar)，该材料具有较高的机械强度，使得所述掩膜片60足以支撑所述待镀膜基板。具体的，所述待镀膜基板通常为玻璃基板。Specifically, the material of the mask sheet 60 is invar, which has high mechanical strength, so that the mask sheet 60 is sufficient to support the substrate to be coated. Specifically, the substrate to be coated is usually a glass substrate.
具体地，所述掩膜片60的厚度为2μm。Specifically, the mask sheet 60 has a thickness of 2 μm.
具体地，如图4所示，所述滑块41的上表面设有第一凹槽411和第一凸起412，所述压片43的下表面上设有分别与所述第一凹槽411和第一凸起412相对应的第二凸起431和第二凹槽432；所述掩膜片60具有与所述第一凹槽411和第二凸起431相对应的第三凹陷部61以及与所述第一凸起412和第二凹槽432相对应的第三凸起部62；所述压片43、掩膜片60及滑块41压合在一起时，所述第一凹槽411、第二凸起431及第三凹陷部61相配合，所述第一凸起412、第二凹槽432及第三凸起部62相配合，使得所述掩膜片60被压合并固定于所述压片43与滑块41之间。Specifically, as shown in FIG. 4, the upper surface of the slider 41 is provided with a first groove 411 and a first protrusion 412, and the lower surface of the pressing piece 43 is respectively provided with the first groove a second protrusion 431 and a second groove 432 corresponding to the first protrusion 412; the mask sheet 60 has a third recess corresponding to the first groove 411 and the second protrusion 431 And a third protrusion 62 corresponding to the first protrusion 412 and the second groove 432; when the pressing piece 43, the mask sheet 60 and the slider 41 are pressed together, the first The groove 411, the second protrusion 431 and the third recess 61 cooperate, and the first protrusion 412, the second groove 432 and the third protrusion 62 cooperate, so that the mask sheet 60 is pressed. The combination is fixed between the pressing piece 43 and the slider 41.
具体地，所述掩膜片60上的第三凹陷部61与第三凸起部62采用冲压方式形成。Specifically, the third recessed portion 61 and the third raised portion 62 on the mask sheet 60 are formed by punching.
具体地，在掩膜片60的绑定过程中，同时转动位于掩膜片60的相对两侧的紧固拉紧装置40中的螺杆42，使掩膜片60两侧的滑块41同时朝远离框形凸台22的方向移动，使掩膜片60的两侧同时被拉紧，避免仅从一侧拉紧造成掩膜片60被拉偏。Specifically, during the bonding process of the mask sheet 60, the screws 42 in the fastening tensioning device 40 on opposite sides of the mask sheet 60 are simultaneously rotated, so that the sliders 41 on both sides of the mask sheet 60 are simultaneously turned toward Moving away from the direction of the frame-shaped boss 22, both sides of the masking piece 60 are simultaneously tightened, so as to prevent the masking piece 60 from being pulled off by being pulled only from one side.
具体地，在掩膜片60被紧固拉紧装置40拉紧展平后，通过压条50对掩膜片60进行进一步固定，可以保证掩膜片60的位置固定并使得掩膜片60上设有开口图案65的区域持久保持拉紧展平状态。Specifically, after the mask sheet 60 is stretched and flattened by the fastening device 40, the mask sheet 60 is further fixed by the bead 50, so that the position of the mask sheet 60 is fixed and the mask sheet 60 is fixed. The area having the opening pattern 65 is maintained in a stretched flat state for a long time.
在溅射镀膜制程中，表面不够平整的掩膜片与待镀膜基板之间会产生缝隙，导致出现镀膜图案大于掩膜片上的开口图案的情形，本发明在采用紧固拉紧装置40对掩膜片60进行拉紧展平后，又采用压条50对掩膜片60进行进一步固定，使得掩膜片60上位于压条50内侧的区域极为平整，在所述掩膜片60上放置待镀膜基板后，待镀膜基板与掩膜片60紧密贴合不 留任何缝隙，避免出现镀膜图案大于掩膜片60上的开口图案65的情形，提高镀膜质量。In the sputter coating process, a gap is formed between the mask sheet having a surface that is not flat enough and the substrate to be coated, resulting in a situation in which the plating pattern is larger than the opening pattern on the mask sheet, and the present invention employs a pair of fastening and tensioning devices 40. After the mask 60 is stretched and flattened, the mask 60 is further fixed by the bead 50, so that the area of the mask 60 on the inner side of the bead 50 is extremely flat, and the mask 60 is placed on the mask 60. After the substrate, the substrate to be coated is closely attached to the mask sheet 60. Any gap is left to avoid the situation that the plating pattern is larger than the opening pattern 65 on the mask sheet 60, and the coating quality is improved.
本发明的溅射镀膜方法利用上述溅射镀膜机将掩膜片60绑定在承载装置20上，并在掩膜片60的四周设置紧固拉紧装置40，既能达到从四周对掩膜片60进行固定的目的，也能达到拉紧展平的目的，对掩膜片60的拉紧展平效果能达到现有的掩膜板张网机的拉紧展平效果且不需要使用掩膜板张网机，紧固拉紧装置40及掩膜片60上均设有凹凸结构，对掩膜片60进行固定时不会出现侧滑的现象，由于掩膜片60与承载装置20之间的连接方式为可拆卸连接，因此需要对掩膜片60进行保养或更换时可以随时拆装掩膜片60，操作简单，不需要对作为外框的承载装置20进行再加工，能够提高掩膜片60的更换效率，降低溅射镀膜的生产成本。The sputter coating method of the present invention binds the mask sheet 60 to the carrier device 20 by using the above-described sputter coater, and provides a fastening tensioning device 40 around the mask sheet 60, thereby achieving the mask from the periphery. The purpose of fixing the sheet 60 is also to achieve the purpose of tensioning and flattening, and the tensioning and flattening effect of the masking sheet 60 can achieve the tensioning and flattening effect of the existing masking sheet stretching machine without using masking. The film stretcher 40, the fastening tensioning device 40 and the mask 60 are provided with a concave-convex structure, and the side of the mask 60 is not fixed when the mask 60 is fixed, because the mask 60 and the carrying device 20 The connection mode is detachable. Therefore, the mask 60 can be attached and detached at any time during maintenance or replacement of the mask 60, and the operation is simple, and the carrier 20 as the outer frame is not required to be reworked, and the mask can be improved. The replacement efficiency of the diaphragm 60 reduces the production cost of the sputter coating.
综上所述，本发明提供一种溅射镀膜机及溅射镀膜方法。本发明的溅射镀膜机采用绑定的方式将掩膜片绑定在承载装置上，并在掩膜片的四周设置紧固拉紧装置，既能达到从四周对掩膜片进行固定的目的，也能达到拉紧展平的目的，对掩膜片的拉紧展平效果能达到现有的掩膜板张网机的拉紧展平效果且不需要使用掩膜板张网机，紧固拉紧装置及掩膜片上均设有凹凸结构，对掩膜片进行固定时不会出现侧滑的现象，由于掩膜片与承载装置之间的连接方式为可拆卸连接，因此需要对掩膜片进行保养或更换时可以随时拆装掩膜片，操作简单，不需要对作为外框的承载装置进行再加工，能够提高掩膜片的更换效率，降低溅射镀膜的生产成本。本发明的溅射镀膜方法利用上述溅射镀膜机进行镀膜，镀膜质量好，且镀膜成本低。In summary, the present invention provides a sputter coating machine and a sputter coating method. The sputter coating machine of the invention binds the mask to the carrying device by binding, and provides a fastening device around the mask to achieve the purpose of fixing the mask from all sides. It can also achieve the purpose of tightening and flattening. The tensioning and flattening effect of the mask can achieve the tensioning and flattening effect of the existing masking machine and does not require the use of a masking machine. Both the solid tensioning device and the mask are provided with a concave-convex structure, and the side of the mask is not fixed when the mask is fixed. Since the connection between the mask and the carrying device is detachable, it is necessary to When the mask is repaired or replaced, the mask can be disassembled at any time, and the operation is simple. It is not necessary to rework the carrying device as the outer frame, which can improve the replacement efficiency of the mask and reduce the production cost of the sputter coating. The sputter coating method of the present invention is coated by the above-described sputter coater, and the quality of the coating is good, and the cost of the coating is low.
以上所述，对于本领域的普通技术人员来说，可以根据本发明的技术方案和技术构思作出其他各种相应的改变和变形，而所有这些改变和变形都应属于本发明权利要求的保护范围。 In the above, various other changes and modifications can be made in accordance with the technical solutions and technical concept of the present invention, and all such changes and modifications are within the scope of the claims of the present invention. .

Claims (11)

  1. 一种溅射镀膜机，包括：A sputter coating machine comprising:
    轨道；track;
    设于所述轨道上并可沿所述轨道移动的承载装置，所述承载装置包括框形基板、从所述框形基板的内侧与所述框形基板相连的框形凸台、及位于所述框形凸台内侧的框形开口；所述框形基板上设有分布于所述框形凸台四周的数个沟槽；a carrying device disposed on the track and movable along the track, the carrying device comprising a frame-shaped substrate, a frame-shaped boss connected from the inner side of the frame-shaped substrate to the frame-shaped substrate, and located at the a frame-shaped opening on the inner side of the frame-shaped boss; the frame-shaped substrate is provided with a plurality of grooves distributed around the frame-shaped boss;
    靶材，与所述框形开口相对应；a target corresponding to the frame opening;
    与所述数个沟槽的数量相对应的数个紧固拉紧装置，所述紧固拉紧装置包括可沿所述沟槽移动的滑块、穿过所述滑块内的螺纹孔与其螺纹连接的螺杆、与所述滑块的上表面相配合的压片、及数个螺丝；所述螺杆的一端抵靠于所述框形凸台的外表面上；所述滑块的上表面的形状与所述压片的下表面的形状相配合；所述数个螺丝用于将所述压片与所述滑块固定在一起；a plurality of fastening tensioning devices corresponding to the number of the plurality of grooves, the fastening tensioning device including a slider movable along the groove, a threaded hole passing through the slider and a threaded screw, a pressing piece that cooperates with an upper surface of the slider, and a plurality of screws; one end of the screw abuts against an outer surface of the frame-shaped boss; an upper surface of the slider Forming a shape that matches the shape of the lower surface of the tablet; the plurality of screws are used to secure the tablet to the slider;
    数个压条，所述压条具有与所述框形凸台的上表面相配合的形状，其用于在掩膜片被拉紧展平后与所述框形凸台配合，将掩膜片固定于所述压条与框形凸台之间。a plurality of beadings having a shape matching the upper surface of the frame-shaped boss for engaging the frame-shaped boss after the mask is stretched and flattened to fix the mask Between the bead and the frame-shaped boss.
  2. 如权利要求1所述的溅射镀膜机，其中，所述沟槽垂直于所述框形凸台的外表面，所述沟槽从所述框形凸台的外表面起始并朝远离所述框形凸台的方向延伸；A sputter coater according to claim 1, wherein said groove is perpendicular to an outer surface of said frame-shaped boss, said groove starting from an outer surface of said frame-shaped boss and facing away from Extending the direction of the frame-shaped boss;
    所述框形凸台的外表面设有限制机构，所述螺杆的一端固定于该限制机构内，所述限制机构限制所述螺杆的运动方式，使所述螺杆可以转动但不能沿沟槽移动。The outer surface of the frame-shaped boss is provided with a restriction mechanism, one end of the screw is fixed in the restriction mechanism, and the restriction mechanism limits the movement mode of the screw so that the screw can rotate but cannot move along the groove .
  3. 如权利要求1所述的溅射镀膜机，其中，所述承载装置还包括与所述框形基板底面相连的凸块，所述凸块的形状与所述轨道的形状相配合；The sputter coater of claim 1 , wherein the carrying device further comprises a bump connected to a bottom surface of the frame substrate, the shape of the bump matching the shape of the track;
    所述框形凸台的顶表面高于所述滑块的上表面。The top surface of the frame-shaped boss is higher than the upper surface of the slider.
  4. 如权利要求1所述的溅射镀膜机，其中，所述框形凸台的上表面具有靠近所述框形开口一侧的框形凸起，所述压条具有与所述框形凸起相配合的形状；A sputter coater according to claim 1, wherein an upper surface of said frame-shaped boss has a frame-shaped projection adjacent to a side of said frame-shaped opening, and said bead has a frame-shaped projection The shape of the fit;
    所述滑块的上表面设有第一凹槽和第一凸起，所述压片的下表面上设有分别与所述第一凹槽和第一凸起相对应的第二凸起和第二凹槽。The upper surface of the slider is provided with a first groove and a first protrusion, and the lower surface of the pressing piece is provided with a second protrusion corresponding to the first groove and the first protrusion, respectively The second groove.
  5. 如权利要求1所述的溅射镀膜机，其中，所述螺杆远离所述框形凸 台的一端设有手柄。The sputter coater of claim 1 wherein said screw is away from said frame-shaped projection A handle is provided at one end of the table.
  6. 一种溅射镀膜方法，包括：A sputtering coating method comprising:
    提供如权利要求1所述的溅射镀膜机与掩膜片；所述掩膜片具有与所述滑块的上表面及所述压片的下表面相配合的形状；同时所述掩膜片上设有多个开口图案，所述多个开口图案对应于所述紧固拉紧装置的框形开口内设置；A sputter coater and a mask according to claim 1; wherein the mask has a shape that matches an upper surface of the slider and a lower surface of the tablet; and the mask Providing a plurality of opening patterns, the plurality of opening patterns being disposed corresponding to the frame-shaped opening of the fastening and tensioning device;
    将所述掩膜片绑定于所述溅射镀膜机的承载装置上，具体步骤包括：The mask is bound to the carrying device of the sputter coater, and the specific steps include:
    将所述掩膜片铺设于所述框形凸台及数个滑块上；Laying the mask sheet on the frame-shaped boss and a plurality of sliders;
    将数个压片对应于所述数个滑块放置于所述掩膜片上，所述压片的下表面的形状、掩膜片的形状及滑块的上表面的形状相配合；And placing a plurality of pressing pieces on the mask sheet corresponding to the plurality of sliders, the shape of the lower surface of the pressing sheet, the shape of the mask sheet and the shape of the upper surface of the slider are matched;
    采用数个螺丝将数个压片分别与数个滑块固定在一起；Several pieces of screws are respectively fixed with several sliders by using a plurality of screws;
    分别转动数个螺杆，转动的过程中保持所述数个螺杆的一端抵靠于所述框形凸台的外表面上，即保持所述数个螺杆的位置不动，此时所述数个滑块分别沿数个沟槽朝远离所述框形凸台的方向移动，使所述掩膜片朝四周被拉紧，所述掩膜片位于所述框形凸台及框形开口上的部分被拉紧展平；Rotating a plurality of screws respectively, and maintaining one end of the plurality of screws against the outer surface of the frame-shaped boss during the rotation, that is, keeping the positions of the plurality of screws stationary, at this time, the plurality of screws The sliders are respectively moved along a plurality of grooves away from the frame-shaped bosses, so that the mask sheets are pulled toward the periphery, and the mask sheets are located on the frame-shaped bosses and the frame-shaped openings. Partially stretched and flattened;
    将数个压条分别对应于所述框形凸台的四边放置于所述掩膜片上并压紧，使所述掩膜片固定于所述压条与框形凸台之间，完成掩膜片在承载装置上的绑定；A plurality of strips are respectively placed on the mask sheet corresponding to the four sides of the frame-shaped boss and pressed, so that the mask sheet is fixed between the bead and the frame-shaped boss to complete the mask sheet. Binding on the carrier device;
    提供待镀膜基板，将所述待镀膜基板放置于所述掩膜片上对应于数个压条内侧的区域，使所述承载装置沿所述轨道移动并从靶材上方经过，所述承载装置从所述靶材上方经过的过程中，从靶材上溅射出来的材料从所述框形开口进入所述掩膜片的数个开口图案中，最终沉积到所述待镀膜基板上形成具有图案的薄膜。Providing a substrate to be coated, placing the substrate to be coated on an area corresponding to a plurality of inner sides of the bead on the mask, moving the carrying device along the track and passing over the target, the carrying device During the process of passing over the target, the material sputtered from the target enters the plurality of opening patterns of the mask from the frame-shaped opening, and finally deposits onto the substrate to be coated to form a pattern. Film.
  7. 如权利要求6所述的溅射镀膜方法，其中，所述掩膜片的材料为因瓦合金。The sputter coating method according to claim 6, wherein the material of the mask sheet is Invar.
  8. 如权利要求6所述的溅射镀膜方法，其中，所述滑块的上表面设有第一凹槽和第一凸起，所述压片的下表面上设有分别与所述第一凹槽和第一凸起相对应的第二凸起和第二凹槽；所述掩膜片具有与所述第一凹槽和第二凸起相对应的第三凹陷部以及与所述第一凸起和第二凹槽相对应的第三凸起部；所述压片、掩膜片及滑块压合在一起时，所述第一凹槽、第二凸起及第三凹陷部相配合，所述第一凸起、第二凹槽及第三凸起部相配合，使得所述掩膜片被压合并固定于所述压片与滑块之间。The sputter coating method according to claim 6, wherein the upper surface of the slider is provided with a first groove and a first protrusion, and the lower surface of the pressing piece is provided with the first concave a second protrusion and a second groove corresponding to the first protrusion; the mask sheet has a third recess corresponding to the first groove and the second protrusion, and the first a third protrusion corresponding to the protrusion and the second groove; when the tablet, the mask and the slider are pressed together, the first groove, the second protrusion and the third recess The first protrusion, the second groove and the third protrusion cooperate to make the mask sheet pressed and fixed between the sheet and the slider.
  9. 如权利要求8所述的溅射镀膜方法，其中，所述掩膜片上的第三凹陷部与第三凸起部采用冲压方式形成。 The sputter coating method according to claim 8, wherein the third depressed portion and the third raised portion on the mask sheet are formed by punching.
  10. 如权利要求6所述的溅射镀膜方法，其中，在掩膜片的绑定过程中，同时转动位于掩膜片的相对两侧的紧固拉紧装置中的螺杆，使掩膜片两侧的滑块同时朝远离框形凸台的方向移动，使掩膜片的两侧同时被拉紧。The sputter coating method according to claim 6, wherein in the bonding process of the mask sheet, the screws in the fastening tensioning devices on opposite sides of the mask sheet are simultaneously rotated to make both sides of the mask sheet The slider is simultaneously moved away from the frame-shaped boss, so that both sides of the mask are simultaneously tightened.
  11. 一种溅射镀膜机，包括：A sputter coating machine comprising:
    轨道；track;
    设于所述轨道上并可沿所述轨道移动的承载装置，所述承载装置包括框形基板、从所述框形基板的内侧与所述框形基板相连的框形凸台、及位于所述框形凸台内侧的框形开口；所述框形基板上设有分布于所述框形凸台四周的数个沟槽；a carrying device disposed on the track and movable along the track, the carrying device comprising a frame-shaped substrate, a frame-shaped boss connected from the inner side of the frame-shaped substrate to the frame-shaped substrate, and located at the a frame-shaped opening on the inner side of the frame-shaped boss; the frame-shaped substrate is provided with a plurality of grooves distributed around the frame-shaped boss;
    靶材，与所述框形开口相对应；a target corresponding to the frame opening;
    与所述数个沟槽的数量相对应的数个紧固拉紧装置，所述紧固拉紧装置包括可沿所述沟槽移动的滑块、穿过所述滑块内的螺纹孔与其螺纹连接的螺杆、与所述滑块的上表面相配合的压片、及数个螺丝；所述螺杆的一端抵靠于所述框形凸台的外表面上；所述滑块的上表面的形状与所述压片的下表面的形状相配合；所述数个螺丝用于将所述压片与所述滑块固定在一起；a plurality of fastening tensioning devices corresponding to the number of the plurality of grooves, the fastening tensioning device including a slider movable along the groove, a threaded hole passing through the slider and a threaded screw, a pressing piece that cooperates with an upper surface of the slider, and a plurality of screws; one end of the screw abuts against an outer surface of the frame-shaped boss; an upper surface of the slider Forming a shape that matches the shape of the lower surface of the tablet; the plurality of screws are used to secure the tablet to the slider;
    数个压条，所述压条具有与所述框形凸台的上表面相配合的形状，其用于在掩膜片被拉紧展平后与所述框形凸台配合，将掩膜片固定于所述压条与框形凸台之间；a plurality of beadings having a shape matching the upper surface of the frame-shaped boss for engaging the frame-shaped boss after the mask is stretched and flattened to fix the mask Between the bead and the frame-shaped boss;
    其中，所述沟槽垂直于所述框形凸台的外表面，所述沟槽从所述框形凸台的外表面起始并朝远离所述框形凸台的方向延伸；Wherein the groove is perpendicular to an outer surface of the frame-shaped boss, the groove starting from an outer surface of the frame-shaped boss and extending away from the frame-shaped boss;
    所述框形凸台的外表面设有限制机构，所述螺杆的一端固定于该限制机构内，所述限制机构限制所述螺杆的运动方式，使所述螺杆可以转动但不能沿沟槽移动；The outer surface of the frame-shaped boss is provided with a restriction mechanism, one end of the screw is fixed in the restriction mechanism, and the restriction mechanism limits the movement mode of the screw so that the screw can rotate but cannot move along the groove ;
    其中，所述承载装置还包括与所述框形基板底面相连的凸块，所述凸块的形状与所述轨道的形状相配合；The carrying device further includes a bump connected to a bottom surface of the frame substrate, and the shape of the bump matches a shape of the track;
    所述框形凸台的顶表面高于所述滑块的上表面；The top surface of the frame-shaped boss is higher than the upper surface of the slider;
    其中，所述框形凸台的上表面具有靠近所述框形开口一侧的框形凸起，所述压条具有与所述框形凸起相配合的形状；Wherein the upper surface of the frame-shaped boss has a frame-shaped protrusion adjacent to a side of the frame-shaped opening, and the bead has a shape matching the frame-shaped protrusion;
    所述滑块的上表面设有第一凹槽和第一凸起，所述压片的下表面上设有分别与所述第一凹槽和第一凸起相对应的第二凸起和第二凹槽；The upper surface of the slider is provided with a first groove and a first protrusion, and the lower surface of the pressing piece is provided with a second protrusion corresponding to the first groove and the first protrusion, respectively Second groove;
    其中，所述螺杆远离所述框形凸台的一端设有手柄。 Wherein, the screw is provided with a handle away from an end of the frame-shaped boss.
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Publication number Priority date Publication date Assignee Title
CN110184565A (en) * 2019-05-27 2019-08-30 江苏壹光科技有限公司 OLED Vapor deposition mask plate
CN116083842A (en) * 2023-01-03 2023-05-09 京东方科技集团股份有限公司 Mask plate assembly

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